Energy-saving nozzles and electroplating equipment

Abstract

The present invention discloses an energy-saving nozzle and an electroplating device, wherein the energy-saving nozzle includes a nozzle assembly; the nozzle assembly includes a mounting part, a channel part and a nozzle part, a channel is formed inside the channel part, a reflux port connected to the channel is opened on the side wall of the channel part, one end of the channel part is arranged on the mounting part, the nozzle part is arranged on the mounting part and is located in the channel, the nozzle of the nozzle part extends toward the other end of the channel part, and the nozzle of the nozzle part is opposite to the reflux port. The present application forms a negative pressure difference at the reflux port through the corresponding arrangement of the nozzle of the nozzle part and the reflux port on the channel part, and the electroplating liquid around the nozzle quickly refluxes into the channel through the reflux port, thereby increasing the flow rate of the nozzle during the spraying, and increasing the spraying volume of the nozzle without increasing the power of the pressure pump, with low cost for continuous production, energy saving and environmental protection.

Description

Technical Field

[0001] The present invention relates to the technical field of electroplating production equipment, and in particular to an energy-saving nozzle and an electroplating device. Background Art

[0002] During the processing of circuit boards, they need to be electroplated in a plating tank to increase thickness (commonly known as board electroplating) or conduct holes (commonly known as filling holes). When electroplating in a plating tank, a nozzle is required to spray the plating liquid onto the circuit board throughout the process to achieve efficient electroplating of the circuit board. This process plays a decisive role in the uniformity of copper plating thickening or hole filling of the circuit board.

[0003] In the related art, rows of nozzles are arranged on both sides of the electroplating tank. The electroplating liquid is pressurized by a pump and then sprayed onto the circuit board through the nozzles. However, the existing nozzles have a small spray flow rate during spraying, and the spray flow rate at the outlet is limited. In order to increase the spray flow rate of the nozzle, a high-power pressure pump is required to provide the nozzle with the spray flow rate, which has a high cost for continuous production and causes energy waste. Summary of the invention

[0004] In view of the deficiencies of the prior art, the present invention provides an energy-saving nozzle and an electroplating device.

[0005] An energy-saving nozzle disclosed in the present invention includes a nozzle assembly; the nozzle assembly includes a mounting part, a channel part and a nozzle part, a channel is formed inside the channel part, a return port connected to the channel is opened on the side wall of the channel part, one end of the channel part is arranged on the mounting part, the nozzle part is arranged on the mounting part and is located in the channel, the nozzle of the nozzle part extends toward the other end of the channel part, and the nozzle of the nozzle part is opposite to the return port.

[0006] According to one embodiment of the present invention, the reflux port is rectangular, circular or elliptical.

[0007] According to an embodiment of the present invention, the number of the return openings is at least two, and at least two return openings are arranged around the nozzle of the nozzle member.

[0008] According to one embodiment of the present invention, the energy-saving nozzle further comprises a nozzle seat assembly, the nozzle seat assembly comprises a nozzle seat part and an inflow part connected to the nozzle seat part, the mounting part is arranged on the nozzle seat part, and the nozzle part is connected to the inflow part.

[0009] According to an embodiment of the present invention, the nozzle member cooperates with the inlet member to form an injection flow channel, and the diameter of the injection flow channel gradually decreases from the inlet member toward the nozzle member.

[0010] According to one embodiment of the present invention, a first ring portion is formed at one end of the nozzle member away from the nozzle, and a second ring portion is provided on a side of the nozzle seat member facing the nozzle member. The second ring portion is sleeved on the first ring portion, and the outer diameter of the first ring portion is greater than the inner diameter of the second ring portion.

[0011] According to one embodiment of the present invention, the mounting member is provided with a third ring portion, the third ring portion is arranged outside the second ring portion, and the nozzle seat member is further provided with a fourth ring portion on a side facing the nozzle member, the fourth ring portion is sleeved on the third ring portion, and the inner diameter of the fourth ring portion is smaller than the outer diameter of the third ring portion, so as to achieve the purpose of sealing without using a sealing ring.

[0012] According to one embodiment of the present invention, the nozzle seat assembly also includes at least three first clamping parts, which are sequentially arranged around the periphery of the nozzle seat, and the mounting part forms a second clamping portion corresponding to the at least three first clamping parts, and the second clamping portion is clamped with the first clamping part.

[0013] According to one embodiment of the present invention, the mounting component has a mounting plate and a mounting ring arranged on the mounting plate, one end of the second clamping platform portion is arranged on the inner wall of the mounting ring, and the other end thereof is suspended, and a clamping space is formed between the second clamping platform portion and the mounting plate, and the first clamping platform component is clamped in the clamping space through the position between two adjacent second clamping platforms.

[0014] An electroplating device is characterized in that it includes two nozzle installation lines arranged opposite to each other, each nozzle installation line is respectively installed with a plurality of the above-mentioned energy-saving nozzles, and the plurality of energy-saving nozzles on the two nozzle installation lines are relatively staggered.

[0015] The beneficial effect of the present application is that: through the corresponding arrangement of the nozzle of the nozzle part and the reflux port on the channel part, when the nozzle part is spraying, the plating liquid will pass through the nozzle at high speed and be sprayed along the channel of the channel part. At the same time, a negative pressure difference will be formed in the channel at the reflux port, and the plating liquid around the nozzle will quickly flow back into the channel through the reflux port, and then be sprayed from the channel part to the circuit board along with the jet of plating liquid sprayed from the nozzle; in this way, the flow rate of the nozzle during spraying is increased, and the spraying flow rate of the nozzle is increased without increasing the power of the pressure pump, the cost of continuous production is low, and it is energy-saving and environmentally friendly. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0017] Figure 1 It is a schematic diagram of the cross-sectional structure of the energy-saving nozzle in the embodiment;

[0018] Figure 2 It is a structural schematic diagram of the energy-saving nozzle in the embodiment;

[0019] Figure 3 is a schematic structural diagram of a nozzle assembly in an embodiment;

[0020] Figure 4Schematic diagram of the structure of the nozzle seat assembly in the embodiment;

[0021] Figure 5 A schematic structural diagram of the nozzle holder assembly from another perspective in the embodiment;

[0022] Figure 6 Schematic diagram of the structure of the electroplating device in the embodiment.

[0023] In the drawings, 1-nozzle assembly, 11-mounting member, 12-channel member, 13-nozzle member, 14-injection channel, 111-third ring portion, 112-second clamping platform portion, 113-mounting plate, 114-mounting ring, 121-channel, 122-return port, 123-clamping space, 131-first ring portion;

[0024] 2-nozzle seat assembly, 21-nozzle seat member, 22-inflow member, 23-first clamping member, 211-second ring portion, 212-fourth ring portion, 231-first limiting block, 232-second limiting block;

[0025] 3-Nozzle installation line. DETAILED DESCRIPTION

[0026] The following will disclose multiple embodiments of the present invention with drawings. For the purpose of clear description, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present invention. That is, in some embodiments of the present invention, these practical details are not necessary. In addition, for the purpose of simplifying the drawings, some conventional structures and components will be depicted in a simple schematic manner in the drawings.

[0027] It should be noted that all directional indications such as up, down, left, right, front, back, etc. in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0028] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present invention. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0029] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings:

[0030] Embodiment 1

[0031] Reference Figure 1 and Figure 2 , Figure 1 It is a schematic diagram of the cross-sectional structure of the energy-saving nozzle in the embodiment, Figure 2 Schematic diagram of the structure of the energy-saving nozzle in the embodiment. The energy-saving nozzle in the embodiment comprises a nozzle assembly 1 and a nozzle seat assembly 2, and one end of the nozzle assembly 1 is connected to one end of the nozzle seat assembly 2.

[0032] Reference Figure 1 , Figure 2 and Figure 3 , Figure 3 1 is a schematic diagram of the structure of the nozzle assembly in the embodiment. The nozzle assembly 1 comprises a mounting member 11, a channel member 12 and a nozzle member 13. A channel 121 is formed inside the channel member 12. A reflux port 122 communicating with the channel 121 is provided on the side wall of the channel member 12. One end of the channel member 12 is provided on the mounting member 11. The nozzle member 13 is provided on the mounting member 11 and is located in the channel 121. The nozzle of the nozzle member 13 extends toward the other end of the channel member 12, and the nozzle of the nozzle member 13 is opposite to the reflux port 122. Through the corresponding arrangement of the nozzle of the nozzle member 13 and the reflux port 122 on the channel member 12, when the nozzle member 13 is spraying, the plating liquid will pass through the nozzle at high speed and be sprayed along the channel 121 of the channel member 12. At the same time, a negative pressure difference will be formed in the channel 121 at the reflux port 122, and the plating liquid around the nozzle will quickly flow back into the channel 121 through the reflux port 122, and then be sprayed from the channel member 13 onto the circuit board along with the jet of plating liquid sprayed from the nozzle; in this way, the flow rate of the nozzle during spraying is increased, and the spraying flow rate of the nozzle is increased without increasing the power of the pressure pump, so that the cost of continuous production is low, and energy saving and environmental protection are achieved.

[0033] Preferably, the end of the channel 121 close to the mounting member 11 is a cylindrical channel, and the end away from the mounting member 11 is a trumpet-shaped channel, which can increase the area when the etching liquid is sprayed out, ensure the uniformity of the jet, and thus ensure the electroplating effect.

[0034] Preferably, the return opening 122 is rectangular, circular or elliptical. In this embodiment, the return opening 122 is a rectangular structure.

[0035] Preferably, there are two return ports 122 , which are arranged opposite to each other. Of course, in other embodiments, there may be multiple return ports 122 , for example, three or four, and the multiple return ports 122 may be arranged in sequence and spaced apart around the periphery of the channel member 121 .

[0036] In specific applications, the mounting member 11 is plate-shaped, the channel member 12 is cylindrical, and the cross section of the nozzle member 13 is trapezoidal, and one end of the smaller surface is the nozzle. The channel member 12 and the nozzle member 13 are both perpendicular to the mounting plate 11, and the channel member 12 is sleeved outside the nozzle member 13. The mounting member 11 is provided with a matching avoidance opening corresponding to the nozzle member 13 to facilitate the passage of the electroplating solution. The mounting member 11, the channel member 12 and the nozzle member 13 in this embodiment are integrally formed.

[0037] Reference Figure 1 , Figure 2 , Figure 4 and Figure 5 , Figure 4 is a schematic diagram of the structure of the nozzle holder assembly in the embodiment, Figure 5 It is a structural schematic diagram of the nozzle seat assembly in the embodiment from another perspective. The nozzle seat assembly 2 includes a nozzle seat member 21 and an inlet member 22 connected to the nozzle seat member 21, the mounting member 11 is arranged on the nozzle seat member 21, and the nozzle member 13 is connected to the inlet member 22. The nozzle seat assembly 2 is used for the installation and bearing of the nozzle assembly 1, and does not guide the electroplating liquid of the nozzle assembly 1. Among them, the nozzle member 13 and the inlet member 22 cooperate to form a jet flow channel 14, and the diameter of the jet flow channel 14 gradually decreases from the inlet member 22 to the direction of the nozzle member 13, so that the liquid inlet amount is increased while the liquid inlet pressure is increased, so that the electroplating liquid ejected from the nozzle of the ejection member 13 is in a high-speed jet state, which can facilitate the generation of negative pressure in the channel 12. In this embodiment, the nozzle seat member 21 is annular, which is located at one end of the inlet member 22 close to the nozzle member 13, and is ring-connected to the outer edge of the inlet member 22.

[0038] Re-reference Figure 1-5, a first ring portion 131 is formed at one end of the nozzle member 13 away from the nozzle, and a second ring portion 211 is provided on the side of the nozzle seat member 21 facing the nozzle member 13, and the second ring portion 211 is sleeved on the first ring portion 131, and the outer diameter of the first ring portion 131 is greater than the inner diameter of the second ring portion 211. Since the outer diameter of the first ring portion 131 is greater than the inner diameter of the second ring portion 211, when the second ring portion 211 is sleeved on the first ring portion 131, an interference fit can be achieved between the two, forming a sealing structure, thereby improving the sealing performance. In order to further improve the sealing performance, the mounting member 11 is provided with a third ring portion 111, and the third ring portion 111 is arranged outside the second ring portion 211, and there is a gap between the third ring portion 111 and the second ring portion 211. A fourth ring portion 212 is also provided on the side of the nozzle seat member 21 facing the nozzle member 13, and the fourth ring portion 212 is sleeved on the third ring portion 111, and the inner diameter of the fourth ring portion 212 is smaller than the outer diameter of the third ring portion 111. By setting the inner diameter of the fourth ring portion 212 smaller than the outer diameter of the third ring portion 111, when the fourth ring portion 212 is sleeved on the third ring portion 111, an interference fit between the two is also achieved, forming another layer of sealing structure. With the cooperation of the first ring portion 131, the second ring portion 211, the third ring portion 111 and the fourth ring portion 212, the sealing performance is increased, preventing the jet flow channel 14 from affecting the jet flow rate of the nozzle member 13 due to poor sealing performance, and no longer needing to use a sealing ring for sealing, avoiding the risk of the sealing ring falling into the electroplating tank to cause blockage or damage to the magnetic pump.

[0039] The nozzle seat assembly 2 also includes at least three first clamping members 23, at least three first clamping members 23 are sequentially arranged around the periphery of the nozzle seat member 21, and the mounting member 11 is formed with a second clamping portion 112 corresponding to the at least three first clamping members 23, and the second clamping portion 112 is clamped with the first clamping member 23. In this embodiment, the number of the first clamping members 23 is three, and the three first clamping members 23 are equidistantly arranged. Correspondingly, the number of the second clamping portions 112 is also three, and the three second clamping portions 112 are equidistantly arranged. The mounting member 11 has a mounting plate 113 and a mounting ring 114 arranged on the mounting plate 113, and the mounting plate 113 and the mounting ring 114 are perpendicular to each other. The channel member 12 and the nozzle member 13 are respectively connected to the mounting plate 113, and the channel member 12 and the mounting plate 113 are perpendicular to each other. One end of the second clamping platform 112 is arranged on the inner wall of the mounting ring 114, and the other end thereof is suspended. A clamping space 123 is formed between the second clamping platform 112 and the mounting plate 113, and the first clamping platform 23 is clamped in the clamping space 123 through the position between two adjacent second clamping platforms 112. The three first clamping platforms 23 and the three second clamping platforms 112 are used for three-point clamping, which increases the stability of the energy-saving nozzle and prevents it from falling off during use. Furthermore, the first clamping platform 23 has a first limit block 231 and a second limit block 232. The first limit block 231 and the second limit block 232 are arranged at both ends of the second clamping platform 112, and are located on the side of the first clamping platform 23 facing the second clamping platform 112. The distance between the first limit block 231 and the second limit block 232 is greater than the arc length of the second clamping platform 112. The longitudinal section of the first limit block 231 is an arch, and the longitudinal section of the second limit block 232 is a rectangle, so that when the first clamping member 23 is clamped with the second clamping portion 112, the first limit block 231 can pass through the clamping space 123, and when the second limit block 232 is in contact with the second clamping portion 112, the first clamping member 23 and the second clamping portion 112 cannot continue to move relative to each other. At this time, the second clamping portion 112 is located between the first limit block 231 and the second limit block 232. By providing the first limit block 231 and the second limit block 232, the relative movement between the first clamping member 23 and the second clamping portion 112 due to external forces such as vibration during use is prevented, which may cause the nozzle assembly 1 to fall off, thereby increasing the stability of the energy-saving nozzle.

[0040] Embodiment 2

[0041] Reference Figure 6 , Figure 6Schematic diagram of the structure of the electroplating device in the embodiment. This embodiment discloses an electroplating device, which includes two nozzle installation lines 3 arranged opposite to each other, and each nozzle installation line 3 is respectively installed with a plurality of the above-mentioned energy-saving nozzles 1. The plurality of energy-saving nozzles 1 on the two nozzle installation lines 3 are relatively staggered to prevent the energy-saving nozzles on both sides from reducing the spray volume due to the relative collision of the sprayed electroplating liquid during the electroplating process, thereby affecting the opposite effect. The energy-saving nozzle 1 is the energy-saving nozzle 1 of the first embodiment. Thus, the electroplating device in this embodiment, through the relative staggered arrangement of the plurality of energy-saving nozzles 1 and the reflux effect of the energy-saving nozzles 1, can make both sides of the PCB board receive uniform spray coverage, thereby improving the electroplating effect at a lower maintenance cost.

[0042] In summary: the energy-saving nozzle in this embodiment is configured correspondingly through the nozzle of the nozzle part and the reflux port on the channel part, so that when the nozzle part is spraying, the plating liquid will pass through the nozzle at high speed and be sprayed along the channel of the channel part. At the same time, negative pressure will be formed in the channel at the reflux port, and the plating liquid around the nozzle will quickly flow back into the channel through the reflux port, and then be sprayed from the channel part to the circuit board along with the jet plating liquid sprayed from the nozzle; in this way, the reflux amount of the nozzle during spraying is increased, and the spraying amount of the nozzle is increased without increasing the power of the pressure pump, the cost of continuous production is low, and it is energy-saving and environmentally friendly.

[0043] The above is only an embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims

1. An energy-saving nozzle, characterized in that: The nozzle assembly (1) comprises a mounting member (11), a channel member (12) and a nozzle member (13); a channel (121) is formed inside the channel member (12); a return port (122) communicating with the channel (121) is formed on a side wall of the channel member (12); one end of the channel member (12) is arranged on the mounting member (11); the nozzle member (13) is arranged on the mounting member (11) and is located in the channel (121); a nozzle of the nozzle member (13) extends toward the other end of the channel member (12); and the nozzle of the nozzle member (13) is opposite to the return port (122); It also includes a nozzle seat assembly (2), the nozzle seat assembly (2) including a nozzle seat member (21) and an inflow member (22) connected to the nozzle seat member (21), the mounting member (11) is arranged on the nozzle seat member (21), and the nozzle member (13) is connected to the inflow member (22); The nozzle member (13) cooperates with the inlet member (22) to form an injection flow channel (14), and the diameter of the injection flow channel (14) gradually decreases in a direction from the inlet member (22) toward the nozzle member (13); A first ring portion (131) is formed at one end of the nozzle member (13) away from the nozzle, and a second ring portion (211) is provided on a side of the nozzle seat member (21) facing the nozzle member (13), the second ring portion (211) is sleeved on the first ring portion (131), and the outer diameter of the first ring portion (131) is greater than the inner diameter of the second ring portion (211); The mounting member (11) is provided with a third ring portion (111), and the third ring portion (111) is arranged outside the second ring portion (211). The nozzle seat member (21) is further provided with a fourth ring portion (212) on a side facing the nozzle member (13), and the fourth ring portion (212) is sleeved on the third ring portion (111), and the inner diameter of the fourth ring portion (212) is smaller than the outer diameter of the third ring portion (111).

2. The energy-saving nozzle according to claim 1, characterized in that: The reflux port (122) is rectangular, circular or elliptical.

3. The energy-saving nozzle according to claim 1, characterized in that: The number of the return openings (122) is at least two, and at least two of the return openings (122) are arranged around the nozzle of the nozzle member (13).

4. The energy-saving nozzle according to claim 1, characterized in that: The nozzle seat assembly (2) also includes at least three first clamping members (23), and the at least three first clamping members (23) are sequentially arranged around the periphery of the nozzle seat member (21). The mounting member (11) is formed with second clamping portions (112) corresponding to the at least three first clamping members (23), and the second clamping portions (112) are clamped with the first clamping members (23).

5. The energy-saving nozzle according to claim 4, characterized in that: The mounting member (11) comprises a mounting plate (113) and a mounting ring (114) arranged on the mounting plate (113); one end of the second clamping platform (112) is arranged on the inner wall of the mounting ring (114), and the other end thereof is suspended; a clamping space (123) is formed between the second clamping platform (112) and the mounting plate (113); the first clamping platform member (23) is clamped in the clamping space (123) through the position between two adjacent second clamping platforms (112).

6. An electroplating device, characterized in that: It comprises two nozzle installation lines (3) arranged opposite to each other, each of the nozzle installation lines (3) is respectively installed with a plurality of energy-saving nozzles as claimed in any one of claims 1 to 5, and the plurality of energy-saving nozzles on the two nozzle installation lines (3) are relatively staggered.

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