Ultraviolet irradiation device safe for human body

Abstract

The application discloses a kind of ultraviolet irradiation device to human safety, it includes: shell, with at least one light extraction window;Ultraviolet light source is housed inside the shell, and the light emitted by the ultraviolet light source includes the first ultraviolet light with specified wavelength;Light filter is arranged with light extraction window cooperation, and allow the first ultraviolet light to pass through;Micro-reflection structure is arranged inside the shell, for at least part of the first ultraviolet light in the transmission direction deviated from light extraction window is reflected into light extraction window.The light extraction efficiency of the ultraviolet irradiation device of the application is high, and macroscopic shape, size, structure is not limited, and application prospect is wide.

Description

Technical Field

[0001] This invention relates to an ultraviolet irradiation device, specifically an ultraviolet irradiation device that is safe for the human body. Background Technology

[0002] Ultraviolet (UV) light, with wavelengths ranging from 200nm to 400nm, possesses advantages such as purely physical sterilization without secondary pollution, high efficiency in disinfection, and large-area coverage, making it widely used in sterilization, surface treatment, thin film deposition, and photochemical deposition. However, most UV light is harmful to the human body and should not be directly exposed to the skin and eyes. Recent studies have shown that UV light with wavelengths in the 200nm-225nm range cannot penetrate the stratum corneum of human skin and is therefore safe for human use.

[0003] Excimer lamps utilizing gas emission can emit ultraviolet light with a large area and high efficiency in the 200nm-225nm wavelength range. However, excimer lamps also contain a small but not negligible amount of harmful ultraviolet light in the 240nm-300nm wavelength range. Therefore, a lamp housing is needed to enclose the excimer lamp, allowing ultraviolet light to exit only through the light extraction window. An optical filter is also used to reduce the proportion of harmful ultraviolet light emitted. The optical filter transmits ultraviolet light with wavelengths of 190nm-230nm and reflects ultraviolet light with wavelengths of 240nm-300nm. The reflection and transmission of incident light by the optical filter depends on the incident angle. Specifically, as the incident angle increases, the reflection spectrum blue shifts, meaning that ultraviolet light with wavelengths less than 230nm cannot pass through at larger incident angles. Related technical information can be found in CN112930579A.

[0004] Because excimer lamps exhibit light divergence, they suffer at least two types of light loss: 1. Some light, due to its exit angle, fails to reach the light exit window and is lost through random reflection; 2. Some light, although reaching the optical filter, is reflected back into the device instead of being transmitted. Reducing these two types of light loss can improve the light extraction efficiency of the excimer lamp. One existing method utilizes specular or diffuse reflection within the lamp housing to guide these two portions of light to the light extraction window, requiring a specially designed lamp housing. However, this method is limited by the need for compact space, optimized heat dissipation, aesthetic appeal, and ease of manufacturing. Another approach is to modify the internal structure of the device to optimize light extraction, such as by placing multiple diffusers near the light extraction window to allow light reflected from the extraction window to re-enter it. However, this method complicates the internal structure, increases costs, and reduces the device's reliability. Summary of the Invention

[0005] The main objective of this invention is to provide a safe ultraviolet irradiation device for the human body, thereby overcoming the shortcomings of the prior art.

[0006] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0007] Some embodiments of the present invention provide a safe ultraviolet irradiation device for the human body, comprising:

[0008] A housing having at least one light extraction window;

[0009] An ultraviolet light source is housed inside the housing, and the light emitted by the ultraviolet light source contains first ultraviolet light having a specified wavelength;

[0010] A light filter, which is configured in conjunction with the light extraction window and allows the first ultraviolet light to pass through;

[0011] A micro-reflection structure, disposed inside the housing, is used to reflect at least a portion of the first ultraviolet light whose transmission direction deviates from the light extraction window into the light extraction window.

[0012] In one embodiment, the wavelength of the first ultraviolet light is 190–230 nm.

[0013] In one embodiment, the light emitted by the ultraviolet light source further includes second ultraviolet light, the light filter is capable of blocking the second ultraviolet light, and the wavelength of the second ultraviolet light is 240-300 nm.

[0014] In one embodiment, the light filter is disposed between the ultraviolet light source and the light extraction window, or the light filter is disposed on the light extraction window.

[0015] In one embodiment, the light filter is integrated with the light extraction window located on one side surface inside the housing and / or the light extraction window located on one side surface outside the housing.

[0016] In one embodiment, the light filter comprises a multilayer dielectric membrane.

[0017] In one embodiment, a plurality of the microreflective structures are disposed on the inner wall of the housing and are used at least to reflect a portion of the first ultraviolet light incident on the inner wall of the housing into the light extraction window.

[0018] In one embodiment, a plurality of the micro-reflective structures are arranged sequentially on the inner wall of the housing along a direction gradually moving away from the light-receiving surface of the light filter, wherein each micro-reflective structure has at least a first reflective surface, the first reflective surface forming an angle greater than 0 and less than 90° with the light-receiving surface of the light filter, and is at least used to directly reflect the first ultraviolet light reflected from the light-receiving surface of the light filter toward the inner wall of the housing into the light filter.

[0019] In one embodiment, the angle between the first reflective surface of the plurality of microreflective structures arranged on the inner wall of the housing and the light-receiving surface of the light filter tends to decrease along a direction that gradually moves away from the light-receiving surface of the light filter.

[0020] In one embodiment, the microreflective structure includes, but is not limited to, an asymmetric triangular prism reflective structure.

[0021] In one embodiment, the size of a microreflective structure in the direction parallel to the inner wall of the housing is 10μm-1000μm; and / or, as the surface of a microreflective structure extends continuously along the inner wall of the housing, it also undulates in the direction perpendicular to the inner wall of the housing, and the height variation is less than 10mm.

[0022] In one embodiment, the microreflective structure is fixedly connected to or integrally formed with the inner wall of the housing.

[0023] In one embodiment, the ultraviolet light source includes an excimer lamp.

[0024] Compared with existing technologies, this invention, by setting a micro-reflection structure within the ultraviolet irradiation device, can easily adjust the three-dimensional shape and / or size of the micro-reflection structure to modulate the reflection characteristics of the micro-reflection structure on incident light without limiting the macroscopic size, shape, or structure of the ultraviolet irradiation device. This significantly improves the light extraction efficiency of the ultraviolet irradiation device. Its design has advantages such as flexibility, versatility, and low cost. It can also simplify the structure of the ultraviolet irradiation device to a certain extent and expand its application range. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 It is a cross-sectional view of an existing ultraviolet irradiation device in the main viewing direction;

[0027] Figure 2 This is a cross-sectional view of an existing ultraviolet irradiation device viewed from the left.

[0028] Figure 3 This is a schematic diagram of the working state of an existing ultraviolet irradiation device.

[0029] Figure 4 This is a schematic diagram of another working state of an existing ultraviolet irradiation device;

[0030] Figure 5This is a cross-sectional view of an ultraviolet irradiation device in the main viewing direction according to an embodiment of the present invention;

[0031] Figure 6 This is a schematic diagram of a micro-reflection structure in this invention;

[0032] Figure 7a yes Figure 6 One of the schematic diagrams of the working micro-reflection structure shown;

[0033] Figure 7b yes Figure 6 The second schematic diagram of the working micro-reflection structure shown;

[0034] Figure 8a yes Figure 6 The third schematic diagram of the working micro-reflection structure shown;

[0035] Figure 8b yes Figure 6 The fourth schematic diagram of the working micro-reflection structure shown;

[0036] Figure 9a This is one of the working schematic diagrams of another micro-reflection structure in this invention;

[0037] Figure 9b This is a second schematic diagram of another micro-reflection structure in this invention;

[0038] Figure 10 This is a cross-sectional view of an ultraviolet irradiation device in the main viewing direction, according to another embodiment of the present invention.

[0039] Figure 11 This is a schematic diagram of the operation of an ultraviolet irradiation device according to another embodiment of the present invention;

[0040] Figure 12 This is a schematic diagram of the structure of a reflective film with a micro-reflective structure according to the present invention;

[0041] Explanation of reference numerals in the attached figures: 100 - Existing ultraviolet irradiation device; 101 - Housing; 102 - Fixture; 103 - Excimer lamp; 104 - Light extraction window; 105 - Optical filter; 106a-106c - Excimer lamp beams emitted in different directions; 107a-107b - Excimer lamp emission light boundary; 107a'-107b' - Excimer lamp emission light boundary; 108 - Micro-emission structure; 200 - First type of ultraviolet irradiation device with micro-reflection structure; 300 - Second type of ultraviolet irradiation device with micro-reflection structure. Detailed Implementation

[0042] Please see Figures 1-2An existing ultraviolet irradiation device 100 mainly consists of a housing 101, an excimer lamp 103, and an optical filter 105. The housing 101 surrounds the excimer lamp 103 (or the excimer lamp 103 can be considered as being housed within the housing 101), serving to constrain the light-emitting area and prevent harmful light leakage. The excimer lamp 103 can be physically or electrically connected to the housing 101 via a mounting bracket 102 or other mounting structures. The inner wall of the housing 101 has certain ultraviolet reflective properties; for example, a metal aluminum or aluminum alloy coating can be applied to the inner wall of the housing to produce specular reflection or non-directional diffuse reflection. A light extraction window 104 can be provided on the housing 101, and the optical filter 105 is configured in conjunction with the light extraction window 104, for example, it can be disposed on the light extraction window 104. An optical filter can substantially transmit ultraviolet light (which can be defined as first ultraviolet light) in a first wavelength range (e.g., 190–230 nm) and substantially reflect ultraviolet light (which can be defined as second ultraviolet light) in a second wavelength range (e.g., 240–300 nm).

[0043] Please continue reading. Figure 2 Without special optical constraints, the excimer lamp 103 emits light into the surrounding space. For example, beam 106a can directly strike the optical filter. Most of the light in the first wavelength range passes through the optical filter 104 and the light extraction window 105 and is transmitted outside the housing, while harmful light in the second wavelength range is reflected back and then absorbed by the inner wall of the housing and the gas therein after multiple reflections. Beam 106b has a relatively large incident angle and is highly likely to be reflected by the optical filter 105. Beam 106c strikes one side of the inner wall of the housing (i.e., the inner sidewall of the housing). If the inner sidewall of the housing has specular reflection properties, then beam 106c will be reflected back and forth within the device, and ultimately most of it will be absorbed by the inner wall of the housing and the gas therein. Beam 106d strikes the top inner wall of the housing or strikes the inner sidewall of the housing at a certain angle. After a few reflections, it reaches the optical filter, and some of it will also be lost through absorption by the inner wall of the housing and the gas therein.

[0044] In existing ultraviolet irradiation devices, many excimer lamps are oriented in a specific direction due to the overall shape of the device, the lampshade, and the reflective surface. For example, please refer to... Figure 3 As shown, in the emitted light of the excimer lamp 103, the light located between the excimer lamp emission light boundary 107a and the excimer lamp emission light boundary 107b can all reach the optical filter. Even Figure 4 The emitted light located between the excimer lamp emission light boundary 107a' and the excimer lamp emission light boundary 107b' can also reach the optical filter. However, achieving complete collimation of the emitted light is very difficult and costly.

[0045] In view of this, the inventors of this case, through long-term research and practice, have been able to propose the technical solution of this invention. The technical solution of this invention will be described in more detail below with reference to the accompanying drawings and several embodiments. However, it should be understood that the following embodiments are merely for explaining and illustrating the technical solution, and do not limit the scope of this invention.

[0046] Some embodiments of the present invention provide a safe ultraviolet irradiation device for the human body, comprising:

[0047] A housing having at least one light extraction window;

[0048] An excimer lamp is housed inside the housing, that is, the excimer lamp is surrounded by the housing, and the emitted light of the ultraviolet light source is mainly ultraviolet light in the first wavelength domain.

[0049] A light filter is provided in conjunction with a light extraction window and allows the first ultraviolet light to pass through, that is, it allows ultraviolet light in the first wavelength range to be substantially transmitted, while it allows ultraviolet light in the second wavelength range (the aforementioned second ultraviolet light) to be substantially reflected.

[0050] A micro-reflection structure, disposed within the housing, is used to reflect at least a portion of the first ultraviolet light whose transmission direction deviates from the light extraction window back towards the light extraction window. In other words, the micro-reflection structure is used to modulate the spatial distribution of reflected light intensity within the housing, thereby allowing more of the first ultraviolet light to pass through the optical filter.

[0051] In this invention, the fully integrated intensity of the excimer lamp at its main wavelength is greater than 40% within a range of ±10 nm. In reality, the full width at half maximum (FWHM) of existing excimer lamps at their main emission wavelength is very small, typically between 10 nm and 15 nm.

[0052] In this invention, the shape of the excimer lamp is not limited, and it can be tubular, flat cuboid, disc-shaped, etc., and is not limited thereto.

[0053] In this invention, the luminescent gas sealed inside the excimer lamp is not limited and can be KrCl, KrBr, or ArF. It should be noted that the luminescent gas does not refer to the initial filling gas. For example, in a quartz glass tube, filling it with a certain proportion of Kr and Cl2 will generate an excited state of the KrCl excimer under high-field, high-frequency excitation. During the return of the excited state to the ground state, it emits ultraviolet light with a main peak wavelength around 222 nm. Similarly, when filling it with a certain proportion of Kr and Br2, the excimer emits ultraviolet light with a main peak wavelength around 207 nm; when filling it with a certain proportion of Ar and F2, the excimer emits ultraviolet light with a main peak wavelength around 193 nm. The initial filling gas can also contain auxiliary gases such as He, Ne, and Ar, and is not limited to these.

[0054] In this invention, the housing is primarily used to confine the ultraviolet light emitted by the excimer lamp, ensuring it is emitted only from the light extraction surface, thus preventing harmful ultraviolet light from leaking into the surrounding environment and harming humans or animals. The shape of the housing is not limited; for example, it can be a cuboid, cylinder, or other regular or irregular shape, depending on actual needs, such as meeting one or more requirements for compact space, optimized heat dissipation, aesthetics, and ease of manufacturing. In some cases, the housing may also simultaneously provide mechanical protection, electromagnetic shielding, and thermal insulation functions, and is not limited to these.

[0055] In this invention, the light extraction window can be one or more, and it is mainly formed using a material that allows the first ultraviolet light to pass through, such as quartz glass, sapphire, etc., but is not limited thereto.

[0056] In this invention, the optical filter can be independently disposed between the excimer lamp and the light extraction window, or it can be disposed on one side or opposite sides of the light extraction window. In some cases, the optical filter can be a multilayer dielectric film, which can achieve wavelength-selective reflection through optical refraction, interference, diffraction, etc. The multilayer dielectric film can be a self-supporting film or it can be bonded to a transparent substrate. For example, the multilayer dielectric film can be deposited on a transparent substrate by physical or chemical vapor deposition, or by spin coating, printing, etc., and then superimposed between the light extraction window and the excimer lamp. Alternatively, the multilayer dielectric film can be deposited directly on the light extraction window, for example, on the inner surface and / or outer surface of the light extraction window, generally bonded to the inner surface of the light extraction window, that is, the surface of the light extraction window facing the inside of the housing.

[0057] In this invention, the microreflective structure can be provided on all or part of the inner wall of the housing. In some cases, the microreflective structure can also be provided in other areas inside the housing, such as on the surface of other mechanisms. The spatial distribution of reflected light intensity within the housing can be modulated using the microreflective structure.

[0058] In this invention, the micro-reflective structure can be of various shapes, such as regular shapes like prisms, pyramids, frustums, spheres, cylinders, or other irregular shapes, which can be specifically set according to the actual situation.

[0059] In some cases, the microreflective structure can be formed on a substrate of a predetermined material, for example, by in-mold injection molding or hot pressing during the molding of the housing. In other cases, the microreflective structure can also be formed on the surface of a predetermined substrate by hot pressing, UV embossing, or other methods, for example, on a thin, flexible substrate (such as a flexible film). Furthermore, the microreflective structure can be formed directly from a material capable of reflecting the first ultraviolet light. Alternatively, after forming the basic configuration of the microreflective structure, a reflective coating can be formed by depositing a material capable of reflecting the first ultraviolet light (such as aluminum, aluminum alloy, nickel, etc.) on the basic configuration of the microreflective structure using methods such as vacuum deposition, electroforming, chemical plating, spraying, or printing, ultimately obtaining the microreflective structure.

[0060] In this invention, the microreflective structure can be directly coated onto the inner wall of the housing, or integrally formed with the inner wall of the housing, or it can be a thin film and adhered to the inner wall of the housing. Because these microreflective structures are thin and lightweight, they can overcome the limitations of the ultraviolet irradiation device in terms of shape, size, and structure, and significantly improve the light extraction efficiency of the ultraviolet irradiation device. Furthermore, these microreflective structures can be fabricated on a large scale using mature processes, resulting in low cost.

[0061] by Figure 5 The ultraviolet irradiation device with a micro-reflective structure shown is provided as an exemplary example to further illustrate the invention. It should be noted that these figures are schematic illustrations, and the scale shown may not necessarily match the actual scale. Furthermore, the scale may not necessarily be consistent between different figures.

[0062] Please see Figure 5 In this embodiment, an ultraviolet irradiation device 200 is provided with a micro-reflective structure 108 on the inner wall of the housing to improve the light extraction efficiency of the ultraviolet irradiation device. In this first type of ultraviolet irradiation device 200, the light emitted by the excimer lamp 103 is confined between boundaries 107a and 107b, meaning that the light emitted by the excimer lamp 103 directly reaches the optical filter 105, but a portion of the first ultraviolet light is reflected. The reflected light on the surface of the optical filter is reflected after reaching the micro-reflective structure 108. The specific microstructure reflection has completely different reflection characteristics from the undesigned surface, allowing the reflected light to reach the optical filter again after a shorter optical path and gain another transmission opportunity.

[0063] The microreflective structure 108 in this embodiment can be a non-random, regular structure such as a prism, frustum, pyramid, cylinder, or sphere. When the surface of a microreflective structure 108 extends along at least one of the X and Z directions in a three-dimensional coordinate system, it also exhibits regular undulations in the Y direction, with a height variation of less than 10 mm, preferably 10 μm-1000 μm. This facilitates low-cost fabrication and thinning of the microreflective structure. Furthermore, the characteristic dimension of a microreflective structure in the XZ plane is 10 μm-1000 μm. Viewed from the perspective of an overall reflective surface formed by multiple microreflective structures 108, it can be a periodic repetition of a single microreflective structure with a constant size, a repetition of a single microreflective structure with a gradually changing size, or a combination of multiple microreflective structures.

[0064] Further based on Figure 5 The illustrated device includes a reflective film comprising multiple microreflective structures, which may be asymmetric triangular prism structures. For example, Figure 6 A cross-sectional schematic diagram of a reflective film positioned relative to an optical filter is shown. The surface of each micro-reflective structure undulates in the Y direction as it extends along the Z direction, with variations ranging from 10 μm to 1000 μm. Simultaneously, the characteristic size of each micro-reflective structure in the Z direction (10 μm-1000 μm) remains essentially constant in the X direction. Each micro-reflective structure has two reflective surfaces: a (also called the first reflective surface) and b (also called the second reflective surface), which reflect light emitted from the surface of the optical filter (defined as surface c). Surface a forms an acute angle with surface c, and surface b forms an obtuse angle with surface c. Angle β is the angle between the ray reflected from the optical filter surface and the normal to surface c, and can also be defined as the c-surface exit angle of the light. A beam of parallel light with a given exit angle β illuminating a micro-reflective structure may only illuminate surface a, or it may illuminate both surfaces a and b simultaneously. Because surfaces a and b have different angles relative to the incident light, their reflection characteristics differ.

[0065] When light reflected from the surface of the optical filter is incident on surface a, two situations may occur: (1) Please refer to Figure 7a The incident light leaves the reflective film after being reflected by surface a; (2) Please refer to Figure 7b The incident light is reflected once each by surface a and surface b before leaving the reflective film. It can be proven that when the angle α between surface a and surface b is greater than 90°, for light with an exit angle β greater than the angle between surface a and surface c, the reflected light in both of the aforementioned cases can re-enter surface c, and the incident angle is less than β. In other words, incident light at surface a can improve the transmission of the first ultraviolet light.

[0066] When light reflected from the surface of the optical filter is incident on surface b, two possible scenarios may occur: (i) Please refer to Figure 8a(ii) The incident light leaves the reflective film after being reflected by surface b; Figure 8b The incident light is reflected once each by surface a and surface b before leaving the reflective film. It can be proven that if the angle α between surface a and surface b is greater than 90°, for light with an exit angle β greater than the angle between surface b and surface c, in case (i), the reflected light can re-enter surface c, but in case (ii), with an incident angle greater than β, the reflected light cannot directly reach the optical filter. In other words, incident light at surface b does not significantly improve the transmission of the first ultraviolet light.

[0067] Therefore, it is preferable to increase the light reflection area of ​​face a and decrease the light reflection area of ​​face b by adjusting the structural parameters of the asymmetric triangular prism structure.

[0068] Please refer to it again. Figures 6-8b When the angle between plane a and plane c is small (less than 45°), the light emitted from plane c, with a larger β angle, mainly enters plane b, while the light emitted from plane c, with a smaller β angle, mainly enters plane a. Conversely, for Figures 9a-9b The reflective film shown has a micro-reflective structure with surfaces a' and b'. The angle between surface a' and surface c is relatively large (greater than 45° but less than 90°), and the angle between surface b' and surface c is also relatively large (greater than 135° but less than 180°). This structure is beneficial for the retransmission of light emitted from surface c with a large β angle.

[0069] On the other hand, Figure 5 In the ultraviolet irradiation device 200 shown, the light emitted from the c-plane with a smaller β angle irradiates more of the inner wall of the housing away from the c-plane along the z-direction, while the light emitted from the c-plane with a larger β angle irradiates more of the inner wall of the housing closer to the c-plane along the z-direction. Therefore, more preferably, micro-reflective structures with different a-plane angles can be provided in different regions of the inner wall of the housing for different angles of c-plane emitted light, thereby further improving the light efficiency of the ultraviolet irradiation device. For example, Figure 10 An ultraviolet irradiation device 300 incorporating an optimized reflective film is shown. In this ultraviolet irradiation device 300, the reflective film can be prepared by pre-fabricating micro-reflective structures 302 on a substrate 301, and then bonding the reflective film to the inner sidewall of the housing. Each micro-reflective structure 302 is characterized by having an asymmetric triangular prism reflective structure. Furthermore, the characteristic dimensions of each micro-reflective structure vary in the direction away from the light-receiving surface (the aforementioned c-surface) of the optical filter along the Z-direction, including gradual and abrupt changes, and the variation follows the principle of improving the light efficiency of the ultraviolet irradiation device.

[0070] For details, please continue to refer to [the website / information]. Figures 6-9bIn the ultraviolet irradiation device 300, each microreflective structure has one surface (surface a or surface a') with an angle between its surface and the light-receiving surface of the optical filter that is greater than 0 and less than 90° (e.g., 1°-89°), and another surface (surface b or surface b') with an angle between its surface and the light-receiving surface of the optical filter that is greater than 90° and less than 180° (e.g., 91°-179°). The angle α between surface a and surface b (or surface a' and surface b') is greater than 90°. The angle between surface a or surface a' and the light-receiving surface of the optical filter varies with the Z direction; it can be gradual or abrupt, but generally, in the Z direction, the angle decreases along the direction away from the light-receiving surface of the optical filter. Preferably, in the region near the optical filter, the angle between surface a of the micro-reflective structure and the light-receiving surface of the optical filter is relatively large (e.g., greater than 60° but less than 90°), and the angle between surface b of the micro-reflective structure and the light-receiving surface of the optical filter is also relatively large (e.g., greater than 145° but less than 180°). In the region far from the optical filter, the angle between surface a of the micro-reflective structure and the light-receiving surface of the optical filter is relatively small (e.g., greater than 0° but less than 30°), and the angle between surface b and surface c is appropriately reduced to maintain an angle α between surface a and surface b (or surface a' and surface b') greater than 90°. Please continue reading. Figure 11 By using this reflective film, that is, by setting different micro-reflective structures at different positions in the z-direction (setting micro-reflective structure 108 at a position far from the c-plane in the z-direction, and setting micro-reflective structure 108' at a position close to the c-plane in the z-direction), it is possible to reflect light at different angles and return it to the light extraction window.

[0071] In the above embodiments, the micro-reflective structure can be directly deposited on the inner wall of the housing, or it can be integrally formed on the inner wall of the housing by means of embossing, molding, etc., or attached to the inner wall of the housing. Therefore, it is not necessary to change the shape of the housing, nor is it necessary to set up additional optical elements with large volume inside the housing, so as to effectively improve the light output efficiency.

[0072] A reflective film with a micro-reflective structure attached to the inner wall of the housing, such as Figure 12As shown. The method for fabricating the reflective film may include: firstly, fabricating multiple microstructures 44 on one surface of a substrate 43. The substrate may be a polymer film, metal foil, glass, etc., and the fabrication method of the microstructures 44 may include, but is not limited to, hot pressing, UV imprinting, photolithography, etc.; then, depositing a thin film 45 with good reflection of the first ultraviolet light on the multiple microstructures 44. The thin film 45 may be a metal film, a multilayer dielectric film, or a stacked structure of a metal film and a dielectric film, thereby forming multiple micro-reflective structures. Further, before forming the thin film 45, such as a vacuum-deposited aluminum film or an aluminum alloy reflective film, a dielectric layer such as silicon oxide, aluminum oxide, or niobium oxide may be pre-deposited on the microstructures 44 to increase the adhesion between the thin film 45 and the microstructures 44. Further, the reflective film is attached to the inner sidewall 41 of the housing by an adhesive layer 42. The adhesive layer 42 may be made of hot melt adhesive, UV adhesive, pressure-sensitive adhesive, etc., or may be made of metal, polymer, etc., and is not limited to these.

[0073] In the above embodiments, different microstructures were used to modulate the incident light based on the different spatial distributions of the excimer lamp's emitted light. In other embodiments of the present invention, different micro-reflective structures may be provided and / or different micro-reflective structures may be provided at any suitable location within the housing, depending on the characteristics of the excimer lamp, the structure of the ultraviolet irradiation device, etc.

[0074] It should be understood that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A safe ultraviolet irradiation device for the human body, characterized in that... include: A housing having at least one light extraction window; An ultraviolet light source is housed inside the housing, and the light emitted by the ultraviolet light source includes a first ultraviolet light and a second ultraviolet light, wherein the wavelength of the first ultraviolet light is 190~230nm and the wavelength of the second ultraviolet light is 240~300nm. A light filter, which is configured in conjunction with the light extraction window, allows the first ultraviolet light to pass through while blocking the second ultraviolet light; Multiple micro-reflective structures are arranged sequentially on the inner wall of the housing along a direction gradually moving away from the light-receiving surface of the optical filter. Each micro-reflective structure has an asymmetric triangular prism reflective structure and intersecting first and second reflective surfaces. The angle between the first and second reflective surfaces is greater than 90°. Along the direction gradually moving away from the light-receiving surface of the optical filter, the angle between the first reflective surface of the multiple micro-reflective structures and the light-receiving surface of the optical filter decreases. Specifically, the angle between the first reflective surface of the micro-reflective structures distributed near the optical filter and the light-receiving surface of the optical filter is greater than 60° but less than 90°, and the angle between the second reflective surface and the light-receiving surface of the optical filter is greater than 145° but less than 180°. The angle between the first reflective surface of the micro-reflective structures distributed away from the optical filter and the light-receiving surface of the optical filter is greater than 0° but less than 30°, and the angle between the second reflective surface and the light-receiving surface of the optical filter is greater than 90° but less than 180°. These structures are used to directly reflect the first ultraviolet light reflected from the light-receiving surface of the optical filter towards the inner wall of the housing into the optical filter. Furthermore, the micro-reflective structure has a size of 10μm-1000μm in the direction parallel to the inner wall of the shell, and the surface of the micro-reflective structure undulates in the direction perpendicular to the inner wall of the shell as it extends continuously with the inner wall of the shell, with a height change of less than 10mm.

2. The ultraviolet irradiation device safe for the human body according to claim 1, characterized in that: The ultraviolet light source includes an excimer lamp.

3. The ultraviolet irradiation device safe for the human body according to claim 1, characterized in that: The light filter is disposed between the ultraviolet light source and the light extraction window, or the light filter is disposed on the light extraction window.

4. The ultraviolet irradiation device safe for the human body according to claim 3, characterized in that: The light filter is integrated into one side surface of the light extraction window located inside the housing and / or the light extraction window located on one side surface outside the housing.

5. The ultraviolet irradiation device safe for human use according to claim 1, 3, or 4, characterized in that: The optical filter comprises a multilayer dielectric membrane.

6. The ultraviolet irradiation device safe for the human body according to claim 1, characterized in that: The micro-reflective structure is fixedly connected to or integrally formed with the inner wall of the housing.

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