Calibrable optical components

By combining ball joints and non-parallel calibration devices with guiding elements and airtight shielding devices, the problems of inaccurate orientation and jamming of optical components during calibration are solved, and the optical support achieves precise orientation and stable support in the maintenance structure.

CN115698809BActive Publication Date: 2026-05-26TRUMPF LASER SYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TRUMPF LASER SYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
Filing Date
2020-06-18
Publication Date
2026-05-26

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Abstract

The present invention relates to a calibrable optical assembly (10) comprising an optical support (12), an optical element (14) held on the optical support (12), and a retaining structure (16), wherein the optical support (12) is held in a ball joint (18) on the retaining structure (16), wherein a first calibration device (20) is provided for pivoting the optical support (12) relative to the retaining structure (16) about a first axis (24), wherein a second calibration device (22) is provided for pivoting the optical support (12) relative to the retaining structure (16) about a second axis (26), wherein the ball joint (18) is arranged between the optical element (14) and the first and second calibration devices (20, 22).
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Citation Information

Patent Citations

  • Adjustable mounting apparatus

    US3897139A

  • X-ray optics assembly with switching system for three beam paths, and associated x-ray diffractometer

    US20170176356A1