Cargo running control method and device
By comparing information between the processing equipment and the MES client through the EAP device, precise transfer of wafer cassettes was achieved, solving the problem of invalid transfer caused by mismatch in wafer cassette processing information and improving equipment uptime and processing efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIAN ESWIN MATERIAL TECHNOLOGY CO LTD
- Filing Date
- 2022-11-23
- Publication Date
- 2026-06-19
Smart Images
Figure CN115799111B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a method and apparatus for controlling shipment. Background Technology
[0002] In current semiconductor manufacturing processes, Equipment Automation Programming (EAP) applications are typically deployed on server hardware to control the automated processing of all wafer cells on the processing equipment.
[0003] In related technologies, when processing wafer cassettes, EAP applications send work instructions to the processing equipment to instruct the equipment to process the wafer cassettes. However, if the processing information of the wafer cassettes does not match the processing equipment, it will result in the invalid transfer of the wafer cassettes within the processing equipment, reducing the equipment utilization rate. Summary of the Invention
[0004] To address the aforementioned technical problems, this invention provides a method and apparatus for controlling cargo movement, which can improve equipment uptime.
[0005] To achieve the above objectives, the technical solution adopted in the embodiments of the present invention is as follows:
[0006] A method for controlling the movement of goods, applied to an equipment automation control (EAP) device, comprising:
[0007] The first processing information sent by the processing equipment is obtained. The first processing information is the processing information of the first wafer cassette loaded by the processing equipment. The first processing information includes: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment.
[0008] The system obtains second processing information for the second wafer cassette sent by the Manufacturing Execution System (MES) client. The second processing information includes: the identifier of the second wafer cassette, the processing recipe identifier, the location information of the wafers stored in the second wafer cassette, and the identifier of the processing equipment.
[0009] Compare the first processing information and the second processing information;
[0010] If the first processing information and the second processing information are consistent, a first instruction is sent to the processing equipment, instructing the processing equipment to move the first wafer cassette to the wafer cassette storage area; if the first processing information and the second processing information are inconsistent, a second instruction is sent to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0011] In some embodiments, after sending the first instruction to the processing equipment, the method further includes:
[0012] Receive a work instruction sent by the MES client, the work instruction indicating that the second wafer cassettes are all placed in the wafer cassette storage area;
[0013] Send a processing instruction to the processing equipment, instructing the processing equipment to process the wafer in the first wafer cassette;
[0014] If a confirmation instruction is received from the processing equipment, a status update instruction is sent to the MES client, indicating that the status of the second wafer cassette is "waiting for processing"; if a denial instruction is received from the processing equipment, the second instruction is sent to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0015] In some embodiments, after receiving the confirmation instruction sent by the processing equipment, the method further includes:
[0016] The system receives a start processing command from the processing equipment and sends a status update command to the MES client, indicating that the status of the second wafer cassette is start processing. The start processing command is issued by the processing equipment after it begins processing the first wafer cassette.
[0017] In some embodiments, a status update instruction is sent to the MES client to indicate that the status of the second wafer cassette is "processing has begun." The method further includes:
[0018] The system receives a processing end instruction from the processing equipment and sends a status update instruction to the MES client, indicating that the status of the second wafer cassette is processing end. The processing end instruction is issued by the processing equipment after it has completed processing the first wafer cassette.
[0019] In some embodiments, after receiving the end-of-process instruction sent by the processing equipment, the method further includes:
[0020] The status of multiple wafer cassette loading ports of the processing equipment is detected, and an idle wafer cassette loading port is identified. A third instruction is sent to the processing equipment, which carries the identifier of the idle wafer cassette loading port and instructs the processing equipment to return the first wafer cassette to the idle wafer cassette loading port.
[0021] In some embodiments, the number of the first wafer cassettes is multiple.
[0022] This invention also provides a method for controlling inventory movement, applied to processing equipment, including:
[0023] Send first processing information to the Equipment Automation and Control (EAP) device. The first processing information is the processing information of the first wafer cassette loaded by the processing equipment. The first processing information includes: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment.
[0024] The equipment receives a first instruction or a second instruction from the EAP device, wherein the first instruction instructs the processing equipment to move the first wafer cassette to the wafer cassette storage area; and the second instruction instructs the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0025] In some embodiments, after receiving the first instruction sent by the EAP device, the method further includes:
[0026] The device receives a processing instruction from the EAP device and instructs the processing equipment to process the wafer in the first wafer cassette.
[0027] If the processing instruction is successfully received, a confirmation instruction is sent to the EAP device; if the processing instruction is not successfully received, a denial instruction is sent to the EAP device.
[0028] In some embodiments, after sending a confirmation command to the EAP device, the method further includes:
[0029] The first wafer cassette is processed, and a start processing command is sent to the EAP device to instruct the processing of the first wafer cassette to begin.
[0030] In some embodiments, after sending a start processing command to the EAP device, the method further includes:
[0031] The processing of the first wafer cassette is completed, and a processing termination command is sent to the EAP device to indicate the end of processing of the first wafer cassette.
[0032] In some embodiments, after sending a completion processing command to the EAP device, the method further includes:
[0033] The third instruction sent by the EAP device is received, instructing the processing equipment to return the first wafer cassette to an idle wafer cassette loading port.
[0034] This invention also provides a cargo handling control device, applied to an equipment automation control (EAP) device, including a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, it implements the cargo handling control method described above.
[0035] This invention also provides a cargo handling control device applied to processing equipment, including a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, it implements the cargo handling control method as described above.
[0036] The beneficial effects of this invention are:
[0037] In this embodiment, the EAP device obtains the first processing information of the processing equipment and the second processing information of the MES client for the second wafer cassette. By comparing the first processing information and the second processing information, it determines whether the wafer cassette loaded by the processing equipment is the second wafer cassette and whether it can be moved to the wafer cassette storage area for processing. This avoids moving mismatched wafer cassettes to the wafer cassette storage area, reduces the invalid movement of wafer cassettes in the processing equipment, and improves the equipment utilization rate. Attached Figure Description
[0038] Figure 1 This diagram illustrates an application scenario of an embodiment of the present invention.
[0039] Figure 2 A flowchart illustrating the cargo handling control method on the EAP device side according to an embodiment of the present invention;
[0040] Figure 3 A flowchart illustrating the material handling control method on the processing equipment side according to an embodiment of the present invention;
[0041] Figure 4 This is a schematic diagram showing the structure of the cargo control device on the EAP device side according to an embodiment of the present invention;
[0042] Figure 5 This is a schematic diagram showing the structure of the cargo handling control device on the processing equipment side of an embodiment of the present invention. Detailed Implementation
[0043] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.
[0044] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0045] Figure 1 This diagram illustrates an application scenario of an embodiment of the present invention. The EAP device, or Equipment Automation Control Device, enables real-time monitoring of machines on the production line. MES, or Manufacturing Execution System, is a production information management system for the shop floor execution layer of manufacturing enterprises. It provides operators / managers with information on plan execution, tracking, and the current status of all resources (people, equipment, materials, customer needs, etc.). The processing equipment can process wafers, including but not limited to high and low temperature annealing, etching, and cleaning.
[0046] Specifically, the EAP device and the MES client can communicate via the Highway101 protocol; the EAP device and the processing equipment can communicate via the SECS / GEM (Semiconductor Equipment Communication Standard / Generic Equipment Model) protocol.
[0047] This invention provides a method and apparatus for controlling cargo movement, which can improve equipment utilization.
[0048] This invention provides a method for controlling the movement of goods, applied to an equipment automation control (EAP) device, such as... Figure 2 As shown, it includes:
[0049] Step 101: Obtain the first processing information sent by the processing equipment. The first processing information is the processing information of the first wafer cassette loaded by the processing equipment. The first processing information includes: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment.
[0050] Step 102: Obtain the second processing information for the second wafer cassette sent by the Manufacturing Execution System (MES) client. The second processing information includes: the identifier of the second wafer cassette, the processing recipe identifier, the location information of the wafers stored in the second wafer cassette, and the identifier of the processing equipment.
[0051] Step 103: Compare the first processing information and the second processing information;
[0052] Step 104: If the first processing information and the second processing information are consistent, send a first instruction to the processing equipment, instructing the processing equipment to move the first wafer cassette to the wafer cassette storage area; if the first processing information and the second processing information are inconsistent, send a second instruction to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0053] In this embodiment, the EAP device obtains the first processing information of the processing equipment and the second processing information of the MES client for the second wafer cassette. By comparing the first processing information and the second processing information, it determines whether the wafer cassette loaded by the processing equipment is the second wafer cassette and whether it can be moved to the wafer cassette storage area for processing. This avoids moving mismatched wafer cassettes to the wafer cassette storage area, reduces the invalid movement of wafer cassettes in the processing equipment, and improves the equipment utilization rate.
[0054] In this embodiment, if the first processing information and the second processing information are consistent, it can be determined that the first wafer cassette loaded by the processing equipment is the second wafer cassette, and the first wafer cassette can be moved to the wafer cassette storage area, and then moved to the wafer processing area for processing; if the first processing information and the second processing information are inconsistent, it can be determined that the first wafer cassette loaded by the processing equipment is not the second wafer cassette, and the first wafer cassette is returned to the wafer cassette loading port, without having to move the first wafer cassette to the wafer cassette storage area, thus avoiding invalid movement of the first wafer cassette within the processing equipment.
[0055] Wherein, the consistency between the first processing information and the second processing information means that the identifier of the first wafer cassette is consistent with the identifier of the second wafer cassette, the processing formula identifier in the first processing information is consistent with the processing formula identifier in the second processing information, the location information of the wafer stored in the first wafer cassette is consistent with the location information of the wafer stored in the second wafer cassette, and the identifier of the processing equipment in the first processing information is consistent with the identifier of the processing equipment in the second processing information.
[0056] In some embodiments, after sending the first instruction to the processing equipment, the method further includes:
[0057] Receive a work instruction sent by the MES client, the work instruction indicating that the second wafer cassettes are all placed in the wafer cassette storage area;
[0058] Send a processing instruction to the processing equipment, instructing the processing equipment to process the wafer in the first wafer cassette;
[0059] If a confirmation instruction is received from the processing equipment, a status update instruction is sent to the MES client, indicating that the status of the second wafer cassette is "waiting for processing"; if a denial instruction is received from the processing equipment, the second instruction is sent to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0060] In this embodiment, the processing equipment includes a wafer cassette loading port, a wafer cassette storage area, and a wafer processing area. The wafer cassette loading port is used to load wafer cassettes, the wafer cassette storage area is used to store wafer cassettes, and the wafer processing area is used to process wafer cassettes. If a wafer cassette needs to be processed, the robotic arm of the processing equipment sequentially transports the wafer cassette to the wafer cassette loading port, the wafer cassette storage area, and the wafer processing area.
[0061] If the processing equipment does not receive the processing instruction correctly, the EAP device instructs the processing equipment to return the first wafer cassette to the wafer cassette loading port, which can avoid the invalid transfer of the first wafer cassette within the processing equipment and improve the equipment uptime.
[0062] In some embodiments, after receiving the confirmation instruction sent by the processing equipment, the method further includes:
[0063] The system receives a start processing command from the processing equipment and sends a status update command to the MES client, indicating that the status of the second wafer cassette is start processing. The start processing command is issued by the processing equipment after it begins processing the first wafer cassette.
[0064] In this way, the EAP device can notify the MES client to update the status of the second wafer cassette based on the instructions sent by the processing equipment, so that the operator can know the status of the second wafer cassette in real time.
[0065] In some embodiments, a status update instruction is sent to the MES client to indicate that the status of the second wafer cassette is "processing has begun." The method further includes:
[0066] The system receives a processing end instruction from the processing equipment and sends a status update instruction to the MES client, indicating that the status of the second wafer cassette is processing end. The processing end instruction is issued by the processing equipment after it has completed processing the first wafer cassette.
[0067] In this way, the EAP device can notify the MES client to update the status of the second wafer cassette based on the instructions sent by the processing equipment, so that the operator can know the status of the second wafer cassette in real time.
[0068] In some embodiments, after receiving the end-of-process instruction sent by the processing equipment, the method further includes:
[0069] The status of multiple wafer cassette loading ports of the processing equipment is detected, and an idle wafer cassette loading port is identified. A third instruction is sent to the processing equipment, which carries the identifier of the idle wafer cassette loading port and instructs the processing equipment to return the first wafer cassette to the idle wafer cassette loading port.
[0070] In related technologies, after the processing equipment completes processing, the robotic arm of the processing equipment enters a waiting state. However, in this embodiment, after processing the wafer cassette, the status of multiple wafer cassette loading ports of the processing equipment is automatically detected, the idle wafer cassette loading port is determined, and the processing equipment is instructed to return the first wafer cassette to the idle wafer cassette loading port. This allows the processed wafer cassette to be accurately returned from the wafer cassette storage area to the appropriate wafer cassette loading port, and reduces the waiting time of the robotic arm of the processing equipment, improving the utilization rate of the processing equipment. The third instruction can carry an identifier of the idle wafer cassette loading port, enabling the processing equipment to return the first wafer cassette to the idle wafer cassette loading port based on this identifier.
[0071] In some embodiments, the number of the first wafer cassettes is multiple. In related technologies, for each wafer cassette, the EAP application sends a work instruction to the processing equipment, instructing the wafer cassette to be processed. Thus, if there are multiple wafer cassettes, the EAP application needs to send multiple work instructions to the processing equipment to complete the processing of multiple wafer cassettes, resulting in low processing efficiency. However, in the embodiments of this application, the number of wafer cassettes is multiple, so the EAP device can use a single instruction to instruct the processing equipment to process multiple wafer cassettes simultaneously, improving processing efficiency, increasing equipment uptime, and reducing processing costs.
[0072] This invention also provides a method for controlling product movement, applied to processing equipment, such as... Figure 3 As shown, it includes:
[0073] Step 201: Send first processing information to the Equipment Automation and Control (EAP) device. The first processing information is the processing information of the first wafer cassette loaded by the processing equipment. The first processing information includes: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment.
[0074] Step 202: Receive a first instruction or a second instruction sent by the EAP device, wherein the first instruction instructs the processing equipment to move the first wafer cassette to the wafer cassette storage area; and the second instruction instructs the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0075] In this embodiment, the processing equipment sends second processing information to the EAP device so that the EAP device can determine whether the wafer cassette loaded by the processing equipment is the second wafer cassette based on the second processing information.
[0076] In some embodiments, after receiving the first instruction sent by the EAP device, the method further includes:
[0077] The device receives a processing instruction from the EAP device and instructs the processing equipment to process the wafer in the first wafer cassette.
[0078] If the processing instruction is successfully received, a confirmation instruction is sent to the EAP device; if the processing instruction is not successfully received, a denial instruction is sent to the EAP device.
[0079] This allows the EAP device to be notified if the processing equipment does not receive the processing instructions correctly, thus preventing the EAP device from instructing the wafer cassette to continue processing.
[0080] In some embodiments, after sending a confirmation command to the EAP device, the method further includes:
[0081] Processing of the first wafer cassette begins, and a start processing command is sent to the EAP device to instruct the start of processing of the first wafer cassette.
[0082] In this way, the EAP device can notify the MES client to update the status of the second wafer cassette based on the instructions sent by the processing equipment, so that the operator can know the status of the second wafer cassette in real time.
[0083] In some embodiments, after sending a start processing command to the EAP device, the method further includes:
[0084] The processing of the first wafer cassette is completed, and a processing termination command is sent to the EAP device to indicate the end of processing of the first wafer cassette.
[0085] In this way, the EAP device can notify the MES client to update the status of the second wafer cassette based on the instructions sent by the processing equipment, so that the operator can know the status of the second wafer cassette in real time.
[0086] In some embodiments, after sending a completion processing command to the EAP device, the method further includes:
[0087] The third instruction sent by the EAP device is received, instructing the processing equipment to return the first wafer cassette to an idle wafer cassette loading port.
[0088] In related technologies, after the processing equipment completes processing, the robotic arm of the processing equipment enters a waiting state. However, in this embodiment, after processing the wafer cassette, the status of multiple wafer cassette loading ports of the processing equipment is automatically detected, the idle wafer cassette loading port is determined, and the processing equipment is instructed to return the first wafer cassette to the idle wafer cassette loading port. This allows the processed wafer cassette to be accurately returned from the wafer cassette storage area to the appropriate wafer cassette loading port, and reduces the waiting time of the robotic arm of the processing equipment, improving the utilization rate of the processing equipment. The third instruction can carry an identifier of the idle wafer cassette loading port, enabling the processing equipment to return the first wafer cassette to the idle wafer cassette loading port based on this identifier.
[0089] This invention also provides a cargo handling control device, applied to an equipment automation control (EAP) device, such as... Figure 4 As shown, it includes a memory 31, a processor 32, and a computer program stored in the memory 31 and executable on the processor 32; when the processor 32 executes the program, it implements the cargo control method described above.
[0090] In some embodiments, the processor 32 is configured to acquire first processing information sent by the processing equipment, the first processing information being processing information of a first wafer cassette loaded by the processing equipment, the first processing information including: the identifier of the first wafer cassette, a processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment; acquire second processing information for a second wafer cassette sent by the Manufacturing Execution System (MES) client, the second processing information including: the identifier of the second wafer cassette, a processing recipe identifier, the location information of the wafer stored in the second wafer cassette, and the identifier of the processing equipment; compare the first processing information and the second processing information; if the first processing information and the second processing information are consistent, send a first instruction to the processing equipment, instructing the processing equipment to move the first wafer cassette to the wafer cassette storage area; if the first processing information and the second processing information are inconsistent, send a second instruction to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0091] In this embodiment, the EAP device obtains the first processing information of the processing equipment and the second processing information of the MES client for the second wafer cassette. By comparing the first processing information and the second processing information, it determines whether the wafer cassette loaded by the processing equipment is the second wafer cassette and whether it can be moved to the wafer cassette storage area for processing. This avoids moving mismatched wafer cassettes to the wafer cassette storage area, reduces the invalid movement of wafer cassettes in the processing equipment, and improves the equipment utilization rate.
[0092] In some embodiments, the processor 32 is configured to receive a work instruction sent by the MES client, the work instruction indicating that the second wafer cassettes are all placed in the wafer cassette storage area; send a processing instruction to the processing equipment, instructing the processing equipment to process the wafers in the first wafer cassette; if a confirmation instruction is received from the processing equipment, send a status update instruction to the MES client, indicating that the status of the second wafer cassettes is waiting for processing; if a denial instruction is received from the processing equipment, send a second instruction to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0093] In some embodiments, the processor 32 is configured to receive a start processing instruction sent by the processing equipment and send a status update instruction to the MES client, indicating that the status of the second wafer cassette is start processing.
[0094] In some embodiments, the processor 32 is configured to receive a processing end instruction sent by the processing equipment and send a status update instruction to the MES client, indicating that the status of the second wafer cassette is processing end.
[0095] In some embodiments, the processor 32 is configured to detect the status of a plurality of wafer cassette loading ports of the processing equipment, determine the idle wafer cassette loading ports, and send a third instruction to the processing equipment. The third instruction carries an identifier of the idle wafer cassette loading port, instructing the processing equipment to return the first wafer cassette to the idle wafer cassette loading port.
[0096] In some embodiments, the number of the first wafer cassettes is multiple.
[0097] In related technologies, for each wafer cell, the EAP application sends a work instruction to the processing equipment to instruct the wafer cell to be processed. If there are multiple wafer cells, the EAP application needs to send multiple work instructions to the processing equipment to complete the processing of multiple wafer cells, resulting in low processing efficiency. However, in the embodiment of this application, the number of wafer cells is multiple, so the EAP device can use a single instruction to instruct the processing equipment to process multiple wafer cells simultaneously, thereby improving processing efficiency, increasing equipment uptime, and reducing processing costs.
[0098] This invention also provides a cargo handling control device, applied to processing equipment, such as... Figure 5 As shown, it includes a memory 41, a processor 42, and a computer program stored in the memory 41 and executable on the processor 42; when the processor 42 executes the program, it implements the cargo control method described above.
[0099] In some embodiments, the processor 42 is configured to send first processing information to the Equipment Automation and Control (EAP) device, the first processing information being processing information of a first wafer cassette loaded by the processing equipment, the first processing information including: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment; and to receive a first instruction or a second instruction sent by the EAP device, the first instruction instructing the processing equipment to move the first wafer cassette to the wafer cassette storage area; the second instruction instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
[0100] In this embodiment, the processing equipment sends second processing information to the EAP device so that the EAP device can determine whether the wafer cassette loaded by the processing equipment is the second wafer cassette based on the second processing information.
[0101] In some embodiments, the processor 42 is configured to receive a processing instruction sent by the EAP device, instructing the processing equipment to process the wafer in the first wafer cassette; if the processing instruction is successfully received, a confirmation instruction is sent to the EAP device; if the processing instruction is not successfully received, a denial instruction is sent to the EAP device.
[0102] In some embodiments, the processor 42 is configured to begin processing the first wafer cassette and send a start processing command to the EAP device, instructing the processor to begin processing the first wafer cassette.
[0103] In some embodiments, the processor 42 is used to complete the processing of the first wafer cassette and send a processing termination command to the EAP device, indicating that the processing of the first wafer cassette is terminated.
[0104] In some embodiments, the processor 42 is configured to receive a third instruction sent by the EAP device, instructing the processing equipment to return the first wafer cassette to an idle wafer cassette loading port.
[0105] This application also provides a computer program / program product, which is stored in a storage medium and executed by at least one processor to implement the various processes of the above-described cargo control method embodiments, and can achieve the same technical effect. To avoid repetition, it will not be described again here.
[0106] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.
[0107] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a computer software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) and includes several instructions to cause a terminal (which may be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in the various embodiments of this application.
[0108] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.
Claims
1. A runout control method characterized by, Applications to equipment automation control EAP devices include: The first processing information sent by the processing equipment is obtained. The first processing information is the processing information of the first wafer cassette loaded by the processing equipment. The first processing information includes: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment. The system obtains second processing information for the second wafer cassette sent by the Manufacturing Execution System (MES) client. The second processing information includes: the identifier of the second wafer cassette, the processing recipe identifier, the location information of the wafers stored in the second wafer cassette, and the identifier of the processing equipment. Compare the first processing information and the second processing information; If the first processing information and the second processing information are consistent, a first instruction is sent to the processing equipment, instructing the processing equipment to move the first wafer cassette to the wafer cassette storage area; if the first processing information and the second processing information are inconsistent, a second instruction is sent to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port; After sending the first instruction to the processing equipment, the method further includes: Receive a work instruction sent by the MES client, the work instruction indicating that the second wafer cassettes are all placed in the wafer cassette storage area; Send a processing instruction to the processing equipment, instructing the processing equipment to process the wafer in the first wafer cassette; If a confirmation instruction is received from the processing equipment, a status update instruction is sent to the MES client, indicating that the status of the second wafer cassette is "waiting for processing"; if a denial instruction is received from the processing equipment, the second instruction is sent to the processing equipment, instructing the processing equipment to return the first wafer cassette to the wafer cassette loading port.
2. The run content control method according to claim 1, characterized by, After receiving the confirmation command sent by the processing equipment, the method further includes: The system receives a start processing command from the processing equipment and sends a status update command to the MES client, indicating that the status of the second wafer cassette is start processing. The start processing command is issued by the processing equipment after it begins processing the first wafer cassette.
3. The method for controlling cargo movement according to claim 2, characterized in that, The method further includes sending a status update command to the MES client, indicating that the status of the second wafer cassette is "processing has begun". The system receives a processing end instruction from the processing equipment and sends a status update instruction to the MES client, indicating that the status of the second wafer cassette is processing end. The processing end instruction is issued by the processing equipment after it has completed processing the first wafer cassette.
4. The running content control method according to claim 3, characterized by, After receiving the end-of-process instruction sent by the processing equipment, the method further includes: The status of multiple wafer cassette loading ports of the processing equipment is detected, and an idle wafer cassette loading port is identified. A third instruction is sent to the processing equipment, which carries the identifier of the idle wafer cassette loading port and instructs the processing equipment to return the first wafer cassette to the idle wafer cassette loading port.
5. The runnability control method according to any one of claims 1 to 4, characterized by, The number of the first wafer cells is multiple.
6. A cargo run control method characterized by, Applied to processing equipment, including: Send first processing information to the Equipment Automation and Control (EAP) device. The first processing information is the processing information of the first wafer cassette loaded by the processing equipment. The first processing information includes: the identifier of the first wafer cassette, the processing recipe identifier, the location information of the wafer stored in the first wafer cassette, and the identifier of the processing equipment. The equipment receives a first instruction or a second instruction from the EAP device, wherein the first instruction instructs the processing equipment to move the first wafer cassette to the wafer cassette storage area; and the second instruction instructs the processing equipment to return the first wafer cassette to the wafer cassette loading port. After receiving the first instruction sent by the EAP device, the method further includes: The device receives a processing instruction from the EAP device and instructs the processing equipment to process the wafer in the first wafer cassette. If the processing instruction is successfully received, a confirmation instruction is sent to the EAP device; if the processing instruction is not successfully received, a denial instruction is sent to the EAP device.
7. The runnability control method according to claim 6, characterized by, After sending a confirmation command to the EAP device, the method further includes: The first wafer cassette is processed, and a start processing command is sent to the EAP device to instruct the processing of the first wafer cassette to begin.
8. The runnability control method according to claim 7, characterized by, After sending a start processing command to the EAP device, the method further includes: The processing of the first wafer cassette is completed, and a processing termination command is sent to the EAP device to indicate the end of processing of the first wafer cassette.
9. The runnability control method according to claim 8, characterized by, After sending a processing end command to the EAP device, the method further includes: The third instruction sent by the EAP device is received, instructing the processing equipment to return the first wafer cassette to an idle wafer cassette loading port.
10. A run cargo control device characterized by An equipment automation control (EAP) device includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, it implements the cargo handling control method as described in any one of claims 1-5.
11. A run cargo control device characterized by comprising: The method is applied to processing equipment and includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, it implements the cargo handling control method as described in any one of claims 6-9.
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