A co-path shear interferometric imaging system and method with independent adjustable shear and carrier frequencies

By using a common-path shear interferometry imaging system with independent control of shear quantity and carrier frequency, the problem of entanglement between shear quantity and spatial carrier frequency in collinear common-path systems is solved, enabling high-precision and wide-range measurement of complex surfaces or deformations, suitable for industrial environments.

CN116147497BActive Publication Date: 2026-03-17HARBIN ENG UNIV
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Patent Information

Application Number
CN202310003555.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-01-03
Publication Date
2026-03-17
Estimated Expiration
2043-01-03

AI Technical Summary

Technical Problem

Existing collinear shear interferometry systems struggle to achieve independent control of shear quantity and spatial carrier frequency, resulting in limitations in accuracy and range for measuring complex surface shapes or deformations.

Method used

A common-path shearing interferometric imaging system with independently adjustable shearing and carrier frequency is adopted. By adjusting the distance between the Wollaston prism and the intermediate real image plane and the image distance of the 4f imaging system, the shearing amount and spatial carrier frequency are controlled respectively. Combined with Fourier transform and inverse Fourier transform, the independent adjustment of shearing amount and carrier frequency is achieved.

Benefits of technology

It provides a convenient system installation method, has excellent noise resistance, is suitable for complex surface or deformation measurement, ensures high accuracy and a large measurement range, and is particularly suitable for industrial environments.

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Abstract

The application discloses a kind of shearing and carrier frequency independently adjustable common-path shearing interferometry imaging system and method, including coherent light source, the light beam of coherent light source is shot to the surface of measured object by beam expander, and measured object, lens one, diaphragm, lens two, Wollaston prism, polaroid, imaging lens, camera are sequentially arranged on the same axis with measured object.The application also discloses a kind of shearing and carrier frequency independently adjustable common-path shearing interferometry imaging method.The application uses the above-mentioned one kind of shearing and carrier frequency independently adjustable common-path shearing interferometry imaging system and method, the control of shear quantity and spatial carrier frequency in imaging system is distributed to different parts of imaging system, and adjustable near-zero shear quantity provides small enough shear force, to ensure that complex surface shape or deformation can be solved;When configuring the required near-zero shear quantity, the separate control of spatial carrier wave further ensures the well-distributed spatial spectrum.
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