High-gain fast-response microchannel plate and method of manufacturing the same

Abstract

The application relates to the technical field of micro-channel plates, in particular to a high-gain fast-response micro-channel plate and a preparation method thereof, which comprises a first micro-channel plate provided with a first side end face and a second side end face, wherein the first micro-channel plate is provided with a plurality of first hole structures penetrating through the first side end face and the second side end face; and a second micro-channel plate provided with a first side end face and a second side end face, wherein the second micro-channel plate is provided with a plurality of second hole structures penetrating through the first side end face and the second side end face. According to the application, two micro-channel plates with different hole diameters are pasted together to form a micro-channel plate, so that the input surface micro-channel passage diameter of the micro-channel plate is greater than the output surface micro-channel passage diameter; the characteristics of large holes to small holes and one hole to multiple holes can reduce the degradation degree of position resolution capability, and meanwhile, excellent time characteristics and high gain are still possessed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microchannel plates, in particular to a high-gain fast-response microchannel plate and a preparation method thereof. BACKGROUND

[0002] Microchannel plates (MCP) are a simple and compact electron multiplier device developed in the late 1960s, which can detect charged particles, electrons, X-rays and UV photons, has the advantages of low power consumption, self-saturation, high-speed detection and low noise, and is applied in various detectors in various forms.

[0003] The gain of the microchannel plate comes from the cascade multiplication formed by the secondary electron emission of the inner wall of the channel, and the gain of the single microchannel plate can usually reach 10 4 Due to the saturation of the output charge quantity of the single channel, the gain of the single microchannel plate is difficult to exceed 10 5 In the field of weak signal detection such as single-photon detection and ion detection, in order to achieve higher gain, two microchannel plates are usually stacked in a V shape, such as the technical solution shown in patent document 1, or even three microchannel plates are stacked in a Z shape to obtain higher gain performance.

[0004] However, the use of multiple MCPs for higher gain also sacrifices some performance, including time resolution and position resolution. Since the path of electron multiplication amplification is longer and there is a certain electric field-free gap region between the multiple MCPs, it has a great influence on the time response performance, and has a relatively obvious influence on the rise time, fall time, half-width and transit time dispersion (TTS) of the signal pulse.

[0005] Therefore, people have constructed a single MCP structure by sticking two MCPs together, as shown in the technical solution of patent document 2, but since the channel array structure of the MCP does not have long-range order properties, it is impossible to achieve one-to-one correspondence between the channels of the two MCPs, which will inevitably lead to a significant decrease in position resolution.

[0006] Prior art documents

[0007] Patent document 1 CN111883413A Near-sticking type microchannel plate photomultiplier tube with large opening area ratio

[0008] Patent document 2 CN106158554A Manufacturing method of V-shaped channel microchannel plate. SUMMARY

[0009] The first aspect of the present application provides a technical solution, a high-gain fast-response micro-channel plate, comprising:

[0010] The input channel blank is provided with a first side end face and a second side end face, and the input channel blank is provided with a plurality of first hole structures penetrating through the first side end face and the second side end face;

[0011] The output channel blank is provided with a first side end face and a second side end face, and the output channel blank is provided with a plurality of second hole structures penetrating through the first side end face and the second side end face;

[0012] The second side end face of the input channel blank and the first side end face of the output channel blank are bonded to form a bonding surface, the first side end face of the input channel blank is defined as an input surface, and the second side end face of the output channel blank is defined as an output surface;

[0013] The first hole structure is larger than the second hole structure in hole diameter, and in the bonding surface, the first hole structure corresponds to at least one more second hole structure.

[0014] Preferably, the hole diameter of the second hole structure is less than 1 / 2 of the hole diameter of the first hole structure.

[0015] Preferably, the thickness of the input channel blank is set to make the aspect ratio of the first hole structure 40:1~60:1, and the thickness of the output channel blank is set to make the aspect ratio of the second hole structure 21 40:1~60:1.

[0016] Preferably, the hole diameter of the first hole structure is 4μm-8μm, the thickness of the input channel blank is 0.2-0.4mm, the hole diameter of the second hole structure is 1μm-3μm, and the thickness of the output channel blank is 0.05mm-0.15mm.

[0017] Preferably, the opening area ratio of the input channel blank and the output channel blank is greater than 60%.

[0018] Preferably, in the input channel blank, a plurality of first hole structures are distributed in a hexagonal close-packed structure in a section parallel to the bonding surface, and in the output channel blank, a plurality of second hole structures are distributed in a hexagonal close-packed structure in a section parallel to the bonding surface.

[0019] Preferably, the channel direction of the first hole structure is in a く shape with the channel direction of the second hole structure.

[0020] The second aspect of the present application provides a technical solution, a preparation method of a high-gain fast-response micro-channel plate, comprising the following steps:

[0021] Step 1, a first piece of un-etched microchannel plate blank and a second piece of un-etched microchannel plate blank are adhered together in a V-shaped channel direction to form an integrated microchannel plate blank with bent channels;

[0022] Step 2, the first piece of un-etched microchannel plate blank and the second piece of un-etched microchannel plate blank are cold-worked to a predetermined thickness;

[0023] Step 3, the microchannel plate blank after the thinning treatment in Step 2 is etched, hydrogen-reduced and coated to obtain a microchannel plate with bent channels;

[0024] Preferably, in Step 1, the first piece of un-etched microchannel plate blank and the second piece of un-etched microchannel plate blank are adhered together by high-temperature pressure softening or by bonding.

[0025] Preferably, in Step 2, the microchannel plate blank is thinned by grinding and polishing to a length-diameter ratio of 40:1~60:1.

[0026] Preferably, in Step 2, the microchannel plate blank is thinned by grinding and polishing to a length-diameter ratio of 40:1~60:1.

[0027] Compared with the prior art, the present application has the following advantages:

[0028] The present application has the following advantages: BRIEF DESCRIPTION OF DRAWINGS

[0029] The accompanying drawings are not intended to be drawn to scale. In the drawings, each same or like component shown in each of the figures can be designated with the same reference numerals. In the interest of clarity, not each component of each figure is labeled. Embodiments of various aspects of the present application will now be described, by way of example only, with reference to the accompanying drawings in which:

[0030] Figure 1 is a structural schematic diagram of a high-gain fast-response microchannel plate shown in the present application;

[0031] Figure 2 is a schematic diagram of a first hole structure and a second hole structure shown in the present application. DETAILED DESCRIPTION

[0032] In order to better understand the technical content of the present application, specific embodiments are described below with reference to the accompanying drawings.

[0033] In order to better understand the technical content of the present application, specific embodiments are described below with reference to the accompanying drawings.

[0034]

High-gain fast-response microchannel plate

[0035] In combination Figure 1 As shown in the drawings, the first aspect of the present application proposes a technical solution, a high-gain fast-response microchannel plate mainly includes an input channel blank 10 and an output channel blank 20, wherein the input channel blank 10 is provided with a first side end face and a second side end face, and the input channel blank 10 is provided with a plurality of first hole structures 11 penetrating through the first side end face and the second side end face; the output channel blank 20 is provided with a first side end face and a second side end face, and the output channel blank 20 is provided with a plurality of second hole structures 21 penetrating through the first side end face and the second side end face.

[0036] Further, the second side end face of the input channel blank 10 and the first side end face of the output channel blank 20 are attached to form an attached surface 102, the first side end face of the input channel blank 10 is defined as an input surface 101, and the second side end face of the output channel blank 20 is defined as an output surface 103.

[0037] It can be understood that the input surface 101 is the receiving surface of photoelectrons, and the output surface 103 is the emitting surface of photoelectrons. When photoelectrons are incident from the input surface 101 to the inner walls of the first hole structure 11 of the input channel blank 10 and the second hole structure 21 of the output channel blank 20, a cascade multiplication is formed by the secondary electron emission, and a large gain is obtained.

[0038] Since there is a saturation effect in the single hole, that is, the total amount of charge output by a single channel has an upper limit in a very short time, and more charge cannot be output beyond the upper limit, in combination with the fact that Figure 2 As shown in the figure, the first hole structure 11 has a larger hole diameter than the second hole structure 21, and in the bonding surface 102, the first hole structure 11 corresponds to at least one or more second hole structures 21.

[0039] In this way, the surface with a small hole diameter serves as an output surface, the number of holes per unit area is larger, the total amount of output charge is larger, the influence of the saturation effect on the gain can be suppressed, the photoelectrons after the gain by the first hole structure 11 are further gained in the second hole structure 21, and at the same time, the large hole corresponds to multiple small holes, compared with the double-piece bonding scheme in the prior art, the degradation of the position resolution capability can be reduced, and excellent high-gain and high-time resolution characteristics are achieved.

[0040] Preferably, the hole diameter of the second hole structure 21 is less than 1 / 2 of the hole diameter of the first hole structure 11. In this way, under the conditions allowed by the process, better gain effect and position and time resolution performance can be achieved.

[0041] In a preferred embodiment, as shown in the figure, the channel direction of the first hole structure 11 is opposite to the channel direction of the second hole structure 21. Figure 1

[0042] Specifically, when splicing, the diagonal cut angle direction of the first piece of microchannel plate is defined as a square, and the diagonal cut angle direction of the second piece of microchannel plate is opposite to the placement direction of the first piece of microchannel plate, that is, the two microchannel plates are stacked and formed in a V-shaped channel direction.

[0043] In a preferred embodiment, in order to achieve high gain effect, the thickness of the input channel blank 10 is set so that the aspect ratio of the first hole structure 11 is 40:1~60:1, and the thickness of the output channel blank 20 is set so that the aspect ratio of the second hole structure 21 is 40:1~60:1.

[0044] In an optional embodiment, the hole diameter of the first hole structure 11 is 4μm-8μm, the thickness of the input channel blank 10 is 0.2-0.4mm under the condition of satisfying the aspect ratio, the hole diameter of the second hole structure 21 is 1μm-3μm, and the thickness of the output channel blank 20 is 0.05 mm-0.15mm under the condition of satisfying the aspect ratio.

[0045] In a preferred embodiment, the hole diameter of the first hole structure 11 is 6μm, the thickness of the input channel blank 10 is 0.5mm; the hole diameter of the second hole structure 21 is 2μm, and the thickness of the output channel blank 20 is 0.3mm.

[0046] ​Further, in order to improve the resolution of the microchannel plate, the opening area ratio of the input channel blank 10 and the output channel blank 20 is greater than 60%. In combination Figure 2 As shown in the figure, it is preferred that the micro-hole structure is arranged in a hexagonal close-packed structure.

[0047] That is, the input channel blank 10 is in a cross section parallel to the bonding surface 102, and the plurality of first hole structures 11 are arranged in a hexagonal close-packed structure. The output channel blank 20 is in a cross section parallel to the bonding surface 102, and the plurality of second hole structures 21 are arranged in a hexagonal close-packed structure.

[0048]

Preparation method of high-gain fast-response microchannel plate

[0049] The second aspect of the present application provides a technical scheme, a preparation method of a high-gain fast-response microchannel plate, comprising the following steps:

[0050] Step 1, a first piece of unetched microchannel plate blank and a second piece of unetched microchannel plate blank are stacked and bonded in a V-shaped direction of the channel to form an integrated body, obtaining a microchannel plate blank with a bent channel;

[0051] Step 2, the first piece of unetched microchannel plate blank and the second piece of unetched microchannel plate blank are cold worked and thinned to a predetermined thickness;

[0052] Step 3, the microchannel plate blank after the thinning treatment in step 2 is subjected to etching, hydrogen reduction and plating treatment, obtaining a microchannel plate with a bent channel.

[0053] Among them, the first hole structure 11 of the formed microchannel plate input surface 101 has a larger hole diameter than the second hole structure 21 of the output surface 103.

[0054] Specifically, two pieces of unetched small aperture microchannel plate blanks (wherein the first blank has a core diameter of 4-8 μm and a plate thickness of 0.4-0.6 mm; the second blank has a core diameter of 1-3 μm and a plate thickness of 0.25-0.35 mm) are stacked and bonded in a V-shaped direction of the channel to form an integrated body, forming a microchannel plate blank with a bent channel.

[0055] Optionally, the first piece of unetched microchannel plate blank and the second piece of unetched microchannel plate blank are bonded by softening the blank glass under high temperature and pressure conditions or by bonding.

[0056] In a specific embodiment, the high temperature and pressure conditions mentioned above are a temperature range of 500-600℃ and a pressure of 0.1-5 kg / cm 2 .

[0057] The microchannel plate blank with the bending channel is cold processed to reduce the thickness to the required thickness, specifically, the blank with the total thickness of 0.65mm-0.95mm is reduced to 0.25mm-0.55mm, and the microchannel plate blank can be optionally thinned by grinding and polishing, and the length-diameter ratio of the first hole structure 11 and the second hole structure 21 is 40:1-60:1 after thinning.

[0058] Specifically, the first blank part after thinning has a remaining thickness of 0.2mm-0.4mm, and the second blank part has a remaining thickness of 0.05mm-0.15mm.

[0059] Further, after the etching, hydrogen reduction and plating processes, the single microchannel plate with the bending channel and the ultra-thin thickness is finally formed.

[0060] In the etching step, 0.1mol / L hydrochloric acid is used for 4 hours, in the hydrogen reduction step, hydrogen is passed for 5 hours at a temperature of 400°C, and in the plating step, NiCR is plated with a thickness of about 300nm.

[0061] Therefore, by the process of the present application, the single microchannel plate with the bending channel and the ultra-thin thickness is manufactured, which can replace the double MCPs stacked to be applied to various vacuum photoelectric detection devices and particle detectors with high requirements for time resolution and position resolution, and the time resolution and position resolution are significantly improved.

[0062] In the preferred embodiment, the thickness of the integrated microchannel plate blank with the bending channel is reduced from 0.8mm to 0.4mm according to the above process, wherein the thickness of the input channel blank 10 is 0.3mm, the diameter of the first hole structure 11 is 6μm, the thickness of the output channel blank 20 is 0.1mm, and the diameter of the second hole structure 21 is 2μm.

[0063] The comparison with the microchannel plate with the hole diameter of 6μm and the plate thickness of 0.3mm stacked by the double MCPs in the prior art is shown in the following table

[0064] Performance indicators Dual MCP stack (6 μm / 0.3 mm) Single MCP of this embodiment Time resolution 1.2 ns 0.6 ns Position resolution 30 lp / mm 55 lp / mm

[0065] Although the present application has been disclosed with reference to the preferred embodiments above, it is not intended to limit the present application. Those skilled in the art can make various modifications and improvements without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application is defined by the claims.

Claims

1. A high-gain, fast-response microchannel plate, characterized in that, include: The input channel blank (10) has a first side end face and a second side end face, and the input channel blank (10) has a plurality of first hole structures (11) that penetrate the first side end face and the second side end face. The output channel blank (20) has a first side end face and a second side end face, and the output channel blank (20) has a plurality of second hole structures (21) that penetrate the first side end face and the second side end face. The second side end face of the input channel blank (10) is attached to the first side end face of the output channel blank (20) to form a fitting surface (102). The first side end face of the input channel blank (10) is defined as the input surface (101), and the second side end face of the output channel blank (20) is defined as the output surface (103). The first hole structure (11) has a larger aperture than the second hole structure (21), and within the mating surface (102), the first hole structure (11) corresponds to at least one second hole structure (21). The input channel blank (10) and the output channel blank (20) are bonded together by softening the blank glass or by bonding, and the total thickness of the input channel blank (10) and the output channel blank (20) is 0.25mm-0.55mm. The channel orientation of the first hole structure (11) and the channel orientation of the second hole structure (21) are in the shape of a "く".

2. The high-gain, fast-response microchannel plate according to claim 1, characterized in that, The aperture of the second hole structure (21) is less than 1 / 2 of the aperture of the first hole structure (11).

3. The high-gain, fast-response microchannel plate according to claim 1, characterized in that, The thickness of the input channel blank (10) is set such that the aspect ratio of the first hole structure (11) is 40:1 to 60:1, and the thickness of the output channel blank (20) is set such that the aspect ratio of the second hole structure (21) is 40:1 to 60:

1.

4. The high-gain, fast-response microchannel plate according to claim 1, characterized in that, The aperture of the first hole structure (11) is 4μm-8μm, the thickness of the input channel blank (10) is 0.2-0.4mm, the aperture of the second hole structure (21) is 1μm-3μm, and the thickness of the output channel blank (20) is 0.05mm-0.15mm.

5. The high-gain, fast-response microchannel plate according to any one of claims 1-4, characterized in that, The ratio of the opening area of ​​the input channel blank (10) to that of the output channel blank (20) is greater than 60%.

6. The high-gain, fast-response microchannel plate according to any one of claims 1-4, characterized in that, The input channel blank (10) has multiple first hole structures (11) arranged in a hexagonal close-packed structure in a cross-section parallel to the bonding surface (102), and the output channel blank (20) has multiple second hole structures (21) arranged in a hexagonal close-packed structure in a cross-section parallel to the bonding surface (102).

7. A method for fabricating a high-gain, fast-response microchannel plate, characterized in that, Includes the following steps: Step 1: Stack and bond the first uncorroded microchannel plate blank and the second uncorroded microchannel plate blank in a V-shape according to the channel direction to form a whole, thus obtaining a microchannel plate blank with bent channels. Step 2: Cold process the first uncorroded microchannel plate blank and the second uncorroded microchannel plate blank to reduce them to the predetermined thickness; Step 3: The microchannel plate blank after the thinning treatment in Step 2 is subjected to etching, hydrogen reduction and coating treatment to obtain a microchannel plate with bent channels; The first hole structure (11) of the microchannel plate input surface (101) has a larger aperture than the second hole structure (21) of the output surface (103).

8. The method for fabricating a high-gain, fast-response microchannel plate according to claim 7, characterized in that, In step 1, the first uncorroded microchannel plate blank and the second uncorroded microchannel plate blank are bonded together by softening the glass blank under high temperature and pressure conditions or by bonding.

9. The method for fabricating a high-gain, fast-response microchannel plate according to claim 7, characterized in that, In step 2, the microchannel plate blank is thinned by grinding and polishing until the aspect ratio of the first hole structure (11) and the second hole structure (21) is 40:1 to 60:1.

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