Piezoelectric ceramic driving array and surface shape adjusting method
By directly processing small-sized electrode units on large-area piezoelectric ceramic sheets and forming an electric field-driven piezoelectric ceramic driving array, the problem of deformation control in large areas of traditional stacked piezoelectric ceramics is solved, improving processing quality and yield, and simplifying the connection process.
CN116234413BActive Publication Date: 2026-08-21INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
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Patent Information
- Application Number
- CN202211741780.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-12-29
- Publication Date
- 2026-08-21
- Estimated Expiration
- 2042-12-29
AI Technical Summary
Technical Problem
Traditional stacked piezoelectric ceramics are difficult to deform at different locations within a large area, and the processing is complex and the yield is low.
Method used
A piezoelectric ceramic driving array is used. Small-sized electrode units are directly processed on a large-area piezoelectric ceramic sheet, and the electrodes of each layer are connected by conductive posts to form an electric field-driven deformation, which simplifies the electrode connection process.
Benefits of technology
It enables flexible control of deformation at different locations within a large area, improving processing quality and yield, and reducing connection complexity.
✦ Generated by Eureka AI based on patent content.
Abstract
The present disclosure provides a piezoelectric ceramic driving array and a surface shape adjustment method. The piezoelectric ceramic driving array comprises a bottom electrode layer, a piezoelectric ceramic array and an insulating layer which are sequentially stacked, the bottom electrode layer comprises arrayed bottom electrodes; the piezoelectric ceramic array comprises at least one layer of piezoelectric ceramic array units, and the plurality of layers of piezoelectric ceramic array units are stacked, each layer of piezoelectric ceramic array units comprises a positive electrode layer and a negative electrode layer which are stacked; the positive electrode layer comprises a first piezoelectric ceramic sheet and a positive electrode array formed on the surface of the first piezoelectric ceramic sheet, and the negative electrode layer comprises a second piezoelectric ceramic sheet and a negative electrode array formed on the surface of the second piezoelectric ceramic sheet; each positive electrode on the same positive electrode layer is independent of each other, and the positive electrodes at the same position on different positive electrode layers are connected to the bottom electrode at the corresponding position after being adjacent; each negative electrode on the same negative electrode layer is connected to at least one adjacent negative electrode, and the negative electrodes at the same position on the edges of different negative electrode layers are connected to an external circuit after being adjacent.
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