A superconducting cavity buffer chemical polishing online monitoring device and method

Abstract

The present invention discloses an online detection device and method for buffered chemical polishing of a superconducting cavity. The device includes a mobile vehicle, a gravity sensor mounted on the mobile vehicle, and a support rod assembly. The gravity sensor is disposed between the mobile vehicle and the support rod assembly. The support rod assembly is provided with a rotary motor and a superconducting cavity. The rotary motor is used to drive the superconducting cavity to rotate. The superconducting cavity is connected to a buffered chemical polishing (BCP) device. The BCP device includes a polishing liquid supply assembly for supplying polishing liquid to the superconducting cavity. The gravity sensor is connected to a signal transmission assembly. The present invention can detect changes in the mass of the superconducting cavity in real time and calculate the average polishing thickness and average polishing rate of the superconducting cavity based on the polishing time, thereby achieving precise control of the polishing thickness.

Description

Technical Field

[0001] The present invention relates to the field of superconducting cavities, and in particular to an online monitoring device and method for buffered chemical polishing of a superconducting cavity. Background Art

[0002] The penetration depth of high-frequency electromagnetic fields within a superconducting cavity is on the order of 100 nm. Within this penetration depth, the material condition of the superconducting cavity's inner surface crucially influences its performance, such as surface roughness and cleanliness. During machining of the superconducting cavity, processes such as stamping can result in a machining damage layer approximately 100 μm thick on the inner surface. This damage layer, caused by mechanical scratches and misalignments, requires polishing to remove. Common polishing methods include mechanical polishing, buffered chemical polishing (BCP), and electrochemical polishing (EP).

[0003] The average polishing thickness of the inner surface is 150-180μm. Polishing is a key step in superconducting cavity surface treatment to eliminate machining damage, remove impurities and contamination from the superconducting cavity surface, and improve surface finish. The BCP polishing solution is a mixture of 65% nitric acid, 40% hydrofluoric acid, and 85% phosphoric acid in a volume ratio of 1:1:2. The EP polishing solution is a mixture of 98% concentrated sulfuric acid and 40% hydrofluoric acid in a volume ratio of 9:1. Polishing results show that EP can achieve superior surface finish and lower surface roughness than BCP. However, due to the complex structure of EP equipment, prominent dynamic sealing engineering issues, and high cost, its application is limited. It is mainly used to treat high-beta superconducting cavities with relatively simple structures and high field acceleration gradient requirements. Mechanical polishing uses a staged polishing process, with each stage using a rotary rolling polishing process using polishing abrasives of different materials, shapes, and particle sizes. Currently, mechanical polishing can achieve the lowest surface roughness and highest surface finish, but its polishing efficiency is extremely low, and BCP or EP polishing is still required after polishing. BCP polishing equipment is relatively simple and the process is relatively easy to implement, so it is widely used.

[0004] The BCP polishing rate is determined by a variety of factors, including temperature, acid flow rate, the internal structure of the superconducting cavity, and the Nb ion concentration in the acid. Therefore, accurately predicting the polishing rate is difficult and can only be estimated empirically based on previous experimental polishing rate data. This empirical estimate has an error range of up to ±20%. Deviations between the expected and actual polished thickness of the superconducting cavity will result in the polishing thickness failing to meet the required thickness or exceeding it, thereby affecting the performance of the superconducting cavity and wasting human and material resources. Superconducting cavities that fail to meet the polishing thickness requirements require additional BCP treatment. Given that the polishing solution contains highly hazardous chemicals such as hydrofluoric acid and concentrated nitric acid, additional polishing not only increases labor and material costs but also increases operator safety risks. Summary of the Invention

[0005] In order to solve the problem that real-time detection cannot be achieved in the existing buffered chemical polishing process, resulting in inaccurate polishing thickness, the present invention provides a superconducting cavity buffered chemical polishing online detection device and method.

[0006] A superconducting cavity buffered chemical polishing (BCP) online monitoring device includes a mobile vehicle, a gravity sensor mounted on the vehicle, and a support rod assembly. The gravity sensor is positioned between the mobile vehicle and the support rod assembly. The support rod assembly is equipped with a rotary motor and a superconducting cavity. The rotary motor is used to drive the superconducting cavity to rotate. The superconducting cavity is connected to a BCP device. The BCP device includes a polishing liquid supply assembly that provides polishing liquid to the superconducting cavity. The gravity sensor is connected to a signal transmission assembly. This device can monitor the quality changes of the superconducting cavity in real time to achieve precise control of the polishing thickness and ensure the polishing effect of the superconducting cavity. It is simple to operate and low in cost.

[0007] Optionally, the support rod assembly includes a support plate, a support bracket mounted on the support plate, a support rod detachably mounted on the support bracket, a rotating bracket mounted on the support rod, a rotating motor and a superconducting cavity mounted on the rotating bracket, and the gravity sensor disposed between the support plate and the mobile vehicle. The support assembly facilitates the installation of different superconducting cavities.

[0008] Optionally, four groups of gravity sensors are provided, each group of gravity sensors being evenly distributed on the lower surface of the support plate, and each group of gravity sensors including at least one gravity sensor. The detection results can be averaged to ensure the accuracy of the weight sensor detection data.

[0009] Optionally, the signal transmission component includes an analog-to-digital converter (ADC), a router, a signal repeater, and a host computer. The ADC is connected to the gravity sensor, which is connected to the router via Ethernet. The router sends a wireless signal to the signal repeater, which amplifies the signal and transmits it to the host computer. The host computer receives and stores the data, processes the data, and then draws a corresponding chart in real time. The host computer is connected to the rotating motor. The signal transmission component enables data acquisition, transmission, and processing.

[0010] Optionally, the host computer is connected to a motor driver, which is used to control the start, stop or speed regulation of the rotating motor. Automated operation ensures the polishing effect of the superconducting cavity.

[0011] Optionally, the polishing liquid supply assembly includes a polishing liquid tank, and the superconducting cavity is provided with a liquid inlet pipe and a liquid outlet pipe. The lower portion of the polishing liquid tank is connected to the liquid inlet pipe via a liquid inlet bellows, and the upper portion of the polishing liquid tank is connected to the liquid outlet pipe via a liquid outlet bellows. The liquid inlet bellows is provided with a pump body. The polishing liquid supply assembly can automatically provide polishing liquid and is easy to operate.

[0012] Optionally, a waste gas treatment tower connected to the polishing tank is provided on the polishing tank, and an exhaust chimney is provided on the waste gas treatment tower. The waste gas treatment tower can treat toxic and harmful waste gases generated during the polishing process, achieve standard emission, and avoid environmental pollution.

[0013] A method for online monitoring of superconducting cavity buffered chemical polishing, comprising the following steps:

[0014] The signal transmission component acquires gravity data G detected by the gravity sensor in real time;

[0015] The signal transmission component includes a signal processor, which calculates the mass difference Δm of the superconducting cavity within a certain time period according to the formula G=Δm g, where g is the gravitational acceleration constant;

[0016] The signal processor calculates the average polishing thickness based on the formulas Δm = ρΔV and ΔV = SΔd, where ρ is the density of the superconducting cavity material, ΔV is the volume of material polished away from the superconducting cavity, S is the inner surface area of ​​the superconducting cavity, and Δd is the average polishing thickness. The average polishing rate is then calculated based on the polishing time. The signal processor stores the calculated data. This automatically detects changes in the superconducting cavity weight, thereby effectively controlling the polishing thickness.

[0017] Optionally, the signal transmission component includes an analog-to-digital converter (ADC), a router, a signal repeater, and a host computer. The ADC is connected to the weight sensor, the ADC is connected to the router via Ethernet, the router sends a wireless signal to the signal repeater, the signal repeater amplifies the signal, and transmits it to the host computer. The host computer is connected to the rotating motor and includes a signal processor. The signal transmission component enables data acquisition, transmission, and processing.

[0018] Optionally, the following steps are also included:

[0019] The host computer sends a control command to the rotating motor in the form of a wireless signal, and the rotating motor receives the control command and responds accordingly to ensure the polishing effect of the superconducting cavity.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention provides an online detection device for superconducting cavity buffered chemical polishing, which can detect the quality change of the superconducting cavity in real time, and then calculate the average polishing thickness and average polishing rate of the superconducting cavity according to the polishing time, so as to achieve precise control of the polishing thickness.

[0022] The present invention provides an online monitoring method for buffered chemical polishing of a superconducting cavity. By using a gravity sensor and a signal transmission component, data acquisition, transmission and processing are achieved, and the quality change of the superconducting cavity during the polishing process is monitored in real time. The average polishing thickness and average polishing rate can be calculated, thereby accurately controlling the polishing thickness of the superconducting cavity and ensuring the polishing quality of the superconducting cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of a superconducting cavity buffer chemical polishing online detection device provided by an embodiment of the present invention Figure 1 ;

[0024] Figure 2 Schematic diagram of a superconducting cavity buffer chemical polishing online detection device provided by an embodiment of the present invention Figure 2 ;

[0025] Figure 3 A schematic diagram of the connection structure between a router and a host computer provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0026] To illustrate the technical solution of the present invention in detail, the following is a clear and complete description of the technical solution of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Example 1:

[0028] This embodiment provides an online monitoring device for buffered chemical polishing of a superconducting cavity, including a mobile vehicle 1, a gravity sensor 2 and a support rod assembly 30 arranged on the mobile vehicle 1, the gravity sensor 2 is arranged between the mobile vehicle 1 and the support rod assembly 30, and the support rod assembly 30 is provided with a rotating motor 15 and a superconducting cavity 7. The rotating motor 15 is used to drive the superconducting cavity 7 to rotate. The superconducting cavity 7 is connected to a BCP device. The BCP device includes a polishing liquid supply component 10 for supplying polishing liquid to the superconducting cavity 7. The gravity sensor 2 is connected to a signal transmission component 20.

[0029] The mobile vehicle 1 is movable, with movable wheels disposed at its bottom. A gravity sensor 2 is disposed on the upper surface of the mobile vehicle 1 and is used to detect the gravity of the support rod assembly 30, the superconducting cavity 7, and the polishing liquid within the superconducting cavity 7. During detection, the superconducting cavity 7 is stationary. A rotary motor 15 is controlled by a wireless signal and is used to control the rotation of the superconducting cavity 7.

[0030] The mobile vehicle 1 can move the gravity sensor 2, support rod assembly 30, and superconducting cavity 7 to the side of the BCP equipment. Because some superconducting cavities 7 are relatively heavy, the superconducting cavity 7 and mobile vehicle 1 can be installed in a spacious area. After installation, the mobile vehicle 1 can be pushed to the side of the BCP equipment, and the superconducting cavity 7 and BCP equipment can be installed. The rotating motor 15 can drive the superconducting cavity 7 to rotate 180 degrees, adjusting the direction of the polishing liquid inlet and outlet, thereby improving polishing uniformity. The rotating motor 15 rotates automatically, eliminating the need for manual adjustment of the relative position of the superconducting cavity 7, thus improving efficiency. During the BCP equipment polishing of the superconducting cavity, the superconducting cavity remains connected to the BCP equipment and will not disconnect or leak. The signal transmission component 20 transmits and processes the data detected by the gravity sensor 2. Specifically, among the components above the gravity sensor 2, only the superconducting cavity 7 undergoes a mass change due to the chemical reaction. Therefore, according to the formula G = mg, where g is the gravitational acceleration constant, the mass difference Δm of the superconducting cavity 7 over a preset time can be calculated. According to the formula Δm = ρΔV, where superconducting cavity 7 is made of niobium and ρ is the density of niobium, the average polishing thickness and average polishing rate can be calculated based on the known niobium density and the internal surface area of ​​superconducting cavity 7. The average polishing rate is equal to the average polishing thickness divided by the polishing time. The present invention uses gravity sensor 2 to detect the weight change of superconducting cavity 7 in real time, thereby calculating the polishing thickness within a preset time. Specifically, the polishing time can be calculated based on the desired polishing thickness, controlling the polishing time and thus improving the accuracy of the polishing thickness of superconducting cavity 7.

[0031] Under the premise that the polishing liquid fills the superconducting cavity 7 and the polishing liquid circulates and the flow rate is stable, the gravity sensor 2 can accurately weigh the instantaneous mass of the superconducting cavity 7, the polishing liquid inside the superconducting cavity 7, and the support rod assembly 30 as a whole. As the polishing proceeds, the mass of the superconducting cavity 7 decreases, while the mass change of the polishing liquid inside the superconducting cavity 7 is negligible. The density of the polishing liquid will increase as the polishing proceeds. The increase in the mass of the polishing liquid inside the superconducting cavity 7 caused by the increase in density is due to the fact that the proportion of the polishing liquid inside the superconducting cavity 7 is very small. Therefore, the only mass change can be directly defined as the decrease in the mass of the superconducting cavity 7, and the required data can be obtained through calculation.

[0032] The support rod assembly 30 includes a support plate 3, on which a support bracket 4 is mounted. A support rod 5 is detachably mounted on the support bracket. A rotating bracket 6 is mounted on the support rod 5. The rotating bracket 6 is equipped with a rotating motor 15 and a superconducting cavity 7. The gravity sensor 2 is disposed between the support plate 3 and the mobile vehicle 1. The support bracket 4 is used to secure the support rod 5. As needed, the support rod 5 can be of different lengths or can be retractable.

[0033] The signal transmission component 20 includes an analog-to-digital converter 21, a router 22, a signal repeater, and a host computer 23. The analog-to-digital converter 21 is connected to the gravity sensor 2. The analog-to-digital converter 21 is connected to the router 22 via Ethernet. The router 22 sends a wireless signal to the signal repeater. The signal repeater is used to amplify the signal and transmit it to the host computer 23. The host computer 23 receives and stores the data. The host computer processes the data and draws the corresponding chart in real time. The host computer 23 is connected to the rotating motor 15. The host computer 23 is connected to the motor driver 24, which is used to control the start, stop, or speed regulation of the rotating motor 15.

[0034] Specifically, gravity sensor 2 acquires mass data in real time, converts it into a digital signal via analog-to-digital converter 21, and transmits it via Ethernet to router 22. A remote signal repeater receives and amplifies the signal from router 22. The wireless network card on host computer 23 then connects to the signal repeater, receiving the data and processing it. Host computer 23 can also issue control commands via wireless signals. Upon receiving the wireless signals, rotating motor 15 responds according to the control commands, specifically starting, stopping, or adjusting the speed.

[0035] After receiving the signal, the host computer 23 can process the data through the Labview program and plot the processed data in a chart in real time.

[0036] The polishing liquid providing component 10 includes a polishing liquid tank 12, and a liquid inlet pipe 8 and a liquid outlet pipe 9 are provided on the superconducting cavity 7. The lower part of the polishing liquid tank 12 is connected to the liquid inlet pipe 8 through a liquid inlet bellows 101, and the upper part of the polishing liquid tank 12 is connected to the liquid outlet pipe 9 through a liquid outlet bellows 102. A pump body 11 is provided on the liquid inlet bellows.

[0037] The liquid inlet bellows 101 and the liquid outlet bellows 102 are both PFA corrugated hoses. The polishing liquid supply assembly 10 and the superconducting cavity 7 form a closed loop, and the polishing liquid circulates in the loop through the operation of the pump body.

[0038] The polishing tank 12 is provided with an exhaust gas treatment tower 14 connected to the polishing tank 12, and an exhaust chimney 13 is provided on the exhaust gas treatment tower 14. The exhaust gas and acid gas of the polishing tank 12 are treated by the exhaust gas treatment tower 14 and then discharged through the exhaust chimney after treatment to avoid environmental pollution.

[0039] This embodiment provides an online detection device for buffered chemical polishing of a superconducting cavity 7, which can detect the quality change of the superconducting cavity 7 in real time, and then calculate the average polishing thickness and average polishing rate of the superconducting cavity 7 according to the polishing time, so as to achieve precise control of the polishing thickness.

[0040] Example 2:

[0041] This embodiment provides a method for online monitoring of buffered chemical polishing of a superconducting cavity 7, comprising the following steps:

[0042] The signal transmission component 20 obtains the gravity data G detected by the gravity sensor 2 in real time;

[0043] The signal transmission component 20 includes a signal processor, which calculates the mass difference Δm of the superconducting cavity 7 within a certain time period according to the formula G=Δm g;

[0044] The signal processor calculates the average polishing thickness and average polishing rate based on the formula Δm=ρΔV, the inner surface area of ​​the superconducting cavity 7, and the polishing time, and stores the calculated data. Specifically, the polishing thickness can be calculated based on the formulas Δm=ρΔV and ΔV=SΔd, where ρ is the density of the superconducting cavity material (the superconducting cavity is made of niobium), ΔV is the volume of material polished away from the superconducting cavity, S is the inner surface area of ​​the superconducting cavity, and Δd is the average polishing thickness. The average polishing rate can then be calculated based on the polishing time.

[0045] The superconducting cavity 7 is elliptical or in another shape. The average polishing thickness and average polishing rate are calculated using gravity data detected by the gravity sensor 2. This allows for precise control of the polishing thickness of the superconducting cavity 7. The device features a simple and compact structure, convenient operation, and low cost. By adjusting the polishing time, the polishing thickness is controlled, thereby improving the polishing effect of the superconducting cavity 7 and preventing excessive or insufficient polishing thickness.

[0046] The signal transmission component 20 includes an analog-to-digital converter 21, a router 22, a signal repeater and a host computer 23. The analog-to-digital converter 21 is connected to the weight sensor, and the analog-to-digital converter is connected to the router 22 via Ethernet. The router 22 sends a wireless signal to the signal repeater. The signal repeater is used to amplify the signal and transmit it to the host computer 23. The host computer 23 is connected to the rotating motor 15, and the host computer 23 includes a signal processor.

[0047] This embodiment also includes the following steps:

[0048] The host computer 23 sends a control command to the rotating motor 15 in the form of a wireless signal. The rotating motor 15 receives the control command and responds accordingly. The response is specifically to start, stop or adjust the speed of the rotating motor 15.

[0049] This embodiment provides an online monitoring method for buffered chemical polishing of a superconducting cavity 7. Through the gravity sensor 2 and the signal transmission component 20, data acquisition, transmission and processing are achieved, and the quality changes of the superconducting cavity 7 during the polishing process are monitored in real time. The average polishing thickness and average polishing rate can be calculated, thereby accurately controlling the polishing thickness of the superconducting cavity 7 and ensuring the polishing quality of the superconducting cavity 7.

[0050] Example 3:

[0051] This embodiment provides an online monitoring device for buffered chemical polishing of a superconducting cavity 7, including a mobile vehicle 1, a gravity sensor 2 and a support rod 30 arranged on the mobile vehicle 1, the gravity sensor 2 is arranged between the mobile vehicle 1 and the support rod 30, and a rotating motor 15 and a superconducting cavity 7 are provided on the support rod 30. The rotating motor 15 is used to drive the superconducting cavity 7 to rotate. The superconducting cavity 7 is connected to a BCP device. The BCP device includes a polishing liquid supply component 10 for providing polishing liquid to the superconducting cavity 7. The gravity sensor 2 is connected to a signal transmission component 20.

[0052] The support rod 30 includes a support plate 3, on which a support bracket 4 is provided. A support rod 5 is detachably mounted on the support bracket 4, on which a rotating bracket 6 is mounted. The rotating bracket 6 is provided with a rotating motor 15 and a superconducting cavity 7, and a gravity sensor 2 is arranged between the support plate 3 and the mobile vehicle 1.

[0053] This embodiment also includes: four groups of gravity sensors 2 are provided, each group of gravity sensors 2 is evenly distributed on the lower surface of the support plate 3, and each group of gravity sensors 2 includes at least one gravity sensor 2.

[0054] The support plate 3 is a square plate structure. In some embodiments, four groups of gravity sensors 2 are respectively distributed under the four corners of the support plate 3. The gravity sensors 2 detect the gravity of the support rod 30, the superconducting cavity 7 and the polishing liquid inside the superconducting cavity 7 in real time.

[0055] The present invention innovatively employs a gravity sensor 2 to monitor the quality of a dynamic system, namely, the superconducting cavity 7 and the polishing fluid flowing within it. This confines the circulation of hazardous chemical polishing fluid within a sealed space, preventing it from being exposed to the environment and enhancing safety. Furthermore, it enables accurate quality monitoring of key parameters, such as chemical etching quality or physical and chemical proliferation quality. Experimental results demonstrate that, under the premise of a stable polishing fluid flow rate, the data calculated based on the monitored data can achieve high accuracy.

[0056] To address the problem of BCP polishing rate and thickness relying solely on empirical estimates, which often deviate by approximately ±20% from the actual values, the present invention utilizes a gravity sensor 2 for weighing, enabling precise calculation of the polishing rate and thickness. Theoretically, as long as the accuracy of the gravity sensor 2 is sufficiently high, the calculated polishing rate and thickness can be very close to the actual values. In practical applications, the deviations in polishing rate and thickness can be easily controlled to within ±5%.

[0057] The data from the gravity sensor 2 is transmitted via the router 22 in the form of a wireless signal. The remote host computer 23 receives the data via a wireless network card, processes the data via the Labview program, and plots the obtained quality data in real time on a chart. At the same time, the host computer 23 can also send out wireless signals to control the rotating motor 15, thereby achieving control of the rotation of the superconducting cavity 7. Wireless transmission and reception of data can greatly avoid the difficulties of data transmission and control under complex working conditions on site. Operators can perform remote control in a control room far away from the polishing site, further improving personnel safety. By installing support components of different sizes on the mobile vehicle 1, different types of superconducting cavities 7 can be installed, thereby providing buffered chemical polishing treatment for various types of superconducting cavities 7, with strong compatibility and high practicality.

[0058] This embodiment provides an online detection device for buffered chemical polishing of a superconducting cavity 7, which can detect the quality change of the superconducting cavity 7 in real time, and then calculate the average polishing thickness and average polishing rate of the superconducting cavity 7 according to the polishing time, so as to achieve precise control of the polishing thickness.

[0059] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention pertains. The terms used herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention.

[0060] In the description of the present invention, it should be understood that the terms indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only used to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they cannot be understood as limiting the present invention.

[0061] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this embodiment are included within the scope of protection of the present invention.

Claims

1. An online monitoring device for superconducting cavity buffered chemical polishing, characterized by: The invention comprises a mobile vehicle (1), a gravity sensor (2) and a support rod assembly (30) arranged on the mobile vehicle, wherein the gravity sensor is arranged between the mobile vehicle and the support rod assembly, the support rod assembly is provided with a rotating motor (15) and a superconducting cavity (7), the rotating motor is used to drive the superconducting cavity to rotate, the superconducting cavity is connected to a BCP device, the BCP device comprises a polishing liquid supply assembly (10) for supplying polishing liquid to the superconducting cavity, and the gravity sensor is connected to a signal transmission assembly (20); The polishing liquid supply assembly comprises a polishing liquid tank (12); a liquid inlet pipe (8) and a liquid outlet pipe (9) are provided on the superconducting cavity; the lower portion of the polishing liquid tank is connected to the liquid inlet pipe via a liquid inlet bellows (101); the upper portion of the polishing liquid tank is connected to the liquid outlet pipe via a liquid outlet bellows (102); and a pump body (11) is provided on the liquid inlet bellows; The polishing liquid providing component (10) and the superconducting cavity (7) form a closed loop, and the polishing liquid circulates in the loop through the operation of the pump body.

2. The superconducting cavity buffered chemical polishing online monitoring device according to claim 1, characterized in that: The support rod assembly comprises a support plate (3), a support bracket (4) is provided on the support plate, a support rod (5) is detachably mounted on the support bracket, a rotating bracket (6) is mounted on the support rod, a rotating motor and a superconducting cavity are provided on the rotating bracket, and the gravity sensor is arranged between the support plate and the moving vehicle.

3. The superconducting cavity buffered chemical polishing online monitoring device according to claim 2, characterized in that: The gravity sensors are arranged in four groups, each group of gravity sensors is evenly distributed on the lower surface of the support plate, and each group of gravity sensors includes at least one gravity sensor.

4. The superconducting cavity buffered chemical polishing online monitoring device according to claim 1, characterized in that: The signal transmission component comprises an analog-to-digital converter (21), a router (22), a signal repeater and a host computer (23), wherein the analog-to-digital converter is connected to the gravity sensor, the analog-to-digital converter is connected to the router via Ethernet, the router sends a wireless signal to the signal repeater, the signal repeater is used to amplify the signal and transmit it to the host computer, the host computer receives and stores the data, the host computer processes the data and then draws a corresponding chart in real time, and the host computer is connected to the rotating motor.

5. The superconducting cavity buffered chemical polishing online monitoring device according to claim 4, characterized in that: The host computer is connected to a motor driver (24), and the motor driver is used to control the start, stop or speed regulation of the rotating motor.

6. The superconducting cavity buffered chemical polishing online monitoring device according to claim 1, characterized in that: The polishing liquid tank is provided with a waste gas treatment tower (14) which is in communication with the polishing liquid tank, and the waste gas treatment tower is provided with an exhaust chimney (13).

7. A method for online monitoring of superconducting cavity buffered chemical polishing, characterized in that: Using the superconducting cavity buffered chemical polishing online monitoring device according to any one of claims 1 to 6, the method comprises the following steps: The signal transmission component acquires gravity data G detected by the gravity sensor in real time; The signal transmission component includes a signal processor, which calculates the mass difference Δm of the superconducting cavity within a certain time period according to the formula G=Δm g, where g is the gravitational acceleration constant; The signal processor calculates the average polishing thickness according to the formulas Δm=ρΔV and ΔV=SΔd, where ρ is the density of the superconducting cavity material, ΔV is the volume of the material polished away inside the superconducting cavity, S is the inner surface area of ​​the superconducting cavity, and Δd is the average polishing thickness. The average polishing rate is then calculated based on the polishing time, and the signal processor stores the calculated result data.

8. The method for online monitoring of buffered chemical polishing of a superconducting cavity according to claim 7, characterized in that: The signal transmission component comprises an analog-to-digital converter (21), a router (22), a signal repeater and a host computer (23), wherein the analog-to-digital converter is connected to the weight sensor, the analog-to-digital converter is connected to the router via Ethernet, the router sends a wireless signal to the signal repeater, the signal repeater is used to amplify the signal and transmit it to the host computer, the host computer is connected to the rotating motor, and the host computer comprises a signal processor.

9. The method for online monitoring of superconducting cavity buffered chemical polishing according to claim 8, characterized in that: The following steps are also included: The host computer sends a control command to the rotating motor in the form of a wireless signal. The rotating motor receives the control command and makes a corresponding response.

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