Air float spindle measuring system

Abstract

The application provides a gas bearing spindle measurement system, which comprises a base, a feeding mechanism mounted on the base and used for carrying a spindle to be measured and applying a feeding force to the spindle, a feeding displacement measurement mechanism mounted on the feeding mechanism and connected to the spindle, the feeding displacement measurement mechanism being used for measuring a value of the feeding force applied by the feeding mechanism to the spindle and measuring a displacement amount of the spindle under the feeding force, and a torque measurement mechanism mounted on the base and supporting the spindle from below, the torque measurement mechanism being used for applying a braking force to the spindle and measuring a torque of the spindle under the braking force. The gas bearing spindle measurement system provided by the application can simultaneously measure multiple indexes of the gas bearing spindle, such as a bearing force, a gas film displacement amount, a stiffness and a torque, so that the measurement efficiency of the gas bearing spindle is improved and the measurement cost is reduced.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit packaging, and more specifically to an air-bearing spindle measurement system. Background Technology

[0002] Wafer thinning machines are mainly used in IC post-packaging or wafer front-end processing, and are suitable for thinning processes of semiconductor wafers or other hard and brittle materials. Designed based on the in-feed grinding principle, wafer thinning is performed by rotating the wafer itself and using an air spindle to drive the grinding wheel at high speed for in-feed grinding. The minimum feed rate can reach 0.1μm, achieving a thickness deviation (TTV) of ≤1μm within a single wafer.

[0003] Because no damage can be caused during wafer thinning, otherwise hundreds of previous processes would be wasted, the technical requirements for wafer thinning machines are extremely high. As an indispensable core component of integrated circuit wafer thinning machines, the air-bearing spindle must meet predetermined requirements in terms of load-bearing capacity, rigidity, displacement variation, and torque. Because the air-bearing spindle needs to be suspended and rotate at high speed, and it is also relatively large and heavy with high precision requirements.

[0004] Therefore, in order to accurately measure the above-mentioned indicators of the air-bearing spindle, it is necessary to simulate the working environment and implement dynamic measurement. Currently, the measurement method used in the industry requires multiple measuring devices set up at different workstations to complete the measurement of the above-mentioned indicators of the air-bearing spindle, which has low measurement efficiency and increases measurement costs. Summary of the Invention

[0005] To solve the above-mentioned technical problems, the present invention provides an air-floating support device for a thinning machine, which adopts the following technical solution:

[0006] An air-bearing spindle measurement system, comprising:

[0007] Base;

[0008] The feed mechanism is mounted on the base and is used to support and fix the support plate of the air-bearing spindle to be measured, and to apply a downward feed force to the shaft of the air-bearing spindle.

[0009] A feed displacement measuring mechanism is mounted on the feed mechanism and connected to the shaft of the air-bearing spindle. The feed displacement measuring mechanism is used to measure the feed force applied by the feed mechanism to the shaft of the air-bearing spindle, and to measure the displacement of the shaft of the air-bearing spindle under the feed force; and

[0010] A torque measuring mechanism is mounted on a base and supports and fixes the air-bearing spindle from below. The torque measuring mechanism is used to apply a predetermined braking force to the air-bearing spindle and to measure the torque of the air-bearing spindle under the braking force.

[0011] The air-bearing spindle measurement system provided by this invention can simultaneously measure multiple indicators such as the load-bearing capacity, air film displacement, stiffness, and torque of the air-bearing spindle, thereby improving the measurement efficiency of the air-bearing spindle and reducing the measurement cost.

[0012] In some embodiments, the base includes: a mounting base plate with a plurality of supporting feet at its bottom; a first mounting seat disposed on the mounting base plate for mounting a feeding mechanism; and a second mounting seat disposed on the mounting base plate for mounting a torque measuring mechanism.

[0013] By configuring the base, the feeding mechanism and torque measuring mechanism can be installed and fixed.

[0014] In some embodiments, the feeding mechanism includes: a mounting body, the bottom of which is mounted on a first mounting base; a sliding connecting plate, which is slidably connected to the side wall of the mounting body and can slide up and down along the side wall of the mounting body, wherein the shaft of the air-bearing spindle to be measured is connected to the sliding connecting plate; a feeding drive assembly, which is disposed on the mounting body and drivenly connected to the sliding connecting plate, and is used to drive the sliding connecting plate to rise and fall, thereby driving the shaft of the air-bearing spindle to rise and fall synchronously; and a support assembly, which is disposed on the mounting body and connected to the support plate of the air-bearing spindle, thereby supporting and fixing the support plate of the air-bearing spindle.

[0015] A simple and easy-to-control feed mechanism is provided, which can support and fix the support plate of the air-bearing spindle to be measured, and can push the shaft of the air-bearing spindle downward, thereby applying a predetermined feed force to the shaft of the air-bearing spindle.

[0016] In some embodiments, a guide rail is provided on the side wall of the mounting body in a vertical direction, a sliding connecting plate is slidably connected to the guide rail via a slider, and the feed drive assembly includes a servo motor.

[0017] The sliding connecting plate is slidably connected to the side wall of the mounting body via a slider and a slide rail, and a servo motor is used as the feed drive component, which improves the feed stability of the air-bearing spindle to be measured by the feed mechanism.

[0018] In some embodiments, the support assembly includes a first cylinder and a second cylinder symmetrically arranged on both sides of the feed drive assembly, wherein: the cylinder body of the first cylinder is connected to the mounting body via a first connecting bracket, and the telescopic rod of the first cylinder is connected to the first end of the support plate of the air-bearing spindle; the cylinder body of the second cylinder is connected to the mounting body via a second connecting bracket, and the telescopic rod of the second cylinder is connected to the second end of the support plate of the air-bearing spindle.

[0019] By symmetrically arranging the first and second cylinders on either side of the feed drive assembly, the support stability of the air-bearing spindle under measurement is improved, preventing skewness during descent. Different models of air-bearing spindles have varying radial lengths. Using cylinders as the support assembly allows for flexible adjustment of the support plate height, ensuring the distance between the support plate and the base reaches a predetermined value. Ultimately, this guarantees that the spindle body can move downwards sufficiently to meet measurement requirements.

[0020] In some embodiments, the torque measuring mechanism includes: a base, the bottom of which is mounted on a second mounting seat; a mounting bracket fixedly mounted on the base; a torque sensor mounted on the mounting bracket; a spindle fixing plate connected above the torque sensor via a coupling, the spindle fixing plate being used to fix the shaft of the air-bearing spindle; and an eddy current brake connected below the torque sensor; the eddy current brake being used to adjust the braking force by means of current to implement stepwise braking of the shaft of the air-bearing spindle; and the torque sensor being used to measure the torque of the air-bearing spindle under different braking forces applied by the eddy current brake.

[0021] A torque measuring mechanism with a simple structure and convenient control is provided, which can perform step-by-step braking of the air-bearing spindle and perform real-time measurement of the torque of the air-bearing spindle under different braking forces.

[0022] In some embodiments, the feed displacement measuring mechanism includes: a bearing connecting plate, the bottom of which is connected to the feed mechanism; a feed force measuring unit, which is mounted on the bearing connecting plate and connected to the shaft of the air-bearing spindle, and is used to measure the feed force applied by the feed mechanism to the shaft of the air-bearing spindle; and a displacement measuring unit, which is mounted on the bearing connecting plate and connected to the shaft of the air-bearing spindle, and is used to measure the displacement of the shaft of the air-bearing spindle under the feed force.

[0023] A simple and easy-to-control feed displacement measuring mechanism is provided, which realizes the simultaneous measurement of the maximum bearing capacity, maximum displacement and stiffness of the air-bearing spindle.

[0024] In some embodiments, the feed force measuring unit includes a force sensor and a shaft connector, wherein: the force sensor is mounted on a bearing connecting plate; the shaft connector is connected to the measuring end of the force sensor and is connected to the shaft of the air-bearing spindle.

[0025] A method for implementing a feed force measuring unit is provided, which enables quick connection with the shaft of the air-bearing spindle and performs rapid measurement of the feed force borne by the shaft.

[0026] In some embodiments, the force sensor is bolted to the load-bearing connecting plate.

[0027] It achieves a stable connection between the force sensor and the load-bearing connecting plate, and facilitates the quick replacement of the force sensor and shaft connecting parts.

[0028] In some embodiments, the displacement measuring unit includes a displacement sensor and a displacement connecting plate, wherein: the displacement sensor is mounted on the bearing connecting plate; the displacement connecting plate is connected to the measuring end of the displacement sensor, and the displacement connecting plate is connected to the shaft of the air-bearing spindle.

[0029] A method for implementing a displacement measuring unit is provided, which enables quick connection with the shaft of an air-bearing spindle and allows for rapid measurement of the displacement of the shaft. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of the air-bearing spindle measurement system provided in an embodiment of the present invention;

[0031] Figure 2 This is a schematic diagram of the base structure in an embodiment of the present invention;

[0032] Figure 3 This is a schematic diagram of the feeding mechanism in an embodiment of the present invention;

[0033] Figure 4 This is a schematic diagram of the feed displacement measuring mechanism in an embodiment of the present invention;

[0034] Figure 5 This is a schematic diagram of the torque measuring mechanism in an embodiment of the present invention;

[0035] Figures 1 to 5 Includes:

[0036] Base 1:

[0037] Mounting base plate 101, supporting feet 102, first mounting base 103, second mounting base 104;

[0038] Feeding mechanism 2:

[0039] Mounting body 201, sliding connecting plate 202, feed drive assembly 203, guide rail 204, first cylinder 205, second cylinder 206, first connecting bracket 207, second connecting bracket 208;

[0040] Torque measuring mechanism 3:

[0041] Base 301, mounting bracket 302, spindle fixing plate 303, coupling 304, torque sensor

[0042] 305. Eddy current brake; 306.

[0043] Feed displacement measuring mechanism 4:

[0044] 401 bearing connecting plate, 402 force sensor, 403 shaft connecting piece, 404 bolt, 405 displacement sensor, 406 displacement connecting plate, 407 bolt mounting block;

[0045] Main spindle 5:

[0046] Top cover plate 501, grinding wheel mounting plate 502, main shaft sleeve 503, support plate 504. Detailed Implementation

[0047] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0048] The measurement process for the air-bearing spindle requires the use of multiple measuring devices set at different workstations to measure the spindle's load-bearing capacity, stiffness, displacement change, and torque. This process is inefficient and increases measurement costs.

[0049] To address this, the present invention provides an air-bearing spindle measurement system, which can simultaneously measure multiple indicators of the air-bearing spindle, including load-bearing capacity, displacement, torque, and stiffness. The air-bearing spindle includes at least a support plate and a shaft mounted within the support plate. The shaft can rotate at high speed within the support plate and float axially.

[0050] like Figure 1 As shown, the air-bearing spindle measurement system provided by the present invention includes a base 1, a feed mechanism 2, a torque measuring mechanism 3, and a feed displacement measuring mechanism 4, wherein:

[0051] The feeding mechanism 2 is mounted on the base 1. It is used to fix the support plate 504 of the air flotation main shaft 5 to be measured, and to apply a feeding force to the shaft of the air flotation main shaft 5 to push the shaft of the air flotation main shaft 5 down.

[0052] The feed displacement measuring mechanism 4 is mounted on the feed mechanism 2 and connected to the shaft of the air-bearing spindle 5. The feed displacement measuring mechanism 4 is used to measure the feed force (i.e., the bearing capacity of the air-bearing spindle 5) applied to the shaft of the air-bearing spindle 5 by the feed mechanism 2, and to measure the displacement of the shaft of the air-bearing spindle 5 under the feed force.

[0053] According to the stiffness calculation formula k=P / δ, where P is the feed force borne by the shaft and δ is the displacement generated by the shaft, the stiffness of the air-bearing spindle 5 can be obtained. In other words, the feed displacement measuring mechanism 4 can complete the measurement of the load-bearing capacity, displacement and stiffness of the air-bearing spindle 5.

[0054] The torque measuring mechanism 3 is mounted on the base 1 and supports and fixes the shaft of the air-bearing spindle 5 from below. When the shaft of the air-bearing spindle 5 rotates, the torque measuring mechanism 3 applies a predetermined braking force in the opposite direction to the shaft of the air-bearing spindle 5 and measures the torque of the shaft under the corresponding braking force.

[0055] As can be seen, the shaft air-bearing spindle measurement system provided by the present invention can simultaneously measure multiple indicators such as bearing capacity, displacement, torque and stiffness of the air-bearing spindle 5 to be measured, thereby improving the measurement efficiency of the air-bearing spindle and reducing the measurement cost.

[0056] like Figure 2 As shown, optionally, the base 1 includes a mounting base plate 101, a first mounting seat 103, and a second mounting seat 104, wherein the bottom of the mounting base plate 101 is provided with a plurality of supporting feet 102. The first mounting seat 103 and the second mounting seat 104 are arranged side by side on the mounting base plate 101. The first mounting seat 103 is used to install and fix the feeding mechanism 2, and the second mounting seat 104 is used to install and fix the torque measuring mechanism 3.

[0057] like Figure 3 As shown, optionally, the feeding mechanism 2 includes a mounting body 201, a sliding connecting plate 202, a feeding drive assembly 203, and a support assembly, wherein:

[0058] The mounting body 201 is fixedly mounted on the first mounting base 103.

[0059] The support assembly is mounted on the mounting body 1 and connected to the support plate 504 of the air-bearing spindle 5 to be measured, so as to support and fix the support plate 504 of the air-bearing spindle 5.

[0060] The sliding connecting plate 202 is slidably connected to the side wall of the mounting body 201 and can slide up and down along the side wall of the mounting body 201. The shaft of the air-bearing spindle 5 to be measured is connected to the sliding connecting plate 202, thereby sliding synchronously with the sliding connecting plate 202. In some optional embodiments, a spindle sleeve 503 is fixedly sleeved on the outside of the shaft of the air-bearing spindle 5, and the spindle sleeve 503 is fixedly connected to the sliding connecting plate 202.

[0061] The feed drive assembly 203 is mounted on the mounting body 201 and is connected to the sliding connecting plate 202 for transmission. The feed drive assembly 203 is used to drive the sliding connecting plate 202 to slide downward, thereby applying a downward feed force to the shaft of the air-bearing spindle 5.

[0062] Optionally, the mounting body 101 is provided with a guide rail 204 arranged vertically, and the sliding connecting plate 202 is slidably connected to the guide rail 204 via a slider. The feed drive assembly 203 uses a servo motor. The sliding connecting plate 202 is slidably connected to the side wall of the mounting body 201 via a slider and a guide rail, and the use of a servo motor as the feed drive assembly can significantly improve the feed stability of the feed mechanism 2 on the air-bearing spindle 5 to be measured.

[0063] Continue to refer to Figure 3 As shown, the support assembly includes a first cylinder 205 and a second cylinder 206 symmetrically arranged on both sides of the feed drive assembly 203. The cylinder body of the first cylinder 205 is connected to the mounting body 201 via a first connecting bracket 207, and the telescopic rod of the first cylinder 206 is connected to the first end of the support plate 504 of the air-bearing spindle 5. The cylinder body of the second cylinder 206 is connected to the mounting body 201 via a second connecting bracket 208, and the telescopic rod of the second cylinder 206 is connected to the second end of the support plate 504 of the air-bearing spindle 5.

[0064] By symmetrically arranging the first and second cylinders on both sides of the feed drive assembly 203, the support stability of the support assembly for the support plate 504 of the air-bearing spindle 5 under measurement is improved, preventing the air-bearing spindle 5 from skewing. As those skilled in the art know, different models of spindles have different radial lengths. Using cylinders as support components allows for flexible adjustment of the height of the support plate 504 of the air-bearing spindle 5 under measurement, ensuring that the distance between the support plate 504 and the base 1 reaches a predetermined value, and ultimately ensuring that the shaft of the air-bearing spindle 5 under measurement can be fully lowered to meet the measurement requirements.

[0065] like Figure 4 As shown, optionally, the torque measuring mechanism 3 includes a base 301, a mounting bracket 302, a torque sensor 305, a main shaft fixing plate 303, and an eddy current brake 306, wherein:

[0066] The bottom of the base 301 is fixedly mounted on the second mounting base 104, the mounting bracket 302 is fixedly mounted on the base 301, and the torque sensor 305 is mounted on the mounting bracket 302.

[0067] The spindle fixing plate 303 is connected above the torque sensor 305 via the coupling 304. The spindle fixing plate 303 is used to fix the shaft of the air-bearing spindle 5.

[0068] An eddy current brake 306 is connected below the torque sensor 305. The eddy current brake 306 is used to adjust the braking force by current to implement step-by-step braking of the air-bearing spindle 5, and to measure the current change of the air-bearing spindle 5 under different braking forces. The torque sensor 305 is used to measure the torque of the air-bearing spindle 5 under different braking forces applied by the eddy current brake 306.

[0069] In some alternative embodiments, such as Figure 1 As shown, the end of the air-bearing spindle 5 is provided with a grinding wheel mounting plate 502. When the spindle rotates, it drives the grinding wheel mounting plate 502 to rotate synchronously. In these optional embodiments, the grinding wheel mounting plate 52 is fixed on the spindle fixing plate 303.

[0070] like Figure 5 As shown, optionally, the feed displacement measuring mechanism 4 includes a bearing connecting plate 401, a feed force measuring unit, and a displacement measuring unit, wherein:

[0071] The bottom of the supporting connecting plate 401 is connected to the feeding mechanism 2.

[0072] The feed force measuring unit is mounted on the bearing connecting plate 401 and connected to the shaft of the main spindle. The feed force measuring unit is used to measure the force value of the feed force applied by the feed mechanism 2 to the shaft of the main spindle.

[0073] The displacement measuring unit is mounted on the bearing connecting plate 401 and connected to the spindle shaft. The displacement measuring unit is used to measure the displacement of the spindle shaft under the feed force.

[0074] As can be seen, by setting up a feed force measuring unit, the feed force (i.e., the axial bearing force on the air-bearing main shaft 5) applied to the shaft by the feed mechanism 2 is measured, as well as the displacement of the main shaft under the feed force is measured. During the measurement process, the feed mechanism 2 is controlled to gradually increase the feed force applied to the air-bearing main shaft 5, and the change in the displacement of the air-bearing main shaft 5 is observed. When the displacement of the air-bearing main shaft 5 no longer changes, the corresponding feed force and displacement are the maximum bearing force and maximum displacement of the air-bearing main shaft 5, respectively.

[0075] Furthermore, according to the stiffness calculation formula k=P / δ, where P is the feed force borne by the shaft and δ is the displacement generated by the shaft, the stiffness of the air-bearing main shaft 5 can also be obtained. In other words, by obtaining the feed force value and the corresponding displacement value from the feed force measuring unit and the displacement measuring unit, the feed displacement measuring mechanism 4 simultaneously completes the measurement of the bearing capacity, displacement and stiffness of the air-bearing main shaft 5.

[0076] Optional, such as Figure 5As shown, the feed force measuring unit includes a force sensor 402 and a shaft connector 403, wherein: the force sensor 402 is mounted on the bearing connecting plate 401. The shaft connector 403 is connected to the measuring end of the force sensor 402 and is connected to the shaft of the air-bearing main shaft 5.

[0077] When the shaft of the air-bearing spindle 5 descends under the push of the feed force applied by the feed mechanism 2, the shaft connector 403 descends synchronously and pulls the measuring end of the force sensor 402 downward, thereby triggering the force sensor 402 to obtain the force value of the feed force.

[0078] Optionally, the force sensor 402 is fixedly connected to the bearing connecting plate 401 by bolts 404 and is located below the bearing connecting plate 401. The bolts 404 are mounted on the bearing connecting plate 401 by bolt mounting blocks 407 and pass downward through the bearing connecting plate 401.

[0079] Optional, such as Figure 5 As shown, the displacement measuring unit includes a displacement sensor 405 and a displacement connecting plate 406, wherein: the displacement sensor 405 is mounted on the bearing connecting plate 401, the displacement connecting plate 406 is connected to the measuring end of the displacement sensor 405, and the displacement connecting plate 406 is connected to the shaft of the spindle.

[0080] In some alternative embodiments, such as Figure 1 As shown, the upper end of the spindle body is provided with an upper cover plate 501, and the displacement connecting plate 406 is fixedly connected to the upper cover plate 501.

[0081] When the shaft of the air-bearing spindle 5 descends under the push of the feed force applied by the feed mechanism 2, the displacement connecting plate 406 descends synchronously and pulls the measuring end of the displacement sensor 405 downward, thereby triggering the displacement sensor 405 to obtain the displacement of the shaft of the air-bearing spindle 5.

[0082] The present invention has been described above in sufficient detail and with certain specificities. Those skilled in the art should understand that the descriptions in the embodiments are merely exemplary, and all changes made without departing from the true spirit and scope of the invention should fall within the protection scope of the invention. The scope of protection claimed by the present invention is defined by the claims, and not by the above descriptions in the embodiments.

Claims

1. A measurement system for an air-bearing spindle, characterized in that, The air-bearing spindle measurement system includes: Base; The feeding mechanism is mounted on the base and is used to support and fix the support disk of the air-bearing spindle to be measured, and to apply a downward feeding force to the shaft of the air-bearing spindle. A feed displacement measuring mechanism is mounted on the feed mechanism and connected to the shaft of the air-bearing spindle. The feed displacement measuring mechanism is used to measure the feed force applied by the feed mechanism to the shaft of the air-bearing spindle, and to measure the displacement of the shaft of the air-bearing spindle under the feed force; and A torque measuring mechanism is mounted on the base and supports and fixes the shaft of the air-bearing spindle from below. The torque measuring mechanism is used to apply a predetermined braking force to the shaft of the air-bearing spindle and to measure the torque of the air-bearing spindle under the braking force. The base includes: The mounting base plate has several supporting feet at its bottom. A first mounting base, disposed on the mounting base plate, is used to mount the feeding mechanism; and The second mounting base is disposed on the mounting base plate and is used to mount the torque measuring mechanism; The torque measuring mechanism includes: A base, the bottom of which is mounted on the second mounting base; The mounting bracket is fixedly mounted on the base. A torque sensor, which is mounted on the mounting bracket; A spindle fixing plate, connected above the torque sensor via a coupling, is used to fix the shaft of the air-bearing spindle; and An eddy current brake, which is connected below the torque sensor; The eddy current brake is used to adjust the braking force by current to implement step-by-step braking of the air-bearing spindle shaft; the torque sensor is used to measure the torque of the air-bearing spindle under different braking forces applied by the eddy current brake. The feed displacement measuring mechanism includes: A supporting connecting plate, the bottom of which is connected to the feeding mechanism; A feed force measuring unit is mounted on the bearing connecting plate and connected to the shaft of the air-bearing main shaft. The feed force measuring unit is used to measure the feed force applied by the feed mechanism to the shaft of the air-bearing main shaft; and The displacement measuring unit is mounted on the bearing connecting plate and connected to the shaft of the air-bearing main shaft. The displacement measuring unit is used to measure the displacement of the shaft of the air-bearing main shaft under the feed force.

2. The air-bearing spindle measurement system as described in claim 1, characterized in that, The feeding mechanism includes: The mounting body is mounted on the first mounting base at its bottom. A sliding connecting plate is slidably connected to the side wall of the mounting body and can slide up and down along the side wall of the mounting body. The shaft of the air-bearing main shaft to be measured is connected to the sliding connecting plate. A feed drive assembly, disposed on the mounting body and connected to the sliding connecting plate, is used to drive the sliding connecting plate to rise and fall, thereby synchronously raising and lowering the shaft of the air-bearing spindle; and A support assembly is disposed on the mounting body and connected to the support plate of the air-bearing spindle to provide support and fixation for the support plate of the air-bearing spindle.

3. The air-bearing spindle measurement system as described in claim 2, characterized in that, The side wall of the mounting body is provided with a guide rail arranged in a vertical direction, the sliding connecting plate is slidably connected to the guide rail via a slider, and the feed drive assembly includes a servo motor.

4. The air-bearing spindle measurement system as described in claim 2, characterized in that, The support assembly includes a first cylinder and a second cylinder symmetrically arranged on both sides of the feed drive assembly, wherein: The cylinder body of the first cylinder is connected to the mounting body via a first connecting bracket, and the telescopic rod of the first cylinder is connected to the first end of the support plate of the air-bearing spindle. The cylinder body of the second cylinder is connected to the mounting body via a second connecting bracket, and the telescopic rod of the second cylinder is connected to the second end of the support plate of the air-bearing spindle.

5. The air-bearing spindle measurement system as described in claim 1, characterized in that, The feed force measuring unit includes a force sensor and a shaft connecting component, wherein: The force sensor is mounted on the load-bearing connecting plate; The shaft connector is connected to the measuring end of the force sensor, and the shaft connector is connected to the shaft of the air-bearing main shaft.

6. The air-bearing spindle measurement system as described in claim 5, characterized in that, The force sensor is fixedly connected to the load-bearing connecting plate by bolts.

7. The air-bearing spindle measurement system as described in claim 1, characterized in that, The displacement measuring unit includes a displacement sensor and a displacement connecting plate, wherein: The displacement sensor is mounted on the load-bearing connecting plate; The displacement connecting plate is connected to the measuring end of the displacement sensor, and the displacement connecting plate is connected to the shaft of the air-bearing main shaft.

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