A movable buckle-type flower basket structure

Abstract

The present invention relates to the technical field of semiconductor flower baskets, and in particular to a movable buckle-type flower basket structure, comprising a basket body, a plurality of partition grids are respectively arranged on the inner walls of both sides of the basket body, two upper sides of the basket body are respectively fixedly connected with top plates, the upper surface of the top plate is fixedly connected with a fixing seat, the upper surface of the fixing seat is slidably connected with a connecting rod, the ends of the connecting rods on both sides that are close to each other are respectively rotatably connected with L-shaped plates, the lower surfaces of the two L-shaped plates are respectively connected with limiting rollers through elastic mechanisms, a distance adjustment mechanism is arranged between the limiting rollers and the L-shaped plates, the sides of the two L-shaped plates that are away from each other are respectively fixedly connected with concave frames, a buckle mechanism is arranged between the concave frame and the upper surface of the fixing seat, and an inclined guide surface is arranged at the upper corner of the partition grid. The present invention can limit the position of wafers during transportation, which is beneficial to improving the stability of transportation. While having the function of improving stability, it still ensures the convenience of the wafer removal process.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor flower baskets, and in particular to a movable buckle-type flower basket structure. Background Art

[0002] Wafer baskets are containers for loading, storing, transporting and processing wafers. In the semiconductor manufacturing process, wafers need to go through multiple process steps, such as cleaning, photolithography, etching, etc., and wafer baskets play a role in protecting and supporting wafers in these steps. Wafer baskets are made of a variety of materials, among which PFA (full name Perfluoralkoxy) baskets have been widely used due to their unique properties. Some process steps in semiconductor manufacturing need to be carried out in a high temperature environment, and PFA baskets can withstand high temperatures without deformation or damage, ensuring stable transmission and processing of wafers under high temperature conditions.

[0003] In the prior art, in order to facilitate the placement and access of wafers, the top of the flower basket is designed to be open. However, during the transportation process, the inner wafers may be placed unstably. The wafers may be easily displaced vertically, causing collisions with the flower basket and resulting in damage. Therefore, we propose a movable snap-on flower basket structure. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings of the background technology and to propose a movable buckle flower basket structure.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is: a movable buckle-type flower basket structure, including a basket body, a plurality of partition grilles are respectively arranged on the inner walls of both sides of the basket body, the two upper sides of the basket body are respectively fixedly connected with a top plate, the upper surface of the top plate is fixedly connected with a fixing seat, the upper surface of the fixing seat is slidably connected with a connecting rod, the ends of the connecting rods on both sides that are close to each other are respectively rotatably connected with L-shaped plates, the lower surfaces of the two L-shaped plates are respectively connected with limit rollers through elastic mechanisms, a distance adjustment mechanism is arranged between the limit roller and the L-shaped plates, the sides of the two L-shaped plates that are away from each other are respectively fixedly connected with concave frames, a buckle mechanism is arranged between the concave frame and the upper surface of the fixing seat, and an inclined guide surface is arranged at the upper corner of the partition grille;

[0006] The buckle mechanism includes a guide sleeve fixedly connected to the upper surface of the fixed seat, the concave frame slides through the inner side of the guide sleeve, the upper surface of the guide sleeve is slidably inserted with a plug, the upper end of the outer surface of the plug is provided with a collar, a tension spring is fixedly connected between the lower surface of the collar and the upper surface of the guide sleeve, and the tension spring is sleeved on the outer surface of the plug, the upper end surface of the plug is fixedly connected with a pull ring, the upper surface of the concave frame is provided with two limiting holes, and the plug is slidably inserted into the inner side of one of the limiting holes;

[0007] When the L-shaped plates on both sides are close to each other, the limiting roller moves downward under the action of the elastic mechanism. Then, when the two L-shaped plates move away from each other, the limiting roller moves along the inclined guide surface and is retracted to the inner side of the L-shaped plate.

[0008] Preferably, a sliding groove is provided on the upper surface of the fixed seat, a sliding column is fixedly connected to one end of the lower surface of the connecting rod, the lower end of the sliding column slides into the inner side of the sliding groove, and an L-shaped cover is fixedly connected to the upper surface of the fixed seat, and the upper surface of the connecting rod is in sliding contact with the inner top surface of the L-shaped cover.

[0009] Preferably, a connecting shaft is fixedly connected to one end of the upper surface of the connecting rod away from the fixing seat, and a connecting plate is rotatably sleeved on the outer surface of the connecting shaft, and the lower surface of the connecting plate is fixedly connected to the upper surface of the L-shaped plate.

[0010] Preferably, the elastic mechanism comprises a spring sheet arranged between the inner top surface of the L-shaped plate and the upper surface of the limiting roller, and the upper and lower ends of the spring sheet are rotatably connected to the L-shaped plate and the limiting roller respectively.

[0011] Preferably, the upper and lower ends of the spring sheet are respectively fixedly connected with an upper rotating shaft and a lower rotating shaft, the upper surface of the limiting roller is provided with a hidden groove, the lower rotating shaft is rotatably embedded in the inner wall of the hidden groove, the inner top surface of the L-shaped plate and the two sides close to the spring sheet are respectively fixedly connected with connecting seats, and the upper rotating shaft is rotatably connected to the connecting seat.

[0012] Preferably, the distance adjustment mechanism comprises a threaded column fixedly connected to the upper surface of the limiting roller, the upper end of the threaded column slides through the upper surface of the L-shaped plate, and the outer surface thread sleeve of the threaded column is provided with a limiting screw sleeve.

[0013] Preferably, both sides of the lower surface of the basket body are fixedly connected with extended bottoms respectively, and the front surface of the basket body is fixedly connected with a carrying handle.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. Before transporting the wafer, the present invention places the wafer between the partition grids, pulls the pull ring upward, and moves the concave frame horizontally, so that the L-shaped plate moves horizontally. When the lower part of the limiting roller is no longer restricted by the upper surface of the top plate, the limiting roller will move downward under the elastic force of the spring sheet. As the horizontal movement proceeds, the pin can be inserted into another limiting hole after the hand is released. At this time, the limiting roller will be close to the upper edge of the wafer to play a limiting role in transportation, which is conducive to improving the stability of transportation;

[0016] 2. In the present invention, by rotating the limiting screw sleeve, the limiting screw sleeve can be moved up or down relative to the threaded column to change the maximum stroke of the limiting roller when it moves down, so as to avoid the limiting roller and the upper edge of the wafer being too far away or directly crushing the wafer. The invention has an adjustment function and is flexible and convenient to use;

[0017] 3. In the present invention, when it is necessary to take out the wafer, the user lifts the pull ring and pulls the concave frames on both sides away from each other. The limiting rollers will move along the surface of the inclined guide surface and then retract to the inner side of the L-shaped plate until they move to the upper surface of the top plate and stop. This will open the top of the wafer to facilitate the removal operation. Therefore, while having the function of improving stability, the convenience of the wafer removal process is still ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a movable buckle-type flower basket structure of the present invention;

[0019] Figure 2 It is a partial structural schematic diagram of a movable buckle-type flower basket structure of the present invention;

[0020] Figure 3 The present invention is a movable buckle type flower basket structure Figure 2 Enlarged view of point A in the middle;

[0021] Figure 4 It is a cross-sectional view of a fixed seat of a movable buckle-type flower basket structure of the present invention;

[0022] Figure 5 The present invention is a movable buckle type flower basket structure Figure 4 Enlarged view of point B in the middle;

[0023] Figure 6 It is a schematic diagram of placing wafers in a movable buckle-type basket structure of the present invention;

[0024] Figure 7 The present invention is a movable buckle type flower basket structure Figure 6 Enlarged view of point C in the middle;

[0025] Figure 8 It is a partial cross-sectional view of a limiting roller of a movable snap-on flower basket structure of the present invention.

[0026] 1. Basket; 2. Partition grid; 3. Top plate; 4. Fixed seat; 5. Slide groove; 6. Connecting rod; 7. Sliding column; 8. L-shaped cover; 9. Connecting shaft; 10. Connecting plate; 11. L-shaped plate; 12. Limit roller; 13. Spring leaf; 14. Threaded column; 15. Limit screw sleeve; 16. Concave frame; 17. Limit hole; 18. Guide sleeve; 19. Insert column; 20. Ring; 21. Tension spring; 22. Pull ring; 23. Inclined guide surface; 24. Hidden groove; 25. Lower rotating shaft; 26. Upper rotating shaft; 27. Connecting seat; 28. Carrying handle; 29. ​​Extended bottom; 30. Wafer. DETAILED DESCRIPTION

[0027] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0028] like Figure 1-Figure 8 The movable buckle-type flower basket structure shown in the figure comprises a basket body 1, and a plurality of partition grilles 2 are respectively arranged on the inner walls of both sides of the basket body 1, and the two upper sides of the basket body 1 are respectively fixedly connected with a top plate 3, and the upper surface of the top plate 3 is fixedly connected with a fixing seat 4, and the upper surface of the fixing seat 4 is slidably connected with a connecting rod 6, and the ends of the connecting rods 6 on both sides that are close to each other are respectively rotatably connected with L-shaped plates 11, and the lower surfaces of the two L-shaped plates 11 are respectively connected with limit rollers 12 through elastic mechanisms, and a distance adjustment mechanism is arranged between the limit rollers 12 and the L-shaped plates 11, and the sides of the two L-shaped plates 11 that are away from each other are respectively fixedly connected with concave frames 16, and a buckle mechanism is arranged between the concave frame 16 and the upper surface of the fixing seat 4, and an inclined guide surface 23 is arranged at the upper corner of the partition grille 2;

[0029] like Figure 2 , Figure 3 As shown, the buckle mechanism includes a guide sleeve 18 fixedly connected to the upper surface of the fixing seat 4, the concave frame 16 slides through the inner side of the guide sleeve 18, and a plug post 19 is slidably inserted on the upper surface of the guide sleeve 18. A collar 20 is fixedly sleeved at the upper end of the outer surface of the plug post 19, and a tension spring 21 is fixedly connected between the lower surface of the collar 20 and the upper surface of the guide sleeve 18, and the tension spring 21 is sleeved on the outer surface of the plug post 19. A pull ring 22 is fixedly connected to the upper end surface of the plug post 19, and two limiting holes 17 are provided on the upper surface of the concave frame 16, and the plug post 19 is slidably inserted into the inner side of one of the limiting holes 17. The buckle mechanism plays a positioning role, so that the concave frame 16 is positioned at two positions respectively, so as to be used in the process of taking and placing the wafer 30 and the process of transporting the wafer 30 respectively;

[0030] When the L-shaped plates 11 on both sides are close to each other, the limiting rollers 12 move downward under the action of the elastic mechanism. Then, when the two L-shaped plates 11 are separated from each other, the limiting rollers 12 move along the surface of the inclined guide surface 23 and retract to the inner side of the L-shaped plate 11 .

[0031] like Figure 4 , Figure 5 As shown, a slide groove 5 is provided on the upper surface of the fixed seat 4, a sliding column 7 is fixedly connected to one end of the lower surface of the connecting rod 6, the lower end of the sliding column 7 slides and snaps into the inner side of the slide groove 5, an L-shaped cover 8 is fixedly connected to the upper surface of the fixed seat 4, and the upper surface of the connecting rod 6 slides and contacts the inner top surface of the L-shaped cover 8. When the L-shaped plates 11 on both sides are close to each other, the sliding column 7 will move horizontally in the slide groove 5 relatively, and will also rotate relatively in the slide groove 5 to ensure that it does not interfere with the movement of the L-shaped plates 11.

[0032] like Figure 6 , Figure 7 As shown, a connecting shaft 9 is fixedly connected to the end of the upper surface of the connecting rod 6 away from the fixing seat 4, and a connecting plate 10 is rotatably sleeved on the outer surface of the connecting shaft 9, and the lower surface of the connecting plate 10 is fixedly connected to the upper surface of the L-shaped plate 11. It is ensured that when the L-shaped plate 11 moves laterally, the connecting rod 6 can rotate relative to the connecting shaft 9 without getting stuck.

[0033] like Figure 8 As shown, the elastic mechanism includes a spring 13 disposed between the inner top surface of the L-shaped plate 11 and the upper surface of the limiting roller 12, and the upper and lower ends of the spring 13 are respectively rotatably connected to the L-shaped plate 11 and the limiting roller 12. The spring 13 provides elastic force to ensure that the limiting roller 12 does not jump up and down during the transportation process after moving down.

[0034] The upper and lower ends of the spring sheet 13 are respectively fixedly connected with an upper rotating shaft 26 and a lower rotating shaft 25, a recessed groove 24 is provided on the upper surface of the limiting roller 12, and the lower rotating shaft 25 is rotatably embedded in the inner wall of the recessed groove 24. The inner top surface of the L-shaped plate 11 and the two sides close to the spring sheet 13 are respectively fixedly connected with connecting seats 27, and the upper rotating shaft 26 is rotatably connected with the connecting seats 27. When the limiting roller 12 moves upward, the spring sheet 13 is squeezed, and the spring sheet 13 enters the inner side of the recessed groove 24. The upper rotating shaft 26 and the lower rotating shaft 25 realize the rotational connection between the upper and lower ends of the spring sheet 13 and the connection position, preventing the rigid connection from being damaged during squeezing.

[0035] like Figure 6 , Figure 7 As shown, the distance adjustment mechanism includes a threaded column 14 fixedly connected to the upper surface of the limiting roller 12, the upper end of the threaded column 14 slides through the upper surface of the L-shaped plate 11, and the outer surface of the threaded column 14 is threadedly sleeved with a limiting screw sleeve 15. This part of the design allows the downward movement of the threaded column 14 to be adjusted, so that the limiting roller 12 can be adjusted to be close to the upper edge of the wafer 30.

[0036] like Figure 1 , Figure 6 As shown, the two sides of the lower surface of the basket body 1 are respectively fixedly connected with extended bottoms 29 to ensure that the lower edge of the wafer 30 does not touch the ground, and the front surface of the basket body 1 is fixedly connected with a carrying handle 28. The carrying handle 28 is convenient for users to carry the basket body 1.

[0037] Place the wafer 30 between the partition grids 2. Before transportation, pull up the pull ring 22 and move the concave frame 16 horizontally to move the L-shaped plate 11 horizontally. When the lower side of the limiting roller 12 is no longer restricted by the upper surface of the top plate 3, the limiting roller 12 will move downward under the elastic force of the spring leaf 13. As the horizontal movement proceeds, the pin 19 can be inserted into another limiting hole 17 after the hand is released. At this time, the limiting roller 12 will be close to the upper edge of the wafer 30 to play a limiting role during transportation, which is beneficial to improving the stability of transportation.

[0038] By rotating the limit screw sleeve 15, the user can move the limit screw sleeve 15 up or down relative to the threaded column 14 to change the maximum stroke of the limit roller 12 when it moves downward, thereby preventing the limit roller 12 from being too far away from the upper edge of the wafer 30 or directly crushing the wafer 30. It has an adjustment function and is flexible and convenient to use.

[0039] When the wafer 30 needs to be taken out, the user lifts the pull ring 22 and pulls the concave frames 16 on both sides away from each other. The limiting roller 12 will move along the surface of the inclined guide surface 23 and then be retracted to the inner side of the L-shaped plate 11 until it moves to the upper surface of the top plate 3 and stops. The top of the wafer 30 can be opened to facilitate the removal operation. Therefore, while having the function of improving stability, it still ensures that the wafer 30 is removed conveniently.

[0040] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A movable buckle-type flower basket structure, comprising a basket body (1), characterized in that: A plurality of partition grilles (2) are respectively arranged on the inner walls of both sides of the basket body (1); the two upper sides of the basket body (1) are respectively fixedly connected to a top plate (3); the upper surface of the top plate (3) is fixedly connected to a fixing seat (4); the upper surface of the fixing seat (4) is slidably connected to a connecting rod (6); the ends of the connecting rods (6) on both sides that are close to each other are respectively rotatably connected to an L-shaped plate (11); the lower surfaces of the two L-shaped plates (11) are respectively connected to a limiting roller (12) through an elastic mechanism; a distance adjustment mechanism is arranged between the limiting roller (12) and the L-shaped plate (11); the sides of the two L-shaped plates (11) that are away from each other are respectively fixedly connected to a concave frame (16); a buckle mechanism is arranged between the concave frame (16) and the upper surface of the fixing seat (4); and an inclined guide surface (23) is arranged at the upper corner of the partition grille (2); The buckle mechanism comprises a guide sleeve (18) fixedly connected to the upper surface of the fixing seat (4); the concave frame (16) slides through the inner side of the guide sleeve (18); a plug post (19) is slidably inserted into the upper surface of the guide sleeve (18); a sleeve ring (20) is fixedly provided at the upper end of the outer surface of the plug post (19); a tension spring (21) is fixedly connected between the lower surface of the sleeve ring (20) and the upper surface of the guide sleeve (18); the tension spring (21) is sleeved on the outer surface of the plug post (19); a pull ring (22) is fixedly connected to the upper end surface of the plug post (19); two limiting holes (17) are provided on the upper surface of the concave frame (16); the plug post (19) is slidably inserted into the inner side of one of the limiting holes (17); When the L-shaped plates (11) on both sides are close to each other, the limiting roller (12) moves downward under the action of the elastic mechanism, and then when the two L-shaped plates (11) move away from each other, the limiting roller (12) moves along the surface of the inclined guide surface (23) and is retracted to the inner side of the L-shaped plate (11).

2. The movable buckle-type flower basket structure according to claim 1, characterized in that: The upper surface of the fixed seat (4) is provided with a sliding groove (5), one end of the lower surface of the connecting rod (6) is fixedly connected to a sliding column (7), the lower end of the sliding column (7) slides and snaps into the inner side of the sliding groove (5), the upper surface of the fixed seat (4) is fixedly connected to an L-shaped cover (8), and the upper surface of the connecting rod (6) is in sliding contact with the inner top surface of the L-shaped cover (8).

3. The movable buckle-type flower basket structure according to claim 1, characterized in that: A connecting shaft (9) is fixedly connected to one end of the upper surface of the connecting rod (6) away from the fixing seat (4), and a connecting plate (10) is rotatably sleeved on the outer surface of the connecting shaft (9), and the lower surface of the connecting plate (10) is fixedly connected to the upper surface of the L-shaped plate (11).

4. The movable buckle-type flower basket structure according to claim 1, characterized in that: The elastic mechanism comprises a leaf spring (13) arranged between the inner top surface of the L-shaped plate (11) and the upper surface of the limiting roller (12), and the upper and lower ends of the leaf spring (13) are rotatably connected to the L-shaped plate (11) and the limiting roller (12) respectively.

5. The movable buckle-type flower basket structure according to claim 4, characterized in that: The upper and lower ends of the spring leaf (13) are respectively fixedly connected to an upper rotating shaft (26) and a lower rotating shaft (25); the upper surface of the limiting roller (12) is provided with a recessed groove (24); the lower rotating shaft (25) is rotatably embedded in the inner wall of the recessed groove (24); the inner top surface of the L-shaped plate (11) and the two sides close to the spring leaf (13) are respectively fixedly connected to connecting seats (27); the upper rotating shaft (26) is rotatably connected to the connecting seat (27).

6. The movable buckle-type flower basket structure according to claim 1, characterized in that: The distance adjustment mechanism comprises a threaded column (14) fixedly connected to the upper surface of the limiting roller (12), the upper end of the threaded column (14) slides through the upper surface of the L-shaped plate (11), and a limiting screw sleeve (15) is provided on the outer surface of the threaded column (14).

7. The movable buckle-type flower basket structure according to claim 1, characterized in that: Extension bottoms (29) are fixedly connected to both sides of the lower surface of the basket body (1), and a carrying handle (28) is fixedly connected to the front surface of the basket body (1).

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