Vacuum coating equipment

Abstract

The present application relates to a vacuum coating device, which includes a vacuum chamber, a rotating table rotatably arranged in the vacuum chamber, and a material discharge seat arranged on the rotating table; a gear plate coaxial with the rotating table is fixedly arranged in the vacuum chamber, a planetary turntable is rotatably arranged on the rotating table, a planetary turntable is coaxially arranged on the planetary turntable, a planetary gear meshing with the gear plate is coaxially arranged on the planetary turntable, and the material discharge seat is arranged on the planetary turntable; a plurality of mounting grooves arranged in a circumferentially spaced ring pattern are arranged on the material discharge seat, a mounting frame is detachably installed in the mounting groove, a placement frame extending to the outside of the mounting groove is arranged on the mounting frame, and the placement frames are arranged in sequence along the height direction of the material discharge seat; a limiting rod is arranged on the planetary turntable, and the material discharge seat is movably arranged outside the limiting rod. The present application has the effect of shortening the material collection cycle and further improving the production efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of coating equipment, and in particular to a vacuum coating equipment. Background Art

[0002] At present, vacuum coating equipment is a device that deposits thin films in a high vacuum environment. This technology can produce high-quality and high-precision thin films and is suitable for industries such as electronics, optics, semiconductors, and decoration. The main methods of vacuum coating include physical vapor deposition (PVD) and chemical vapor deposition (CVD).

[0003] Typical vacuum coating equipment usually includes the following parts: a vacuum chamber, which provides a near-vacuum working environment to ensure purity during the deposition process; an exhaust system, which is used to extract air and create the required vacuum conditions; a heating system, which is used to increase the temperature of the source material for processes that require heating, such as evaporation coating; a power supply, which provides the necessary power support, such as the DC or RF power required for sputtering coating; a turntable and fixture, where the fixture is used to fix the object to be coated, and the turntable is used to drive the fixture to rotate to obtain a uniform coating; a control and monitoring system, which monitors parameters throughout the coating process, such as temperature, pressure, current, etc., to ensure process stability and repeatability.

[0004] For the above-mentioned turntable and fixture, after completing the coating on the surface of the workpiece, the workers need to take the workpiece out of the fixture one by one. However, in order to meet the needs of mass production in the factory, the number of workpieces placed on each set of fixtures is always large, and the position of the workpiece is affected by the rotation angle, which further increases the difficulty of workers in taking out the workpieces in the narrow operating space, prolongs the material taking cycle, and reduces the production efficiency to a certain extent. Summary of the invention

[0005] The present application provides a vacuum coating device, which makes it convenient for workers to pick up parts, reduces the difficulty of picking up parts, shortens the material picking cycle, and thus can further improve production efficiency.

[0006] The vacuum coating equipment provided in this application adopts the following technical solution:

[0007] A vacuum coating device comprises a vacuum chamber, a rotating table is rotatably arranged in the vacuum chamber, and a material discharge seat is arranged on the rotating table; a gear plate coaxial with the rotating table is fixedly arranged in the vacuum chamber, a planetary turntable is rotatably arranged on the rotating table, a planetary turntable is coaxially arranged with planetary gears meshing with the gear plate, and the material discharge seat is arranged on the planetary turntable; a plurality of mounting grooves arranged in a circumferentially spaced ring pattern are arranged on the material discharge seat, a mounting frame is detachably installed in the mounting groove, a placing frame extending to the outside of the mounting groove is arranged on the mounting frame, and the placing frames are arranged in sequence and at intervals along the height direction of the material discharge seat; a limiting rod is arranged on the planetary turntable, and the material discharge seat is movably penetrated outside the limiting rod.

[0008] Preferably, a locking plate is provided on the discharge seat, and a locking column is provided on the locking plate; a locking hole for inserting the locking column into the mounting frame is provided on the mounting frame; a locking spring is also provided on the discharge seat, one end of the locking spring is in contact with the locking plate, and the other end of the locking spring is in contact with the discharge seat; the locking spring is used to push the locking column into the mounting groove until the locking column is inserted into and pressed into the relative locking hole.

[0009] Preferably, a ceiling panel is rotatably provided on the top inner wall of the vacuum chamber, and the top of the limit rod is rotatably provided on the ceiling panel; the locking plate is slidably provided on the discharge seat along the length direction of the limit rod; under the elastic force of the locking spring, the top of the locking plate passes through to the outside of the discharge seat and faces the ceiling panel; the ceiling panel includes a pressure ring facing the locking plate, and the pressure ring is used to push the locking plate downward.

[0010] Preferably, the rotating table is also provided with a limiting cover located outside the planetary turntable, and the limiting cover surrounds the bottom of the discharge seat; when the discharge seat is placed on the planetary turntable, the bottom of the mounting frame is limited in the limiting cover.

[0011] Preferably, the rotating table is also provided with a lifting seat located outside the limiting cover, and a driving screw is rotatably arranged on the lifting seat. The external thread of the driving screw is connected to a lifting plate with one side limited in the lifting seat, and the other side of the lifting plate extends into the limiting cover and extends to the bottom of the discharge seat; the driving screw and the lifting plate are used to drive the discharge seat to rise and fall along the length direction of the limiting rod.

[0012] Preferably, a center clamp is also provided on the rotating table, and the planetary turntable is arranged around the center clamp in a circumferentially spaced ring; the center clamp includes an adjustment seat arranged on the rotating table, a bidirectional screw is rotatably arranged in the adjustment seat, and the bidirectional screw is threadedly connected with clamping parts symmetrically arranged at both ends of the bidirectional screw, and the bidirectional screw is used to drive the clamping parts on both sides to slide synchronously in the direction of approaching or moving away from each other; a material discharge rack is placed between the clamping parts, and a material discharge trough is arranged on the material discharge rack.

[0013] Preferably, the clamping member is provided with a fixing assembly for limiting and fixing the material discharging rack on the clamping member, the fixing assembly includes a latch plate arranged on the clamping member, and the material discharging rack is provided with a latch groove for the latch plate to be inserted into the material discharging rack.

[0014] Preferably, a lifting screw is rotatably provided on the rotating table, and a lifting plate is threadedly connected to the lifting screw, and the material discharge rack is movably sleeved on the outside of the lifting plate; the lifting plate is used to drive the material discharge rack to lift and lower, and the fixing assembly also includes a trigger plate movably provided on the clamping member, a sliding column is provided on the latch plate, the sliding column is movably inserted into one side of the trigger plate, and a roller is rotatably provided on the end of the sliding column away from the latch plate, and the roller is directly opposite to the clamping member; a return spring is sleeved on the outside of the sliding column, and the return spring is used to drive the latch plate to move in a direction away from the latch slot; the other side of the trigger plate extends to the bottom of the lifting plate, and the clamping member is inclined downward in a direction close to the material discharge rack; a return spring is also provided on the clamping member, and the return spring is used to push the trigger plate to move back to its position.

[0015] Preferably, a linkage assembly is provided between the driving screw and the lifting screw, and the driving screw and the lifting screw rotate synchronously through the linkage assembly.

[0016] In summary, the present application includes at least one of the following beneficial technical effects:

[0017] During electroplating, as the turntable rotates, the unloading seat placed on the planetary turntable will follow the revolution of the turntable. In addition, with the cooperation of the planetary gear and the gear plate, the unloading seat will also follow the rotation of the planetary turntable. The combination of revolution and rotation can make the surface of the workpiece obtain a more uniform coating, further improving the coating quality of the workpiece surface.

[0018] When the coating of the workpiece is completed, the lifting plate is driven to rise by rotating the driving screw. As the lifting plate continues to rise, the lifting plate will drive the discharge seat to move up along the length direction of the limit rod; when the bottom of the mounting frame moves out of the limit cover, the top of the locking plate will be pressed into the discharge seat under the limit of the ceiling plate. At this time, the locking plate will drive the locking column to withdraw from the locking hole of the mounting frame, and at the same time the locking spring will remain in a compressed state; at this time, the lock of the mounting frame is released, and the worker can take the mounting frame together with the workpiece out of the discharge seat, which is convenient for the worker to take out the workpiece and reduces the difficulty of taking out the workpiece; when the work of taking out the workpiece on one side of the discharge seat is completed, the discharge seat is rotated around the limit rod to an appropriate angle, and the work of taking out the workpiece on the other side can be continued. The work of taking out the workpiece is more convenient and quick, which greatly reduces the difficulty of taking out the workpiece in a small operating space, shortens the material taking cycle, and further improves the production efficiency.

[0019] The setting of the center clamp and the discharge rack facilitates the coating needs of various sheet workpieces. In addition, the spacing of the clamps can be adjusted according to the discharge racks of different specifications, which can further improve the adaptation range of the clamps and make the use more flexible and practical. The driving screw and the lifting screw are linked through the linkage component, which further improves the convenience of operation in a small space. Workers only need to stand on one side of the turntable and control the fixing component by operating the driving screw. The fixing component is used to lock and unlock the discharge rack. The operation is convenient and fast, and the design is ingenious. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0021] Figure 2 yes Figure 1 A schematic diagram highlighting the partial structure inside the vacuum chamber;

[0022] Figure 3 yes Figure 2 A schematic diagram showing the top view of the bottom of the rotating platform;

[0023] Figure 4 It is a partial structural diagram highlighting the unloading seat and the center clamp;

[0024] Figure 5 It is a schematic diagram of the partial structure explosion highlighting the bottom of the discharge seat;

[0025] Figure 6 It is a schematic diagram highlighting the partial structure of the ceiling plate and the locking plate;

[0026] Figure 7 It is a partial exploded schematic diagram highlighting the central fixture;

[0027] Figure 8It is a schematic diagram of the local structural section of the center fixture.

[0028] Description of reference numerals: 1. vacuum chamber; 10. ceiling plate; 100. pressure ring; 2. rotating table; 20. limit cover; 21. lifting seat; 22. driving screw; 23. lifting plate; 24. lifting screw; 25. lifting plate; 250. guide rod; 3. material discharge seat; 30. mounting groove; 31. mounting frame; 310. locking hole; 32. placing frame; 33. locking plate; 330. guiding inclined plane; 34. locking column; 35. locking spring; 4. gear plate; 5. row Star turntable; 50, planetary gear; 51, limit rod; 6, center clamp; 60, adjustment seat; 61, bidirectional screw; 62, clamping piece; 63, material discharge rack; 630, material discharge trough; 631, latch slot; 64, return spring; 7, fixing assembly; 70, latch plate; 700, sliding column; 71, trigger plate; 72, roller; 73, reset spring; 8, linkage assembly; 80, main gear; 81, sub-gear set; 82, driving gear; 83, transmission belt. DETAILED DESCRIPTION

[0029] The present application is further described in detail below in conjunction with the accompanying drawings.

[0030] The embodiment of the present application discloses a vacuum coating device.

[0031] Reference Figure 1 , Figure 2 as well as Figure 3 The vacuum coating equipment includes a vacuum chamber 1, in which a rotating table 2 driven by a motor is rotatably arranged at the bottom, and a plurality of material discharge seats 3 for placing workpieces are installed above the rotating table 2. A plurality of planetary turntables 5 corresponding to the material discharge seats 3 are also rotatably arranged on the rotating table 2, and the planetary turntables 5 are evenly spaced and arranged in a circumferential direction around the rotation axis of the rotating table 2. A planetary gear 50 is coaxially fixedly installed at the bottom of the planetary turntable 5, and the rotation axis direction of the planetary gear 50 is consistent with the rotation axis direction of the rotating table 2, and the material discharge seats 3 are respectively placed above each planetary turntable 5.

[0032] like Figure 1 , Figure 4 as well as Figure 5As shown, a gear plate 4 coaxial with the rotating table 2 is fixedly installed on the inner wall of the bottom of the vacuum chamber 1. The gear plate 4 is located below the rotating table 2. Each planetary gear 50 is circumferentially arranged around the gear plate 4, and the planetary gear 50 is meshed with the outer ring of the gear plate 4. When the rotating table 2 rotates under the drive of the motor, the planetary turntable 5 set on the rotating table 2 will drive the unloading seat 3 to revolve around the rotating axis of the rotating table 2. In addition, the unloading seat 3 will rotate synchronously with the planetary turntable 5 under the mutual cooperation of the planetary gear 50 and the gear plate 4. The use of a rotation method combining revolution and rotation can make the surface of the workpiece obtain a more uniform coating, further improving the coating quality of the surface of the workpiece.

[0033] like Figure 4 , Figure 5 As shown, a vertically placed limit rod 51 is fixedly installed on the central axis of the planetary turntable 5, and the material discharge seat 3 is movably arranged outside the limit rod 51. It should be mentioned that the material discharge seat 3 can rotate with the limit rod 51, and the material discharge seat 3 can slide downward along the length direction of the limit rod 51. A plurality of mounting grooves 30 arranged in a circumferentially spaced ring are provided on the material discharge seat 3, and the length of the mounting groove 30 is arranged along the height direction of the material discharge seat 3. A mounting frame 31 can be detachably installed in each mounting groove 30, and a placement frame 32 extending to the outside of the mounting groove 30 is threadedly connected on the outer wall of the mounting frame 31 away from the limit rod 51, and the placement frame 32 is arranged in sequence along the height direction of the material discharge seat 3, and the placement frame 32 is used to hang and install the workpiece.

[0034] like Figure 1 , Figure 3 as well as Figure 4 As shown, a ceiling plate 10 located directly above the rotating table 2 is rotatably arranged on the top inner side wall of the vacuum chamber 1, and the rotating axis of the ceiling plate 10 is coaxially arranged with the rotating axis of the rotating table 2. The top of the limit rod 51 is rotatably inserted on the ceiling plate 10, and when the rotating table 2 rotates, the ceiling plate 10 will rotate synchronously with the rotating table 2 driven by the limit rod 51.

[0035] like Figure 5 , Figure 6 As shown, a locking plate 33 corresponding to the mounting frame 31 is movably provided on the discharge seat 3, and a locking column 34 is fixedly provided at the bottom of the locking plate 33. The bottom of the mounting frame 31 is provided with locking holes 310 for the respective relative locking columns 34 to be inserted from bottom to top into the mounting frame 31. The mounting frame 31 is fixed in its respective mounting groove 30 by the mutual plug-in cooperation between the locking column 34 and the locking hole 310.

[0036] like Figure 5 , Figure 6As shown, the bottom of the material discharging seat 3 is also provided with locking springs 35 corresponding to the respective locking plates 33, the bottom end of the locking spring 35 is in contact with the inner side wall of the material discharging seat 3, and the top end of the locking spring 35 is in contact with the locking plate 33. In the natural state, the locking spring 35 is used to push the locking plate 33 to maintain the lifting state, at which time the locking column 34 will be inserted into the installation groove 30, and the locking column 34 will be inserted and pressed into the respective opposite locking holes 310.

[0037] like Figure 5 , Figure 6 As shown, the locking plate 33 is slidably arranged on the discharge seat 3 along the length direction of the limiting rod 51. Under the elastic force of the locking spring 35, the top of the locking plate 33 passes through the top outer wall of the discharge seat 3 to the outside of the discharge seat 3, and the top of the locking plate 33 is opposite to the ceiling board 10. The ceiling board 10 also includes a pressing ring 100 facing the locking plate 33. When the locking plate 33 is rotated to face the pressing ring 100, the discharge seat 3 is lifted. As the top of the locking plate 33 is limited and pressed down by the pressing ring 100, the locking plate 33 and the discharge seat 3 are relatively displaced up and down. Finally, the locking plate 33 will drive the locking column 34 to withdraw from the respective relative locking holes 310. At this time, the locking spring 35 will remain in a compressed state, and the corresponding mounting frame 31 will also be in an unlocked state.

[0038] like Figure 5 , Figure 6 As shown, the top of the locking plate 33 is provided with a guiding slope 330. When it is necessary to remove the workpiece on the other side mounting frame 31 of the discharge seat 3, the discharge seat 3 is rotated around the limit rod 51. At this time, under the action of the guiding slope 330, it can ensure that the top of the locking plate 33 and the pressure ring 100 are smoothly in contact, thereby unlocking the corresponding mounting frame 31.

[0039] like Figure 4 , Figure 5 As shown, the rotating table 2 is also fixedly mounted with a limiting cover 20 respectively located outside each planetary turntable 5, and the limiting cover 20 surrounds the bottom of the material discharging seat 3. When the material discharging seat 3 is placed on the planetary turntable 5, the bottom of the mounting frame 31 will be limited in the limiting cover 20, and the limiting cover 20 is used to limit the bottom of the mounting frame 31, thereby effectively preventing the mounting frame 31 from being separated from the mounting groove 30 due to improper installation, and further improving the safety and stability of the mounting frame 31.

[0040] like Figure 4 , Figure 5As shown, a plurality of lifting seats 21 respectively located outside the respective relative limiting covers 20 are fixedly mounted on the rotating table 2, and a driving screw 22 is vertically rotatably arranged on the lifting seat 21, and the external thread of the driving screw 22 is connected to a lifting plate 23 whose one side is limited in the lifting seat 21, and the other side of the lifting plate 23 extends into the interior of the respective relative limiting covers 20 and extends to the bottom of the discharge seat 3. The driving screw 22 and the lifting plate 23 are used to drive the respective discharge seats 3 to rise and fall along the length direction of the limiting rod 51.

[0041] like Figure 2 , Figure 4 as well as Figure 7 As shown, a central clamp 6 is provided in the central area of ​​the rotating table 2, and each planetary turntable 5 is arranged around the central clamp 6 at circumferential intervals. The central clamp 6 includes an adjustment seat 60 fixedly mounted on the upper surface of the rotating table 2, and a horizontally placed bidirectional screw 61 is rotatably provided in the adjustment seat 60, and the two ends of the bidirectional screw 61 are symmetrically provided with reverse threads. The two ends of the bidirectional screw 61 are respectively threadedly connected with symmetrically arranged clamping members 62, and the bidirectional screw 61 is used to drive the clamping members 62 on both sides to move horizontally in a direction of approaching or moving away from each other synchronously.

[0042] like Figure 4 , Figure 7 As shown, a material discharging rack 63 is placed between the clamping members 62 on both sides, and a plurality of material discharging slots 630 arranged in sequence are passed through the material discharging rack 63, and the material discharging slots 630 are used for placing sheet-shaped workpieces and limiting them on the material discharging rack 63. By rotating the bidirectional screw rod 61, the spacing between the clamping members 62 on both sides can be adjusted, so that the placement of material discharging racks 63 of different specifications can be met, further improving the adaptation range of clamping members 62 of different specifications, and making the use more flexible and practical.

[0043] like Figure 7 , Figure 8 As shown, the clamping member 62 is provided with a fixing assembly 7 for limiting and fixing the material discharging rack 63 on the clamping member 62, and the fixing assembly 7 includes a latch plate 70 movably arranged on the clamping member 62, and the material discharging rack 63 is provided with latch grooves 631 for respectively corresponding latch plates 70 to be inserted into the material discharging rack 63, and the two sides of the material discharging rack 63 are fixed between the clamping members 62 on both sides through the mutual plug-in cooperation of the latch plates 70 and the latch grooves 631.

[0044] like Figure 7 , Figure 8As shown, a lifting screw 24 mounted on the adjusting seat 60 is rotatably provided on the rotating platform 2, and the rotation axis of the lifting screw 24 is coaxially provided with the rotation axis of the rotating platform 2. A lifting plate 25 is threadedly connected to the lifting screw 24, and guide rods 250 symmetrically provided on both sides of the lifting plate 25 are also fixedly installed on the rotating platform 2. The length direction of the guide rods 250 is consistent with the length direction of the lifting screw 24, and the lifting plate 25 is movably provided outside the guide rods 250 on both sides. When the lifting screw 24 is controlled to rotate, the lifting plate 25 will be lifted and lowered along the length direction of the lifting screw 24 under the limit of the guide rods 250 on both sides.

[0045] like Figure 7 , Figure 8 As shown, the material discharging rack 63 is movably sleeved outside the lifting plate 25. When the lifting plate 25 is driven by the lifting screw 24 to rise to a specified height, the material discharging rack 63 will move up synchronously with the lifting plate 25. Similarly, when the lifting plate 25 gradually moves down with the material discharging rack 63, the material discharging rack 63 will eventually be re-placed on the clamping members 62 on both sides. As the lifting plate 25 moves further down, the lifting plate 25 will gradually separate from the material discharging rack 63.

[0046] like Figure 7 , Figure 8 As shown, the fixing assembly 7 also includes a trigger plate 71 disposed on the clamping member 62, and the trigger plate 71 is slidably disposed on the clamping member 62 along the lifting direction of the lifting plate 25. A horizontally disposed sliding column 700 is fixedly installed on the side wall of the latch plate 70 away from the material discharging rack 63, and the sliding column 700 is movably disposed on the upper side of the trigger plate 71 along the horizontal direction. The end of the sliding column 700 away from the latch plate 70 is rotatably provided with a roller 72 facing the respective clamping member 62, and the outer side wall of the clamping member 62 facing the roller 72 is gradually inclined downward from top to bottom toward the direction close to the material discharging rack 63.

[0047] like Figure 7 , Figure 8 As shown, a return spring 73 is sleeved on the outside of the sliding column 700, and the return spring 73 is retracted along the sliding direction of the sliding column 700. One end of the return spring 73 contacts the outer wall of the trigger plate 71 away from the latch plate 70, and the other end of the return spring 73 contacts the sliding column 700. The return spring 73 is used to drive the latch plate 70 to move in a direction away from the latch slot 631.

[0048] like Figure 7 , Figure 8As shown, the lower side of the trigger plate 71 extends to the bottom of the lifting plate 25, and the lower side of the trigger plate 71 is located on the downward movement path of the lifting plate 25. The clamping member 62 is also provided with a return spring 64 located below the trigger plate 71, and the return spring 64 is used to push the trigger plate 71 to move back up. It should be mentioned that the elastic force of the return spring 64 is much greater than the elastic force of the return spring 73. When the lifting plate 25 places the material discharging rack 63 between the clamping members 62 on both sides, as the lifting plate 25 moves further downward, the lifting plate 25 will drive the trigger plate 71 to gradually move downward. At this time, the roller 72 will gradually move downward along the outer wall of the inclined clamping member 62. At this time, the sliding column 700 will push the latch plate 70 to gradually insert into the latch slot 631. Through the mutual plug-in cooperation of the latch plate 70 and the latch slot 631, the material discharging rack 63 can be locked on the clamping member 62.

[0049] When the lifting plate 25 gradually rises, the trigger plate 71 will gradually move up and reset under the elastic force of the return spring 64. At the same time, the latch plate 70 will also gradually move away from the discharge rack 63 under the elastic force of the reset spring 73 until the latch plate 70 withdraws from the latch slot 631. At this time, the lock on the discharge rack 63 is released, and the lifting plate 25 can smoothly drive the discharge rack 63 to move out from the clamping members 62 on both sides, which greatly facilitates the work of taking out items.

[0050] like Figure 4 , Figure 7 as well as Figure 8 As shown, a linkage assembly 8 is provided between the lifting screw 24 and one of the driving screws 22, and the driving screw 22 and the lifting screw 24 are kept in synchronous rotation through the linkage assembly 8. The linkage assembly 8 includes a main gear 80 coaxially fixedly sleeved on the bottom of the lifting screw 24, and a sub-gear set 81 rotatably arranged on the rotating table 2, and the upper ends of the main gear 80 and the sub-gear set 81 are meshed with each other. The linkage assembly 8 also includes a driving gear 82 coaxially fixedly sleeved on the outside of the driving screw 22, and the lower ends of the driving gear 82 and the sub-gear set 81 are meshed with a transmission belt 83, and the driving gear 82 is kept in synchronous rotation with the sub-gear set 81 through the transmission belt 83; when the driving gear 82 drives the sub-gear set 81 to rotate, the upper end of the sub-gear set 81 will drive the lifting screw 24 to rotate through the main gear 80.

[0051] It should be mentioned that when the driving screw 22 drives the lifting plate 23 to rise, the lifting screw 24 will also drive the lifting plate 25 to rise synchronously. Similarly, the lifting plate 23 and the lifting plate 25 will keep falling synchronously.

[0052] The implementation principle is:

[0053] During electroplating, as the turntable 2 rotates, the unloading seat 3 placed on the planetary turntable 5 will revolve with the turntable 2. In addition, with the cooperation of the planetary gear 50 and the gear plate 4, the unloading seat 3 will also rotate with the planetary turntable 5. The combination of revolution and rotation can allow the workpiece surface to obtain a more uniform coating, further improving the coating quality of the workpiece surface.

[0054] When the workpiece is coated, the lifting plate 23 is driven to rise by rotating the driving screw 22. As the lifting plate 23 continues to rise, the lifting plate 23 will drive the material discharging seat 3 to move up along the length direction of the limiting rod 51. When the bottom of the mounting frame 31 moves out of the limiting cover 20, the top of the locking plate 33 will be pressed into the material discharging seat 3 under the limit of the ceiling plate 10. At this time, the locking plate 33 will drive the locking column 34 to withdraw from the locking hole 310 of the mounting frame 31, and at the same time, the locking spring 35 will remain in a compressed state. At this time, the locking of the mounting frame 31 is released, and the worker can take the mounting frame 31 together with the workpiece from the material discharging seat 3, which is convenient for the worker to take the workpiece and reduces the difficulty of taking the workpiece. After completing the work of taking out the workpiece on one side of the discharge seat 3, by rotating the discharge seat 3 around the limit rod 51 to an appropriate angle, the work of taking out the workpiece on the other side can be continued. The taking out workpiece is more convenient and quick, which greatly reduces the difficulty of taking out workpieces in a small operating space, shortens the taking out cycle, and further improves production efficiency.

[0055] The arrangement of the central clamp 6 and the material discharging rack 63 facilitates the coating requirements of various sheet-like workpieces. In addition, the spacing of the clamping member 62 can be adjusted according to the material discharging rack 63 of different specifications, thereby further improving the adaptability range of the clamping member 62, making it more flexible and practical to use. The driving screw 22 and the lifting screw 24 are linked by the linkage assembly 8, further improving the convenience of operation in a small space. The worker only needs to stand on one side of the rotating table 2 and control the fixing assembly 7 by operating the driving screw 22, and use the fixing assembly 7 to achieve the locking and unlocking of the material discharging rack 63. The operation is convenient and fast, and the design is ingenious.

[0056] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum coating device, comprising a vacuum chamber (1), a rotating table (2) rotatably arranged in the vacuum chamber (1), and a material discharge seat (3) arranged on the rotating table (2); characterized in that: A gear plate (4) coaxial with the rotating table (2) is fixedly arranged in the vacuum chamber (1); a planetary turntable (5) is rotatably arranged on the rotating table (2); a planetary gear (50) is coaxially arranged on the planetary turntable (5) and meshes with the gear plate (4); the discharge seat (3) is arranged on the planetary turntable (5); a plurality of mounting grooves (30) arranged in a circumferentially spaced ring pattern are arranged on the discharge seat (3); a mounting frame (31) is detachably mounted in the mounting groove (30); a placement frame (32) extending out of the mounting groove (30) is arranged on the mounting frame (31); the placement frames (32) are arranged in sequence in a spaced manner along the height direction of the discharge seat (3); a limiting rod (51) is arranged on the planetary turntable (5); the discharge seat (3) is movably arranged outside the limiting rod (51); The discharge seat (3) is provided with a locking plate (33), and the locking plate (33) is provided with a locking column (34); the mounting frame (31) is provided with a locking hole (310) for inserting the locking column (34) into the mounting frame (31); the discharge seat (3) is also provided with a locking spring (35), one end of the locking spring (35) is in contact with the locking plate (33), and the other end of the locking spring (35) is in contact with the discharge seat (3); the locking spring (35) is used to push the locking column (34) into the mounting groove (30) until the locking column (34) is inserted into and pressed into the opposite locking hole (310); the discharge seat (3) is movably arranged outside the limiting rod (51), the discharge seat (3) can rotate with the limiting rod (51), and the discharge seat (3) can slide upward along the length direction of the limiting rod (51); A ceiling plate (10) is rotatably mounted on the inner side wall of the top of the vacuum chamber (1), and the top of the limit rod (51) is rotatably mounted on the ceiling plate (10); the locking plate (33) is slidably mounted on the discharge seat (3) along the length direction of the limit rod (51); under the elastic force of the locking spring (35), the top of the locking plate (33) passes through to the outside of the discharge seat (3) and faces the ceiling plate (10); the ceiling plate (10) includes a pressing ring (100) facing the locking plate (33), and the pressing ring (100) is used to push the locking plate (33) downward; The rotating table (2) is also provided with a limiting cover (20) located outside the planetary turntable (5), and the limiting cover (20) surrounds the bottom of the material discharge seat (3); when the material discharge seat (3) is placed on the planetary turntable (5), the bottom of the mounting frame (31) is limited in the limiting cover (20); The rotating table (2) is also provided with a lifting seat (21) located outside the limiting cover (20), and a driving screw (22) is rotatably provided on the lifting seat (21). The driving screw (22) is externally threadedly connected to a lifting plate (23) whose one side is limited in the lifting seat (21), and the other side of the lifting plate (23) extends into the limiting cover (20) and extends to the bottom of the discharge seat (3); the driving screw (22) and the lifting plate (23) are used to drive the discharge seat (3) to rise and fall along the length direction of the limiting rod (51).

2. The vacuum coating equipment according to claim 1, characterized in that: The rotating table (2) is also provided with a central clamp (6), and the planetary turntable (5) is arranged around the central clamp (6) in a circumferentially spaced ring; the central clamp (6) comprises an adjustment seat (60) arranged on the rotating table (2), a bidirectional screw rod (61) is rotatably arranged in the adjustment seat (60), and the bidirectional screw rod (61) is threadedly connected with clamping members (62) symmetrically arranged at both ends of the bidirectional screw rod (61), and the bidirectional screw rod (61) is used to drive the clamping members (62) on both sides to slide synchronously in a direction of approaching or moving away from each other; a material discharging rack (63) is arranged between the clamping members (62), and a material discharging trough (630) is arranged on the material discharging rack (63).

3. The vacuum coating equipment according to claim 2, characterized in that: The clamping member (62) is provided with a fixing assembly (7) for fixing the material discharging rack (63) on the clamping member (62) in a limited position. The fixing assembly (7) includes a latch plate (70) provided on the clamping member (62). The material discharging rack (63) is provided with a latch groove (631) for inserting the latch plate (70) into the material discharging rack (63).

4. The vacuum coating equipment according to claim 3, characterized in that: A lifting screw (24) is rotatably arranged on the rotating table (2), a lifting plate (25) is threadedly connected to the lifting screw (24), and the material discharging rack (63) is movably sleeved on the outside of the lifting plate (25); the lifting plate (25) is used to drive the material discharging rack (63) to rise and fall, the fixing component (7) also includes a trigger plate (71) movably arranged on the clamping member (62), a sliding column (700) is arranged on the latch plate (70), the sliding column (700) is movably inserted into one side of the trigger plate (71), and one end of the sliding column (700) away from the latch plate (70) A roller (72) is rotatably arranged, and the roller (72) is directly opposite to the clamping member (62); a return spring (73) is sleeved on the outside of the sliding column (700), and the return spring (73) is used to drive the latch plate (70) to move in a direction away from the latch slot (631); the other side of the trigger plate (71) extends to the bottom of the lifting plate (25), and the clamping member (62) is inclined downward in a direction close to the material discharge rack (63); the clamping member (62) is also provided with a return spring (64), and the return spring (64) is used to push the trigger plate (71) to move upward and return to its original position.

5. The vacuum coating equipment according to claim 4, characterized in that: A linkage assembly (8) is provided between the driving screw (22) and the lifting screw (24), and the driving screw (22) and the lifting screw (24) rotate synchronously via the linkage assembly (8).

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