Module and method for generating pulsed microwave output signal

Abstract

A module (10, 10.1) for generating a pulsed microwave output signal and for actuating a microwave solid-state power amplifier module (110, 112, 114, 124, 126, 128) comprises a. An input element (S1) having a microwave signal input (12) and at least one first and one second microwave signal output (14, 16), b. An output element (S2) having a microwave signal input (12) and at least one first and one second microwave signal output (14, 16), the input element (S1) and the output element (S2) have at least one first and one second microwave signal input (18, 20) and a microwave signal output (22), c. A first signal path (24) between the first microwave signal output (14) of the input element (S1) and the first microwave signal input (18) of the output element (S2), d. A second signal path (26) between a second microwave signal output (16) of the input element (S1) and a second microwave signal input (20) of the output element (S2), e. An attenuation element (18) arranged in the second signal path (26), wherein i. The input element (S1) has a control signal input (30) and is configured to connect a microwave signal input (12) of the input element to a first or second microwave signal output (14, 16) of the input element depending on a pulse signal (40) input at the control signal input (30); and / or ii. The output element (S2) has a control signal input (32) and is configured to connect a first microwave signal input (18) of the output element or a second microwave signal input (20) of the output element to a microwave signal output (22) of the output element depending on a pulse signal (40) input at the control signal input (32).

Description

[0001] The present invention relates to a module for generating a pulse microwave output signal and for controlling a microwave solid-state power amplifier module, a microwave solid-state power amplifier and a microwave solid-state power generator. The present invention also includes a method for generating pulse microwave signals of different amplitudes.

[0002] When manufacturing integrated semiconductor circuits (ICs), components, such as transistors, are formed on a semiconductor substrate. During the manufacturing process, different materials are applied or etched onto different layers in order to manufacture the desired integrated circuit. In certain plasma-assisted processes, charge may accumulate on the substrate surface, which may negatively affect the plasma process. In order to reduce this charge generation, high frequency power may be delivered to the plasma process in the form of pulses. This is just one example among many other examples where pulsed plasma is required.

[0003] However, in certain applications, not only single-level pulses but also rapidly alternating multi-level pulses are desired.

[0004] Particularly short pulses are important for the generation of "non-equilibrium plasmas" or "non-thermal plasmas" or "cold plasmas" and for all processes using such plasmas. These plasma forms are characterized by the fact that the electrons can follow the field, while the ionized nuclei cannot follow the rapid field changes. The plasma remains "cold". It is therefore required that the pulses are shorter in time than the time constant for the recombination of ions and electrons. This time constant depends on many influencing variables (such as pressure, temperature) or on the element type of the ionized atoms themselves.

[0005] The object of the present invention is to provide a module with which fast multilevel pulses with very short pulse durations can be realized.

[0006] This object is achieved by a module for generating a pulsed microwave output signal and for operating a microwave solid-state power amplifier module, the module having:

[0007] a. an input element having a microwave signal input terminal and at least a first microwave signal output terminal and a second microwave signal output terminal,

[0008] b. an output element having at least a first microwave signal input terminal and a second microwave signal input terminal and a microwave signal output terminal,

[0009] c. a first signal path between a first microwave signal output end of the input element and a first microwave signal input end of the output element,

[0010] d. a second signal path between the second microwave signal output of the input element and the second microwave signal input of the output element,

[0011] e. an attenuation element disposed in the second signal path, wherein

[0012] i. the input element has a control signal input terminal and is configured to connect the microwave signal input terminal of the input element to the first microwave signal output terminal or the second microwave signal output terminal of the input element according to the pulse signal input at the control signal input terminal; and / or

[0013] ii. The output element has a control signal input terminal and is configured to connect the first microwave signal input terminal of the output element or the second microwave signal input terminal of the output element to the microwave signal output terminal of the output element according to a pulse signal input at the control signal input terminal.

[0014] An attenuation element is understood to be an electrical component which is capable and configured to reduce an electrical signal by a predetermined value, i.e., for example, to reduce the voltage, current and / or power by a certain factor. The attenuation element can be a resistor, a voltage divider, an active circuit or a single component. The attenuation element can be a component which can be adjusted manually or by an electrical signal.

[0015] Here, the microwave signal refers to a signal with a frequency of 300 MHz to 20 GHz.

[0016] The microwave output signal is understood here to mean the microwave signal at the output end.

[0017] A pulsed microwave signal is a pulsating microwave signal. The pulse can be very short. "Very short" is a pulse in the range of 10 ns to 500 ns. The pulse can be in particular in the range of 10 ns to 40 ns, preferably in the range of 15 ns to 30 ns. Therefore, the pulse is shorter in time than the time constant of most ion-electron recombination.

[0018] Furthermore, the pulses may have a rise time and / or a fall time of ≤10 ns. Thus, the pulses have a sufficiently strong intensity required for generating a plasma.

[0019] In particular, the pulses can be multi-stage, ie pulse between at least two power values, wherein at least one value is not equal to zero, wherein in particular both values ​​are not equal to zero. This is described in more detail below.

[0020] The pulsed microwave output signal is understood here to mean a pulsed microwave signal at the output end.

[0021] A microwave solid-state power amplifier module refers here to an electronic amplifier that is suitable for amplifying a low-power microwave signal into a microwave signal of greater power. Here, the microwave solid-state power amplifier module has a solid (Solid State), especially a semiconductor solid, such as a transistor as an amplification element. The transistor can be, for example, a HEMT, a MOSFET or an LDMOS transistor or a transistor based on GaN or SiC. In microwave technology, this term is different from conventional amplifier types that are not based on solid-state, such as electron tube amplifiers and / or magnetron amplifiers, which are significantly less precise in terms of power and frequency control and have higher wear. This microwave solid-state power amplifier is described as a "solid-state microwave power amplifier" or "solid-state microwave power generator" in, for example, US 9,595,930 B2 or US11,222,770 B2.

[0022] With such a module for generating a pulsed microwave output signal, a microwave signal input at an input element can be pulsed according to a pulse signal. A microwave signal having a first amplitude, for example unattenuated, can be transmitted to the output element via a first signal path. A microwave signal having another / second amplitude can be transmitted to the output element via a second signal path.

[0023] The switching between the at least two paths can be performed by the input element and the output element, controlled by the pulse signal. Thus, a pulse function can be realized. At least two amplitude levels can be formed by attenuating at least two different paths.

[0024] Thus, a two-stage (two-stage) pulse function can be achieved. This function is particularly advantageous for plasma applications and other similar dynamic processes. Thus, it can be achieved that a single generator provides a low base power and short power peaks.

[0025] The pulse signal can be generated, for example, by a microcontroller which has a high-resolution timer and is therefore capable of generating very short pulses. A "timer" is hereby understood to mean a circuit component which outputs a time signal, for example a time period with a preset frequency. The timer can be configured as a PWM timer, so that no intervention by software is required in order to generate regular and / or periodic pulses.

[0026] The signal lines from the pulse signal generator to the input element and the output element may have the same length.

[0027] Both the input element and the output element can be constructed in many different ways. They are suitably designed to be able to switch the microwave signal from one signal path to another signal path at a pulse frequency speed. Preferably, they each have two transistors, in particular two MOSFETs. Preferably, the control signal input of the input element and / or the output element is connected to at least one of the transistors at its control input (e.g. at the gate or base).

[0028] The input element and the output element can have the same design, in particular a matching design.

[0029] The input element and the output element may be designed as so-called "single pole double throw (SPDT) switches".

[0030] The input element and / or the output element can be designed as a high-frequency switching unit, in particular without reflection. It may be sufficient here that the input element or the output element is designed as a high-frequency switching unit. The corresponding other element can be designed, for example, as a signal distributor. "Signal distributor" refers here to a circuit component that is configured to connect a signal from an input interface to a first output interface or a second output interface, or to establish a connection from an output interface to a first input interface or a second input interface. In addition to the above-mentioned signal input and signal output, the high-frequency switching unit can have other interfaces, such as a power supply voltage interface and a ground interface.

[0031] As already mentioned above, the damping element can be adjustable, for example designed as an adjustable resistor.

[0032] The attenuation element can be designed as an analog attenuation element. However, particular advantages arise when the attenuation element is designed as a digital attenuation element. An analog attenuation element is to be understood as an attenuation element which is continuously adjustable within a certain range, i.e. preferably continuously adjustable via an analog control signal. A digital attenuation element is to be understood as an attenuation element which is adjustable between a plurality of discrete attenuation values, i.e. preferably adjustable via digital control.

[0033] The second signal path may have a second input element having a microwave signal input terminal, a first microwave signal output terminal, a second microwave signal output terminal, and a mode signal input terminal, and is configured to connect the first microwave signal input terminal of the second input element with the first microwave signal output terminal or the second microwave signal output terminal of the second input element according to a mode signal input at the mode signal input terminal. Therefore, it can be selected based on the mode signal whether the pulse microwave signal received by the first input element is guided to the first microwave signal output terminal or the second microwave signal output terminal of the second input element.

[0034] The module can be configured such that the microwave signal is pulsed only at the output, and not necessarily at the damping element or elements. This can be the case, for example, when only one distributor is provided at the input.

[0035] The second signal path may have a second output element having two microwave signal input terminals, a microwave signal output terminal, and a mode signal input terminal, and is configured to connect the first microwave signal input terminal of the second output element or the second microwave signal input terminal of the second output element to the microwave signal output terminal of the second output element according to the mode signal input at the mode signal input terminal. Therefore, it is possible to select which of the microwave signal input terminals is connected to the microwave signal output terminal based on the mode signal. The attenuation element may be arranged between one of the microwave signal output terminals of the second input element and one of the microwave signal input terminals of the second output element.

[0036] Alternatively, it can be provided that the second signal path has:

[0037] a. a second input element having a microwave signal input terminal and at least one first microwave signal output terminal and a second microwave signal output terminal,

[0038] b. a second output element, the second output element having at least a first microwave signal input terminal and a second microwave signal input terminal and a microwave signal output terminal,

[0039] c. a third signal path between the first microwave signal output end of the second input element and the first microwave signal input end of the second output element,

[0040] d. a fourth signal path between the second microwave signal output of the second input element and the first microwave signal input of the second output element,

[0041] e. wherein the attenuation element is arranged in the third signal path, and wherein

[0042] i. the second input element has a mode signal input terminal and is configured to connect the microwave signal input terminal of the second input element to the first microwave signal output terminal or the second microwave signal output terminal of the second input element according to the mode signal input at the mode signal input terminal, and / or

[0043] ii. The second output element has a mode signal input terminal and is configured to connect the first microwave signal input terminal of the second output element or the second microwave signal input terminal of the second output element with the microwave signal output terminal of the second output element according to the mode signal input at the mode signal input terminal.

[0044] One of the microwave signal outputs of the second input element and one of the microwave signal inputs of the second output element can be connected to a termination circuit. This prevents reflections at the input element or the output element. The termination circuit can have a resistor and, if necessary, a capacitor connected in series. The capacitor is used to block the DC component.

[0045] The second input element and / or the second output element may be designed as a high-frequency switching unit. Thus, multi-level pulses of the microwave signal may be realized.

[0046] The invention also includes a microwave solid-state power amplifier (MW-SSPA) having a module according to the invention, wherein the microwave solid-state power amplifier module is connected downstream of the module. The microwave solid-state power amplifier module is also called a microwave solid-state power amplifier (Mikrowellen-Solid-State-Power-Amplifier) ​​module and is abbreviated to a MW-SSPA module.

[0047] A splitter may be provided between the module and the microwave solid-state power amplifier module. A plurality of amplifier paths each having at least one microwave solid-state power amplifier module may be provided after the splitter, and these amplifier paths are combined again at the power output end by a combiner.

[0048] The present invention also includes a microwave solid-state power generator. In this microwave solid-state power generator, a microwave small signal generator, also known as a synthesizer, can be connected upstream of the module according to the present invention. The microwave small signal generator here refers to a microwave signal generator that can provide an output power of less than or equal to 2W.

[0049] A splitter may be provided between the microwave small signal generator and the modules, so that the signal generated by the microwave small signal generator may be provided to multiple modules.

[0050] In one aspect, the invention relates to a method for generating pulsed microwave signals of different amplitudes, the method having the following method steps:

[0051] a. Generate microwave signals,

[0052] b. delivering a microwave signal to a module having a first signal path and a second signal path having different attenuations;

[0053] c. Generate a pulse signal,

[0054] d. Transmitting the microwave signal to the output end of the module through the first signal path or the second signal path according to the pulse signal.

[0055] Radio-frequency pulse signals with different amplitudes can therefore be generated in a simple manner.

[0056] According to a method variant, a mode signal can be generated and the microwave signal can be transmitted via the second signal path or directed to the terminating circuit according to the mode signal. It can thus be selected by the mode signal whether a pulsed high-frequency signal is transmitted and, if so, at which power level.

[0057] A pulse signal can be generated whose pulse length is a maximum of 1 μs, in particular in the range of 10 ns to 100 ns, preferably in the range of 15 ns to 50 ns, in particular in the range of 30 ns.

[0058] In addition, a pulse signal with a rise time and / or fall time of the pulse ≤ 10 ns can be generated.

[0059] The pulse length of the pulse signal can be adjusted in steps of ≤ 1 ns. Therefore, there are many possibilities for fine-tuning the pulse width modulation.

[0060] Further features and advantages of the invention are obtained from the following detailed description of an embodiment of the invention with the aid of drawings showing essential details of the invention, and from the claims. The features shown there do not have to be understood to scale and are shown in such a way that the features according to the invention can become clearly visible. In variants of the invention, the different features can be realized individually or in any combination of a plurality.

[0061] Exemplary embodiments of the invention are shown in the schematic drawings in different phases of use and are explained in more detail in the following description.

[0062] In the attached picture:

[0063] Figure 1 A first embodiment of a module is shown;

[0064] Figure 2 A diagram showing a pulse signal and a two-stage pulse microwave signal;

[0065] Figure 3 A second embodiment of the module is shown;

[0066] Figure 4 A first embodiment of a microwave solid-state power amplifier is shown;

[0067] Figure 5 The use of a module for operating an amplifier assembly is shown;

[0068] Figure 6 A second embodiment of a microwave solid-state power amplifier is shown;

[0069] Figure 7 A first embodiment of a microwave solid-state power generator is shown;

[0070] Figure 8 A second embodiment of a microwave solid-state power generator is shown;

[0071] Fig. 9 An amplifier assembly is shown.

[0072] Figure 1 A module 10 for generating a pulsed microwave output signal and for controlling a microwave solid-state power amplifier is shown. The module 10 has an input element S1 having a microwave signal input 12 and first and second microwave signal outputs 14, 16. In addition, the module 10 has an output element S2 having first and second microwave signal inputs 18, 20 and a microwave signal output 22. A first signal path 24 is provided between the first microwave signal output 14 of the input element S1 and the first microwave signal input 18 of the output element S2. A second signal path 26 is provided between the second microwave signal output 16 of the input element S1 and the second microwave signal output 18 of the output element S2. An adjustable attenuation element 28 is provided in the second signal path 26.

[0073] The input element S1 and the output element S2 have control signal input terminals 30, 32, respectively. The input element S1 is configured to connect its microwave signal input terminal 12 to its first microwave signal output terminal or the second microwave signal output terminal 14, 16 according to the pulse signal input at the control signal input terminal 30. The output element S2 is configured to connect its first microwave signal input terminal 18 or its second microwave signal input terminal 20 to its microwave signal output terminal 22 according to the pulse signal input at the control signal input terminal 32. In the illustrated embodiment, the input element S1 and the output element S2 are respectively designed as high-frequency switching units. However, it is conceivable that the input element S1 or the output element S2 is designed as a distributor.

[0074] The same pulse signal is delivered to the control signal input terminals 30, 32. The microwave signal, which may come from a microwave small signal generator, is delivered to the first microwave signal input terminal 12. The pulse microwave signal is output at the microwave signal output terminal 22, wherein the amplitude of the pulse microwave signal is related to whether the microwave signal is transmitted through the first signal path 24 or the second signal path 26.

[0075] The capacitors 33, 34, 35, 36, 37, 38 connected in series at the input and output of the input and / or output elements serve to separate direct current components which can be coupled in, in particular, via the controlled input and / or output elements. The capacitors 33, 34, 35, 36, 37, 38 are necessary or optional, depending on the switches used.

[0076] Figure 2 A pulse signal 40 is shown, which can be applied to the control signal inputs 30, 32. The pulse length of the pulses is usually a maximum of 1 μs, in particular in the range of 10 ns to 100 ns, preferably in the range of 15 ns to 50 ns, and in particular in the range of 30 ns. The pulses have a rise time and / or fall time of ≤10 ns. The pulse length of the pulses of the pulse signal 40 can be adjusted in steps of ≤1 ns.

[0077] In addition, Figure 2 A two-level pulsed microwave signal 42 can be seen in FIG. 4 , which has a small amplitude in a region 44 corresponding to the pulse signal 40 , ie transmitted via the second signal path 26 , and has a larger amplitude in a region 46 , which corresponds to a higher level of the pulse signal 40 .

[0078] The amplitude of the microwave signal 46 in the region 44 can be adjusted by the damping element 28. It is conceivable that an adjustable damping element is also provided in the signal path 24. The amplitude of the microwave signal 42 in the region 46 is then also adjustable.

[0079] When an attenuation element is also provided in the first signal path 24 , the attenuation elements of the first signal path and the second signal path 24 , 26 preferably have different values ​​or attenuation characteristics, so that pulse microwave signals with different amplitudes can be generated.

[0080] Figure 3 An embodiment of module 10.1 is shown, wherein Figure 1 Elements corresponding to those of the invention have the same reference numerals. Figure 1 Unlike the embodiment of the present invention, the second signal path 26 has a second input element S3 and a second output element S4. The second input element S3 has a microwave signal input terminal 50 and a first microwave signal output terminal 52 and a second microwave signal output terminal 54. Correspondingly, the second output element S4 has a first microwave signal input terminal 56 and a second microwave signal input terminal 58. In addition, the second output element S4 has a microwave signal output terminal 60. The second input element S3 has a mode signal input terminal 62, and the second output element S4 has a mode signal input terminal 64.

[0081] The first microwave signal output 52 is connected to the first microwave signal input 56 of the second output element S4 via a third signal path 66, which is a component of the second signal path 26 and includes the attenuation element 28. The second microwave signal output 54 is connected to a termination circuit 68. The second microwave signal input 58 is connected to a termination circuit 70. The termination circuits 68, 70 have resistors 72, 74, respectively, and optional capacitors 76, 78 connected in series therewith.

[0082] The second input element S3 is configured to connect the first microwave signal input terminal 50 with the first microwave signal output terminal 52 or the second microwave signal output terminal 54 according to the mode signal input at the mode signal input terminal 62. Correspondingly, the second output element S4 is configured to connect the first microwave signal input terminal 56 or the second microwave signal input terminal 58 with the microwave signal output terminal 60 according to the mode signal input at the mode signal input terminal 64. Therefore, according to the mode signal, the signal input at the microwave signal input terminal 50 is transferred to the output element S2 through the third signal path 66 and the second output element 64, or is guided to the termination circuit 68. Therefore, in addition to Figure 2 In addition to the illustrated possibility of outputting microwave signals with different amplitudes, there is also the possibility of outputting no signal at the microwave signal output 22 .

[0083] Figure 4 A microwave solid state power amplifier (MW-SSPA) 100 is shown, which has a Figure 1 or Figure 3 Modules 10, 10.1. A splitter 102 is connected downstream of the modules 10, 10.1, which in the embodiment shown divides the pulse microwave signal of the modules 10, 10.1 into three amplifier paths 104, 106, 108. Each amplifier path 104, 106, 108 has a microwave solid-state power amplifier module 110, 112, 114. The signals amplified in the amplifier paths 104, 106, 108 are combined again in the combiner 116, so that the amplified pulse microwave signal is output at the output end 118.

[0084] Figure 5The use of the modules 10, 10.1 for operating an amplifier assembly 120 is shown. The amplifier assembly 120 has a splitter 122, which in the embodiment shown divides the output signal of the modules 10, 10.1 into three amplifier paths 124, 126, 128, wherein each amplifier path 124, 126, 128 has a microwave solid-state power amplifier module 130, 132, 134. The signals of the amplifier paths 124, 126, 128 are combined in a combiner 136, so that an amplified pulsed microwave signal is output at an output 138.

[0085] Figure 6 An alternative embodiment of a microwave solid-state power amplifier 100.1 is shown. Figure 4 The microwave solid-state power amplifier is 100 different in Figure 6 In the microwave solid-state power amplifier 100.1, no module 10, 10.1 is arranged in front of the splitter 102, but the microwave signal is directly delivered to the splitter 102. For this purpose, the modules 10, 10.1 are arranged in the amplifier paths 104, 106, 108, and are therefore arranged between the splitter 102 and the microwave solid-state power amplifier modules 110, 112, 114. The signals of the amplifier paths 104, 106, 108 are again delivered to the combiner 116, so that the amplified pulse microwave signal can be output at the output end 118.

[0086] Figure 7 The figure shows a microwave solid state power generator (MW-SSPG) 200. The microwave solid state power generator has a microwave solid state power amplifier 100, and a microwave small signal generator 202 is connected upstream of the microwave solid state power amplifier.

[0087] Figure 8 An alternative embodiment of a microwave solid-state power generator 200.1 is shown, which has a microwave solid-state power amplifier 100.1, and a microwave small signal generator 202 is connected upstream of the microwave solid-state power amplifier. In the embodiment shown, the microwave small signal generator 202 is directly arranged on the splitter 102 or integrated into it.

[0088] Fig. 9 The illustrated assembly shows that the microwave small signal generator 202 and the splitter 102 and the modules 10 , 10 . 1 connected thereto can be connected upstream of an amplifier assembly 300 having microwave solid-state power amplifier modules 110 , 112 , 114 and a combiner 116 .

[0089] The PWM module may be arranged and coupled between the microwave small signal generator 202 and the microwave solid-state amplifier modules 110 , 112 , 114 .

Claims

1. A module (10, 10.1) for generating a pulsed microwave output signal and for operating a microwave solid-state power amplifier module (110, 112, 114, 124, 126, 128), the module having a. an input element (S1), the input element having a microwave signal input end (12) and at least a first microwave signal output end and a second microwave signal output end (14, 16), b. an output element (S2), the output element having at least a first microwave signal input terminal and a second microwave signal input terminal (18, 20) and a microwave signal output terminal (22), c. a first signal path (24) between a first microwave signal output end (14) of the input element (S1) and a first microwave signal input end (18) of the output element (S2), d. a second signal path (26) between the second microwave signal output end (16) of the input element (S1) and the second microwave signal input end (20) of the output element (S2), e. an attenuation element (18) arranged in the second signal path (26), in i. the input element (S1) has a control signal input terminal (30) and is configured to connect the microwave signal input terminal (12) of the input element to the first microwave signal output terminal or the second microwave signal output terminal (14, 16) of the input element according to a pulse signal (40) input at the control signal input terminal (30); and / or ii. The output element (S2) has a control signal input terminal (32) and is configured to connect the first microwave signal input terminal (18) of the output element or the second microwave signal input terminal (20) of the output element to the microwave signal output terminal (22) of the output element according to a pulse signal (40) input at the control signal input terminal (32).

2. The module according to claim 1, characterized in that The input element (S1) and / or the output element (S2) are designed as high-frequency switching units.

3. A module according to any one of the preceding claims, characterised in that The damping element (28) is adjustable.

4. A module according to any one of the preceding claims, characterised in that The attenuation element (28) is designed as a digital attenuation element.

5. Module according to any one of the preceding claims, characterized in that The second signal path (26) has a second input element (S3), the second input element has a microwave signal input terminal (50), a first microwave signal output terminal and a second microwave signal output terminal (52, 54) and a mode signal input terminal (62), and is configured to connect the microwave signal input terminal (50) of the second input element to the first microwave signal output terminal or the second microwave signal output terminal (52, 54) of the second input element according to a mode signal input at the mode signal input terminal.

6. Module according to any one of the preceding claims, characterized in that The second signal path (26) has a second output element (S4), the second output element having two microwave signal input terminals (56, 58), a microwave signal output terminal (60) and a mode signal input terminal (64), and is configured to connect the first microwave signal input terminal (56) of the second output element or the second microwave signal input terminal (58) of the second output element to the microwave signal output terminal (60) of the second output element according to the mode signal input at the mode signal input terminal (64).

7. A module according to any one of the preceding claims 1 to 4, characterised in that The second signal path (26) has: a. a second input element (S3), the second input element having a microwave signal input terminal (50) and at least a first microwave signal output terminal and a second microwave signal output terminal (52, 54), b. a second output element (S4), the second output element having at least a first microwave signal input terminal and a second microwave signal input terminal (56, 58) and a microwave signal output terminal (60), c. a third signal path (66) between the first microwave signal output end (52) of the second input element (S3) and the first microwave signal input end (56) of the second output element (S4), d. a fourth signal path between a second microwave signal output end (54) of the second input element (S3) and a second microwave signal input end (56) of the second output element (S4), e. Among them, The attenuation element (28) is arranged in the third signal path (66), and wherein i. the second input element (S3) has a mode signal input terminal (62) and is configured to connect the microwave signal input terminal (50) of the second input element to the first microwave signal output terminal or the second microwave signal output terminal (52, 54) of the second input element according to the mode signal input at the mode signal input terminal (62), and / or ii. The second output element (S4) has a mode signal input terminal (64) and is configured to connect the first microwave signal input terminal (56) of the second output element or the second microwave signal input terminal (58) of the second output element to the microwave signal output terminal (60) of the second output element according to the mode signal input at the mode signal input terminal (64).

8. A module according to any one of the preceding claims 5, 6 or 7, characterised in that One of the microwave signal output terminals (52, 54) of the second input element (S3) and one of the microwave signal input terminals (56, 58) of the second output element are connected to a termination circuit (68, 70).

9. A module according to any one of the preceding claims 5 to 8, characterised in that The second input element (S3) and / or the second output element (S4) are designed as high-frequency switching units.

10. A microwave solid-state power amplifier (100, 100.1) having a module (10, 10.1) according to any one of the preceding claims, wherein a microwave solid-state power amplifier module (110, 112, 114) is connected downstream of the module (10, 10.1).

11. The microwave solid-state power amplifier according to claim 10, characterized in that: A splitter (102) is provided between the module (10, 10.1) and the microwave solid-state power amplifier module (110, 112, 114).

12. A microwave solid-state power generator (200, 200.1), comprising a module (10, 10.1) according to any one of claims 1 to 9, characterized in that: A microwave small signal generator (202) is connected upstream of the module.

13. The microwave solid-state power generator according to claim 12, characterized in that: A splitter (102) is provided between the microwave small signal generator and the module (10, 10.1).

14. A method for generating pulsed microwave signals (42) of different amplitudes, the method comprising the following method steps: a. Generate microwave signals, b. delivering the microwave signal to a module (10, 10.1) having a first signal path and a second signal path (24, 26) with different attenuation, c. Generate a pulse signal (40), d. Transmitting the microwave signal to the microwave signal output end (22) of the module (10, 10.1) through the first signal path or the second signal path (24, 26) according to the pulse signal (40).

15. The method according to claim 14, characterized in that A mode signal is generated, and the microwave signal is transmitted through the second signal path (26) or directed to a termination circuit (68, 70) according to the mode signal.

16. The method according to any one of the preceding claims 14 or 15, characterized in that A pulse signal (40) is generated whose pulse length is at most 1 μs, in particular in the range of 10 ns to 40 ns, preferably in the range of 15 ns to 30 ns.

17. The method according to any one of the preceding claims 14 to 16, characterized in that A pulse signal (40) is generated with a pulse rise time and / or a pulse fall time ≤ 10 ns.

18. The method according to any one of the preceding claims 14 to 17, characterized in that The pulse length of the pulse signal (40) is adjusted in steps of ≤1 ns.

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