Mechanical, optical and thermal in-situ test sample stage for atomic force microscope

Abstract

The application discloses a kind of mechanics, optics and thermal in-situ test sample stage for atomic force microscope, including magnetic suction base, module mounting frame, mechanics module, optical module, thermal module and the sample to be tested.The module mounting frame is set on the magnetic suction base;Mechanics module drives optical module to move up and down along vertical direction by controlling the spin in and spin off of microprobe, so as to drive the sample to be tested above thermal module to occur arc strain;Optical module makes light shaping after light source through optical components, and then vertically penetrates thermal module and enters the bottom of the sample to be tested;Thermal module is used to regulate the temperature of the sample to be tested.The application is small and compact in structure, can be used with various atomic force microscopes, simultaneously applies stress, vertical light to sample and carries out temperature change, realizes the simultaneous characterization of the multi-physical field in-situ of nanomaterial mechanics, optics and thermal performance, and accurately quantifies the change of external physical field.

Description

Technical Field

[0001] The present invention relates to the technical field of advanced atomic force microscopy, and in particular to a mechanical, optical and thermal in-situ test sample platform for an atomic force microscope. Background Art

[0002] Low-dimensional materials are materials that exhibit quantum confinement effects with at least one dimension at the nanoscale (1-100nm) within three-dimensional space. Zero-, one-, and two-dimensional materials, such as quantum dots, carbon nanotubes, and graphene, and their heterogeneous structures are increasingly demonstrating unique physical properties in condensed matter physics fields such as mechanics, optics, and thermals. For example, quantum dots exhibit extremely narrow emission linewidths and high luminescence efficiency, and their wavelength can be tuned by varying their size. Carbon nanotubes and graphene possess exceptionally high mechanical strength, electron mobility, and thermal conductivity. These physical properties give low-dimensional materials a rich and promising future for the fabrication of functional nanodevices, including nanoscale field-effect transistors, flexible optoelectronics, and low-power spintronics.

[0003] Atomic force microscopy (AFM) and its various derived advanced techniques, such as mechanical, optical, electrical, and magnetic, are scanning probe microscopy techniques with atomic-level resolution and are widely used to characterize the novel physical properties of low-dimensional materials at the nanoscale. AFM uses a nanoscale tip to scan and image the sample surface. Simultaneously, by applying an external physical field between the probe and the sample surface, it can obtain information on the mechanical, optical, electrical, and magnetic properties of low-dimensional materials at the nanoscale. This has greatly promoted the development of micro-nano optoelectronic and quantum devices based on the novel physical properties of low-dimensional materials.

[0004] In order to deeply study the changes in the physical properties of low-dimensional materials under different stresses, different light, and different temperatures, and thus develop micro-nano optoelectronic devices with better working performance, the use of atomic force microscopy to in situ characterize the physical properties of materials under multiple physical fields has become an urgent need in the nanodevice industry.

[0005] Existing solutions use the method of changing the atomic force microscope test sample stage to apply an external physical field. However, most current designs can only apply a single physical field at a time, such as applying stress to the sample, irradiating it with light, or changing the temperature, and cannot meet the requirements for in-situ simultaneous characterization under multiple physical fields. At the same time, in terms of mechanical testing, existing designs are often unable to change the sample strain in situ under the atomic force microscope and accurately quantify the strain, thereby reducing the credibility of the sample strain test; in terms of optical testing, existing solutions are often unable to ensure perpendicular incidence of light on the sample, increasing the difficulty and uncertainty of analyzing the sample's optical properties. In addition, existing atomic force microscope test sample stages also have disadvantages such as being too large to be easy to use and having a complex structure that is difficult to transplant.

[0006] In view of the above shortcomings of the prior art, the present invention has found an innovative solution with the support of the National Natural Science Foundation of China (No.12374357). Summary of the Invention

[0007] The main purpose of the present invention is to provide a sample stage for in-situ mechanical, optical and thermal testing of atomic force microscopes, aiming to solve the technical problems that existing sample stages cannot simultaneously perform in-situ testing of the mechanical, optical and thermal properties of nanomaterials and the tests cannot be accurately quantified.

[0008] The technical solution adopted in the present invention is:

[0009] Provided is a mechanical, optical, and thermal in-situ test sample stage for an atomic force microscope, comprising a base and a module mounting frame disposed thereon, a thermal module being mounted on top of the module mounting frame, and a sample to be tested being fixed on the thermal module; a mechanical module and an optical module being mounted from bottom to top within the module mounting frame; wherein:

[0010] The mechanical module includes a micrometer head. By controlling the advance and retreat of the micrometer head, the optical module is driven to move up and down in the vertical direction, thereby causing the sample to be tested above the thermal module to generate arc strain.

[0011] The optical module shapes the light from the light source through optical components and then transmits it vertically through the thermal module to the bottom of the sample to be tested;

[0012] Thermal module, used to control the temperature of the sample to be tested.

[0013] Following the above technical solution, the base is a magnetic base.

[0014] Following the above technical solution, the mechanics module further includes a micrometer mounting frame fixed to the module mounting frame, on which the micrometer is fixed.

[0015] Following the above technical solution, a horizontal plate is provided in the middle of the module mounting frame, and the micrometer head is installed on the horizontal plate; and an optical module limiting plate with scale lines is provided above the horizontal plate, and the optical module is set in the optical module limiting plate.

[0016] Continuing with the above technical solution, the optical module includes an optical module base, a light source, an optical module tube wall and a lens group arranged in sequence from bottom to top, wherein the upper surface of the optical module base is flush with the zero scale line on the optical module limit plate, and a circuit for controlling the light source is provided inside the optical module base and is connected to an external light source controller; the light source is arranged at the center of the upper surface of the optical module base and placed inside the optical module tube wall.

[0017] Continuing with the above technical solution, the lens group includes a lens mounting frame, a first cylindrical lens and a second cylindrical lens, wherein the lens mounting frame is fixed in the wall of the optical module tube; the first cylindrical lens and the second cylindrical lens are respectively mounted at the center of the two lens mounting frames, and by adjusting the height positions of the two lens mounting frames in the wall of the optical module tube, the focal lines of the first cylindrical lens and the second cylindrical lens are made to coincide with the light source.

[0018] Following the above technical solution, the inner wall of the optical module tube wall is provided with a thread, and the outer wall of the lens mounting frame is provided with a thread matching the optical module tube wall.

[0019] According to the above technical solution, the thermal module includes a flexible transparent insulation plate, a flexible transparent heating plate and a thermal module clip arranged in sequence from bottom to top, wherein the flexible transparent insulation plate and the flexible transparent heating plate have the same size; the flexible transparent heating plate is integrated with a thermocouple temperature sensor and a resistance heater, and the thermocouple temperature sensor and the resistance heater are respectively connected to an external heater temperature controller; the thermal module clip is connected to the module mounting frame and clamps the flexible transparent insulation plate and the flexible transparent heating plate between the two.

[0020] Following the above technical solution, the size of the sample to be tested is smaller than the flexible transparent heating plate.

[0021] Following the above technical solution, the sample to be tested is pasted on the thermal module.

[0022] The beneficial effects of the present invention are as follows: the present invention can perform in-situ testing on the test sample on the sample stage under an atomic force microscope, and simultaneously change the sample strain, change the light intensity and change the sample temperature, thereby simultaneously obtaining the relationship between the changes in the nanoscale physical properties of the sample under changes in the mechanical, optical and thermal environments, and meeting the requirements of the field of micro-nano optoelectronic devices for the characterization of nanomaterials under multi-physical fields. At the same time, in terms of mechanical testing, the present invention uses a micrometer head to control the distance of the sample's up and down displacement to achieve the strain of the sample, thereby being able to accurately quantify the sample strain without moving the sample position, which is conducive to using an atomic force microscope to perform accurate comparative experiments before and after in-situ strain on the same area of ​​the sample; in terms of optical testing, the present invention uses optical components to shape the light source and then pass it through a thermal module to vertically incident on the bottom of the sample to be tested, illuminating the sample from the back, thereby being able to accurately quantitatively analyze the optical properties of the sample. In addition, the present invention has a small and compact structure, which is convenient for integration and parallel use with various types of atomic force microscopes.

[0023] Furthermore, the present invention uses two cylindrical lenses with different focal lengths to collimate the light beam of the light source. By adjusting the height positions of the two cylindrical lenses so that the focal lines of both coincide with the position of the light source, the light beam emitted from the light source will be emitted as parallel light after passing through the lens group to illuminate the sample from behind, thereby enabling accurate quantitative analysis of the optical properties of the sample.

[0024] Furthermore, the mechanical module controls the advancement and retreat of the micrometer head, so that the optical module moves up and down in the vertical direction under the restriction of the optical module limit plate, and utilizes the second cylindrical lens at the top of the optical module to push the center lines of the flexible transparent insulation plate and the flexible transparent heating plate to move upward, thereby causing the sample to be tested above the thermal module to produce arc strain. Since the upward displacement of the center line of the sample can be accurately controlled by the micrometer head, the strain of the sample can be accurately converted; at the same time, the strain of the sample is controlled by controlling the advancement and retreat of the micrometer head, and the situation of scanning different micro-areas of the sample after moving the sample stage will not occur. Therefore, the present invention can change the sample strain in situ under the atomic force microscope and accurately quantify the strain.

[0025] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 Schematic diagram of the structure of a sample stage for in-situ mechanical, optical and thermal testing of an atomic force microscope according to an embodiment of the present invention;

[0028] Figure 2 This is a schematic structural diagram of a module mounting frame according to an embodiment of the present invention;

[0029] Figure 3 This is a schematic structural diagram of a mechanical module according to an embodiment of the present invention;

[0030] Figure 4 This is a schematic structural diagram of an optical module according to an embodiment of the present invention;

[0031] Figure 5 Schematic diagram of the structure of a lens assembly according to an embodiment of the present invention;

[0032] Figure 6 This is a schematic diagram of the structure of a thermal module and a sample to be tested according to an embodiment of the present invention;

[0033] In the figure: 1. Magnetic base; 2. Module mounting frame; 2-1. Micrometer mounting frame mounting hole; 2-2. Micrometer limit hole; 2-3. Optical module limit plate; 3. Mechanical module; 3-1. Micrometer; 3-2. Micrometer mounting frame; 4. Optical module; 4-1. Optical module base; 4-2. Light source; 4-3. Optical module barrel wall; 4-4. Lens group; 4-4-1. Lens mounting frame; 4-4-2. First cylindrical lens; 4-4-3. Second cylindrical lens; 5. Thermal module; 5-1. Flexible transparent insulation board; 5-2. Flexible transparent heating board; 5-3. Thermal module buckle; 6. Sample to be tested. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0035] It should be noted that the illustrations provided in the embodiments of the present invention are only schematic illustrations of the basic concept of the present invention. Therefore, the drawings only show components related to the present invention and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0036] In the present invention, it should also be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like are used to indicate positions or locations based on those shown in the accompanying drawings. These terms are intended solely to facilitate the description of the present application and to simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present application. Furthermore, the terms "first" and "second" are used solely for descriptive and distinguishing purposes and should not be construed as indicating or implying relative importance.

[0037] See also Figure 1 An embodiment of the present invention provides a mechanical, optical, and thermal in-situ test sample stage for an atomic force microscope, comprising a base 1 and a module mounting frame 2 disposed thereon, a thermal module 5 being mounted on the top of the module mounting frame 2, and a sample to be tested 6 being fixed on the thermal module 5; a mechanical module 3 and an optical module 4 are mounted from bottom to top in the module mounting frame 2.

[0038] Among them, the mechanical module 3 includes a micrometer head 3-1, which drives the optical module 4 to move up and down in the vertical direction by controlling the rotation of the micrometer head 3-1, thereby driving the sample to be tested 6 above the thermal module 5 to produce arc strain; the optical module 4 shapes the light from the light source through optical components and then passes through the thermal module 5 vertically to the bottom of the sample to be tested 6; the thermal module 5 is used to control the temperature of the sample to be tested 6.

[0039] Specifically, a magnetic base 1 is provided below the module mounting frame 2 to facilitate the entire present invention to be adsorbed and fixed on the magnetic base of the atomic force microscope.

[0040] See also Figure 2 The module mounting frame 2 is cylindrical in shape as a whole, with a horizontal plate in the middle. Two micrometer mounting frame mounting holes 2-1 and a micrometer limit hole 2-2 are provided in the center of the horizontal plate. The micrometer mounting frame mounting hole 2-1 is a threaded hole for fixing the micrometer mounting frame 3-2; the micrometer limit hole 2-2 runs through the middle horizontal plate for inserting the micrometer 3-1. An optical module limit plate 2-3 is provided above the horizontal plate to limit the position of the optical module 4 so that it can only move vertically under the push of the micrometer 3-1, thereby ensuring the uniqueness of the strain direction of the sample. The optical module limit plate 2-3 is provided with a 0-5mm scale to facilitate visualization of the vertical displacement of the optical module 4. In addition, four threaded holes are provided at the top of the module mounting frame 2 to fix the thermal module clip 5-3 to the module mounting frame 2.

[0041] See also Figure 3The mechanical module 3 comprises a micrometer head 3-1 and a micrometer head mounting frame 3-2, wherein the micrometer head 3-1 is fixed to the micrometer head mounting frame 3-2 by tightening a locking screw on the micrometer head mounting frame 3-2; in addition, two counterbores are arranged on the micrometer head mounting frame 3-2, which correspond to the micrometer head mounting holes 2-1, and the micrometer head mounting frame 3-2 can be fixed to the horizontal plate in the middle of the module mounting frame 2 by screws.

[0042] The working principle of the mechanical module 3 is that, by controlling the rotation of the micrometer head 3-1, the optical module 4 moves up and down in the vertical direction under the limitation of the optical module limiting plate 2-3, and the center line of the flexible transparent heat insulation plate 5-1 and the flexible transparent heating plate 5-2 is pushed upward by the second cylindrical lens 4-4-3 at the top of the optical module 4-4, so as to drive the sample 6 to be tested which is pasted above the thermal module 5 to occur arc-shaped strain. Since the upward displacement amount of the center line of the sample can be accurately controlled by the micrometer head 3-1, the strain amount of the sample can be accurately converted; at the same time, the semi-open design of the module mounting frame 2 enables the experimenter to control the strain of the sample by controlling the rotation of the micrometer head 3-1 without moving the whole position of the present application, and the situation that the position of the sample is different after the sample stage is moved will not occur. Therefore, the present application can change the sample strain in situ under the atomic force microscope, and accurately quantify the strain.

[0043] Specifically, when the distance between the two thermal module buckles 5-3 is l, and the upward displacement amount of the optical module is h, the linear strain of the sample in the direction along the long side of the flexible transparent heating plate 5-2 is:

[0044]

[0045] Preferably, the displacement stroke of the micrometer head 3-1 can be selected as 5mm (millimeter), and the minimum displacement distance is 10μm (micrometer), at this time, the above formula is used for calculation, in the embodiment, the distance between the two thermal module buckles 5-3 is 15mm, and the minimum linear strain accuracy of the sample can reach about 1.0×10 -3 %, and the maximum linear strain amount is 27.4%.

[0046] Please refer to Figure 4, the optical module 4 is arranged in the optical module limiting plate 2-3, and comprises, from bottom to top, an optical module base 4-1, a light source 4-2, an optical module cylinder wall 4-3 and a lens group 4-4, wherein the upper surface of the optical module base 4-1 is flush with the zero scale line on the optical module limiting plate 2-3, the inside of the optical module base 4-1 is provided with a circuit for controlling the light source 4-2, and is electrically connected to an external light source controller through two wires, the bottom of the optical module base 4-1 is provided with a groove matched with the top end of the micrometer head 3-1, for limiting the movement of the top end of the micrometer head 3-1; the light source 4-2 is arranged on the center of the upper surface of the optical module base 4-1 and inside the optical module cylinder wall 4-3; the inner wall of the optical module cylinder wall 4-3 is provided with threads for installing the lens group 4-4.

[0047] Please refer to Figure 5 , the lens group 4-4 comprises two lens mounting frames 4-4-1, a first cylindrical lens 4-4-2 and a second cylindrical lens 4-4-3, wherein the outer wall of the lens mounting frame 4-4-1 is provided with threads matched with the optical module cylinder wall 4-3, and can be fixed in the optical module cylinder wall 4-3; the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 are respectively installed in the center of the two lens mounting frames 4-4-1, and by adjusting the height position of the two lens mounting frames 4-4-1 in the optical module cylinder wall 4-3, the focal lines of the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 are made to coincide with the light source 4-2.

[0048] Specifically, the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 can be made of an optical material resistant to wear and high temperature, such as liquid optical silica gel; the focal length of the first cylindrical lens 4-4-2 should be smaller than that of the second cylindrical lens 4-4-3, and the second cylindrical lens 4-4-3 should be a positive meniscus cylindrical lens, and the highest part thereof is used to push the center line of the flexible transparent heat insulation plate 5-1 and the flexible transparent heating plate 5-2 to displace upward.

[0049] The working principle of the optical module 4 is that by adjusting the relative positions of the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 and the light source 4-2, the focal lines of the two lenses are made to coincide with the light source 4-2, so that the light emitted from the light source 4-2 is shaped after passing through the first cylindrical lens 4-4-2 and the second cylindrical lens 4-4-3 and exits as parallel light, the parallel light passes through the flexible transparent heat insulation plate 5-1 and the flexible transparent heating plate 5-2 and then illuminates the sample from the back, and at the same time, the output power of the light source 4-2 is controlled by an external light source controller, so that the atomic force microscope is used to realize accurate quantitative analysis of the optical performance of the sample under the condition that the light is vertically incident.

[0050] Please refer to Figure 6The thermal module 5 includes a flexible transparent insulation board 5-1, a flexible transparent heating board 5-2 and a thermal module buckle 5-3 arranged in sequence from bottom to top, wherein the flexible transparent insulation board 5-1 and the flexible transparent heating board 5-2 have the same size; the flexible transparent heating board 5-2 is integrated with a thermocouple temperature sensor and a resistance heater, and the thermocouple temperature sensor and the resistance heater are electrically connected to an external heater temperature controller by two wires respectively to realize heating and temperature control of the heating board; the thermal module buckle 5-3 is provided with four countersunk holes, and its position corresponds to the four threaded holes at the top of the module mounting frame 2. The thermal module buckle 5-3 is connected to the module mounting frame 2 by countersunk screws, and clamps the flexible transparent insulation board 5-1 and the flexible transparent heating board 5-2 between the two.

[0051] Specifically, the material of the flexible transparent insulation board 5-1 should be a flexible material with high light transmittance and low thermal conductivity, such as transparent organic polymer sheets such as PVC (polyvinyl chloride); the material of the flexible transparent heating board 5-2 should be a flexible material with high light transmittance and high thermal conductivity, and various types of polymer composite materials filled with optically transparent thermal conductive fillers can be selected, such as nano-composite materials such as PVA (polyvinyl alcohol) sheets filled with cellulose nanoparticles; the thermal module buckle 5-3 should be made of insulating materials, such as PEEK (polyetheretherketone) or PTFE (polytetrafluoroethylene).

[0052] Thermal module 5 operates by adjusting an external heater temperature controller to control and detect the temperature of a flexible transparent heating plate 5-2, thereby regulating the sample's temperature. A flexible transparent insulation plate 5-1 is also installed beneath flexible transparent heating plate 5-2 to reduce heat exchange between thermal module 5 and optical module 4, improving temperature control accuracy and minimizing the impact on the performance of other modules. Both flexible transparent insulation plate 5-1 and flexible transparent heating plate 5-2 are constructed of highly transmittance materials, facilitating their integration with optical module 4 for simultaneous measurement of the sample's optical and thermal properties.

[0053] In this embodiment, the test sample 6 is placed above the flexible transparent heating plate 5-2 and is smaller than the flexible transparent heating plate 5-2. The test sample 6 can be attached to the flexible transparent heating plate 5-2 using a high-temperature resistant adhesive with strong adhesion and good thermal conductivity, such as PI (polyimide) double-sided pressure-sensitive adhesive.

[0054] The application provides a mechanical, optical and thermal in-situ test sample table for an atomic force microscope, which can solve the technical problems that the existing sample table cannot simultaneously perform in-situ tests on mechanical, optical and thermal properties and the tests cannot be accurately quantified.

[0055] It should be noted that, according to the needs of implementation, each step / component described in the present application can be split into more steps / components, or two or more steps / components or part operations of the steps / components can be combined into a new step / component, so as to achieve the purpose of the present application.

[0056] The size of the serial number of each step in the above embodiment does not mean the order of execution, and the execution order of each process should be determined according to its function and inherent logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0057] It should be understood that, for those skilled in the art, improvements or changes can be made according to the above description, and all these improvements and changes shall fall within the protection scope of the appended claims of the present application.

Claims

1. A mechanical, optical and thermal in-situ test sample stage for an atomic force microscope, characterized in that: The invention comprises a base (1) and a module mounting frame (2) arranged thereon, a thermal module (5) being installed on the top of the module mounting frame (2), and a sample to be tested (6) being fixed on the thermal module (5); a mechanical module (3) and an optical module (4) being installed from bottom to top in the module mounting frame (2); wherein: The mechanical module (3) includes a micrometer head (3-1), which drives the optical module (4) to move up and down in a vertical direction by controlling the rotation of the micrometer head (3-1), thereby driving the sample to be tested (6) above the thermal module (5) to generate arc strain; The optical module (4) shapes the light from the light source through optical components and then transmits the light through the thermal module (5) to the bottom of the sample to be tested (6) vertically; The thermal module (5) is used to control the temperature of the sample to be tested (6).

2. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The base (1) is a magnetic base.

3. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The mechanics module (3) also includes a micrometer mounting frame (3-2) fixed to the module mounting frame (2), on which the micrometer (3-1) is fixed.

4. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: A transverse plate is provided in the middle of the module mounting frame (2), and a micrometer head (3-1) is mounted on the transverse plate; an optical module limiting plate (2-3) with scale lines is provided above the transverse plate, and the optical module (4) is arranged in the optical module limiting plate (2-3).

5. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 4, characterized in that: The optical module (4) comprises an optical module base (4-1), a light source (4-2), an optical module tube wall (4-3) and a lens group (4-4) which are arranged in sequence from bottom to top, wherein the upper surface of the optical module base (4-1) is flush with the zero scale line on the optical module limit plate (2-3); a circuit for controlling the light source (4-2) is arranged inside the optical module base (4-1) and is connected to an external light source controller; the light source (4-2) is arranged at the center of the upper surface of the optical module base (4-1) and is placed inside the optical module tube wall (4-3).

6. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 5, characterized in that: The lens group (4-4) comprises a lens mounting frame (4-4-1), a first cylindrical lens (4-4-2) and a second cylindrical lens (4-4-3), wherein the lens mounting frame (4-4-1) is fixed in the optical module tube wall (4-3); the first cylindrical lens (4-4-2) and the second cylindrical lens (4-4-3) are respectively mounted at the centers of the two lens mounting frames (4-4-1), and by adjusting the height positions of the two lens mounting frames (4-4-1) in the optical module tube wall (4-3), the focal lines of the first cylindrical lens (4-4-2) and the second cylindrical lens (4-4-3) are made to coincide with the light source (4-2).

7. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 6, characterized in that: The inner wall of the optical module barrel wall (4-3) is provided with a thread, and the outer wall of the lens mounting frame (4-4-1) is provided with a thread matching the optical module barrel wall (4-3).

8. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The thermal module (5) comprises a flexible transparent thermal insulation plate (5-1), a flexible transparent heating plate (5-2) and a thermal module buckle (5-3) which are arranged in sequence from bottom to top, wherein the flexible transparent thermal insulation plate (5-1) and the flexible transparent heating plate (5-2) have the same size; the flexible transparent heating plate (5-2) is integrated with a thermocouple temperature sensor and a resistance heater, and the thermocouple temperature sensor and the resistance heater are respectively connected to an external heater temperature controller; the thermal module buckle (5-3) is connected to a module mounting frame (2) and clamps the flexible transparent thermal insulation plate (5-1) and the flexible transparent heating plate (5-2) therebetween.

9. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 8, characterized in that: The size of the sample to be tested (6) is smaller than that of the flexible transparent heating plate (5-2).

10. The mechanical, optical and thermal in-situ test sample stage for atomic force microscope according to claim 1, characterized in that: The sample to be tested (6) is pasted on the thermal module (5).

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