A fast actuator

Abstract

The application provides a fast actuator. The fast actuator of the application couples a double-path shape memory alloy with electrostatic adsorption technology, combines the advantages of both, and develops a new type of actuator with fast response, high precision control and large output force. During operation, by accurately controlling the temperature and electric field parameters, the phase transition force of the double-path shape memory alloy layer and the electrostatic adsorption force are alternately and cooperatively actuated, the fast response of the actuator driving and recovery is realized, and different configurations of the double-path shape memory alloy layer and the electrostatic adsorption film can provide different output forces and displacements, and have optimized energy conversion efficiency. The application can be widely applied to the fields of biological medicine, aerospace, micro-electro-mechanical systems and the like, meets the needs of high-performance actuators in various fields, and has wide application prospect and important practical value.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of actuator, in particular to a fast actuator. BACKGROUND

[0002] With the continuous development of modern science and technology, actuator has a wide range of application requirements in many fields such as aerospace, biomedical, micro-electro-mechanical system, etc. The traditional shape memory alloy actuator has certain limitations in response speed, output force and displacement control accuracy, and energy conversion efficiency, etc., and is difficult to meet the requirements of the growing high-performance application scenarios.

[0003] Shape memory alloy has certain potential in the field of actuator due to its unique shape memory effect, but the actuator relying solely on shape memory alloy has relatively slow response speed, and its performance is limited by the characteristics of the alloy itself.

[0004] Based on the defects of the existing shape memory alloy actuator, it is necessary to improve it. SUMMARY

[0005] The purpose of the present application is to provide a fast actuator to solve the problems of the existing shape memory alloy actuator in response speed, output force and displacement control accuracy, and energy conversion efficiency, etc., and to meet the needs of various fields for high-performance actuators.

[0006] To achieve the above purpose, the present application provides the following technical solutions:

[0007] The present application provides a fast actuator, comprising:

[0008] An electrostatic adsorption film;

[0009] A double-path shape memory alloy layer located on the surface of the electrostatic adsorption film, one end of the double-path shape memory alloy layer being rotatable relative to the electrostatic adsorption film;

[0010] A temperature control unit for heating and controlling the temperature of the double-path shape memory alloy layer;

[0011] An electric field control unit for applying voltage between the electrostatic adsorption film and the double-path shape memory alloy layer to form electrostatic adsorption force between the electrostatic adsorption film and the double-path shape memory alloy layer.

[0012] Preferably, the electrostatic adsorption film comprises:

[0013] A conductor layer;

[0014] A first insulating layer located on the surface of the conductor layer;

[0015] A second insulating layer located on the surface of the conductor layer away from the first insulating layer;

[0016] The double-way shape memory alloy layer is located on the surface of the first insulating layer, and one end of the double-way shape memory alloy layer is rotatable relative to the first insulating layer.

[0017] Preferably, the temperature control unit comprises:

[0018] The heating film layer is located on the double-way shape memory alloy layer.

[0019] The first power supply has positive and negative poles connected to two ends of the heating film layer respectively, and is used for applying voltage to the heating film layer.

[0020] Preferably, the electric field control unit comprises:

[0021] The second power supply has positive and negative poles connected to the conductor layer and the double-way shape memory alloy layer respectively, and is used for applying voltage between the conductor layer and the double-way shape memory alloy layer.

[0022] Preferably, the temperature control unit further comprises:

[0023] The temperature sensor is located on the double-way shape memory alloy layer and is used for monitoring the temperature of the double-way shape memory alloy layer.

[0024] Preferably, the temperature control unit further comprises:

[0025] The temperature controller is electrically connected to the temperature sensor and the first power supply, and is used for controlling the double-way shape memory alloy layer to heat to a set temperature.

[0026] Preferably, the electric field control unit further comprises:

[0027] The capacitance measurement unit is used for monitoring the capacitance strength between the conductor layer and the double-way shape memory alloy layer.

[0028] Preferably, the rapid actuator further comprises:

[0029] The base;

[0030] The second insulating layer is attached to the base.

[0031] Preferably, the material of the conductor layer comprises at least one of a metal material, a carbon-based material and a conductive polymer material.

[0032] Preferably, the material of the first insulating layer and the second insulating layer comprises at least one of polyimide, ceramic, polyethylene and polytetrafluoroethylene.

[0033] The rapid actuator of the present application has the following beneficial effects relative to the prior art:

[0034] 1. The rapid actuator of the present application couples the double-path shape memory alloy with the electrostatic adsorption technology, integrates the advantages of both, and develops a new type of actuator with rapid response, high precision control and large output force; The working principle of the rapid actuator of the present application is that when the actuator works, the temperature control unit first heats or cools the double-path shape memory alloy layer according to the preset program, so that the phase change force is generated to cause the shape change of the alloy part, and this process can realize the displacement output of a large stroke; After the double-path shape memory alloy layer stops heating, the electric field control unit applies voltage between the electrostatic adsorption film and the double-path shape memory alloy layer to generate electrostatic adsorption force, which can quickly respond in a short time, so that the double-path shape memory alloy layer quickly recovers and locks, so that the actuator can meet the requirements of response speed and displacement accuracy under different working conditions; By accurately adjusting the temperature and voltage parameters, the phase change force and the electrostatic adsorption force of the double-path shape memory alloy layer can be realized, so that the actuator can output accurate and controllable force and displacement while responding quickly, and complete various complex actuation tasks;

[0035] 2. The rapid actuator of the present application has the advantages of rapid response: since the electrostatic adsorption force can be generated in an instant and act on the actuator structure, combined with the cooling recovery process of the double-path shape memory alloy layer, the response speed of the actuator is significantly improved, and the actuation and recovery can be completed in a short time, meeting the requirements of high response speed in application scenarios;

[0036] 3. The rapid actuator of the present application can be accurately controlled: by accurately controlling the temperature and electric field parameters, the phase change degree of the double-path shape memory alloy layer and the size of the electrostatic adsorption force can be accurately controlled, so as to realize the rapid actuation and recovery requirements of the actuator, accurately control the output force and displacement, and meet the needs of precision operation, such as control of minimally invasive surgical instruments in the biomedical field;

[0037] 4. The rapid actuator of the present application has large output force: the double-path shape memory alloy layer can generate a large force during the phase change process, which cooperates with the electrostatic adsorption force to make the actuator output enough force to drive heavy load, expand its application range, and has potential application value in aspects such as deformation control of aircraft wings in the aerospace field;

[0038] 5. The rapid actuator of the present application, by reasonably designing the structure and control strategy of the actuator, fully utilizes the phase change energy and electrostatic adsorption energy of the double-path shape memory alloy layer, reduces energy loss, improves energy conversion efficiency, reduces operation cost, and makes it more competitive in practical application;

[0039] 6、The quick actuator of the present application has many advantages, can be widely applied in medical instruments, robots, aerospace, micro-electro-mechanical system and other fields, meets the demand of high-performance actuator in various fields, has wide application prospect and important practical value. BRIEF DESCRIPTION OF DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0041] Figure 1 It is a structural schematic diagram of the quick actuator of the present application;

[0042] Figure 2 It is a shape change diagram of the double-way shape memory alloy layer when the first power supply works and the second power supply does not work in the present application;

[0043] Figure 3 It is a shape change diagram of the double-way shape memory alloy layer when the first power supply does not work and the second power supply works in the present application;

[0044] Figures 4-5 It is a working principle schematic diagram of the double-way shape memory alloy layer in the present application;

[0045] Figures 6-7 It is a working principle schematic diagram of the electrostatic adsorption film in the present application. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.

[0047] It should be noted that: similar labels and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0048] It is to be understood that the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. It is further understood that the terms "comprise" and "comprising" and the like, when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It is further understood that when an element or layer is referred to as being "on" another element or substrate, it can be directly on the other element or substrate or intervening elements can also be present. In addition, "connected" or "coupled" as used herein means that the elements or layers are either in direct contact or that there are one or more intervening elements or layers between the connected or coupled elements or layers. Also, the use of "a" or "an" herein does not denote a limitation of quantity, but rather a limitation of at least one. Further, the use of "and / or" herein is intended to represent an inclusive operation and not a exclusive one.

[0049] In this application, unless specifically stated and limited otherwise, the first feature "on" or "under" the second feature can be directly contacting the first and second features, or indirectly contacting the first and second features through an intermediate medium. Also, the first feature "over", "above" and "on top of" the second feature can be directly above or obliquely above the second feature, or simply means that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "underneath" the second feature can be directly below or obliquely below the second feature, or simply means that the first feature is lower in horizontal height than the second feature.

[0050] It should be understood that, although the terms first, second, etc. can be used herein to describe various information, these terms are not intended to denote a limitation, but are used only to distinguish one piece of information from another.

[0051] The present application provides a fast actuator, such as Figures 1-7 as shown, comprising:

[0052] an electrostatic adsorption film 1;

[0053] a double-path shape memory alloy layer 2 located on the surface of the electrostatic adsorption film 1, one end of the double-path shape memory alloy layer 2 being rotatable relative to the electrostatic adsorption film 1;

[0054] a temperature control unit for heating and controlling the temperature of the double-path shape memory alloy layer 2;

[0055] an electric field control unit for applying a voltage between the electrostatic adsorption film 1 and the double-path shape memory alloy layer 2 to form an electrostatic adsorption force between the electrostatic adsorption film and the double-path shape memory alloy layer.

[0056] The rapid actuator of the application comprises: an electrostatic adsorption film 1, a double-path shape memory alloy layer 2, a temperature control unit, and an electric field control unit; wherein the double-path shape memory alloy layer 2 is made of a specially trained alloy material, has stable double-path shape memory effect, can produce reversible shape change when the temperature changes, and thus output phase change force; its shape and size are designed according to specific application requirements, such as being made into complete sheet, cut seam sheet or origami sheet structure, to adapt to different force transmission and deformation requirements; the double-path shape memory alloy layer 2 can reversibly change between two different shapes during heating and cooling; the material of the double-path shape memory alloy layer 2 includes nickel-titanium (Ni-Ti) alloy, copper-zinc-aluminum (Cu-Zn-Al), iron-manganese-silicon (Fe-Mn-Si) alloy system, etc. The electrostatic adsorption film 1 is composed of electrodes (i.e. conductor layer) and dielectric materials (i.e. insulating layer); the electrodes are made of high-conductivity materials such as metals or carbon-based materials, and are prepared into specific shapes such as parallel plates, comb teeth or staggered finger structures through photolithography, plating and other processes to generate uniform and controllable electric field; the dielectric material is selected from materials with high dielectric constant and low loss, such as polyimide, ceramic, etc., and is placed between the electrodes; when a voltage is applied, the electrodes and the dielectric material will generate electrostatic adsorption force; the temperature control unit of the rapid actuator of the application can heat or cool the double-path shape memory alloy layer 2 and quickly and accurately adjust the temperature of the double-path shape memory alloy layer 2, so that it works within the set phase change temperature range and realizes rapid shape change to actuate; the electric field control unit applies voltage between the electrostatic adsorption film 1 and the double-path shape memory alloy layer 2, and the electric field control unit can provide stable direct current or alternating voltage to accurately control the electric field strength between the electrostatic adsorption film 1 and the double-path shape memory alloy layer 2, and thus adjust the size of the electrostatic adsorption force, and further adjust the recovery speed of the shape memory alloy.

[0057] The fast actuator of the present invention couples a two-way shape memory alloy with electrostatic adsorption technology, combining the advantages of both to develop a new actuator with fast response, high-precision control, and large output force, thereby promoting the development of existing actuation technology. Specifically, the operating principle of the fast actuator of the present invention is as follows: when the actuator is in operation, the temperature control unit first heats or cools the two-way shape memory alloy layer 2 according to a preset program, causing it to undergo a phase change, generating a phase change force, and causing the alloy component to change shape. This process can achieve a large displacement output. After the two-way shape memory alloy layer 2 stops heating, the electric field control unit applies a voltage between the electrostatic adsorption film 1 and the two-way shape memory alloy layer 2, generating an electrostatic adsorption force. The electrostatic adsorption force can respond quickly in a short time, causing the two-way shape memory alloy layer 2 to quickly recover and lock, thereby enabling the actuator to meet the requirements of response speed and displacement accuracy under different working conditions. By precisely adjusting the temperature and voltage parameters, the phase change force of the two-way shape memory alloy layer 2 and the electrostatic adsorption force can be synergistically achieved, enabling the actuator to respond quickly while outputting precisely controllable force and displacement, completing various complex actuation tasks. During operation, by precisely controlling the temperature and electric field parameters, the phase change force of the two-way shape memory alloy layer and the electrostatic adsorption force work together alternately to achieve rapid response of the actuator drive and recovery. In addition, two-way shape memory alloy layers and electrostatic adsorption films of different configurations can provide different output forces and displacements, and have optimized energy conversion efficiency.

[0058] In some embodiments, the electrostatic adsorption film 1 includes:

[0059] Conductor layer 11;

[0060] A first insulating layer 12 is located on the surface of the conductive layer 11;

[0061] The second insulating layer 13 is located on the surface of the conductive layer 11 away from the first insulating layer 12;

[0062] The two-way shape memory alloy layer 2 is located on the surface of the first insulating layer 12 , and one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 13 .

[0063] In the above embodiment, the electrostatic adsorption film 1 includes a conductor layer 11, a first insulating layer 12, and a second insulating layer 13; the first insulating layer 12, the conductor layer 11, and the second insulating layer 13 are stacked in sequence from top to bottom, and the two-way shape memory alloy layer 2 is located on the surface of the first insulating layer 12, and one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 12; specifically, a rotating shaft is provided on the surface of the first insulating layer 12, and the two-way shape memory alloy layer 2 is sleeved outside the rotating shaft, and the two-way shape memory alloy layer 2 can rotate around the rotating shaft, so that one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 13.

[0064] In some embodiments, the temperature control unit comprises:

[0065] The heating film layer 3 is located on the double-path shape memory alloy layer 2.

[0066] The first power supply 4 is connected to both ends of the heating film layer 3, and is used to apply voltage to the heating film layer 3.

[0067] The heating film layer 3 is a thin film material that can convert electrical energy into heat energy; it is usually composed of conductive material and matrix material. When an electric current passes through the conductive material, heat will be generated due to the resistance of the material, thereby achieving the heating function. The heating film layer 3 is located on the surface of the double-path shape memory alloy layer 2, and the positive and negative electrodes of the first power supply 4 are respectively connected to both ends of the heating film layer 3. By controlling the voltage of the first power supply 4, the heating of the heating film layer 3 is realized. The heating film layer 3 is in close contact with the double-path shape memory alloy layer 2, thereby achieving the heating of the double-path shape memory alloy layer 2.

[0068] In some embodiments, the electric field control unit comprises:

[0069] The second power supply 5 is connected to the conductor layer 11 and the double-path shape memory alloy layer 2, and is used to apply voltage between the conductor layer 11 and the double-path shape memory alloy layer 2.

[0070] Specifically, the positive electrode of the second power supply 5 is electrically connected to the conductor layer 11, and the negative electrode is electrically connected to the double-path shape memory alloy layer 2. By controlling the voltage between the conductor layer 11 and the double-path shape memory alloy layer 2 through the second power supply 5, the electrostatic adsorption force between the conductor layer 11 and the double-path shape memory alloy layer 2 is adjusted.

[0071] In some embodiments, the temperature control unit further comprises:

[0072] The temperature sensor is located on the double-path shape memory alloy layer 2 and is used to monitor the temperature of the double-path shape memory alloy layer.

[0073] In some embodiments, the temperature control unit further comprises:

[0074] The temperature controller is electrically connected to the temperature sensor and the first power supply 4, and is used to control the double-path shape memory alloy layer 2 to heat to a set temperature.

[0075] Specifically, the temperature control unit comprises the first power supply 4, the temperature sensor, and the temperature controller. The temperature controller is a PID temperature controller. The temperature sensor monitors the temperature of the double-path shape memory alloy layer 2 in real time and feeds back the signal to the PID temperature controller, controls the double-path shape memory alloy layer 2 to heat to a set temperature, realizes closed-loop temperature control, and the temperature control precision can reach ±0.1℃.

[0076] In some embodiments, the first power supply 4 provides a voltage range of 0-1500V, and by adjusting the voltage range of the first power supply 4, the heating of the double-pass shape memory alloy layer 2 to a set temperature is controlled, such as controlling the heating temperature of the double-pass shape memory alloy layer 2 to be 10-200℃.

[0077] In some embodiments, the electric field control unit further comprises:

[0078] A capacitance measuring unit for monitoring the capacitance strength between the conductor layer 11 and the double-pass shape memory alloy layer 2.

[0079] In some embodiments, the electric field control unit further comprises: a voltage amplifier; the second power supply 5 can output a direct current or alternating voltage of 0V to ±10000V, and the voltage amplifier is used to amplify the voltage signal to meet the electric field strength requirement of the electrostatic adsorption component, and the capacitance measuring instrument is used to monitor the capacitance strength change between the conductor layer 11 and the double-pass shape memory alloy layer 2 in real time, which indirectly reflects the size of the electrostatic adsorption force, thereby realizing accurate control and closed-loop feedback adjustment of the electric field strength.

[0080] In some embodiments, the output voltage of the second power supply 5 can be controlled so that the capacitance between the conductor layer 11 and the double-pass shape memory alloy layer 2 can vary from 10 to 100pF.

[0081] In some embodiments, the output voltage of the second power supply 5 is controlled so that the electrostatic adsorption force between the conductor layer 11 and the double-pass shape memory alloy layer 2 is 1mN-500N.

[0082] In some embodiments, further comprising:

[0083] A base 6;

[0084] The second insulating layer 13 is attached to the base 6.

[0085] The base 6 is made of lightweight high-strength aluminum alloy material, has good thermal conductivity and mechanical stability, and provides support and protection for the actuator.

[0086] In some embodiments, the material of the conductor layer 11 includes at least one of metal material, carbon-based material, and conductive polymer material.

[0087] In some embodiments, the material of the first insulating layer 12 and the second insulating layer 13 includes at least one of polyimide, ceramic, polyethylene, and polytetrafluoroethylene.

[0088] Specifically, the material of the conductor layer 11 includes at least one of a metal material, a carbon-based material, and a conductive polymer material; the metal material includes metal foil such as aluminum foil, copper foil, etc.; aluminum foil has good conductivity and can effectively conduct electric charges. It can be very thin while ensuring the rapid movement of charges; in the electrostatic adsorption film, aluminum foil can serve as a conductive layer to help establish a uniform electric field on the entire film surface; in addition, some conductive polymers can also be used as conductor materials; conductive polymers such as poly(3,4-ethylenedioxythiophene)-poly(styrene sulfonate) (PEDOT:PSS) have good flexibility and processability, and can better adapt to the adsorption requirements of different shapes than metal materials; polyethylene (PE), polytetrafluoroethylene (PTFE), polyimide, ceramics, etc. have good insulation properties and can effectively prevent charge leakage.

[0089] Preferably, in some embodiments, the conductor layer 11 is made of a conductive material film such as copper foil, and is made into a sheet or other optimized shape through a photolithography process. The first insulating layer 12 and the second insulating layer 13 are made of polyimide film. The conductor layer 11 is assembled with the first insulating layer 12 and the second insulating layer 13 through a bonding process to form an electrostatic adsorption film, and is respectively connected to the positive and negative poles of the second power supply with the two-way shape memory alloy layer 2.

[0090] In some embodiments, the heating film layer 3 is a flexible heating ink coating. The flexible heating ink coating is a coating material that can generate heat when electrical energy is applied. It has good flexibility and can be attached to various flexible substrates, such as plastic films and textiles, to achieve heating functions. The flexible heating ink coating includes conductive materials, adhesive materials, dispersants, and additives. Conductive materials include carbon nanotubes, graphene, metal nanoparticles (such as silver nanoparticles), etc. High molecular polymers such as polyurethane (PU) and polyimide (PI) are often used as adhesive materials. The flexible heating ink coating is bonded to the two-way shape memory alloy layer 2, and the two ends of the flexible heating ink coating are connected to the positive and negative poles of the first power supply 4 with wires. In addition, the two-way shape memory alloy layer 2 is connected to the negative pole of the second power supply 5, and the conductor layer 11 is connected to the positive pole of the second power supply 5. The movable part is the two-way shape memory alloy layer 2, which is fixed by the electrostatic adsorption film. The entire assembly is then mounted on a base to finally obtain an actuator.

[0091] In some embodiments, the two-way shape memory alloy layer 2 has a thickness of 0.1 to 0.2 mm, for example, 0.1 mm, 0.15 mm, or 0.2 mm. The thickness is selected based on actual conditions.

[0092] In some embodiments, the thickness of the conductor layer 11 is 10-15 μm. For example, the thickness of the conductor layer 11 can be 10 μm, 11 μm, 12 μm, 13 μm, 14 μm, 15 μm, etc. The thickness is selected according to actual conditions.

[0093] In some embodiments, the thickness of each group of the first insulating layer 12 and the second insulating layer 13 is independently 10 to 15 μm. For example, the thickness of each group of the first insulating layer 12 and the second insulating layer 13 is independently 10 μm, 11 μm, 12 μm, 12.5 μm, 13 μm, 14 μm, 15 μm, etc. The thickness is selected according to actual conditions.

[0094] In some embodiments, the thickness of the heating coating 10 is 8 to 12 μm. For example, the thickness of the heating coating 10 is 8 μm, 9 μm, 10 μm, 11 μm, 12 μm, etc. The thickness is selected according to actual conditions.

[0095] In some embodiments, the two-way shape memory alloy layer 2 is made of nickel-titanium-based two-way shape memory alloy, which is processed into a sheet structure by wire cutting and has a stable two-way shape memory effect after multiple thermomechanical training.

[0096] For further reference, Figure 2 As shown, the first power supply 4 is working (the switch corresponding to the first power supply 4 is closed), and the second power supply 5 is not working (the switch corresponding to the second power supply 5 is open), and the two-way shape memory alloy layer 2 changes shape due to heating. Figure 3 When the first power source 4 is not working (the switch corresponding to the first power source 4 is turned on) and the second power source 5 is working (the switch corresponding to the second power source 5 is turned off), the two-way shape memory alloy layer 2 recovers and locks due to the electrostatic adsorption force.

[0097] Further, Figures 4-5 Schematic diagram of the working principle of the two-way shape memory alloy layer 2; Figure 4 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the first power source 4 is not working (the switch corresponding to the first power source 4 is turned on); Figure 5 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the first power source 4 is working (the switch corresponding to the first power source 4 is closed).

[0098] Figures 6-7 Schematic diagram of the working principle of electrostatic adsorption film; Figure 6 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the second power source 5 is working (the switch corresponding to the second power source 5 is closed). During operation, the two-way shape memory alloy layer 2 is negatively charged and the conductor layer 11 is positively charged; Figure 7 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the second power supply 5 is not working (the switch corresponding to the second power supply 5 is turned on).

[0099] When the fast actuator of the present application is applied, the displacement and output force of the actuator are measured using a laser displacement sensor and a high-precision force sensor; by changing the set temperature of the temperature control unit and the voltage value of the electric field control unit, the displacement-time curve and the force-displacement curve of the actuator under different working conditions are recorded, and the response speed, output force range, displacement accuracy and energy conversion efficiency and other performance indicators are tested. The fast actuator of the present application, which is coupled with the static adsorption of the double-pass shape memory alloy layer, can be optimized and customized by adjusting the material, structure and control parameters according to different application requirements, to meet the diversified requirements of high-performance actuators in various fields.

[0100] The fast actuator of the present application has the following advantages:

[0101] Fast response: Because the electrostatic adsorption force can be generated instantly and act on the actuator structure, combined with the cooling recovery process of the double-pass shape memory alloy layer, the response speed of the actuator is significantly improved, and the actuation and recovery can be completed in a short time, meeting the requirements of high response speed in application scenarios;

[0102] Precise control: By precisely regulating the temperature and electric field parameters, the phase change degree of the double-pass shape memory alloy layer and the size of the electrostatic adsorption force can be precisely controlled, so as to realize the fast actuation and recovery requirements of the actuator, and accurately control the output force and displacement, meeting the needs of precise operation, such as control of minimally invasive surgical instruments in the biomedical field;

[0103] Large output force: The double-pass shape memory alloy layer can generate a large force during phase change, which cooperates with the electrostatic adsorption force to make the actuator output enough force to drive heavier loads, expanding its application range, such as potential application in the deformation control of aircraft wings in the aerospace field;

[0104] Energy conversion efficiency optimization: By reasonably designing the structure and control strategy of the actuator, the phase change energy and electrostatic adsorption energy of the double-pass shape memory alloy layer are fully utilized, energy loss is reduced, energy conversion efficiency is improved, and operating cost is reduced, making it more competitive in practical applications.

[0105] In summary, the fast actuator of the present application, which is coupled with the static adsorption of the double-pass shape memory alloy, has many advantages, and the fast actuator of the present application can be widely applied in the fields of medical devices, robots, aerospace, micro-electro-mechanical systems, etc., to meet the needs of high-performance actuators in various fields, and has broad application prospects and important practical value.

[0106] The above merely provides the preferred embodiment of the present application, and is not used to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A fast actuator, characterized in that: include: Electrostatic adsorption film; a two-way shape memory alloy layer, which is located on the surface of the electrostatic adsorption film, and one end of the two-way shape memory alloy layer can rotate relative to the electrostatic adsorption film; A temperature control unit, used for heating the two-way shape memory alloy layer and controlling its temperature; An electric field control unit, used for applying a voltage between the electrostatic adsorption film and the two-way shape memory alloy layer to form an electrostatic adsorption force between the electrostatic adsorption film and the two-way shape memory alloy layer; The electrostatic adsorption film comprises: Conductor layer; a first insulating layer, located on the surface of the conductor layer; a second insulating layer, located on a surface of the conductor layer away from the first insulating layer; The two-way shape memory alloy layer is located on the surface of the first insulating layer, and one end of the two-way shape memory alloy layer can rotate relative to the first insulating layer; The temperature control unit comprises: a heating film layer, located on the two-way shape memory alloy layer; a first power supply, whose positive and negative electrodes are respectively connected to the two ends of the heating film layer, for applying voltage to the heating film layer; The electric field control unit includes: a second power supply, whose positive and negative electrodes are respectively connected to the conductor layer and the two-way shape memory alloy layer, for applying a voltage between the conductor layer and the two-way shape memory alloy layer; The temperature control unit further comprises: a temperature sensor located on the two-way shape memory alloy layer and configured to monitor the temperature of the two-way shape memory alloy layer; The temperature control unit further comprises: A temperature controller is electrically connected to the temperature sensor and the first power supply, and is used to control the two-way shape memory alloy layer to be heated to a set temperature.

2. The fast actuator according to claim 1, wherein: The electric field control unit further includes: The capacitance measuring unit is used to monitor the capacitance strength between the conductor layer and the two-way shape memory alloy layer.

3. The fast actuator according to claim 1, wherein: Also includes: base; The second insulating layer is attached to the base.

4. The fast actuator according to claim 1, wherein: The material of the conductor layer includes at least one of a metal material, a carbon-based material, and a conductive polymer material.

5. The fast actuator according to claim 1, wherein: The material of the first insulating layer and the second insulating layer includes at least one of polyimide, ceramic, polyethylene, and polytetrafluoroethylene.

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