Device and method for helium-nitrogen pressure maintenance of a steel cylinder

Abstract

The application relates to the technical field of steel bottle pressure maintaining, in particular to a device and method for helium-nitrogen pressure maintaining of a steel bottle, which comprises a helium-nitrogen mixed gas bottle group, a first membrane presser and a second membrane presser connected with the helium-nitrogen mixed gas bottle group through pipelines, a vacuum pump and a vacuum buffer tank connected with the first membrane presser and the second membrane presser through pipelines respectively, a first pressure maintaining and filling row and a second pressure maintaining and filling row connected with the first membrane presser and the second membrane presser through pipelines, a first steel bottle and a second steel bottle connected with the first pressure maintaining and filling row and the second pressure maintaining and filling row through pipelines, and an outlet of a helium-nitrogen mixed gas storage tank connected with inlet pipelines of the first membrane presser and the second membrane presser. Therefore, the device and method for helium-nitrogen pressure maintaining of a steel bottle can solve the technical problem that equipment failure or improper operation may lead to gas leakage, pressure out of control and other serious consequences, and threatens personnel and property.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of steel bottle pressure maintaining, in particular to a device and method for maintaining the pressure of a steel bottle filled with helium and nitrogen. BACKGROUND

[0002] With the rapid progress of semiconductor technology and the increasing demand for electronic product miniaturization, the application of high-purity electronic special gases has become increasingly widespread. These gases play a crucial role in the fields of semiconductor manufacturing, integrated circuit production, optical fiber communication, and solar cells, and their purity and stability directly affect the performance and reliability of the final product. Due to their special properties, these gases are often stored in high-pressure steel cylinders for safe and efficient transportation and use.

[0003] High-pressure steel cylinders, as storage and transportation containers for high-purity electronic special gases, their sealing performance is directly related to the preservation quality and safety of the gas. Any small leak can lead to a decrease in gas purity, and even cause safety accidents. Therefore, before the steel cylinder is filled and used, strict pressure maintenance and leak detection is an indispensable step. This process aims to ensure that there is no leakage at key positions such as the connection between the bottle body and the bottle valve, the bottle valve itself, etc., thereby ensuring the long-term preservation and safety of the gas in use.

[0004] The traditional pressure maintenance and leak detection method mainly relies on a helium mass spectrometer leak detector. This instrument uses the unique properties of helium to accurately detect small leaks. In the pressure maintenance and leak detection process, helium-nitrogen mixed gas is usually used to increase the pressure to the required pressure maintenance pressure. The addition of helium improves the sensitivity of leak detection, while the addition of nitrogen helps to reduce costs, as pure helium is relatively expensive.

[0005] However, the existing pressure maintenance process has some shortcomings. First, each time the steel cylinder is pressure maintained, the helium-nitrogen mixed gas needs to be re-pressurized to the required pressure, which not only consumes a large amount of electrical energy, but also increases the wear and maintenance cost of the equipment. Second, the residual helium-nitrogen mixed gas in the pipeline gradually accumulates during the pressure maintenance process, resulting in a decrease in the effective utilization rate of the gas source. As the gas is continuously consumed, the gas source must be replaced regularly, which undoubtedly increases the operating cost and time cost.

[0006] In addition, the high-pressure pressure maintenance process has very high requirements for the stability and safety of the equipment. If the equipment fails or is operated improperly, it may cause gas leakage, pressure loss of control, and other serious consequences, posing a threat to personnel and property. Therefore, optimizing the high-pressure pressure maintenance process, improving the utilization rate of the gas source, and reducing energy consumption and cost have become urgent problems to be solved.

[0007] In view of the deficiencies in the prior art, developing a more efficient, energy-saving and safe steel cylinder high-pressure holding technology is of great significance for improving the development level of the semiconductor industry and related fields. This not only can reduce production cost and improve production efficiency, but also helps to protect product quality and safety, and promote the sustainable development of the entire industry. SUMMARY

[0008] Based on the above problems, the present application provides a device and method for helium-nitrogen pressure holding of a steel cylinder, which solves the technical problem that equipment failure or improper operation may lead to gas leakage, pressure loss of control and other serious consequences, threatening personnel and property.

[0009] To solve the above technical problems, the technical solution adopted by the present application is:

[0010] A device and method for helium-nitrogen pressure holding of a steel cylinder, the device comprising a helium-nitrogen mixed gas cylinder group, a first membrane press and a second membrane press connected to the helium-nitrogen mixed gas cylinder group through pipelines, a vacuum pump and a vacuum buffer tank connected to the first membrane press and the second membrane press through pipelines respectively, a first pressure holding and filling row and a second pressure holding and filling row connected to the first membrane press and the second membrane press through pipelines, a first steel cylinder and a second steel cylinder connected to the first pressure holding and filling row and the second pressure holding and filling row through pipelines, a helium-nitrogen mixed gas storage tank connected to the first pressure holding and filling row and the second pressure holding and filling row, and an outlet of the helium-nitrogen mixed gas storage tank connected to the inlet pipeline of the first membrane press and the second membrane press.

[0011] In a specific implementable embodiment, the first membrane press and the second membrane press are connected with a circulating water return port and a circulating water inlet port.

[0012] In a specific implementable embodiment, the vacuum pump and the vacuum buffer tank are connected in communication.

[0013] In a specific implementable embodiment, the first pressure holding and filling row and the second pressure holding and filling row are connected with an online analysis pipeline, a venting main pipe and a high-purity N2 pipeline, and the vacuum pump is connected with a venting pipeline.

[0014] In a specific implementable embodiment, an automatic regulating valve is provided on the inlet of the first membrane press and the second membrane press.

[0015] In a specific implementable embodiment, the method comprises the following steps:

[0016] The helium-nitrogen mixed gas cylinder group first provides a gas source for pressure holding of the first steel cylinder and the second steel cylinder, the outlet of the helium-nitrogen mixed gas cylinder is reduced in pressure and then enters the first membrane press and the second membrane press through the pipeline for pressure increase, and the automatic regulating valve ensures stable pressure at the inlet of the first membrane press and the second membrane press;

[0017] The helium-nitrogen mixed gas pressurized by the first membrane press and the second membrane press enters the first pressure maintaining and filling row and the second pressure maintaining and filling row respectively, and the helium-nitrogen mixed gas is filled into the second cylinder from the first pressure maintaining and filling row, and the second cylinder is pressurized to high pressure for pressure maintaining and leakage detection;

[0018] After the pressure maintaining of the second cylinder is completed, the high-pressure gas in the second cylinder is directly depressurized into the first cylinder on the second pressure maintaining and filling row through a pipeline, and the high-pressure gas is directly filled to reduce the operation time of the first membrane press 2 and the second membrane press;

[0019] After the first cylinder and the second cylinder are balanced, the remaining helium-nitrogen mixed gas in the cylinders can enter the inlets of the first membrane press and the second membrane press for pressure increase, and after the pressure is increased, the first cylinder on the second pressure maintaining and filling row is continuously filled;

[0020] The first pressure maintaining and filling row and the second pressure maintaining and filling row are provided with a nitrogen replacement pipeline, an analysis pipeline, a venting pipeline, and a pipeline leading to a helium-nitrogen mixed gas storage tank; the nitrogen used for replacement treatment of the first pressure maintaining and filling row and the second pressure maintaining and filling row, and the residual helium-nitrogen mixed gas in the pipeline are recovered to the helium-nitrogen mixed gas storage tank;

[0021] After the pressure maintaining is completed, the high-pressure gas in the first cylinder and the second cylinder is directly depressurized into the helium-nitrogen mixed gas storage tank for storage.

[0022] The positive effects of the present application are as follows:

[0023] The high-pressure gas is recycled, and after the pressure maintaining of the second cylinder is completed, the high-pressure gas in the second cylinder is directly depressurized into the first cylinder on the second pressure maintaining and filling row, realizing the recycling of the high-pressure gas. This reduces the operation time of the first membrane press and the second membrane press, and reduces energy consumption and equipment wear.

[0024] The automatic regulating valve ensures stable pressure, and an automatic regulating valve is arranged on the inlet of the first membrane press and the second membrane press, which can automatically maintain the stability of the inlet pressure, and improves the automation degree and safety of the pressure maintaining process.

[0025] Nitrogen replacement and residual gas recovery, a nitrogen replacement pipeline and a venting pipeline are arranged on the first pressure maintaining and filling row and the second pressure maintaining and filling row, and a pipeline leading to a helium-nitrogen mixed gas storage tank. This not only can perform nitrogen replacement treatment on the cylinders and pipelines, but also can recover the residual helium-nitrogen mixed gas to the helium-nitrogen mixed gas storage tank, improving the effective utilization rate of the gas source.

[0026] Efficient pressure maintaining and filling process, the present application optimizes the pressure maintaining and filling process, realizes efficient, energy-saving and safe pressure maintaining of the cylinders. The whole process has high automation degree, reduces manual intervention, improves production efficiency and safety. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description only constitute a part of the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of the provided drawings.

[0028] Figure 1 Structure diagram of the present application;

[0029] Explanation of reference signs

[0030] 1, helium-nitrogen gas cylinder group; 2, first membrane press; 3, second membrane press; 4, vacuum pump; 5, vacuum buffer tank; 6, first pressure maintaining filling row; 7, second pressure maintaining filling row; 8, first steel cylinder; 9, second steel cylinder; 10, circulating water return port; 11, circulating water inlet; 12, online analysis pipeline; 13, venting main pipe; 14, high-purity N2 pipeline; 15, venting pipeline; 16, automatic regulating valve; 17, helium-nitrogen mixed gas storage tank. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments only constitute a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0032] Device embodiment

[0033] The present embodiment is a device embodiment, as shown in Figure 1 A device and method for helium-nitrogen pressure maintaining of a steel cylinder, the device for helium-nitrogen pressure maintaining of a steel cylinder comprises a helium-nitrogen gas cylinder group 1 as a gas source, which provides helium-nitrogen mixed gas to meet the pressure and purity requirements of the steel cylinder pressure maintaining, and ensures stable gas supply during the pressure maintaining process and improves the pressure maintaining efficiency.

[0034] A first membrane press 2 and a second membrane press 3 are connected to the helium-nitrogen gas cylinder group 1 through pipelines, a circulating water return port 10 and a circulating water inlet 11 are connected to the first membrane press 2 and the second membrane press 3, and an automatic regulating valve 16 is arranged on the inlet of the first membrane press 2 and the second membrane press 3.

[0035] The first membrane compressor 2 and the second membrane compressor 3 are connected with a vacuum pump 4 and a vacuum buffer tank 5 through pipelines respectively, and the vacuum pump 4 is communicated with the vacuum buffer tank 5. The helium-nitrogen mixed gas is pressurized by the membrane compressor to meet the requirement of high-pressure pressure maintaining, improve the gas pressure, and realize high-efficiency pressure maintaining; the double-machine configuration increases the system redundancy and improves the reliability.

[0036] The first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7 connected through pipelines on the first membrane compressor 2 and the second membrane compressor 3 are connected with a first steel cylinder 8 and a second steel cylinder 9 through pipelines, and a helium-nitrogen mixed gas storage tank 17 is connected on the first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7, and the outlet of the helium-nitrogen mixed gas storage tank 17 is connected into the inlet pipeline of the first membrane compressor 2 and the second membrane compressor 3.

[0037] The first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7 are connected with an online analysis pipeline 12, a venting main pipe 13 and a high-purity N2 pipeline 14, and the vacuum pump 4 is connected with a venting pipeline 15. The online analysis pipeline 12 is used for real-time monitoring of the gas composition to ensure the gas purity; the venting main pipe 13 is used for discharging unqualified gas; and the high-purity N2 pipeline 14 is used for nitrogen replacement to improve the safety of the pressure maintaining process and ensure the gas quality, reduce resource waste and improve the gas source utilization rate.

[0038] Method embodiment

[0039] The helium-nitrogen mixed gas cylinder group 1 first provides a gas source for pressure maintaining of the first steel cylinder 8 and the second steel cylinder 9, the helium-nitrogen mixed gas cylinder outlet is reduced in pressure and then enters the first membrane compressor 2 and the second membrane compressor 3 through pipelines for pressurization, and the automatic regulating valve 16 ensures the stability of the inlet pressure of the first membrane compressor 2 and the second membrane compressor 3; the helium-nitrogen mixed gas cylinder group 1 as a stable gas source, cooperates with the pressure reducing and pressurizing devices (the first membrane compressor 2 and the second membrane compressor 3) and the automatic regulating valve 16, and ensures that the helium-nitrogen mixed gas entering the pressure maintaining and filling row has stable pressure and purity, thereby improving the pressure maintaining efficiency and precision.

[0040] The helium-nitrogen mixed gas pressurized by the first membrane compressor 2 and the second membrane compressor 3 enters the first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7 respectively, and the helium-nitrogen mixed gas is filled into the second steel cylinder 9 from the first pressure maintaining and filling row 6, and the second steel cylinder 9 is pressurized to high pressure for pressure maintaining and leakage detection;

[0041] After the pressure maintaining of the second steel cylinder 9 is completed, the high-pressure gas in the second steel cylinder 9 is directly depressurized into the first steel cylinder 8 on the second pressure maintaining and filling row 7 through a pipeline, and the high-pressure gas is directly filled to reduce the running time of the first membrane compressor 2 and the second membrane compressor 3;

[0042] The high-pressure gas in the second cylinder 9 is directly discharged into the first cylinder 8 for filling, which reduces the running time of the first membrane pressure machine 2 and the second membrane pressure machine 3, thereby reducing energy consumption. At the same time, the recycling of the remaining helium-nitrogen mixed gas in the cylinder also reduces resource waste.

[0043] After the first cylinder 8 and the second cylinder 9 are equalized, the remaining helium-nitrogen mixed gas in the cylinders can enter the inlets of the first membrane pressure machine 2 and the second membrane pressure machine 3 for pressure increase, and after the pressure is increased, the first cylinder 8 on the second pressure maintaining and filling row 7 is continuously filled;

[0044] The first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7 are both provided with a nitrogen replacement pipeline, an analysis pipeline, a venting pipeline, and a pipeline leading to a helium-nitrogen mixed gas storage tank 17; the nitrogen used for replacement treatment of the first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7, and the residual helium-nitrogen mixed gas in the pipelines are recovered to the helium-nitrogen mixed gas storage tank 17;

[0045] After the pressure maintaining is completed, the high-pressure gas in the first cylinder 8 and the second cylinder 9 is directly discharged into the helium-nitrogen mixed gas storage tank 17 for storage.

[0046] The nitrogen used for replacement treatment of the first pressure maintaining and filling row 6 and the second pressure maintaining and filling row 7, and the residual helium-nitrogen mixed gas in the pipelines and pipelines are recovered to the helium-nitrogen mixed gas storage tank 17. After the pressure maintaining is completed, the high-pressure gas in the first cylinder 8 and the second cylinder 9 is directly discharged into the helium-nitrogen mixed gas storage tank 17 for storage, and the outlet of the helium-nitrogen mixed gas storage tank 17 is connected to the inlet pipeline of the first membrane pressure machine 2 and the second membrane pressure machine 3, thereby realizing the reuse of the helium-nitrogen mixed gas and reducing the problems of cost and energy waste.

[0047] Finally, it should be noted that in this document, relational terms such as first and second and the like can merely be used to distinguish one entity or action from another, without necessarily requiring or implying any such actual relationship or order between or among entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element preceded by "comprises... a" does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0048] The foregoing description of the disclosed embodiments enables a person skilled in the art to make or use the application. Modifications of these embodiments will occur to persons of skill in the art, and that the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Therefore, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for helium-nitrogen pressure maintenance of a steel cylinder, characterized in that, The helium-nitrogen mixed gas bottle group (1) is connected with the first membrane pressure machine (2) and the second membrane pressure machine (3) through pipelines, the first membrane pressure machine (2) and the second membrane pressure machine (3) are respectively connected with the vacuum pump (4) and the vacuum buffer tank (5) through pipelines, the first membrane pressure machine (2) and the second membrane pressure machine (3) are connected with the first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) through pipelines, the first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) are connected with the first steel cylinder (8) and the second steel cylinder (9) through pipelines, the first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) are connected with the helium-nitrogen mixed gas storage tank (17), and the outlet of the helium-nitrogen mixed gas storage tank (17) is connected with the inlet pipeline of the first membrane pressure machine (2) and the second membrane pressure machine (3); The inlet of the first membrane pressure machine (2) and the second membrane pressure machine (3) is provided with an automatic adjusting valve (16); The helium-nitrogen mixed gas after being pressurized by the first membrane pressure machine (2) and the second membrane pressure machine (3) enters the first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) respectively, the helium-nitrogen mixed gas is filled into the second steel cylinder (9) by the first pressure maintaining and filling row (6), the second steel cylinder (9) is pressurized to high pressure for pressure maintaining and leak detection; After the pressure maintaining of the second steel cylinder (9) is completed, the high-pressure gas in the second steel cylinder (9) is directly depressurized into the first steel cylinder (8) on the second pressure maintaining and filling row (7) through a pipeline; The first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) are all provided with nitrogen replacement pipelines, analysis pipelines, venting pipelines and pipelines leading to the helium-nitrogen mixed gas storage tank (17).

2. The device for helium-nitrogen pressure maintenance of a cylinder according to claim 1, characterized in that, The first membrane pressure machine (2) and the second membrane pressure machine (3) are connected with a circulating water return port (10) and a circulating water inlet port (11).

3. The device for helium-nitrogen pressure maintenance of a cylinder according to claim 1, characterized in that, The vacuum pump (4) and the vacuum buffer tank (5) are connected in communication.

4. The device for helium-nitrogen pressure maintenance of a cylinder according to claim 1, characterized in that, The first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) are connected with an online analysis pipeline (12), a venting main pipe (13) and a high-purity N2 pipeline (14), and the vacuum pump (4) is connected with a venting pipeline (15).

5. A method for helium-nitrogen pressure maintenance of a cylinder, based on the device according to any one of claims 1 to 4, characterized in that, The method comprises the following steps: The helium-nitrogen mixed gas bottle group (1) first provides a gas source for pressure maintaining of the first steel cylinder (8) and the second steel cylinder (9), the helium-nitrogen mixed gas bottle outlet is depressurized and enters the first membrane pressure machine (2) and the second membrane pressure machine (3) through a pipeline for pressurization, and the automatic adjusting valve (16) ensures that the inlet pressure of the first membrane pressure machine (2) and the second membrane pressure machine (3) is stable; The helium-nitrogen mixed gas after being pressurized by the first membrane pressure machine (2) and the second membrane pressure machine (3) enters the first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) respectively, the helium-nitrogen mixed gas is filled into the second steel cylinder (9) by the first pressure maintaining and filling row (6), the second steel cylinder (9) is pressurized to high pressure for pressure maintaining and leak detection; After the pressure maintaining of the second steel cylinder (9) is completed, the high-pressure gas in the second steel cylinder (9) is directly depressurized into the first steel cylinder (8) on the second pressure maintaining and filling row (7) through a pipeline; The first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) are connected with an online analysis pipeline (12), a venting main pipe (13) and a high-purity N2 pipeline (14), and the vacuum pump (4) is connected with a venting pipeline (15). The remaining helium-nitrogen mixed gas in the first cylinder (8) and the second cylinder (9) after pressure equalization can enter the inlet of the first membrane press (2) and the second membrane press (3) for pressure increase, and after the pressure is increased, the first cylinder (8) on the second pressure maintaining and filling row (7) is continuously filled; The first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) are provided with a nitrogen replacement pipeline, an analysis pipeline, a venting pipeline and a pipeline leading to the helium-nitrogen mixed gas storage tank (17); the nitrogen used for replacement treatment of the first pressure maintaining and filling row (6) and the second pressure maintaining and filling row (7) and the residual helium-nitrogen mixed gas in the pipeline are recovered to the helium-nitrogen mixed gas storage tank (17); After the pressure maintaining is completed, the high-pressure gas in the first cylinder (8) and the second cylinder (9) is directly depressurized and enters the helium-nitrogen mixed gas storage tank (17) for storage.

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