Full-band anti-jitter device, system and method

Abstract

The invention discloses a full-band anti-shaking device, system and method, and belongs to the technical field of electromechanical servo systems, the device mainly comprises a multi-stage vibration reduction transmission shaft system and an electromagnetic-thermal coupling field regulation and control module, and the multi-stage vibration reduction transmission shaft system comprises a magnetorheological fluid layer, a piezoelectric anti-vibration power generation layer and an eddy current vibration reduction layer which are stacked on a rotating shaft in sequence; the magnetorheological fluid layer is used for low-frequency suppression, the piezoelectric anti-vibration power generation layer is used for medium-frequency absorption, and the eddy current vibration reduction layer is used for high-frequency braking; the electromagnetic-thermal coupling field regulation and control module realizes double-magnetic-circuit decoupling through a magnetic resistance network analysis method, and different types of currents are provided for the magnetic field array according to the magnitude of the vibration signal frequency. The system captures electric energy generated in the multi-stage vibration reduction transmission shaft system, is used for low-temperature self-heating and supplies power to the electromagnetic-thermal coupling field regulation and control module. According to the invention, full-band vibration suppression and energy closed-loop utilization are realized through a multi-stage energy consumption structure and an electromagnetic-thermal cooperation mechanism.

Description

Technical Field

[0001] The present invention relates to the technical field of electromechanical servo systems, and in particular to a full-band anti-shake device, system and method, which are applicable to high-precision motion control fields such as industrial robots, CNC machine tools, aerospace equipment, and precision instruments. Background Art

[0002] For high-performance electromechanical servo systems in the fields of robots, machine tools, etc., full-band vibration suppression has become a common problem that restricts the improvement of equipment performance. For example, the spindle system of CNC machine tools faces the dual interference of 20Hz-300Hz rotational vibration and 800Hz-1500Hz tool chatter. The attenuation rate of traditional hydraulic dampers in the frequency band greater than 800Hz is less than 50%, resulting in a large roughness of the finished surface. The insufficient full-band vibration suppression capability of the system will lead to motion trajectory deviation and delayed dynamic response of the servo drive unit, thereby causing instability in posture control and decreased system robustness under multi-physical field coupling interference, which seriously restricts the stringent requirements for submillimeter motion accuracy in the field of high-end equipment manufacturing.

[0003] The main factors causing jitter in electromechanical servo systems are as follows: 1) The dynamic response characteristics of the servo drive unit do not match the load inertia properly.

[0004] 2) Mechanical impedance mismatch problem of the transmission chain: For example, although the planetary roller screw transmission system has high rigidity characteristics, its periodic transmission error (single-turn cumulative error> 40μm) and wide-band vibration caused by meshing impact (the energy in the 200Hz-2KHz band accounts for more than 30%) will be transmitted through the mechanical structure to form multi-modal resonance.

[0005] 3) Existing magnetorheological fluids and eddy current damping do not take into account the large amount of heat generated during operation. If this heat cannot be effectively controlled and utilized, it will not only cause energy waste, but also affect the performance and life of the system in high and low temperature environments.

[0006] At present, magnetorheological fluid, piezoelectric, and eddy current hierarchical vibration control structures have been widely studied and applied, and have a high degree of maturity. However, the existing technologies have the following areas for improvement in terms of multi-physical field coupling, frequency band coverage, and energy circulation: 1) Although the traditional mechanical limit solution can improve the low-frequency stiffness, it will cause a sudden change in the stiffness distribution of the transmission chain, triggering the mid- and high-frequency resonance amplification effect. In particular, for high-dynamic robots, the end amplitude increases significantly under sinusoidal excitation, and the positioning accuracy deteriorates; 2) Individual damping technologies such as passive rubber shock absorbers, hydraulic buffers, active magnetorheological fluids, eddy current shock absorbers, etc. can only cover a narrow frequency band, and the damping coefficient will decay due to thermal conditions and other issues under high-speed switching conditions; 3) The existing active electromagnetic damping technology has the problem of high-frequency magnetic field modulation being expensive, such as excessive EMI radiation, sharp increase in iron loss, eddy current heat accumulation, and heavy heat dissipation burden, which leads to an increase in the size of the joint module and a decrease in power density. At the same time, the existing energy recovery solutions have contradictions such as narrow frequency band coverage, low conversion efficiency, and thermal management conflicts. For example, piezoelectric power generation technology cannot capture high-frequency vibration energy, and electromagnetic energy recovery technology limits energy conversion efficiency due to the skin effect.

[0007] 4) Under highly dynamic working conditions, the strong coupling effect of mechanical vibration, electromagnetic field and thermal field leads to reduced system performance. Mechanical vibration causes the transmission chain stiffness to change, resulting in an increase in servo current harmonics, which in turn increases copper and iron losses, causing temperature rise. Material expansion changes the meshing gap, further increasing the vibration amplitude. In addition, 90% of the vibration kinetic energy of the robot joint is dissipated as waste heat through damping. The existing thermal management solution is inefficient, resulting in a fast temperature rise rate. The active cooling system consumes a lot of energy, exacerbating energy waste.

[0008] From the above analysis, it can be seen that the existing technology cannot meet the core requirements of high-precision, high-dynamic, and high-energy-efficiency robot servo systems. Summary of the invention

[0009] The present invention aims to systematically solve technical bottlenecks such as continuous stiffness control for full-band vibration suppression, coordinated management of electromagnetic-thermal coupling fields, and systematic recovery of vibration energy and storage of standby electric energy to provide heating for low-temperature conditions. By establishing a full-band stiffness dynamic compensation mechanism, breaking through electromagnetic damping technology, and developing a broadband composite energy capture structure, high-precision, high-dynamic, and high-efficiency servo control can be achieved, thus promoting the performance leap of high-end equipment such as high-end machine tools, aerospace on-orbit machinery, and robots.

[0010] The objective of the present invention is achieved through the following technical solutions: In a first aspect, a full-band anti-shake device is provided, comprising: A multi-stage vibration reduction transmission shaft system, comprising a magnetorheological fluid layer, a piezoelectric vibration reduction power generation layer and an eddy current vibration reduction layer sequentially superimposed on a rotating shaft; the magnetorheological fluid layer is used for low-frequency suppression, the piezoelectric vibration reduction power generation layer is used for medium-frequency absorption, and the eddy current vibration reduction layer is used for high-frequency braking; The electromagnetic-thermal coupling field control module is connected to the multi-stage vibration reduction transmission shaft system through a magnetic field array; the electromagnetic-thermal coupling field control module is used to detect the vibration signal and provide different types of currents to the magnetic field array according to the frequency of the vibration signal; the different types of currents provided to the magnetic field array according to the frequency of the vibration signal include: The dual magnetic circuit decoupling is achieved through the magnetoresistive network analysis method. When the vibration signal is low frequency, a stable direct current is provided to the magnetic field array, and the main magnetic circuit generates a steady magnetic field to penetrate the magnetorheological fluid layer. When the vibration signal is high frequency, an alternating current is provided to the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field to penetrate into the eddy current vibration reduction layer.

[0011] In some embodiments, the magnetorheological fluid layer includes a protective film, a magnetorheological fluid working chamber and a magnetic conductive ring from the inside to the outside, the magnetorheological fluid working chamber is spiral, and the magnetic conductive ring adopts a pole tooth structure.

[0012] In some embodiments, the material of the magnetic ring is 1J22 Permalloy.

[0013] In some embodiments, the piezoelectric anti-vibration power generation layer includes a piezoelectric fiber layer, an electrode layer, a magnetic shielding layer, and a thermoelectric module layer connected in sequence, and the thermoelectric module layer is connected to the eddy current vibration reduction layer.

[0014] In some embodiments, the material of the piezoelectric fiber layer is PZT-5H piezoelectric fiber, the electrode layer adopts a three-dimensional interdigitated electrode, and the magnetic shielding layer adopts a multi-layer composite structure; the thermoelectric module layer is a double-layer structure, wherein the first layer structure is a thermal conductive layer, the thermal conductive layer is connected to the eddy current vibration reduction layer, and the second layer structure is a power generation layer.

[0015] In some embodiments, the heat conducting layer is made of aluminum nitride ceramic material, and the power generation layer is made of Superlattice thermocouple.

[0016] In some embodiments, the eddy current vibration reduction layer includes a brake disc, which is made of a light metal material and has wavy stripe grooves in the axial direction.

[0017] In a second aspect, a full-band anti-shake system consisting of the first aspect is provided, which also includes a composite energy recovery module, wherein the composite energy recovery module is used to capture the electric energy generated in the multi-stage vibration reduction transmission shaft system, and the electric energy captured by the composite energy recovery module is used for low-temperature self-heating and for powering the electromagnetic-thermal coupling field control module.

[0018] In some embodiments, the heat energy generated by the electromagnetic-thermal coupling field regulation module is transmitted to the piezoelectric anti-vibration power generation layer.

[0019] In a third aspect, a full-band anti-jitter method based on the first aspect is provided, the method comprising: S1, electromagnetic-thermal coupling field control module detects load vibration; S2, electromagnetic-thermal coupling field control module provides stable DC for the magnetic field array, and the main magnetic circuit generates a steady magnetic field that penetrates the magnetorheological fluid layer, suppressing low-frequency vibration signals through the magnetorheological fluid layer; S3, absorbing residual medium and high frequency vibration signals through the piezoelectric anti-vibration power generation layer; S4, the electromagnetic-thermal coupling field control module provides alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field that penetrates into the eddy current vibration reduction layer, and absorbs high-frequency vibration signals through the eddy current vibration reduction layer.

[0020] It should be further explained that the technical features corresponding to the above embodiments can be combined or replaced with each other to form a new technical solution without conflict.

[0021] Compared with the prior art, the present invention has the following beneficial effects: 1.Full-band vibration suppression capability The device of the present invention achieves full-band coverage suppression from low-frequency vibration to high-frequency resonance and transient impact through a multi-stage vibration reduction structure and an electromagnetic-thermal synergistic mechanism, significantly reducing the vibration amplitude of high-precision equipment (such as robot joints) and improving motion accuracy and stability.

[0022] 2. Energy recovery and self-sustaining energy supply The system of the present invention converts vibration mechanical energy and thermal energy into electrical energy, forming an energy closed-loop utilization system, reducing dependence on external power sources, and at the same time alleviating the energy burden of the heat dissipation system in traditional solutions.

[0023] 3. Electromagnetic-thermal coupling field synergistic optimization Through dynamic modulation of the magnetic field and directional heat management, the coupling contradiction between electromagnetic braking and temperature rise is resolved, which not only suppresses high-frequency resonance but also avoids the degradation of mechanical properties caused by heat accumulation.

[0024] 4. Compact and lightweight design It integrates anti-vibration, energy storage and thermal management functions, realizes multi-physical field coordination in a limited space, and significantly improves the power density and modular integration of robot joints.

[0025] 5. Adaptability to extreme environments Under extreme working conditions such as wide temperature range, high impact, vacuum, etc., it can still maintain stable vibration suppression performance and energy recovery capabilities, meeting the needs of low-temperature scenarios such as aerospace. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of a multi-stage vibration reduction transmission shaft system structure shown in an embodiment of the present invention; Figure 2 A schematic diagram of the structure of a magnetorheological fluid layer according to an embodiment of the present invention; Figure 3 A schematic diagram of the structure of a piezoelectric anti-vibration power generation layer according to an embodiment of the present invention; Figure 4 A schematic diagram of the structure of an eddy current vibration reduction layer shown in an embodiment of the present invention; In the figure: 1-shell; 2-magnetic field array; 3-rotating shaft; 4-magnetorheological fluid layer; 5-piezoelectric anti-vibration power generation layer; 6-eddy current vibration reduction layer; 41-protective film; 42-magnetorheological fluid working chamber; 43-magnetic conductive ring; 51-piezoelectric fiber layer; 52-electrode layer; 53 magnetic shielding layer; 54-thermoelectric module layer; 61-brake disc; 62-wavy stripe groove. DETAILED DESCRIPTION

[0027] The technical solution of the present invention is clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various configurations. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0028] It should be noted that the defects existing in the solutions in the above-mentioned prior art are the results obtained by the inventor after practice and careful research. Therefore, the discovery process of the above-mentioned problems and the solutions proposed in the embodiments of the present application for the above-mentioned problems below should all be the contributions made by the inventor to the present application in the process of invention and creation, and should not be understood as technical contents known to technical personnel in this field.

[0029] In an exemplary embodiment, a full-band anti-shake device is provided. For the reducer of the electromechanical servo system, the working logic of vibration suppression is: load jitter → low-frequency attenuation → residual medium and high frequencies → piezoelectric absorption and dissipation → residual impact → eddy current shock absorption → stable output. Figure 1 It is a schematic diagram of the output shaft structure. As can be seen from the figure, the multi-stage vibration reduction transmission shaft system includes a stationary housing 1, a multi-stage magnetic field array 2 is arranged in the housing 1, and a three-layer anti-shake structure is arranged on the dynamic shaft 3, including a magnetorheological fluid layer 4, a piezoelectric anti-vibration power generation layer 5 and an eddy current vibration reduction layer 6 which are sequentially stacked on the shaft, wherein the magnetorheological fluid layer 4 is used for low-frequency suppression, the piezoelectric anti-vibration power generation layer 5 is used for medium-frequency absorption, and the eddy current vibration reduction layer 6 is used for high-frequency braking.

[0030] According to the mechanical impedance matching theory, the dynamic transfer equation of the multi-stage vibration reduction unit is established: , where Z MR Describe the low-frequency damping characteristics of the magnetorheological fluid layer 4, Z PZT represents the frequency impedance matching in the piezoelectric vibration-proof power generation layer 5, Z Eddy It represents the high-frequency braking torque for constructing the eddy current vibration reduction layer 6. The third-order Butterworth filter network is used to realize the continuous compensation of stiffness in the full frequency range of 0Hz-2000Hz.

[0031] The design of each level structure is described in detail below.

[0032] Reference Figure 2 The magnetorheological fluid layer 4 includes a protective film 41 (inner layer), a spiral magnetorheological fluid working chamber 42 (middle layer) and a magnetic conductive ring 43 (outer layer). The protective film 41 plays a protective and buffering role between the spiral magnetorheological fluid working chamber 42 and the rotating shaft 3, and the magnetic conductive ring 43 can transmit a stable magnetic field to the spiral magnetorheological fluid working chamber 42.

[0033] Furthermore, the protective film 41 is coated on the rotating shaft 3 and may be made of, for example, nano-alumina ceramic coating materials, to play a role of mechanical isolation, thereby avoiding direct contact between the magnetorheological fluid and the rotating shaft 3 and preventing wear of the magnetorheological fluid pipeline caused by friction; another role is to play a thermal buffering role, thereby slowing down the temperature conduction between the rotating shaft 3 and the magnetorheological fluid layer 4.

[0034] The spiral magnetorheological fluid working chamber 42 can extend the flow channel. Compared with the straight groove structure, its spiral path increases the effective shear area by several times, thereby improving the low-frequency damping force. In addition, the magnetic field enhancement efficiency is improved: the spiral direction is orthogonal to the direction of the array magnetic field, the cutting length of the magnetic flux lines is increased, and the magnetic energy utilization rate is significantly improved. The response sensitivity is improved, the spiral flow channel shortens the magnetorheological fluid particle magnetization chain formation time, and the dynamic response bandwidth is relatively high.

[0035] The magnetic ring 43 can be made of, for example, 1J22 Permalloy formed by powder metallurgy sintering, and a plurality of groups (for example, 12 groups) of radial magnetic poles are provided on the inner wall to make the magnetic field uniform. The pole tooth structure is adopted to make the magnetic field strength at the center of the magnetorheological fluid working chamber 42 reach several times higher than that of the traditional annular magnetic conductor; in addition, the magnetic thermal decoupling can be optimized, the hysteresis loss can be reduced, and the viscosity attenuation of the magnetorheological fluid caused by temperature rise can be avoided.

[0036] The effects brought by the magnetorheological fluid layer 4 design are as follows: 1. Low frequency vibration suppression mechanism For example, when low-frequency vibration of 0 Hz-200 Hz is transmitted, the magnetorheological fluid forms a solid-state chain structure under the magnetic field of the magnetic ring 43, and dissipates energy through viscoplastic deformation. The magnetorheological fluid layer 4 generates a damping force (i.e., a force that suppresses vibration) F during the vibration process. 阻尼 =τ y A, where τ y is the dynamic yield stress of the magnetorheological fluid, A is the effective shear area, and since the magnetorheological fluid working chamber 42 is spiral, the effective shear area A is greatly increased, making the damping force F 阻尼 Increase, effectively improving the vibration attenuation rate.

[0037] 2. Magnetic field-flow field coupling optimization The spiral flow channel and the array magnetic field work together to make the magnetic flux lines distributed in a gradient on the flow channel cross section, generating a directional shear stress gradient and avoiding energy feedback caused by local eddy currents.

[0038] 3. Structural protection and long life The protective film 41 effectively reduces the wear of the magnetorheological fluid working chamber and increases the overall lifespan.

[0039] Reference Figure 3 The piezoelectric anti-vibration power generation layer 5 is designed for medium frequency, and converts vibration energy into electrical energy by absorbing it. It is mainly composed of a piezoelectric fiber layer 51, an electrode layer 52, a magnetic shielding layer 53, and a thermoelectric module layer 54. The electromagnetic shielding layer 53 is used between the magnetorheological fluid layer 4 and the eddy current vibration reduction layer 6 for magnetic protection. The thermoelectric module layer 54 and the copper disk of the eddy current vibration reduction layer 6 are in direct contact with each other for heat conduction, and the heat is converted into electrical energy. The piezoelectric power generation and thermal power generation are stored, and the heater can be powered in a low temperature state to ensure that the system can work reliably in a low temperature environment.

[0040] Furthermore, the piezoelectric fiber layer 51 converts mechanical vibration energy into electrical energy through the inverse piezoelectric effect, and at the same time applies a reverse electric field to suppress residual vibration. For example, PZT-5H piezoelectric fibers can be used and wound around the surface of the magnetic conductive ring 43 to form a strain acquisition network. The electrode layer uses three-dimensional interdigitated electrodes to cover the surface of the piezoelectric fiber to maximize the charge collection area, and integrates a high-frequency rectifier circuit to convert the alternating current output by the piezoelectric fiber into direct current, and converges with the electric energy of the thermoelectric module layer 54 to the controller for storage. The magnetic shielding layer 53 adopts a multi-layer composite structure, such as an outer layer of stainless steel and an inner layer filled with alloy foil to form a two-stage magnetic isolation. It effectively blocks the magnetic interference between the magnetorheological fluid layer 4 and the eddy current vibration reduction layer 6. The thermoelectric module layer 54 is a double-layer structure, the first layer is a heat-conducting layer, and the second layer is a power generation layer, wherein the first layer is an aluminum nitride ceramic substrate that is in direct contact with the copper disk of the eddy current vibration reduction layer 6, and the second layer is an additional power generation unit such as Superlattice thermocouple.

[0041] In order to improve the thermal conductivity of the heat-conducting layer, it is necessary to reduce the thermal resistance of the heat-conducting layer. The ways to reduce the thermal resistance include increasing the effective contact area, reducing the air thermal resistance in the contact gap, and optimizing the heat flow path. In this embodiment, a micro-bump array structure is arranged on the contact interface between the aluminum nitride ceramic substrate and the copper disk of the eddy current vibration reduction layer 6. The micro-bump array structure is integrated with the aluminum nitride ceramic substrate and is composed of periodically arranged tiny protrusions (micro-bumps). The size is usually in the micron level, such as a diameter of 10μm-100μm and a height of 1μm-10μm. The shape of the protrusion can be hemispherical, cylindrical or conical according to the specific process optimization. Through the protrusion structure, the effective contact area between the eddy current vibration reduction layer 6 and the aluminum nitride ceramic substrate is increased, so as to reduce the thermal resistance and improve the thermal conductivity of the heat-conducting layer.

[0042] Reference Figure 4 The eddy current damping layer 6 is designed for high frequency, and its brake disc 61 is made of light metal such as memory alloy (conductivity 58MS / m, density 4.5g / cm³). In order to increase the magnetic induction or cutting magnetic field area, a wave-shaped stripe groove 62 is designed along the axial direction of the brake disc 61, which increases the magnetic conduction area on the one hand and the heat absorption area on the other hand, which is conducive to the thermal induction power generation of the thermoelectric module layer in contact with it.

[0043] Furthermore, compared with the traditional flat disk, the wavy striped grooves 62 increase the length of the magnetic field cutting path and improve the effective heat dissipation area. The first layer structure of the thermoelectric module layer 54 adopts an aluminum nitride ceramic layer (thermal conductivity 180W / mK), which is attached between the memory alloy brake disk 61 and the power generation unit of the thermoelectric module layer 54 to achieve directional conduction of Joule heat generated by thermal eddy current braking, which is conducted to the power generation layer of the thermoelectric module layer 54 through the aluminum nitride ceramic layer, which is beneficial to the eddy current heat conduction and is used for power generation.

[0044] Based on the structure of the above multi-stage vibration reduction transmission shaft system, it can be known that the vibration transmission path is: The vibration energy passes through the magnetorheological fluid layer 4 (low-frequency suppression), the piezoelectric anti-vibration power generation layer 5 (medium-frequency absorption) and the eddy current vibration reduction layer 6 (high-frequency braking) in sequence, forming a full-band coverage, and forming a progressive energy conversion logic of mechanical energy attenuation → electrical energy conversion → thermal energy dissipation.

[0045] Furthermore, the electromagnetic-thermal coupling field control module is connected to the multi-stage vibration reduction transmission shaft system through a magnetic field array (such as a Halbach array); the electromagnetic-thermal coupling field control module is used to detect vibration signals and provide different types of currents to the magnetic field array according to the frequency of the vibration signal to achieve dual magnetic circuit multiplexing; different types of currents are provided to the magnetic field array according to the frequency of the vibration signal to achieve dual magnetic circuit multiplexing.

[0046] Specifically, the dual magnetic circuit decoupling is achieved through the magnetoresistance network analysis method, and the magnetic circuit distribution of the Halbach permanent magnet array is designed based on the Maxwell stress tensor theory: The formula represents the magnetic field intensity at a radius of r and an angle of θ in the polar coordinate system, is the reference magnetic field intensity, r is the radial distance from a point in space to the center, R represents the radius of the magnetic ring, n is the number of magnetic pole pairs, in this embodiment n=6 corresponds to 12 poles arranged circumferentially (the number of n can be selected according to actual conditions). Dual magnetic circuit decoupling is achieved through the magnetic resistance network analysis method: the steady field of the main magnetic circuit penetrates the magnetorheological fluid layer 4, and the alternating magnetic field of the auxiliary magnetic circuit penetrates the eddy current vibration reduction layer 6, thereby improving the utilization rate of the magnetic field.

[0047] The vibration signal is detected by sensors such as acceleration and the frequency is determined in the control system, and energy saving is achieved through frequency division control. When the vibration signal is judged to be low frequency (such as <200Hz), the electromagnetic-thermal coupling field control module provides a stable direct current to the magnetic field array 2, so that the magnetic field generates a steady magnetic field acting on the magnetorheological fluid. When the vibration signal is judged to be high frequency (such as >1000Hz), the electromagnetic-thermal coupling field control module provides an alternating current to the magnetic field array 2, so that the magnetic field is alternating and combined with the special wavy stripe groove 62 on the brake disc 61, the magnetic conductive area is further increased, the change of the magnetic field is cut, and the eddy current braking is driven.

[0048] In another exemplary embodiment, a full-band anti-shake system is provided, including a multi-stage vibration reduction transmission shaft system, an electromagnetic-thermal coupling field control module and a composite energy recovery module, to construct a three-level collaborative control architecture of "frequency domain decoupling-field collaborative control-energy closed loop", forming a theoretical closed loop from vibration suppression to energy circulation. Specifically, the electromagnetic-thermal coupling field control module realizes the joint control of magnetic and thermal fields through the Halbach magnetic field multiplexing technology. First, the vibration signal is collected by the sensor and the frequency is determined. When the vibration signal is judged to be low frequency (such as <200Hz), the electromagnetic-thermal coupling field control module provides a stable direct current for the magnetic field array 2, so that the magnetic field generates a steady magnetic field, and the steady magnetic field acts on the magnetorheological fluid layer 4 through the magnetic conductive ring 43; the medium frequency signal (200Hz-1000 Hz) enters the piezoelectric anti-vibration power generation layer 5 for piezoelectric power generation; when it is judged that the vibration signal is high frequency (such as> 1000Hz), the electromagnetic-thermal coupling field control module provides alternating current to the magnetic field array 2 to generate an alternating magnetic field, and the alternating magnetic field acts on the eddy current vibration reduction layer 6. The heat energy generated by the eddy current vibration reduction layer 6 is transmitted to the thermoelectric module layer 54 of the piezoelectric anti-vibration power generation layer 5 for power generation. At this point, the multi-stage vibration reduction transmission shaft system converts mechanical vibration and heat energy into electrical energy, and the output electrical energy is recovered by the composite energy recovery module and stored by energy storage capacitors, etc.; the electrical energy stored in the composite energy recovery module is used for self-heating (such as PTC heating) at low temperatures (such as below -20°C), and the excess electrical energy is used to power the electromagnetic-thermal coupling field control module or other systems. In addition, the heat energy generated by the electromagnetic-thermal coupling field control module can also be transmitted to the piezoelectric anti-vibration power generation layer 5 for temperature difference power generation. In this way, by integrating the energy path of vibration mechanical energy → piezoelectric energy + eddy current thermal energy → temperature difference electric energy → energy storage and self-heating functional system, a closed-loop utilization of energy is formed, and an energy redistribution logic chain based on temperature feedback is constructed, reducing dependence on external power supplies and alleviating the energy burden of traditional cooling systems.

[0049] In another exemplary embodiment, based on the same inventive concept as the device, a full-band anti-jitter method is provided, the method comprising: S1, electromagnetic-thermal coupling field control module detects load vibration; S2, electromagnetic-thermal coupling field control module provides stable DC for the magnetic field array, and the main magnetic circuit generates a steady magnetic field that penetrates the magnetorheological fluid layer, suppressing low-frequency vibration signals through the magnetorheological fluid layer; S3, absorbing residual medium and high frequency vibration signals through the piezoelectric anti-vibration power generation layer; S4, the electromagnetic-thermal coupling field control module provides alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field that penetrates into the eddy current vibration reduction layer, and absorbs high-frequency vibration signals through the eddy current vibration reduction layer.

[0050] Through the multi-level vibration energy dissipation structure and electromagnetic-thermal synergistic mechanism, full-band coverage suppression from low-frequency vibration to high-frequency resonance and transient impact is achieved, which significantly reduces the vibration amplitude and improves motion accuracy and stability.

[0051] The above specific implementation methods are detailed descriptions of the present invention. It cannot be determined that the specific implementation methods of the present invention are limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions and substitutions can be made without departing from the concept of the present invention, which should be regarded as belonging to the protection scope of the present invention.

Claims

1. A full-band anti-shake device, characterized in that: include: A multi-stage vibration reduction transmission shaft system, comprising a magnetorheological fluid layer, a piezoelectric vibration reduction power generation layer and an eddy current vibration reduction layer sequentially superimposed on a rotating shaft; the magnetorheological fluid layer is used for low-frequency suppression, the piezoelectric vibration reduction power generation layer is used for medium-frequency absorption, and the eddy current vibration reduction layer is used for high-frequency braking; The electromagnetic-thermal coupling field control module is connected to the multi-stage vibration reduction transmission shaft system through a magnetic field array; the electromagnetic-thermal coupling field control module is used to detect the vibration signal and provide different types of currents to the magnetic field array according to the frequency of the vibration signal; the different types of currents provided to the magnetic field array according to the frequency of the vibration signal include: The dual magnetic circuit decoupling is achieved through the magnetoresistive network analysis method. When the vibration signal is low frequency, a stable direct current is provided to the magnetic field array, and the main magnetic circuit generates a steady magnetic field to penetrate the magnetorheological fluid layer. When the vibration signal is high frequency, an alternating current is provided to the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field to penetrate into the eddy current vibration reduction layer.

2. A full-band anti-shake device according to claim 1, characterized in that: The magnetorheological fluid layer includes a protective film, a magnetorheological fluid working chamber and a magnetic conductive ring from the inside to the outside. The magnetorheological fluid working chamber is spiral-shaped, and the magnetic conductive ring adopts a pole tooth structure.

3. A full-band anti-shake device according to claim 2, characterized in that: The material of the magnetic conductive ring is 1J22 Permalloy.

4. The full-band anti-shake device according to claim 1, characterized in that: The piezoelectric vibration-proof power generation layer includes a piezoelectric fiber layer, an electrode layer, a magnetic shielding layer and a thermoelectric module layer which are connected in sequence, and the thermoelectric module layer is connected to the eddy current vibration reduction layer.

5. A full-band anti-shake device according to claim 4, characterized in that: The material of the piezoelectric fiber layer is PZT-5H piezoelectric fiber, the electrode layer adopts a three-dimensional interdigitated electrode, and the magnetic shielding layer adopts a multi-layer composite structure; the thermoelectric module layer is a double-layer structure, wherein the first layer structure is a heat-conducting layer, the heat-conducting layer is connected to the eddy current vibration reduction layer, and the second layer structure is a power generation layer.

6. A full-band anti-shake device according to claim 5, characterized in that: The heat conducting layer is made of aluminum nitride ceramic material, and the power generation layer is made of Superlattice thermocouple.

7. The full-band anti-shake device according to claim 1, characterized in that: The eddy current vibration reduction layer comprises a brake disc, which is made of light metal material and is provided with wave-shaped stripe grooves in the axial direction.

8. A full-band anti-shake system, comprising a full-band anti-shake device according to any one of claims 1 to 7, characterized in that: It also includes a composite energy recovery module, which is used to capture the electrical energy generated in the multi-stage vibration reduction transmission shaft system. The electrical energy captured by the composite energy recovery module is used for low-temperature self-heating and for powering the electromagnetic-thermal coupling field control module.

9. A full-band anti-shake system according to claim 8, characterized in that: The heat energy generated by the electromagnetic-thermal coupling field regulation module is transmitted to the piezoelectric anti-vibration power generation layer.

10. A full-band anti-shake method, based on a full-band anti-shake device according to any one of claims 1 to 7, characterized in that: The method comprises: S1, electromagnetic-thermal coupling field control module detects load vibration; S2, electromagnetic-thermal coupling field control module provides stable DC for the magnetic field array, and the main magnetic circuit generates a steady magnetic field that penetrates the magnetorheological fluid layer, suppressing low-frequency vibration signals through the magnetorheological fluid layer; S3, absorbing residual medium and high frequency vibration signals through the piezoelectric anti-vibration power generation layer; S4, the electromagnetic-thermal coupling field control module provides alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field that penetrates into the eddy current vibration reduction layer, and absorbs high-frequency vibration signals through the eddy current vibration reduction layer.

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