Electric control valve for semiconductor gluing equipment and assembling method of electric control valve

Abstract

Relates to an electric control valve for semiconductor gluing equipment and an assembling method of the electric control valve. The electric control valve comprises a pre-assembled inner box which is arranged in the dustproof shell and is provided with a driving assembly and an elastic pre-tightening module in a pre-assembled mode, a sealing membrane which is provided with a semi-circular-ring-shaped arc-shaped thin film part and an inverted-cone-shaped sealing boss and is used for sealing a longitudinal valve port, and a valve seat which is arranged at the lower end of the longitudinal valve port, connected with an inlet flow channel and provided with an inner arc spherical surface. According to the electric adjusting valve, the adjusting lead screw is driven by the stepping motor to rotate so as to achieve accurate lifting motion of the diaphragm connecting shaft, the elastic pre-tightening module provides stable pre-tightening force for the diaphragm connecting shaft, and the cooling space in the dustproof shell effectively reduces the operating temperature of the stepping motor; high-precision fluid control can be achieved, and meanwhile good sealing performance and long-time use durability are achieved. The problems that in the prior art, sealing leakage occurs, a flow channel is polluted, a membrane is prone to being damaged, and environmental adaptability is poor are solved, high-precision, long-service-life and zero-pollution flow control is achieved, and the technical effect of being applied to semiconductor gluing equipment is achieved.

Description

Technical Field

[0001] The present invention relates to the field of fluid control devices in semiconductor coating equipment (fluids such as photoresist, developer, organic solvent and other chemical media used in semiconductor processing), and in particular to an electric regulating valve used in semiconductor coating equipment and an assembly method thereof. Background Art

[0002] In the field of semiconductor manufacturing, the performance of flow control equipment directly affects the quality and production efficiency of products. With the growing demand for high-purity specific chemical fluid processing in the semiconductor manufacturing industry, the market urgently needs flow control devices with higher precision and reliability to cope with complex process conditions. Compared with traditional industrial valves, this type of control valve suitable for semiconductor coating equipment not only needs to achieve precise adjustment, but also needs to take into account corrosion resistance to adapt to a variety of chemical substances, while maintaining stability during long-term operation, resulting in more stringent specifications. In specific comparison, in terms of cleanliness and vacuum adaptability, traditional industrial valves do not have strict particle control requirements, and O-rings are mostly used for sealing, which may have a risk of trace leakage. Traditional industrial valves have no vacuum environment adaptation requirements. Valve devices suitable for semiconductor coating equipment must comply with ISO Class 1 clean room standards, and the number of particles above 0.1μm per cubic meter of air must be ≤10, and the valve body must withstand 10 -6 Torr vacuum environment, total volatile organic compound TVOC <1 μg / m³; in terms of flow control accuracy and response speed, the flow accuracy of traditional industrial valves is usually ±1%~5% FS, and the response time is at the level of 100~500 ms. The flow control accuracy of valve devices suitable for semiconductor coating equipment must reach below ±0.5% FS (full scale), the response time should be ≤50 ms, and the repeatability accuracy should be ≤0.05% FS; in terms of valve switch durability, the operating life of traditional industrial valves is usually 100,000 to 500,000 cycles, and the valve devices suitable for semiconductor coating equipment need to withstand a mechanical operating life of ≥1 million cycles; in terms of material compatibility and corrosion resistance, traditional industrial valves only need to meet conventional acid and alkali medium tolerance, and there is no ultra-low ion pollution control requirement. Electric control valves suitable for semiconductor coating equipment should be able to withstand chemical media such as photoresist, developer, organic solvents, etc. Parts in contact with fluids such as photoresist need to avoid metal ion precipitation, and ion pollution needs to be controlled to ppb level.

[0003] For such strict application occasions, the commonly adopted method is to use stepper motors to complete the necessary fluid volume adjustment function. Specifically, common practices include but are not limited to using products with traditional surface contact seals, relying on tightening force to ensure tightness and implement flow changes; however, frequent use of stepper motors is not only prone to heat but also produces airborne particles, which adversely affects the cleanliness and vacuum adaptability of semiconductor coating equipment.

[0004] Utility model patent number CN203560551U discloses an electrically controlled gas flow regulating valve, including a valve body and a regulating mechanism, the valve body includes an air inlet nozzle and an air outlet nozzle, the regulating mechanism includes a stepper motor and an adjusting rod, and the output shaft of the stepper motor is connected to the top of the adjusting rod. Therefore, a stepper motor is used to drive the adjusting rod and the anti-leak rubber plug, and the precise control of the flow rate is achieved through threaded connection. The characteristics of the related technology are simple structure and stable regulation. It not only lacks protective measures for highly corrosive environments, but also does not meet the cleanliness and vacuum adaptability of semiconductor coating equipment.

[0005] Utility model patent number CN2556449Y relates to an electric flow control valve for heating systems, including a valve body, an upper cover, a lower cover, an automatic regulating valve installed in the lower port of the valve body to automatically balance and set the flow, an regulating valve seat installed between the water inlet chamber and the water outlet chamber, a regulating valve stem and a regulating valve disc, and an electro-hydraulic actuator on the upper cover, whose drive shaft is connected to the regulating valve stem through a coupling, and the regulating valve stem is driven by the electro-hydraulic actuator to achieve automatic flow setting. The advantage of the related technology lies in automatic control, but the structure is relatively complex and does not meet the high cleanliness requirements of semiconductor glue coating equipment.

[0006] Invention patent publication number CN116097027A discloses a flow control valve that inhibits the mixing of dust particles into the controlled fluid, maintains a high level of cleanliness of the controlled fluid, and can control a small flow rate at high speed. The flow control valve has a valve block, a diaphragm, and an actuator, and uses the small pressure that the diaphragm receives from the actuator to make the fluid flowing into a flow path formed in the upstream part of the valve block pass through the gap between the inner side surface of the valve block and the inner side surface of the diaphragm, and discharge the fluid from another flow path formed in the downstream part of the valve block. The peripheral portion of the diaphragm is welded to the upper end surface of the valve block to form an integrated whole, and there is no step difference or gap between the inner peripheral surface of the diaphragm and the inner peripheral surface of the valve block at the welded portion, and the inner peripheral surface of the diaphragm is flush with the inner peripheral surface of the valve block. The focus is on the seamless connection between the diaphragm and the valve block to reduce dust particle pollution and is suitable for high-cleanliness environments. In related technologies, the lower end of the longitudinal valve port is connected to the inner end of the outlet flow channel. The overall valve structure lacks designs for frequent switching and anti-fatigue, and does not meet the high valve switching durability requirements of semiconductor coating equipment. Summary of the invention

[0007] The main purpose of the present invention is to provide an electric regulating valve for semiconductor coating equipment. The main improvement is that it is suitable for the vacuum adaptability, high flow control accuracy and fast response speed, and valve switch durability required by semiconductor coating equipment.

[0008] The second main purpose of the present invention is to provide an assembly method of an electric regulating valve for semiconductor coating equipment, and the assembled electric regulating valve can be suitable for semiconductor coating equipment.

[0009] The main purpose of the present invention is achieved through the following technical solutions, which provide an electric regulating valve for semiconductor glue coating equipment, comprising: The preassembled inner box is accommodated in a dustproof shell, and the preassembled inner box is pre-assembled with a driving component and an elastic pre-tightening module; the driving component comprises a stepping motor arranged on the preassembled inner box, an adjusting screw rod and a diaphragm connecting shaft arranged in the preassembled inner box, the stepping motor drives the adjusting screw rod to rotate in the preassembled inner box, and the first part of the diaphragm connecting shaft is lifted and moved in a guiding and sliding manner in the hollow active space of the preassembled inner box; the two ends of the elastic pre-tightening module elastically contact the first part of the diaphragm connecting shaft and the inner limiting part of the preassembled inner box in the hollow active space, respectively, so as to apply a vertical downward pre-tightening force to the diaphragm connecting shaft; a cooling space is formed between the preassembled inner box and the dustproof shell; The sealing diaphragm has an arc-shaped film portion and an inverted cone-shaped sealing boss integrally provided at the center and protruding downward, wherein the arc-shaped film portion is a semicircular ring shape with a concave bottom to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke; the center of the sealing boss is connected to the second portion of the diaphragm connecting shaft protruding from the pre-assembled inner box; A valve seat, with a longitudinal valve port, an inlet flow channel and an outlet flow channel provided inside; the valve seat is provided with a mounting hole aligned with the longitudinal valve port, and the dustproof housing is installed on the mounting hole; the lower end of the longitudinal valve port is connected to the inner end of the inlet flow channel, and the inner end of the inlet flow channel is formed as a continuous and smooth inner arc spherical surface to form a flow channel without dead space; wherein the inclined side wall of the sealing boss is used to close the inner wall of the longitudinal valve port, the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel, and the sealing boss can extend into or out of the longitudinal valve port.

[0010] The implementation principle of this basic structure example is to use the pre-assembled inner box of the pre-assembled elastic pre-tightening module, the cooling space formed between the pre-assembled inner box and the dustproof shell, the inverted cone-shaped sealing boss of the sealing diaphragm to close the longitudinal valve port with the inclined side wall, and the arc-shaped film part of the sealing diaphragm aligned with the annular groove connected to the inner end of the outlet flow channel, so as to achieve high-precision flow regulation and reliable sealing performance of the semiconductor coating equipment for the regulating valve. Specific effects include: 1) A drive assembly and an elastic preload module are preassembled in a preassembled inner box accommodated in a dustproof housing, a stepper motor is arranged on the preassembled inner box, and a cooling space is formed between the preassembled inner box and the dustproof housing to prevent the valve driving operation of the stepper motor from affecting the cleanliness of the external environment of the dustproof housing, which meets the vacuum adaptability of low volatile organic compounds; 2) Through the combined design of the arc-shaped film part of the sealing diaphragm and the inverted cone-shaped sealing boss, the inner wall of the longitudinal valve port of the valve seat is closed with the inclined side wall of the sealing boss to form a short-tube annular belt-shaped contact seal. The sealing boss can extend into or out of the longitudinal valve port, eliminating eddy currents and greatly improving the sealing reliability, effectively solving the problem of easy leakage of traditional circular ring plane contact seals; 3) The stepper motor located at the top of the pre-assembled inner box drives the adjusting screw to rotate, driving the diaphragm connecting shaft to move up and down, realizing the precise control of the distance between the sealing boss and the longitudinal valve port, thereby achieving precise flow regulation; 4) The elastic preload module in the pre-assembled box combined with the aforementioned points 2 and 3 applies a vertical downward preload force to the diaphragm connecting shaft to ensure that the sealing state remains stable in a vibration environment. The flow control accuracy can reach less than ±0.5% FS (full scale), the response time is ≤50 ms, and the repeatability accuracy is ≤0.05% FS; 5) The inner end of the inlet flow channel of the valve seat connected to the longitudinal valve port is designed to be a continuous and smooth inner arc spherical surface, forming a flow channel without dead zone, avoiding fluid residue and contamination, and improving the cleanliness and service life of the equipment; 6) The arc-shaped film portion of the sealing diaphragm provides a deformation stroke of the sealing boss that is 1.2 to 1.5 times greater than the effective stroke of the diaphragm connecting shaft, thereby preventing the arc-shaped film portion from being overstretched, and the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel, which significantly improves the fatigue resistance of the sealing diaphragm and extends the service life of the electric control valve. The electric control valve can withstand a mechanical operation life of ≥ 1 million cycles.

[0011] In a preferred example, the present invention can be further configured as follows: the rod diameter of the first portion of the diaphragm connecting shaft is larger than the rod diameter of the second portion, a photoelectric sensing door is provided in the dustproof housing, and the first portion of the diaphragm connecting shaft is connected to a photoelectric indicator rod protruding laterally from the hollow active space, and as the diaphragm connecting shaft rises until the photoelectric sensing door senses the arrival of the photoelectric indicator rod, the upper dead point of the effective stroke of the sealing boss is determined.

[0012] By adopting the preferred technical features of the above structure, the design that the rod diameter of the first part of the diaphragm connecting shaft is larger than the rod diameter of the second part can form a significant structural difference, which is convenient for accurately identifying and installing the elastic preload module during the assembly process. The photoelectric sensing door in the dustproof housing cooperates with the photoelectric indicator rod connected to the first part of the diaphragm connecting shaft. When the photoelectric indicator rod rises to the predetermined upper dead point along with the diaphragm connecting shaft, the photoelectric sensing door in the dustproof housing is triggered to send a photoelectric sensing signal, cut off the regulating power supply, and the valve is fully opened. When the diaphragm connecting shaft drops to the predetermined lower dead point, the continuous sealing force provided by the elastic preload module is detected, and the photoelectric sensing door feeds back a closing signal, cuts off the regulating power supply, and closes the valve, thereby realizing the accurate detection of the upper dead point of the effective stroke of the sealing boss, ensuring that the position feedback in the valve opening state is accurate and reliable, and improving the automation control level and operation stability of the entire electric control valve.

[0013] In a preferred example, the present invention may be further configured as follows: an outer surface of the dustproof housing is provided with a vent hole connected to the cooling space for circulating cooling of the stepper motor.

[0014] By adopting the preferred technical features of the above structure, the ventilation holes are connected to the cooling space to achieve effective heat dissipation of the stepper motor. Specifically, the cooling air is connected to the cooling space through the ventilation holes opened on the outer surface of the dustproof housing, taking away the heat generated by the stepper motor during operation, thereby ensuring the stability and reliability of the stepper motor under long-term high-load operation, thereby not only extending the service life of the stepper motor and preventing dust from falling off when the stepper motor is driven, but also indirectly improving the working efficiency and performance stability of the entire electric control valve.

[0015] In a preferred example, the present invention can be further configured as follows: the vent includes an air inlet and an air exhaust hole, and the outer surface of the dustproof shell is also provided with a wiring hole to supply power to the stepper motor, wherein the wiring hole and the air inlet are located in a shell sub-cavity of the dustproof shell, and the exhaust hole is located at a position where the main body of the dustproof shell is above the shell sub-cavity.

[0016] By adopting the preferred technical features of the above structure, the air inlet, exhaust and wiring holes of the dustproof housing are used to achieve effective heat dissipation of the stepper motor, isolation to prevent dust leakage and internal electrical connection. The air inlet and exhaust holes form an air flow path for cooling the stepper motor. The wiring holes and the air inlet are concentrated in the housing sub-cavity. The housing sub-cavity blocks the direct air intake from the air inlet to the pre-assembled inner box, and the exhaust holes are arranged at the upper part of the dustproof housing body, which optimizes the air flow path, enables line connection and prevents dust from sinking into the key component area, thereby improving the reliability and safety of the overall equipment.

[0017] In a preferred example, the present invention may be further configured as follows: the material of the sealing diaphragm is PTFE (polytetrafluoroethylene); and the surface roughness of the inner arc spherical surface of the inlet flow channel is Ra≤0.1 μm.

[0018] By adopting the preferred technical features of the above structure, the PTFE material of the sealing diaphragm can significantly improve the corrosion resistance of the regulating valve. The PTFE material has excellent chemical stability and can effectively resist the corrosive substances that may exist in high-purity chemicals such as photoresist and ultrapure water, thereby extending the service life of the sealing boss; the PTFE material has self-lubricating properties, which can reduce the friction resistance between the sealing boss and the valve seat during the opening and closing process, further improving the reliability and sensitivity of the action; the PTFE material avoids the risk of peeling caused by the use of PTFE coating while ensuring sufficient protection. The surface roughness of the inner arc spherical surface of the inlet flow channel is Ra≤0.1μm, which effectively reduces the friction resistance during the flow of the liquid medicine, improves the fluidity and stability of the fluid, eliminates eddy currents and dead water areas in the flow channel, avoids bacterial growth and chemical residue problems, and significantly improves the cleanliness and service life of semiconductor coating equipment, meeting the strict requirements for high-purity chemicals and ultrapure water fluid processing in the semiconductor manufacturing process.

[0019] In a preferred example, the present invention can be further configured as follows: the electric regulating valve also includes a corrosion-resistant bottom plate, which is arranged at the bottom of the valve seat; the corrosion-resistant bottom plate, the valve seat and the dust-proof housing are combined through multiple connecting rods, multiple bottom plate anti-corrosion plugs are arranged on the corrosion-resistant bottom plate and sealed at the exposed ends of the connecting rods, and multiple corrosion-resistant rubber rings are arranged at the bottom of the corrosion-resistant bottom plate and in the shell gap between the bottom of the valve seat and the top of the corrosion-resistant bottom plate.

[0020] By adopting the preferred technical features of the above structure, the corrosion-resistant bottom plate arranged at the bottom of the valve seat is used to enhance the structural stability of the entire electric control valve, and the corrosion-resistant bottom plate, valve seat and dustproof housing are firmly connected together through multiple connecting rods to form an integrated assembly structure, thereby enhancing the overall anti-seismic ability and reliability of the valve. Multiple bottom plate anti-corrosion plugs are sealed at the exposed end of the connecting rod, effectively preventing corrosive liquids from penetrating into the interior along the connection parts, ensuring the long-term stable operation of the electric control valve in harsh chemical environments. Multiple corrosion-resistant rubber rings are respectively filled in the bottom of the corrosion-resistant bottom plate and the shell gap between the bottom of the valve seat and the top of the corrosion-resistant bottom plate for the connecting rod to pass through, further enhancing the sealing performance, and achieving the IP67 protection level, preventing the intrusion of external pollutants, and meeting the semiconductor industry's requirements for high cleanliness and zero leakage.

[0021] In a preferred example, the present invention can be further configured as follows: a guide groove wall is provided in the hollow movable space of the pre-assembled inner box, and a guide side cooperating with the guide groove wall is provided at the first portion of the diaphragm connecting shaft to limit the rotational freedom of the diaphragm connecting shaft, thereby ensuring that the diaphragm connecting shaft can only be lifted and moved in the vertical direction.

[0022] By adopting the preferred technical features of the above structure, the combination of the guide groove wall and the guide side effectively limits the rotational freedom of the diaphragm connecting shaft, ensuring that it can only be lifted and lowered in the vertical direction, which avoids the problem of poor sealing or transmission failure caused by accidental rotation of the diaphragm connecting shaft during operation, and significantly improves the stability and reliability of the equipment. At the same time, this design simplifies the complexity of the transmission system, reduces the difficulty of assembly, and is conducive to improving production efficiency and reducing maintenance costs.

[0023] The second main purpose of the present invention is achieved by the following technical solution, which provides an assembly method of an electric regulating valve for semiconductor glue coating equipment, comprising the following steps: S1. Provide a preassembled inner box, wherein an adjusting screw, a diaphragm connecting shaft and an elastic pre-tightening module are arranged in the preassembled inner box, and a stepping motor is arranged on the preassembled inner box, and the stepping motor is used to drive the adjusting screw to rotate in the preassembled inner box, so that the first part of the diaphragm connecting shaft can be lifted and moved in the hollow active space of the preassembled inner box in a sliding manner; the two ends of the elastic pre-tightening module elastically contact the first part of the diaphragm connecting shaft and the inner limit part of the preassembled inner box in the hollow active space, respectively, so as to apply a vertical downward pre-tightening force to the diaphragm connecting shaft; S2, accommodating the preassembled inner box in a dustproof outer shell, and forming a cooling space between the preassembled inner box and the dustproof outer shell; S3, installing a sealing diaphragm at the bottom of the dustproof housing; wherein the sealing diaphragm has an arc-shaped film portion and an inverted cone-shaped sealing boss integrally provided at the center and protruding downward, the arc-shaped film portion is a semicircular ring shape with a concave bottom, so as to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke; the center of the sealing boss is connected to the second portion of the diaphragm connecting shaft protruding from the pre-assembled inner box; S4. Combining the valve seat with the dustproof housing, the interior of the valve seat is provided with a longitudinal valve port, an inlet flow channel and an outlet flow channel, the valve seat is provided with a mounting hole aligned with the longitudinal valve port, and the dustproof housing is installed on the mounting hole; the lower end of the longitudinal valve port is connected to the inner end of the inlet flow channel, and the inner end of the inlet flow channel is formed as a continuous and smooth inner arc spherical surface to form a flow channel without dead zone; wherein the inclined side wall of the sealing boss is used to close the inner wall of the longitudinal valve port, and the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel; the sealing boss can extend into or out of the longitudinal valve port.

[0024] This basic method example achieves efficient assembly of electric control valves, ensuring that the components work together to achieve high-precision flow control and excellent sealing performance, with the following specific results: 1. In step S1, the drive assembly and the elastic preload module are pre-integrated in the pre-assembled inner box, so that the diaphragm connecting shaft obtains precise vertical movement capability and appropriate preload force, and the elastic preload module absorbs possible vibrations. Moreover, since they are in the pre-assembled inner box, the elastic preload module and the drive assembly have consistent displacement, which effectively solves the problem of sealing failure caused by vibration in the traditional structure and improves the overall stability and reliability of the equipment; 2. In step S2, the preassembled inner box is placed in the dustproof housing to form a cooling space that can cool and dust-proof the stepper motor, which not only protects the internal precision parts from being affected by external dust and other impurities, but also removes heat through air circulation, ensuring that the stepper motor and other components operate stably for a long time at a suitable temperature; 3. In step S3, a combined structure of an arc-shaped film portion with a large deformation stroke and an inverted cone-shaped sealing boss is assembled. The deformation stroke of the sealing boss is limited by the arc-shaped film portion to be 1.2 to 1.5 times the effective stroke of the diaphragm connecting shaft, which greatly improves the service life and flexibility of the sealing diaphragm as a sealing component, and is particularly suitable for application scenarios that require frequent valve switching actions; 4. In step S4, the internal flow channel of the valve seat, especially the inner end of the inlet flow channel (formed as a continuous and smooth inner arc spherical surface), is designed to have no dead zone to avoid the risk of contamination or blockage caused by fluid stagnation, which is particularly important for processing high-purity chemicals; at the same time, the smooth transition geometry also helps to improve fluid dynamics and reduce energy loss; 5. During the assembly process from step S1 to step S4, the operating specifications of each key step are clearly defined to control product quality from the source, facilitate subsequent maintenance and repair, and lay a solid foundation for realizing an automated production line.

[0025] In a preferred example, the present invention can be further configured as follows: Step S4 includes: A multi-layer corrosion-resistant rubber ring is installed between the valve seat and the dustproof housing and is locked by a quick-release clamp; An anti-corrosion bottom plate is installed at the bottom of the valve seat, and the anti-corrosion bottom plate, the valve seat and the dustproof housing are fixedly connected by a plurality of connecting rods; Install a bottom plate anti-corrosion plug at the exposed end of the connecting rod to ensure the sealing and corrosion resistance of the connecting part; The assembly method further comprises: S5. Photoelectrically calibrate the top dead center of the effective stroke of the sealing boss of the sealing diaphragm.

[0026] By adopting the preferred technical features of the above method, step S4 achieves the following effects: 1. Install multiple layers of corrosion-resistant rubber rings between the valve seat and the dustproof housing and lock them with quick-release clamps, which significantly improves the sealing performance of the interface and prevents leakage caused by hard contact. At the same time, it enhances the corrosion resistance of the equipment and extends its service life. 2. Add an anti-corrosion bottom plate at the bottom of the valve seat, and use multiple connecting rods to integrate and fix the anti-corrosion bottom plate, valve seat, dustproof housing and pre-assembled inner box, optimize the overall structural stability and achieve easy assembly characteristics, ensure that each component maintains precise alignment during high-frequency opening and closing, and reduce the negative impact of vibration; 3. Install the bottom plate anti-corrosion plug on the exposed end of the connecting rod to further enhance the sealing and corrosion resistance of the connection part, effectively prevent the intrusion of external harmful media, and ensure the long-term and stable operation of the internal precision components.

[0027] In summary, the technical solution of the device or method of the present invention includes at least one of the following technical effects that contribute to the prior art: 1. Achieve high-precision flow regulation and zero-leakage sealing. The inverted cone-shaped sealing boss connected to the inner ring of the arc-shaped film part is combined with the downward preload provided by the spring. The inclined side wall of the sealing boss forms a Z-direction short-tube annular band contact with the inner wall of the longitudinal valve port, which effectively solves the problem of easy leakage of the traditional XY-surface circular annular plane contact seal and ensures that the sealing performance can still be maintained in a vibration environment. 2. The service life of the sealing diaphragm is significantly improved. The arc-shaped film part with a semicircular anti-fatigue structure is adopted, so that the maximum deformation stroke of the sealing boss is 1.2 to 1.5 times the effective stroke of the diaphragm connecting shaft, avoiding early damage caused by excessive stretching of the arc-shaped film part, and enhancing the reliability of the electric control valve under frequent opening and closing conditions; 3. To improve the fluid flow stability in the valve seat, a conical drainage design is used at the press-fit point between the valve seat and the arc-shaped film part to form a dead zone flow channel, eliminate eddy currents, reduce contamination risks and improve flow control accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A three-dimensional schematic diagram of an electric regulating valve used in semiconductor glue coating equipment according to an embodiment of the present invention is shown; Figure 2 A schematic diagram of the exploded components of the electric regulating valve in an embodiment of the present invention is shown; Figure 3 A schematic cross-sectional view of the electric regulating valve in the valve opening state in a specific embodiment of the present invention is shown; Figure 4 A schematic cross-sectional view of the electric regulating valve in a valve closed state in a specific embodiment of the present invention is shown; Figure 5A characteristic schematic diagram of the pre-assembled inner box of the electric regulating valve in a specific embodiment of the present invention is shown; Figure 6 A flow chart showing an assembly method of an electric regulating valve for semiconductor glue coating equipment according to an embodiment of the present invention is shown; Figure 7 Draw the corresponding Figure 6 Assembly diagram of step S1; Figure 8 Draw the corresponding Figure 6 Assembly diagram of step S2; Fig. 9 Draw the corresponding Figure 6 Assembly diagram of step S3; Fig.10 Draw the corresponding Figure 6 Assembly diagram of step S4; Fig.11 Draw the corresponding Figure 6 Assembly diagram of step S5; Fig.12 for Fig. 9 A magnified three-dimensional view and a magnified cross-sectional view of the middle sealing diaphragm.

[0029] Reference numerals: 10, pre-assembled inner box; 10A, inner limit portion; 10C, guide groove wall; 11, drive assembly; 12, elastic preload module; 13, stepping motor; 14, adjusting screw rod; 15, diaphragm connecting shaft; 15A, first part; 15B, second part; 15C, guide side; 16, spacer ring; 17, cooling space; 18, photoelectric indicator rod; 20, dustproof housing; 21, photoelectric sensing door; 22, Inlet hole; 23, exhaust hole; 24, wiring hole; 25, shell cavity; 26, inner connecting rod; 30, sealing diaphragm; 31, arc-shaped film part; 32, sealing boss; 40, valve seat; 41, longitudinal valve port; 42, inlet flow channel; 42A, inner arc spherical surface; 43, outlet flow channel; 44, mounting hole; 45, ring groove; 50, corrosion-resistant bottom plate; 51, connecting rod; 52, bottom plate anti-corrosion plug; 53, corrosion-resistant rubber ring. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments for understanding the inventive concept of the present invention, and cannot represent all the embodiments, nor are they interpreted as the only embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field on the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0031] The "pre-assembly" mentioned in the embodiments and variations of the present invention means pre-assembly; "pre-tightening" means pre-forming elastic tightening force; "inverted cone" means that the platform has a contact end with a gradually increasing diameter toward the valve port, which makes the side wall inclined; the "hollow activity space" mentioned in the text is an open non-enclosed space for specific components to extend and move; the "cooling space" mentioned in the text is a closed space isolated from the external environment and can be ventilated and cooled; the "stepping motor" mentioned in the text can be a high-precision stepping motor or a known ordinary motor, and its driving component can be a mechanical screw or a magnetic transmission; the "film part" mentioned in the text is a relatively thin and soft and deformable part in the sealing diaphragm. The general film part is integrally connected between the sealing boss in the middle of the sealing diaphragm and the peripheral clip part on the periphery. It should be noted that if there is a directional indication (such as up, down, left, right, front, back...) involved in the embodiments of the present invention, the directional indication is only used to explain the relative position relationship, movement, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly. In order to facilitate understanding of the technical solution of the present invention, the electric control valve of the present invention is further described and explained in detail below, but it is not intended to limit the protection scope of the present invention.

[0032] Figure 1 A three-dimensional schematic diagram of an electric regulating valve used in semiconductor glue coating equipment according to an embodiment of the present invention is shown; Figure 2 This is a schematic diagram of the components of the electric control valve; Figure 3 It is a cross-sectional schematic diagram of the valve in the open state; Figure 4 It is a cross-sectional schematic diagram of the valve in the closed state; Figure 5 It is a characteristic schematic diagram of the preassembled inner box which is a key component in the electric control valve. Figure 6 The electric regulating valve for semiconductor coating equipment is used in the equipment supply chain of the semiconductor manufacturing industry, and can be specifically applied to the precise flow control of photoresist coating equipment or electronic ultrapure water cleaning equipment. The product application requirements of the electric regulating valve include: precise flow control, corrosion resistance, high temperature resistance, clean valve cavity without dead zone, extremely close to zero leakage and sealing performance with almost no particle and ion precipitation.

[0033] Reference Figure 1 and Figure 2 An electric regulating valve for semiconductor coating equipment disclosed in an embodiment of the present invention includes: a preassembled inner box 10 pre-assembled to form a driving and conducting function, a dustproof shell 20 for accommodating the preassembled inner box 10 to provide a dustproof isolation effect, a sealing diaphragm 30 that is driven by the preassembled inner box 10 to close the longitudinal valve port 41, and a valve seat 40 that can provide the longitudinal valve port 41 and two side flow channels connecting the longitudinal valve port 41.

[0034] Reference Figure 3 and Figure 4 The preassembled inner box 10 is accommodated in the dustproof housing 20, and a cooling space 17 is formed between the preassembled inner box 10 and the dustproof housing 20, which prevents the dust generated by the preassembled inner box 10 from flowing to the external environment of the dustproof housing 20 in an isolated cooling manner. Figure 5 and Figure 2 , the pre-assembled inner box 10 is pre-assembled with a driving component 11 and an elastic preload module 12; the driving component 11 includes a stepping motor 13 arranged on the pre-assembled inner box 10, an adjusting screw 14 and a diaphragm connecting shaft 15 arranged in the pre-assembled inner box 10, and a synchronous rotation relationship is formed between the rotating shaft of the stepping motor 13 and the adjusting screw 14, specifically, the rotating shaft of the stepping motor 13 has a rotating plate portion, and the adjusting screw 14 has a notch corresponding to the rotating plate portion. The rotating plate portion of the stepping motor 13 rotates to drive the rotation of the adjusting screw 14, and the rotation of the adjusting screw 14 is an in-situ rotation, and the longitudinal displacement of the adjusting screw 14 is limited by the space between the stepping motor 13 and the spacer ring 16; therefore, the stepping motor 13 can drive the adjusting screw 14 to rotate in the pre-assembled inner box 10, and the spacer ring 16 is specifically a metal bearing. On the other hand, the external thread of the adjusting screw 14 is screwed to the internal thread hole of the diaphragm connecting shaft 15; based on the rotation of the adjusting screw 14, the first portion 15A of the diaphragm connecting shaft 15 is slidably moved up and down in the hollow active space of the pre-assembled inner box 10, and the diaphragm connecting shaft 15 is limited and can only be moved up and down, but cannot rotate; with particular reference to Figure 5 Specifically, the two ends of the elastic preload module 12 of the compression spring elastically contact the first part 15A of the diaphragm connecting shaft 15 and the inner limit part 10A of the pre-assembled inner box 10 in the hollow active space, respectively, to apply a vertical downward preload force to the diaphragm connecting shaft 15. Based on the threaded connection, the preload force is a limited preload force on the diaphragm connecting shaft 15 rather than a fully external elastic force. In addition, a plurality of inner connecting rods 26 can be used to connect the bottom of the dustproof housing 20 and the bottom of the pre-assembled inner box 10 (such as Figure 2), for combining the preassembled inner box 10 with the dustproof housing 20; in a variation, the plurality of inner connecting rods 26 are positioning rods for positioning the position of the preassembled inner box 10 in the dustproof housing 20, and the combination between the preassembled inner box 10 and the dustproof housing 20 can be achieved by a connecting rod 51. The second portion 15B of the diaphragm connecting shaft 15 protrudes from the bottom of the preassembled inner box 10 to connect the sealing diaphragm 30. In a more specific example, the slot in the preassembled inner box 10 in which the adjusting screw 14 is placed also contains a spacer ring 16, and the spacer ring 16 is spaced between the adjusting screw 14 and the diaphragm connecting shaft 15, and the connecting portion of the adjusting screw 14 can pass through the through hole of the adjusting screw 14 and be connected to the first portion 15A of the diaphragm connecting shaft 15. During the rotation of the adjusting screw 14, the spacer ring 16 can reduce the friction of the adjusting screw 14 on the bottom of the slot of the preassembled inner box 10.

[0035] Reference Figure 2 , Figure 3 and Figure 4 The sealing diaphragm 30 itself has strong ductility and flexibility. The sealing diaphragm 30 has an arc-shaped film portion 31 and an inverted cone-shaped sealing boss 32 that is integrally provided at the center and protrudes downward. The arc-shaped film portion 31 is a semi-circular ring shape with a recessed bottom to provide a deformation stroke that is 1.2 to 1.5 times greater than the effective stroke; the center of the sealing boss 32 is connected to the second portion 15B of the diaphragm connecting shaft 15 that protrudes from the pre-assembled inner box 10. In this embodiment, the arc-shaped film portion 31 exhibits a semi-circular ring shape when it is in a zero-stress installation state, close to the valve opening state; in the redefined valve opening state, the arc-shaped film portion 31 can exhibit an arc ring shape that is close to a semi-circular ring shape. Referring again to Figure 3 , the so-called semi-circular ring shape is close to the cross-sectional shape of the arc-shaped film portion 31 in the valve installation state when the electric regulating valve is in the undefined valve opening state when the driving top dead point is not defined, and has better extension and deformation ability. The so-called effective stroke is the lifting and lowering movement distance of the diaphragm connecting shaft 15, and is also the operating movement distance of the sealing boss 32 from the valve opening to the valve closing after the redefinition; the so-called deformation stroke is the maximum movement distance of the sealing boss 32 exceeding the movement distance from the valve opening to the valve closing under the deformation degree that the arc-shaped film portion 31 can withstand. The embodiment of the present application utilizes the semi-circular ring-shaped arc-shaped film portion 31 to expand the maximum movement distance (i.e., deformation stroke) of the sealing boss 32; in addition, the top dead point of the effective stroke can be used to redefine the definition after assembly to constrain the rising dead point of the diaphragm connecting shaft 15, so it is feasible to control the deformation stroke to 1.2 to 1.5 times the effective stroke. In this embodiment, the sealing diaphragm 30 further has a peripheral clamping portion, which is integrally formed on the periphery of the arc-shaped film portion 31 and is clamped by the dustproof housing 20 and the valve seat 40. In a specific example, the peripheral clamping portion of the sealing diaphragm 30 is clamped in a groove in the mounting hole 44 of the valve seat 40 (as can be seen in FIG. Fig.11) and the bottom convex ring of the dustproof housing 20 (visible at Fig. 9 The dustproof housing 20 specifically includes a detachable housing upper cover to facilitate maintenance of the stepper motor 13.

[0036] Reference Figure 2 , Figure 3 and Figure 4 , the valve seat 40 is provided with a longitudinal valve port 41, an inlet flow channel 42 and an outlet flow channel 43 inside, the valve seat 40 is provided with a mounting hole 44 aligned with the longitudinal valve port 41, and the dustproof housing 20 is mounted on the mounting hole 44; the lower end of the longitudinal valve port 41 is connected to the inner end of the inlet flow channel 42, and the inner end of the inlet flow channel 42 is formed as a continuous and smooth inner arc spherical surface 42A to form a dead zone-free flow channel, which is not only conducive to promoting the smooth flow of liquid, but also greatly avoids the situation where some fine particles are deposited and cause blockage. Among them, the inclined side wall of the sealing boss 32 is used to close the inner wall of the longitudinal valve port 41, and the arc-shaped film part 31 is aligned with the annular groove 45 connected to the inner end of the outlet flow channel 43, so the arc-shaped film part 31 is subjected to a smaller fluid pressure when the valve is closed, and the sealing boss 32 can extend into or out of the longitudinal valve port 41.

[0037] In summary, by utilizing the preassembled inner box 10 of the preassembled elastic preload module 12, the cooling space 17 formed between the preassembled inner box 10 and the dustproof outer shell 20, the inverted cone-shaped sealing boss 32 of the sealing diaphragm 30 closing the longitudinal valve port 41 with the inclined side wall, and the arc-shaped film portion 31 of the sealing diaphragm 30 aligned with the annular groove 45 connected to the inner end of the outlet flow channel 43, high-precision flow regulation and reliable sealing performance of the regulating valve of the semiconductor coating equipment can be achieved.

[0038] The preassembled inner box 10 accommodated in the dustproof housing 20 is preassembled with a driving component 11 and an elastic preload module 12, a stepper motor 13 is arranged on the preassembled inner box 10, and a cooling space 17 is formed between the preassembled inner box 10 and the dustproof housing 20 to prevent the valve driving operation of the stepper motor 13 from affecting the cleanliness of the external environment of the dustproof housing 20, which meets the vacuum adaptability of low volatile organic compounds; through the combined design of the arc-shaped film portion 31 of the sealing diaphragm 30 and the inverted cone-shaped sealing boss 32, the inclined side wall of the sealing boss 32 closes the inner wall of the longitudinal valve port 41 of the valve seat 40, and a short-tube annular belt-shaped contact seal is formed between the sealing boss 32 and the longitudinal valve port 41, and the sealing boss 32 can be extended into or out of The longitudinal valve port 41 eliminates eddy currents and greatly improves sealing reliability, effectively solving the problem of easy leakage of traditional circular ring plane contact seals; the stepper motor 13 located at the top of the pre-assembled inner box 10 drives the adjusting screw 14 to rotate, driving the diaphragm connecting shaft 15 to move up and down, realizing accurate control of the distance between the sealing boss 32 and the longitudinal valve port 41, thereby achieving accurate flow regulation; the aforementioned arc-shaped film portion 31, the inverted cone-shaped sealing boss 32 and the stepper motor 13 located at the top of the pre-assembled inner box 10 are combined with the elastic preload module 12 set in the pre-assembled inner box 10 to apply a vertical downward preload force to the diaphragm connecting shaft 15, ensuring that a stable sealing state is maintained in a vibration environment, and the flow control accuracy can reach less than ±0.5% FS (full scale), the response time is ≤50 ms, and the repeat positioning accuracy is ≤0.05% FS. Those skilled in the art should know that when installing a new drive component or elastic component, dust is easily dropped on the surface of the drive component 11, the elastic preload module 12 or the stepper motor 13.

[0039] The inner end of the inlet flow channel 42 of the valve seat 40 connected to the longitudinal valve port 41 forms a continuous and smooth inner arc spherical surface 42A, forming a dead zone flow channel, effectively avoiding fluid residue and contamination, and improving the cleanliness and service life of the equipment. The arc-shaped film portion 31 of the sealing diaphragm 30 provides a deformation stroke that is 1.2 to 1.5 times greater than the effective stroke of the diaphragm connecting shaft 15, avoiding the arc-shaped film portion 31 from being overstretched, and the arc-shaped film portion 31 is aligned with the annular groove 45 connected to the inner end of the outlet flow channel 43. When the valve is closed, the arc-shaped film portion 31 is subjected to a lower fluid pressure, and when the valve is open, the arc-shaped film portion 31 restores the original installation shape under low internal stress as much as possible, which can significantly improve the fatigue resistance of the sealing diaphragm 30 and extend the service life of the electric control valve. The mechanical operation life of the electric control valve can reach ≥ 1 million cycles.

[0040] In a preferred embodiment, reference Figure 2 and Figure 5, the rod diameter of the first part 15A of the diaphragm connecting shaft 15 is larger than the rod diameter of the second part 15B, and the first part 15A of the diaphragm connecting shaft 15 is connected to a photoelectric indicator rod 18 that protrudes laterally from the hollow activity space, and a corresponding photoelectric sensing door 21 is provided in the dustproof housing 20. As the diaphragm connecting shaft 15 drives the photoelectric indicator rod 18 to rise to the preset upper dead point position where the photoelectric sensing door 21 can sense the photoelectric indicator rod 18, the upper dead point of the effective stroke of the sealing boss 32 is determined. By using the design that the rod diameter of the first part 15A of the diaphragm connecting shaft 15 is larger than the rod diameter of the second part 15B, the elastic preload module 12 can be accurately identified and installed during the assembly process. Figure 3 The photoelectric sensing door 21 in the dustproof housing 20 cooperates with the photoelectric indicating rod 18 connected to the first part 15A of the diaphragm connecting shaft 15. When the photoelectric indicating rod 18 rises to the predetermined upper dead point along with the diaphragm connecting shaft 15, the photoelectric sensing door 21 in the dustproof housing 20 is triggered to send a photoelectric sensing signal, and the regulating power supply is cut off. At this time, the valve state is set to the fully open state after assembly. Figure 4 When the diaphragm connecting shaft 15 drops to the predetermined lower dead point, the elastic preload module 12 provides a continuous sealing force and is detected. At this time, the photoelectric sensing door 21 feeds back a closing signal, cuts off the regulating power supply, and confirms the lower dead point that makes the valve completely closed after assembly. When the upper dead point and the lower dead point are determined, the effective stroke of the diaphragm connecting shaft 15 can be confirmed, and the scale of the stepping motor 13 can be calculated and allocated in reverse. In this way, the upper dead point of the effective stroke of the sealing boss 32 can be accurately detected, ensuring the accuracy and reliability of the position feedback when the valve is open, thereby improving the automation control level and operation stability of the entire electric regulating valve.

[0041] In a preferred embodiment, referring to Figure 2 and Figure 5 The hollow active space of the pre-assembled inner box 10 is provided with a guide groove wall 10C, specifically a plane side wall to prevent rotation, and the first portion 15A of the diaphragm connecting shaft 15 is provided with a guide side 15C (such as Figure 5 As shown), it is used to limit the rotational freedom of the diaphragm connecting shaft 15, ensuring that the diaphragm connecting shaft 15 can only be lifted and lowered in the vertical direction. Through the cooperation of the guide groove wall 10C and the guide side 15C, the rotational freedom of the diaphragm connecting shaft 15 is effectively constrained, so that it can only be lifted and lowered in the vertical direction (Z-axis direction). This avoids the problem of poor sealing or transmission failure caused by accidental rotation of the diaphragm connecting shaft 15 during operation, and significantly improves the stability and reliability of the equipment. At the same time, this design simplifies the complexity of the transmission system, reduces the difficulty of assembly, and is conducive to improving production efficiency and reducing maintenance costs. In a more specific embodiment, since the peripheral clamping portion of the sealing diaphragm 30 is annular (as can be seen in Fig. 9 and Fig.12 ), the peripheral clamping portion can be rotated or not rotated appropriately at the same time, the connection between the center of the sealing boss 32 of the sealing diaphragm 30 and the protruding second portion 15B of the diaphragm connecting shaft 15 can be freely rotated, and there is no forced fixed connection relationship between the sealing boss 32 and the peripheral clamping portion of the sealing diaphragm 30. The peripheral clamping portion of the sealing diaphragm 30 and / or the sealing boss 32 will naturally rotate to the angle with the least stress to release the internal torsional stress of the arc-shaped film portion 31 of the sealing diaphragm 30 as much as possible.

[0042] In a preferred embodiment, reference Figure 1 and Figure 2 The outer surface of the dustproof housing 20 is provided with a vent hole, which is connected to the cooling space 17 and is used for circulating cooling of the stepper motor 13, thereby achieving effective heat dissipation. Specifically, the cooling air enters the cooling space 17 through the vent hole on the dustproof housing 20, takes away the heat generated by the stepper motor 13 during operation, and ensures the stability and reliability of the stepper motor 13 under long-term high-load operation. This not only prolongs the service life of the stepper motor 13 and prevents the stepper motor 13 from falling off during driving, but also indirectly improves the working efficiency and performance stability of the electric control valve.

[0043] In a more preferred embodiment, referring to Figure 1 and Figure 2The vent hole includes an air inlet hole 22 and an air outlet hole 23. The outer surface of the dustproof housing 20 is also provided with a wiring hole 24 for supplying power to the stepper motor 13. Specifically, the motor power line is inserted from the wiring hole 24 opened at the side end and connected to the circuit board of the stepper motor 13. More preferably, the wiring hole 24 and the air inlet hole 22 are located in the housing sub-cavity 25 of the dustproof housing 20, and the air outlet hole 23 is located at the main body of the dustproof housing 20 above the housing sub-cavity 25. Thus, the functions of effective heat dissipation, dust leakage prevention and internal electrical connection of the stepper motor 13 are achieved. The air inlet 22 and the exhaust hole 23 form an air circulation path for cooling the stepper motor 13. The wiring hole 24 and the air inlet 22 are concentrated in the shell sub-cavity 25. The shell sub-cavity 25 blocks the airflow entering from the air inlet 22 from blowing directly to the pre-assembled inner box 10, forming a tortuous cooling airway (first entering from the side of the air inlet 22 downward to the bottom of the inner wall of the shell sub-cavity 25, passing through the shell sub-cavity 25 to the main body of the dustproof shell 20 and then flowing upward to the stepper motor 13, and after exchanging heat, it is discharged from the exhaust hole 23), and the exhaust hole 23 is arranged at the upper part of the main body of the dustproof shell 20, optimizing the air circulation path, ensuring the line connection and preventing dust from sinking into the key component area, thereby improving the reliability and safety of the overall equipment. The material of the dustproof housing 20 may be PFA (tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer), which has excellent chemical stability that is not corroded by substances, thermal stability when working at a high temperature of 260°C, electrical insulation with low dielectric constant and high resistivity, mechanical properties with low friction coefficient and good self-lubrication, and processability through injection, extrusion, and calendering molding processes.

[0044] In a preferred embodiment, reference Figure 2 and Figure 3, the material of the sealing diaphragm 30 is PTFE (polytetrafluoroethylene); the surface roughness Ra of the inner arc spherical surface 42A of the inlet flow channel 42 is not greater than 0.1μm. The PTFE material of the sealing diaphragm 30 can significantly improve the corrosion resistance of the regulating valve. With its excellent chemical stability, the PTFE material can effectively resist high-purity chemicals such as photoresist and corrosive substances that may exist in ultrapure water, thereby extending the service life of the sealing boss 32. The PTFE material has a self-lubricating property, which can reduce the friction resistance between the sealing boss 32 and the valve seat 40 when opening and closing, and improve the reliability and sensitivity of the action. The PTFE material can ensure sufficient protection and avoid the risk of peeling due to the use of the coating. The surface roughness Ra of the inner arc spherical surface 42A of the inlet flow channel 42 does not exceed 0.1μm, which effectively reduces the friction resistance of the liquid medicine during flow, improves the fluidity and stability of the fluid, eliminates eddies and dead water areas in the flow channel, prevents bacterial growth and chemical residues at the longitudinal valve port 41, and significantly improves the cleanliness and service life of semiconductor coating equipment, meeting the stringent requirements for high-purity chemicals and ultrapure water fluid processing in the semiconductor manufacturing process.

[0045] In a preferred embodiment, reference Figure 2 , Figure 3 and Figure 4 , the peripheral clamping part of the sealing diaphragm 30 is annular and not larger than the mounting hole 44 of the valve seat 40. A slot is provided in the mounting hole 44 of the valve seat 40, and the slot accommodates the peripheral clamping part of the sealing diaphragm 30. The dustproof housing 20 has a flange to press on the upper surface of the peripheral clamping part of the sealing diaphragm 30. The annular peripheral clamping part of the sealing diaphragm 30 and the slot in the mounting hole 44 of the valve seat 40 are precisely matched to form a physical limit to prevent the diaphragm from shifting or loosening; plus the bottom flange of the dustproof housing 20 directly presses the upper surface of the clamping part, combined with the support of the slot, a two-way clamping sealing structure is formed to effectively block the fluid leakage path, especially suitable for high vacuum or high pressure difference environment. This nested design of the slot and the clamping part ensures that the sealing diaphragm 30 maintains a stable alignment under dynamic conditions (such as high frequency opening and closing or vibration) to prevent sealing failure caused by vibration. In addition, the pressing force of the flange is used to achieve uniform distribution of the mechanical structure, avoid local stress concentration, and extend the service life of the sealing diaphragm 30. The close fit between the slot and the clamping part eliminates the gaps that may be caused by traditional bolt fixings, preventing particles or contaminants from invading the interior of the valve body, and meeting ISO Class 1 clean room standards. Since the outer diameter of the annular clamping part of the sealing diaphragm 30 does not exceed the aperture of the mounting hole 44 of the valve seat 40, it is easy to assemble and maintenance-friendly, simplifies the installation process of the sealing diaphragm 30, does not require multiple additional fasteners, and can reduce assembly complexity. When disassembling, you only need to remove the connecting rod 51 to release the bottom flange pressure of the dustproof housing 20, and then you can quickly replace the sealing diaphragm 30, which improves maintenance efficiency. In addition, refer to Fig. 9 , Fig.12 , Figure 3 and Figure 4 A ventilation groove is provided on the bottom convex ring of the valve seat 40 to provide a ventilation space above the arc-shaped film portion 31 of the sealing diaphragm 30. The ventilation space above the arc-shaped film portion 31 can be well deformed for exhaust and air intake during valve opening and closing operations.

[0046] In a preferred embodiment, reference Figure 1 and Figure 2 The electric regulating valve also includes a corrosion-resistant bottom plate 50, which is arranged at the bottom of the valve seat 40; with the help of multiple connecting rods 51, the corrosion-resistant bottom plate 50, the valve seat 40 and the dustproof housing 20 are closely connected to form an integrated assembly structure, and multiple bottom plate anti-corrosion plugs 52 are arranged at the bottom of the corrosion-resistant bottom plate 50 to block the exposed end of the connecting rod 51, effectively preventing corrosive fluid from penetrating into the interior, and ensuring the long-term stable operation of the electric regulating valve in a harsh chemical environment. In addition, multiple corrosion-resistant rubber rings 53 are respectively arranged at the bottom of the corrosion-resistant bottom plate 50 and the shell gap between the bottom of the valve seat 40 and the corrosion-resistant bottom plate 50, for the connecting rod 51 to pass through, further enhancing the sealing effect, and can reach the IP67 protection level to prevent the invasion of external pollutants, which meets the strict requirements of the semiconductor industry for high cleanliness and zero leakage. The anti-corrosion bottom plate 50 disposed at the bottom of the valve seat 40 is used to enhance the structural stability of the entire electric control valve, and a plurality of connecting rods 51 are passed through the anti-corrosion bottom plate 50 and the valve seat 40 and are combined with the dustproof housing 20, and the three are firmly connected together to form an integrated assembly structure. After the structural stability is enhanced, the electric control valve has good seismic resistance and reliability. In the variation example, the plurality of connecting rods 51 also pass through the dustproof housing 20 and are combined with the pre-assembled inner box 10, and the anti-corrosion bottom plate 50, the valve seat 40, the dustproof housing 20 and the pre-assembled inner box 10 are firmly connected to form an integrated assembly structure. In addition, a plurality of bottom plate anti-corrosion plugs 52 are sealed at the exposed end of the connecting rod 51, effectively preventing corrosive liquids from penetrating into the interior along the connection part, and ensuring the long-term stable operation of the electric control valve in a harsh chemical environment. The corrosion-resistant rubber ring 53 is filled in the bottom of the corrosion-resistant bottom plate 50 and the housing gap between the bottom of the valve seat 40 and the top of the corrosion-resistant bottom plate, further enhancing the sealing performance, achieving the IP67 protection level, preventing the intrusion of external pollutants, and meeting the semiconductor industry's requirements for high cleanliness and zero leakage. A corrosion-resistant rubber ring 53 can also be set between the top of the valve seat 40 and the bottom of the dustproof housing 20 to provide sealing. The peripheral clamping portion of the sealing diaphragm 30 is clamped and fastened by the non-planar specific bottom convex ring shape of the dustproof housing 20 and the mounting hole 44 of the corresponding shape at the top of the valve seat 40, and the clamping portion is located in the groove on the inner periphery of the mounting hole 44 of the valve seat 40.

[0047] Reference Figure 6 , an embodiment of the present invention further discloses a method for assembling an electric regulating valve of a semiconductor coating equipment, which includes steps S1 to S5. Among them, steps S1 to S4 are key steps. Specifically, step S1 is to provide a pre-assembled inner box, which has a built-in adjusting screw, a diaphragm connecting shaft and an elastic pre-tightening module; step S2 is to place the pre-assembled inner box in a dustproof housing; step S3 is to install a sealing diaphragm at the bottom of the dustproof housing, and the sealing boss of the diaphragm is connected to the second part of the diaphragm connecting shaft; step S4 is to combine the valve seat with the dustproof housing, and the sealing boss of the diaphragm can extend into or out of the longitudinal valve port of the valve seat. Step S5 is an optional step, indicated by a dotted frame, and its function is to redefine the top dead center of the effective stroke of the diaphragm sealing boss by photoelectric calibration after assembly.

[0048] The operation of step S1 can be referred to Figure 7 , a preassembled inner box 10 is provided. An adjusting screw 14, a diaphragm connecting shaft 15 and an elastic preload module 12 are arranged in the preassembled inner box 10, and a stepper motor 13 is provided at the top of the preassembled inner box 10. The stepper motor 13, the adjusting screw 14 and the diaphragm connecting shaft 15 constitute a driving assembly 11. The stepper motor 13 drives the adjusting screw 14 to rotate in the preassembled inner box 10, and the adjusting screw 14 has a shaft with an external thread that passes through a spacer ring 16, and the external thread of the adjusting screw 14 is screwed with the internal thread hole of the diaphragm connecting shaft 15, so that the first part 15A of the diaphragm connecting shaft 15 can slide and rise and fall in a non-rotatable manner in the hollow movable space. The two ends of the elastic preload module 12 elastically contact the first part 15A of the diaphragm connecting shaft 15 and the inner limit part 10A of the preassembled inner box 10 (coordinate with reference to Figure 5 ), so as to apply a vertical downward preload force to the diaphragm connecting shaft 15. Therefore, in step S1, the pre-assembled inner box 10 is pre-integrated with the drive assembly 11 and the elastic preload module 12 to ensure that the diaphragm connecting shaft 15 obtains precise vertical movement capability and appropriate preload force. The elastic preload module 12 can absorb possible vibrations, and since the elastic preload module 12 and the drive assembly 11 are assembled in the pre-assembled inner box 10 together, there is a consistent displacement between them, which effectively solves the problem of sealing failure caused by vibration in the traditional structure and improves the overall stability and reliability of the equipment.

[0049] The operation of step S2 can refer to Figure 8 , the preassembled inner box 10 is placed in the dustproof housing 20, and a cooling space 17 is formed between them. Specifically, the inner connecting rod 26 is used to pass through the bottom of the dustproof housing 20 to connect the bottom of the preassembled inner box 10. The structure not only protects the internal precision parts from the influence of external dust and other impurities, but also can remove heat through air circulation, ensuring that the stepper motor 13 and other components operate stably for a long time at a suitable temperature. In a variation, the inner connecting rod 26 can be used to position the preassembled inner box 10 in the dustproof housing 20.

[0050] The operation of step S3 can refer to Fig. 9 and Fig.12 , install the sealing diaphragm 30 at the bottom of the dustproof housing 20. The sealing diaphragm 30 has an arc-shaped film portion 31 and an inverted cone-shaped sealing boss 32 that is integrally provided at the center and protrudes downward. In a specific implementation, the diaphragm connecting shaft 15 is connected to the external threaded portion of the sealing diaphragm 30 at the sealing boss 32 at the inner threaded hole of the second portion 15B. The arc-shaped film portion 31 is a semi-circular ring shape with a concave bottom in the valve opening state, providing a deformation stroke that is 1.2 to 1.5 times greater than the effective stroke; wherein the center of the sealing boss 32 is connected to the second portion 15B of the diaphragm connecting shaft 15 that protrudes from the pre-assembled inner box 10. This combined structure greatly improves the service life and flexibility of the sealing diaphragm 30, and is particularly suitable for application scenarios that require frequent valve switching actions.

[0051] The operation of step S4 can refer to Fig.10 , with reference Figure 3 and Figure 4 , combine the valve seat 40 and the dustproof housing 20. The interior of the valve seat 40 is provided with a longitudinal valve port 41, an inlet flow channel 42 and an outlet flow channel 43. The valve seat 40 is provided with a mounting hole 44 aligned with the longitudinal valve port 41, and the dustproof housing 20 is mounted on the mounting hole 44 by means of the connection with the connecting rod 51. The lower end of the longitudinal valve port 41 is connected to the inner end of the inlet flow channel 42 to form a continuous and smooth inner arc spherical surface 42A to form a flow channel without dead space. The inclined side wall of the sealing boss 32 is used to close the inner wall of the longitudinal valve port 41, while the arc-shaped film portion 31 is aligned with the annular groove 45 connected to the inner end of the outlet flow channel 43, as shown in FIG. Figure 4 As shown in the valve closed state, the arc-shaped film portion 31 bears a small fluid pressure and its semicircular section has a large deformation capacity, and the sealing diaphragm 30 has a long service life. The sealing boss 32 can extend into or out of the longitudinal valve port 41. The above-mentioned combined structure avoids the risk of contamination or blockage caused by fluid stagnation, which is particularly important for processing high-purity chemicals. At the same time, the smooth transition geometry also helps to improve fluid dynamics and reduce energy loss.

[0052] In a preferred embodiment, step S4 specifically includes: S41, installing a multi-layer corrosion-resistant rubber ring 53 between the valve seat 40 and the dustproof housing 20, and locking it with a quick-release clamp, thereby significantly improving the sealing performance at the interface between the valve seat 40 and the dustproof housing 20, preventing leakage of chemical media or intrusion of external pollutants. The quick-release clamp design simplifies the disassembly and assembly process, facilitates maintenance or replacement of parts, and ensures the tightness and corrosion resistance of the connection parts, meeting the semiconductor industry's requirements for high cleanliness and vacuum environment; S42, installing a corrosion-resistant bottom plate 50 at the bottom of the valve seat 40, and passing through the corrosion-resistant bottom plate 50 and the valve seat 40 through a plurality of connecting rods 51 to be fixedly connected to the dustproof housing 20 and The installation of the corrosion-resistant bottom plate 50 in the pre-assembled inner box 10 enhances the corrosion resistance of the bottom of the valve seat 40, prevents corrosive media from corroding the internal components, and fixes the corrosion-resistant bottom plate 50, the valve seat 40 and the dustproof housing 20 in an integrated manner through multiple connecting rods 51, thereby improving the shock resistance and stability of the overall structure, and ensuring that each component maintains precise alignment in a high-frequency opening and closing or vibration environment; S43, installing a bottom plate anti-corrosion plug 52 at the exposed end of the connecting rod 51, completely blocking the connection part, preventing corrosive liquid from penetrating into the interior along the gap, ensuring the long-term stable operation of key components, and combining with the filling of the corrosion-resistant rubber ring 53 to achieve an IP67 protection level, meeting the semiconductor industry's stringent requirements for zero leakage and ultra-low particle precipitation. When the aforementioned internal connecting rod 26 has the function of combining the pre-assembled inner box 10 with the dustproof housing 20, the connecting rod 51 passes through the corrosion-resistant bottom plate 50 and the valve seat 40 and is combined with the dustproof housing 20. When the aforementioned inner connecting rod 26 only has the function of positioning the preassembled inner box 10 in the dustproof housing 20 , the connecting rod 51 passes through the anti-corrosion bottom plate 50 , the valve seat 40 and the dustproof housing 20 and is connected to the preassembled inner box 10 .

[0053] Therefore, the operating specifications of each key step are clearly defined in the assembly process from step S1 to step S4, product quality is controlled from the source, and subsequent maintenance and repair are facilitated, laying a solid foundation for realizing an automated production line. In a preferred example, the assembly method also includes step S5, which is to photoelectrically calibrate the top dead point of the effective stroke of the sealing boss 32 of the sealing diaphragm 30. Step S5 is specifically implemented after step S4, and the top dead point of the effective stroke of the valve in the fully open state is redefined after the valve is assembled.

[0054] The electric regulating valve provided by the embodiment and variation of the present invention has the following working principle: the stepper motor 13 is controlled to reverse at rated power by powering on the circuit board, the motor shaft block of the stepper motor 13 drives the adjusting screw 14 to rotate, and drives the screw connection assembly to move upward along with the screw thread spiral direction, that is, drives the diaphragm connecting shaft 15 to move upward, and the sealing boss 32 of the sealing diaphragm 30 moves upward and separates from the valve seat 40, and after opening to the upper dead center of the effective stroke of the sealing diaphragm 30, the photoelectric indicator rod 18 transmits an electrical signal to the terminal through the photoelectric sensing door 21 to cut off the power supply, so as to achieve full opening of the valve and eliminate assembly errors. On the contrary, when the stepper motor 13 rotates forward at rated power, the motor shaft block of the stepper motor 13 drives the adjusting screw 14 to rotate, and drives the screw connection assembly to move downward along with the screw thread spiral direction, that is, drives the diaphragm connecting shaft 15 to move downward, and the sealing boss 32 of the sealing diaphragm 30 presses the valve seat 40 downward, and the photoelectric indicator rod 18 transmits an electrical signal to the terminal through the photoelectric sensing door 21 to cut off the power supply, so as to achieve full closing and sealing of the valve.

[0055] The embodiments and variations provided in the specific implementation of the present invention have the following corresponding technical effects to achieve a significant improvement over the prior art: 1. Meet the sealing and cleanliness requirements of the electric regulating valve of semiconductor coating equipment: A short-tube annular belt-shaped contact sealing design is formed between the oblique side wall of the inverted cone sealing boss 32 and the inner side wall of the longitudinal valve port 41, and combined with the constant preload force of the elastic preload module 12, a zero-leakage seal is achieved, solving the problem of easy failure of traditional plane seals; the inner arc spherical surface 42A of the valve seat 40 and the dead zone-free flow channel design avoid residual fluid contamination, meeting ISO Class 1 clean room standards and 10 -6 Torr level vacuum adaptability; 2. Meet the requirements of corrosion resistance and long operating life of the electric regulating valve of semiconductor coating equipment: the corrosion-resistant PTFE material of the sealing diaphragm 30 and the surface smoothness of the valve seat flow channel (Ra≤0.1 μm) significantly improve the chemical corrosion resistance and control the ion pollution to ppb level; the arc-shaped film part 31 with a semicircular cross-section provides a deformation stroke design of 1.2 to 1.5 times the effective stroke, with excellent fatigue resistance and a mechanical operating life of ≥1 million cycles; 3. Meet the high precision and stability of the electric regulating valve of semiconductor glue coating equipment: the precision drive of the stepping motor 13 and the adjusting screw 14, combined with the limit of the diaphragm connecting shaft 15 by the guide groove wall 10C, achieves flow control accuracy of ±0.5% FS, response time ≤50 ms, and repeat positioning accuracy ≤0.05% FS; 4. The cooling space 17 in the dustproof housing 20 is designed with a closed airflow heat dissipation design with vents to ensure long-term stable operation of the stepper motor 13 and prevent dust precipitation in the valve due to overheating; 5. Intelligent and maintainable features: The integrated monitoring module can also provide real-time feedback on sealing pressure, automatically compensate for sealing force and remotely alarm to enhance active safety; the quick-release clamp and modular pre-assembled inner box 10 design simplify the assembly process, reduce maintenance costs, and adapt to automated production needs.

[0056] In summary, the present invention solves the defects of traditional valves in terms of sealing leakage, flow channel pollution, diaphragm fragility and environmental adaptability through innovation in structural optimization, and provides a high-precision, long-life, zero-pollution flow control solution for semiconductor coating equipment.

[0057] The embodiments of this specific implementation method are all preferred embodiments for facilitating the understanding or implementation of the technical solutions of the present invention, and are not intended to limit the protection scope of the present invention. All equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An electric regulating valve for semiconductor coating equipment, characterized in that: include: The preassembled inner box is accommodated in a dustproof shell, and the preassembled inner box is pre-assembled with a driving component and an elastic pre-tightening module; the driving component comprises a stepping motor arranged on the preassembled inner box, an adjusting screw rod and a diaphragm connecting shaft arranged in the preassembled inner box, the stepping motor drives the adjusting screw rod to rotate in the preassembled inner box, and the first part of the diaphragm connecting shaft is lifted and moved in a guiding and sliding manner in the hollow active space of the preassembled inner box; the two ends of the elastic pre-tightening module elastically contact the first part of the diaphragm connecting shaft and the inner limiting part of the preassembled inner box in the hollow active space, respectively, so as to apply a vertical downward pre-tightening force to the diaphragm connecting shaft; a cooling space is formed between the preassembled inner box and the dustproof shell; The sealing diaphragm has an arc-shaped film portion and an inverted cone-shaped sealing boss integrally provided at the center and protruding downward, wherein the arc-shaped film portion is a semicircular ring shape with a concave bottom to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke; the center of the sealing boss is connected to the second portion of the diaphragm connecting shaft protruding from the pre-assembled inner box; A valve seat, with a longitudinal valve port, an inlet flow channel and an outlet flow channel provided inside; the valve seat is provided with a mounting hole aligned with the longitudinal valve port, and the dustproof housing is installed on the mounting hole; the lower end of the longitudinal valve port is connected to the inner end of the inlet flow channel, and the inner end of the inlet flow channel is formed as a continuous and smooth inner arc spherical surface to form a flow channel without dead space; wherein the inclined side wall of the sealing boss is used to close the inner wall of the longitudinal valve port, the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel, and the sealing boss can extend into or out of the longitudinal valve port.

2. The electric regulating valve according to claim 1, characterized in that: The rod diameter of the first part of the diaphragm connecting shaft is larger than the rod diameter of the second part. A photoelectric sensing door is arranged in the dustproof housing. The first part of the diaphragm connecting shaft is connected to a photoelectric indicator rod protruding laterally from the hollow active space. As the diaphragm connecting shaft rises, the photoelectric sensing door senses the arrival of the photoelectric indicator rod to determine the top dead point of the effective stroke of the sealing boss.

3. The electric regulating valve according to claim 1, characterized in that: The outer surface of the dustproof housing is provided with a vent hole connected to the cooling space for circulating cooling of the stepper motor.

4. The electric regulating valve according to claim 3, characterized in that: The vent includes an air inlet and an air outlet, and the outer surface of the dustproof shell is also provided with a wiring hole for power connection to the stepper motor, wherein the wiring hole and the air inlet are located in the shell sub-cavity of the dustproof shell, and the exhaust hole is located in the main body of the dustproof shell above the shell sub-cavity.

5. The electric regulating valve according to claim 1, characterized in that: The sealing diaphragm is made of PTFE; the surface roughness of the inner arc spherical surface of the inlet flow channel is Ra≤0.1 μm.

6. The electric regulating valve according to claim 1, characterized in that: It also includes a corrosion-resistant bottom plate, which is arranged at the bottom of the valve seat; the corrosion-resistant bottom plate, the valve seat and the dustproof shell are combined through a plurality of connecting rods, a plurality of bottom plate anti-corrosion plugs are arranged on the corrosion-resistant bottom plate and sealed at the exposed end of the connecting rod, and a plurality of corrosion-resistant rubber rings are respectively arranged at the bottom of the corrosion-resistant bottom plate and at the shell gap between the bottom of the valve seat and the top of the corrosion-resistant bottom plate.

7. The electric regulating valve according to claim 1, characterized in that: A guide groove wall is provided in the hollow movable space of the pre-assembled inner box, and a guide side cooperating with the guide groove wall is provided at the first part of the diaphragm connecting shaft for limiting the rotational freedom of the diaphragm connecting shaft to ensure that the diaphragm connecting shaft can only be lifted and moved in the vertical direction.

8. A method for assembling an electric regulating valve for semiconductor glue coating equipment, characterized in that: Includes steps: S1. Provide a preassembled inner box, wherein an adjusting screw, a diaphragm connecting shaft and an elastic pre-tightening module are arranged in the preassembled inner box, and a stepping motor is arranged on the preassembled inner box, and the stepping motor is used to drive the adjusting screw to rotate in the preassembled inner box, so that the first part of the diaphragm connecting shaft can be lifted and moved in the hollow active space of the preassembled inner box in a sliding manner; the two ends of the elastic pre-tightening module elastically contact the first part of the diaphragm connecting shaft and the inner limit part of the preassembled inner box in the hollow active space, respectively, so as to apply a vertical downward pre-tightening force to the diaphragm connecting shaft; S2, accommodating the preassembled inner box in a dustproof outer shell, and forming a cooling space between the preassembled inner box and the dustproof outer shell; S3, installing a sealing diaphragm at the bottom of the dustproof housing; wherein the sealing diaphragm has an arc-shaped film portion and an inverted cone-shaped sealing boss integrally provided at the center and protruding downward, the arc-shaped film portion is a semicircular ring shape with a concave bottom, so as to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke; the center of the sealing boss is connected to the second portion of the diaphragm connecting shaft protruding from the pre-assembled inner box; S4. Combining the valve seat with the dustproof housing, the interior of the valve seat is provided with a longitudinal valve port, an inlet flow channel and an outlet flow channel, the valve seat is provided with a mounting hole aligned with the longitudinal valve port, and the dustproof housing is installed on the mounting hole; the lower end of the longitudinal valve port is connected to the inner end of the inlet flow channel, and the inner end of the inlet flow channel is formed as a continuous and smooth inner arc spherical surface to form a flow channel without dead zone; wherein the inclined side wall of the sealing boss is used to close the inner wall of the longitudinal valve port, and the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel; the sealing boss can extend into or out of the longitudinal valve port.

9. The assembly method according to claim 8, characterized in that: Step S4 includes: A multi-layer corrosion-resistant rubber ring is installed between the valve seat and the dustproof housing and is locked by a quick-release clamp; An anti-corrosion bottom plate is installed at the bottom of the valve seat, and the anti-corrosion bottom plate, the valve seat and the dustproof housing are fixedly connected by a plurality of connecting rods; A bottom plate anti-corrosion plug is installed at the exposed end of the connecting rod to ensure the sealing and corrosion resistance of the connecting part.

10. The assembly method according to claim 8, characterized in that: Also includes: S5. Photoelectrically calibrate the top dead center of the effective stroke of the sealing boss of the sealing diaphragm.

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