Installation method of magnetic array

Abstract

The invention discloses an installation method of a magnetic array, and belongs to the technical field of semiconductor material processing. The mounting method of the magnetic array comprises the following steps: S1, arranging the supporting shaft in the mounting cylinder in a penetrating manner; s2, an annular containing cavity formed between the supporting shaft and the mounting barrel is filled with a set number of profiling blocks; s3, the two baffles on the supporting shaft are rotated until the in-out avoiding holes in the two baffles are aligned with the to-be-taken-out profiling block; s4, pushing the to-be-taken-out profiling block out of the annular accommodating cavity from the in-out avoiding hole of one baffle plate, and pushing the to-be-filled magnet into the annular accommodating cavity from the in-out avoiding hole of the other baffle plate at the same time; and S5, returning to the step S3 until all the profiling blocks are replaced by the magnets and the magnetic array is formed. According to the invention, when the polarities of two adjacent magnets in the magnetic array repel each other, the magnets can be smoothly assembled in the mounting cylinder, and the mounting difficulty of the magnetic array in the beam source screening device is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor material processing, and in particular to a method for installing a magnetic array. Background Art

[0002] With the continuous improvement of user needs and the development of ultra-large-scale integrated circuits, semiconductor surface processing technology has become increasingly sophisticated, especially in the wafer surface polishing and etching processes, where the precision requirements have become very high. In conventional plasma processing, gas molecules are ionized to form single atomic ions that bombard the wafer surface, which will have a significant injection effect on the wafer surface lattice, affecting the surface smoothness and lattice quality. For example, super atom beams have achieved good process results in polishing and etching wafers. When super atoms collide with the surface of the material, lateral sputtering effects and local thermal annealing effects will occur, which can effectively improve the surface smoothness and surface lattice quality. This characteristic has achieved good process results when processing the wafer surface.

[0003] The initial beam source (including superatoms and molecules) is ionized and passed through a beam source screening device to screen out monatomic ions (formed by ionized molecules), retaining superatomic ions. The beam source screening device includes an internal channel and a mounting cylinder, and a magnetic array is arranged between the internal channel and the mounting cylinder. The magnetic array is arranged around the outer wall of the internal channel, and the magnetic array increases the magnetic field strength from the inside to the outside in the central area of ​​the internal channel. When the ionized beam source enters the channel, the monatomic ions deviate from the center of the internal channel under the action of the magnetic field, and finally hit the wall of the internal channel and disappear and are screened out.

[0004] However, during the assembly of the beam source screening device, when the magnetic array is assembled into the mounting cylinder, when the polarities of two adjacent magnets repel each other, the next magnet cannot be installed further due to the repulsive force of the previous magnet, resulting in the failure of the magnetic array to be assembled smoothly.

[0005] This section provides background information related to the present application which is not necessarily prior art. Summary of the invention

[0006] The object of the present invention is to provide a method for installing a magnetic array, which can smoothly assemble two adjacent magnets in the magnetic array into an installation cylinder even when their polarities repel each other, thereby reducing the difficulty of installing the magnetic array in a beam source screening device.

[0007] In order to achieve the above objectives, the following technical solutions are provided:

[0008] The installation method of the magnetic array includes the following steps:

[0009] S1. Insert the support shaft into the installation cylinder;

[0010] S2. A set number of profiling blocks are filled in the annular accommodation cavity formed between the support shaft and the mounting cylinder body;

[0011] S3. Rotate the two baffles on the support shaft until the access and avoidance holes on the two baffles are aligned with the profiling block to be taken out;

[0012] S4. While pushing the profiling block to be taken out out of the annular accommodation cavity through the access and avoidance hole of one of the baffles, push the magnet to be filled into the annular accommodation cavity through the access and avoidance hole of the other baffle;

[0013] S5. Return to step S3 until all the profiling blocks are replaced by magnets to form a magnetic array.

[0014] As an alternative to the installation method of the magnetic array, the material of the profiling block is a non-magnetic material.

[0015] As an alternative to the installation method of the magnetic array, a set number of first positioning surfaces are circumferentially arranged on the support shaft, and a set number of second positioning surfaces are circumferentially arranged on the inner wall of the mounting cylinder body. The first positioning surfaces and the second positioning surfaces are arranged in one-to-one correspondence, and the profiling block or the magnet is embedded between the first positioning surface and the second positioning surface.

[0016] As an alternative to the installation method of the magnetic array, in step S4, the magnet is pushed into the annular accommodation cavity and bonded to the second positioning surface of the mounting cylinder body.

[0017] As an alternative to the installation method of the magnetic array, step S4 further includes:

[0018] S41. Apply glue between the magnet and the second positioning surface of the mounting cylinder body, and insert the two jaws of the clamping assembly on one side close to the support shaft at both ends of the magnet respectively;

[0019] S42. Turn the set screws on the jaws, and the set screws press against the outer wall of the mounting cylinder body, so that the jaws pull the magnet to press against the second positioning surface of the mounting cylinder body until the glue solidifies.

[0020] As an alternative to the installation method of the magnetic array, in step S42, by turning the set screws on the two jaws, both ends of the magnet are flush with the second positioning surface.

[0021] As an alternative to the installation method of the magnetic array, in step S41, the connecting plates of the clamping assembly are used to connect the two jaws into an integral structure. A plurality of first connection holes are provided on the connecting plate, and second connection holes are provided on the jaws. A first fastener can pass through the first connection hole and be connected to the second connection hole.

[0022] As an alternative to the installation method of the magnetic array, in step S2, two annular connectors are respectively installed at the two ports of the installation cylinder body, so that the baffle is located between the annular connector and the magnet, wherein the inner diameter of the annular connector is smaller than the outer diameter of the baffle.

[0023] As an alternative to the installation method of the magnetic array, the opening size of the access avoidance hole is only for one of the profiling blocks or the magnet to pass through.

[0024] As an alternative to the installation method of the magnetic array, a handle is installed on the baffle, and the length of the handle extends out of the outer wall of the installation cylinder body.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0026] In the installation method of the magnetic array provided by the present invention, the support shaft is passed through the installation cylinder body, a set number of profiling blocks are filled in the annular accommodation cavity formed between the support shaft and the installation cylinder body, and the two baffles on the support shaft are rotated until the access avoidance holes on the two baffles are aligned with the profiling block to be taken out. While pushing the profiling block to be taken out from the access avoidance hole of one baffle out of the annular accommodation cavity, the magnet to be filled is pushed into the annular accommodation cavity from the access avoidance hole of the other baffle until all the profiling blocks are replaced by magnets and a magnetic array is formed. First, a plurality of profiling blocks are filled into the annular accommodation cavity, and then all the profiling blocks are replaced by magnets one by one. Even if the polarities of two adjacent magnets in the magnetic array repel each other, they can be successfully assembled into the installation cylinder body, reducing the installation difficulty of the magnetic array in the beam source screening device. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the content of the embodiments of the present invention and these drawings without creative efforts.

[0028] Figure 1 It is a schematic structural diagram of the installation cylinder body in the embodiment of the present invention;

[0029] Figure 2Schematic diagram of the structure where the magnet is bonded to the inner wall surface of the mounting cylinder in the embodiment of the present invention;

[0030] Figure 3 Schematic diagram of the structure where a plurality of profiling blocks are filled between the support shaft and the mounting cylinder in the embodiment of the present invention;

[0031] Figure 4 Assembly schematic diagram of the support shaft, the baffle plate and the annular connecting member in the embodiment of the present invention;

[0032] Figure 5 Schematic diagram of the structure of the support shaft in the embodiment of the present invention;

[0033] Figure 6 Schematic diagram of the structure of the baffle plate in the embodiment of the present invention;

[0034] Figure 7 Schematic diagram of the structure of the annular connecting member in the embodiment of the present invention;

[0035] Figure 8 Schematic diagram of the structure where the magnetic array auxiliary installation tooling is assembled to the mounting cylinder in the embodiment of the present invention;

[0036] Figure 9 Internal schematic diagram of the structure where the magnetic array auxiliary installation tooling is assembled to the mounting cylinder in the embodiment of the present invention;

[0037] Figure 10 Schematic diagram of the structure from the first perspective after the clamping assembly is matched with the magnet in the embodiment of the present invention;

[0038] Figure 11 Schematic diagram of the structure from the second perspective after the clamping assembly is matched with the magnet in the embodiment of the present invention (the screw holes are not shown);

[0039] Figure 12 Flow chart of the installation method of the magnetic array in the embodiment of the present invention.

[0040] Reference numerals:

[0041] 100, mounting cylinder; 101, first assembly hole; 102, second positioning surface; 200, magnet;

[0042] 1, support shaft; 2, baffle plate; 3, profiling block; 4, handle; 41, avoidance notch; 5, annular connecting member; 51, second assembly hole; 6, second fastener; 7, jaw; 8, setscrew; 9, connecting plate; 91, first connection hole; 10, first fastener;

[0043] 11, annular limiting portion; 12, avoidance groove; 13, first positioning surface;

[0044] 21, access and avoidance hole; 22, central through hole; 23, observation hole;

[0045] 71. First segment; 711. Screw hole; 712. Second connection hole; 72. Second segment; 73. Third segment. Detailed implementation mode

[0046] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. The components of the embodiments of the present invention usually described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0047] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this invention is usually placed when in use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance. In the description of the present invention, unless otherwise specified, the meaning of "plural" is two or more.

[0048] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0050] During the installation process of the magnetic array, due to the different magnetization directions of adjacent magnets, there is a phenomenon of mutual repulsion, which brings difficulties to the installation of the magnets. In order to enable the adjacent two magnets in the magnetic array with opposite polarities to be smoothly assembled into the installation cylinder and reduce the installation difficulty of the magnetic array in the beam source screening device, this embodiment provides an installation method for the magnetic array, which will be described in detail below in combination with Figures 1 to 12 The specific content of this embodiment will be described in detail.

[0051] The installation method of the magnetic array in this embodiment includes the following steps:

[0052] S1. Insert the support shaft 1 into the installation cylinder 100;

[0053] S2. Fill the annular accommodation cavity formed between the support shaft 1 and the installation cylinder 100 with a set number of profiling blocks 3;

[0054] S3. Rotate the two baffles 2 on the support shaft 1 until the inlet and outlet avoidance holes 21 on the two baffles 2 are aligned with the profiling block 3 to be taken out;

[0055] S4. While pushing the profiling block 3 to be taken out out of the annular accommodation cavity from the inlet and outlet avoidance hole 21 of one baffle 2, push the magnet 200 to be filled into the annular accommodation cavity from the inlet and outlet avoidance hole 21 of the other baffle 2;

[0056] S5. Return to step S3 until all the profiling blocks are replaced by magnets 200 to form a magnetic array.

[0057] In short, for the installation method of the magnetic array provided in this embodiment, the support shaft 1 is inserted into the installation cylinder 100, a set number of profiling blocks 3 are filled into the annular accommodation cavity formed between the support shaft 1 and the installation cylinder 100, the two baffles 2 on the support shaft 1 are rotated until the inlet and outlet avoidance holes 21 on the two baffles 2 are aligned with the profiling block 3 to be taken out, while pushing the profiling block 3 to be taken out out of the annular accommodation cavity from the inlet and outlet avoidance hole 21 of one baffle 2, push the magnet 200 to be filled into the annular accommodation cavity from the inlet and outlet avoidance hole 21 of the other baffle 2 until all the profiling blocks are replaced by magnets 200 to form a magnetic array. First, a plurality of profiling blocks 3 are filled into the annular accommodation cavity, and then all the profiling blocks 3 are replaced by magnets 200 by a one-by-one replacement method. Even if the adjacent two magnets 200 in the magnetic array have repulsive polarities, they can be successfully assembled into the installation cylinder 100, reducing the installation difficulty of the magnetic array in the beam source screening device.

[0058] It can be understood that during the rotation of the baffle 2, the baffle 2 can also push the protruding profiling block 3 or magnet 200 into the annular accommodation cavity to ensure that the two ends of the adjacent profiling blocks 3 or magnets 200 are flush.

[0059] Further, the material of the profiling block is a non-magnetic material. Exemplarily, the material of the profiling block is nylon. Non-magnetic materials may also include: wood, plastic, glass, rubber, etc.

[0060] Further, a set number of first positioning surfaces 13 are circumferentially arranged on the support shaft 1, and a set number of second positioning surfaces 102 are circumferentially arranged on the inner wall of the mounting cylinder 100. The first positioning surfaces 13 and the second positioning surfaces 102 are arranged in one-to-one correspondence, and the profiling blocks 3 or the magnets 200 are embedded between the first positioning surfaces 13 and the second positioning surfaces 102. In this embodiment, the set number of first positioning surfaces 13 form a regular polygon structure on the support shaft 1, and the set number of second positioning surfaces 102 form a regular polygon cavity in the mounting cylinder 100. The cross-sectional shapes of the profiling blocks 3 and the magnets 200 are isosceles trapezoids.

[0061] Further, in step S4, the magnet 200 is pushed into the annular accommodation cavity and bonded to the second positioning surface 102 of the mounting cylinder 100. By using the bonding method, the magnet 200 can be connected to the mounting cylinder 100 without adding too much weight, which helps the lightweight design of the product and improves the overall performance and efficiency. Compared with traditional mechanical connection methods such as bolt connection or welding, bonding can avoid machining processes such as cutting and welding, thereby reducing material loss and making the product appearance more beautiful. It is suitable for occasions with high appearance requirements and improves the overall texture of the product.

[0062] Further, step S4 further includes: S41, applying glue between the magnet 200 and the second positioning surface 102 of the mounting cylinder 100, and inserting the two jaws 7 of the clamping assembly on one side close to the support shaft 1 at both ends of the magnet 200; S42, screwing the setscrew 8 on the jaw 7, and the setscrew 8 presses against the outer wall of the mounting cylinder 100, so that the jaw 7 pulls the magnet 200 to press against the second positioning surface 102 of the mounting cylinder 100 until the glue solidifies. Exemplarily, avoiding grooves 12 are arranged at both ends of the support shaft 1, the jaw 7 includes a first segment 71, a second segment 72 and a third segment 73, the first segment 71 and the third segment 73 are parallel and spaced at both ends of the second segment 72, the first segment 71 is located outside the mounting cylinder 100, the third segment 73 can pass through the access hole 21 and enter the avoiding groove 12 and is located at the lower end surface of the magnet 200, and pulling the first segment 71 along the radial direction of the mounting cylinder 100 enables the third segment 73 of the jaw 7 to push the magnet 200 to press against the inner wall surface of the mounting cylinder 100. By adding the jaw 7, when pulling the first segment 71 of the jaw 7 along the radial direction of the mounting cylinder 100, the third segment 73 of the jaw 7 can be pressed against the inner wall surface of the mounting cylinder 100, so that the glue solidifies without bubbles, ensuring that the magnet 200 is firmly bonded to the inner wall surface of the mounting cylinder 100. Further, a screw hole 711 is arranged on the first segment 71, the clamping assembly further includes a setscrew 8, and the setscrew 8 is in threaded connection with the screw hole 711. Rotating the setscrew 8 can make one end of the setscrew 8 press against the outer wall surface of the mounting cylinder 100. Combined with Figure 9As shown, by continuously rotating the setscrew 8, the jaw 7 can be elevated radially along the mounting cylinder 100, so that the third segment 73 of the jaw 7 pushes the magnet 200 against the inner wall surface of the mounting cylinder 100.

[0063] Further, in step S42, by screwing the setscrews 8 on the two jaws 7, both ends of the magnet 200 are flush with the second positioning surface 102. By making the magnet 200 flush with the second positioning surface 102, the thickness of the adhesive layer formed between the magnet 200 and the second positioning surface 102 is ensured to be uniform.

[0064] Further, in step S41, the connecting plate 9 of the clamping assembly is used to connect the two jaws 7 into an integrated structure. A plurality of first connection holes 91 are provided on the connecting plate 9, and second connection holes 712 are provided on the jaws 7. The first fastener 10 can pass through the first connection hole 91 and be connected to the second connection hole 712.

[0065] The second connection holes 712 of the first segments 71 of the two jaws 7 are all connected to the first connection holes 91 of the connecting plate 9 through the first fasteners 10. Since a plurality of first connection holes 91 are provided on the connecting plate 9, the installation positions of the two jaws 7 on the connecting plate 9 can be changed according to the actual use situation, so as to adjust the distance between the two jaws 7, which can meet the clamping of magnets 200 of different lengths and expand the application range of the clamping assembly.

[0066] Further, in step S2, the two annular connectors 5 are respectively installed at the two ports of the mounting cylinder 100, so that the baffle 2 is located between the annular connector 5 and the magnet 200, and the inner diameter of the annular connector 5 is smaller than the outer diameter of the baffle 2. By adding the two annular connectors 5, it can be avoided that the baffle 2 falls off the support shaft 1 during rotation.

[0067] Even further, as Figure 1 、 Figure 7 Combined with Figure 9 shown, first assembly holes 101 are provided at both ports of the mounting cylinder 100, and second assembly holes 51 are provided on each annular connector 5. The second fastener 6 passes through the second assembly hole 51 and is connected to the first assembly hole 101. By adding the first assembly hole 101 and the second assembly hole 51, the connection stability between the annular connector 5 and the mounting cylinder 100 is ensured.

[0068] Further, the opening size of the access and avoidance hole 21 is only for one profiling block 3 or the magnet 200 to pass through. During the process of pushing the profiling block 3, it is avoided to also carry out the adjacent profiling block 3 out of the mounting cylinder 100.

[0069] Optionally, an observation hole 23 is further provided on the baffle 2, which facilitates viewing the magnet 200 inside the installation cylinder body 100 through the observation hole 23. In some application scenarios, the clamping jaw 7 can also be inserted into the avoidance groove 12 of the support shaft 1 through the observation hole 23.

[0070] Furthermore, a handle 4 is installed on the baffle 2, and the length of the handle 4 extends out of the outer wall of the installation cylinder body 100. The end of the handle 4 extending out of the installation cylinder body 100 facilitates the hand to tightly hold. By adding the handle 4, on the one hand, it is convenient to rotate the baffle 2, and on the other hand, the rotation torque of the handle 4 is reduced by extending the force arm.

[0071] Furthermore, the baffle 2 is provided with a central through hole 22, and both ends of the support shaft 1 are provided with annular limiting portions 11. The central through hole 22 of the baffle 2 is sleeved on the annular limiting portions 11. The annular limiting portions 11 in this embodiment can be, but are not limited to, bearings or annular grooves, ensuring that the baffle 2 can rotate relative to the support shaft 1 and preventing the baffle 2 from falling off the support shaft 1.

[0072] Furthermore, the handle 4 is provided with an avoidance notch 41, and the support shaft 1 passes through the avoidance notch 41. By adding the avoidance notch 41, during the process of rotating the handle 4, the structural interference between the handle 4 and the support shaft 1 is avoided. The avoidance notch 41 in this embodiment is semi-circular.

[0073] Note that the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, it can also include more other equivalent embodiments, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A method for installing a magnetic array, characterized in that: The steps include: S1, inserting the support shaft (1) into the installation cylinder (100); S2, a set number of profiling blocks (3) are filled into the annular accommodation cavity formed between the support shaft (1) and the mounting cylinder (100); S3, rotating the two baffles (2) on the support shaft (1) until the entry and exit avoidance holes (21) on the two baffles (2) are aligned with the profiling block (3) to be removed; S4, pushing the profiling block (3) to be taken out from the annular accommodating cavity through the inlet and outlet avoidance hole (21) of one of the baffles (2), while pushing the magnet (200) to be filled into the annular accommodating cavity through the inlet and outlet avoidance hole (21) of the other baffle (2); S5, return to step S3, until all the contour blocks (3) are replaced by magnets (200) and a magnetic array is formed.

2. The method for installing a magnetic array according to claim 1, characterized in that: The material of the profiling block (3) is non-magnetic material.

3. The method for installing a magnetic array according to claim 1, characterized in that: A set number of first positioning surfaces (13) are circumferentially arranged on the support shaft (1), a set number of second positioning surfaces (102) are circumferentially arranged on the inner wall of the mounting cylinder (100), the first positioning surfaces (13) and the second positioning surfaces (102) are arranged in a one-to-one correspondence, and the profiling block (3) or the magnet (200) is embedded between the first positioning surface (13) and the second positioning surface (102).

4. The method for installing a magnetic array according to claim 3, characterized in that: In the step S4, the magnet (200) is pushed into the annular accommodating cavity and bonded to the second positioning surface (102) of the mounting cylinder (100).

5. The method for installing a magnetic array according to claim 4, characterized in that: The step S4 also includes: S41, applying glue between the magnet (200) and the second positioning surface (102) of the mounting cylinder (100), and inserting two clamping claws (7) of the clamping assembly into the two ends of the magnet (200) close to the side of the support shaft (1); S42, screwing the top screw (8) on the clamping jaw (7), and the top screw (8) is pressed against the outer wall of the installation cylinder (100), so that the clamping jaw (7) pulls the magnet (200) to press against the second positioning surface (102) of the installation cylinder (100) until the glue solidifies.

6. The method for installing a magnetic array according to claim 5, characterized in that: In the step S42, the top screws (8) on the two clamping jaws (7) are screwed so that both ends of the magnet (200) are flush with the second positioning surface (102).

7. The method for installing a magnetic array according to claim 5, characterized in that: In the step S41, the two clamping jaws (7) are connected into an integrated structure using a connecting plate (9) of the clamping assembly, a plurality of first connecting holes (91) are provided on the connecting plate (9), and a second connecting hole (712) is provided on the clamping jaw (7), and the first fastener (10) can pass through the first connecting hole (91) and connect with the second connecting hole (712).

8. The method for installing a magnetic array according to claim 7, characterized in that: In step S2, two annular connectors (5) are respectively installed at two ports of the installation cylinder (100), so that the baffle (2) is located between the annular connector (5) and the magnet (200), wherein the inner ring diameter of the annular connector (5) is smaller than the outer diameter of the baffle (2).

9. The method for installing a magnetic array according to any one of claims 1 to 7, characterized in that: The opening size of the entry and exit avoidance hole (21) is only large enough for one of the profiling blocks (3) or the magnet (200) to pass through.

10. The method for installing a magnetic array according to claim 9, characterized in that: A handle (4) is mounted on the baffle (2), and the length of the handle (4) extends beyond the outer wall of the mounting cylinder (100).

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