Magnetic array installation method and magnetic array auxiliary installation mechanism

Abstract

The invention provides a magnetic array installation method and a magnetic array auxiliary installation mechanism, and relates to a semiconductor material surface processing technology. The magnetic array installation method comprises the steps that the auxiliary shaft is arranged in the magnet installation cylinder; arranging a plurality of non-magnetic auxiliary filling blocks between the auxiliary shaft and the inner wall of the magnet mounting cylinder; one auxiliary filling block is withdrawn, one magnetic block is arranged at the installation position after the auxiliary filling block is withdrawn, and the magnetic block is glued to the magnet installation cylinder; the clamping assembly is arranged on the magnet mounting cylinder so as to limit the magnetic block in the axial direction and the radial direction of the auxiliary shaft, and the clamping assembly is adjusted until the current magnetic block is leveled and fastened; and the third step and the fourth step are repeated until the multiple magnetic blocks are all installed in the magnet installation cylinder, the auxiliary shaft is withdrawn so that a screening channel can be formed in the magnet installation cylinder, and the clamping assembly is withdrawn. According to the magnetic array mounting method and the magnetic array auxiliary mounting mechanism, the mounting tightness of the magnetic blocks in the magnetic array can be improved, the mounting difficulty is reduced, and the mounting efficiency of the magnetic array is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor material surface processing, and particularly to a magnetic array installation method and a magnetic array auxiliary installation mechanism. Background Art

[0002] When performing fine polishing treatment on the surface of a wafer, it is usually accomplished by means of a superatomic beam. The gas superatomic beam is usually generated by an ultrasonic adiabatic expansion process, which is mixed with a large number of individual gas molecules. These gas molecules will generate single-atom ions after ionization. If not filtered, these single-atom ions will be mixed in the superatomic beam and synchronously incident on the surface of the wafer to be processed, thereby affecting the smoothness and lattice quality of the wafer surface, resulting in poor process effects.

[0003] In the actual production process, according to the characteristic that superatomic ions and single-atom ions with the same kinetic energy have different masses, a superatomic beam source magnetic screening device can be used to screen the superatomic beam. However, during the process of assembling the magnetic array in the superatomic beam source magnetic screening device, in the early stage of installation, when installing a single magnetic block, there may be a situation where the installation tightness of the magnetic block is poor; in the later stage of installation, when installing multiple magnetic blocks, since the magnetization directions of two adjacent magnetic blocks in the magnetic array are different, the two adjacent magnetic blocks repel each other, and it is difficult to install a single magnetic block between the two adjacent magnetic blocks, and the installation efficiency is relatively low. Summary of the Invention

[0004] The purpose of the present invention is to provide a magnetic array installation method and a magnetic array auxiliary installation mechanism, which can improve the installation tightness of the magnetic blocks in the magnetic array, reduce the installation difficulty, and improve the installation efficiency of the magnetic array.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A magnetic array installation method, which is applied to a magnetic array auxiliary installation mechanism, and is used to assist in installing multiple magnetic blocks in a magnetic array into a magnet installation cylinder through the magnetic array auxiliary installation mechanism, and configure a screening channel in the magnet installation cylinder. The installation method includes:

[0007] Set the auxiliary shaft in the magnetic array auxiliary installation mechanism in the magnet installation cylinder;

[0008] Set a plurality of non-magnetic auxiliary filling blocks in the magnetic array auxiliary installation mechanism along the circumferential direction of the auxiliary shaft between the auxiliary shaft and the inner wall of the magnet installation cylinder, where the number of the auxiliary filling blocks is the same as the number of the magnetic blocks;

[0009] Remove one of the auxiliary filling blocks, place one of the magnetic blocks at the installation position after the removal of the auxiliary filling block, and bond the magnetic block to the inner wall of the magnet installation cylinder;

[0010] Arrange the clamping components in the magnetic array auxiliary installation mechanism opposite to the magnetic block on the outer wall of the magnet installation cylinder to limit the magnetic block in the axial and radial directions of the auxiliary shaft. Adjust the clamping components until the current magnetic block is leveled and tightened;

[0011] Repeat the third and fourth steps in sequence until multiple magnetic blocks are all installed in the magnet installation cylinder:

[0012] Remove the auxiliary shaft to form a screening channel in the magnet installation cylinder, and remove the clamping components.

[0013] As a further technical solution, the number of magnetic blocks is set to an even number, and when installing, two magnetic blocks are in a group. The magnetization directions of the two magnetic blocks in the same group are the same, and the installation positions of the two magnetic blocks in the same group are symmetrical about the axis of the auxiliary shaft.

[0014] As a further technical solution, when setting the magnetic blocks to be installed at the installation positions where the magnetic blocks have been installed on one side or both sides, the clamping components need to be arranged for each of the installed magnetic blocks and the magnetic blocks to be installed in a one-to-one correspondence.

[0015] The magnetic array auxiliary installation mechanism is used for a magnetic array installation method, including:

[0016] An auxiliary component, including an auxiliary shaft and a plurality of auxiliary filling blocks. The number of the auxiliary filling blocks is the same as that of the magnetic blocks. The auxiliary shaft can be movably arranged in the magnet installation cylinder, and a plurality of the auxiliary filling blocks can be sequentially movably arranged between the auxiliary shaft and the magnet installation cylinder along the circumferential direction of the auxiliary shaft;

[0017] A plurality of clamping components, each clamping component includes two adjustable jaws, and each clamping component can be arranged on the magnet installation cylinder;

[0018] When the auxiliary filling block is removed to form an installation position, the corresponding magnetic block is placed at the installation position and bonded to the inner wall of the magnet installation cylinder. The clamping component corresponds to the outer wall of the magnet installation cylinder at the installation position, and the two jaws respectively clamp the two ends of the magnetic block along the axial direction of the auxiliary shaft to level and tighten the magnetic block.

[0019] As a further technical solution, a plurality of the auxiliary filling blocks are all set as non-magnetic parts.

[0020] As a further technical solution, the clamping assembly includes a mounting member and a plurality of connecting members, and both of the two jaws are detachably connected to the mounting member through the connecting members;

[0021] Alternatively, the mounting member is fixedly connected to one of the jaws, and the other jaw is detachably connected to the mounting member through the connecting member.

[0022] As a further technical solution, each of the jaws is provided with a clamping portion, and both of the two clamping portions extend in a direction approaching each other;

[0023] A support section is convexly provided in the middle of the auxiliary shaft, and the length of the support section is less than the length of the magnet block, so that avoidance areas are respectively formed at both ends of the support section in cooperation with the auxiliary shaft;

[0024] After the two jaws respectively clamp both ends of the magnet block, both of the two clamping portions are in contact with the end surface of the magnet block close to the auxiliary shaft, and the two clamping portions are respectively located in the corresponding avoidance areas.

[0025] As a further technical solution, the clamping assembly further includes a plurality of threaded fasteners, fastening threaded holes are provided on the jaws, and the threaded fasteners pass through the corresponding fastening threaded holes and are in contact with the outer wall of the magnet mounting cylinder, and the threaded fasteners are tightened to limit the corresponding magnet block in the radial direction of the magnet mounting cylinder.

[0026] As a further technical solution, limiting bayonets are provided on the auxiliary shaft corresponding to both ends of the support section, and the clamping portion can be limited and clamped in the corresponding limiting bayonet to limit the relative position between the auxiliary shaft and the magnet mounting cylinder in the circumferential direction of the auxiliary shaft.

[0027] As a further technical solution, a plurality of abutting planes corresponding to the plurality of magnet blocks are provided on the outer wall of the support section, and the plurality of abutting planes are arranged in sequence along the circumferential direction of the auxiliary shaft.

[0028] Compared with the prior art, the technical advantages of the magnetic array installation method and the magnetic array auxiliary installation mechanism provided by the present invention are:

[0029] 1. When installing the magnetic blocks, first set the auxiliary shaft in the magnet installation cylinder, and then sequentially set a plurality of auxiliary filling blocks between the auxiliary shaft and the magnet installation cylinder along the circumferential direction of the auxiliary shaft. Among them, the auxiliary shaft supports the plurality of auxiliary filling blocks. When installing the magnetic blocks, first withdraw the corresponding auxiliary filling blocks to form an installation position, then place the corresponding magnetic block in the installation position, and then glue it to the inner wall of the magnet installation cylinder. Then, use the clamping assembly to complete leveling and fastening; after the current magnetic block is installed, withdraw other auxiliary filling blocks to form an installation position again to facilitate the installation of the next magnetic block. Until a plurality of magnetic blocks are installed between the auxiliary shaft and the magnet installation cylinder, withdraw the auxiliary shaft so that a screening channel is formed in the magnet installation cylinder and then withdraw it. In this way, during the installation process of a plurality of magnetic blocks, it is possible to avoid the displacement of the magnetic blocks in the circumferential and axial directions of the auxiliary shaft after the magnetic blocks are placed between the auxiliary shaft and the magnet installation cylinder and when the magnetic blocks are glued to the inside of the magnet installation cylinder, thereby reducing the installation difficulty and ensuring the installation efficiency and tightness after installation.

[0030] 2. Since the auxiliary shaft can be movably arranged in the magnet mounting cylinder, multiple auxiliary filling blocks can be sequentially and movably arranged between the auxiliary shaft and the magnet mounting cylinder along the circumferential direction of the auxiliary shaft, the clamping assembly can be arranged on the magnet mounting cylinder, and after the magnetic block is arranged between the auxiliary shaft and the magnet mounting cylinder, two adjustable clamping jaws in the clamping assembly can be respectively clamped at both ends of the magnetic block along the axial direction of the auxiliary shaft. Therefore, when installing multiple magnetic blocks into the magnet mounting cylinder, first arrange the auxiliary shaft in the magnet mounting cylinder, then arrange multiple auxiliary filling blocks between the auxiliary shaft and the magnet mounting cylinder, then remove one of the auxiliary filling blocks to form an installation position, then place one of the magnetic blocks in this installation position. At this time, the auxiliary shaft, the magnet mounting cylinder and the auxiliary filling blocks on both sides of the installation position cooperate with each other to limit the relative position of the magnetic block; then glue the magnetic block to the inner wall of the magnet mounting cylinder to further limit the relative position of the magnetic block; then, arrange the clamping assembly corresponding to this magnetic block on the outer wall of the magnet mounting cylinder, so that the two clamping jaws are respectively clamped at both ends of the magnetic block along the axial direction of the auxiliary shaft. By adjusting the two clamping jaws, the magnetic block is completely attached to the inner wall of the magnet mounting cylinder to achieve leveling and fastening of the installed magnetic block, thereby ensuring the fastening of the magnetic block glued to the inner wall of the magnet mounting cylinder. And so on, with the help of the auxiliary assembly and the clamping assembly, multiple magnetic blocks are installed in the magnet mounting cylinder, and then the auxiliary shaft in the magnet mounting cylinder is removed to form a screening channel at the vacant position after the auxiliary shaft is removed. During the whole process, when installing a single magnetic block, the magnetic block glued to the inner wall of the magnet mounting cylinder is limited, leveled and fastened with the help of the clamping assembly and the auxiliary filling blocks on both sides of the installation position; when installing subsequent magnetic blocks, if there are already magnetic blocks installed on one side or both sides of the installation position, the magnetic blocks already installed next to the installation position are limited to the current position by the corresponding clamping assembly, and then the magnetic block to be installed is installed in the installation position, and the corresponding clamping assembly is used to clamp and limit the magnetic block; to reduce the influence of the magnetic blocks next to the installation position on the magnetic block to be installed due to mutual repulsion, and avoid the situation that two adjacent magnetic blocks are displaced or the magnetic block to be installed breaks away from the installation position during the installation process when installing a single magnetic block on an installation position where there are already magnetic blocks installed on one side or both sides, thereby reducing the installation difficulty of the magnetic blocks and improving the installation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present invention and these drawings.

[0032] Figure 1 is a schematic diagram of the magnetic array auxiliary installation mechanism provided by the embodiment of the present invention;

[0033] Figure 2 It is a schematic structural diagram of the clamping assembly in the magnetic array-assisted installation mechanism provided by an embodiment of the present invention;

[0034] Figure 3 It is a schematic structural diagram of the auxiliary shaft in the magnetic array-assisted installation mechanism provided by an embodiment of the present invention being arranged on the magnet mounting cylinder;

[0035] Figure 4 It is a schematic structural diagram of the magnetic array-assisted installation mechanism provided by an embodiment of the present invention being arranged on the magnet mounting cylinder.

[0036] In the figure:

[0037] 10. Magnetic block; 20. Magnet mounting cylinder;

[0038] 110. Auxiliary shaft; 111. Support section;

[0039] 200. Clamping assembly; 210. Claw; 211. Clamping part; 212. Threaded hole; 213. First connecting part; 214. Second connecting part; 215. Third connecting part; 220. Mounting part; 230. Connecting part; 240. Threaded fastener. Detailed implementation manners

[0040] Before explaining any embodiment of the present application in detail, it should be understood that the present application is not limited to the structural details and component arrangements described in the following description or shown in the above drawings.

[0041] In the present application, the terms "include", "comprise", "have" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device including a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "including one..." does not exclude the presence of additional identical elements in the process, method, article or device including that element.

[0042] In the present application, the term "and / or" is a relationship describing associated objects, indicating that three relationships can exist. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, in the present application, the character " / " generally represents an "and / or" relationship between the associated objects before and after.

[0043] In this application, the terms "connect", "combine", "couple", and "mount" can be direct connections, combinations, couplings, or mounts, or can be indirect connections, combinations, couplings, or mounts. Among them, by way of example, a direct connection means that two parts or components are connected together without an intermediate member being provided, and an indirect connection means that two parts or components are each connected to at least one intermediate member, and these two parts or components are connected through the intermediate member. In addition, "connect" and "couple" are not limited to physical or mechanical connections or couplings, and can include electrical connections or couplings.

[0044] In this application, those of ordinary skill in the art will understand that relative terms used in connection with a quantity or condition (such as "about", "approximately", "substantially", etc.) are intended to include the recited value and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances resulting from manufacturing, assembly, use, etc. associated with a particular value. Such terms should also be considered to disclose a range defined by the absolute values of two endpoints. The relative term may refer to a plus or minus a certain percentage (such as 1%, 5%, 10% or more) of the indicated value. Numerical values that do not use relative terms should also be disclosed as having tolerances. In addition, "substantially" when expressing a relative angular positional relationship (such as substantially parallel, substantially perpendicular) may refer to a plus or minus a certain number of degrees (such as 1 degree, 5 degrees, 10 degrees or more) from the indicated angle.

[0045] In this application, those of ordinary skill in the art will understand that the functions performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the functions performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0046] In this application, the directional terms such as "upper", "lower", "left", "right", "front", "rear", etc. are described based on the orientation and positional relationship shown in the drawings, and should not be construed as a limitation on the embodiments of this application. In addition, in the context, it should also be understood that when it is mentioned that one element is connected "above" or "below" another element, it can not only be directly connected "above" or "below" another element, but also be indirectly connected "above" or "below" another element through an intermediate element. It should also be understood that directional terms such as the upper side, the lower side, the left side, the right side, the front side, the rear side, etc. not only represent the positive direction, but can also be understood as the side direction. For example, the lower side can include directly below, lower left, lower right, lower front, and lower rear, etc.

[0047] Combine Figures 1 to 4As shown, a magnetic array installation method is applied to a magnetic array auxiliary installation mechanism, which is used to assist in installing multiple magnetic blocks 10 in a magnetic array into a magnet installation cylinder 20 through the magnetic array auxiliary installation mechanism, and a screening channel (not shown in the figure) is configured in the magnet installation cylinder 20. By adopting this installation method, the installation tightness of the magnetic blocks 10 in the magnetic array can be improved, the installation difficulty can be reduced, and the installation efficiency of the magnetic array can be improved. Specifically, the magnetic array installation method includes the following steps:

[0048] First step: Set the auxiliary shaft 110 in the magnetic array auxiliary installation mechanism into the magnet installation cylinder 20.

[0049] Second step: Arrange a plurality of non-magnetic auxiliary filling blocks in the magnetic array auxiliary installation mechanism along the circumferential direction of the auxiliary shaft 110 between the auxiliary shaft 110 and the magnet installation cylinder 20, where the number of the auxiliary filling blocks is the same as the number of the magnetic blocks 10.

[0050] Third step: Withdraw one of the auxiliary filling blocks, place one of the magnetic blocks 10 at the installation position after the auxiliary filling block is withdrawn, and bond the magnetic block 10 to the inner wall of the magnet installation cylinder 20.

[0051] Fourth step: Arrange the clamping assembly 200 in the magnetic array auxiliary installation mechanism opposite to the magnetic block 10 on the outer wall of the magnet installation cylinder 20 to limit the magnetic block 10 in the axial and radial directions of the auxiliary shaft 110, and adjust the clamping assembly 200 until the current magnetic block 10 is leveled and fastened.

[0052] Fifth step: Repeat the third step and the fourth step in sequence until all the magnetic blocks 10 are installed in the magnet installation cylinder 20.

[0053] Sixth step: Withdraw the auxiliary shaft 110 to form a screening channel in the magnet installation cylinder 20, and withdraw the clamping assembly 200.

[0054] The magnetic block 10 in this embodiment is set to be strip-shaped. After the magnetic block 10 is installed in the magnet installation cylinder 20, the axis of the magnetic block 10 extends along the axial direction of the magnet installation cylinder 20, and the cross-sectional shapes of the multiple magnetic blocks 10 along the axial direction of the auxiliary shaft 110 are all isosceles trapezoids.

[0055] When installing the magnetic block 10, first set the auxiliary shaft 110 in the magnet mounting cylinder 20, and then sequentially set a plurality of auxiliary filling blocks between the auxiliary shaft 110 and the magnet mounting cylinder 20 along the circumferential direction of the auxiliary shaft 110. Among them, the auxiliary shaft 110 supports the plurality of auxiliary filling blocks. When installing the magnetic block 10, first withdraw the corresponding auxiliary filling block to form an installation position, then place the corresponding magnetic block 10 in the installation position, and then bond it to the inner wall of the magnet mounting cylinder 20. Then, use the clamping assembly 200 to complete leveling and fastening; after the current magnetic block 10 is installed, withdraw other auxiliary filling blocks to form an installation position again, so as to facilitate the installation of the next magnetic block 10. Until a plurality of magnetic blocks 10 are all installed between the auxiliary shaft 110 and the magnet mounting cylinder 20, withdraw the auxiliary shaft 110 to form a screening channel in the magnet mounting cylinder 20, and withdraw the clamping assembly 200. In this way, during the installation of a plurality of magnetic blocks 10, it is possible to avoid the magnetic block 10 from shifting in the circumferential and axial directions of the auxiliary shaft 110 after the magnetic block 10 is placed between the auxiliary shaft 110 and the magnet mounting cylinder 20, and when the magnetic block 10 is bonded to the inside of the magnet mounting cylinder 20, thereby reducing the installation difficulty and ensuring the installation efficiency and tightness after installation.

[0056] In this embodiment, when a plurality of magnetic blocks 10 are installed in the magnet mounting cylinder 20, the auxiliary shaft 110 is withdrawn from the magnet mounting cylinder 20 to form a screening channel for description. In some other embodiments, it can also be set that a support tube is arranged between the inner sides of a plurality of magnetic blocks 10, so that while the support tube supports the plurality of magnetic blocks 10, the inside of the support tube is directly used as the screening channel to protect the screening channel.

[0057] Since installing a plurality of magnetic blocks 10 in the magnet mounting cylinder 20 and forming a screening channel is to complete the ion screening process, and during the ion screening process, a current will be generated after the screening channel is impacted by ions. In order to prevent the current from escaping from the screening channel, if no support tube is arranged between the screening channel and the inner sides of the plurality of magnetic blocks 10, an insulating member needs to be arranged between the screening channel and the plurality of magnetic blocks 10; if a support tube is arranged between the screening channel and the inner sides of the plurality of magnetic blocks 10, an insulating member needs to be arranged between the outer wall of the support tube and the plurality of magnetic blocks 10, or the support tube is directly set as an insulating member. The material of the insulating member can be set as ceramics, Teflon, etc. according to the actual situation, and no specific limitation is made here.

[0058] Preferably, the number of magnetic blocks 10 is set to be even, and when installing, two magnetic blocks 10 are taken as a group. The magnetization directions of the two magnetic blocks 10 in the same group are the same, and the installation positions of the two magnetic blocks 10 in the same group are symmetrical about the axis of the auxiliary shaft 110.

[0059] Preferably, when the to-be-installed magnetic blocks 10 are arranged at the installation positions where the magnetic blocks 10 have been installed on one side or both sides, the installed magnetic blocks 10 and the to-be-installed magnetic blocks 10 need to be provided with clamping assemblies 200 in a one-to-one correspondence.

[0060] For the convenience of description, in this embodiment, it is described by taking eight magnetic blocks 10 provided and no support tube provided as an example. Correspondingly, eight auxiliary filling blocks are provided, and the eight auxiliary filling blocks are arranged in a strip shape corresponding to the eight magnetic blocks 10. After the eight magnetic blocks 10 are installed in the magnet installation cylinder 20, the auxiliary shaft 110 is withdrawn to form a screening channel. Specifically, when installing the magnetic blocks 10, first, the auxiliary shaft 110 is arranged in the magnet installation cylinder 20, and then the eight auxiliary filling blocks are sequentially arranged between the auxiliary shaft 110 and the magnet installation cylinder 20 along the circumference of the auxiliary shaft 110, and the eight auxiliary filling blocks are respectively denoted as No. 1 to No. 8. Among them, the auxiliary shaft 110 supports the eight auxiliary filling blocks. At the same time, along the circumference of the magnet installation cylinder 20, the eight magnetic blocks 10 are sequentially denoted as No. 1 to No. 8. In order to further reduce the installation difficulty and ensure the installation effect, the relative positions are preferentially installed when installing the eight magnetic blocks 10. For example, after installing the No. 1 magnetic block 10, first install the No. 5 magnetic block 10, and then sequentially install the No. 3 magnetic block 10 and the No. 7 magnetic block 10, the No. 2 magnetic block 10 and the No. 6 magnetic block 10, the No. 4 magnetic block 10 and the No. 8 magnetic block 10. Before installing the No. 2 magnetic block 10, the No. 6 magnetic block 10, the No. 4 magnetic block 10 and the No. 8 magnetic block 10, the adjacent magnetic blocks 10 need to be positioned first. For example, when installing the No. 2 magnetic block 10, first, the clamping assembly 200 is cooperated with the magnet installation cylinder 20 to limit the No. 1 magnetic block 10 and the No. 3 magnetic block 10, and then the No. 2 magnetic block 10 is installed between the No. 1 magnetic block 10 and the No. 3 magnetic block 10, and the corresponding clamping assembly 200 is used to limit, level and fasten the No. 2 magnetic block 10. Until the No. 2 magnetic block 10 is completely fixed in the magnet installation cylinder 20, the three groups of clamping assemblies 200 are removed and the No. 6 magnetic block 10 is installed. Until the eight magnetic blocks 10 are installed, the auxiliary shaft 110 is withdrawn to form a screening channel. In some other embodiments, the number of the magnetic blocks 10 is adaptively increased or decreased according to actual needs, and no specific limitation is made here.

[0061] Before installing the magnetic block 10, first remove the auxiliary filling block at the corresponding position to form an installation position, then place the corresponding magnetic block 10 in the installation position, and then glue it to the inner wall of the magnet installation cylinder 20. For example, taking the installation of the first magnetic block 10 as an example, specifically: when installing the first magnetic block 10, first remove the corresponding first auxiliary filling block from the magnet installation cylinder 20, and then place a magnetic block 10 into the first empty position and glue it to the inner wall of the magnet installation cylinder 20. Then, use the clamping assembly 200 to complete leveling and fastening; in this way, to avoid the magnetic block 10 shifting circumferentially or axially on the auxiliary shaft 110 when the first magnetic block 10 is placed between the auxiliary shaft 110 and the magnet installation cylinder 20, and when the first magnetic block 10 is glued to the inner wall of the magnet installation cylinder 20, so as to further reduce the installation difficulty and ensure the installation efficiency and tightness after installation.

[0062] The magnetic array auxiliary installation mechanism is used for the magnetic array installation method. The magnetic array auxiliary installation mechanism includes an auxiliary assembly and a clamping assembly 200: The auxiliary assembly includes an auxiliary shaft 110 and a plurality of auxiliary filling blocks. The number of auxiliary filling blocks is the same as that of the magnetic blocks 10. The auxiliary shaft 110 can be movably arranged in the magnet installation cylinder 20, and the plurality of auxiliary filling blocks can be sequentially movably arranged between the auxiliary shaft 110 and the magnet installation cylinder 20 along the circumference of the auxiliary shaft 110; A plurality of clamping assemblies 200, each clamping assembly 200 includes two adjustably arranged jaws 210, and each clamping assembly 200 can be arranged on the magnet installation cylinder 20; When the auxiliary filling block is removed to form an installation position, the corresponding magnetic block 10 is arranged in the installation position and glued to the inner wall of the magnet installation cylinder 20, and the clamping assembly 200 corresponds to the outer wall of the magnet installation cylinder 20 at the installation position. The two jaws 210 are respectively clamped at both ends of the magnetic block 10 along the axial direction of the auxiliary shaft 110 to realize leveling and fastening of the magnetic block 10.

[0063] Since the auxiliary shaft 110 can be movably arranged within the magnet mounting cylinder 20, a plurality of auxiliary filling blocks can be sequentially and movably arranged between the auxiliary shaft 110 and the magnet mounting cylinder 20 along the circumferential direction of the auxiliary shaft 110, the clamping assembly 200 can be arranged on the magnet mounting cylinder 20, and after the magnetic block 10 is arranged between the auxiliary shaft 110 and the magnet mounting cylinder 20, two adjustable jaws 210 in the clamping assembly 200 can be respectively clamped at both ends of the magnetic block 10 along the axial direction of the auxiliary shaft 110. Therefore, when installing a plurality of magnetic blocks 10 within the magnet mounting cylinder 20, first arrange the auxiliary shaft 110 within the magnet mounting cylinder 20, then arrange a plurality of auxiliary filling blocks between the auxiliary shaft 110 and the magnet mounting cylinder 20, then withdraw one of the auxiliary filling blocks to form an installation position, then arrange one of the magnetic blocks 10 at this installation position. At this time, the auxiliary shaft 110, the magnet mounting cylinder 20 and the auxiliary filling blocks on both sides of the installation position cooperate with each other to limit the relative position of the magnetic block 10; then bond the magnetic block 10 to the inner wall of the magnet mounting cylinder 20 to further limit the relative position of the magnetic block 10; afterwards, arrange the clamping assembly 200 corresponding to this magnetic block 10 on the outer wall of the magnet mounting cylinder 20, so that the two jaws 210 are respectively clamped at both ends of the magnetic block 10 along the axial direction of the auxiliary shaft 110. By adjusting the two jaws 210, the magnetic block 10 is made to fit perfectly with the inner wall of the magnet mounting cylinder 20 to achieve leveling and fastening of the installed magnetic block 10, thereby ensuring the fastening of the magnetic block 10 bonded to the inner wall of the magnet mounting cylinder 20. And so on, with the help of the auxiliary assembly and the clamping assembly 200, a plurality of magnetic blocks 10 are installed within the magnet mounting cylinder 20, then the auxiliary shaft 110 within the magnet mounting cylinder 20 is withdrawn, and a screening channel is formed at the vacant position after the auxiliary shaft 110 is withdrawn. During the whole process, when installing a single magnetic block 10, the magnetic block 10 bonded to the inner wall of the magnet mounting cylinder 20 is limited, leveled and fastened with the help of the clamping assembly 200 and the auxiliary filling blocks on both sides of the installation position; when installing subsequent magnetic blocks 10, if there are already magnetic blocks 10 installed on one side or both sides of the installation position, the already installed magnetic blocks 10 next to the installation position are limited to the current position by the corresponding clamping assembly 200, then the magnetic block 10 to be installed is installed at the installation position, and the corresponding clamping assembly 200 is used to clamp and limit this magnetic block 10; to reduce the influence of the magnetic blocks 10 next to the installation position on the magnetic block 10 to be installed due to mutual repulsion, and avoid the situation where two adjacent magnetic blocks 10 are displaced or the magnetic block 10 to be installed disengages from the installation position during the installation process when installing a single magnetic block 10 at an installation position where there are already magnetic blocks 10 installed on one side or both sides, thereby reducing the installation difficulty of the magnetic blocks 10 and improving the installation efficiency.

[0064] Preferably, the plurality of auxiliary filling blocks are all set as non-magnetic members. In this way, after sequentially placing the plurality of non-magnetic auxiliary filling blocks on the auxiliary shaft 110 after the magnet mounting cylinder 20 is set, it is possible to avoid the difficulty of withdrawing the auxiliary filling blocks from increasing due to magnetic connection between the plurality of auxiliary filling blocks during the subsequent installation of the magnetic blocks 10; at the same time, it is possible to avoid magnetic connection between the already installed magnetic blocks 10 and the non-withdrawn auxiliary filling blocks, resulting in the situation that the already installed magnetic blocks 10 are displaced or the non-withdrawn auxiliary filling blocks are difficult to withdraw, thereby further reducing the installation difficulty of the magnetic blocks 10 and improving the installation efficiency. In this embodiment, the plurality of auxiliary filling blocks are all set as nylon blocks to avoid magnetic connection between the plurality of auxiliary filling blocks or magnetic connection between the plurality of auxiliary filling blocks and the magnetic blocks 10; at the same time, due to the high mechanical strength, high wear resistance, high heat resistance, and strong durability of the nylon material, the plurality of auxiliary filling blocks can be reused, ensuring the auxiliary installation effect while reducing the installation cost; and the nylon material is easy to process, which can reduce the processing difficulty of the auxiliary filling blocks. In some other embodiments, the plurality of auxiliary filling blocks can be made of iron, wood, aluminum alloy, plywood, etc. according to the actual situation, as long as the above technical effects can be achieved, and no specific limitation is made here.

[0065] After the installation of the eight magnetic blocks 10 is completed, in order to reduce the difficulty of withdrawing the auxiliary shaft 110, in this embodiment, the auxiliary shaft 110 is also set as a non-magnetic member, and the specific material of the auxiliary shaft 110 is selected according to actual needs, and no specific limitation is made here.

[0066] Preferably, the clamping assembly 200 includes a mounting member 220 and a plurality of connecting members 230, and both of the two clamping jaws 210 are detachably connected to the mounting member 220 through the connecting members 230; alternatively, the mounting member 220 is fixedly connected to one of the clamping jaws 210, and the other clamping jaw 210 is detachably connected to the mounting member 220 through the connecting members 230.

[0067] Combined with Figure 1 and Figure 2As shown in the figure, in order to improve the convenience of the clamping assembly 200 for the corresponding arrangement of the magnetic block 10 on the magnet mounting cylinder 20, the mounting member 220 is detachably connected to at least one of the jaws 210; in order to ensure the clamping and positioning effect of the already installed magnetic block 10, both jaws 210 are in a "C" shape. Specifically, each jaw 210 includes a rod-shaped first connecting portion 213, a second connecting portion 214, and a third connecting portion 215. The first end of the first connecting portion 213 and the first end of the third connecting portion 215 are respectively fixedly arranged at both ends of the second connecting portion 214, and are both arranged at an angle with the second connecting portion 214. Moreover, the second ends of the first connecting portion 213 and the third connecting portion 215 both extend in the same direction, so that the jaw 210 is in a "C" shape; the mounting member 220 is connected to the second ends of the two first connecting portions 213. When clamping and limiting the already installed magnetic block 10 by means of the clamping assembly 200, one of the jaws 210 is detached from the mounting member 220, and then the two jaws 210 are arranged corresponding to the already installed magnetic block 10 on the magnet mounting cylinder 20. Then, the jaw 210 detached from the mounting member 220 is connected to the mounting member 220 again through the connecting member 230, so that the two jaws 210 cooperate to clamp and position the already installed magnetic block 10.

[0068] In some other embodiments, the jaw 210 may also be provided with only the second connecting portion 214 and the third connecting portion 215, that is, the jaw 210 is in an "L" shape. At the same time, the length of the mounting member 220 is increased, and the two "L"-shaped jaws 210 are both connected to the mounting member 220 to realize the clamping and positioning of the magnetic block 10.

[0069] In this embodiment, a plurality of connecting members 230 are set as screws. The mounting member 220, the second ends of the first connecting portion 213, and the second ends of the third connecting portion 215 are all provided with connecting threaded holes 212. The screw passes through the corresponding connecting threaded holes 212 to realize the detachable connection between the mounting member 220 and the jaw 210. The second ends of the two first connecting portions 213 are both provided with a plurality of connecting threaded holes 212, and the number of connecting threaded holes 212 on the mounting member 220 is greater than or equal to the sum of the number of connecting threaded holes 212 at the second ends of the two first connecting portions 213; thus, on the one hand, the connection strength between the mounting member 220 and the two jaws 210 is improved, thereby improving the fastening degree of the clamping assembly 200 after the already installed magnetic block 10 is arranged on the magnet mounting cylinder 20; on the other hand, the distance between the two jaws 210 can be changed by changing the overlapping degree of any first connecting portion 213 and the mounting member 220, so as to improve the applicability of the clamping assembly 200.

[0070] The mounting member 220 can be set in a flat plate shape, a bent plate shape or a cylindrical shape. In this embodiment, the mounting member 220 is set in a bent shape, that is, along the axial direction of the auxiliary shaft 110, the cross-sectional shape of the mounting member 220 is "U" shaped. With such a setting, after both clamping jaws 210 are connected to the mounting member 220, the axes of the two first connecting portions 213 are ensured to be collinear, so as to further improve the positioning effect of the clamping assembly 200 on the installed magnet 10.

[0071] Preferably, each clamping jaw 210 is provided with a clamping portion 211, and the two clamping portions 211 both extend in the direction of approaching each other; a support section 111 protrudes from the middle of the auxiliary shaft 110, and the length of the support section 111 is less than the length of the magnet 10, so that avoidance areas are respectively formed by the two ends of the support section 111 and the auxiliary shaft 110; after the two clamping jaws 210 respectively clamp the two ends of the magnet 10, the two clamping portions 211 are both in contact with the end surface of the magnet 10 close to the auxiliary shaft 110, and the two clamping portions 211 are respectively located in the corresponding avoidance areas.

[0072] Specifically combined with Figure 1 and Figure 2 As shown, the two clamping portions 211 are respectively arranged at the second ends of the two third connecting portions 215 and both extend in the direction away from the corresponding second connecting portion 214; the two clamping portions 211 are both in contact with the end surface of the magnet 10 close to the auxiliary shaft 110, which can limit the relative position of the magnet 10 in the radial direction of the auxiliary shaft 110 with respect to the magnet mounting cylinder 20, so as to ensure the leveling and fastening effects on the magnet 10. By setting the avoidance areas, interference between the clamping portions 211 and the auxiliary shaft 110 is avoided, so as to further improve the leveling and fastening effects on the magnet 10. And the thickness of the clamping portion 211 is less than the thickness of the clamping jaw 210, so that the clamping portion 211 and the clamping jaw 210 cooperate to form a limiting step capable of limiting the magnet 10. Since the thickness of the third connecting portion 215 is greater than the thickness of the clamping portion 211, a limiting step is formed between the end of the third connecting portion 215 away from the second connecting portion 214 and the clamping portion 211. With such a setting, after the two clamping jaws 210 respectively clamp the two ends of the magnet 10, the limiting step is clamped to the corresponding end of the magnet 10, so as to limit the relative position of the magnet 10 and the magnet mounting cylinder 20 in the radial and axial directions of the auxiliary shaft 110, so as to further improve the installation effect of the magnet.

[0073] As a further technical solution, the clamping assembly 200 further includes a plurality of threaded fasteners 240. The clamping jaw 210 is provided with fastening threaded holes 212, and the threaded fasteners 240 pass through the corresponding fastening threaded holes 212 and abut against the outer wall of the magnet mounting cylinder 20. The threaded fasteners 240 are tightened to limit the corresponding magnet 10 in the radial direction of the magnet mounting cylinder 20.

[0074] Combined with Figure 2As shown, in this embodiment, the fastening threaded holes 212 are arranged in the middle of the first connecting portion 213. When the two jaws 210 respectively clamp the two ends of the magnet block 10, and both the two clamping portions 211 are in contact with the end face of the magnet block 10 close to the auxiliary shaft 110, the threaded fastener 240 is tightened. Since the threaded fastener 240 is in contact with the magnet mounting cylinder 20, during the process of tightening the threaded fastener 240, the first connecting portion 213 moves along the threaded fastener 240 in a direction away from the axis of the magnet mounting cylinder 20, so that the tightening force between the clamping portion 211 and the corresponding end of the magnet block 10 increases, thereby further improving the fitting effect between the magnet block 10 and the inner wall of the magnet mounting cylinder 20.

[0075] Furthermore, along the axial direction of the auxiliary shaft 110, a plurality of fastening threaded holes 212 are arranged at intervals on the jaw 210. By providing a plurality of threaded holes 212, threaded fasteners 240 are arranged in each of the fastening threaded holes 212, so as to further increase the tightening force between the clamping portion 211 and the corresponding end of the magnet block 10, thereby improving the fitting effect between the magnet block 10 and the inner wall of the magnet mounting cylinder 20.

[0076] Preferably, limiting notches are arranged on the auxiliary shaft 110 corresponding to both ends of the support section 111. The clamping portion 211 can be limited and clamped in the corresponding limiting notches to limit the relative position between the auxiliary shaft 110 and the magnet mounting cylinder 20 in the circumferential direction of the auxiliary shaft 110. After the two jaws 210 clamp the two ends of the magnet block 10, the two clamping portions 211 are respectively clamped in the two limiting notches, so as to prevent relative rotation between the auxiliary shaft 110, the clamping assembly 200 and the magnet mounting cylinder 20 during the progress of the magnet block 10, thereby further improving the installation effect of the magnet.

[0077] Preferably, a plurality of abutting planes are arranged on the outer wall of the support section 111 corresponding to the plurality of magnet blocks 10, and the plurality of abutting planes are arranged in sequence along the circumferential direction of the auxiliary shaft 110.

[0078] Taking the installation of eight magnet blocks 10 in the magnet mounting cylinder 20 as an example, corresponding to the eight magnet blocks 10, eight abutting planes are arranged at intervals along the circumferential direction of the support shaft on the outer wall of the support section 111, that is, along the axial direction of the auxiliary shaft 110, the cross-sectional shape of the support section 111 is a regular octagon. With such a setting, after the auxiliary filling block or the magnet block 10 is arranged between the auxiliary shaft 110 and the magnet mounting cylinder 20, it is ensured that the auxiliary filling block or the magnet block 10 can be in contact with the corresponding abutting plane, thereby preventing the auxiliary filling block or the magnet block 10 from shifting relative to the auxiliary shaft 110 in the circumferential direction of the auxiliary shaft 110, further reducing the installation difficulty of the magnet block 10 and ensuring the installation tightness of the magnet block 10.

[0079] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A magnetic array installation method, characterized in that: The invention is applied to a magnetic array auxiliary installation mechanism, and is used for auxiliary installation of a plurality of magnetic blocks (10) in a magnetic array in a magnet installation cylinder (20) through the magnetic array auxiliary installation mechanism, and a screening channel is arranged in the magnet installation cylinder (20). The installation method comprises: S1, placing the auxiliary shaft (110) in the magnetic array auxiliary installation mechanism in the magnet installation cylinder (20); S2, arranging a plurality of non-magnetic auxiliary filling blocks in the magnetic array auxiliary installation mechanism in sequence along the circumferential direction of the auxiliary shaft (110) between the auxiliary shaft (110) and the inner wall of the magnet installation cylinder (20), wherein the number of the auxiliary filling blocks is the same as the number of the magnetic blocks (10); S3, withdrawing one of the auxiliary filling blocks, placing one of the magnetic blocks (10) at the installation position after the auxiliary filling block is withdrawn, and gluing the magnetic block (10) to the inner wall of the magnet installation cylinder (20); S4, arranging the clamping assembly (200) in the magnetic array auxiliary installation mechanism and the magnetic block (10) on the outer wall of the magnet installation cylinder (20) in a manner opposite to each other, so as to limit the axial and radial positions of the magnetic block (10) of the auxiliary shaft (110), and adjusting the clamping assembly (200) until the magnetic block (10) is leveled and tightened; S5. Repeat the third step and the fourth step in sequence until the plurality of magnetic blocks (10) are installed in the magnet installation cylinder (20): S6, withdrawing the auxiliary shaft (110) to form a screening channel in the magnet mounting cylinder (20), and withdrawing the clamping assembly (200).

2. The magnetic array installation method according to claim 1, characterized in that: The number of the magnetic blocks (10) is set to an even number, and when installed, two of the magnetic blocks (10) form a group, the magnetization directions of the two magnetic blocks (10) in the same group are the same, and the installation positions of the two magnetic blocks (10) in the same group are symmetrical about the axis of the auxiliary shaft (110).

3. The magnetic array installation method according to claim 1, characterized in that: When the magnetic block (10) to be installed is arranged at the installation position where the magnetic block (10) is already installed on one side or both sides, the already installed magnetic block (10) and the magnetic block (10) to be installed need to be arranged with the clamping assembly (200) in a one-to-one correspondence.

4. A magnetic array auxiliary installation mechanism, characterized in that: The magnetic array auxiliary installation mechanism is used in the magnetic array installation method according to any one of claims 1 to 3, comprising: An auxiliary component comprises an auxiliary shaft (110) and a plurality of auxiliary filling blocks, the number of the auxiliary filling blocks being the same as the number of the magnetic blocks (10), the auxiliary shaft (110) being movably disposed in the magnet mounting cylinder (20), and the plurality of auxiliary filling blocks being movably disposed in sequence along the circumference of the auxiliary shaft (110) between the auxiliary shaft (110) and the magnet mounting cylinder (20); A plurality of clamping assemblies (200), each of the clamping assemblies (200) comprising two adjustable clamping jaws (210), and each of the clamping assemblies (200) being capable of being arranged on the magnet mounting cylinder (20); When the auxiliary filling block is withdrawn to form a mounting position, the corresponding magnetic block (10) is set at the mounting position and glued to the inner wall of the magnet mounting cylinder (20), and the clamping assembly (200) corresponds to the outer wall of the magnet mounting cylinder (20) at the mounting position, and the two clamping jaws (210) are respectively clamped at the two ends of the magnetic block (10) along the axial direction of the auxiliary shaft (110) to achieve leveling and tightening of the magnetic block (10).

5. The magnetic array auxiliary installation mechanism according to claim 4, characterized in that: The plurality of auxiliary filling blocks are all configured as non-magnetic parts.

6. The magnetic array auxiliary installation mechanism according to claim 4, characterized in that: The clamping assembly (200) comprises a mounting member (220) and a plurality of connecting members (230), and the two clamping jaws (210) are detachably connected to the mounting member (220) via the connecting members (230); Alternatively, the mounting member (220) is fixedly connected to one of the clamping jaws (210), and the other clamping jaw (210) is detachably connected to the mounting member (220) via the connecting member (230).

7. The magnetic array auxiliary installation mechanism according to claim 6, characterized in that: Each of the clamping jaws (210) is provided with a clamping portion (211), and the two clamping portions (211) extend in a direction approaching each other; A support section (111) is protrudingly provided in the middle of the auxiliary shaft (110), and the length of the support section (111) is smaller than the length of the magnetic block (10), so that both ends of the support section (111) cooperate with the auxiliary shaft (110) to form an avoidance zone; When the two clamping claws (210) are respectively clamped at the two ends of the magnetic block (10), the two clamping portions (211) are both in contact with the end surface of the magnetic block (10) close to the auxiliary shaft (110), and the two clamping portions (211) are respectively located in the corresponding avoidance areas.

8. The magnetic array auxiliary installation mechanism according to claim 6, characterized in that: The clamping assembly (200) further comprises a plurality of threaded fasteners (240), the clamping jaw (210) being provided with a fastening threaded hole (212), the threaded fasteners (240) passing through the corresponding fastening threaded hole (212) and abutting against the outer wall of the magnet mounting cylinder (20), and the threaded fasteners (240) are tightened to correspond to the magnetic block (10) in the radial upper limit position of the magnet mounting cylinder (20).

9. The magnetic array auxiliary installation mechanism according to claim 7, characterized in that: The auxiliary shaft (110) is provided with limit snap-fit ​​sockets corresponding to the two ends of the support section (111), and the clamping portion (211) can be limit-engaged in the corresponding limit snap-fit ​​sockets to limit the relative position of the auxiliary shaft (110) and the magnet mounting cylinder (20) in the circumferential direction of the auxiliary shaft (110).

10. The magnetic array auxiliary installation mechanism according to claim 9, characterized in that: A plurality of abutment planes are arranged on the outer wall of the support section (111) corresponding to the plurality of magnetic blocks (10), and the plurality of abutment planes are sequentially distributed along the circumference of the auxiliary shaft (110).

Images