A two-dimensional material micro-pattern automatic transfer device and method

Abstract

The present invention discloses an automated transfer device and method for two-dimensional material micro-patterns. The device comprises a robotic arm, a robotic arm quick-change module, a filter membrane holder, a visual recognition module, and a control module. A quick-change disk male disk capable of moving in the horizontal and vertical directions is disposed at the end of the robotic arm. The robotic arm quick-change module comprises three independent functional modules, namely a filter membrane-mask adsorption module, a rolling module, and a flipping module. Each functional module is configured with a quick-change disk master. The visual recognition module comprises two industrial cameras for positioning the functional modules. The control module is used to implement closed-loop feedback control of the automated transfer device. The method proposed in the present invention is simple to operate, has high transfer efficiency, and is low in cost. It can achieve large-area, high-precision, and defect-free transfer of two-dimensional material micro-patterns and is applicable to a variety of two-dimensional materials and different substrates.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano manufacturing technology, and specifically to an automated transfer device and method for two-dimensional material micropatterns, which can achieve large-area, high-precision, and defect-free transfer of two-dimensional material micropatterns. Background Art

[0002] Two-dimensional materials (such as graphene, transition metal chalcogenides, and MXene) exhibit enormous potential for application in energy storage devices (e.g., microsupercapacitors), flexible electronics, optoelectronic devices, and sensors due to their unique electronic, optical, and mechanical properties. Precise fabrication and efficient transfer of 2D material micropatterns are key technologies for realizing these applications. However, existing fabrication and transfer technologies face numerous challenges, limiting their large-scale industrial application.

[0003] Currently, the manufacturing technologies for two-dimensional material micropatterns are mainly divided into two categories: subtractive manufacturing and additive manufacturing. Subtractive manufacturing forms patterns by removing portions of a two-dimensional material film. Representative methods include helium ion beam etching, nanoimprint lithography, and electron beam lithography. Although helium ion beam etching can achieve nanometer-scale precision (linewidth <50nm), high-energy ion bombardment can damage the material's lattice, resulting in a significant decrease in conductivity (for example, the conductivity of graphene decreases by approximately 40%). Nanoimprint lithography relies on polymer resist layers (such as PMMA), which are prone to introducing organic contaminants, and the high-temperature imprinting process (>150°C) may cause material oxidation. Although electron beam lithography can achieve sub-10nm precision, its processing efficiency is extremely low (only a few square millimeters per hour), and the problem of resist residue is prominent. Additive manufacturing forms patterns by directly depositing or assembling two-dimensional materials. Typical methods include inkjet printing, chemical vapor deposition (CVD), and self-assembly technology. Inkjet printing is limited by ink droplet diffusion (resolution > 50μm), and the coffee ring effect leads to uneven patterns; CVD requires a pre-patterned substrate and a gold-plated catalyst layer, which is a complex and costly process; self-assembly technology can only generate periodic or symmetrical patterns, which makes it difficult to meet diverse needs.

[0004] In the transfer process of two-dimensional material micropatterns, existing transfer equipment has significant drawbacks. Existing two-dimensional material micropattern transfer equipment mainly includes: hot press transfer machines, liquid phase transfer equipment, laser-assisted transfer equipment, and mechanical transfer equipment. The hot press transfer machine invented by James S. Harris et al. heats the substrate (such as copper foil) on which the two-dimensional material is located, increasing the interaction force between the material and the target substrate. However, high temperature easily leads to material oxidation (MXene conductivity decreases by 40%) and has limited resolution (line width > 10μm). It can only achieve the rolling bonding step during the transfer process, resulting in low automation. The liquid phase transfer equipment invented by Arun Kumar et al. can achieve large-area transfer and is particularly suitable for low-cost production. However, there is solvent residue, which must be removed, otherwise it will affect the material's performance. Solvent evaporation and material deposition must be precisely controlled to avoid material damage. The laser-assisted transfer equipment invented by Hui Wu uses a laser source to provide high-intensity thermal energy to heat the area where the two-dimensional material contacts the target substrate. The laser beam heats the original substrate, causing the two-dimensional material to detach from the substrate and transfer to the target substrate. However, the equipment costs over $500,000 and can only perform the separation step of the transfer process, making it extremely inefficient. Furthermore, the high energy of the laser can precisely control the transfer area, but it can cause thermal damage to the material. The mechanical transfer equipment invented by Xiaodong Xu et al. has high requirements for the substrate, typically requiring a smooth surface to avoid material breakage or defects, and has a low automation rate.

[0005] It can be seen that existing equipment generally faces material damage (conductivity\mobility decreases by 30-50%), insufficient process precision, low efficiency, extremely low automation rate, reliance on manual operation (yield rate <70%) and high scale cost (single transfer > US$100 / cm 2 ) and other bottlenecks, there is an urgent need for technologies that can reduce damage and contamination of two-dimensional materials, achieve large-area, high-precision, defect-free, patterned two-dimensional material printing and transfer, and break through the technical barriers to the industrial application of two-dimensional material micro-patterns through fully automated processes and new equipment with intelligent pressure control.

[0006] Furthermore, currently available vacuum-assisted filtration technology enables large-area, high-precision, defect-free, patterned printing of two-dimensional material micropattern arrays and contamination-free transfer of these materials onto different substrates. This method simplifies the traditional patterning process, eliminating the need for resist or support layers, avoiding material damage and the introduction of impurities. It offers the advantages of low cost, high efficiency, and ease of operation, making it suitable for the printing and transfer of two-dimensional material arrays with diverse patterns. However, in practical applications, vacuum filtration technology still suffers from limitations such as a strong reliance on manual operation, low transfer efficiency, limited applicability, and high process complexity and cost. Summary of the Invention

[0007] To address the shortcomings of existing transfer equipment and vacuum filtration technology, this invention provides an automated transfer device and method for two-dimensional material micropatterns. Based on a modular design, this invention integrates a high-precision robotic arm, a visual recognition system, and an intelligent control system to achieve efficient and high-precision fabrication and transfer of two-dimensional material micropatterns.

[0008] The technical solutions adopted in the present invention are as follows:

[0009] 1. An automated transfer device for two-dimensional material micropatterns

[0010] The automated transfer equipment comprises:

[0011] A robotic arm comprising a SCARA robotic arm structure, an air pump, and a male disk drive mechanism and a quick-change male disk arranged at the end of the SCARA robotic arm structure. The two rotation axes of the SCARA robotic arm structure are parallel to the vertical direction, so that the SCARA robotic arm structure is used to achieve horizontal movement of the end functional module. The male disk drive mechanism is installed at the end of the SCARA robotic arm structure and is transmission-connected to the quick-change male disk to achieve movement of the quick-change male disk along the Z axis (i.e., the vertical direction). The air pump is used as a power source and / or air source for the quick-change male disk.

[0012] The robot arm quick-change module includes three independent functional modules, each of which includes a quick-change disk mother disk. The quick-change disk mother disks in the three functional modules can cooperate with the quick-change disk male disk through a pneumatic coupling interface. The three functional modules are a filter membrane-mask adsorption module, a rolling module, and a flipping module. The filter membrane-mask adsorption module is used to perform a separation operation on the filter membrane and the mask, and to transfer the filter membrane after the mask is separated (that is, to transfer the filter membrane after the mask is separated to the filter membrane holder). The flipping module is used to perform back-side adsorption, flipping, and transfer operations on the filter membrane after the mask is separated, that is, to adsorb the filter membrane after the mask is separated on the filter membrane holder from the back and flip it, and place the filter membrane after the mask is separated with the back side facing up on the top surface of the target substrate. The rolling module is used to perform a rolling operation on the target substrate covered with the filter membrane;

[0013] A filter membrane holder is used to place a filter membrane with a target two-dimensional material micro-pattern on the front side, with the front side of the filter membrane on the filter membrane holder 3 facing upwards;

[0014] A visual recognition module is used to realize the positioning of the functional module at the end of the SCARA robotic arm structure during operation, and includes a first industrial camera and a second industrial camera. The first industrial camera is installed at the end of the SCARA robotic arm structure, and the second industrial camera is installed on a movable camera bracket, which is movably arranged on the ground or a work platform.

[0015] A control module is used to control the automated transfer equipment.

[0016] Specifically, the filter membrane-mask adsorption module includes an adsorption module frame, a first mother disk of a quick-change disk, a second stepping screw, a second screw flange, four adsorption adjustment units and four vacuum adsorption units; the first mother disk of a quick-change disk and the second stepping screw are installed on the adsorption module frame, and the second stepping screw is transmission-connected to the second screw flange; four upper connecting pieces are installed at the bottom end of the adsorption module frame, and the upper connecting pieces, adsorption adjustment units and vacuum adsorption units correspond to each other one by one; for a corresponding set of upper connecting pieces, adsorption adjustment units and vacuum adsorption units, the adsorption adjustment The unit is mainly composed of four connecting rods of the same length, an L-shaped connecting rod and a lower connecting plate. The four connecting rods are arranged in parallel between the upper connecting plate and the lower connecting plate, and form two parallel parallelogram structures with the upper connecting plate and the lower connecting plate; the middle part of the connecting rod located on the side close to the second screw flange is hingedly connected to one end of the L-shaped connecting rod, and the other end of the L-shaped connecting rod is hingedly connected to the second screw flange, and the inner side surface of the lower connecting plate is fixedly connected to the vacuum adsorption unit; the suction cup port of the vacuum adsorption unit is set downward, and the vacuum adsorption unit is connected to the air path of the first mother disc of the quick-change disc.

[0017] Specifically, the four vacuum adsorption units are aligned in the vertical direction, that is, the suction cups of the four vacuum adsorption units are arranged on the same horizontal plane.

[0018] Specifically, the adsorption force exerted by the four vacuum adsorption units on the filter membrane and / or the mask should be uniformly distributed in space or on the surface of the adsorbed object (filter membrane or mask).

[0019] Specifically, the symmetrical distribution of the four vacuum suction units and the control of suction force ensure that the suction force is evenly distributed across the surface of the object being suctioned, thereby preventing localized deformation or wrinkling of the filter membrane or mask during the suction process, thereby ensuring its flatness and stability. For example, by arranging the four vacuum suction units in a centrally symmetrical manner relative to the center of the surface of the object being suctioned (filter membrane or mask), and ensuring that the difference in suction force applied by any two suction cups to the object is less than a preset threshold, the suction force can be evenly distributed across the surface of the object being suctioned (filter membrane or mask).

[0020] Specifically, the rolling module includes a rolling module frame, a second mother disk of a quick-change disk, a pressure sensor, a silicone roller and a rolling bearing; the second mother disk of the quick-change disk is installed on the top of the rolling module frame, and the silicone roller is arranged on the bottom. The silicone roller is connected to the pressure sensor through a rolling bearing. The pressure sensor can detect the vertical pressure (i.e., normal force) exerted on the silicone roller during rolling. The pressure sensor is communicatively connected to the control module; the surface hardness of the silicone roller is Shore A 20-40.

[0021] Specifically, the flip module includes a third mother disk of the quick-change disk, an array vacuum suction cup, a transmission shaft and a stepper motor; the third mother disk of the quick-change disk is connected to the body of the stepper motor, and the transmission shaft of the stepper motor is connected to the array vacuum suction cup through transmission, thereby driving the array vacuum suction cup to rotate around the transmission shaft, and the suction direction of the array vacuum suction cup is perpendicular to the axis of the transmission shaft, and the array vacuum suction cup is connected to the air path of the third mother disk of the quick-change disk; a flange is coaxially sleeved on the outer side of the transmission shaft of the stepper motor, so that the transmission shaft can drive the flange to rotate synchronously, and the flange is connected to the center of the back side of the array vacuum suction cup through a suction cup connecting rod extending along its own radial direction. The flange, the suction cup connecting rod and the array vacuum cup constitute a cantilever adsorption structure; the filter membrane frame comprises a base, a support rod and a hollow frame connected in sequence from bottom to top, the top of the hollow frame is used to place a filter membrane with a target two-dimensional material micro-pattern on the front, the connection between the support rod and the bottom surface of the hollow frame is located at the edge of the bottom surface, when the axis of the suction cup connecting rod is parallel to the axis of the filter membrane frame, the cantilever adsorption structure can extend from the symmetrical side of the support rod into the axial gap between the base and the hollow frame, and then adsorb the filter membrane above the hollow frame from the back through the array vacuum cup.

[0022] Specifically, the male disk driving mechanism includes a first advance screw and a rotation constraint; the first advance screw is installed at the end of the SCARA robotic arm structure, the screw of the first advance screw is arranged in the vertical direction, and is sleeved with a first screw flange, the first screw flange and the screw of the first advance screw are threaded to achieve transmission connection, the first screw flange is connected to one end of the quick change disk connector arranged below itself, and the other end of the quick change disk connector is connected to the quick change disk male disk; the rotation constraint is used to constrain the rotational movement of the first screw flange to realize the vertical movement of the quick change disk male disk along the Z axis (i.e., the vertical direction).

[0023] Specifically, the rotation constraint mainly consists of a guide post holder, a guide post, a guide sleeve and a flange limiter. The main body of the guide post holder adopts a rectangular plate structure, and the main body of the flange limiter adopts a U-shaped plate structure. The rectangular plate structure and the U-shaped plate structure are both arranged horizontally. The two ends of the open side of the U-shaped plate structure are located directly below the rectangular plate structure. The line between the two ends and the length direction of the rectangular plate structure are perpendicular to the axial direction of the auxiliary arm. The middle of the closed side of the U-shaped plate structure is located below the quick-change disc connector; the guide post holder is installed at the end of the auxiliary arm. The end of the auxiliary arm has two through holes, which are connected to the holder by bolts. The bottom of the guide post holder is vertically connected to the guide post holder. Two guide posts are arranged in a straight line, and the two guide posts are located on either side of the quick-change disc connector / first screw flange, forming a triangular layout. The top ends of the two guide posts are fixedly connected to the guide post holder by screws. A guide sleeve is sleeved on the outside of each guide post, and the guide sleeve can slide freely along the guide post. The two guide sleeves are respectively bolted to the two ends of the flange limiter (i.e., the two ends of the open side of the U-shaped plate structure). The middle of the flange limiter (i.e., the middle of the closed side of the U-shaped plate structure) is fixedly connected to the quick-change disc connector and the first screw flange. The rotation constraint member cooperates with the flange constraint member through the triangular layout of the two guide posts and the first screw flange / quick-change disc connector to jointly constrain the rotation of the first screw flange. When the first screw flange moves vertically along the Z axis on the first advancer screw, the first screw flange drives the two guide sleeves to move synchronously along their respective guide posts through the flange constraint member, thereby only constraining the rotational movement of the first screw flange without affecting the vertical movement of the first screw flange along the Z axis.

[0024] Specifically, the SCARA robotic arm structure is mainly composed of a main arm, a secondary arm and a robotic arm column; the top end of the robotic arm column is connected to the head end of the main arm through a first rotary joint, the end of the main arm is connected to the head end of the secondary arm through a second rotary joint, and the end of the secondary arm is provided with a male disk drive mechanism and a quick-change disk male disk;

[0025] Furthermore, the robotic arm also includes a robotic arm base, three drivers, a photoelectric gate with logic output and two photoelectric encoders; a control module, a driver, an air pump and a robotic arm column are installed on the robotic arm base; the three drivers are respectively used to drive the first step screw and the drive motors of the main arm and the auxiliary arm; the two photoelectric encoders are respectively used to collect the real-time rotation angles of the main arm and the auxiliary arm; the photoelectric gate with logic output is used for the zero limit of the quick-change disk connector; the control module includes a lower computer and an upper computer, which serve as the lower computer and the upper computer respectively, and the driver, the photoelectric gate with logic output and the photoelectric encoder are all communicatively connected to the lower computer, and the first industrial camera and the second industrial camera are both communicatively connected to the upper computer, and the lower computer is also communicatively connected to the pressure sensor of the rolling module.

[0026] Furthermore, the automated transfer equipment includes a variety of filter membrane racks, and the hollow rack of each filter membrane rack has a specific shape and size, and the shape and size of the hollow rack are set accordingly according to different models of filter membranes.

[0027] 2. A method for automated transfer of two-dimensional material micropatterns

[0028] The automated transfer method uses the above-mentioned two-dimensional material micro-pattern automated transfer device, including the following steps:

[0029] S1) After completing the vacuum-assisted filtration, the filter membrane-mask adsorption module is coupled to the end of the robotic arm, and the position of each vacuum adsorption unit is adjusted according to the size of the filter membrane and / or the mask using a second stepping screw. The vacuum adsorption unit is then aligned with the filter membrane with the mask and the target two-dimensional material micro-pattern, and the mask above the filter membrane is adsorbed. The filter membrane-mask adsorption module is moved using the robotic arm, and the mask separated from the filter membrane is placed on the work platform. After the mask is washed with water, it is used for vacuum-assisted filtration in the next round of transfer. The vacuum adsorption unit is then aligned with and adsorbed to the filter membrane. The filter membrane-mask adsorption module is moved using the robotic arm, and the filter membrane adsorbed on the vacuum adsorption unit is aligned with and placed on the filter membrane rack.

[0030] The process of using the second stepping screw to adjust the position of each vacuum adsorption unit according to the size of the filter membrane and / or the mask is specifically as follows: using the second stepping screw to drive each vacuum adsorption unit to move radially, thereby adjusting the distance between each vacuum adsorption unit and the second stepping screw so that the size of the adsorption plane formed by the suction cup openings of each vacuum adsorption unit matches the size of the filter membrane and / or the mask;

[0031] The vacuum-assisted filtration process specifically comprises: attaching a wetted filter membrane to a porous sand core of a filter dish of a vacuum filtration device, attaching a wetted mask engraved with a target two-dimensional material micro-pattern to the filter membrane, adding a two-dimensional material dispersion into the filter dish, and using the vacuum filtration device to filter out the solvent in the two-dimensional material dispersion. After the vacuum-assisted filtration is completed, the filter membrane with the mask and the target two-dimensional material micro-pattern is adsorbed on the filter dish by the negative pressure environment inside the vacuum filtration device.

[0032] S2) placing the hydrophilic treated target substrate on an operating table; the target substrate includes a flat substrate and a curved substrate;

[0033] S3) Switch the filter membrane-mask adsorption module at the end of the robotic arm to a flip module, use the robotic arm to move the flip module so that the axis of the suction cup connecting rod is parallel to the axis of the filter membrane holder, then extend the cantilever adsorption structure from the symmetrical side of the support rod into the axial gap between the base and the hollow frame, align the arrayed vacuum suction cup with the bottom surface of the filter membrane (since the front side of the filter membrane on the filter membrane holder is facing upward, the bottom surface of the filter membrane here is the back side) and adsorb the filter membrane, and simultaneously remove the cantilever adsorption structure and the filter membrane from the axial gap between the base and the hollow frame, use a stepper motor to drive the arrayed vacuum suction cup to rotate around the transmission shaft, so that the filter membrane is flipped to face downward, use the robotic arm to move the flip module, align the filter membrane on the arrayed vacuum suction cup and place it on the target substrate after the hydrophilic treatment, obtain the target substrate covered with the filter membrane and fix it on the operating table;

[0034] S4) switching the flip module at the end of the robotic arm to a rolling module, while simultaneously fixing the target substrate covered with the filter membrane on an operating table, and using the robotic arm to move the rolling module along a preset path, rolling the filter membrane with a silicone roller to apply pressure to the filter membrane and the target substrate, thereby achieving transfer of the target two-dimensional material micropattern;

[0035] During the rolling process of step S4, the lower computer obtains the pressure error based on the real-time pressure and the set pressure collected by the pressure sensor, and calculates the z-axis height adjustment amount based on the pressure error. The lower computer drives the first stepper screw according to the z-axis height adjustment amount to adjust the position of the silicone roller to change the applied pressure. Through continuous pressure measurement and position adjustment, closed-loop feedback control of the pressure is achieved;

[0036] When the target substrate is a curved surface, the real-time normal contact force is calculated using the following formula, and the pressure error is obtained based on the real-time normal contact force and the set pressure:

[0037] F n =F z / cosθ

[0038] cosθ=(▽S·z') / (||▽S||)

[0039] Where, F n represents the real-time normal contact force, F z represents the real-time pressure collected by the pressure sensor, θ represents the angle between the surface normal and the vertical direction, ▽S represents the gradient vector of the parameterized surface, and its direction is the surface normal. ▽ represents the gradient operator, S represents the preset parameterized surface, z' represents the unit vector parallel to the z-axis of the robot base coordinate system, and ||·|| represents the norm of “·”.

[0040] S5) switching the rolling module at the end of the robotic arm to a filter membrane-mask adsorption module, using the filter membrane-mask adsorption module to adsorb the filter membrane, and separating the filter membrane from the target substrate according to a preset separation speed to complete a single transfer;

[0041] S6) By repeating steps S1 to S5, continuous automatic transfer of the two-dimensional material micro pattern is achieved.

[0042] The target substrate is made of glass, silicon wafer or polydimethylsiloxane, the two-dimensional material is graphene, transition metal chalcogenide or Mxene, and the minimum feature size of the two-dimensional material micropattern is 5 to 10 μm.

[0043] In step S1 and step S3, the alignment process is specifically as follows:

[0044] D1) Using a second industrial camera to capture an image of the target object on the operating table, the host computer processes the image using a visual recognition algorithm to obtain the target object's position, which is sent to the slave computer as the initial target position. The slave computer then controls the movement of the robotic arm based on the initial target position until the terminal functional module reaches the initial target position.

[0045] D2) using a first industrial camera to simultaneously capture images of the end object on the functional module and the target object on the operating table, and using a host computer to process images using a visual recognition algorithm to obtain the positions of the end object and the target object, and sending these images as position feedback information to a slave computer. The slave computer corrects the initial target position or the previous pose error based on the position feedback information to obtain a new pose error, and the slave computer controls the movement of the robotic arm based on the new pose error;

[0046] D3) Repeat step D2 to form a closed-loop feedback control until the new posture error is less than or equal to the preset threshold, completing the alignment operation.

[0047] In summary, the two-dimensional material micro-pattern automated transfer equipment proposed in the present invention adopts a modular design, is easy to operate, has high transfer efficiency and low cost, and can realize large-area, high-precision, defect-free, patterned two-dimensional material printing of two-dimensional material micro-pattern arrays and pollution-free transfer on different substrates.

[0048] The beneficial effects of the present invention are:

[0049] 1. The automated transfer equipment in the present invention has high precision (robot arm positioning error 0.1-0.2 mm, visual calibration accuracy ±5 μm), and is suitable for printing micro-patterns of two-dimensional materials.

[0050] 2. The automated transfer equipment of the present invention achieves flexible adaptation. The movable adsorption design of the filter membrane-mask adsorption module can adapt to filter membranes and masks of various sizes and shapes. The silicone roller and pressure sensor can adapt to flat / curved substrates.

[0051] 3. The automated transfer method of the present invention avoids the contingency caused by manual operation, achieves lossless separation, and has a breakage rate of <0.5%.

[0052] 4. The automated transfer method of the present invention is fully automated: a single transfer cycle is ≤ 3 minutes, which is 5 times more efficient than manual operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 This is the overall assembly diagram of the automatic transfer printing device for two-dimensional material micro-patterns of the present invention;

[0054] Figure 2 is a schematic diagram of the main body of the robotic arm in the present invention;

[0055] Figure 3 Schematic diagrams of the joint connection portion of the robotic arm of the present invention, wherein Figure A is a schematic diagram of the connection portion between the robotic arm column and the main arm, and Figure B is a schematic diagram of the connection portion between the main arm and the auxiliary arm;

[0056] Figure 4 Schematic diagram of the quick-change module of the robotic arm in the present invention;

[0057] Figure 5 Schematic diagram of the structural details of the filter membrane-mask adsorption module in the present invention;

[0058] Figure 6 It is a schematic diagram of the structural details of the rolling module in the present invention;

[0059] Figure 7 Schematic diagram of the structural details of the filter membrane turnover module in the present invention;

[0060] Figure 8 Schematic diagram of the movable adsorption design of the filter membrane-mask adsorption module in the present invention, wherein Figure A is a schematic diagram of a smaller adsorption plane, and Figure B is a schematic diagram of a larger adsorption plane;

[0061] Figure 9 Schematic diagram of the filter membrane holder of the present invention;

[0062] Figure 10 is a schematic diagram of a movable camera bracket of the present invention;

[0063] Figure 11 It is a schematic diagram of the transfer result of Example 1 of the present invention.

[0064] In the figure, 1. Robotic arm, 1-2. Driver, 1-4. Photoelectric encoder, 1-5. Main arm, 1-6. Auxiliary arm, 1-7. Planetary reducer, 1-8. Robotic arm stepper motor, 1-9. First stepper screw, 1-10. Rotation constraint, 1-11. Quick change disk male disk, 1-12. Photoelectric gate with logic output, 1-14. Air pump, 1-15. Robotic arm column, 1-10. Rotation constraint structure, 2. Robotic arm quick change module, 2-1. Filter membrane-mask adsorption module, 2-2. Rolling module, 2-3. Flip module, 2-4. Cage, 2-5. Aluminum alloy base, 2-1-1. First mother disk of quick change disk, 2-1-2. Second Stepper screw, 2-1-3, second screw flange, 2-1-4, adsorption adjustment unit, 2-1-5, vacuum adsorption unit, 2-2-1, second quick-change disk master, 2-2-2, pressure sensor, 2-2-3, silicone roller, 2-2-4, rolling bearing, 2-3-1, third quick-change disk master, 2-3-2, array vacuum suction cup, 2-3-3, transmission shaft, 2-3-4, stepper motor, 4, visual recognition module, 4-1, aluminum alloy base, 4-2, type I rod, 4-3, type II rod, 4-4, type III rod, 4-5, second industrial camera, 1-13, first industrial camera, 1-1, lower computer, 1-3, upper computer. DETAILED DESCRIPTION

[0065] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The accompanying drawings explain the equipment structure and are intended to explain the structure involved in the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. If the specific experimental steps or conditions are not specified in the embodiments, the operations or conditions of the conventional experimental steps described in the literature in this field can be carried out. The reagents or instruments used without indicating the manufacturer are all conventional reagent products that can be purchased on the market.

[0066] A first aspect of the present invention provides an automated transfer device for two-dimensional material micropatterns.

[0067] like Figure 1 As shown, the automatic transfer equipment for two-dimensional material micro-patterns of the present invention mainly includes the following modules:

[0068] The robot arm 1 includes a SCARA robot arm structure, an air pump 1-14, and a male disk drive mechanism and a quick-change disk male disk 1-11 arranged at the end of the SCARA robot arm structure. The two rotation axes of the SCARA robot arm structure are parallel to the vertical direction, so that the SCARA robot arm structure can achieve horizontal movement of its own end. The male disk drive mechanism is installed at the end of the SCARA robot arm structure and is transmission-connected to the quick-change disk male disk 1-11 for driving the quick-change disk male disk 1-11 to move in the vertical direction. The air pump 1-14 is used as a power source and / or air source for the quick-change disk male disk 1-11;

[0069] The robotic arm quick-change module 2 includes three independent functional modules, each of which includes a quick-change disk master. The three quick-change disk masters can be matched with the quick-change disk male disk 1-11 through a pneumatic coupling interface. The three functional modules are the filter-mask adsorption module 2-1, the rolling module 2-2, and the flipping module 2-3.

[0070] The filter membrane holder 3 is used to place the filter membrane with the target two-dimensional material micro-pattern on the front side, with the front side of the filter membrane on the filter membrane holder 3 facing upwards;

[0071] The visual recognition module 4 is used to achieve precise positioning of the functional modules at the end of the SCARA robotic arm structure during operation, and includes a first industrial camera 1-13 and a second industrial camera 4-5. The first industrial camera 1-13 is mounted at the end of the SCARA robotic arm structure, and the second industrial camera 4-5 is mounted on a movable camera bracket.

[0072] A control module is used to control the automated transfer equipment.

[0073] Specifically, the quick-change disk mother disk cooperates with the quick-change disk male disk 1-11 through the pneumatic coupling interface, which specifically means that: after the quick-change disk mother disk is coupled to the quick-change disk male disk 1-11, the quick-change disk mother disk and the quick-change disk male disk 1-11 are connected through a vacuum adsorption or locking mechanism and enter the working state. In the working state, the air pump 1-14 continuously supplies pressure to ensure that the vacuum adsorption force or locking force does not decay, and at the same time provides power for the functional module connected to the quick-change disk mother disk. When the quick-change disk mother disk is decoupled from the quick-change disk male disk 1-11, the quick-change disk mother disk is separated from the quick-change disk male disk 1-11. At this time, another quick-change disk mother disk can be coupled to the quick-change disk male disk 1-11 to achieve a second-level switching of the functional module.

[0074] like Figure 5As shown, the filter-mask adsorption module 2-1 includes an adsorption module frame, a first quick-change master plate 2-1-1, a second stepping screw 2-1-2, a second screw flange 2-1-3, four adsorption adjustment units 2-1-4, and four vacuum adsorption units 2-1-5. The first quick-change master plate 2-1-1 and the second stepping screw 2-1-2 are mounted on the adsorption module frame. The second stepping screw 2-1-2 is in driving connection with the second screw flange 2-1-3. Four upper connecting plates are installed at the bottom end of the adsorption module frame. The number of upper connecting plates, adsorption adjustment units 2-1-4 and vacuum adsorption units 2-1-5 is the same and corresponds one to one; for a corresponding set of upper connecting plates, adsorption adjustment units 2-1-4 and vacuum adsorption units 2-1-5, the adsorption adjustment unit 2-1-4 is mainly composed of four connecting rods of the same length, an L-shaped connecting rod and a lower connecting plate. The four connecting rods are arranged in parallel between the upper connecting plate and the lower connecting plate, and form two parallel parallelogram structures with the upper connecting plate and the lower connecting plate. The middle parts of the two connecting rods located on the side close to the second screw flange 2-1-3 are hingedly connected to one end of the L-shaped connecting rod, the other end of the L-shaped connecting rod is hingedly connected to the second screw flange 2-1-3, and the lower connecting plate is fixedly connected to the vacuum adsorption unit 2-1-5; the suction cup mouth of the vacuum adsorption unit 2-1-5 is set downward, and the vacuum adsorption unit 2-1-5 is connected to the air path of the first mother disk 2-1-1 of the quick-change disk. When the first mother disk 2-1-1 of the quick-change disk and the quick-change disk male disk 1-11 are coupled, the vacuum adsorption unit 2-1-5 can be connected to the internal air path of the quick-change disk male disk 1-11 through the air path of the first mother disk 2-1-1 of the quick-change disk.

[0075] Figure 8 The figure shows the difference in the spacing between the four vacuum adsorption units 2-1-5 at the end when the second screw flange 2-1-3 rotates to different positions. Figure 8 When the filter-mask adsorption module is in the working state shown in Figure A, it can adsorb smaller masks, such as interdigital electrode masks. Figure 8 When in the working state shown in Figure B, it can absorb larger reticles. Therefore, the movable adsorption design of the filter-mask adsorption module overcomes the limitations of traditional fixed suction cups in size adaptability, positioning accuracy, and anti-interference capabilities through mechanical linkage adjustment, multi-degree-of-freedom compensation, and uniform pressure distribution. It is particularly suitable for the transfer of high-precision, multi-sized two-dimensional material micropatterns. This four-suction cup linkage structure avoids deformation of the mask or filter membrane caused by localized stress concentration by evenly distributing the adsorption force, making it particularly suitable for the transfer of brittle two-dimensional materials (such as graphene and MXene).

[0076] In a specific implementation, a first mother disk 2-1-1 of a quick-change disk and a second stepping screw 2-1-2 are installed on the adsorption module frame, and the transmission connection between the second stepping screw 2-1-2 and the second screw flange 2-1-3 can be achieved in the following manner: the first mother disk 2-1-1 of the quick-change disk is installed on the top of the adsorption module frame, the second stepping screw 2-1-2 is installed inside, the second screw flange 2-1-3 is sleeved on the outside of the screw of the second stepping screw 2-1-2, and the second screw flange 2-1-3 and the screw of the second stepping screw 2-1-2 are transmission-connected by threaded engagement. Preferably, the second screw flange 2-1-3 is located below the adsorption module frame, and the screw of the second stepping screw 2-1-2 extends downward from the center of the bottom surface of the adsorption module frame, and then the second screw flange 2-1-3 is transmission-connected.

[0077] In a specific implementation, the four connecting rods and the upper and lower connecting plates forming two parallel parallelogram structures can be achieved in the following manner: the upper and lower ends of each connecting rod are hingedly connected to the upper and lower connecting plates, respectively. The four connecting rods are divided into two groups, and each group of connecting rods forms a parallelogram structure with the upper and lower connecting plates. The middle portion of the connecting rods located on the side near the second screw flange 2-1-3 in both groups of connecting rods is hingedly connected to one end of the L-shaped connecting rod, the other end of the L-shaped connecting rod is hingedly connected to the second screw flange 2-1-3, and the other end of the L-shaped connecting rod is hingedly connected to the second screw flange 2-1-3. The lower connecting plate is fixedly connected to the vacuum adsorption unit 2-1-5.

[0078] In a specific implementation, each set of connecting rods, along with the upper and lower connecting plates, forms a parallelogram structure. The two sets of connecting rods are arranged on the two main surfaces of the upper and lower connecting plates, respectively, with one set of connecting rods positioned on the front and back of each connecting plate. Both the upper and lower connecting plates are arranged radially along the second screw flange 2-1-3, serving as the fixed and movable ends of the parallelogram, respectively.

[0079] Furthermore, the main surface of the lower connecting piece is in the shape of a right-angled trapezoid. A set of connecting rod hinges are set at the right-angled side of the right-angled trapezoid surface, and the line connecting the hinges of the two connecting rods is parallel to the right-angled side and the horizontal direction. The side corresponding to the long bottom side of the right-angled trapezoid surface is used to install the vacuum adsorption unit 2-1-5, and the side corresponding to the long bottom side is the inner side close to the second screw flange 2-1-3.

[0080] Specifically, the four upper connecting pieces are evenly spaced along the circumferential direction on the end surface of the bottom end of the adsorption module frame.

[0081] In specific implementations, the pneumatic connection between the vacuum adsorption unit 2-1-5 and the first quick-change disk 2-1-1 can be achieved by: the body of the first quick-change disk 2-1-1 is provided with an air channel, the input end of which is coupled to the quick-change pneumatic interface of the quick-change disk male disk 1-11, and the output end is connected to each vacuum adsorption unit 2-1-5 via a detachable pipeline. When the quick-change disk female disk is coupled to the quick-change disk male disk 1-11, compressed air or vacuum negative pressure is transmitted to each vacuum adsorption unit 2-1-5 through the air channel of the first quick-change disk 2-1-1.

[0082] like Figure 6 As shown, the rolling module 2-2 includes a rolling module frame, a quick-change disk second mother disk 2-2-1, a pressure sensor 2-2-2, a silicone roller 2-2-3 and a rolling bearing 2-2-4; the quick-change disk second mother disk 2-2-1 is installed on the top of the rolling module frame, and the silicone roller 2-2-3 is arranged on the bottom. A rolling shaft is arranged inside the silicone roller 2-2-3, and the silicone roller 2-2-3 is connected to the pressure sensor 2-2-2 through the rolling bearing 2-2-4. The pressure sensor 2-2-2 can detect the vertical pressure (i.e., normal force) exerted on the silicone roller 2-2-3 during the rolling process through the transmission support rod. The pressure sensor 2-2-2 is communicatively connected to the lower computer 1-1.

[0083] Optionally, the implementation method of connecting the silicone roller 2-2-3 to the pressure sensor 2-2-2 via the rolling bearing 2-2-4 is as follows: the silicone roller 2-2-3 is connected to the rolling shaft via the rolling bearing 2-2-4, and the rolling shaft is connected to the pressure sensor 2-2-2 via a transmission support rod, and the transmission support rod includes a straight rod portion and a U-shaped portion, the straight rod portion is connected to the closed side of the U-shaped portion, and the two ends of the open side of the U-shaped portion are respectively connected to the two ends of the rolling shaft, and the straight rod portion is equipped with a pressure sensor 2-2-2.

[0084] The rolling module 2-2 provides real-time feedback of the rolling pressure of the silicone roller 2-2-3 through the pressure sensor 2-2-2, thereby ensuring uniform transfer and avoiding breakage or deformation caused by uneven pressure.

[0085] like Figure 7As shown, the flip module 2-3 includes a third mother plate 2-3-1 of the quick-change disk, an array vacuum suction cup 2-3-2, a transmission shaft 2-3-3 and a stepper motor 2-3-4; the third mother plate 2-3-1 of the quick-change disk is connected to the body of the stepper motor 2-3-4, the stepper motor 2-3-4 is connected to the transmission shaft 2-3-3 through a coupling, and the transmission shaft 2-3-3 is connected to the array vacuum suction cup 2-3-2 through a transmission connection, thereby driving the array vacuum suction cup 2-3- 2 rotates around the transmission shaft 2-3-3, with the suction direction of the arrayed vacuum suction cups 2-3-2 perpendicular to the axis of the transmission shaft 2-3-3. The arrayed vacuum suction cups 2-3-2 are connected to the air path of the third quick-change disk master 2-3-1. When the third quick-change disk master 2-3-1 is coupled to the male quick-change disk 1-11, the arrayed vacuum suction cups 2-3-2 can communicate with the internal air path and air source of the male quick-change disk 1-11 through the air path of the third quick-change disk master 2-3-1. The flip module 2-3 can control the flipping of the filter membrane through a program, facilitating the rolling of two-dimensional material micropatterns on the filter membrane.

[0086] In a specific implementation, the pneumatic connection between the arrayed vacuum suction cup 2-3-2 and the third quick-change master 2-3-1 can be achieved by: the body of the third quick-change master 2-3-1 is provided with an air passage, the input end of which is coupled to the quick-change pneumatic interface of the quick-change male disk 1-11, and the output end is connected to the arrayed vacuum suction cup 2-3-2 via a detachable pipe. When the quick-change master is coupled to the quick-change male disk 1-11, compressed air or vacuum pressure is transmitted through the air passage of the third quick-change master 2-3-1 to the internal cavity of the arrayed vacuum suction cup 2-3-2.

[0087] The outer side of the transmission shaft 2-3-3 of the stepper motor 2-3-4 is coaxially sleeved with a flange, so that the transmission shaft 2-3-3 can drive the flange to rotate synchronously. The flange is connected to the center of the back of the array vacuum suction cup 2-3-2 through a suction cup connecting rod extending along its own radial direction. The suction direction of the array vacuum suction cup 2-3-2 is parallel to the axis of the suction cup connecting rod. The flange, suction cup connecting rod and array vacuum suction cup 2-3-2 form a cantilever adsorption structure. Figure 9 As shown, the membrane holder 3 includes a base, a support rod and a hollow frame connected in sequence from bottom to top. The hollow frame is used to place a filter membrane with a target two-dimensional material micro-pattern on the front. The filter membrane on the hollow frame is placed with the front side facing upward. The connection between the support rod and the bottom surface of the hollow frame is located at the edge of the bottom surface. When the axis of the suction cup connecting rod is parallel to the axis of the membrane holder 3, the cantilever adsorption structure can extend from the symmetrical side of the support rod into the axial gap between the base and the hollow frame, and then perform a back adsorption operation on the filter membrane above the hollow frame through the array vacuum suction cup 2-3-2.

[0088] Furthermore, in a specific implementation, the following settings are made so that the cantilever adsorption structure can extend from the symmetrical side of the support rod into the axial gap between the base and the hollow frame, and then adsorb the filter membrane above the hollow frame through the array-type vacuum suction cup 2-3-2: the size of the cantilever adsorption structure in the axial direction of the suction cup connecting rod is smaller than the height of the axial gap, and the outer diameter of the array-type vacuum suction cup 2-3-2 is smaller than the inner diameter of the hollow frame.

[0089] In a specific implementation, for filter membranes of different shapes and sizes, filter membrane holders 3 of corresponding shapes and sizes can be configured.

[0090] In the visual recognition module 4, the movable camera bracket is mainly composed of an aluminum alloy base 4-1, a type I rod 4-2, a type II rod 4-3 and a type III rod 4-4. The type I rod 4-2, the type II rod 4-3 and the type III rod 4-4 form a parallelogram mechanism. The end of the type III rod 4-4 is installed with a second industrial camera 4-5. The type I rod 4-2 is hinged to the aluminum alloy base 4-1.

[0091] In specific implementation, Figure 10 As shown, the connection method of the parallelogram mechanism composed of type I rod 4-2, type II rod 4-3 and type III rod 4-4 can be: type I rod 4-2 is arranged above the aluminum alloy base 4-1, type III rod 4-4 is arranged above type I rod 4-2, two type II rods 4-3 are arranged between type I rod 4-2 and type III rod 4-4, both ends of type I rod 4-2 are hingedly connected to the lower ends of the two type II rods 4-3, the top of each type II rod 4-3 is hingedly connected to the type III rod 4-4, and one end of type I rod 4-2 is hingedly connected to the aluminum alloy base 4-1.

[0092] The male disk driving mechanism includes a first advance screw rod 1-9 and a rotation constraint 1-10; the first advance screw rod 1-9 is installed at the end of the SCARA robot arm structure, the screw rod of the first advance screw rod 1-9 is arranged in the vertical direction, and is sleeved with a first screw rod flange, the first screw rod flange and the screw rod of the first advance screw rod 1-9 are threaded to realize transmission connection, and a quick change disk connector is arranged under the first screw rod flange, the first screw rod flange is connected to one end of the quick change disk connector, and the other end of the quick change disk connector is connected to the quick change disk male disk 1-11; the rotation constraint 1-10 is used to constrain the rotational movement of the first screw rod flange, so as to realize the vertical movement of the first screw rod flange along the Z axis on the first advance screw rod 1-9, and then realize the vertical movement of the quick change disk male disk 1-11 along the Z axis.

[0093] Preferably, the implementation method of the rotation constraint 1-10 can be: the rotation constraint 1-10 is mainly composed of a guide column holder, a guide column, a guide sleeve and a flange limiter. The main body of the guide column holder adopts a rectangular plate structure, and the main body of the flange limiter adopts a U-shaped plate structure. The rectangular plate structure and the U-shaped plate structure are both arranged horizontally. The two ends of the open side of the U-shaped plate structure are located directly below the rectangular plate structure. The line between the two ends and the length direction of the rectangular plate structure are perpendicular to the axial direction of the auxiliary arm 1-6. The middle of the closed side of the U-shaped plate structure is located below the quick-change disk connector; the guide column holder is installed at the end of the auxiliary arm 1-6. The end of the auxiliary arm 1-6 has two through holes, which are connected to the holder by bolts. The guide column holder Two guide posts are arranged vertically below, and the two guide posts are respectively located on both sides of the quick-change disk connector / first screw flange, forming a triangular layout; the top ends of the two guide posts are fixedly connected to the guide post holder by screws, and a guide sleeve is provided on the outside of each guide post, which can slide freely along the guide post, and the two guide sleeves are respectively bolted to the two ends of the flange limiter (i.e., the two ends of the open side of the U-shaped plate structure), and the middle part of the flange limiter (i.e., the middle part of the closed side of the U-shaped plate structure) is fixedly connected to the quick-change disk connector and the first screw flange. The rotational constraint 1-10 cooperates with the flange limiter through the triangular layout of two guide columns and the first screw flange / quick-change disk connector to jointly constrain the rotation of the first screw flange. When the first screw flange moves vertically along the Z axis on the first advancer screw 1-9, the first screw flange drives the two guide sleeves to move synchronously along their respective guide columns through the flange limiter, thereby only constraining the rotational movement of the first screw flange without affecting the vertical movement of the first screw flange along the Z axis.

[0094] Optionally, the guide sleeve and the guide post achieve relative free sliding through transition fit or clearance fit.

[0095] Optionally, the guide sleeve and the guide column cooperate with each other through a linear bearing or a ball guide sleeve to achieve linear motion.

[0096] Optionally, the middle portion of the flange restriction member (ie, the middle portion of the closed side of the U-shaped plate structure), the quick-change disc connector, and the first screw flange are fixedly connected by bolts.

[0097] like Figure 2 As shown, the SCARA robot arm structure is mainly composed of a main arm 1-5, a sub-arm 1-6 and a robot arm column 1-15; the top of the robot arm column 1-15 is connected to the head end of the main arm 1-5 through a first rotary joint, the end of the main arm 1-5 is connected to the head end of the sub-arm 1-6 through a second rotary joint, the end of the sub-arm 1-6 serves as the end of the robot arm, and is arranged with a male disk drive mechanism and a quick-change disk male disk 1-11, and the male disk drive mechanism is installed at the end of the sub-arm 1-6.

[0098] Alternatively, as Figure 3As shown in Figures A and B of the figure, the top end of the robot arm column 1-15 is connected to the head end of the main arm 1-5 through a rotary joint, and the end of the main arm 1-5 is connected to the head end of the auxiliary arm 1-6 through a rotary joint. Figure 3 As shown in Figure A, the head end of the main arm 1-5 is arranged above the mechanical arm column 1-15. The mechanical arm column 1-15 is provided with a main arm drive unit. The output shaft of the main arm drive unit is connected to the head end of the main arm 1-5 through a transmission, thereby driving the main arm 1-5 to rotate horizontally around the axis. Figure 3 As shown in Figure B, a secondary arm drive unit is located at the end of the main arm 1-5. The output shaft of the secondary arm drive unit is connected to the main arm 1-5 via a bearing. The output shaft of the secondary arm drive unit is connected to the head end of the secondary arm 1-6 via a transmission connection, thereby driving the secondary arm 1-6 to rotate horizontally around its axis. Both the main arm drive unit and the secondary arm drive unit are mainly composed of a planetary reducer 1-7 and a manipulator stepper motor 1-8. The two manipulator stepper motors 1-8 are independently controlled by two drivers 1-2.

[0099] Furthermore, the robotic arm 1 also includes a robotic arm base, three drivers 1-2, a logic output photoelectric gate 1-12 and two photoelectric encoders 1-4; the robotic arm base is arranged on the ground or on an equipment platform, and a control module, a driver 1-2, an air pump 1-14 and a robotic arm column 1-15 are installed on the robotic arm base; the three drivers 1-2 are respectively used to drive the first step screw 1-9 and the drive motors of the main arm 1-5 and the auxiliary arm 1-6; the two photoelectric encoders 1-4 are respectively used to collect the real-time rotation angles of the main arm 1-5 and the auxiliary arm 1-6; the logic output photoelectric gate 1-12 is used for the zero limit of the quick-change disk connector.

[0100] When the first screw flange moves upward, the end of the quick-change disk connector connected to the first screw flange (the end close to the logic output photoelectric gate 1-12) protrudes to trigger the logic output photoelectric gate 1-12.

[0101] Further, if Figure 1 As shown, the control module includes a lower computer 1-1 and an upper computer 1-3, the driver 1-2, the logic output photoelectric gate 1-12 and the photoelectric encoder 1-4 are all communicatively connected to the lower computer 1-1, the first industrial camera 1-13 and the second industrial camera 4-5 are all communicatively connected to the upper computer 1-3, and the lower computer 1-1 is also communicatively connected to the pressure sensor 2-2-2 of the rolling module 2-2.

[0102] In a specific implementation, the photoelectric encoder 1-4 can be installed in the following manner: the rotating shaft (rotor) of the photoelectric encoder 1-4 is installed in the (interference) hole on the main arm 1-5 or the auxiliary arm 1-6, that is, it is rigidly connected to the robot arm 1, and the stator of the photoelectric encoder 1-4 is threadedly connected to the robot arm base, the robot arm column 1-15 or the two rotating joints of the robot arm 1 through a fixing part. Therefore, the stator is stationary, while the rotor rotates with the main arm 1-5 or the auxiliary arm 1-6 due to the rigid connection. In this way, the rotation of the rotating shaft drives the internal encoder structure (optical, magnetic or mechanical) to generate pulse signals. These pulse signals are used to measure the angle of rotation of the motor-driven main arm 1-5 or auxiliary arm 1-6, thereby realizing closed-loop control.

[0103] In a specific implementation, the feedback process of the closed-loop control can be as follows: the stator of the photoelectric encoder 1-4 is fixed and does not rotate by a structural member, and the D-shaped shaft on the rotor cooperates with the D-shaped hole reserved on the main arm 1-5 or the auxiliary arm 1-6; when the main arm 1-5 or the auxiliary arm 1-6 rotates, the rotor follows, and the photoelectric encoder 1-4 sends a pulse signal to the lower computer 1-1, and the angle is obtained after decoding to realize angle feedback.

[0104] In specific implementation, the pulse signal is decoded using the following formula to obtain the real-time angle:

[0105] θ=(4N×180°) / (C×R×π)

[0106] Where θ represents the real-time angle, N represents the number of pulses in the pulse signal, C represents the number of encoder lines, and R represents the reduction ratio.

[0107] Further, if Figure 4 As shown, the robot arm quick change module 2 also includes a holder 2-4. The base of the holder 2-4 is provided with three cylindrical hollow frames for placing three functional modules respectively. The front of each cylindrical hollow frame is provided with an opening for easy removal of the functional module.

[0108] A second aspect of the present invention provides a method for automatically transferring a two-dimensional material micro-pattern.

[0109] The automated transfer method of the present invention comprises the following steps:

[0110] S1) After completing the vacuum-assisted filtration, the filter membrane-mask adsorption module 2-1 is coupled to the end of the robot arm 1, and the second stepping screw 2-1-2 is used to drive each vacuum adsorption unit 2-1-5 to move radially, thereby adjusting the distance between each vacuum adsorption unit 2-1-5 and the central axis so that the size of the adsorption plane formed by the suction cup opening of each vacuum adsorption unit 2-1-5 matches the size of the filter membrane and / or mask, and then the vacuum adsorption unit 2-1-5 is aligned with the mask and target. The filter membrane with a micro-pattern of a three-dimensional material is adsorbed and the mask on the filter membrane is adsorbed. The filter membrane-mask adsorption module 2-1 is moved by the robot arm 1. After separating the mask, the mask is placed on the working platform. After the mask is washed with water, it is used for vacuum-assisted filtration in the next round of transfer. The vacuum adsorption unit 2-1-5 is then aligned and adsorbed. The filter membrane-mask adsorption module 2-1 is moved by the robot arm 1. The filter membrane adsorbed on the vacuum adsorption unit 2-1-5 is aligned with the filter membrane rack 3 and placed on the filter membrane rack 3.

[0111] Matching the suction plane to the size of the filter membrane and / or reticle means that the suction cups of the four vacuum suction units 2-1-5 are arranged at the same height, forming a rectangular horizontal suction plane. The four vertices of the suction plane are located in the blank areas at the edge of the filter membrane or reticle. These blank areas are typically free of patterns or functional areas, so suction will not interfere with the central pattern. Typically, the filter membrane and reticle are of similar size, so the suction plane can be matched to both sizes. When the filter membrane and reticle differ significantly in size, matching can be achieved by adjusting the size of the suction plane in steps.

[0112] In a specific implementation, the four vacuum adsorption units 2-1-5 can be distributed centrally and symmetrically relative to the surface center of the filter membrane or mask, while keeping the difference in adsorption force applied by any two suction cups to the filter membrane or mask smaller than a preset threshold to ensure uniform distribution of adsorption force.

[0113] The specific process of vacuum-assisted filtration is as follows: attach the wetted filter membrane to the filtration dish of the vacuum filtration device, then attach the wetted mask engraved with the target two-dimensional material micropattern to the filter membrane, add the two-dimensional material dispersion into the filtration dish, and use the vacuum filtration device to filter out the solvent in the two-dimensional material dispersion to obtain a filter membrane with the mask and the target two-dimensional material micropattern. After the vacuum-assisted filtration is completed, the filter membrane with the mask and the target two-dimensional material micropattern is adsorbed on the filtration dish by the negative pressure environment inside the vacuum filtration device.

[0114] S2) performing a hydrophilic treatment on a target substrate to obtain a hydrophilic treated target substrate and placing the target substrate on an operating table; the target substrate includes a flat substrate and a curved substrate;

[0115] S3) Switch the filter membrane-mask adsorption module 2-1 to the flip module 2-3, use the robot arm 1 to move the flip module 2-3 so that the axis of the suction cup connecting rod is parallel to the axis of the filter membrane holder 3, then extend the cantilever adsorption structure from the symmetrical side of the support rod into the axial gap between the base and the hollow frame, align the arrayed vacuum suction cup 2-3-2 with the bottom surface of the filter membrane and adsorb the filter membrane, and simultaneously remove the cantilever adsorption structure and the filter membrane from the axial gap between the base and the hollow frame, use the stepper motor 2-3-4 to drive the arrayed vacuum suction cup 2-3-2 to rotate around the transmission shaft 2-3-3, so that the filter membrane is flipped to face down, and use the robot arm 1 to move the flip module 2-3, align the filter membrane on the arrayed vacuum suction cup 2-3-2 and place it on the target substrate after the hydrophilic treatment, to obtain a target substrate covered with the filter membrane;

[0116] During the alignment process of step S1 and step S3, the host computer 1-3 is first used to achieve coarse positioning based on the information collected by the second industrial camera 4-5 through a visual recognition algorithm, and then the host computer 1-3 is used to achieve precise positioning based on the information collected by the first industrial camera 1-13 through a visual recognition algorithm, and the positions of the mask, filter membrane and target substrate are calibrated in real time to ensure the accurate transfer of the micropattern.

[0117] S4) switching the flip module 2-3 to the rolling module 2-2, while fixing the target substrate covered with the filter membrane on the operating table, using the robotic arm 1 to move the rolling module 2-2 along a preset path, and rolling the filter membrane with the silicone roller 2-2-3 to apply pressure to the filter membrane and the target substrate to achieve transfer of the target two-dimensional material micropattern;

[0118] S5) switching the rolling module 2-2 to the filter membrane-mask adsorption module 2-1, using the filter membrane-mask adsorption module 2-1 to adsorb the filter membrane, and separating the filter membrane from the target substrate according to a preset separation speed to complete a single transfer;

[0119] S6) By repeating steps S1 to S5, continuous automatic transfer of the two-dimensional material micro pattern is achieved.

[0120] The hydrophilic treatment may be performed using methods including, but not limited to, oxygen plasma treatment and ultraviolet light treatment. The purpose of the hydrophilic treatment is to increase the surface energy and hydrophilicity of the substrate and ensure good bonding between the two-dimensional material micropattern and the substrate.

[0121] Specifically, the target substrate is glass, silicon wafer, or polydimethylsiloxane. The two-dimensional material is graphene, transition metal chalcogenide, or MXene. The minimum feature size of the micropattern is 5-10 μm. The filter membrane includes but is not limited to a porous polymer filter membrane (pore size 0.1-1 μm).

[0122] The alignment process is as follows: aligning the vacuum adsorption unit 2-1-5 with the mask on the filter membrane and adsorbing it; aligning the filter membrane adsorbed on the vacuum adsorption unit 2-1-5 with the filter membrane holder 3; aligning the arrayed vacuum suction cup 2-3-2 with the filter membrane; aligning the filter membrane on the arrayed vacuum suction cup 2-3-2 with the target substrate after hydrophilic treatment; and aligning the silicone roller 2-2-3 with the filter membrane.

[0123] D1) Use the second industrial camera 4-5 to capture an image of the target object on the operating table, use the upper computer 1-3 to process it through a visual recognition algorithm, obtain the position of the target object, and send the position of the target object as the initial target position to the lower computer 1-1; the lower computer 1-1 controls the movement of the robot arm 1 according to the initial target position until the end functional module moves to the initial target position.

[0124] D2) Use the first industrial camera 1-13 to simultaneously capture images of the end object on the functional module and the target object on the operating table, use the upper computer 1-3 to process the images of the end object and the target object through a visual recognition algorithm, obtain the positions of the end object and the target object, and send the positions of the end object and the target object as position feedback information to the lower computer 1-1, the lower computer 1-1 corrects the initial target position or the previous posture error according to the position feedback information, obtains a new posture error, and the lower computer 1-1 controls the movement of the robot arm 1 according to the new posture error.

[0125] The term "target object" refers to the object that needs to be positioned and / or aligned during the alignment process, including but not limited to the mask, filter membrane on a porous sand core, filter membrane holder, filter membrane on a filter membrane holder, target substrate on a workbench, and other objects. The term "end object" refers to the object and functional components adsorbed to the end of the robotic arm during the alignment process, including but not limited to the vacuum adsorption unit, filter membrane adsorbed on the vacuum adsorption unit, arrayed vacuum suction cups, filter membrane adsorbed on the arrayed vacuum suction cups, and silicone rollers. For example, when aligning vacuum adsorption unit 2-1-5 with the mask on the filter membrane, the target object is the mask on the filter membrane, and the end object is vacuum adsorption unit 2-1-5.

[0126] Preferably, the visual recognition algorithm may adopt a Perspective-n-Point (PnP) algorithm.

[0127] Preferably, when the visual recognition algorithm adopts the PnP algorithm, the position of the target object is obtained by the following formula:

[0128]

[0129] Where R is the three-dimensional rotation transformation matrix describing the filter / mask in the camera coordinate system, t is the three-dimensional translation vector describing the filter / mask in the camera coordinate system, and X i is the three-dimensional coordinate (world coordinate system) of the i-th feature point on the filter / mask, n is the total number of feature points, u i is the 2D pixel coordinate of the i-th feature point in the camera image, and π is the projection function (including the camera intrinsic parameter matrix) that maps the 3D coordinate to the 2D image plane.

[0130] Preferably, the new pose error is obtained by the following formula:

[0131] △x=K v (x vision —x cmd )

[0132] Where △x represents the pose error of the end effector (functional module), K v represents the visual servo gain coefficient, x vision represents the actual pose obtained by the end coaxial vision system, that is, the position of the end object, that is, x cmd It represents the target pose required by the control system, that is, the position of the target object.

[0133] D3) Repeat step D2 to form a closed-loop feedback control until the posture error is less than or equal to the preset threshold, completing the alignment operation.

[0134] In step S3, the posture error is less than or equal to the preset threshold, specifically: the posture error satisfies ||△x||≤ε, where ε represents the maximum allowable posture error.

[0135] In step S4, when rolling module 2-2 is operating, silicone roller 2-2-3 is elastically deformed by pressure, applying distributed pressure from point to surface to the filter membrane, squeezing out the air between the filter membrane and the target substrate, achieving lossless dry transfer. Pressure sensor 2-2-2 provides feedback on the force applied to the filter membrane. A force-position hybrid control algorithm adjusts the position of the lead screw, precisely controlling the pressure range during micropattern transfer to within a preset range (accuracy ±0.1 kPa), thereby controlling the spacing between micropattern layers.

[0136] During the rolling process of step S4, the lower computer 1-1 obtains the pressure error based on the real-time pressure and set pressure collected by the pressure sensor 2-2-2, and calculates the z-axis height adjustment amount based on the pressure error. The lower computer 1-1 drives the first step screw 1-9 according to the z-axis height adjustment amount, adjusts the position of the silicone roller 2-2-3 to change the applied pressure, and realizes closed-loop feedback control of the pressure through continuous pressure measurement and position adjustment.

[0137] When the target substrate is a curved substrate, the closed-loop feedback process is as follows:

[0138] First, define a pair of parametric coordinates (u, v) in the robot base coordinate system, preset the surface parametric equation S (u, v) of the object to be transferred, define the initial contact point (u0, v0), and then locate the coordinates P based on the visual positioning. t (x, y, z) and the collected real-time pressure F z , the real-time normal contact force is calculated by the following formula:

[0139] F n =F z / cosθ

[0140] cosθ=(▽S·z') / (||▽S||)

[0141] Where, F n represents the real-time normal contact force, F z represents the real-time pressure collected by the pressure sensor (2-2-2), θ represents the angle between the surface normal and the vertical direction, ▽S represents the gradient vector of the parameterized surface, and the direction is the surface normal, ▽ represents the gradient operator, S represents the preset parameterized surface, z' represents the unit vector parallel to the z-axis of the robot base coordinate system, and ||▽S|| represents the norm of the gradient vector of the parameterized surface.

[0142] The specific embodiments of the present invention are as follows:

[0143] Example 1

[0144] This embodiment provides a method for transferring a micro pattern onto a flat substrate using the automated transfer device of the present invention. The specific process is as follows:

[0145] like Figure 1 As shown, in this embodiment, the robotic arm 1 of the automated transfer equipment adopts a SCARA-type robotic arm structure, which includes a main arm 1-5, an auxiliary arm 1-6, and corresponding planetary reducers 1-7, with a quick-change disk (quick-change disk male disk 1-11) integrated at the end. The robotic arm 1 achieves high-precision positioning (repeatability accuracy of ±0.01mm) through two robotic arm stepper motors 1-8 and a first stepper screw 1-9. The motion trajectory is controlled by the upper computer 1-3, the lower computer 1-1, the first industrial camera 1-13, the second industrial camera 4-5, and the driver 1-2.

[0146] S1) Adsorption and positioning of filter membrane and mask

[0147] S11) After vacuum-assisted filtration is complete, the porous polymer filter membrane (pore size 0.1-1 μm) bearing the mask and target 2D material micropattern is adsorbed to the porous sand core of the filtration dish by the negative pressure environment within the vacuum filtration apparatus. The apparatus is placed on an operating table, and the membrane-mask adsorption module 2-1 is activated. At this point, due to the negative pressure within the vacuum filtration apparatus, the filter membrane bearing the mask and target 2D material micropattern is firmly adsorbed to the porous sand core by atmospheric pressure.

[0148] The minimum feature size of the target two-dimensional material micropattern is 5 to 10 μm.

[0149] S12) The filter membrane-mask adsorption module 2-1 drives the adsorption adjustment unit 2-1-4 through the second stepping screw 2-1-2 to adjust the position of the vacuum adsorption unit 2-1-5, first adsorbs the mask on the filter membrane, and places the mask membrane on the work platform, then controls the robot arm 1, drives the adsorption adjustment unit 2-1-4 through the second stepping screw 2-1-2 to adjust the position of the vacuum adsorption unit 2-1-5, adsorbs the filter membrane, and calibrates the positioning deviation between the filter membrane and the adsorption unit 2-1-5 in real time through the visual recognition module, and stably places the filter membrane on the filter membrane rack 3 to facilitate subsequent flipping.

[0150] S2) Substrate hydrophilic treatment

[0151] The target substrate (such as glass, silicon wafer or polydimethylsiloxane PDMS) is treated with oxygen plasma (such as power 50W, time 30s) or ultraviolet light (such as wavelength 254nm, time 10min) to improve the surface hydrophilicity and obtain a hydrophilic target substrate.

[0152] S3) Filter membrane flip

[0153] The switching module is switched to the flipping module 2-3, and the filter membrane on the filter membrane holder 3 is adsorbed through the stepping motor 2-3-4, the transmission shaft 2-3-3 and the array vacuum suction cup 2-3-2. The flipping of the filter membrane is controlled so that the two-dimensional material micro-pattern on the filter membrane faces downward, and the robot arm 1 is driven to control the position of the filter membrane so that it is placed on the target substrate after the hydrophilic treatment to obtain the target substrate covered with the filter membrane.

[0154] S4) Rolling lamination

[0155] S41) The robotic arm switches to the rolling module 2-2, and the silicone roller 2-2-3 (Shore hardness 20~40A) is connected to the pressure sensor 2-2-2 (range 0~50kPa, accuracy ±0.1kPa) through the rolling bearing 2-2-4 (cylindrical roller bearing is used in this embodiment).

[0156] S42) The target substrate covered with the filter membrane is fixed to the operating table, and the robotic arm rolls the surface of the filter membrane along a preset path (speed 1 to 4 mm / s). The pressure sensor provides real-time feedback of the pressure value and dynamically adjusts the rolling force (above 20 kPa) to ensure that the two-dimensional material micropattern is evenly attached to the substrate.

[0157] S5) Lossless separation

[0158] S51) Switch to the filter membrane-mask adsorption module 2-1, and the second stepping screw 2-1-2 (lead 2 to 8 mm) drives the adsorption adjustment unit 2-1-4 to control the spacing of the vacuum adsorption unit 2-1-5.

[0159] S52) The vacuum adsorption unit 2-1-5 (pore size 2.8 mm) adsorbs the filter membrane and simultaneously applies negative pressure (below -10 kPa). The robotic arm and the separation module work together to achieve lossless separation of the filter membrane and the substrate.

[0160] S6) Full process automation control

[0161] S61) The visual recognition system (based on host computers 1-3) collects the position data of the mask, filter membrane and spherical substrate in real time, and corrects the motion trajectory of the robot arm through the PID algorithm.

[0162] S62) The control system coordinates the actions of each module:

[0163] After the filter membrane-mask adsorption module completes positioning, the flip module is started to flip the filter membrane and place it on the target substrate; the rolling module is triggered to perform bonding; after the rolling pressure reaches the set threshold (such as 40kPa), the separation program is started, the vacuum adsorption unit releases the substrate, and a single transfer cycle is completed.

[0164] like Figure 11 As shown, when the characteristic size of the target two-dimensional material micro-pattern is in the range of 5 to 10 μm, the two-dimensional material micro-pattern transferred in this embodiment still has good accuracy and resolution.

[0165] Example 2

[0166] This embodiment provides a method for transferring a micro pattern onto a spherical substrate using the automated transfer device of the present invention. The specific process is as follows:

[0167] In this embodiment, the main body of the device remains consistent with that of Example 1, and adopts a SCARA type robotic arm structure, including a main arm 1-5, a secondary arm 1-6 and a planetary reducer 1-7, and an integrated quick-change disk (quick-change disk male disk 1-11) at the end. The robotic arm achieves high-precision positioning (such as repeatability accuracy of ±0.01mm) through the robotic arm stepper motor 1-8 and the first step screw 1-9. Since the target substrate is spherical, the device needs to additionally integrate a spherical adjustment platform to provide an adaptive adjustment function of the substrate. Through the coordinated control of the upper computer 1-3, the lower computer 1-1, the first industrial camera 1-13 and the driver 1-2, the precise positioning and pattern transfer of the spherical substrate are achieved.

[0168] S1) Adsorption and positioning of filter membrane and mask

[0169] S11) After vacuum-assisted filtration is complete, the porous polymer filter membrane (pore size 0.1-1 μm) bearing the mask and target 2D material micropattern is adsorbed to the porous sand core of the filtration dish by the negative pressure environment within the vacuum filtration apparatus. The apparatus is placed on an operating table, and the membrane-mask adsorption module 2-1 is activated. At this point, due to the negative pressure within the vacuum filtration apparatus, the filter membrane bearing the mask and target 2D material micropattern is firmly adsorbed to the porous sand core by atmospheric pressure.

[0170] The minimum feature size of the target two-dimensional material micropattern is 5 to 10 μm.

[0171] S12) The filter membrane-mask adsorption module 2-1 uses the second stepper screw 2-1-2 to drive the adsorption adjustment unit 2-1-4 to adjust the position of the vacuum adsorption unit 2-1-5, adsorbing the mask and placing the mask on the work platform. The robotic arm 1 then controls the second stepper screw 2-1-2 to drive the adsorption adjustment unit 2-1-4 to adjust the position of the vacuum adsorption unit 2-1-5, adsorbing the filter membrane. The visual recognition module uses real-time calibration to determine the positioning deviation between the filter membrane and the vacuum adsorption unit 2-1-5, ensuring that the filter membrane is stably placed on the filter membrane holder 3 for subsequent flipping.

[0172] S2) Substrate hydrophilic treatment

[0173] Spherical target substrates (such as glass, silicon wafers, or PDMS) are treated with oxygen plasma (e.g., 50W for 45 seconds) or UV light (e.g., 254nm for 15 minutes) to enhance surface hydrophilicity and ensure good adhesion of the 2D material micropattern. A rotating stage can be used to ensure uniform treatment of the spherical substrate.

[0174] S3) Filter membrane flip

[0175] The switch module switches to flip module 2-3, which uses stepper motor 2-3-4, drive shaft 2-3-3, and array vacuum cup 2-3-2 to suction and flip the filter membrane. Because the target substrate is spherical, the flip module requires additional support to adapt to the spherical surface, ensuring that the two-dimensional material micropattern is precisely positioned downward on the spherical substrate. At this point, the robotic arm adjusts to ensure the filter membrane is positioned smoothly and in full contact with the substrate's curved surface.

[0176] S4) Rolling lamination

[0177] S41) The robotic arm switches to the rolling module 2-2, and the silicone roller 2-2-3 (Shore hardness 20~40A) is connected to the pressure sensor 2-2-2 (range 0~50kPa, accuracy ±0.1kPa) through the rolling bearing 2-2-4 (cylindrical roller bearing is used in this embodiment).

[0178] S42) The target spherical substrate is fixed by a work platform. To adapt to the curvature of the spherical target substrate, the robotic arm rolls along the curvature of the spherical surface. The pressure sensor provides real-time pressure feedback and dynamically adjusts the rolling force (according to the change in the normal direction of the contact point, the control system needs to adjust the applied force to maintain the target pressure (such as adjusting it to 10-40 kPa to ensure fit). In this way, the two-dimensional material micro-pattern can evenly fit the curved surface of the spherical substrate.

[0179] The specific process of the pressure sensor feeding back pressure in real time and dynamically adjusting the rolling force is as follows: a fitting function with the target base sphere is preset in the host computer 1-3, and the starting position of the transfer is set. The host computer 1-3 will send these parameters to the slave computer 1-1. During rolling, the silicone roller 2-2-3 contacts the spherical base, and the pressure sensor 2-2-2 feeds back the rolling force in the vertical direction. The position x, y, z where the silicone roller 2-2-3 contacts the filter membrane (the position x, y, z can be obtained by the camera, and the starting position x, y, z are all 0) is substituted into the parameterized surface S(u(x, y, z), v(x, y, z)), and the angle θ between the normal and the vertical direction is calculated, thereby obtaining the rolling force feedback F along the normal at this time (the vertical force is projected in the normal direction). n , the lower computer 1-1 can adjust the height of the z-axis rolling module in real time through pressure feedback, thereby controlling the rolling force F z .

[0180] S5) Lossless separation

[0181] S51) Switch to the filter membrane-mask adsorption module 2-1, and the second stepping screw 2-1-2 (lead 2 to 8 mm) drives the adsorption adjustment unit 2-1-4 to control the spacing of the vacuum adsorption unit 2-1-5.

[0182] S52) The vacuum adsorption unit 2-1-5 adsorbs the filter membrane while simultaneously applying a negative pressure of less than -10 kPa. To adapt to the morphology of the spherical substrate, the separation module can adaptively adjust the separation angle and force to ensure lossless separation of the filter membrane from the spherical substrate.

[0183] S6) Full process automation control

[0184] S61) The visual recognition system (based on host computers 1-3) collects the position data of the mask, filter membrane and spherical substrate in real time, and corrects the motion trajectory of the robot arm through the PID algorithm, especially the curvature change of the spherical target substrate.

[0185] S62) The control system coordinates the actions of each module: after the filter membrane-mask adsorption module completes positioning, it starts the flip module to flip the filter membrane and place it on the spherical target substrate; triggers the rolling module to perform bonding; after the rolling pressure reaches a set threshold (such as 40kPa), it starts the separation program, and after the filter membrane is separated from the substrate, a single transfer cycle is completed.

[0186] Example 3

[0187] In this embodiment, the two-dimensional material Ti3C2T X As an example, a method for preparing a porous polymer filter membrane with a target two-dimensional material micropattern on the front side by vacuum-assisted filtration is provided, which specifically comprises the following steps:

[0188] 1. Prepare dispersion of two-dimensional materials

[0189] The Ti3C2T2 family of two-dimensional transition metal carbides / nitrides MXenes X Ultrasonic oscillation was used to uniformly disperse the MXene in water to obtain a 0.25 mg / mL MXene dispersion, which met the requirements for uniform material dispersion and exhibited good film-forming properties upon filtration. Alternatively, a commercial MXene dispersion could be used for dilution: 0.2 mL of a 10 mg / mL commercial MXene dispersion was diluted to 0.25 mg / mL by adding 7.8 mL of solvent.

[0190] 2. Micro-pattern printing of two-dimensional materials

[0191] 2.1. First, wet the porous polymer filter membrane and apply vacuum pressure to tightly adhere it to a flat porous sand core with a porous structure. Then, wet the mask and tightly fit the mask to the porous polymer filter membrane with a pore size of 0.8 μm. The porous polymer filter membrane is made of nitric acid-acetic acid mixed cellulose material.

[0192] 2.2. Use a pipette to transfer 1 mL of the prepared MXene dispersion to a filtration dish, and then use a vacuum pump to evacuate the flask. Use the air pressure to filter the water in the MXene dispersion into the vacuum flask. X A patterned uniform two-dimensional material film is deposited on the surface of the porous polymer filter membrane to obtain a porous polymer filter membrane with a target two-dimensional material micro-pattern on the front.

[0193] Comparative Example

[0194] The two-dimensional material Ti3C2T in this comparative example X As an example, a transfer method based on manual operation is provided, and the specific process is as follows:

[0195] S1) Preparation of dispersion of two-dimensional materials

[0196] The Ti3C2T2 family of two-dimensional transition metal carbides / nitrides MXenes X Ultrasonic oscillation was used to uniformly disperse the MXene in water to obtain a 0.25 mg / mL dispersion, which met the requirements for uniform material dispersion and exhibited good film-forming properties upon filtration. Alternatively, a commercial MXene dispersion could be used for dilution: 0.2 mL of a 10 mg / mL commercial MXene dispersion was diluted to 0.25 mg / mL by adding 7.8 mL of solvent.

[0197] S2) 2D material micro-pattern printing

[0198] S21) First, the porous polymer filter membrane is moistened, and vacuum pressure is applied to make it tightly adhere to the flat porous sand core with a porous structure, and then the mask is moistened. In this comparative example, the mask is made of laser-processed stainless steel material with a thickness of 0.1 mm, that is, a rigid material mask is used, and the pattern on the mask is an "I"-shaped electrode. The mask is tightly attached to the porous polymer filter membrane with a pore size of 0.8 μm. The porous polymer filter membrane is made of nitric acid-acetic acid mixed cellulose material.

[0199] S22) Quantitatively transfer 1 mL of the prepared MXene dispersion to a filtration dish using a pipette, and then use a vacuum pump to evacuate the flask, and use the air pressure to filter the water in the MXene dispersion into the vacuum flask. X A uniform, patterned 2D material film is deposited on the surface of a porous polymer filter membrane. Removing the mask reveals the desired MXene micropattern, with a minimum feature size of 250 μm.

[0200] S3) Improve the hydrophilicity of the target substrate

[0201] The target substrate is a 30×30mm flat glass. The glass is cleaned with ultrasonic waves to remove surface impurities. The dried glass is placed in a plasma cleaner, where oxygen plasma is used to impact the glass surface to enhance the hydrophilicity of the glass, facilitating the subsequent transfer of two-dimensional materials.

[0202] S4) 2D material micropattern transfer

[0203] After the mask is removed, a micro-pattern array is formed. The porous polymer filter membrane carrying the semi-wet micro-pattern array is removed and moved to a transfer platform. The vacuum suction cup on the transfer platform positions and fixes the porous polymer filter membrane. The hydrophilic-treated glass is then attached to the micro-pattern. With the assistance of external force and vacuum suction, the van der Waals force between the patterned uniform two-dimensional material film and the glass is stronger than the van der Waals force between the patterned uniform two-dimensional material film and the porous polymer filter membrane. Therefore, the two-dimensional material micro-pattern can be transferred to the glass by flipping the glass.

[0204] Comparing Example 1 and the comparative example, compared with the manual method, the method of the present invention reduces pattern damage through high-precision control and pressure uniform distribution technology, and the minimum feature size can reach 5-10μm. Through the second-level switching of functional modules, the transfer cycle is significantly shortened, from 15-20min to ≤3min per time, which is 5 times more efficient than manual operation. Real-time positioning monitoring is achieved through the visual system, combined with real-time pressure feedback. For both flat substrates and curved substrates, the transfer success rate can reach more than 75%, which is suitable for the automated transfer of micro-patterns of two-dimensional materials to ensure product quality and batch consistency.

[0205] The above embodiments are merely examples. In actual applications, parameters can be adjusted according to material properties (such as MXene, graphene) and substrate type (metal, polymer), all of which fall within the scope of protection of the present invention.

[0206] The above specific embodiments are used to illustrate the present invention rather than to limit the present invention. Any modifications and changes made to the present invention within the spirit of the present invention and the protection scope of the claims shall fall within the protection scope of the present invention.

[0207] The above description is only a preferred embodiment of the present invention. Therefore, any equivalent changes or modifications made according to the structure, characteristics and principles described in the scope of the patent application of the present invention are included in the scope of the patent application of the present invention.

Claims

1. A two-dimensional material micro-pattern automatic transfer device, characterized in that: include: A robotic arm (1) comprises a SCARA robotic arm structure, an air pump (1-14), and a male disk drive mechanism and a quick-change disk male disk (1-11) arranged at the end of the SCARA robotic arm structure, wherein the SCARA robotic arm structure is used to realize horizontal movement of the end functional module, the male disk drive mechanism is used to realize vertical movement of the quick-change disk male disk (1-11), and the air pump (1-14) is used as a power source and / or air source for the quick-change disk male disk (1-11); A robotic arm quick-change module (2) includes three independent functional modules, namely a filter membrane-mask adsorption module (2-1), a rolling module (2-2), and a flip module (2-3), each of which includes a quick-change disk mother disk, and the three quick-change disk mother disks can be matched with the quick-change disk male disk (1-11) through a pneumatic coupling interface; a filter membrane holder (3) for placing a filter membrane with a target two-dimensional material micro-pattern; A visual recognition module (4) includes a first industrial camera (1-13) and a second industrial camera (4-5), wherein the first industrial camera (1-13) is mounted at the end of a SCARA robotic arm structure, and the second industrial camera (4-5) is mounted on a movable camera bracket; A control module is used to control the automated transfer equipment.

2. The automated transfer device for two-dimensional material micropatterns according to claim 1, characterized in that: The filter membrane-mask adsorption module (2-1) comprises an adsorption module frame, a first mother disk of a quick-change disk (2-1-1), a second stepping screw (2-1-2), a second screw flange (2-1-3), four adsorption adjustment units (2-1-4) and a vacuum adsorption unit (2-1-5); The adsorption module frame is provided with a first mother plate (2-1-1) of a quick-change disk and a second stepping screw (2-1-2), and the second stepping screw (2-1-2) is in transmission connection with the second screw flange (2-1-3); the bottom end of the adsorption module frame is provided with four upper connecting pieces, and the upper connecting pieces, the adsorption adjustment units (2-1-4) and the vacuum adsorption units (2-1-5) correspond to each other one by one; for a corresponding set of upper connecting pieces, adsorption adjustment units (2-1-4) and vacuum adsorption units (2-1-5), the adsorption adjustment units (2-1-4) are mainly composed of four connecting pieces of the same length. The invention relates to a vacuum adsorption unit (2-1-5) comprising a plurality of connecting rods, an L-shaped connecting rod and a lower connecting plate, wherein the four connecting rods are arranged in parallel and form two parallelogram structures with the upper connecting plate and the lower connecting plate; the middle part of the connecting rod located on the side close to the second screw rod flange (2-1-3) is hingedly connected to one end of the L-shaped connecting rod, and the other end of the L-shaped connecting rod is hingedly connected to the second screw rod flange (2-1-3); the lower connecting plate is fixedly connected to the vacuum adsorption unit (2-1-5), the suction cup opening of the vacuum adsorption unit (2-1-5) is arranged downward, and the vacuum adsorption unit (2-1-5) is connected to the air path of the first mother disk (2-1-1) of the quick-change disk.

3. The automatic transfer device for two-dimensional material micro-patterns according to claim 1, characterized in that: The rolling module (2-2) comprises a rolling module frame, a second quick-change mother disk (2-2-1), a pressure sensor (2-2-2), a silicone roller (2-2-3) and a rolling bearing (2-2-4); the second quick-change mother disk (2-2-1) is installed on the top of the rolling module frame, and the silicone roller (2-2-3) is arranged on the bottom; the silicone roller (2-2-3) is connected to the pressure sensor (2-2-2) via the rolling bearing (2-2-4); the pressure sensor (2-2-2) can detect the pressure applied to the silicone roller (2-2-3) during rolling; the pressure sensor (2-2-2) is communicatively connected to the control module; the surface hardness of the silicone roller (2-2-3) is Shore A 20-40.

4. The automatic transfer device for two-dimensional material micro-patterns according to claim 1, characterized in that: The flip module (2-3) includes a third mother disk of a quick-change disk (2-3-1), an array-type vacuum suction cup (2-3-2), a transmission shaft (2-3-3) and a stepper motor (2-3-4); the third mother disk of the quick-change disk (2-3-1) is connected to the body of the stepper motor (2-3-4); the transmission shaft (2-3-3) of the stepper motor (2-3-4) is connected to the array-type vacuum suction cup (2-3-2) through transmission, thereby driving the array-type vacuum suction cup (2-3-2) to rotate around the transmission shaft (2-3-3); the array-type vacuum suction cup (2-3-2) ) is perpendicular to the axis of the transmission shaft (2-3-3), and the arrayed vacuum suction cup (2-3-2) is connected to the air path of the third mother disk (2-3-1) of the quick-change disk; the transmission shaft (2-3-3) of the stepping motor (2-3-4) is coaxially sleeved with a flange, and the flange is connected to the back of the arrayed vacuum suction cup (2-3-2) through a suction cup connecting rod extending along its own radial direction, and the suction direction of the arrayed vacuum suction cup (2-3-2) is parallel to the suction cup connecting rod, and the flange, the suction cup connecting rod and the arrayed vacuum suction cup (2-3-2) form a cantilever adsorption structure; The filter membrane frame (3) comprises a base, a support rod and a hollow frame connected in sequence from bottom to top, and a filter membrane with a target two-dimensional material micro-pattern is placed above the hollow frame; The dimension of the cantilever adsorption structure in the axial direction of the suction cup connecting rod is smaller than the height of the axial gap between the base and the hollow frame in the filter membrane frame (3), and the outer diameter of the arrayed vacuum suction cup (2-3-2) is smaller than the inner diameter of the hollow frame; when the axis of the suction cup connecting rod is parallel to the axis of the filter membrane frame (3), the cantilever adsorption structure can extend into the axial gap between the base and the hollow frame, thereby performing a back adsorption operation on the filter membrane above the hollow frame through the arrayed vacuum suction cup (2-3-2).

5. The automatic transfer device for two-dimensional material micro-patterns according to claim 1, characterized in that: The male disk driving mechanism includes a first advance screw rod (1-9) and a rotation constraint member (1-10); the first advance screw rod (1-9) is installed at the end of the SCARA mechanical arm structure, the screw rod of the first advance screw rod (1-9) is arranged vertically and is sleeved with a first screw rod flange, the first screw rod flange is matched with the screw rod thread of the first advance screw rod (1-9), the first screw rod flange is connected to one end of the lower quick-change disk connecting member, and the other end of the quick-change disk connecting member is connected to the quick-change disk male disk (1-11); the rotation constraint member (1-10) is installed at the end of the SCARA mechanical arm structure, and is used to constrain the rotational movement of the first screw rod flange to realize the vertical movement of the quick-change disk male disk (1-11).

6. The automatic transfer device for two-dimensional material micro-patterns according to claim 5, characterized in that: The SCARA mechanical arm structure mainly consists of a main arm (1-5), a secondary arm (1-6) and a mechanical arm column (1-15); the top end of the mechanical arm column (1-15) is connected to the head end of the main arm (1-5) through a first rotary joint, the end of the main arm (1-5) is connected to the head end of the secondary arm (1-6) through a second rotary joint, and the end of the secondary arm (1-6) is provided with a male disk drive mechanism and a quick-change disk male disk (1-11); The robotic arm (1) further comprises a robotic arm base, three drivers (1-2), a logic output photoelectric gate (1-12), and two photoelectric encoders (1-4); a control module, a driver (1-2), an air pump (1-14), and a robotic arm column (1-15) are mounted on the robotic arm base; the three drivers (1-2) are respectively used to drive the first step screw (1-9), the main arm (1-5), and the auxiliary arm (1-6); the two photoelectric encoders (1-4) are respectively used to collect the real-time rotation angles of the main arm (1-5) and the auxiliary arm (1-6). The photoelectric gate (1-12) of the logic output is used for zero return limit of the quick-change disk connector; the control module includes a lower computer (1-1) and an upper computer (1-3); the driver (1-2), the photoelectric gate (1-12) of the logic output and the photoelectric encoder (1-4) are all communicatively connected to the lower computer (1-1); the first industrial camera (1-13) and the second industrial camera (4-5) are both communicatively connected to the upper computer (1-3); the lower computer (1-1) is also communicatively connected to the pressure sensor (2-2-2) of the rolling module (2-2).

7. A method for automatically transferring a two-dimensional material micro-pattern, using the automatic transfer device for two-dimensional material micro-pattern according to any one of claims 1 to 6, characterized in that: The following steps are involved: S1) After completing the vacuum-assisted filtration, the filter membrane-mask adsorption module (2-1) is coupled to the end of the robotic arm (1), and the second stepping screw (2-1-2) is used to adjust the position of each vacuum adsorption unit (2-1-5) according to the size of the filter membrane and / or the mask, and then the vacuum adsorption unit (2-1-5) is aligned with the filter membrane with the mask and the target two-dimensional material micro-pattern and adsorbs the mask on the filter membrane, and the robotic arm (1) is used to move the filter membrane-mask adsorption module (2-1), and the mask separated from the filter membrane is placed on the working platform, and then the vacuum adsorption unit (2-1-5) is aligned with and adsorbs the filter membrane, and the robotic arm (1) is used to move the filter membrane-mask adsorption module (2-1), and the filter membrane is aligned and placed on the filter membrane rack (3); S2) placing and fixing the hydrophilic treated target substrate on an operating table; the target substrate includes a flat substrate and a curved substrate; S3) switching the filter membrane-mask adsorption module (2-1) to the flip module (2-3), using the robotic arm (1) to move the flip module (2-3), aligning the arrayed vacuum suction cup (2-3-2) with the bottom surface of the filter membrane on the filter membrane holder (3) and adsorbing the filter membrane, moving the filter membrane down the filter membrane holder (3), using the stepper motor (2-3-4) to drive the arrayed vacuum suction cup (2-3-2) to rotate, flipping the filter membrane to face downward, using the robotic arm (1) to move the flip module (2-3), aligning the filter membrane and placing it on the target substrate after the hydrophilic treatment, to obtain the target substrate covered with the filter membrane; S4) switching the flip module (2-3) to the rolling module (2-2), using the robotic arm (1) to move the rolling module (2-2) along a preset path, and rolling the filter membrane with the silicone roller (2-2-3) to achieve the transfer of the target two-dimensional material micro pattern; S5) switching the rolling module (2-2) to the filter membrane-mask adsorption module (2-1), using the filter membrane-mask adsorption module (2-1) to adsorb the filter membrane, separating the filter membrane from the target substrate, and completing a single transfer; S6) By repeating steps S1 to S5, continuous automatic transfer of the two-dimensional material micro pattern is achieved.

8. The method for automatically transferring a two-dimensional material micro-pattern according to claim 7, wherein: The vacuum-assisted filtration process specifically comprises: attaching a wetted filter membrane to a filtration dish of a vacuum filtration device, attaching a wetted mask engraved with a target two-dimensional material micro-pattern to the filter membrane, adding a two-dimensional material dispersion into the filtration dish, and using the vacuum filtration device to filter out the solvent in the two-dimensional material dispersion to obtain a filter membrane with the mask and the target two-dimensional material micro-pattern; after the vacuum-assisted filtration is completed, the filter membrane with the mask and the target two-dimensional material micro-pattern is adsorbed on the filtration dish by the negative pressure environment inside the vacuum filtration device; The two-dimensional material is graphene, transition metal chalcogenide or Mxene, and the minimum feature size of the two-dimensional material micropattern is 5 to 10 μm; the target substrate is glass, silicon wafer or polydimethylsiloxane.

9. The method for automatically transferring a two-dimensional material micro-pattern according to claim 7, wherein: During the rolling process of step S4, the lower computer (1-1) obtains a pressure error based on the real-time pressure and the set pressure collected by the pressure sensor (2-2-2), calculates the z-axis height adjustment amount based on the pressure error, and the lower computer (1-1) drives the first stepper screw (1-9) based on the z-axis height adjustment amount to adjust the position of the silicone roller (2-2-3) to change the applied pressure, thereby realizing closed-loop feedback control of the pressure; When the target substrate is a curved surface, the real-time normal contact force is calculated based on the real-time pressure using the following formula, and the pressure error is then obtained based on the real-time normal contact force and the set pressure: F n =F z / cosθ cosθ=(▽S·z') / (||▽S||) Where, F n represents the real-time normal contact force, F z represents the real-time pressure collected by the pressure sensor (2-2-2), θ represents the angle between the surface normal and the vertical direction, ▽S represents the gradient vector of the parameterized surface, and its direction is the surface normal. ▽ represents the gradient operator, S represents the preset parameterized surface, z' represents the unit vector parallel to the z-axis of the robot base coordinate system, and ||·|| represents the norm of "·".

10. The method for automatically transferring a two-dimensional material micro-pattern according to claim 7, wherein: In step S1 and step S3, the alignment process is specifically as follows: D1) uses the second industrial camera (4-5) to capture an image of the target object on the operating table, processes it using a visual recognition algorithm using the upper computer (1-3), obtains the position of the target object, and sends it to the lower computer (1-1) as the initial target position; the lower computer (1-1) controls the movement of the robotic arm (1) according to the initial target position until the terminal functional module moves to the initial target position; D2) using a first industrial camera (1-13) to simultaneously capture images of an end object on the functional module and a target object on the operating table, and using a host computer (1-3) to process the images through a visual recognition algorithm to obtain positions of the end object and the target object, and sending the positions to a slave computer (1-1) as position feedback information. The slave computer (1-1) corrects an initial target position or a previous posture error based on the position feedback information to obtain a new posture error, and the slave computer (1-1) controls the movement of the robotic arm (1) based on the new posture error. D3) Repeat step D2 to form a closed-loop feedback control until the new posture error is less than or equal to the preset threshold, completing the alignment operation.

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