Alignment light path adjusting device, system and method

Abstract

The invention provides an alignment light path adjusting device, system and method, and relates to the technical field of photoetching. The alignment light path adjusting device comprises a base and a light beam quality analyzer, the light beam quality analyzer is connected to the base and can move relative to the base in the Z direction, the base is used for being connected with a shell of an optical module, and a display screen of the light beam quality analyzer corresponds to an emergent hole of the optical module and is used for receiving emergent light emitted through the emergent hole. The alignment light path adjusting device is simple in structure, low in cost, convenient to operate and high in adjusting accuracy, can effectively ensure that the collimation degree of incident light of the light inlet optical fiber in the optical module meets the requirement, reduces light spot change interference of divergence angle light beams, correspondingly improves the alignment accuracy of the optical module and an alignment system, and improves the product quality. And thus, the photoetching product yield of the photoetching machine is improved.

Description

Technical Field

[0001] The present invention relates to the field of photolithography technology, and in particular to an alignment light path adjustment device, system and method. Background Art

[0002] Alignment technology is one of the key technologies of lithography machines, and its performance indicators directly affect the overall performance of the lithography machine. In order to improve the alignment accuracy between the mask and the lithography object and avoid interfering with the design freedom of the objective lens, the off-axis alignment technology based on the phase diffraction grating is gradually applied to the alignment system of the lithography machine. The alignment system generally uses a red and green dual-color light source to enter the optical module. The incident light reaches the alignment objective lens at the end after passing through the optical elements in the optical module. After being converged and overlapped by the alignment objective lens, it is emitted to the alignment mark of the lithography object. The alignment mark generates a reflective diffraction beam, and then the different orders of diffraction light of the red light and the green light are separated and imaged on the corresponding photodetectors, thereby realizing the relative position calculation of the lithography object.

[0003] However, the existing alignment system has poor alignment accuracy, which affects the yield rate of lithography products of the lithography machine. Summary of the invention

[0004] The purpose of the present invention is to provide an alignment optical path adjustment device, system and method to solve the technical problem that the alignment accuracy of the existing alignment system is poor, which affects the yield rate of the lithography products of the lithography machine.

[0005] In order to solve the above problems, the present invention provides an alignment light path adjustment device for adjusting the alignment light path of an optical module, the alignment light path adjustment device comprises a base and a beam quality analyzer, the beam quality analyzer is connected to the base and can move relative to the base along the Z direction, wherein the base is used to connect to the housing of the optical module, the display screen of the beam quality analyzer corresponds to the exit hole of the optical module, and is used to receive the exit light emitted through the exit hole.

[0006] Optionally, the alignment optical path adjustment device further comprises a zoom collimation adjustment component, the zoom collimation adjustment component comprises a rotating sleeve, and the rotating sleeve is used to be sleeved on a rotator at an output end of the light input optical fiber in the optical module;

[0007] The zoom collimation adjustment assembly also includes a fixed sleeve pivotally connected to the rotating sleeve, and the outer wall of one of the fixed sleeve and the rotating sleeve is provided with an angle scale arranged along its circumference, and the outer wall of the other is provided with scale markings; or, the rotating sleeve and the base, one of them is provided with an angle scale arranged along the circumference of the rotating sleeve, and the other is provided with scale markings.

[0008] Optionally, the base is provided with a displacement adjustment component, and the displacement adjustment component is used to connect the light input fiber connector of the optical module and perform XY displacement adjustment on it.

[0009] Optionally, the base is provided with a first through hole, the displacement adjustment assembly includes a displacement adjustment platform fixedly connected to the base, the displacement adjustment platform is provided with a second through hole corresponding to the first through hole, the hole wall of the second through hole is provided with two opposite groups of X-direction threaded holes and two opposite groups of Y-direction threaded holes, the X-direction threaded holes are screwed with X-direction adjustment screws, and the Y-direction threaded holes are screwed with Y-direction adjustment screws;

[0010] The first through hole and the second through hole are used for the outer end of the light-incoming optical fiber connector to extend therein, and one end of the X-axis adjustment screw and the Y-axis adjustment screw facing the second through hole are used to abut against the outer end.

[0011] Optionally, the displacement adjustment platform is connected to an angle adjustment component, and the angle adjustment component is used to connect the light-incoming optical fiber connector and perform R X -R Y Adjust the angle.

[0012] Optionally, the angle adjustment assembly includes an angle adjustment platform connected to the displacement adjustment platform, the angle adjustment platform is provided with a plurality of dispersedly arranged Z-axis threaded holes, the Z-axis threaded holes are screwed with Z-axis adjustment screws, and one end of the Z-axis adjustment screw facing the light-inlet fiber connector is used to push against the light-inlet fiber connector.

[0013] Optionally, the alignment optical path adjustment device further includes at least two sliding rods, which extend along the Z direction and are dispersedly arranged, and one of the base and the beam quality analyzer is fixedly connected to the sliding rod, and the other is slidably connected to the sliding rod.

[0014] Optionally, the alignment optical path adjustment device further comprises a Z-direction sliding assembly, the Z-direction sliding assembly comprises two connecting seats and at least two dispersedly arranged sliding rods, the two connecting seats each comprise a sliding arm, and both ends of the sliding arm are connected to a connecting arm, the two sliding arms are arranged in parallel along the Z direction, and at least two sliding rods are fixedly connected to the same sliding arm and slidably connected to another sliding arm;

[0015] Among the two connecting seats, the two connecting arms of one of them are connected to the opposite sides of the base in a one-to-one correspondence, and the two connecting arms of the other one are connected to the opposite sides of the beam quality analyzer in a one-to-one correspondence.

[0016] The present invention also provides an alignment light path adjustment system, comprising an optical module and the above-mentioned alignment light path adjustment device, wherein the base of the alignment light path adjustment device is connected to the shell of the optical module, and the display screen of the beam quality analyzer in the alignment light path adjustment device corresponds to the exit hole of the optical module, and is used to receive the exit light output through the exit hole.

[0017] The present invention also provides an alignment light path adjustment method, which uses the alignment light path adjustment system to adjust the alignment light path of the optical module. The method includes a collimation adjustment step, and the collimation adjustment step includes:

[0018] Adjust the Z-direction spacing between the base and the beam quality analyzer;

[0019] If the diameter change rate of the emergent light spot formed on the display screen is less than or equal to the preset change rate, it is determined that the emergent light of the optical module is a collimated light beam;

[0020] If the diameter change rate of the output light spot formed on the display screen is greater than the preset change rate, the divergence angle of the incident light output by the light input fiber in the optical module is adjusted until the diameter change rate of the output light spot formed on the display screen is less than or equal to the preset change rate.

[0021] Optionally, the method further includes a center degree adjustment step, and the center degree adjustment step includes:

[0022] Adjust the XY displacement of the light input fiber connector and obtain the diameter of the output light spot formed on the display screen until the diameter of the output light spot is the smallest.

[0023] Optionally, the step of adjusting the XY displacement of the light input optical fiber connector and obtaining the diameter of an exit light spot formed on the display screen until the diameter of the exit light spot is the smallest includes:

[0024] Adjust the X-axis displacement of the light-incoming optical fiber connector and obtain the diameter of the outgoing light spot formed on the display screen until the diameter of the outgoing light spot is the smallest;

[0025] Adjust the Y-axis displacement of the light-incoming optical fiber connector and obtain the diameter of the outgoing light spot formed on the display screen until the diameter of the outgoing light spot is the smallest.

[0026] Optionally, the method further comprises a Z-direction parallelism adjustment step, wherein the Z-direction parallelism adjustment step comprises:

[0027] Adjust the R of the optical fiber connector X -R Y The angle is adjusted and the diameter of the exit light spot formed on the display screen is obtained until the diameter of the exit light spot is minimum.

[0028] The present invention provides an alignment optical path adjustment device, system and method, wherein the alignment optical path adjustment device only includes a base for connecting an optical module housing and a beam quality analyzer that can move relative to the base in the Z direction, has a simple structure and low cost, and only by adjusting the Z-direction spacing between the beam quality analyzer and the base, and then identifying the diameter change rate of the emergent light spot on the display screen, the collimation degree of the optical module emergent light can be judged, and the divergence angle of the incident light output by the incoming optical fiber can be adjusted accordingly. The operation is convenient and the adjustment accuracy is high, and the collimation degree of the incident light of the incoming optical fiber in the optical module can be effectively ensured to meet the requirements, reduce the interference of the spot change of the divergent angle light beam, and correspondingly improve the alignment accuracy of the optical module and the alignment system, thereby improving the lithography product yield of the lithography machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 A schematic diagram of a first flow chart of an alignment optical path adjustment method provided by an embodiment of the present invention;

[0031] Figure 2 A second flow chart of the alignment optical path adjustment method provided by an embodiment of the present invention;

[0032] Figure 3 A schematic diagram of an optical module in an alignment optical path adjustment system provided by an embodiment of the present invention;

[0033] Figure 4 A schematic diagram of a first viewing angle of an alignment optical path adjustment system provided by an embodiment of the present invention;

[0034] Figure 5 A schematic diagram of a second viewing angle of an alignment optical path adjustment system provided by an embodiment of the present invention;

[0035] Figure 6 An isometric schematic diagram of an alignment optical path adjustment device provided in an embodiment of the present invention;

[0036] Figure 7 A schematic diagram of the connection between a zoom collimation adjustment component, a displacement adjustment component and an angle adjustment platform in an alignment optical path adjustment device provided in an embodiment of the present invention;

[0037] Figure 8A schematic diagram of light spots with different diameters formed on a display screen when incident light is tilted or parallel to the optical axis of an alignment objective lens in an alignment light path adjustment system provided by an embodiment of the present invention.

[0038] Description of reference numerals:

[0039] 10-optical module; 11-housing; 11a-exit hole; 12-red light inlet fiber connector; 13-red light imaging lens; 14-red light reflector; 15-green light inlet fiber connector; 16-green light imaging lens; 17-green light reflector; 18-polarization beam splitter; 19-alignment lens; 20-lithography object; 100-base; 200-beam quality analyzer; 210-display screen; 220-exit light spot; 300-zoom collimation adjustment component; 310-fixed Fixed sleeve; 320-rotating sleeve; 400-displacement adjustment assembly; 410-displacement adjustment platform; 411-second through hole; 412-X-axis threaded hole; 413-Y-axis threaded hole; 414-through hole; 420-X-axis adjustment screw; 500-angle adjustment assembly; 510-angle adjustment platform; 511-Z-axis threaded hole; 520-Z-axis adjustment screw; 600-Z-axis sliding assembly; 610-connecting seat; 611-sliding arm; 612-connecting arm; 620-sliding rod. DETAILED DESCRIPTION

[0040] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] First, one form of the optical module 10 is described exemplarily. Figure 3 As shown, the optical module 10 includes a shell 11, and one end of the shell 11 along the Z direction is provided with two light-incoming fiber connectors, which can be specifically a red light-incoming fiber connector 12 and a green light-incoming fiber connector 15, wherein the red light-incoming fiber connector 12 fixes the incident end of the red light-incoming fiber, and the green light-incoming fiber connector 15 fixes the incident end of the green light-incoming fiber; the other end of the shell 11 along the Z direction is provided with an exit hole 11a, and an alignment lens 19 is provided at a position corresponding to the exit hole 11a in the shell 11, the optical axis of the alignment lens 19 extends along the Z direction, and a polarization beam splitter prism 18 is provided on the side of the alignment lens 19 away from the exit hole 11a; at the same time, a green light reflector 17, a red light reflector 14, a green light imaging lens 16 and a red light imaging lens 13 are also provided in the shell 11. When aligned for use, as shown in FIG. Figure 1 As shown in the viewing angle, the lithography object 20 is located below the exit hole 11a, and the optical path diagram of the red light input optical fiber outputting the incident light and the optical path diagram of the green light input optical fiber outputting the incident light are indicated by arrows.

[0044] This embodiment provides an alignment optical path adjustment device, such as Figure 6 As shown, the alignment light path adjustment device is used to adjust the alignment light path of the optical module 10, and includes a base 100 and a beam quality analyzer 200. The beam quality analyzer 200 is connected to the base 100 and can move relative to the base 100 along the Z direction, wherein the base 100 is used to connect to the housing 11 of the optical module 10, and the display screen 210 of the beam quality analyzer 200 corresponds to the exit hole 11a of the optical module 10, and is used to receive the exit light emitted through the exit hole 11a.

[0045] When in use, the alignment optical path adjustment device provided in this embodiment is connected to the optical module 10 of the alignment system to form an alignment optical path adjustment system. Specifically, Figure 4 and Figure 5 As shown, the base 100 of the alignment light path adjustment device is connected to the shell of the optical module 10; the display screen 210 of the beam quality analyzer 200 in the alignment light path adjustment device corresponds to the exit hole 11a of the optical module 10, and is used to receive the exit light output through the exit hole 11a.

[0046] This embodiment also provides an alignment light path adjustment method, which uses the alignment light path adjustment system to adjust the alignment light path of the optical module 10. The adjustment method can at least perform a collimation adjustment step to collimate the incident light, wherein: Figure 1 As shown, the collimation adjustment steps specifically include:

[0047] S102 adjusts the Z-direction distance between the base 100 and the beam profiler 200 .

[0048] S104: If the diameter change rate of the emission light spot 220 formed on the display screen 210 is less than or equal to the preset change rate, it is determined that the emission light of the optical module 10 is a collimated light beam.

[0049] S106 If the diameter change rate of the output light spot 220 formed on the display screen 210 is greater than the preset change rate, adjust the divergence angle of the incident light output by the light input optical fiber in the optical module 10 until the diameter change rate of the output light spot 220 formed on the display screen 210 is less than or equal to the preset change rate.

[0050] When in use, the light-incoming optical fiber fixed by the light-incoming optical fiber connector outputs incident light into the housing 11, and the incident light is output outward from the exit hole 11a after passing through the alignment objective lens 19, and the exit light reaches the display screen 210 of the beam quality analyzer 200 to form an exit light spot 220; the base 100 is fixedly connected to the housing 11 of the optical module 10, and the relative distance between the base 100 and the beam quality analyzer 200 is adjusted along the Z direction, and the Z-direction spacing between the display screen 210 and the exit hole 11a is changed accordingly. When the incident light is a collimated light beam, the diameter of the exit light spot 220 remains approximately unchanged as the Z-direction spacing between the display screen 210 and the exit hole 11a increases, and the diameter change rate is approximately zero; when the incident light has a divergence angle, the diameter of the exit light spot 220 increases as the Z-direction spacing between the display screen 210 and the exit hole 11a increases, and decreases as the Z-direction spacing between the display screen 210 and the exit hole 11a decreases.

[0051] Specifically, the Z-direction spacing between the display screen 210 and the exit hole 11a is changed. When the diameter change rate of the exit light spot 220 (i.e., the change rate of the diameter of the exit light spot 220 with the Z-direction spacing between the display screen 210 and the exit hole 11a) is less than or equal to the preset change rate, it indicates that the divergence angle of the incident light is less than or equal to the preset angle, and the incident light is approximately a collimated light beam. Accordingly, the exit light of the optical module 10 is determined to be a collimated light beam. The collimated exit light can eliminate the interference of the spot change of the divergent angle light beam during the alignment operation of the optical module 10, thereby reducing the alignment error between the incident light and the alignment objective lens 19, improving the alignment accuracy of the optical module 10 and the alignment system, and further improving the lithography product yield of the lithography machine. Similarly, when the diameter change rate of the exit light spot 220 is greater than the preset change rate, it indicates that the divergence angle of the incident light is greater than the preset angle. A large divergence angle will cause the exit light spot 220 to change and affect the alignment accuracy of the optical module 10 and the alignment system. Accordingly, the divergence angle of the input light optical fiber is adjusted. After the adjustment, step S102 is performed again and the diameter change rate of the exit light spot 220 is judged. The adjustment is repeated until the diameter change rate of the exit light spot 220 is less than or equal to the preset change rate. Accordingly, the exit light is determined to be a collimated light beam to ensure the alignment accuracy of the optical module 10 and the alignment system, thereby improving the lithography product yield of the lithography machine.

[0052] The alignment optical path adjustment device, system and method provided in the present embodiment, the alignment optical path adjustment device only includes a base 100 for connecting the outer shell 11 of the optical module 10 and a beam quality analyzer 200 that can move in the Z direction relative to the base 100. It has a simple structure and low cost. It can judge the collimation degree of the output light of the optical module 10 by only adjusting the Z-direction spacing between the beam quality analyzer 200 and the base 100, and then identifying the diameter change rate of the output light spot 220 on the display screen 210, and adjust the divergence angle of the incident light output by the input optical fiber accordingly. It is easy to operate and has high adjustment accuracy. It can effectively ensure that the collimation degree of the incident light of the input optical fiber in the optical module 10 meets the requirements, reduce the interference of the spot change of the divergent angle light beam, and correspondingly improve the alignment accuracy of the optical module 10 and the alignment system, thereby improving the lithography product yield of the lithography machine.

[0053] The beam quality analyzer 200 may be an existing product; the divergence angle of the incident light may be adjusted by rotating a rotator at the output end of the input optical fiber.

[0054] Specifically, in this embodiment, Figure 6As shown, the alignment optical path adjustment device also includes a zoom collimation adjustment component 300, which includes a rotating sleeve 320, and the rotating sleeve 320 is used to be sleeved on the rotator at the output end of the incoming light fiber in the optical module 10; the zoom collimation adjustment component 300 also includes a fixed sleeve 310 pivotally connected to the rotating sleeve 320, and the outer wall of one of the fixed sleeve 310 and the rotating sleeve 320 is provided with an angle scale arranged along its circumference, and the outer wall of the other is provided with a scale mark. When in use, the output end of the incoming light fiber passes through the fixed sleeve 310, and the transmission sleeve is sleeved on the rotator. When the divergence angle of the incident light needs to be adjusted, the rotating sleeve 320 can be rotated to drive the rotator to rotate, and during the rotation process, the rotation angle of the rotating sleeve 320 and the rotator can be identified by the relative rotation position of the scale mark relative to the angle scale, thereby realizing small-angle precise adjustment of the divergence angle of the incident light, improving the convenience of adjustment and being able to quickly complete the collimation adjustment.

[0055] In addition to being provided on the rotating sleeve 320 and the fixed sleeve 310, the scale mark and the angle scale can also be provided on the rotating sleeve 320 and the base 100. Specifically, one of the rotating sleeve 320 and the base 100 is provided with an angle scale arranged along the circumference of the rotating sleeve 320, and the other is provided with a scale mark. When the rotating sleeve 320 rotates, it rotates relative to the base 100. The rotation angle of the rotating sleeve 320 and the rotator is identified by the relative rotation position of the scale mark and the angle scale, so as to achieve small-angle precise adjustment of the divergence angle of the incident light, improve the convenience of adjustment, and quickly complete the collimation adjustment.

[0056] In this embodiment, Figure 6 As shown, the alignment optical path adjustment device also includes at least two sliding rods 620, which extend along the Z direction and are dispersedly arranged. One of the base 100 and the beam quality analyzer 200 is fixed to the sliding rod 620, and the other is slidably connected to the sliding rod 620. The base 100 and the beam quality analyzer 200 are slidably connected in the Z direction via a slide bar 620, which extends in the Z direction. For example, the same end of each slide bar 620 is fixedly connected to the base 100, and the other end is slidably connected to the beam quality analyzer 200. When the Z-direction spacing between the base 100 and the beam quality analyzer 200 needs to be adjusted, the beam quality analyzer 200 can be slid along the slide bar 620, wherein each slide bar 620 can not only guide the Z-direction sliding of the beam quality analyzer 200, but also multiple slide bars 620 can limit the rotation of the base 100 and the beam quality analyzer 200 around the Z-axis, thereby ensuring the translational movement of the beam quality analyzer 200 in the Z direction, and correspondingly ensuring the correspondence between its display screen 210 and the exit hole 11a to stably receive the exit light.

[0057] Specifically, in this embodiment, Figure 4-Figure 6As shown, the alignment optical path adjustment device also includes a Z-direction sliding assembly 600, which includes two connecting seats 610 and at least two dispersedly arranged sliding rods 620, the two connecting seats 610 each include a sliding arm 611, and both ends of the sliding arm 611 are connected to a connecting arm 612, the two sliding arms 611 are arranged in parallel along the Z direction, and at least two sliding rods 620 are fixedly connected to the same sliding arm 611 and slidably connected to the other sliding arm 611; wherein, in the two connecting seats 610, the two connecting arms 612 of one of them are connected one-to-one with the opposite sides of the base 100, and the two connecting arms 612 of the other one are connected one-to-one with the opposite sides of the beam quality analyzer 200.

[0058] Two connecting seats 610 and at least two sliding rods 620 are arranged to form a relatively independent Z-direction sliding assembly 600, wherein the length of the sliding arm 611 in one connecting seat 610 corresponds to the width of the base 100, and the length of the sliding arm 611 in the other connecting seat 610 corresponds to the width of the beam quality analyzer 200. When connecting, it is only necessary to connect the base 100 to the connecting arm 612 of the corresponding connecting seat 610, and the beam quality analyzer 200 to the connecting arm 612 of the corresponding connecting seat 610 to realize the Z-direction sliding connection between the base 100 and the beam quality analyzer 200. The connection is convenient and can ensure the Z-direction movement accuracy and stability of the base 100 and the beam quality analyzer 200.

[0059] In this embodiment, Figure 4-Figure 6 As shown, the base 100 is provided with a displacement adjustment component 400, which is used to connect the light-incoming fiber connector of the optical module 10 and perform XY displacement adjustment on it. The setting of the displacement adjustment component 400 enables the adjustment method of the present application to further include a centering adjustment step to adjust the incident light passing through the center of the alignment objective lens 19. Specifically, the centering adjustment step includes: adjusting the XY displacement of the light-incoming fiber connector and obtaining the diameter of the exit light spot 220 formed on the display screen 210 until the diameter of the exit light spot 220 is minimized.

[0060] The incident light passes through the convergence effect of the alignment objective lens 19, and the diameter of the exit light spot 220 formed on the display screen 210 gradually increases as the incident light moves away from the center of the alignment objective lens 19, and gradually decreases as the incident light approaches the center of the alignment objective lens 19. When the incident light passes through the center of the alignment objective lens 19, the diameter of the exit light spot 220 formed on the display screen 210 is the smallest. Therefore, the XY displacement of the light input fiber connector can be adjusted by the displacement adjustment component 400, and the XY displacement of the incident light output by the light input fiber can be adjusted accordingly. During the adjustment process, by analyzing the exit light spot on the display screen 210 By observing the diameter change trend of 220, the position of the minimum diameter of the output light spot 220 can be determined, and correspondingly, when the light input fiber connector is in the corresponding position, the incident light output by the light input fiber passes through the center of the alignment objective lens 19, thereby ensuring that during the alignment operation, the imaging light path formed by the alignment objective lens 19 and the lithography object 20 can be effectively modulated with the reference grating, and then the correct signal can be received by the photodetector behind the reference grating, further ensuring the alignment accuracy of the optoelectronic module and the alignment system, and correspondingly further improving the lithography product yield of the lithography machine.

[0061] Specifically, in this embodiment, Figure 6 and Figure 7 As shown, the base 100 is provided with a first through hole, and the displacement adjustment assembly 400 includes a displacement adjustment platform 410 fixedly connected to the base 100, and the displacement adjustment platform 410 is provided with a second through hole 411 corresponding to the first through hole, and the hole wall of the second through hole 411 is provided with two opposite groups of X-direction threaded holes 412 and two opposite groups of Y-direction threaded holes 413, the X-direction threaded hole 412 is screwed with an X-direction adjustment screw 420, and the Y-direction threaded hole 413 is screwed with a Y-direction adjustment screw; wherein, the first through hole and the second through hole 411 are used for the outer end of the optical fiber connector to extend therein, and one end of the X-direction adjustment screw 420 and the Y-direction adjustment screw facing the second through hole 411 are both used to abut against the outer end.

[0062] The light-incoming optical fiber connector may specifically include a guide portion, a connecting portion, and an outer end portion, wherein the connecting portion is connected to the housing 11, the guide portion extends inwardly into the housing 11, and the outer end portion protrudes outwardly; when the base 100 is connected to the housing 11, the end face of the base 100 abuts against the corresponding end face of the housing 11, the connecting portion is inserted into the first through hole and an adjustment gap is left between the connecting portion and the hole wall of the first through hole, and the outer end portion is inserted into the second through hole 411 and an adjustment gap is left between the connecting portion and the hole wall of the second through hole 411; by rotating the X-axis adjustment screw 420 to abut against the corresponding side of the outer end portion and push the outer end portion to drive the entire light-incoming optical fiber connector along the X-axis The two X-adjusting screws 420 can push the outer end portion to move in different directions along the X-direction; the Y-adjusting screw is rotated to press against the corresponding side of the outer end portion and push the outer end portion to drive the entire light-incoming fiber connector to move along the Y-direction, wherein the two Y-adjusting screws can push the outer end portion to move in different directions along the Y-direction, thereby realizing the XY-direction displacement adjustment of the light-incoming fiber connector. When the display screen 210 finds the output light spot 220 with the smallest diameter, it indicates that the centrality adjustment is completed, and the light-incoming fiber connector is fixed at the corresponding position to ensure that the incident light can stably pass through the center of the alignment objective lens 19.

[0063] When the displacement adjustment component 400 adopts the form in which the above-mentioned X-axis adjustment screw 420 and Y-axis adjustment screw can independently adjust the X-axis displacement and the Y-axis displacement, in this embodiment, the step of adjusting the XY-axis displacement of the light input fiber connector and obtaining the diameter of the exit light spot 220 formed on the display screen 210 until the diameter of the exit light spot 220 is minimized includes: adjusting the X-axis displacement of the light input fiber connector and obtaining the diameter of the exit light spot 220 formed on the display screen 210 until the diameter of the exit light spot 220 is minimized; adjusting the Y-axis displacement of the light input fiber connector and obtaining the diameter of the exit light spot 220 formed on the display screen 210 until the diameter of the exit light spot 220 is minimized. When adjusting the XY displacement, the outer end portion can be adjusted for X displacement and Y displacement respectively. Specifically, the X-direction adjustment screw 420 is rotated to press against the outer end portion and move along the X direction, and the diameter change trend of the output light spot 220 formed on the display screen 210 is analyzed. When the diameter of the output light spot 220 is the smallest, it indicates that the incident light passes through the center position of the alignment lens 19 in the X direction; then the Y-direction adjustment screw is rotated to press against the outer end portion and move along the Y direction, and the diameter change trend of the output light spot 220 formed on the display screen 210 is analyzed. When the diameter of the output light spot 220 is the smallest, it indicates that the incident light passes through the center position of the alignment lens 19 in the Y direction, thereby completing the center adjustment steps regularly and conveniently, reducing the simultaneous adjustment of the X and Y directions, the irregular change of the diameter of the output light spot 220, and the occurrence of a situation where it is more difficult to adjust the output light spot 220 to the smallest diameter.

[0064] Optionally, in this embodiment, if Figure 6As shown, the displacement adjustment platform 410 is connected to an angle adjustment component 500, and the angle adjustment component 500 is used to connect the light-incoming optical fiber connector and perform R X -R Y The angle adjustment component 500 is set so that the adjustment method of the present application also includes a Z-axis parallelism adjustment step to adjust the parallelism between the incident light and the optical axis of the alignment lens 19. Specifically, the Z-axis parallelism adjustment step includes: adjusting the R of the light-incoming optical fiber connector X -R Y The angle is adjusted and the diameter of the exit light spot 220 formed on the display screen 210 is obtained until the diameter of the exit light spot 220 is the smallest.

[0065] The optical axis of the alignment lens 19 extends along the Z direction. The diameter of the exit light spot 220 formed on the display screen 210 increases with the increase of the inclination of the incident light relative to the optical axis and decreases with the decrease of the inclination relative to the optical axis. Specifically, Figure 8 As shown in the exit light spot on the left display screen, when the incident light is parallel or colinear with the optical axis, the diameter of the exit light spot 220 formed on the display screen 210 is the smallest, so the R of the incoming optical fiber connector can be adjusted by the angle adjustment component 500. X -R Y The angle of the light input fiber is adjusted accordingly, and the R of the incident light output and the light path through the alignment lens 19 is adjusted accordingly. X -R Y During the adjustment process, by analyzing the diameter change trend of the exit light spot 220 on the display screen 210, the position of the minimum diameter of the exit light spot 220 can be determined, and correspondingly when the light input fiber connector is in the corresponding position, the optical path of the incident light passing through the alignment objective lens 19 is parallel or collinear with the optical axis, thereby ensuring that the centers of the exit light spots 220 formed after the incident light of the red and green dual light sources passes through the alignment objective lens 19 coincide, so that the positional relationship of the lithography object 20 calculated by the two light sources is consistent, thereby further improving the alignment accuracy of the optical module 10 and the alignment system, and correspondingly further improving the lithography product yield of the lithography machine.

[0066] Among them, R X is the deflection around the X axis, R Y It refers to the deflection around the Y axis.

[0067] Specifically, in this embodiment, the angle adjustment assembly 500 includes an angle adjustment platform 510 connected to the displacement adjustment platform 410, and the angle adjustment platform 510 is provided with a plurality of dispersedly arranged Z-direction threaded holes 511, and the Z-direction threaded holes 511 are screwed with Z-direction adjustment screws 520, and the end of the Z-direction adjustment screw 520 facing the light-incoming fiber connector is used to push against the light-incoming fiber connector.

[0068] A plurality of Z-axis threaded holes 511 can be arranged around the outer periphery of the second through hole 411, and the Z-axis adjustment screw 520 can abut against the end face of the connecting portion in the light-incoming optical fiber connector. The angle adjustment platform 510 is fixed relative to the housing 11, and the distance between the Z-axis adjustment screw 520 and the connecting portion can be adjusted by rotating each Z-axis adjustment screw 520 to adjust the deflection angle of the connecting portion, thereby correspondingly achieving the R adjustment of the entire light-incoming optical fiber connector and the light-incoming optical fiber therein. X -R Y Towards angle; Figure 4 and Figure 7 As shown, the angle adjustment platform 510 is a rectangular ring platform, and each of its four corners is provided with a Z-direction threaded hole 511. The displacement adjustment platform 410 is provided with a through hole 414 at a position corresponding to the Z-direction threaded hole 511. The Z-direction adjustment screws 520 screwed in each Z-direction screw hole can pass downward through the through hole 414 and abut against the top surface of the connecting portion; for example, the two Z-direction adjustment screws 520 on the left side can be rotated to increase the length of the angle adjustment platform 510 extending downward, and the left side of the connecting portion rotates downward around the X-axis, thereby realizing R X Similarly, the two Z-axis adjustment screws 520 located at the front side can be rotated to increase the length of the angle adjustment platform 510 extending downward, and the front side of the connecting portion is rotated downward around the Y axis, thereby achieving R Y Towards angle adjustment.

[0069] Specifically, when the alignment optical path adjustment device provided in this embodiment is used to adjust the alignment optical path of the optical module 10, the collimation adjustment step is first performed to adjust the incident light to a collimated light beam, and then the Z-phase parallelism adjustment step can be preferentially performed to adjust the incident light through the pipeline of the alignment objective lens 19 to be parallel or coaxial with the optical axis, and finally the centering adjustment step is performed to adjust the incident light through the center of the alignment objective lens 19, so that the adjustment of the optical module 10 can be achieved through a single adjustment, without the need for multiple steps of reciprocating adjustment, so as to further improve the convenience of adjustment. After the adjustment is completed, the entire alignment optical path adjustment device can be removed by removing the connection between the base 100 and the housing 11.

[0070] Figure 2 A second flow chart of the alignment optical path adjustment method provided by an embodiment of the present invention. Figure 2 As shown, the adjustment method includes:

[0071] S201 adjusts the Z-direction distance between the base 100 and the beam quality profiler 200 .

[0072] S202 determines whether the diameter change rate of the light spot 220 formed on the display screen 210 is less than or equal to a preset change rate. If not, execute step S203; if yes, execute step S204.

[0073] S203 adjusts the divergence angle of the incident light output by the light input optical fiber in the optical module 10 .

[0074] S204 determines that the output light of the optical module 10 is a collimated light beam. Then proceed to step S205.

[0075] S205 Adjust the R of the optical fiber connector X -R Y Towards angle.

[0076] S206 determines whether the diameter of the light spot 220 formed on the display screen 210 is the minimum diameter. If yes, execute step S207; if no, execute step S205.

[0077] S207 determines whether the incident light of the optical module 10 is parallel or colinear with the optical axis of the alignment lens 19. Then, the process proceeds to step S208.

[0078] S208 adjusts the XY displacement of the light-incoming optical fiber connector.

[0079] S209 determines whether the diameter of the light spot 220 formed on the display screen 210 is the minimum diameter. If yes, execute step S210; if no, execute step S208.

[0080] S210 determines whether the incident light of the optical module 10 passes through the center of the alignment objective lens 19 .

[0081] The adjustment of the optical module 10 to the optical path is completed.

[0082] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An alignment light path adjustment device, used for adjusting the alignment light path of an optical module (10), It is characterized in that The alignment optical path adjustment device comprises a base (100) and a beam quality analyzer (200), wherein the beam quality analyzer (200) is connected to the base (100) and can move relative to the base (100) along the Z direction, wherein the base (100) is used to connect to a housing (11) of an optical module (10), and a display screen (210) of the beam quality analyzer (200) corresponds to an exit hole (11a) of the optical module (10) and is used to receive exit light emitted through the exit hole (11a).

2. The alignment optical path adjustment device according to claim 1, It is characterized in that The alignment optical path adjustment device further comprises a zoom collimation adjustment component (300), wherein the zoom collimation adjustment component (300) comprises a rotating sleeve (320), wherein the rotating sleeve (320) is used to be sleeved on a rotator at an output end of a light input optical fiber in the optical module (10); The zoom collimation adjustment assembly (300) further comprises a fixed sleeve (310) pivotally connected to the rotating sleeve (320); the outer wall of one of the fixed sleeve (310) and the rotating sleeve (320) is provided with an angle scale arranged along its circumference, and the outer wall of the other is provided with a scale mark; or, the rotating sleeve (320) and the base (100) are provided with an angle scale arranged along the circumference of the rotating sleeve (320), and the other is provided with a scale mark.

3. The alignment optical path adjustment device according to claim 1, It is characterized in that The base (100) is provided with a displacement adjustment component (400), and the displacement adjustment component (400) is used to connect the light-incoming optical fiber connector of the optical module (10) and perform XY displacement adjustment on it.

4. The alignment optical path adjustment device according to claim 3, It is characterized in that The base (100) is provided with a first through hole, the displacement adjustment assembly (400) comprises a displacement adjustment platform (410) fixedly connected to the base (100), the displacement adjustment platform (410) is provided with a second through hole (411) corresponding to the first through hole, the hole wall of the second through hole (411) is provided with two opposite groups of X-direction threaded holes (412) and two opposite groups of Y-direction threaded holes (413), the X-direction threaded holes (412) are screwed with X-direction adjustment screws (420), and the Y-direction threaded holes (413) are screwed with Y-direction adjustment screws; The first through hole and the second through hole (411) are used for the outer end of the light-incoming optical fiber connector to extend therein, and one end of the X-axis adjustment screw (420) and the Y-axis adjustment screw facing the second through hole (411) are used to abut against the outer end.

5. The alignment optical path adjustment device according to claim 4, It is characterized in that The displacement adjustment platform (410) is connected to an angle adjustment component (500), and the angle adjustment component (500) is used to connect the light-incoming optical fiber connector and perform R X -R Y Adjust the angle.

6. The alignment optical path adjustment device according to claim 5, It is characterized in that The angle adjustment assembly (500) comprises an angle adjustment platform (510) connected to the displacement adjustment platform (410), the angle adjustment platform (510) being provided with a plurality of dispersedly arranged Z-direction threaded holes (511), the Z-direction threaded holes (511) being screwed with Z-direction adjustment screws (520), and one end of the Z-direction adjustment screw (520) facing the light-incoming optical fiber connector being used to abut against the light-incoming optical fiber connector.

7. The alignment optical path adjustment device according to any one of claims 1 to 6, It is characterized in that The alignment optical path adjustment device also includes at least two sliding rods (620), each of which extends along the Z direction and is dispersedly arranged. One of the base (100) and the beam quality analyzer (200) is fixedly connected to the sliding rod (620), and the other is slidably connected to the sliding rod (620).

8. The alignment optical path adjustment device according to any one of claims 1 to 6, It is characterized in that The alignment optical path adjustment device further comprises a Z-direction sliding assembly (600), wherein the Z-direction sliding assembly (600) comprises two connection seats (610) and at least two dispersedly arranged sliding rods (620), wherein the two connection seats (610) each comprise a sliding arm (611), and both ends of the sliding arm (611) are connected to a connecting arm (612), the two sliding arms (611) are arranged in parallel along the Z direction, and at least two sliding rods (620) are fixedly connected to the same sliding arm (611) and slidably connected to another sliding arm (611); Among them, the two connecting seats (610), the two connecting arms (612) of one of them are connected to the opposite sides of the base (100) in a one-to-one correspondence, and the two connecting arms (612) of the other one are connected to the opposite sides of the beam quality analyzer (200) in a one-to-one correspondence.

9. An alignment optical path adjustment system, It is characterized in that The invention comprises an optical module (10) and an alignment light path adjustment device as claimed in any one of claims 1 to 8, wherein a base (100) of the alignment light path adjustment device is connected to a housing of the optical module (10), and a display screen (210) of a beam quality analyzer (200) in the alignment light path adjustment device corresponds to an exit hole (11a) of the optical module (10) and is used for receiving exit light outputted through the exit hole (11a).

10. A method for adjusting an alignment optical path, It is characterized in that The alignment light path adjustment system of claim 9 is used to adjust the alignment light path of the optical module (10), the method comprising a collimation adjustment step, the collimation adjustment step comprising: Adjusting the Z-direction spacing between the base (100) and the beam quality analyzer (200); If the diameter change rate of the exit light spot (220) formed on the display screen (210) is less than or equal to a preset change rate, it is determined that the exit light of the optical module (10) is a collimated light beam; If the diameter change rate of the exit light spot (220) formed on the display screen (210) is greater than the preset change rate, the divergence angle of the incident light output by the light input optical fiber in the optical module (10) is adjusted until the diameter change rate of the exit light spot (220) formed on the display screen (210) is less than or equal to the preset change rate.

11. The alignment optical path adjustment method according to claim 10, It is characterized in that The method further comprises a center degree adjustment step, wherein the center degree adjustment step comprises: The XY displacement of the light input optical fiber connector is adjusted and the diameter of the output light spot (220) formed on the display screen (210) is obtained until the diameter of the output light spot (220) is minimized.

12. The alignment optical path adjustment method according to claim 11, It is characterized in that The step of adjusting the XY displacement of the light-incoming optical fiber connector and obtaining the diameter of the exit light spot (220) formed on the display screen (210) until the diameter of the exit light spot (220) is the smallest comprises: Adjusting the X-direction displacement of the light-incoming optical fiber connector and obtaining the diameter of an exit light spot (220) formed on the display screen (210) until the diameter of the exit light spot (220) is the smallest; The Y-direction displacement of the light-incoming optical fiber connector is adjusted to obtain the diameter of an exit light spot (220) formed on the display screen (210), until the diameter of the exit light spot (220) is the smallest.

13. The alignment optical path adjustment method according to claim 10, It is characterized in that The method further comprises a Z-direction parallelism adjustment step, wherein the Z-direction parallelism adjustment step comprises: Adjust the R of the incoming optical fiber connector X -R Y The angle is adjusted to obtain the diameter of the exit light spot (220) formed on the display screen (210) until the diameter of the exit light spot (220) is the smallest.

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