PVD (Physical Vapor Deposition) vacuum coating machine

Abstract

The invention relates to the technical field of PVD coating, in particular to a PVD vacuum coating machine which comprises a vacuum machine pump set, the top end of the vacuum machine pump set is fixedly connected with a fixing table, and the top end of the fixing table is fixedly connected with a vacuum coating tank; and the workpiece placing and rotating mechanism comprises a motor fixedly connected to the inner top wall of the vacuum machine pump set, the output end of the motor is fixedly connected with a rotating plate, and a supporting frame is detachably arranged at the top end of the rotating plate. In the detection assembly, when gas containing plating materials passes through a detection box, light rays emitted by a lamp panel can be shielded and absorbed, a photoresistor board detects the light ray intensity change, converts the light ray intensity change into electric signals and transmits the electric signals to a PLC, the PLC controls the power of an evaporation source, a motor and a vacuum arc ion source according to the signals, and therefore self-adaptive adjustment of parameters is achieved. And parameters are adaptively adjusted according to actual conditions, so that plating material supply is accurately matched with actual requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of PVD coating technology, and particularly relates to a PVD vacuum coating machine. Background Art

[0002] In the current field of material surface treatment, PVD (Physical Vapor Deposition) vacuum coating technology has been widely used in many industries due to its unique advantages. Vacuum coating is based on vacuum technology, integrating physical or chemical means, and incorporating cutting-edge technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency, and magnetron. For example, a PVD coating device with the application number CN202110985070.7 is used to perform vacuum coating treatment on workpieces.

[0003] Existing PVD vacuum coating machines generally adopt a relatively crude control method, making it difficult to accurately detect the coating degree in real time and achieve adaptive adjustment of parameters. Current detection methods mostly rely on manual experience or simple preset programs and cannot make dynamic adjustments according to the subtle changes in the actual coating process. For example, traditional devices often perform coating operations by setting fixed coating time and evaporation source power. However, factors such as the surface conditions of workpieces in different batches, the characteristics of coating materials, and the vacuum environment vary, and this "one-size-fits-all" control mode makes it difficult to accurately match the supply of coating materials with the actual demand. Summary of the Invention

[0004] Aiming at the above-mentioned disadvantages of the existing technology, the present invention provides a PVD vacuum coating machine, which can effectively solve the problem that it is difficult to accurately detect the coating degree in real time and achieve adaptive adjustment of parameters in the existing technology.

[0005] To achieve the above objectives, the present invention is realized through the following technical solutions: The present invention provides a PVD vacuum coating machine, including: A vacuum pump group, the top of the vacuum pump group is fixedly connected with a fixed table, and the top of the fixed table is fixedly connected with a vacuum coating tank; A workpiece placement and rotation mechanism, the workpiece placement and rotation mechanism includes a motor fixedly connected to the inner top wall of the vacuum pump group, the output end of the motor is fixedly connected with a rotating plate, the top of the rotating plate is detachably provided with a support frame, and a plurality of suspension components are arranged between the support frames; An adaptive adjustment coating mechanism, the adaptive adjustment coating mechanism includes a detection component for detecting the coating degree, the detection component includes an air extraction pipe fixedly connected between the vacuum pump group and the vacuum coating tank, the air extraction pipe is cut off in the middle, and a detection box is fixedly connected at the cut-off position. On the opposite inner walls of the detection box, a lamp board and a photoresistor board are respectively fixedly connected, and the lamp board and the photoresistor board are electrically connected to a PLC controller to form a detection circuit.

[0006] Preferably, the vacuum coating tank is composed of a tank body and a cabinet door. Sealing frames are fixedly connected to opposite sides of the tank body and the cabinet door, and the two sealing frames are sealingly hinged. An opening and closing lock is provided for the two sealing frames together.

[0007] Preferably, the support frame includes a support plate fixedly connected to the top end of the rotating plate. A plurality of support rods arranged in a circumferential array are fixedly connected to the top end of the support plate, and a fixing ring is fixedly connected to the top ends of the support rods.

[0008] Preferably, the workpiece placement and rotation mechanism further includes a first toothed ring fixedly connected to the bottom end of the support plate. A rotating rod is rotatably connected to the inner bottom wall of the tank body, and a first gear meshing with the first toothed ring is fixedly connected to the outer wall of the rotating rod. A second toothed ring is rotatably connected to the inner bottom wall of the tank body, and the second toothed ring meshes with the first gear.

[0009] Preferably, the suspension assembly includes a plurality of fixing rods fixedly connected between the support plate and the fixing ring and arranged in a circumferential array. An upper fixing frame is rotatably connected to the outer wall of the fixing rod near the top end. A plurality of upper mounting heads arranged in a circumferential array are rotatably connected to the bottom end of the upper fixing frame. Second gears are rotatably connected to the outer walls of the plurality of fixing rods near the bottom. A transmission cavity is formed inside the second gear, and a plurality of rotating ports are formed at the top end of the second gear. The rotating ports communicate with the transmission cavity, and the mounting heads and the rotating ports are vertically corresponding. An adjusting rod is rotatably arranged in the rotating port, and a lower mounting head is fixedly connected to the top end of the adjusting rod. A suspension frame is detachably arranged between the upper mounting head and the lower mounting head through a limiting structure.

[0010] Preferably, a third toothed ring is fixedly connected to the top end of the second toothed ring, and the third toothed ring meshes with the plurality of second gears. A third gear is fixedly connected to the outer wall of the adjusting rod near the bottom end, and a fourth gear meshing with the plurality of third gears is fixedly connected to the outer wall of the fixing rod.

[0011] Preferably, the adaptive adjustment coating mechanism further includes a plurality of mounting grooves opened on the outer walls of the tank body and the cabinet door. A target seat is fixedly connected to the inner wall of the mounting groove, an evaporation source is fixedly connected to the inner wall of the target seat, a target material is fixedly connected to the outer wall of the evaporation source, and a vacuum arc ion source is fixedly connected to the side wall of the target seat.

[0012] Preferably, a heater is arranged inside the tank body. The PLC controller is electrically connected to the evaporation source, the vacuum arc ion source, the heater, and the motor and forms an adaptive adjustment loop.

[0013] The technical solution provided by the present invention has the following beneficial effects compared with the known prior art: 1. In the detection component, when the gas containing the plating material passes through the detection box, the light emitted by the lamp board will be blocked and absorbed. The photoresistor board detects the change in light intensity and converts it into an electrical signal and transmits it to the PLC controller. The PLC controller controls the power of the evaporation source, motor, and vacuum arc ion source according to the signal, thereby realizing adaptive adjustment of the parameters, and then adaptively adjusts the parameters according to the actual situation, so that the supply of plating material can be accurately matched with the actual demand.

[0014] 2. The motor drives a series of gears and gear rings to rotate the workpiece at multiple angles, so that each surface of the workpiece can be fully exposed to the plating ion environment, avoiding the problem of uneven coating thickness caused by the workpiece being stationary or rotating in a single direction. For workpieces with complex shapes, their concave and convex parts can be evenly covered with the coating, thereby ensuring the consistency of the coating quality of the entire workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a partial three-dimensional structural schematic diagram of the present invention; Figure 3 It is a schematic diagram of a partial cross-sectional three-dimensional structure of a vacuum coating tank of the present invention; Figure 4 It is a schematic diagram of the internal three-dimensional structure of the vacuum coating tank of the present invention; Figure 5 It is a schematic diagram of the internal partial cross-section three-dimensional structure of the present invention.

[0017] Reference Numerals: 1, vacuum pump unit; 2, fixed table; 3, vacuum coating tank; 31, tank body; 32, cabinet door; 33, sealing frame; 34, opening and closing lock; 4, workpiece placement and rotation mechanism; 41, motor; 42, rotating plate; 43, support frame; 431, support plate; 432, support rod; 433, fixing ring; 44, suspension assembly; 441, fixing rod; 442, upper fixing frame; 443, upper mounting head; 444, second gear; 445, transmission cavity; 446, rotating port; 447, adjusting rod; 448, lower mounting head; 449, suspension frame; 45, first toothed ring; 46, rotating rod; 47, first gear; 48, second toothed ring; 49, third toothed ring; 410, third gear; 411, fourth gear; 5, self-adaptive adjustment coating mechanism; 51, detection component; 511, air extraction pipe; 512, detection box; 513, lamp board; 514, photoresistor board; 52, mounting groove; 53, target seat; 54, evaporation source; 55, target material; 56, vacuum arc ion source. Detailed Embodiments

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0019] The present invention will be further described below with reference to the embodiments.

[0020] Embodiment: Refer to Figures 1 to 5 , a PVD vacuum coating machine, comprising: A vacuum pump unit 1, the top of the vacuum pump unit 1 is fixedly connected to a fixed table 2, and the top of the fixed table 2 is fixedly connected to a vacuum coating tank 3; The vacuum coating tank 3 is composed of a tank body 31 and a cabinet door 32. Sealing frames 33 are fixedly connected to opposite sides of the tank body 31 and the cabinet door 32, and the two sealing frames 33 are hermetically hinged. An opening and closing lock 34 is provided for the two sealing frames 33. Both the tank body 31 and the cabinet door 32 adopt a double-layer stainless steel structure, and a vacuum heat insulation layer is provided between the two layers, which can effectively reduce heat transfer and ensure the stability of the temperature inside the tank during the coating process. The cabinet door 32 is hinged to the sealing frame 33 of the tank body 31 through a hinge. The hinge is made of high-strength stainless steel and has been processed by a special process, with good wear resistance and corrosion resistance. The opening and closing lock 34 adopts an electromagnetic lock structure and is electrically connected to the PLC controller. During the operation of the equipment, the PLC controller can automatically control the opening and closing of the electromagnetic lock to ensure that the cabinet door 32 remains closed during the coating process and prevent external air from entering and affecting the coating quality.

[0021] The support frame 43 includes a support plate 431 fixedly connected to the top end of the rotating plate 42. A plurality of support rods 432 arranged in a circumferential array are fixedly connected to the top end of the support plate 431, and a fixing ring 433 is fixedly connected to the top end of the support rods 432.

[0022] The workpiece placing and rotating mechanism 4 includes a motor 41 fixedly connected to the inner top wall of the vacuum pump unit 1. The output end of the motor 41 is fixedly connected to a rotating plate 42. A support frame 43 is detachably arranged at the top end of the rotating plate 42, and a plurality of suspension components 44 are arranged between the support frames 43; The workpiece placing and rotating mechanism 4 further includes a first toothed ring 45 fixedly connected to the bottom end of the support plate 431. A rotating rod 46 is rotatably connected to the inner bottom wall of the tank body 31. A first gear 47 meshing with the first toothed ring 45 is fixedly connected to the outer wall of the rotating rod 46. A second toothed ring 48 is rotatably connected to the inner bottom wall of the tank body 31, and the second toothed ring 48 meshes with the first gear 47.

[0023] The suspension component 44 includes a plurality of fixing rods 441 fixedly connected between the support plate 431 and the fixing ring 433 and arranged in a circumferential array. An upper fixing frame 442 is rotatably connected to the outer wall of the fixing rod 441 near the top end. A plurality of upper mounting heads 443 arranged in a circumferential array are rotatably connected to the bottom end of the upper fixing frame 442. A second gear 444 is rotatably connected to the outer wall of each of the plurality of fixing rods 441 near the bottom end. A transmission cavity 445 is formed inside the second gear 444. A plurality of rotating ports 446 are formed at the top end of the second gear 444. The rotating ports 446 communicate with the transmission cavity 445, and the mounting head corresponds to the rotating port 446 up and down. An adjusting rod 447 is rotatably arranged in the rotating port 446. A lower mounting head 448 is fixedly connected to the top end of the adjusting rod 447. A suspension frame 449 is detachably arranged between the upper mounting head 443 and the lower mounting head 448 through a limiting structure. The suspension frame 449 can be installed between the upper mounting head 443 and the lower mounting head 448 through the limiting structure and can rotate following the upper mounting head 443 and the lower mounting head 448. The suspension frame 449 is composed of a suspension rod and a plurality of suspension discs, and a plurality of suspension hooks are arranged in a circumferential array on the outer peripheral wall of the suspension disc.

[0024] A third toothed ring 49 is fixedly connected to the top end of the second toothed ring 48. The third toothed ring 49 meshes with a plurality of second gears 444. A third gear 410 is fixedly connected to the outer wall of the adjusting rod 447 near the bottom end. A fourth gear 411 meshing with a plurality of third gears 410 is fixedly connected to the outer wall of the fixing rod 441.

[0025] The adaptive coating adjustment mechanism 5, the adaptive coating adjustment mechanism 5 includes a detection component 51 for detecting the coating degree. The detection component 51 includes an air extraction pipe 511 fixedly connected between a vacuum pump group 1 and a vacuum coating tank 3. The air extraction pipe 511 is cut off in the middle, and a detection box 512 is fixedly connected at the cut-off position. On the opposite inner walls of the detection box 512, a lamp board 513 and a photoresistor board 514 are respectively fixedly connected. The lamp board 513 and the photoresistor board 514 are electrically connected to a PLC controller to form a detection circuit. The lamp board 513 uses a high-brightness LED lamp, and its luminous intensity and wavelength are precisely selected to meet the requirements of coating degree detection. The photoresistor board 514 uses a high-sensitivity photoresistor array and can accurately detect changes in light intensity.

[0026] The adaptive coating adjustment mechanism 5 further includes a plurality of installation grooves 52 opened on the outer walls of both the tank body 31 and the cabinet door 32. The inner wall of the installation groove 52 is fixedly connected with a target seat 53. The inner wall of the target seat 53 is fixedly connected with an evaporation source 54. The outer wall of the evaporation source 54 is fixedly connected with a target material 55. The side wall of the target seat 53 is fixedly connected with a vacuum arc ion source 56.

[0027] A heater is arranged inside the tank body 31. The PLC controller is electrically connected to the evaporation source 54, the vacuum arc ion source 56, the heater, and the motor 41 to form an adaptive adjustment circuit; According to different coating requirements, the target material 55 can be made of various metal or non-metal materials, such as titanium, chromium, silicon, etc. The target material 55 and the evaporation source 54 are fixedly connected through a special binder to ensure that the target material 55 does not fall off during the evaporation process. The vacuum arc ion source 56 uses a hollow cathode arc ion source, which can generate high-energy and high-density ion beams to improve the coating quality and efficiency. The heater is filled with high-resistance heating wires inside, and the power of the heater can be adjusted by the PLC controller. It can accurately control the temperature inside the tank body 31 according to the requirements of the coating process to ensure that the coating process is carried out in a suitable temperature environment. The installation position of the heater is optimized to make the temperature distribution inside the tank body 31 uniform and avoid local overheating or overcooling.

[0028] The working principle of the present invention is as follows: First of all, the workpiece to be coated needs to be strictly pretreated before loading, including steps such as cleaning, degreasing, and rust removal, to remove oil stains, impurities, and oxides on the surface of the workpiece, and ensure good adhesion between the coating and the workpiece surface. The cleaned workpiece should be placed in a drying oven for drying to avoid residual moisture on the surface affecting the coating quality.

[0029] Suspend the workpiece to be coated that has undergone pre - treatment on the suspension hook, then install the suspension frame 449 between the upper mounting head 443 and the lower mounting head 448, and fix it using the limiting structure to ensure that the workpiece can rotate following the upper and lower mounting heads 448. After loading is completed, close the cabinet door 32, and the PLC controller controls the opening and closing lock 34 to lock tightly to ensure the airtightness of the vacuum coating chamber 3 and prevent external air from entering and affecting the coating quality.

[0030] Start the fore - pump (such as a rotary vane pump) in the vacuum pump unit 1 to conduct rough vacuum pumping on the vacuum coating chamber 3, quickly reduce the air pressure in the chamber from atmospheric pressure to a certain level (generally about 10 - 1 Pa). During the rough pumping process, the equipment will monitor the change of air pressure in the chamber in real - time and display the current air pressure value on the display screen. When the rough pumping reaches a certain level (this vacuum degree is the existing standard), start the high - vacuum pump (such as a molecular pump, diffusion pump, etc.) in the vacuum pump unit 1 to further reduce the air pressure in the chamber to achieve the high - vacuum environment required for coating (generally in the range of 10 - 3 - 10 - 6 Pa).

[0031] Simultaneously with the vacuum pumping or after reaching a certain vacuum degree (this vacuum degree is the existing standard), the PLC controller starts the heater and precisely adjusts its power according to the coating process requirements, so that the temperature inside the tank body 31 rises evenly, and then heats the workpiece.

[0032] Then, start the evaporation source 54 and the vacuum arc ion source 56 through the PLC controller. The evaporation source 54 heats the target 55 to evaporate it into gaseous coating material. The vacuum arc ion source 56 (hollow cathode arc ion source) generates a high - energy and high - density ion beam to ionize the gaseous coating material, so that the coating material ions move towards the workpiece surface under the action of the electric field and deposit to form a coating.

[0033] Then, start the motor 41 through the PLC controller. The output end of the motor 41 drives the rotating plate 42 to rotate. The rotating plate 42 drives the first toothed ring 45 to rotate. Through the first toothed ring 45, the first gear 47 is driven to rotate. Then, through the first gear 47, the second toothed ring 48 is driven to rotate. Through the second toothed ring 48, the third toothed ring 49 is driven to rotate synchronously, and then the second gear 444 is driven to rotate synchronously. Since the fixed rod 441 is in a fixed state relative to the second gear 444, the adjusting rod 447 is driven to rotate through the second gear 444, and then the third gear 410 rotates around the fourth gear 411. Since the third gear 410 meshes with the fourth gear 411, the third gear 410 will rotate, and then drive the suspension frame 449 to rotate, so that the workpiece rotates at multiple angles in the vacuum coating chamber 3. The multi - angle rotation enables all surfaces of the workpiece to be fully exposed to the coating material ion environment, avoiding the problem of uneven coating thickness caused by the workpiece being stationary or rotating in a single direction. For example, for workpieces with complex shapes, the concave, convex and other parts can be evenly covered with the coating, thus ensuring the consistency of the coating quality of the entire workpiece.

[0034] During the coating process, some ionized coating materials and non-ionized coating materials will be pumped out by the vacuum pump unit 1 through the extraction duct 511 along with the gas. Inside the detection box 512 in the middle of the extraction duct 511, the lamp board 513 (high-brightness LED lamp, with precisely selected luminous intensity and wavelength) emits light. When the gas containing the coating material passes through the detection box 512, the coating material will block and absorb the light. The photoresistive plate 514 (high-sensitivity photoresistive array) detects the change in light intensity, converts the optical signal into an electrical signal, and transmits it to the PLC controller. When the resistance value of the photoresistor is relatively high, it proves that there is a relatively large amount of ionized coating materials and non-ionized coating materials, so the degree of light blocking is relatively large, and thus the resistance value of the photoresistor will increase. When the amount of ionized coating materials and non-ionized coating materials increases excessively, it means that the amount of coating material required during coating decreases. Therefore, it is necessary to control the evaporation source 54, the motor 41, and the vacuum arc ion source 56 to reduce the power through the PLC controller. The reasons are as follows: An excessive amount of coating material indicates that the amount of coating material provided by the evaporation source 54 exceeds the amount required for the current coating. Reducing the power of the evaporation source 54 can reduce the evaporation amount of the coating material, making it match the actual coating requirements and avoiding waste of the coating material; During the coating process, the motor 41 drives the workpiece to rotate through a series of transmission devices, enabling the workpiece to rotate at multiple angles inside the vacuum coating tank 3. An excessive amount of coating material may cause uneven coating thickness. Reducing the rotational speed of the motor 41 can slow down the rotational speed of the workpiece, extend the deposition time of the coating material on the surface of the workpiece, facilitate more uniform adhesion of the coating material on the surface of the workpiece, and improve the coating quality; The vacuum arc ion source 56 is mainly used to ionize the coating material. An excessive amount of coating material means that there is also an excessive amount of ionized coating material. Reducing its power can reduce the generation amount of ionized coating material, making the amount of ionized coating material match the coating requirements and avoiding negative impacts on the coating quality caused by excessive ionized coating material, such as possible problems like uneven film layer structure and excessive internal stress.

[0035] And in the initial state, the power of the evaporation source 54 and the vacuum arc ion source 56 will be deliberately increased a little (slightly higher than the normal initial value). The detection component 51 can detect that there is excess coating material discharged. Therefore, after no excess coating material is generated subsequently, it means that the initial amount of coating material during the coating process can no longer meet the requirements. Therefore, it is necessary to increase the power of the evaporation source 54, the motor 41, and the vacuum arc ion source 56 through the PLC controller.

[0036] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A PVD vacuum coating machine, characterized in that, Including: A vacuum pump unit (1), a fixed platform (2) is fixedly connected to the top end of the vacuum pump unit (1), and a vacuum coating tank (3) is fixedly connected to the top end of the fixed platform (2); A workpiece placing and rotating mechanism (4), the workpiece placing and rotating mechanism (4) includes a motor (41) fixedly connected to the inner top wall of the vacuum pump unit (1), a rotating plate (42) is fixedly connected to the output end of the motor (41), a support frame (43) is detachably arranged at the top end of the rotating plate (42), and a plurality of suspension components (44) are arranged between the support frames (43); An adaptive adjustment coating mechanism (5), the adaptive adjustment coating mechanism (5) includes a detection component (51) for detecting the coating degree, the detection component (51) includes an air extraction pipe (511) fixedly connected between the vacuum pump unit (1) and the vacuum coating tank (3), the air extraction pipe (511) is cut off in the middle, and a detection box (512) is fixedly connected at the cut-off position, lamp plates (513) and photoresistor plates (514) are respectively fixedly connected to the opposite inner walls of the detection box (512), and the lamp plates (513) and the photoresistor plates (514) are electrically connected to a PLC controller to form a detection circuit.

2. The PVD vacuum coating machine according to claim 1, characterized in that, The vacuum coating tank (3) is composed of a tank body (31) and a cabinet door (32), sealing frames (33) are fixedly connected to the opposite sides of the tank body (31) and the cabinet door (32), and the two sealing frames (33) are hermetically hinged, and an opening and closing lock (34) is jointly arranged on the two sealing frames (33).

3. The PVD vacuum coating machine according to claim 2, characterized in that, The support frame (43) includes a support plate (431) fixedly connected to the top end of the rotating plate (42), a plurality of support rods (432) arranged in a circumferential array are fixedly connected to the top end of the support plate (431), and a fixing ring (433) is fixedly connected to the top end of the support rods (432).

4. The PVD vacuum coating machine according to claim 2, characterized in that, The workpiece placing and rotating mechanism (4) further includes a first toothed ring (45) fixedly connected to the bottom end of the support plate (431), a rotating rod (46) is rotatably connected to the inner bottom wall of the tank body (31), a first gear (47) meshing with the first toothed ring (45) is fixedly connected to the outer wall of the rotating rod (46), a second toothed ring (48) is rotatably connected to the inner bottom wall of the tank body (31), and the second toothed ring (48) meshes with the first gear (47).

5. The PVD vacuum coating machine according to claim 4, characterized in that, The suspension assembly (44) includes a plurality of fixing rods (441) fixedly connected between a support plate (431) and a fixing ring (433) and arranged in a circumferential array. An upper fixing frame (442) is rotatably connected to the outer wall of the fixing rod (441) near the top end. A plurality of upper mounting heads (443) arranged in a circumferential array are rotatably connected to the bottom end of the upper fixing frame (442). A second gear (444) is rotatably connected to the outer wall of each of the plurality of fixing rods (441) near the bottom end. A transmission cavity (445) is formed inside the second gear (444). A plurality of rotation openings (446) are formed at the top end of the second gear (444). The rotation openings (446) communicate with the transmission cavity (445), and the mounting head corresponds to the rotation openings (446) vertically. An adjusting rod (447) is rotatably arranged in the rotation openings (446). A lower mounting head (448) is fixedly connected to the top end of the adjusting rod (447). A suspension frame (449) is detachably arranged between the upper mounting head (443) and the lower mounting head (448) through a limiting structure.

6. The PVD vacuum coating machine according to claim 5, characterized in that, A third gear ring (49) is fixedly connected to the top end of the second gear ring (48). The third gear ring (49) meshes with a plurality of second gears (444). A third gear (410) is fixedly connected to the outer wall of the adjusting rod (447) near the bottom end. A fourth gear (411) meshing with a plurality of third gears (410) is fixedly connected to the outer wall of the fixing rod (441).

7. The PVD vacuum coating machine according to claim 2, characterized in that, The adaptive adjustment coating mechanism (5) further includes a plurality of mounting grooves (52) formed in the outer walls of the tank body (31) and the cabinet door (32). A target seat (53) is fixedly connected to the inner wall of the mounting groove (52). An evaporation source (54) is fixedly connected to the inner wall of the target seat (53). A target material (55) is fixedly connected to the outer wall of the evaporation source (54). A vacuum arc ion source (56) is fixedly connected to the side wall of the target seat (53).

8. The PVD vacuum coating machine according to claim 7, characterized in that, A heater is arranged inside the tank body (31). The PLC controller is electrically connected to the evaporation source (54), the vacuum arc ion source (56), the heater, and the motor (41) and forms an adaptive adjustment loop.

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