Deposition apparatus

Abstract

The deposition apparatus includes: a first evaporation source unit; a second evaporation source unit spaced apart from the first evaporation source unit in the first direction; a shield disposed between the first evaporation source unit and the second evaporation source unit; and a first heater disposed inside the first accommodation portion, the first accommodation portion being disposed inside the first evaporation source unit.

Description

TECHNICAL FIELD

[0001] The utility model relates to a deposition device. Specifically, the utility model relates to a deposition device used in vacuum deposition. BACKGROUND

[0002] A display device is a device for displaying an image that provides visual information to a user. In recent years, an organic light emitting diode display device among display devices has attracted much attention.

[0003] A structure included in a display device, such as a light emitting layer, can be manufactured in a manner in which an evaporation source into which an organic substance is loaded is heated, and the organic substance leaves the evaporation source in a gas form and is deposited on a substrate as the temperature of the organic substance rises. SUMMARY

[0004] An object of the utility model is to provide a deposition device of which quality is improved.

[0005] However, the object of the utility model is not limited to the above-mentioned object, and can be extended in various ways without departing from the idea and field of the utility model.

[0006] To achieve the aforementioned object of the utility model, a deposition device of an embodiment of the utility model can include a first evaporation source unit, a second evaporation source unit spaced apart from the first evaporation source unit in a first direction, a shield body disposed between the first evaporation source unit and the second evaporation source unit, and a first heater disposed inside a first accommodation portion disposed inside the first evaporation source unit.

[0007] In an embodiment, the first accommodation portion can include a first-1 accommodation portion and a first-2 accommodation portion spaced apart from the first-1 accommodation portion.

[0008] In an embodiment, the first-1 accommodation portion and the first-2 accommodation portion can be spaced apart in a second direction crossing the first direction.

[0009] In an embodiment, the first heater can include a first-1 heater disposed inside the first-1 accommodation portion and a first-2 heater disposed inside the first-2 accommodation portion.

[0010] In one embodiment, the first evaporation source unit can include: a first portion having a hollow cuboid shape; a second portion extending from one side of the first portion of the first evaporation source unit in the first direction; and a third portion extending from the other side of the first portion of the first evaporation source unit in a direction opposite to the first direction.

[0011] In one embodiment, the second evaporation source unit can include: a first portion having a hollow cuboid shape; a second portion extending from one side of the first portion of the second evaporation source unit in the first direction; and a third portion extending from the other side of the first portion of the second evaporation source unit in a direction opposite to the first direction.

[0012] In one embodiment, the shield can be in contact with the second portion of the first evaporation source unit and the third portion of the second evaporation source unit.

[0013] In one embodiment, the first portion of the first evaporation source unit and the shield can be spaced apart from each other.

[0014] In one embodiment, the first portion of the second evaporation source unit and the shield can be spaced apart from each other.

[0015] The deposition apparatus of one embodiment of the present application can include: a first evaporation source unit; a second evaporation source unit spaced apart from the first evaporation source unit in a first direction; a shield disposed between the first evaporation source unit and the second evaporation source unit; and a first heater disposed inside a first accommodation portion disposed inside the first evaporation source unit.

[0016] Accordingly, it is possible to overcome the spatial limitation that a heater cannot be disposed due to a narrow space between adjacent evaporation source units. In addition, it is possible to independently control the temperature of each of the evaporation source units.

[0017] However, the effects of the present application are not limited to the foregoing effects, and can be variously extended without departing from the spirit and scope of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a front view showing a deposition apparatus of one embodiment of the present application.

[0019] Figure 2 is a perspective view showing an evaporation source included in the deposition apparatus of Figure 1 .

[0020] Figure 3 is a sectional view showing an example of cutting the evaporation source of Figure 2 along an X-Y line.

[0021] Figure 4 is a perspective view schematically showing a portion of a first evaporation source unit included in an evaporation source of Figure 2

[0022] Figure 5 is a bottom view showing a first evaporation source unit, a second evaporation source unit and a first shield included in an evaporation source of Figure 2

[0023] Figure 6 is a view showing another example of a cross section of the evaporation source of Figure 2

[0024] BRIEF DESCRIPTION OF DRAWINGS

[0025] 1000: deposition apparatus 100: chamber

[0026] 200: support shaft 300: evaporation source

[0027] 400: susceptor 500: vacuum pump

[0028] 310: first evaporation source unit 320: second evaporation source unit

[0029] 330: third evaporation source unit 340: fourth evaporation source unit

[0030] 350: first shield 360: second shield

[0031] 370: third shield

[0032] NB1: first nozzle block NB2: second nozzle block

[0033] NB3: third nozzle block NB4: fourth nozzle block

[0034] NZ1: first nozzle NZ2: second nozzle

[0035] NZ3: third nozzle NZ4: fourth nozzle

[0036] H1: first heater H2: second heater

[0037] GV1: first housing portion GV2: second housing portion DETAILED DESCRIPTION

[0038] Hereinafter, embodiments of the present application will be described in more detail with reference to the accompanying drawings. The same structural elements in the drawings are designated by the same reference numerals and repeated explanation is omitted.

[0039] Figure 1 ​​​is a front view of a deposition apparatus according to an embodiment of the present application.

[0040] Referring to Figure 1 The deposition apparatus 1000 according to an embodiment of the present application can include a chamber 100, a support shaft 200, an evaporation source 300, a susceptor 400, and a vacuum pump 500.

[0041] The support shaft 200, the evaporation source 300, and the susceptor 400 can be disposed inside the chamber 100. A vacuum (or a reduced pressure atmosphere) state can be maintained inside the chamber 100 by the vacuum pump 500.

[0042] The evaporation source 300 can heat a substance to be deposited on a substrate SUB. The substance heated by the evaporation source 300 can be sublimated and deposited on the substrate SUB. Thus, a thin film can be formed on the substrate SUB. For example, the evaporation source 300 can heat an organic substance. The organic substance heated by the evaporation source 300 can be sublimated and deposited on the substrate SUB. Thus, an organic thin film can be formed on the substrate SUB. However, the present application is not limited thereto, and the evaporation source 300 can heat an inorganic substance.

[0043] The substrate SUB can be seated on the susceptor 400. The substrate SUB is a structure on which a substrate process such as etching or deposition is performed, and can be any substrate such as an OLED manufacturing substrate or a transparent glass substrate. The support shaft 200 can support the susceptor 400, and can move the susceptor 400 up and down.

[0044] In the present application, a first direction DR1 and a second direction DR2 intersecting the first direction DR1 can be defined. For example, the second direction DR2 can be perpendicular to the first direction DR1. However, the present application is not limited thereto, and the second direction DR2 can form an acute angle or an obtuse angle with the first direction DR1. In addition, a third direction DR3 intersecting a plane formed by the first direction DR1 and the second direction DR2 can be defined. For example, the third direction DR3 can be perpendicular to the plane formed by the first direction DR1 and the second direction DR2. However, the present application is not limited thereto, and the third direction DR3 can form an acute angle or an obtuse angle with the plane formed by the first direction DR1 and the second direction DR2.

[0045] Figure 2 is a perspective view of an evaporation source included in the deposition apparatus of Figure 1

[0046] Further referring to Figure 2 ​The evaporation source 300 can include a first evaporation source unit 310, a second evaporation source unit 320, a third evaporation source unit 330, a fourth evaporation source unit 340, a first shield 350, a second shield 360, a third shield 370, a first nozzle block NB1, a second nozzle block NB2, a third nozzle block NB3, and a fourth nozzle block NB4.

[0047] The first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each accommodate a substance to be deposited on the substrate SUB. For example, the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each accommodate an organic substance. However, the present application is not limited thereto, and the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each accommodate an inorganic substance.

[0048] The second evaporation source unit 320 can be spaced apart from the first evaporation source unit 310 in the first direction DR1. For example, the second evaporation source unit 320 can be spaced apart from the first evaporation source unit 310 with the first shield 350 interposed therebetween. The third evaporation source unit 330 can be spaced apart from the second evaporation source unit 320 in the first direction DR1. For example, the third evaporation source unit 330 can be spaced apart from the second evaporation source unit 320 with the second shield 360 interposed therebetween. The fourth evaporation source unit 340 can be spaced apart from the third evaporation source unit 330 in the first direction DR1. For example, the fourth evaporation source unit 340 can be spaced apart from the third evaporation source unit 330 with the third shield 370 interposed therebetween.

[0049] For example, the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each extend in the second direction DR2. For example, the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each have a cuboid shape extending in the second direction DR2. For example, the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each have a hollow cuboid shape extending in the second direction DR2.

[0050] However, the present application is not limited thereto, and the shapes of the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each be changed. For example, the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each have a tapered or inverted tapered shape in a cross section.

[0051] The first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 may each include an upper surface and a lower surface. The upper surface of each of the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 may be opposite to the lower surface of each of the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 may be a surface facing the substrate SUB.

[0052] The first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each be formed of a metallic material. For example, the first evaporation source unit 310, the second evaporation source unit 320, the third evaporation source unit 330, and the fourth evaporation source unit 340 can each be formed of stainless steel, copper, titanium, tungsten, nickel, etc. They can be used individually or in combination with each other.

[0053] The first shield 350 may be arranged between the first evaporation source unit 310 and the second evaporation source unit 320. For example, the first shield 350 may be connected to the first evaporation source unit 310 in the first direction DR1. For example, the first shield 350 may be connected to the second evaporation source unit 320 in the opposite direction to the first direction DR1.

[0054] The first shield 350 allows the first heater (e.g., described later) to be positioned by the first heater (described later). Figure 3 The heat supplied by the first heater H1 in the first evaporation source unit 310 is reflected back towards the first evaporation source unit 310. Furthermore, the first shield 350 allows the heat from the second heater (described later, for example, ...) to be reflected back towards the first evaporation source unit 310. Figure 3 The heat supplied by the second heater (H2) is reflected again towards the second evaporation source unit 320. That is, the first shield 350 can reduce or block heat transfer between the first evaporation source unit 310 and the second evaporation source unit 320. This reduces the energy required to heat the first evaporation source unit 310 and the second evaporation source unit 320. Furthermore, the temperature of each of the first evaporation source unit 310 and the second evaporation source unit 320 can be independently controlled by the first shield 350.

[0055] The second shield 360 may be arranged between the second evaporation source unit 320 and the third evaporation source unit 330. For example, the second shield 360 may be connected to the second evaporation source unit 320 in the first direction DR1. For example, the second shield 360 may be connected to the third evaporation source unit 330 in the opposite direction to the first direction DR1.

[0056] The second shield 360 can reflect heat provided by the second heater again toward the second evaporation source unit 320 side. Also, the second shield 360 can reflect heat provided by the third heater, which will be described later, again toward the third evaporation source unit 330 side. That is, the second shield 360 can reduce or block heat transfer between the second evaporation source unit 320 and the third evaporation source unit 330. Thereby, energy required to heat the second evaporation source unit 320 and the third evaporation source unit 330 can be reduced. Also, temperatures of the second evaporation source unit 320 and the third evaporation source unit 330 can be independently controlled by the second shield 360.

[0057] The third shield 370 can be disposed between the third evaporation source unit 330 and the fourth evaporation source unit 340. For example, the third shield 370 can be in contact with the third evaporation source unit 330 in the first direction DR1. For example, the third shield 370 can be in contact with the fourth evaporation source unit 340 in a direction opposite to the first direction DR1.

[0058] The third shield 370 can reflect heat provided by the third heater again toward the third evaporation source unit 330 side. Also, the third shield 370 can reflect heat provided by the fourth heater, which will be described later, again toward the fourth evaporation source unit 340 side. That is, the third shield 370 can reduce or block heat transfer between the third evaporation source unit 330 and the fourth evaporation source unit 340. Thereby, energy required to heat the third evaporation source unit 330 and the fourth evaporation source unit 340 can be reduced. Also, temperatures of the third evaporation source unit 330 and the fourth evaporation source unit 340 can be independently controlled by the third shield 370.

[0059] For example, the first shield 350, the second shield 360, and the third shield 370 can each include a ceramic material. However, the present application is not limited thereto, and the first shield 350, the second shield 360, and the third shield 370 can each include a metallic substance.

[0060] The first nozzle block NB1 can be disposed on the first evaporation source unit 310. For example, the first nozzle block NB1 can be disposed on an upper surface of the first evaporation source unit 310. That is, the first nozzle block NB1 can be in contact with the first evaporation source unit 310 in the third direction DR3. The first nozzle block NB1 can extend in the second direction DR2. For example, the first nozzle block NB1 can have a cuboid shape extending in the second direction DR2. For example, the first nozzle block NB1 can have a hollow cuboid shape extending in the second direction DR2.

[0061] In an embodiment, the first nozzle block NB1 can include a plurality of first nozzles NZ1. For example, the first nozzles NZ1 can be included on an upper surface of the first nozzle block NB1. The first nozzles NZ1 can be repeatedly arranged in the second direction DR2.

[0062] The inside of the first evaporation source unit 310 and the first nozzle block NB1 can be communicated. Also, the first nozzles NZ1 can be communicated with the first nozzle block NB1. Thereby, the inside of the first evaporation source unit 310 and the first nozzles NZ1 can be communicated. Thus, the organic substance sublimated by the first heater can be discharged to the inside of the chamber 100 through the first nozzles NZ1.

[0063] The second nozzle block NB2 can be disposed on the second evaporation source unit 320. For example, the second nozzle block NB2 can be disposed on an upper surface of the second evaporation source unit 320. That is, the second nozzle block NB2 can be in contact with the second evaporation source unit 320 in the third direction DR3. The second nozzle block NB2 can extend in the second direction DR2. For example, the second nozzle block NB2 can have a cuboid shape extending in the second direction DR2. For example, the second nozzle block NB2 can have a hollow cuboid shape extending in the second direction DR2.

[0064] In an embodiment, the second nozzle block NB2 can include a plurality of second nozzles NZ2. For example, the second nozzles NZ2 can be included on an upper surface of the second nozzle block NB2. The second nozzles NZ2 can be repeatedly arranged in the second direction DR2.

[0065] The inside of the second evaporation source unit 320 and the second nozzle block NB2 can be communicated. Also, the second nozzles NZ2 can be communicated with the second nozzle block NB2. Thereby, the inside of the second evaporation source unit 320 and the second nozzles NZ2 can be communicated. Thus, the organic substance sublimated by the second heater can be discharged to the inside of the chamber 100 through the second nozzles NZ2.

[0066] The third nozzle block NB3 can be disposed on the third evaporation source unit 330. For example, the third nozzle block NB3 can be disposed on an upper surface of the third evaporation source unit 330. That is, the third nozzle block NB3 can be in contact with the third evaporation source unit 330 in the third direction DR3. The third nozzle block NB3 can extend in the second direction DR2. For example, the third nozzle block NB3 can have a cuboid shape extending in the second direction DR2. For example, the third nozzle block NB3 can have a hollow cuboid shape extending in the second direction DR2.

[0067] In an embodiment, the third nozzle block NB3 can include a plurality of third nozzles NZ3. For example, the third nozzles NZ3 can be included on an upper surface of the third nozzle block NB3. The third nozzles NZ3 can be repeatedly arranged in the second direction DR2.

[0068] The inside of the third evaporation source unit 330 and the third nozzle block NB3 can be communicated. Also, the third nozzle NZ3 can be communicated with the third nozzle block NB3. Thereby, the inside of the third evaporation source unit 330 and the third nozzle NZ3 can be communicated. Thus, the organic substance sublimated by the third heater can be discharged to the inside of the chamber 100 through the third nozzle NZ3.

[0069] The fourth nozzle block NB4 can be disposed on the fourth evaporation source unit 340. For example, the fourth nozzle block NB4 can be disposed on the upper surface of the fourth evaporation source unit 340. That is, the fourth nozzle block NB4 can be in contact with the fourth evaporation source unit 340 in the third direction DR3. The fourth nozzle block NB4 can extend in the second direction DR2. For example, the fourth nozzle block NB4 can have a cuboid shape extending in the second direction DR2. For example, the fourth nozzle block NB4 can have a hollow cuboid shape extending in the second direction DR2.

[0070] In an embodiment, the fourth nozzle block NB4 can include a plurality of fourth nozzles NZ4. For example, the fourth nozzles NZ4 can be included on the upper surface of the fourth nozzle block NB4. The fourth nozzles NZ4 can be repeatedly arranged in the second direction DR2.

[0071] The inside of the fourth evaporation source unit 340 and the fourth nozzle block NB4 can be communicated. Also, the fourth nozzle NZ4 can be communicated with the fourth nozzle block NB4. Thereby, the inside of the fourth evaporation source unit 340 and the fourth nozzle NZ4 can be communicated. Thus, the organic substance sublimated by the fourth heater can be discharged to the inside of the chamber 100 through the fourth nozzle NZ4.

[0072] In an embodiment, the evaporation source 300 can include four evaporation source units, three shielding bodies, and four nozzle blocks. However, the present application is not limited thereto, and the number of evaporation source units, the number of shielding bodies, and the number of nozzle blocks can be appropriately changed. For example, the evaporation source 300 can include five evaporation source units, four shielding bodies, and five nozzle blocks.

[0073] Figure 3 is a cross-sectional view schematically showing a case where the evaporation source of Figure 2 is cut along an X-Y line. Figure 4 is a perspective view schematically showing a portion of the first evaporation source unit included in the evaporation source of Figure 2 . Figure 5 is a bottom view schematically showing the first evaporation source unit, the second evaporation source unit, and the first shielding body included in the evaporation source of Figure 2 .

[0074] Referring to Figure 2 , Figure 3 , Figure 4 and Figure 5A first accommodation portion GV1 can be arranged inside the first evaporation source unit 310. The first accommodation portion GV1 can be arranged on a lower surface LS1 of the first evaporation source unit 310. That is, the first accommodation portion GV1 can be in contact with the lower surface LS1 of the first evaporation source unit 310 in the third direction DR3. For example, a lower surface of the first accommodation portion GV1 and the lower surface LS1 of the first evaporation source unit 310 can be arranged on the same plane.

[0075] In an embodiment, the first accommodation portion GV1 can include a plurality of accommodation portions. For example, the first accommodation portion GV1 can include a 1-1 accommodation portion GV1-1, a 1-2 accommodation portion GV1-2, and a 1-3 accommodation portion GV1-3.

[0076] The 1-2 accommodation portion GV1-2 can be spaced apart from the 1-1 accommodation portion GV1-1. For example, the 1-2 accommodation portion GV1-2 can be spaced apart from the 1-1 accommodation portion GV1-1 in a direction opposite to the second direction DR2.

[0077] The 1-3 accommodation portion GV1-3 can be spaced apart from the 1-2 accommodation portion GV1-2. For example, the 1-3 accommodation portion GV1-3 can be spaced apart from the 1-2 accommodation portion GV1-2 in a direction opposite to the second direction DR2.

[0078] In an embodiment, the first accommodation portion GV1 can include three accommodation portions. However, the present application is not limited thereto, and the first accommodation portion GV1 can include four or more accommodation portions or two accommodation portions.

[0079] In an embodiment, the 1-1 accommodation portion GV1-1, the 1-2 accommodation portion GV1-2, and the 1-3 accommodation portion GV1-3 can each have a cuboid shape. For example, the 1-1 accommodation portion GV1-1, the 1-2 accommodation portion GV1-2, and the 1-3 accommodation portion GV1-3 can each have a hollow cuboid shape.

[0080] However, the present application is not limited thereto, and the shapes of the 1-1 accommodation portion GV1-1, the 1-2 accommodation portion GV1-2, and the 1-3 accommodation portion GV1-3 can each be changed. For example, the 1-1 accommodation portion GV1-1, the 1-2 accommodation portion GV1-2, and the 1-3 accommodation portion GV1-3 can each have a circular shape, a conical shape, an inverted conical shape, or the like in a cross-sectional view.

[0081] A second accommodation portion GV2 can be arranged inside the second evaporation source unit 320. The second accommodation portion GV2 can be arranged on a lower surface LS2 of the second evaporation source unit 320. That is, the second accommodation portion GV2 can be in contact with the lower surface LS2 of the second evaporation source unit 320 in a third direction DR3. For example, a lower surface LS2 of the second accommodation portion GV2 and a lower surface of the second evaporation source unit 320 can be arranged on the same plane.

[0082] In an embodiment, the second accommodation portion GV2 can include a plurality of accommodation portions. For example, the second accommodation portion GV2 can include a 2-1 accommodation portion GV2-1, a 2-2 accommodation portion GV2-2, and a 2-3 accommodation portion GV2-3.

[0083] The 2-2 accommodation portion GV2-2 can be spaced apart from the 2-1 accommodation portion GV2-1. For example, the 2-2 accommodation portion GV2-2 can be spaced apart from the 2-1 accommodation portion GV2-1 in a direction opposite to the second direction DR2.

[0084] The 2-3 accommodation portion GV2-3 can be spaced apart from the 2-2 accommodation portion GV2-2. For example, the 2-3 accommodation portion GV2-3 can be spaced apart from the 2-2 accommodation portion GV2-2 in a direction opposite to the second direction DR2.

[0085] In an embodiment, the second accommodation portion GV2 can include three accommodation portions. However, the present application is not limited thereto, and the second accommodation portion GV2 can include more than four accommodation portions or two accommodation portions.

[0086] In an embodiment, the 2-1 accommodation portion GV2-1, the 2-2 accommodation portion GV2-2, and the 2-3 accommodation portion GV2-3 can each have a cuboid shape. For example, the 2-1 accommodation portion GV2-1, the 2-2 accommodation portion GV2-2, and the 2-3 accommodation portion GV2-3 can each have a hollow cuboid shape.

[0087] However, the present application is not limited thereto, and the shapes of the 2-1 accommodation portion GV2-1, the 2-2 accommodation portion GV2-2, and the 2-3 accommodation portion GV2-3 can each be changed. For example, the 2-1 accommodation portion GV2-1, the 2-2 accommodation portion GV2-2, and the 2-3 accommodation portion GV2-3 can each have a circular shape, a conical shape, an inverted conical shape, or the like in a cross-section.

[0088] A third accommodation portion can be arranged inside the third evaporation source unit 330. The third accommodation portion can be arranged on a lower surface of the third evaporation source unit 330. That is, the third accommodation portion can be in contact with the lower surface of the third evaporation source unit 330 in a third direction DR3. For example, a lower surface of the third accommodation portion and a lower surface of the third evaporation source unit 330 can be arranged on the same plane.

[0089] In an embodiment, the third accommodation portion can include a plurality of accommodation portions. For example, the third accommodation portion can include a 3-1 accommodation portion, a 3-2 accommodation portion, and a 3-3 accommodation portion.

[0090] The 3-2 accommodation portion can be spaced apart from the 3-1 accommodation portion. For example, the 3-2 accommodation portion can be spaced apart from the 3-1 accommodation portion in a direction opposite to the second direction DR2.

[0091] The 3-3 accommodation portion can be spaced apart from the 3-2 accommodation portion. For example, the 3-3 accommodation portion can be spaced apart from the 3-2 accommodation portion in a direction opposite to the second direction DR2.

[0092] In an embodiment, the third accommodation portion can include three accommodation portions. However, the present application is not limited thereto, and the third accommodation portion can include more than four accommodation portions or two accommodation portions.

[0093] In an embodiment, the 3-1 accommodation portion, the 3-2 accommodation portion, and the 3-3 accommodation portion can each have a cuboid shape. For example, the 3-1 accommodation portion, the 3-2 accommodation portion, and the 3-3 accommodation portion can each have a hollow cuboid shape.

[0094] However, the present application is not limited thereto, and the shapes of the 3-1 accommodation portion, the 3-2 accommodation portion, and the 3-3 accommodation portion can each be changed. For example, the 3-1 accommodation portion, the 3-2 accommodation portion, and the 3-3 accommodation portion can each have a circular shape, a conical shape, an inverted conical shape, or the like in a cross-sectional view.

[0095] A fourth accommodation portion can be disposed inside the fourth evaporation source unit 340. The fourth accommodation portion can be disposed on a lower surface of the fourth evaporation source unit 340. That is, the fourth accommodation portion can be in contact with the lower surface of the fourth evaporation source unit 340 in the third direction DR3. For example, a lower surface of the fourth accommodation portion and the lower surface of the fourth evaporation source unit 340 can be disposed on the same plane.

[0096] In an embodiment, the fourth accommodation portion can include a plurality of accommodation portions. For example, the fourth accommodation portion can include a 4-1 accommodation portion, a 4-2 accommodation portion, and a 4-3 accommodation portion.

[0097] The 4-2 accommodation portion can be spaced apart from the 4-1 accommodation portion. For example, the 4-2 accommodation portion can be spaced apart from the 4-1 accommodation portion in a direction opposite to the second direction DR2.

[0098] The fourth-3 accommodation portion can be spaced apart from the fourth-2 accommodation portion. For example, the fourth-3 accommodation portion can be spaced apart from the fourth-2 accommodation portion in a direction opposite to the second direction DR2.

[0099] In an embodiment, the fourth accommodation portion can include three accommodation portions. However, the present application is not limited thereto, and the fourth accommodation portion can include more than four accommodation portions or two accommodation portions.

[0100] In an embodiment, the fourth-1 accommodation portion, the fourth-2 accommodation portion, and the fourth-3 accommodation portion can each have a cuboid shape. For example, the fourth-1 accommodation portion, the fourth-2 accommodation portion, and the fourth-3 accommodation portion can each have a hollow cuboid shape.

[0101] However, the present application is not limited thereto, and the shapes of the fourth-1 accommodation portion, the fourth-2 accommodation portion, and the fourth-3 accommodation portion can each be changed. For example, the fourth-1 accommodation portion, the fourth-2 accommodation portion, and the fourth-3 accommodation portion can each have a circular shape, a conical shape, an inverted conical shape, or the like in a cross-sectional view.

[0102] That is, the first accommodation portion GV1, the second accommodation portion GV2, the third accommodation portion, and the fourth accommodation portion can have similar or identical arrangement structures to each other.

[0103] In an embodiment, the evaporation source 300 can further include a plurality of heaters. For example, the evaporation source 300 can include a first heater H1, a second heater H2, a third heater, and a fourth heater.

[0104] The first heater H1 can include a plurality of heaters. For example, the first heater H1 can include a first-1 heater H1-1, a first-2 heater H1-2, and a first-3 heater H1-3.

[0105] The first-1 heater H1-1 can be disposed inside the first-1 accommodation portion GV1-1. The first-1 heater H1-1 can heat the first evaporation source unit 310. For example, the first-1 heater H1-1 can heat an organic substance accommodated in the first evaporation source unit 310. Thereby, the organic substance accommodated in the first evaporation source unit 310 can be evaporated or sublimated. However, the present application is not limited thereto, and in a case where an inorganic substance is accommodated in the first evaporation source unit 310, the first-1 heater H1-1 can heat the inorganic substance. In addition, the first-1 heater H1-1 can prevent the organic substance evaporated or sublimated in the first evaporation source unit 310 from being precipitated due to a decrease in temperature thereof.

[0106] The 1st-2nd heater H1-2 can be arranged inside the 1st-2nd accommodation portion GV1-2. The 1st-2nd heater H1-2 can heat the first evaporation source unit 310. For example, the 1st-2nd heater H1-2 can heat the organic substance accommodated in the first evaporation source unit 310. Thus, the organic substance accommodated in the first evaporation source unit 310 can be evaporated or sublimated. However, the present application is not limited thereto. In the case where inorganic substance is accommodated in the first evaporation source unit 310, the 1st-2nd heater H1-2 can heat the inorganic substance. In addition, the 1st-2nd heater H1-2 can prevent the organic substance evaporated or sublimated in the first evaporation source unit 310 from being precipitated due to a decrease in temperature thereof.

[0107] The 1st-3rd heater H1-3 can be arranged inside the 1st-3rd accommodation portion GV1-3. The 1st-3rd heater H1-3 can heat the first evaporation source unit 310. For example, the 1st-3rd heater H1-3 can heat the organic substance accommodated in the first evaporation source unit 310. Thus, the organic substance accommodated in the first evaporation source unit 310 can be evaporated or sublimated. However, the present application is not limited thereto. In the case where inorganic substance is accommodated in the first evaporation source unit 310, the 1st-3rd heater H1-3 can heat the inorganic substance. In addition, the 1st-3rd heater H1-3 can prevent the organic substance evaporated or sublimated in the first evaporation source unit 310 from being precipitated due to a decrease in temperature thereof.

[0108] Since the first heater H1 includes the 1st-1st heater H1-1, the 1st-2nd heater H1-2, and the 1st-3rd heater H1-3 which are spaced apart from each other, the first evaporation source unit 310 can be heated at respective corresponding positions of the 1st-1st heater H1-1, the 1st-2nd heater H1-2, and the 1st-3rd heater H1-3.

[0109] For example, the 1st-1st heater H1-1 can heat a first portion of the first evaporation source unit 310. The 1st-2nd heater H1-2 can heat a second portion of the first evaporation source unit 310. The 1st-3rd heater H1-3 can heat a third portion of the first evaporation source unit 310. Since the 1st-1st heater H1-1, the 1st-2nd heater H1-2, and the 1st-3rd heater H1-3 are independently arranged and independently operated, the temperatures of the first portion, the second portion, and the third portion of the first evaporation source unit 310 can be independently controlled.

[0110] The second heater H2 can include a plurality of heaters. For example, the second heater H2 can include a 2nd-1st heater H2-1, a 2nd-2nd heater H2-2, and a 2nd-3rd heater H2-3.

[0111] The 2-1 heater H2-1 can be arranged inside the 2-1 housing portion GV2-1. The 2-1 heater H2-1 can heat the second evaporation source unit 320. For example, the 2-1 heater H2-1 can heat the organic substance housed in the second evaporation source unit 320. Thereby, the organic substance housed in the second evaporation source unit 320 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is housed in the second evaporation source unit 320, the 2-1 heater H2-1 can heat the inorganic substance. In addition, the 2-1 heater H2-1 can prevent the organic substance evaporated or sublimated in the second evaporation source unit 320 from being precipitated due to a decrease in temperature thereof.

[0112] The 2-2 heater H2-2 can be arranged inside the 2-2 housing portion GV2-2. The 2-2 heater H2-2 can heat the second evaporation source unit 320. For example, the 2-2 heater H2-2 can heat the organic substance housed in the second evaporation source unit 320. Thereby, the organic substance housed in the second evaporation source unit 320 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is housed in the second evaporation source unit 320, the 2-2 heater H2-2 can heat the inorganic substance. In addition, the 2-2 heater H2-2 can prevent the organic substance evaporated or sublimated in the second evaporation source unit 320 from being precipitated due to a decrease in temperature thereof.

[0113] The 2-3 heater H2-3 can be arranged inside the 2-3 housing portion GV2-3. The 2-3 heater H2-3 can heat the second evaporation source unit 320. For example, the 2-3 heater H2-3 can heat the organic substance housed in the second evaporation source unit 320. Thereby, the organic substance housed in the second evaporation source unit 320 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is housed in the second evaporation source unit 320, the 2-3 heater H2-3 can heat the inorganic substance. In addition, the 2-3 heater H2-3 can prevent the organic substance evaporated or sublimated in the second evaporation source unit 320 from being precipitated due to a decrease in temperature thereof.

[0114] Since the second heater H2 includes the 2-1 heater H2-1, the 2-2 heater H2-2, and the 2-3 heater H2-3 which are spaced apart from each other, the second evaporation source unit 320 can be heated at respective corresponding positions of the 2-1 heater H2-1, the 2-2 heater H2-2, and the 2-3 heater H2-3.

[0115] For example, the 2-1 heater H2-1 can heat a first portion of the second evaporation source unit 320. The 2-2 heater H2-2 can heat a second portion of the second evaporation source unit 320. The 2-3 heater H2-3 can heat a third portion of the second evaporation source unit 320. Since the 2-1 heater H2-1, the 2-2 heater H2-2 and the 2-3 heater H2-3 are independently arranged and independently operated, the temperatures of the first portion, the second portion and the third portion of the second evaporation source unit 320 can be independently controlled.

[0116] The third heater can include a plurality of heaters. For example, the third heater can include a 3-1 heater, a 3-2 heater and a 3-3 heater.

[0117] The 3-1 heater can be arranged inside the 3-1 accommodation portion. The 3-1 heater can heat the third evaporation source unit 330. For example, the 3-1 heater can heat an organic substance accommodated in the third evaporation source unit 330. Thereby, the organic substance accommodated in the third evaporation source unit 330 can be evaporated or sublimated. However, the present application is not limited thereto, and in case that an inorganic substance is accommodated in the third evaporation source unit 330, the 3-1 heater can heat the inorganic substance. In addition, the 3-1 heater can prevent the organic substance evaporated or sublimated in the third evaporation source unit 330 from being precipitated due to a decrease in temperature thereof.

[0118] The 3-2 heater can be arranged inside the 3-2 accommodation portion. The 3-2 heater can heat the third evaporation source unit 330. For example, the 3-2 heater can heat an organic substance accommodated in the third evaporation source unit 330. Thereby, the organic substance accommodated in the third evaporation source unit 330 can be evaporated or sublimated. However, the present application is not limited thereto, and in case that an inorganic substance is accommodated in the third evaporation source unit 330, the 3-2 heater can heat the inorganic substance. In addition, the 3-2 heater can prevent the organic substance evaporated or sublimated in the third evaporation source unit 330 from being precipitated due to a decrease in temperature thereof.

[0119] The third-3 heater can be arranged inside the third-3 accommodation portion. The third-3 heater can heat the third evaporation source unit 330. For example, the third-3 heater can heat the organic substance accommodated in the third evaporation source unit 330. Thus, the organic substance accommodated in the third evaporation source unit 330 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is accommodated in the third evaporation source unit 330, the third-3 heater can heat the inorganic substance. In addition, the third-3 heater can prevent the organic substance evaporated or sublimated in the third evaporation source unit 330 from being precipitated due to a decrease in temperature thereof.

[0120] Since the third heater includes the third-1 heater, the third-2 heater, and the third-3 heater spaced apart from each other, the third evaporation source unit 330 can be heated at respective corresponding positions of the third-1 heater, the third-2 heater, and the third-3 heater.

[0121] For example, the third-1 heater can heat a first portion of the third evaporation source unit 330. The third-2 heater can heat a second portion of the third evaporation source unit 330. The third-3 heater can heat a third portion of the third evaporation source unit 330. Since the third-1 heater, the third-2 heater, and the third-3 heater are independently arranged and independently operated, the temperature of the first portion, the second portion, and the third portion of the third evaporation source unit 330 can be independently controlled.

[0122] The fourth heater can include a plurality of heaters. For example, the fourth heater can include a fourth-1 heater, a fourth-2 heater, and a fourth-3 heater.

[0123] The fourth-1 heater can be arranged inside the fourth-1 accommodation portion. The fourth-1 heater can heat the fourth evaporation source unit 340. For example, the fourth-1 heater can heat the organic substance accommodated in the fourth evaporation source unit 340. Thus, the organic substance accommodated in the fourth evaporation source unit 340 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is accommodated in the fourth evaporation source unit 340, the fourth-1 heater can heat the inorganic substance. In addition, the fourth-1 heater can prevent the organic substance evaporated or sublimated in the fourth evaporation source unit 340 from being precipitated due to a decrease in temperature thereof.

[0124] The fourth-2 heater can be arranged inside the fourth-2 accommodation portion. The fourth-2 heater can heat the fourth evaporation source unit 340. For example, the fourth-2 heater can heat the organic substance accommodated in the fourth evaporation source unit 340. Thus, the organic substance accommodated in the fourth evaporation source unit 340 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is accommodated in the fourth evaporation source unit 340, the fourth-2 heater can heat the inorganic substance. In addition, the fourth-2 heater can prevent the organic substance evaporated or sublimated in the fourth evaporation source unit 340 from being precipitated due to a decrease in temperature thereof.

[0125] The fourth-3 heater can be arranged inside the fourth-3 accommodation portion. The fourth-3 heater can heat the fourth evaporation source unit 340. For example, the fourth-3 heater can heat the organic substance accommodated in the fourth evaporation source unit 340. Thus, the organic substance accommodated in the fourth evaporation source unit 340 can be evaporated or sublimated. However, the present application is not limited thereto, and in the case where inorganic substance is accommodated in the fourth evaporation source unit 340, the fourth-3 heater can heat the inorganic substance. In addition, the fourth-3 heater can prevent the organic substance evaporated or sublimated in the fourth evaporation source unit 340 from being precipitated due to a decrease in temperature thereof.

[0126] Since the fourth heater includes the fourth-1 heater, the fourth-2 heater, and the fourth-3 heater spaced apart from each other, the fourth evaporation source unit 340 can be heated at respective corresponding positions of the fourth-1 heater, the fourth-2 heater, and the fourth-3 heater.

[0127] For example, the fourth-1 heater can heat a first portion of the fourth evaporation source unit 340. The fourth-2 heater can heat a second portion of the fourth evaporation source unit 340. The fourth-3 heater can heat a third portion of the fourth evaporation source unit 340. Since the fourth-1 heater, the fourth-2 heater, and the fourth-3 heater are independently arranged and independently operated, the temperature of the first portion, the second portion, and the third portion of the fourth evaporation source unit 340 can be independently controlled.

[0128] In an embodiment, the first heater H1, the second heater H2, the third heater, and the fourth heater can each have a cylindrical shape. For example, the first heater H1, the second heater H2, the third heater, and the fourth heater can each have a cylindrical shape extending in the second direction DR2.

[0129] In an embodiment, the first heater H1, the second heater H2, the third heater and the fourth heater can each be a cartridge heater. However, the present application is not limited thereto, and the first heater H1, the second heater H2, the third heater and the fourth heater can each be any kind of heater. For example, the first heater H1, the second heater H2, the third heater and the fourth heater can each be a sheath heater, a coil heater, a ribbon heater, a tube heater, etc.

[0130] There can be no sufficient space to arrange the heaters between the first evaporation source unit 310 and the second evaporation source unit 320. In addition, there can be no sufficient space to arrange the heaters between the second evaporation source unit 320 and the third evaporation source unit 330. Furthermore, there can be no sufficient space to arrange the heaters between the third evaporation source unit 330 and the fourth evaporation source unit 340.

[0131] Accordingly, the first heater H1 can be arranged inside the first accommodation portion GV1 arranged inside the first evaporation source unit 310. In addition, the second heater H2 can be arranged inside the second accommodation portion GV2 arranged inside the second evaporation source unit 320. Furthermore, the third heater can be arranged inside the third accommodation portion arranged inside the third evaporation source unit 330. In addition, the fourth heater can be arranged inside the fourth accommodation portion arranged inside the fourth evaporation source unit 340.

[0132] Accordingly, the first heater H1 can be arranged inside the first accommodation portion GV1 arranged inside the first evaporation source unit 310. In addition, the second heater H2 can be arranged inside the second accommodation portion GV2 arranged inside the second evaporation source unit 320. Furthermore, the third heater can be arranged inside the third accommodation portion arranged inside the third evaporation source unit 330. In addition, the fourth heater can be arranged inside the fourth accommodation portion arranged inside the fourth evaporation source unit 340.

[0133] Figure 6 is a sectional view of another example of the evaporation source along an X-Y line. Figure 2 is a sectional view of another example of the evaporation source along an X-Y line.

[0134] The evaporation source described with reference to Figure 6 the evaporation source described with reference to Figure 3 the evaporation source described with reference to

[0135] The evaporation source of another embodiment of the present application can include a first evaporation source unit 310', a second evaporation source unit 320', a third evaporation source unit and a fourth evaporation source unit.

[0136] The second evaporation source unit 320' can be spaced apart from the first evaporation source unit 310' in the first direction DR1. The third evaporation source unit can be spaced apart from the second evaporation source unit 320' in the first direction DR1. The fourth evaporation source unit can be spaced apart from the third evaporation source unit in the first direction DR1.

[0137] The first evaporation source unit 310' can include a first portion 311, a second portion 312, and a third portion 313. The first accommodation portion GV1 can be disposed inside the first portion 311 of the first evaporation source unit 310'. The first nozzle block NB1 can be disposed on the first portion 311 of the first evaporation source unit 310'. For example, the first portion 311 of the first evaporation source unit 310' can have a hollow cuboid shape.

[0138] The second portion 312 of the first evaporation source unit 310' can extend from one side of the first portion 311 of the first evaporation source unit 310'. For example, the second portion 312 of the first evaporation source unit 310' can extend from the one side of the first portion 311 of the first evaporation source unit 310' in the first direction DR1. For example, the second portion 312 of the first evaporation source unit 310' can have a cuboid shape.

[0139] The third portion 313 of the first evaporation source unit 310' can extend from another side of the first portion 311 of the first evaporation source unit 310'. For example, the third portion 313 of the first evaporation source unit 310' can extend from the other side of the first portion 311 of the first evaporation source unit 310' in a direction opposite to the first direction DR1. The third portion 313 of the first evaporation source unit 310' can be spaced apart from the second portion 312 of the first evaporation source unit 310' with the first portion 311 of the first evaporation source unit 310' interposed therebetween. For example, the third portion 313 of the first evaporation source unit 310' can have a cuboid shape.

[0140] The second evaporation source unit 320' can include a first portion 321, a second portion 322, and a third portion 323. The second accommodation portion GV2 can be disposed inside the first portion 321 of the second evaporation source unit 320'. The second nozzle block NB2 can be disposed on the first portion 321 of the second evaporation source unit 320'. For example, the first portion 321 of the second evaporation source unit 320' can have a hollow cuboid shape.

[0141] The second portion 322 of the second evaporation source unit 320' can extend from one side of the first portion 321 of the second evaporation source unit 320'. For example, the second portion 322 of the second evaporation source unit 320' can extend from the one side of the first portion 321 of the second evaporation source unit 320' in the first direction DR1. For example, the second portion 322 of the second evaporation source unit 320' can have a cuboid shape.

[0142] The third portion 323 of the second evaporation source unit 320' can extend from another side of the first portion 321 of the second evaporation source unit 320'. For example, the third portion 323 of the second evaporation source unit 320' can extend from the other side of the first portion 321 of the second evaporation source unit 320' in a direction opposite to the first direction DR1. The third portion 323 of the second evaporation source unit 320' can be spaced apart from the second portion 322 of the second evaporation source unit 320' with the first portion 321 of the second evaporation source unit 320' interposed therebetween. For example, the third portion 323 of the second evaporation source unit 320' can have a cuboid shape.

[0143] The second portion 312 of the first evaporation source unit 310' can be in contact with the first shield 350. For example, the second portion 312 of the first evaporation source unit 310' can be in contact with the first shield 350 in a direction opposite to the first direction DR1. The first portion 311 of the first evaporation source unit 310' can be spaced apart from the first shield 350. For example, the first portion 311 of the first evaporation source unit 310' can be spaced apart from the first shield 350 in a direction opposite to the first direction DR1.

[0144] The third portion 323 of the second evaporation source unit 320' can be in contact with the first shield 350. For example, the third portion 323 of the second evaporation source unit 320' can be in contact with the first shield 350 in the first direction DR1. The first portion 321 of the second evaporation source unit 320' can be spaced apart from the first shield 350. For example, the first portion 321 of the second evaporation source unit 320' can be spaced apart from the first shield 350 in the first direction DR1.

[0145] The third evaporation source unit can have substantially the same structure as the first evaporation source unit 310' and the second evaporation source unit 320'. Also, the fourth evaporation source unit can have substantially the same structure as the first evaporation source unit 310' and the second evaporation source unit 320'.

[0146] The above has been described with reference to the illustrative embodiments of the present application, but it will be understood by those having ordinary knowledge in the art that the present application can be modified and changed in various ways without departing from the scope of the idea and the field of the present application recited in the claims.

[0147] Industrial applicability

[0148] The utility model can apply to deposition device. For example, the utility model can apply to deposition device used for manufacturing high resolution smart phone, cellular phone, smart panel, smart watch, tablet computer, vehicle navigation system, television, computer monitor, notebook computer etc.

Claims

1. A deposition apparatus characterized by comprising: Comprising: a first evaporation source unit; a second evaporation source unit spaced apart from the first evaporation source unit in a first direction; a shield arranged between the first evaporation source unit and the second evaporation source unit; and a first heater arranged inside a first housing arranged inside the first evaporation source unit.

2. The deposition apparatus according to claim 1, wherein the first housing comprises: a first-1 housing; and a first-2 housing spaced apart from the first-1 housing.

3. The deposition apparatus according to claim 2, wherein the first-1 housing and the first-2 housing are spaced apart in a second direction intersecting the first direction.

4. The deposition apparatus according to claim 3, wherein the first heater comprises: a first-1 heater arranged inside the first-1 housing; and a first-2 heater arranged inside the first-2 housing.

5. The deposition apparatus according to claim 1, wherein the first evaporation source unit comprises: a first portion having a hollow rectangular parallelepiped shape; a second portion extending from a side surface of the first portion of the first evaporation source unit in the first direction; and a third portion extending from another side surface of the first portion of the first evaporation source unit in a direction opposite to the first direction.

6. The deposition apparatus according to claim 5, wherein the second evaporation source unit comprises: a first portion having a hollow rectangular parallelepiped shape; a second portion extending from a side surface of the first portion of the second evaporation source unit in the first direction; and a third portion extending from another side surface of the first portion of the second evaporation source unit in a direction opposite to the first direction.

7. The deposition apparatus according to claim 6, wherein the shield is in contact with the second portion of the first evaporation source unit and the third portion of the second evaporation source unit.

8. The deposition apparatus according to claim 7, wherein the first portion of the first evaporation source unit and the shield are spaced apart from each other.

9. The deposition apparatus according to claim 8, wherein the first portion of the second evaporation source unit and the shield are spaced apart from each other. ​

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