A measurement assembly for measuring a deposition rate of an evaporation source, an evaporation source, a deposition apparatus and a method of measuring a set rate
By introducing a measurement component and a cooling system into the evaporation source, the accuracy and stability issues of evaporator deposition rate measurement were resolved, enabling precise control of material deposition in OLED production and improving production efficiency and product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2024-06-12
- Publication Date
- 2026-07-17
AI Technical Summary
Existing vapor deposition equipment lacks accuracy and stability in measuring deposition rates over long periods, affecting quality control in OLED production.
A measurement assembly is provided, including a measuring device and a pipe, with a cooling element connected via the pipe, for measuring the deposition rate of a vapor deposition source, and for reducing stray coating and temperature effects through a rotating orifice and a cooling system, thereby ensuring the stability and accuracy of the measuring device.
It improves the measurement stability and accuracy of the deposition rate of the vapor deposition source, reduces the thermal load and crosstalk of the measurement device, and improves the precision and efficiency of OLED production.
Smart Images
Figure CN122423344A_ABST