A system for preparing a perovskite photovoltaic cell

Abstract

The utility model relates to a kind of preparation systems of perovskite photovoltaic cell.A kind of preparation system of perovskite photovoltaic cell, including multiple work units, conveying device, feed inlet and discharge port, and the hatch being set at the feed inlet, the discharge port and adjacent two between the work unit;The multiple work units are interconnected;The multiple work units include at least one of first work unit, second work unit, third work unit and fourth work unit;The first work unit includes flash evaporation cabin, the second work unit includes annealing cabin, the third work unit includes evaporation cabin, and the fourth work unit includes deposition cabin;The conveying device, from the feed inlet sequentially through the multiple work units, and extend to the discharge port.It is a perovskite one-stop deposition and processing system, can be realized in different vacuum environment under the same equipment to complete perovskite thin film intermediate phase transition, annealing and preparation charge transport layer.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell production equipment technology, and in particular to a perovskite photovoltaic cell preparation system. Background Technology

[0002] Perovskite photovoltaic cells, as third-generation solar cells, boast advantages such as high efficiency, low cost, and a wide range of applications. Currently, the commercialization of perovskite photovoltaic cells is accelerating, and mass production has been achieved. In industrial production, the manufacturing of perovskite photovoltaic modules typically involves sequentially fabricating the following functional layers on an FTO substrate: an anode buffer layer, a perovskite layer, a cathode buffer layer, and finally, a back electrode. The entire process is usually divided into multiple independently operating process segments, with adjacent segments connected and transported via streamlines. Water and oxygen can adversely affect each process segment, interfering with perovskite film nucleation and crystallization, and impacting interfacial contact quality, thereby affecting the module's performance and stability. Furthermore, the cycle time of vacuum equipment is limited by the vacuuming time of the cavity; therefore, improving the cycle time is crucial for mass production.

[0003] Therefore, there is an urgent need to develop a new perovskite photovoltaic cell fabrication system to solve the adverse effects of water and oxygen on cell performance and stability during the production process, as well as the problem of limited cycle time of vacuum equipment. Utility Model Content

[0004] Therefore, it is necessary to provide a perovskite photovoltaic cell preparation system to address the adverse effects of water and oxygen on battery performance and stability in existing production processes, as well as the limited cycle time of vacuum equipment.

[0005] A perovskite photovoltaic cell fabrication system includes multiple working units, a conveying device, a feed inlet and a discharge outlet, and a door disposed at the feed inlet, the discharge outlet, and between two adjacent working units; the multiple working units are interconnected; the multiple working units include at least one of a first working unit, a second working unit, a third working unit, and a fourth working unit; the first working unit includes a flash evaporation chamber, the second working unit includes an annealing chamber, the third working unit includes a vapor deposition chamber, and the fourth working unit includes a deposition chamber; the conveying device passes sequentially through the multiple working units from the feed inlet and extends to the discharge outlet.

[0006] The aforementioned perovskite photovoltaic cell fabrication system is a one-stop perovskite deposition and processing system. It can complete the transition of the mesophase of the perovskite thin film, annealing, and preparation of the charge transport layer under different vacuum environments within the same equipment. This can effectively shorten cycle time, reduce cell defects, and thus improve the photoelectric performance and stability of the cell.

[0007] In one embodiment, the plurality of working units are connected in the following order along the direction from the feed inlet to the discharge outlet: the first working unit, the second working unit, the third working unit, and the fourth working unit.

[0008] In one embodiment, the plurality of working units further includes a transition unit one and a transition unit two; along the direction from the feed inlet to the discharge outlet, the plurality of working units are connected in the following order: the transition unit one, the first working unit, the second working unit, the third working unit, the fourth working unit, and the transition unit two.

[0009] In one embodiment, the hatches include a feed hatch, a first hatch, a second hatch, a third hatch, a fourth hatch, a fifth hatch, and a discharge hatch; the multiple hatches are arranged in the following order along the direction from the feed inlet to the discharge outlet: the feed hatch, the first hatch, the second hatch, the third hatch, the fourth hatch, the fifth hatch, and the discharge hatch.

[0010] In one embodiment, the first transition unit includes a first transition chamber, and the second transition unit includes a second transition chamber.

[0011] In one embodiment, the first evaporation chamber, the second evaporation chamber, the flash evaporation chamber, the annealing chamber, the vapor deposition chamber, and the deposition chamber are all sealed chambers.

[0012] In one embodiment, the first working unit further includes a first vacuum pumping device and a first vacuum breaking device, and the flash chamber is connected to the first vacuum pumping device and the first vacuum breaking device.

[0013] In one embodiment, the second working unit further includes a second vacuum pumping device, a heat dissipation device, and a first butterfly valve device, and the annealing chamber is connected to the second vacuum pumping device, the heat dissipation device, and the first butterfly valve device.

[0014] During the annealing process, the annealing chamber raises the ambient temperature, and the extremely thin gas molecules in the vacuum environment result in slow heat dissipation, which in turn affects adjacent process sections. In this invention, the annealing chamber is connected to a heat dissipation device, which remains open throughout the system's operation, effectively solving the aforementioned problems.

[0015] In one embodiment, the third working unit further includes a third vacuum device, and the vapor deposition chamber is connected to the third vacuum device.

[0016] In one embodiment, the fourth working unit further includes a fourth vacuum pumping device, a second vacuum breaking device, and a second butterfly valve device, and the deposition chamber is connected to the fourth vacuum pumping device, the second vacuum breaking device, and the second butterfly valve device.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] This invention relates to a perovskite photovoltaic cell fabrication system, a one-stop perovskite deposition and processing system capable of completing the transition of the mesophase, annealing, and preparation of the charge transport layer of perovskite thin films under different vacuum environments within the same equipment. This effectively shortens cycle time, reduces cell defects, and thus improves the photoelectric performance and stability of the cells. During the annealing process, the annealing chamber raises the external ambient temperature, and the extremely thin gas molecules in the vacuum environment result in slow heat dissipation, potentially affecting adjacent process stages. In this invention, the annealing chamber is connected to a heat dissipation device, which remains open throughout the system's operation, effectively solving the aforementioned problems. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the perovskite photovoltaic cell fabrication system in Example 1.

[0020] Explanation of reference numerals in the attached drawings: 1. First working unit; 11. Flash evaporation chamber; 12. First vacuum extraction device; 13. First vacuum breaking device; 2. Second working unit; 21. Annealing chamber; 22. Second vacuum extraction device; 23. Heat dissipation device; 24. First butterfly valve device; 3. Third working unit; 31. Evaporation chamber; 32. Third vacuum extraction device; 4. Fourth working unit; 41. Deposition chamber; 42. Fourth vacuum extraction device; 43. Second vacuum breaking device; 44. 5. Second butterfly valve device; 6. Transition unit one; 7. Transition chamber one; 8. Inlet; 9. Transition unit two; 10. Transition chamber two; 11. Outlet; 22. Conveying device; 13. First door; 14. Second door; 15. Third door; 16. Fourth door; 17. Fifth door; 18. Inlet door; 19. Outlet door; 20. Substrate one; 31. Substrate two; 42. Substrate three; 53. Substrate four; 64. Perovskite photovoltaic cell semi-finished product. Detailed Implementation

[0021] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0022] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. Furthermore, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0024] Example 1

[0025] A perovskite photovoltaic cell fabrication system, such as Figure 1 As shown, it includes multiple interconnected working units, a conveying device 7, a feed inlet 52 and a discharge outlet 62, and hatches located at the feed inlet 52, the discharge outlet 62 and between two adjacent working units; along the direction from the feed inlet 52 to the discharge outlet 62, the multiple interconnected working units are connected in the following order: transition unit 1 5, first working unit 1, second working unit 2, third working unit 3, fourth working unit 4, and transition unit 2 6; the multiple hatches are arranged in the following order: feed hatch 86, first hatch 81, second hatch 82, third hatch 83, fourth hatch 84, fifth hatch 85 and discharge hatch 87; the conveying device 7 passes through the multiple working units from the feed inlet 52 and extends to the discharge outlet 62.

[0026] Multiple working units include sealed chambers, which include at least one of flash evaporation chamber 11, annealing chamber 21, vapor deposition chamber 31 and deposition chamber 41, and may also include a transition chamber.

[0027] The transition unit 5 includes a transition compartment 51, the head end of the conveyor 7 is located inside the transition compartment 51, and extends to the adjacent working compartment through the first door 81.

[0028] The first working unit 1 includes a flash chamber 11 and a first vacuum pumping device 12 and a first vacuum breaking device 13 connected to the flash chamber 11 from the outside. The conveying device 7 passes through the flash chamber 11 and can transport the substrate 91 (perovskite wet film) into the flash chamber 11 and then transport the processed substrate out.

[0029] The second working unit 2 includes an annealing chamber 21 and a second vacuum device 22, a heat dissipation device 23 and a first butterfly valve device 24, which are respectively connected to the annealing chamber 21 from the outside. The conveying device 7 passes through the annealing chamber 21 and can transport the substrate 2 92 (perovskite mesophase) into the annealing chamber 21 and then transport the processed substrate out.

[0030] The third working unit 3 includes a vapor deposition chamber 31 and a third vacuum device 32 connected to the vapor deposition chamber 31 from the outside. The conveying device 7 passes through the vapor deposition chamber 31 and can transport the substrate 33 (perovskite dry film) into the vapor deposition chamber 31 and then transport the processed substrate out.

[0031] The fourth working unit 4 includes a deposition chamber 41 and a fourth vacuum pumping device 42, a second vacuum breaking device 43 and a second butterfly valve device 44 that are connected to the deposition chamber 41 from the outside. The conveying device 7 passes through the deposition chamber 41 and can transport the substrate 94 (second charge transport layer) into the deposition chamber 41 and then transport the processed substrate (perovskite photovoltaic cell semi-finished product 95) out.

[0032] The second transition unit 6 includes a second transition chamber 61, and the end of the conveying device 7 is disposed inside the second transition chamber 61.

[0033] Transition unit 1 5 serves as a buffer zone before substrate 1 91 (perovskite wet film) enters the working unit, transition unit 2 6 serves as a buffer zone for transporting out perovskite photovoltaic cell semi-finished product 95, first working unit 1 and second working unit 2 are used to prepare perovskite light-absorbing layer, third working unit 3 is used to prepare second charge transport layer, and fourth working unit 4 is used to prepare third charge transport layer.

[0034] The method of using the above-mentioned perovskite photovoltaic cell fabrication system includes the following steps:

[0035] 1. Initial setup: Close the feed door 86 and the discharge door 87, close the first door 81, the second door 82 and the fifth door 85, and open the third door 83 and the fourth door 84; turn on the second vacuum device 22 to evacuate the annealing chamber 21, the vapor deposition chamber 31 and the deposition chamber 41, and close it after reaching the set vacuum state; turn on the heat dissipation device 23.

[0036] 2. Flash chamber 11: Open the feed chamber door 86, place the substrate 91 (substrate / transparent conductive layer / first charge transport layer / perovskite wet film) onto the conveying device 7 in the transition chamber 51, and close the feed chamber door 86; open the first chamber door 81, turn on the conveying device 7, transport the substrate 91 into the flash chamber 11, close the first chamber door 81, and turn off the conveying device 7; turn on the first vacuum device 12 to make the gas pressure in the flash chamber 11 reach 10 Pa, prepare the perovskite mesophase, and turn off the first vacuum device.

[0037] 3. Annealing chamber 21: Open the second door 82, start the conveying device 7 to continue transporting the above-mentioned substrate 2 92 (substrate / transparent conductive layer / first charge transport layer / perovskite intermediate phase) into the annealing chamber 21, close the conveying device 7, close the second door 82 and the third door 83; anneal the perovskite intermediate layer to prepare a perovskite dry film, and stop annealing.

[0038] At the same time, the first vacuum breaking device 13 is used to reduce the pressure inside the flash chamber 11 to normal, in preparation for the next feeding cycle.

[0039] The first butterfly valve device 24 is used to adjust the vacuum level inside the annealing chamber 21.

[0040] 4. Evaporation chamber 31: Open the third door 83, turn on the conveyor 7 to continue transporting the above-mentioned substrate 33 (substrate / transparent conductive layer / first charge transport layer / perovskite dry film) into the evaporation chamber 31, turn off the conveyor 7, and close the third door 83 and the fourth door 84; turn on the third vacuum device 32 until the set vacuum degree is reached and then turn it off; perform evaporation to prepare the second charge transport layer, and stop evaporation.

[0041] 5. Deposition Chamber 41: Open the fourth door 84, start the conveyor 7 to continue transporting the above-mentioned substrate 44 (substrate / transparent conductive layer / first charge transport layer / perovskite dry film / second charge transport layer) into the deposition chamber 41, close the conveyor 7, and close the fourth door 84; open the second butterfly valve device 44, and close it after reaching the vacuum requirement; perform deposition to prepare the third charge transport layer (perovskite battery semi-finished product); use the second vacuum breaking device 43 to break the vacuum in the deposition chamber 41, then open the fifth door 85 and the discharge door 87, start the conveyor 7 to continue transporting the above-mentioned perovskite battery semi-finished product (substrate / transparent conductive layer / first charge transport layer / perovskite dry film / second charge transport layer / third charge transport layer) to the downstream section, close the conveyor 7; close the fifth door 85 and the discharge door 87, start the fourth vacuum pumping device 42 until the vacuum degree in the deposition chamber 41 is reduced to the process requirement, and then close it.

[0042] 6. End production: Turn off the heat dissipation device 23 and restore the vacuum level of all chambers to normal pressure.

[0043] The second charge transport layer can be an electron transport layer, such as C 60 Electron transport layer; the third charge transport layer can be an electron transport layer, such as a tin oxide electron transport layer.

[0044] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A system for preparing a perovskite photovoltaic cell, characterized by, It includes multiple working units, a conveying device, a feed inlet and a discharge outlet, and a door disposed at the feed inlet, the discharge outlet and between two adjacent working units; the multiple working units are interconnected. The plurality of working units includes at least one of a first working unit, a second working unit, a third working unit, and a fourth working unit; The first working unit includes a flash evaporation chamber, the second working unit includes an annealing chamber, the third working unit includes an evaporation chamber, and the fourth working unit includes a deposition chamber; The conveying device passes sequentially through the plurality of working units from the feed inlet and extends to the discharge outlet.

2. The system for the preparation of perovskite photovoltaic cells according to claim 1, characterized in that, Along the direction from the feed inlet to the discharge outlet, the multiple working units are connected in the following order: the first working unit, the second working unit, the third working unit, and the fourth working unit.

3. The system for preparing a perovskite photovoltaic cell according to claim 1, wherein The plurality of working units further includes transition unit one and transition unit two; along the direction from the feed inlet to the discharge outlet, the plurality of working units are connected in the following order: transition unit one, first working unit, second working unit, third working unit, fourth working unit and transition unit two.

4. The system for the preparation of perovskite photovoltaic cells according to claim 3, characterized in that, The hatches include a feed hatch, a first hatch, a second hatch, a third hatch, a fourth hatch, a fifth hatch, and a discharge hatch; the multiple hatches are arranged in the following order along the direction from the feed inlet to the discharge outlet: the feed hatch, the first hatch, the second hatch, the third hatch, the fourth hatch, the fifth hatch, and the discharge hatch.

5. The system for preparing a perovskite photovoltaic cell according to claim 3, wherein The first transition unit includes a first transition chamber, and the second transition unit includes a second transition chamber.

6. The system for the preparation of perovskite photovoltaic cells according to claim 5, characterized in that, The first evaporation chamber, the second evaporation chamber, the flash evaporation chamber, the annealing chamber, the vapor deposition chamber, and the deposition chamber are all sealed chambers.

7. The system for preparing a perovskite photovoltaic cell according to claim 1, wherein The first working unit further includes a first vacuum pumping device and a first vacuum breaking device, and the flash chamber is connected to the first vacuum pumping device and the first vacuum breaking device.

8. The system for preparing a perovskite photovoltaic cell according to claim 1, wherein The second working unit also includes a second vacuum pumping device, a heat dissipation device, and a first butterfly valve device. The annealing chamber is connected to the second vacuum pumping device, the heat dissipation device, and the first butterfly valve device.

9. The system for preparing a perovskite photovoltaic cell according to claim 1, wherein The third working unit also includes a third vacuum device, and the vapor deposition chamber is connected to the third vacuum device.

10. The system for preparing a perovskite photovoltaic cell according to claim 1, wherein The fourth working unit also includes a fourth vacuum pumping device, a second vacuum breaking device, and a second butterfly valve device. The sedimentation chamber is connected to the fourth vacuum pumping device, the second vacuum breaking device, and the second butterfly valve device.

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