Intelligent positioning and welding device for quartz boat assembly

Abstract

The invention discloses a quartz boat assembly intelligent positioning welding device which comprises a base, a first clamping assembly, a second clamping assembly and a welding mechanism, the first clamping assembly comprises a first sliding base, a supporting column and a clamping plate mechanism, and the clamping plate mechanism comprises a fixing disc, a first telescopic rod, a second telescopic rod, a first clamping block and a second clamping block. A test piece is clamped through a first clamping block and a second clamping block which are arranged in a first clamping assembly in a cross shape, the position of the test piece is limited on four faces, the test piece is located in the center of a clamping plate mechanism all the time, the positions of the first clamping block and the second clamping block can be changed, and then the clamping plate mechanism can clamp test pieces of different specifications; and the second clamping assembly is arranged to stably clamp groove rods of various different specifications, the positions of the groove rods can be changed after clamping so that the groove rods and the test pieces can be accurately positioned and connected in a false mode, then quartz boats of various different specifications can be accurately positioned and welded, and the welding quality and the welding efficiency of the quartz boats are effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz boat assembly and welding, and specifically to an intelligent positioning welding device for quartz boat assembly. Background Art

[0002] A quartz boat is a container or carrier made of high-purity quartz material, which has excellent optical properties, chemical stability and electrical properties. Therefore, during the semiconductor manufacturing process, as a container for carrying silicon wafers, the quartz boat can remain stable in a high-temperature environment to ensure that the silicon wafers are not contaminated or deformed.

[0003] A quartz boat is usually formed by welding a test piece and multiple groove rods. Before welding, it is usually necessary to accurately position and temporarily join the test piece and the groove rods to ensure the welding accuracy and product quality. Moreover, the temporary joining accuracy and positioning accuracy have a great impact on the welding quality of the quartz boat. Currently, the positioning of the test piece and the groove rods is usually carried out by using a clamping mechanism to clamp and position. However, the existing clamping mechanisms can generally only fix groove rods and test pieces of the same specification. There are many types of quartz boats. In terms of shape, there are cuboid-shaped and cylindrical ones. Accordingly, the shape of the test piece may be rectangular or circular. The existing clamping mechanisms cannot firmly clamp test pieces of different specifications, and the positioning with the groove rods is also inaccurate, which will affect the welding quality of the quartz boat.

[0004] Therefore, it is necessary to provide an intelligent positioning welding device for quartz boat assembly to solve the problems raised in the above background art. Summary of the Invention

[0005] To achieve the above object, the present invention provides the following technical solution: An intelligent positioning welding device for quartz boat assembly, including a base, a first clamping assembly, a second clamping assembly and a welding mechanism. Among them, a first chute is provided on the base, and two first clamping assemblies driven by a coaxial reverse screw rod are symmetrically slidably arranged in the first chute. A plurality of groups of second chutes are provided on the base along a direction perpendicular to the first chute. Two second chutes in each group of the plurality of second chutes are symmetrically arranged with respect to the first chute, and the number of groups of the second chutes is a multiple of 4. A second clamping assembly is slidably arranged in each group of the second chutes. A sliding frame is fixedly arranged on the base, and a welding mechanism is slidably arranged on the sliding frame; The first clamping assembly includes a first sliding seat, a support column and a clamping plate mechanism. Among them, the first sliding seat is slidably arranged in the first chute, a support column is fixedly arranged on the first sliding seat, and there are two clamping plate mechanisms, and the two clamping plate mechanisms are slidably connected, and one of the clamping plate mechanisms is fixedly connected to the support column.

[0006] Further, preferably, the clamping plate mechanism includes a fixed disk, a first telescopic rod, a second telescopic rod, a first clamping block, and a second clamping block. Among them, the fixed disk is symmetrically and fixedly provided with the first telescopic rods in the vertical direction, the fixed disk is symmetrically and fixedly provided with the second telescopic rods in the horizontal direction, the output end of the first telescopic rod is fixedly provided with the first clamping block, and the output end of the second telescopic rod is rotatably provided with the second clamping block.

[0007] Further, preferably, a receiving plate is slidably arranged between the two first clamping blocks at the bottom and the two second clamping blocks at the corresponding positions in the two clamping plate mechanisms and is connected by a third telescopic rod; The output end of the second telescopic rod is fixedly provided with a support plate, and a fourth telescopic rod is hinged between the support plate and the second clamping block.

[0008] Further, preferably, a pressing plate is fixedly arranged on one of the two first clamping blocks at the top in the two clamping plate mechanisms. An extension plate is slidably arranged in the pressing plate, and the lower bottom surfaces of the pressing plate and the extension plate and the upper top surface of the first clamping block are all in the same plane.

[0009] Further, preferably, the second clamping assembly includes a second sliding seat, a fifth telescopic rod, and a clamping groove mechanism. Among them, the second sliding seat is slidably arranged in the second sliding groove, the fifth telescopic rod is fixedly arranged on the second sliding seat, the output end of the fifth telescopic rod is fixedly provided with an L-shaped support rod, and the output end of the L-shaped support rod is fixedly provided with the clamping groove mechanism.

[0010] Further, preferably, the clamping groove mechanism includes a clamping seat, a clamping strip, and a deflection block. Among them, the clamping seat is fixedly arranged at the output end of the L-shaped support rod, an arc-shaped receiving groove is formed in the clamping seat, a plurality of clamping strips are arranged to slide in a circular manner in the receiving groove, the deflection blocks are symmetrically and rotatably arranged on the clamping seat, and a sixth telescopic rod is hinged between the deflection block and the clamping seat.

[0011] Further, preferably, a driving disk is rotatably arranged in the clamping seat, and a plurality of arc-shaped driving grooves are formed in the driving disk; Guide blocks are fixedly arranged at both ends of the clamping strip, and the guide blocks are clamped into the arc-shaped driving groove and slide along the arc-shaped driving groove.

[0012] Further, preferably, an arc-shaped hydraulic cavity is formed in the driving disk, an arc-shaped hydraulic rod is fixedly arranged in the clamping seat, the arc-shaped hydraulic rod slides in a sealed manner along the arc-shaped hydraulic cavity, and a cavity is formed in the arc-shaped hydraulic rod, and the cavity is connected to an external hydraulic driving device.

[0013] Compared with the prior art, the present invention provides a quartz boat assembly intelligent positioning welding device, which has the following beneficial effects: In the present invention, the test piece is clamped by the first clamping block and the second clamping block arranged in a cross shape in the first clamping assembly, and the position of the test piece is restricted on four surfaces, so that the test piece is always located at the center position of the clamping plate mechanism, which facilitates the positioning of the groove bar and the test piece. Moreover, the positions of the first clamping block and the second clamping block can be changed, so that the clamping plate mechanism can clamp test pieces of different specifications. At the same time, the second clamping assembly is provided to firmly clamp various groove bars of different specifications, and the position of the groove bar can be changed after clamping to accurately position and false-join the groove bar and the test piece. Therefore, accurate positioning and welding can be achieved for various quartz boats of different specifications, effectively improving the welding quality and welding efficiency of the quartz boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of the overall structure of the present invention; Figure 2 is a schematic diagram of the structure of the first clamping assembly in the present invention; Figure 3 is a schematic diagram of the structure of the clamping plate mechanism in the present invention; Figure 4 is a schematic diagram of the structure of the first clamping block and the pressing plate in the present invention; Figure 5 is a schematic diagram of the structure of the second clamping assembly in the present invention; Figure 6 is Figure 5 a schematic enlarged view of the structure of part A in; In the figure: 1, base; 11, first chute; 12, second chute; 13, sliding frame; 2, first clamping assembly; 21, first sliding seat; 22, support column; 23, clamping plate mechanism; 231, fixed disk; 232, first telescopic rod; 233, second telescopic rod; 234, first clamping block; 235, second clamping block; 236, receiving plate; 237, third telescopic rod; 238, support plate; 239, fourth telescopic rod; 24, pressing plate; 241, extension plate; 3, second clamping assembly; 31, second sliding seat; 32, fifth telescopic rod; 33, clamping groove mechanism; 331, clamping seat; 332, clamping strip; 333, deflecting block; 334, sixth telescopic rod; 335, driving disk; 336, arc driving groove; 337, arc hydraulic cavity; 338, arc hydraulic rod; 34, L-shaped support rod; 4, welding mechanism. DETAILED DESCRIPTION OF THE INVENTION

[0015] Please refer to Figures 1 to 6, in the embodiment of the present invention, an intelligent positioning welding device for quartz boat assembly includes a base 1, a first clamping assembly 2, a second clamping assembly 3, and a welding mechanism 4. Among them, a first chute 11 is opened on the base 1, and two first clamping assemblies 2 driven by a coaxial reverse lead screw are symmetrically and slidably arranged in the first chute 11. A plurality of second chutes 12 are opened on the base 1 along a direction perpendicular to the first chute 11. Two second chutes 12 in a plurality of second chutes 12 are symmetrically arranged with respect to the first chute 11, and the number of groups of the second chutes 12 is a multiple of 4. A second clamping assembly 3 is slidably arranged in each group of the second chutes 12. A sliding frame 13 is fixedly arranged on the base 1, and a welding mechanism 4 is slidably arranged on the sliding frame 13; The first clamping assembly 2 includes a first sliding seat 21, a support column 22, and a clamping plate mechanism 23. Among them, the first sliding seat 21 is slidably arranged in the first chute 11, a support column 22 is fixedly arranged on the first sliding seat 21, two clamping plate mechanisms 23 are configured, and the two clamping plate mechanisms 23 are slidably connected, and one of the clamping plate mechanisms 23 is fixedly connected to the support column 22; The clamping plate mechanism 23 includes a fixed disk 231, a first telescopic rod 232, a second telescopic rod 233, a first clamping block 234, and a second clamping block 235. Among them, the first telescopic rods 232 are symmetrically and fixedly arranged on the fixed disk 231 in the vertical direction, the second telescopic rods 233 are symmetrically and fixedly arranged on the fixed disk 231 in the horizontal direction, the output end of the first telescopic rod 232 is fixedly provided with the first clamping block 234, and the output end of the second telescopic rod 233 is rotatably provided with the second clamping block 235; A receiving plate 236 is slidably arranged between the two first clamping blocks 234 at the bottom and the two second clamping blocks 235 at the relative positions in the two clamping plate mechanisms 23 and is connected by a third telescopic rod 237; A support plate 238 is fixedly arranged at the output end of the second telescopic rod 233, and a fourth telescopic rod 239 is hinged between the support plate 238 and the second clamping block 235; Specifically, hinging the fourth telescopic rod 239 between the support plate 238 and the second clamping block 235 can enable the fourth telescopic rod 239 to drive the second clamping block 235 to deflect, that is, to enable the receiving plate 236 slidably connected to the second clamping block 235 to deflect, so that the receiving plate 236 can fit on the side of the test piece when facing test pieces of different shapes. For example, when the shape of the test piece is an inverted trapezoid, at this time, the two sides of the test piece are two inclined planes, and as the specification of the test piece changes, the inclination angle of this side also changes accordingly. Therefore, the fourth telescopic rod 239 is used to drive the second clamping block 235 to deflect, so that no matter how the side angle of the inverted trapezoid test piece changes, the receiving plate 236 can fit on the side of the test piece, that is, the three receiving plates 236 can all limit the test piece; One of the two clamping blocks 234 at the top of the two clamping plate mechanisms 23 is fixedly provided with a pressing plate 24. An extension plate 241 is slidably arranged in the pressing plate 24, and the lower bottom surfaces of the pressing plate 24 and the extension plate 241 and the upper top surface of the clamping block 234 are all in the same plane; The second clamping assembly 3 includes a second sliding seat 31, a fifth telescopic rod 32 and a clamping groove mechanism 33. Among them, the second sliding seat 31 is slidably arranged in the second chute 12. A fifth telescopic rod 32 is fixedly arranged on the second sliding seat 31. The output end of the fifth telescopic rod 32 is fixedly provided with an L-shaped support rod 34, and the output end of the L-shaped support rod 34 is fixedly provided with a clamping groove mechanism 33; In addition, the sliding power of the second sliding seat 31 along the second chute 12 comes from an external driving mechanism, such as a hydraulic driving mechanism, a lead screw nut mechanism and a gear rack mechanism. The L-shaped support rod 34 is arranged so that a plurality of second clamping assemblies 3 on the same side of the base 1 can be in the same horizontal position, that is, when a plurality of groove rods on one side of the base 1 are in the same vertical position, the clamping groove mechanisms 33 for receiving the groove rods can also move to the same vertical position and will not be affected by the groove rods during movement, so as to achieve the precise positioning of test pieces with different shapes and specifications and the groove rods; The clamping groove mechanism 33 includes a clamping seat 331, a clamping strip 332 and a deflection block 333. Among them, the clamping seat 331 is fixedly arranged at the output end of the L-shaped support rod 34. An arc-shaped receiving groove is formed in the clamping seat 331. A plurality of clamping strips 332 are arranged to slide in a circular manner in the receiving groove. Deflection blocks 333 are symmetrically rotatably arranged on the clamping seat 331, and a sixth telescopic rod 334 is hinged between the deflection block 333 and the clamping seat 331; It should be noted that the first telescopic rod 232, the second telescopic rod 233, the third telescopic rod 237, the fourth telescopic rod 239, the fifth telescopic rod 32 and the sixth telescopic rod 334 are all electric telescopic rods and are connected to an external control mechanism. For the positioning of the second clamping assembly 3, that is, the positioning of the groove rod, a positioning sensor and a laser emitter can be embedded in the clamping seat 331. By activating the emitter to emit laser, the position of the groove rod on the test piece can be judged. At the same time, the position of the groove rod at this time is transmitted to the external controller by using the positioning sensor. The sliding of the second sliding seat 31 and the telescopic movement of the fifth telescopic rod 32 are controlled by the external controller, so as to accurately position the groove rod and the test piece; A driving disk 335 is rotatably arranged in the clamping seat 331, and a plurality of arc-shaped driving grooves 336 are formed in the driving disk 335; Guide blocks are fixedly arranged at both ends of the clamping strip 332, and the guide blocks are clamped into the arc-shaped driving grooves 336 and are arranged to slide along the arc-shaped driving grooves 336; During implementation, the test piece is placed on the first clamping assembly 2 for clamping. When the test piece is placed on the first clamping assembly 2, the receiving plate 236 provided at the bottom of the clamping plate mechanism 23 receives the test piece. At the same time, according to the size of the test piece, the first telescopic rod 232 and the second telescopic rod 233 are driven to slide, so that the positions of the first clamping block 234 and the second clamping block 235 change, that is, the three receiving plates 236 are respectively located at the top and both sides of the test piece, that is, the three receiving plates 236 are used to limit the test piece on three surfaces according to the size of the test piece, so that the test piece is in the middle position of the clamping plate mechanism 23. Subsequently, the multiple fourth telescopic rods 239 are driven to contract, so that the two clamping plate mechanisms 23 firmly clamp the test piece. And when the two clamping plate mechanisms 23 clamp the test piece, the first telescopic rod 232 located on the top of the fixed disk 231 is driven to contract, and at the same time, the extension plate 241 is driven to protrude from the pressing plate 24 and extend to another first clamping block 234, so that the pressing plate 24 further presses on the top of the test piece, that is, the test piece is fixed on the first clamping assembly 2 in four directions. Subsequently, the groove rod to be welded is placed on the multiple second clamping assemblies 3, and the groove rod is received through the receiving groove on the clamping seat 331. And the same groove rod is received by two clamping assemblies 3. When the groove rod is placed in the receiving groove, the driving disk 335 is driven to rotate, so that the multiple clamping strips 332 slide along the clamping seat 331, so that the outer surfaces of the multiple clamping strips 332 are all in contact with the outer surface of the groove rod, that is, the multiple clamping strips 332 are used to limit the groove rod, so that the groove rod is located at the center position of the receiving groove. Subsequently, the second sliding seat 31 is driven to slide along the second sliding groove 12 and the fifth telescopic rod 32 is driven to slide telescopically, so as to change the position of the groove rod, so that the position of the groove rod corresponds to that of the test piece. Subsequently, the coaxial reverse screw rod is driven to rotate, so that the two first sliding seats 21 slide and drive the two first clamping assemblies 2 to slide, so that the two test pieces are respectively in contact with both ends of the groove rod. And during the sliding process of the first sliding seat 21, the test piece can push the groove rod to slide, so that the ends of the multiple groove rods are aligned. Subsequently, the sixth telescopic rod 334 is used to drive the deflection block 333 to deflect and press on the groove rod, that is, the groove rod is completely fixed by the deflection block 333 and the clamping strips 332. In this way, the accurate positioning and false connection of the test piece and the groove rod are completed. Subsequently, the welding mechanism 4 is used to weld the test piece and the groove rod, so as to effectively weld quartz boats of various different specifications, and the false connection positioning is accurate and the welding precision is high, effectively improving the welding quality of the quartz boat.

[0016] In this embodiment, as Figure 5 and Figure 6, an arc-shaped hydraulic cavity 337 is formed on the driving disk 335, an arc-shaped hydraulic rod 338 is fixedly arranged in the clamping seat 331, the arc-shaped hydraulic rod 338 slides in a sealed manner along the arc-shaped hydraulic cavity 337, and a cavity is formed in the arc-shaped hydraulic rod 338. The cavity is connected to an external hydraulic driving device. That is to say, only by injecting a hydraulic medium into the cavity can the pressure in the arc-shaped hydraulic cavity 337 be changed, so as to drive the arc-shaped hydraulic rod 338 to slide and drive the driving disk 335 to rotate.

[0017] In summary, when the present invention is implemented, the test piece is clamped by the first clamping blocks 234 and the second clamping blocks 235 arranged in a cross shape in the first clamping assembly 2, and the position of the test piece is restricted on four surfaces, so that the test piece is always located at the center position of the clamping plate mechanism 23, thereby facilitating the positioning of the groove bar and the test piece. Moreover, the positions of the first clamping blocks 234 and the second clamping blocks 235 can be changed, so that the clamping plate mechanism 23 can clamp test pieces of different specifications. At the same time, the second clamping assembly 3 is provided to stably clamp various groove bars of different specifications, and the position of the groove bar can be changed after clamping so that the groove bar and the test piece are accurately positioned and pseudo-connected. Therefore, accurate positioning and welding can be achieved for various quartz boats of different specifications, effectively improving the welding quality and welding efficiency of the quartz boat.

[0018] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. The intelligent positioning welding device for quartz boat assembly is characterized in that: It includes a base (1), a first clamping assembly (2), a second clamping assembly (3) and a welding mechanism (4). Among them, a first chute (11) is provided on the base (1), and two first clamping assemblies (2) driven by a coaxial reverse lead screw are symmetrically and slidably arranged in the first chute (11). A plurality of second chutes (12) are provided on the base (1) along a direction perpendicular to the first chute (11). Two second chutes (12) in the plurality of second chutes (12) are symmetrically arranged with respect to the first chute (11), and the number of groups of the second chutes (12) is a multiple of 4. A second clamping assembly (3) is slidably arranged in each group of the second chutes (12). A sliding frame (13) is fixedly arranged on the base (1), and a welding mechanism (4) is slidably arranged on the sliding frame (13); The first clamping assembly (2) includes a first sliding seat (21), a support column (22) and a clamping plate mechanism (23). Among them, the first sliding seat (21) is slidably arranged in the first chute (11), the support column (22) is fixedly arranged on the first sliding seat (21), two clamping plate mechanisms (23) are configured, and the two clamping plate mechanisms (23) are slidably connected, and one of the clamping plate mechanisms (23) is fixedly connected to the support column (22).

2. The quartz boat assembly intelligent positioning welding device according to claim 1, wherein: The clamping plate mechanism (23) includes a fixed disk (231), a first telescopic rod (232), a second telescopic rod (233), a first clamping block (234) and a second clamping block (235). Among them, the first telescopic rods (232) are symmetrically and fixedly arranged on the fixed disk (231) in the vertical direction, the second telescopic rods (233) are symmetrically and fixedly arranged on the fixed disk (231) in the horizontal direction, the output end of the first telescopic rod (232) is fixedly provided with the first clamping block (234), and the output end of the second telescopic rod (233) is rotatably provided with the second clamping block (235).

3. The quartz boat assembly intelligent positioning welding device according to claim 2, characterized in that: A receiving plate (236) is slidably arranged between the two first clamping blocks (234) at the bottom and the two second clamping blocks (235) at the relative positions in the two clamping plate mechanisms (23) and is connected by a third telescopic rod (237); A support plate (238) is fixedly arranged at the output end of the second telescopic rod (233), and a fourth telescopic rod (239) is hinged between the support plate (238) and the second clamping block (235).

4. The quartz boat assembly intelligent positioning welding device according to claim 2, wherein: A pressing plate (24) is fixedly arranged on one of the two first clamping blocks (234) at the top of the two clamping plate mechanisms (23). An extension plate (241) is slidably arranged in the pressing plate (24), and the lower bottom surfaces of the pressing plate (24) and the extension plate (241) and the upper top surface of the first clamping block (234) are all in the same plane.

5. The quartz boat assembly intelligent positioning welding device according to claim 1, wherein: The second clamping assembly (3) includes a second sliding seat (31), a fifth telescopic rod (32), and a clamping groove mechanism (33). Among them, the second sliding seat (31) is slidably arranged in the second chute (12). A fifth telescopic rod (32) is fixedly arranged on the second sliding seat (31). The output end of the fifth telescopic rod (32) is fixedly provided with an L-shaped support rod (34), and the output end of the L-shaped support rod (34) is fixedly provided with a clamping groove mechanism (33).

6. The quartz boat assembly intelligent positioning welding device according to claim 5, characterized in that: The clamping groove mechanism (33) includes a clamping seat (331), a clamping strip (332), and a deflection block (333). Among them, the clamping seat (331) is fixedly arranged at the output end of the L-shaped support rod (34). An arc-shaped receiving groove is formed in the clamping seat (331). A plurality of clamping strips (332) are arranged to slide in a circular motion in the receiving groove. The clamping seat (331) is also symmetrically rotatably provided with deflection blocks (333), and a sixth telescopic rod (334) is hinged between the deflection block (333) and the clamping seat (331).

7. The quartz boat assembly intelligent positioning welding device according to claim 6, characterized in that: A driving disk (335) is rotatably arranged in the clamping seat (331), and a plurality of arc-shaped driving grooves (336) are formed on the driving disk (335); Guide blocks are fixedly arranged at both ends of the clamping strip (332), and the guide blocks are snapped into the arc-shaped driving groove (336) and slide along the arc-shaped driving groove (336).

8. The quartz boat assembly intelligent positioning and welding device according to claim 7, characterized in that: An arc-shaped hydraulic cavity (337) is formed on the driving disk (335). An arc-shaped hydraulic rod (338) is fixedly arranged in the clamping seat (331). The arc-shaped hydraulic rod (338) slides in a sealed manner along the arc-shaped hydraulic cavity (337). A cavity is formed in the arc-shaped hydraulic rod (338), and the cavity is connected to an external hydraulic driving device.

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