End effector and substrate transfer apparatus

Abstract

The invention discloses an end effector and a substrate transfer apparatus. A specific substrate transfer apparatus includes: a robot unit mounted at an end of an arm and having an end effector supporting a substrate; and a moving unit that moves the robot unit, in which the end effector includes: a body; a support mounted on the body and supporting a lower side of the substrate; and a spark gap mounted on the body, and inducing a discharge to the outside of the body when the charge accumulated on the substrate reaches a threshold value.

Description

[0001] Cross - reference to related applications

[0002] This application claims the priority and benefit of Korean Patent Application No. 10 - 2023 - 0197509, filed with the Korean Intellectual Property Office on December 29, 2023, the entire content of which is incorporated herein by reference. Technical field

[0003] The present invention relates to an end effector and a substrate transfer device having the end effector. Background art

[0004] The semiconductor manufacturing process is a process for manufacturing semiconductor products capable of processing electrical signals, and includes a processing process (front - end process) of forming patterns on a wafer through processing steps such as oxidation, lithography, etching, ion implantation, and deposition, and a packaging step (back - end process) of manufacturing a semiconductor package in a finished shape by performing processes such as dicing, chip bonding, wiring, molding, marking, and testing on the patterned wafer. The semiconductor manufacturing process is performed at semiconductor manufacturing facilities for performing the corresponding processes, and each semiconductor manufacturing facility is configured to perform a process on a loaded wafer and then discharge the wafer. The semiconductor manufacturing facility has one or more wafer transfer robots for transferring wafers.

[0005] However, the wafer transfer robot may generate triboelectricity due to contact with different types of materials and partially damage the nanoscale patterns on the wafer surface. In particular, in the case where the wafer transfer robot is a non - contact - type driving wafer transfer robot such as a magnetic levitation, when the robot is driven, there is a high possibility of electrostatic charging, and when there are no appropriate discharge measures to prevent electrostatic charging, there is a risk of high user electric shock accidents and component damage due to sparks generated in the components of the drive power conversion unit. Summary of the invention

[0006] An object of the present invention is to provide an end effector capable of neutralizing the charge on the surface of a charged substrate and a substrate transfer device having the end effector.

[0007] An object of the present invention is to provide an end effector and a substrate transfer device having the end effector that can prevent damage to the substrate by inducing discharge to the opposite side of the substrate when the electrostatic charge accumulated in the substrate reaches a threshold voltage.

[0008] The object of the present disclosure is not limited thereto, and other objects not mentioned will be clearly understood by those of ordinary skill in the art from the following description.

[0009] According to one aspect of the present disclosure, a substrate transfer device can be provided. The substrate transfer device includes: a robot unit that is mounted at an end of an arm and has an end effector for supporting a substrate; and a moving unit that moves the robot unit. The end effector includes: a body; a support member that is mounted on the body and supports the lower side of the substrate; and a spark gap that is mounted on the body, and the spark gap induces an external discharge to the body when the charge accumulated on the substrate reaches a threshold value.

[0010] Further, the spark gap may have a pointed front end to concentrate the charge around the spark gap and induce a discharge.

[0011] Further, the spark gap may have a circular cross-section and a shape in which the size of the cross-section gradually decreases toward the end and the front end is positioned at the center.

[0012] Further, the body may include: a base portion that is connected to the end of the arm; and a finger portion that extends from the base portion and is positioned outside from the edge of the substrate to surround an installation area. The substrate is positioned in the installation area, and the support member is mounted on the inner surface of the finger portion and has a predetermined gap that surrounds the installation area as well.

[0013] Further, the spark gap may be horizontally mounted on the outer surface of the finger portion, and the spark gap is arranged such that the front end faces the opposite direction of the installation area.

[0014] Further, the end effector may further include a corona discharge electrode that generates ions through corona discharge and neutralizes the static electricity of the substrate through the ions.

[0015] Further, the corona discharge electrode may be provided as a discharge pin having a pointed front end.

[0016] Further, the front end of the discharge pin may be positioned higher than the pattern surface of the substrate.

[0017] Further, the moving unit may be driven in a wireless power transmission type.

[0018] According to another aspect of the present disclosure, an end effector for supporting a substrate can be provided. The end effector includes: a body; and a spark gap that is mounted on the body, and the spark gap induces an external discharge to the body when the charge accumulated on the substrate reaches a threshold value.

[0019] Further, the spark gap may have a pointed front end to concentrate the charge around the spark gap and induce a discharge.

[0020] Further, the spark gap may have a circular cross-section and a shape in which the size of the cross-section gradually decreases toward the end and the front end is positioned at the center.

[0021] Further, the body may include: a base portion connected to the end of the arm portion; a finger portion extending from the base portion and positioned outside from the edge of the substrate to surround the installation area, the substrate being positioned in the installation area; and a support member mounted on the inner surface of the finger portion and having a predetermined gap, the predetermined gap being the same as around the installation area.

[0022] Further, the spark gap may be horizontally mounted on the outer surface of the finger portion, and the spark gap is arranged such that the front end faces the opposite direction of the installation area.

[0023] Further, the end effector may further include a corona discharge electrode that generates ions through corona discharge and neutralizes the static electricity of the substrate through the ions.

[0024] Further, the corona discharge electrode may be provided as a discharge pin having a pointed front end.

[0025] Further, the discharge pin may be positioned higher than the pattern surface of the substrate.

[0026] According to another aspect of the present disclosure, a substrate transfer device may be provided, the substrate transfer device including: a robot unit mounted at the end of the arm portion and having an end effector for supporting the substrate; and a moving unit driven in a wireless power transmission type to move the robot unit, wherein the end effector includes: a body having a finger portion extending from a base portion connected to the end of the arm portion and positioned outside at the edge of the substrate to surround the installation area, the substrate being positioned in the installation area; a support member mounted on the inner surface of the finger portion and having a predetermined gap, the predetermined gap being the same as around the installation area; a spark gap mounted on the outer surface of the finger portion, and the spark gap induces discharge to the outside of the body when the charge accumulated on the substrate reaches a threshold value; and a corona discharge electrode mounted on the top of the finger portion, generating ions through corona discharge and neutralizing the static electricity of the substrate through the ions.

[0027] Further, the corona discharge electrode is provided as a discharge pin having a pointed front end, the spark gap has a pointed front end to concentrate the charge around the spark gap and induce discharge, and the spark gap is horizontally mounted on the outer surface of the finger portion, and the spark gap is arranged such that the pointed front end faces the opposite direction of the installation area.

[0028] Furthermore, the front end of the discharge pin is positioned higher than the patterned surface of the substrate.

[0029] According to an embodiment of the present disclosure, the corona discharge electrode generates space charges and neutralizes the charges (charge neutralization function) accumulated on an electrified body (end effector, patterned substrate), thereby simply and easily reducing the potential of the electrified object at low cost and reducing the potential difference between substrates. Therefore, it has the effect of being able to reduce the risk of arcing.

[0030] According to an embodiment of the present invention, when the threshold voltage is reached due to overcharging of the substrate, the spark gap (electrode) induces discharge to the opposite side of the installation area of the substrate, thereby having a specific effect of being able to prevent damage to the components of the substrate.

[0031] The effects of the present invention are not limited to the above effects, and those skilled in the art will clearly understand the effects not described above from the specification and the drawings. Description of the Drawings

[0032] Figure 1 is a diagram showing a magnetic levitation type substrate transfer device according to an embodiment of the present invention.

[0033] Figure 2 is a diagram showing Figure 1 a perspective view of the end effector of the shown robotic arm unit.

[0034] Figure 3 is Figure 2 a plan view of the shown end effector.

[0035] Figure 4 is a diagram showing Figure 2 an enlarged view of the main part of.

[0036] Figure 5 is a diagram showing the height difference between the corona discharge electrode and the substrate. Detailed Description of the Invention

[0037] Hereinafter, exemplary embodiments of the present invention will be described more fully hereinafter with reference to the drawings, in which exemplary embodiments of the present invention are shown. However, the present invention may be implemented differently and is not limited to the following exemplary embodiments. In the following description of the present invention, detailed descriptions of known functions and configurations incorporated herein are omitted to avoid obscuring the subject matter of the present invention. In addition, throughout the drawings, the same reference numerals are used for components having similar functions and operations.

[0038] Unless otherwise expressly stated to the contrary, the term "include" shall be understood to mean including the stated elements but not excluding any other elements. It should be understood that the terms "including" and "having" are intended to indicate the presence of the features, quantities, operations, components, and assemblies described in the specification, or combinations thereof, and do not preclude the presence or addition of one or more other features, quantities, operations, components, and assemblies, or combinations thereof.

[0039] As used herein, singular expressions include plural expressions, unless they have a clearly contrary meaning in the context. Therefore, for a clearer description, the shapes and sizes of the elements in the drawings may be exaggerated.

[0040] Terms such as first and second are used to describe various components, but these components are not limited by these terms. These terms are only used to distinguish one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component.

[0041] It should be understood that when a component is referred to as "coupled to" or "connected to" another component, the component may be directly coupled to or connected to the other component, but there may be intermediate components. In contrast, when a component is "directly coupled to" or "directly connected to" another component, it should be understood that there are no intermediate elements. Other expressions describing the relationship between components, such as "between... and... " and "immediately between... and... ", or "adjacent to... " and "directly adjacent to... " should be interpreted similarly.

[0042] The terms used herein (including technical terms and scientific and technical terms) have the same meaning as those commonly understood by those skilled in the art, unless these terms are defined differently. Terms defined in a general dictionary shall be interpreted as having a meaning that matches their meaning in the relevant technical context, unless these terms are clearly defined in the present application, in which case they should not be interpreted as ideal or overly formal meanings.

[0043] The specification provides examples of the present disclosure. In addition, the description provides embodiments of the present disclosure, and the present disclosure can be used in various other combinations, variations, and environments. That is, the present invention can be varied or modified within the scope of the present invention described herein, within the scope equivalent to the description, and / or within the scope of the knowledge or technology of the related art. The embodiments show the best state of implementing the spirit of the present invention and can be varied in various ways for the specific application fields and uses of the present invention. Therefore, the detailed description of the present disclosure is not intended to limit the present disclosure to the embodiments. In addition, the claims should also be interpreted to include other embodiments.

[0044] The present invention provides a substrate transfer device that can improve the potential difference by generating space charges between the substrate and the end effector and can prevent damage to the components of the substrate by inducing discharge to the opposite side of the installation area of the substrate when the threshold voltage is reached due to overcharging of the substrate.

[0045] Figure 1 FIG. is a diagram showing a magnetic levitation type substrate transfer device according to an embodiment of the present invention.

[0046] Referring to Figure 1 , the substrate transfer device 2400 may include a robot unit 2410 and a moving unit 2420. The substrate transfer device 2400 can be applied to various devices for performing semiconductor processing processes such as etching, coating, developing, and depositing.

[0047] The robot unit 2410 includes an arm portion 2412 and an end effector 2500 that supports the substrate to transfer the substrate. The robot unit 2410 is mounted on a moving plate 2460. The robot unit can be moved by the moving unit.

[0048] The moving unit 2420 may be a device for magnetically levitating and moving the robot unit 2410 in a first direction. For example, the moving unit 2420 may include a track structure 2430, a mover that can move in a non-contact state with the track structure, and a linear motor. In this configuration, the linear motor is an actuator that provides a propulsive force to the moving plate 2460. The linear motor may be a linear synchronous motor (LSM) using a coil (electromagnet).

[0049] Figure 2 FIG. shows Figure 1 a perspective view of the end effector of the robot unit shown in Figure 3 FIG. is Figure 2 a plan view of the end effector shown in Figure 4 FIG. shows Figure 2 an enlarged view of the main part of

[0050] Referring to Figures 2 to 4 , the end effector 2500 may include a body 2510, a support 2520, a spark gap 2530, and a corona discharge electrode 2540.

[0051] The body 2510 may include a base portion 2512 and a finger portion 2514. The base portion 2512 is the portion connected to the arm 2412 ( Figure 1 shown in). The finger portion 2514 extends from the base portion 2512. The finger portion 2514 is formed in a substantially horseshoe shape having an inner diameter larger than the diameter of the substrate, so as to surround the installation area where the substrate W is placed therein. However, the shape of the body 2510 is not limited thereto.

[0052] The support 2520 is installed inward from the body 2510, with a gap between the support 2520 and the body 2510, just like surrounding the installation area. The support 2520 supports the lower side of the substrate W. For example, the body 2510 has a vacuum channel (not shown) therein, and the vacuum channel may be connected to a vacuum pump (not shown) through a vacuum pipeline. The support 2520 is connected to the vacuum channel, and thus, they can suck and hold the lower side of the substrate W by using vacuum. Although in this embodiment, the end effector 2500 is shown as having four supports 2520, this is not intended to be limiting. Preferably, the end effector 2500 has at least three or more supports 2520, which can hold the substrate W as horizontally as possible and evenly distribute the weight of the substrate W.

[0053] A plurality of spark gaps 2530 may be installed on the body 2510. The spark gap 2530 is of the type used as a Transient Voltage Suppressor (TVS) diode. When the substrate has a high voltage due to continuous friction, breakdown (i.e., discharge) can be induced toward surrounding devices (e.g., the cooling plate). That is, the spark gap 2530 induces external discharge from the body 2510 when the charge accumulated on the substrate W reaches a threshold value. The spark gap 2530 has a pointed front end 2532 to concentrate the charge around the spark gap and induce discharge. For example, the spark gap 2530 may have a circular cross-section and may have a shape in which the size of the cross-section gradually decreases toward the end and the front end 2532 is positioned at the center. Preferably, the spark gap 2530 is horizontally installed on the outer surface 2514b of the finger portion 2514 to minimize damage to the substrate during discharge, and the spark gap 2530 is arranged such that the front end 2532 faces the opposite direction of the installation area where the substrate is located.

[0054] Therefore, the electrostatic charge around the spark gap 2530 is induced towards the spark gap 2530 and concentrated at the front end 2532. When the threshold voltage is reached, breakdown (i.e., discharge) is induced towards the surrounding devices (e.g., the cooling plate), thereby suppressing the arc on the substrate W. Further, when discharging occurs at the spark gap 2530, the damage to the substrate can be minimized.

[0055] A plurality of corona discharge electrodes 2540 can be mounted on the top 2514a of the finger portion 2514 and positioned adjacent to the substrate W. The corona discharge electrodes 2540 ionize the atmosphere around the substrate by corona discharge, and the ions generated in this way diffuse to the top of the substrate, thereby neutralizing the static electricity of the substrate W. In the drawings, the corona discharge electrodes 2540 all have the same height, but this is not intended to be limiting, and if necessary, the corona discharge electrodes can be set to have different heights.

[0056] The corona discharge electrodes 2540 can be set in a pin shape and have a pointed front end 2542. Preferably, as Figure 5 shown, the front end 2542 of the corona discharge electrode 2540 is positioned higher than the pattern surface W1 of the substrate W. Therefore, the ions generated by corona discharge can be easily supplied to the pattern surface of the substrate W. The corona discharge electrode 2540 has an electrode design that can ensure an electric field strength of 3.6 MV / m, which is the electric field strength at which corona discharge can be generated. As another example, the corona discharge electrode 2540 receives power from a power source (not shown) and can generate ions.

[0057] The corona discharge electrodes 2540 can be provided on the finger portion 2514 where the electric field strength is most concentrated. In the case of a typical ion generator, continuous maintenance is required and the ion balance must be adjusted. However, according to the corona discharge electrode 2540 of the present invention, corona discharge is only performed when the substrate is sufficiently charged. Therefore, there is a unique advantage that no maintenance is required.

[0058] Meanwhile, the spark gap 2530 and the corona discharge electrodes 2540 can be made of a high-resistance material in the range of 6 - 200 MΩ.

[0059] According to the end effector 2500 of the robotic arm unit with the above configuration, excess charges, which are many (+) or (-) polarized charges existing between semiconductor devices, accumulate on either the end effector or the substrate due to the friction generated by the contact and separation with the substrate W. In other words, there are a large number of charges with (+) and (-) polarities between semiconductor devices, and when the end effector 2500 approaches or contacts the area between semiconductor devices, the charges with (+) and (-) polarities that have not been moved move, so that polarized charges are generated and static electricity is generated. The spark gap 2530 induces a discharge to the opposite side of the substrate when the charges accumulated on the end effector 2500 reach the threshold voltage, thereby being able to prevent damage to the substrate.

[0060] The specification provides examples of the present disclosure. In addition, the description provides embodiments of the present disclosure, and the present disclosure can be used in various other combinations, variations, and environments. That is to say, the present invention can be varied or modified within the scope of the present invention described herein, within the scope equivalent to this description, and / or within the scope of the knowledge or technology of the related art. The embodiments show the best state of implementing the spirit of the present invention and can be varied in various ways for the specific application fields and uses of the present invention. Therefore, the detailed description of the present disclosure is not intended to limit the present disclosure to the embodiments. In addition, the claims should also be construed to include other embodiments.

Claims

1. A substrate conveying device, comprising: a robot unit mounted at an end of the arm and having an end effector that supports the substrate; as well as a moving unit, the moving unit moving the manipulator unit, Wherein, the end effector comprises: ontology; a support member mounted on the body and supporting a lower side of the substrate; and A spark gap is mounted on the body and induces discharge to the outside of the body when the charge accumulated on the substrate reaches a threshold value.

2. The substrate conveying device according to claim 1, wherein: The spark gap has a pointed front end to concentrate charges around the spark gap and induce discharge.

3. The substrate conveying device according to claim 2, wherein: The spark gap has a circular cross section, and has a shape in which a size of the cross section gradually decreases toward an end portion and the front end is located at the center.

4. The substrate conveying device according to claim 2, wherein: The body comprises: a base portion connected to the end of the arm; and a finger portion extending from the base portion and positioned externally from an edge of the substrate to surround a mounting area in which the substrate is positioned, and The support is mounted on the inner surface of the finger portion with a predetermined gap as around the mounting area.

5. The substrate conveying device according to claim 4, wherein: The spark gap is horizontally mounted on an outer surface of the finger portion, and the spark gap is arranged so that the front end faces in an opposite direction of the installation area.

6. The substrate conveying device according to claim 2, wherein: The end effector further includes a corona discharge electrode which generates ions by corona discharge and neutralizes static electricity of the substrate by the ions.

7. The substrate conveying device according to claim 6, wherein: The corona discharge electrode is configured as a discharge pin having a pointed front end.

8. The substrate conveying device according to claim 7, wherein: The front end of the discharge pin is positioned higher than a pattern surface of the substrate.

9. The substrate conveying device according to claim 1, wherein: The mobile unit is driven in a wireless power transmission type.

10. An end effector for supporting a substrate, the end effector comprising: ontology; as well as A spark gap is mounted on the body and induces discharge to the outside of the body when the charge accumulated on the substrate reaches a threshold value.

11. The end effector according to claim 10, wherein: The spark gap has a pointed front end to concentrate charges around the spark gap and induce discharge.

12. The end effector according to claim 11, wherein: The spark gap has a circular cross section, and has a shape in which a size of the cross section gradually decreases toward an end portion and the front end is located at the center.

13. The end effector according to claim 12, wherein: The body comprises: a base portion connected to an end of the arm; A finger portion extending from the base portion and positioned outwardly from an edge of the substrate to surround a mounting area in which the substrate is positioned; and A support member is installed on the inner surface of the finger portion and has a predetermined gap, the predetermined gap being like surrounding the mounting area.

14. The end effector according to claim 13, wherein: The spark gap is horizontally mounted on an outer surface of the finger portion, and the spark gap is disposed such that the front end faces in an opposite direction of the mounting area.

15. The end effector according to claim 11, wherein: The end effector further includes a corona discharge electrode which generates ions by corona discharge and neutralizes static electricity of the substrate by the ions.

16. The end effector according to claim 15, wherein: The corona discharge electrode is configured as a discharge pin having a pointed front end.

17. The end effector according to claim 16, wherein: The discharge pin is positioned higher than a pattern surface of the substrate.

18. A substrate conveying device, comprising: a robot unit mounted at an end of the arm and having an end effector that supports the substrate; as well as a moving unit driven by a wireless power transmission type to move the manipulator unit, Wherein, the end effector comprises: a body having a finger-like portion extending from a base portion connected to the end portion of the arm portion and positioned outside from an edge of the base plate to surround a mounting area in which the base plate is positioned; a support member mounted on the inner surface of the finger portion and having a predetermined gap, the predetermined gap being the same as surrounding the mounting area; a spark gap mounted on an outer surface of the finger portion and inducing discharge to the outside of the body when charge accumulated on the substrate reaches a threshold value; and A corona discharge electrode is installed on the top of the finger-shaped portion, generates ions by corona discharge, and neutralizes static electricity of the substrate by the ions.

19. The substrate conveying device according to claim 18, wherein: The corona discharge electrode is configured as a discharge pin having a pointed front end. The spark gap has a pointed front end to concentrate charge around the spark gap and induce discharge, and The spark gap is horizontally mounted on an outer surface of the finger portion, and the spark gap is disposed such that a front end of the tip faces in an opposite direction to the mounting area.

20. The substrate conveying device according to claim 19, wherein: The front end of the discharge pin is positioned higher than a pattern surface of the substrate.

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