Micro-hole processing device, method and system

Abstract

The present application relates to the field of micro-hole processing of hard and brittle materials, and in particular to a micro-hole processing device, method, and system. The micro-hole processing device includes: a tool assembly, which is used for vertical feed drilling, and the tool assembly includes: a power shaft, which is used to provide drilling power; a micro-needle, which is fixedly connected to the power shaft and is used to drill a workpiece; a carrier assembly, which is arranged below the tool assembly, and the carrier assembly includes: a carrier, which is used to carry the workpiece and has a degree of freedom of movement in the vertical direction relative to the tool assembly; an adjusting member, which is located below the carrier, is connected to and acts on the carrier, and can output an adjustable force Fx upward to the carrier to keep the actual drilling force F0 of the micro-needle on the workpiece constant. By dynamically adjusting the interaction force between the tool and the workpiece, the technical effect of improving the quality of micro-hole processing is achieved.

Description

Technical Field

[0001] The present application relates to the field of micro-hole processing of hard and brittle materials, and in particular to a micro-hole processing device, method and system. Background Art

[0002] Ceramic materials such as silicon carbide and aluminum nitride are widely used in the electronics and semiconductor industries due to their outstanding properties such as high thermal conductivity, high insulation, and high temperature resistance. However, due to the extremely high hardness and brittleness of ceramic materials, they are quite difficult to form and process. This processing difficulty is particularly evident in micro-hole processing. The processing of small apertures not only requires coping with the challenges of the rigid and brittle properties of the material itself, but also places almost stringent requirements on the precision and stability of the processing technology, making related processing technologies a difficult and key research topic in this field.

[0003] In the existing technology, commonly used methods for micro-hole processing of hard and brittle materials include machining center machine tool processing, ultrasonic drilling and laser processing, but these processing methods have obvious shortcomings: when drilling micro holes on machining center machine tools, the tool faces significant wear problems; laser processing is prone to cause material deformation or microcracks due to heat-affected zone problems. These conditions will lead to poor micro-hole processing quality.

[0004] Therefore, the technical problem of the prior art is that the micro-hole processing quality is poor. Summary of the Invention

[0005] The present application provides a micro-hole machining device, method and system, which achieves the technical effect of improving the micro-hole machining quality by dynamically adjusting the interaction force between the tool and the workpiece.

[0006] In the first aspect, the micro-hole processing device provided by the present application adopts the following technical solutions:

[0007] Micro-hole processing device, comprising:

[0008] A tool assembly, the tool assembly is used for vertical feed drilling, and the tool assembly includes:

[0009] A power shaft, the power shaft being used to provide drilling power;

[0010] A microneedle, wherein the microneedle is fixedly connected to the power shaft and is used for drilling a hole in a workpiece;

[0011] A carrier assembly, the carrier assembly being disposed below the tool assembly, and the carrier assembly comprising:

[0012] A carrier, the carrier being used to carry a workpiece, the carrier having a degree of freedom of movement in a vertical direction relative to the tool assembly;

[0013] An adjusting member is located below the carrier, is connected to and acts on the carrier, and can output an adjustable force Fx upward to the carrier so that the actual punching force F0 of the micro needle on the workpiece remains constant.

[0014] Preferably, the adjusting member is a voice coil motor.

[0015] Preferably, the carrier further includes a guide assembly, which is used for guiding the carrier's movable adjustment, and the guide assembly includes:

[0016] The guide rod is arranged in a vertical direction and is slidably connected to the carrier so that the carrier can be movably adjusted along the direction of the guide rod.

[0017] In the second aspect, the micro-hole processing method provided by this application adopts the following technical solution:

[0018] A micro-hole processing method, applicable to the micro-hole processing device, comprises:

[0019] Pressing the tool assembly downward onto the workpiece;

[0020] Obtaining the force F exerted by the tool assembly on the workpiece, the workpiece gravity m1g, and the carrier gravity m2g;

[0021] The voice coil motor is made to output an adjustable force Fx upward to the carrier, so that the actual punching force F0 of the micro needle on the workpiece remains constant.

[0022] Preferably, the “enabling the upward output of an adjustable force Fx on the carrier so as to keep the actual punching force F0 of the micro-needle on the workpiece constant” includes:

[0023] The voice coil motor obtains the resultant force F+(m1+m2)g on the carrier, where F is the force exerted by the tool assembly on the workpiece, m1 is the mass of the workpiece, and m2 is the mass of the carrier;

[0024] The force Fx output by the voice coil motor satisfies: Fx≥F+(m1+m2)g;

[0025] The force Fx output by the voice coil motor is adjusted so that the actual punching force F0 = F-(Fx-(m1+m2)g) of the micro needle on the workpiece remains constant.

[0026] Preferably, the output threshold of the voice coil motor is set to Fxmax; when the force output by the voice coil motor satisfies: Fx=Fxmax<F+(m1+m2)g:

[0027] The carrier is moved downward along with the movable portion of the voice coil motor, and is fed back to the tool assembly through the voice coil motor to reduce the feed rate of the tool assembly.

[0028] Preferably, in the process of “moving the carrier downward along with the movable portion of the voice coil motor”, Fx=Fxmax;

[0029] After the feed rate of the tool assembly is adjusted, the voice coil motor obtains the resultant force F+(m1+m2)g acting on the carrier and readjusts the force Fx output by the voice coil motor to keep the actual punching force F0=F-(Fx-(m1+m2)g) of the micro needle on the workpiece constant.

[0030] Preferably, obtaining an initial height L0 of the microneedle descending to the workpiece surface;

[0031] After drilling, obtaining the height Lx of the microneedle descending to the workpiece surface;

[0032] If Lw-(L0-Lx)<L, the microneedle needs to be replaced, where Lw is the initial length of the microneedle and L is the thickness of the workpiece.

[0033] In a third aspect, the micro-hole processing system provided by this application adopts the following technical solutions:

[0034] A micro-hole processing system, suitable for the micro-hole processing method, comprising:

[0035] an acquisition unit configured to acquire a resultant force F+(m1+m2)g acting on the carrier, wherein F is a force exerted by the tool assembly on the workpiece, m1 is a mass of the workpiece, and m2 is a mass of the carrier;

[0036] A control unit is configured to adjust the force Fx output by the voice coil motor based on the resultant force F+(m1+m2)g exerted on the carrier, so that the actual punching force F0 exerted by the micro-needle on the workpiece remains constant.

[0037] Preferably, the system further includes a feedback unit, wherein the feedback unit is configured as follows:

[0038] The output threshold of the voice coil motor is set to Fxmax; when the force output by the voice coil motor satisfies: Fx=Fxmax<F+(m1+m2)g: the carrier is moved downward along with the movable part of the voice coil motor, and feedback is given to the tool assembly through the voice coil motor to reduce the feed rate of the tool assembly.

[0039] In summary, this application includes at least one of the following beneficial technical effects:

[0040] The present application adjusts the force exerted on the carrier by an adjusting member so that the force exerted by the microneedle on the workpiece remains constant, which is beneficial to reducing tool wear and improving punching quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 is a schematic diagram of the micro-hole processing device described in this application;

[0042] Figure 2 is a schematic diagram of a carrier assembly of the micro-hole processing device described in this application;

[0043] Figure 3 is a schematic diagram of the micro-hole processing method described in this application;

[0044] Figure 4 It is a schematic diagram of the micro-hole processing system described in this application.

[0045] Explanation of the accompanying drawings: 100, tool assembly; 110, power shaft; 120, microneedle; 130, driving member; 200, carrier assembly; 210, carrier; 220, adjusting member; 221, voice coil motor; 2211, movable part; 230, frame; 300, guide assembly; 310, guide rod; 400, workpiece. DETAILED DESCRIPTION

[0046] The serial numbers assigned to the components herein, such as "first," "second," etc., are used solely to distinguish the objects being described and do not convey any order or technical meaning. The terms "connection" and "coupling" used in this application, unless otherwise specified, include both direct and indirect connections (couplings). In the description of this application, it should be understood that the terms "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inside," "outside," "clockwise," "counterclockwise," and the like, indicating positions or positional relationships, are based on the positions or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0047] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0048] The embodiments of the present application provide a micro-hole machining device, method, and system, which achieve the technical effect of improving the micro-hole machining quality by dynamically adjusting the interaction force between the tool and the workpiece 400.

[0049] In order to better understand the above technical solution, the following will be described in detail with reference to the accompanying drawings and specific implementation methods. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application.

[0050] The present application provides a micro-hole processing device, such as Figure 1 、 2 As shown, it includes a tool assembly 100, a carrier assembly 200 and a guide assembly 300. The tool assembly 100 is used to feed the workpiece 400 to perform a punching operation; the carrier assembly 200 is used to carry the workpiece 400 and adjust the force; and the guide assembly 300 is used to adjust the carrier 210 in a vertical direction.

[0051] like Figure 1 As shown, the tool assembly 100 is used to feed and perform a drilling operation on the workpiece 400. The tool assembly 100 is used for vertical feeding and drilling. The tool assembly 100 includes: a power shaft 110, a microneedle 120, and a driving member 130. The power shaft 110 is used to provide drilling power; the microneedle 120 is fixedly connected to the power shaft 110, and the microneedle 120 is used to drill the workpiece 400. Specifically, the tool assembly 100 is arranged in a vertical direction and has a vertical degree of freedom of movement. The tool assembly 100 is used to feed and perform drilling on the workpiece 400. The tool assembly 100 includes: a power shaft 110, a microneedle 120, and a driving member 130. The power shaft 110 is arranged in a vertical direction and is used to provide drilling power to the microneedle 120, for example, ultrasonic vibration is used as the drilling power source; in one embodiment, the power shaft 110 is a transducer. The microneedles 120 are fixedly connected to the bottom end of the power shaft 110 and are arranged vertically. The microneedles 120 serve as drilling components that directly act on the workpiece 400. The tip design of the microneedles 120 is suitable for micro-hole processing to ensure that precise micro-holes can be formed on the workpiece 400. In one embodiment, the microneedles 120 are provided in multiple groups, and the multiple groups of microneedles 120 are evenly connected to the bottom end of the power shaft 110 in a vertical direction to achieve multi-hole processing on the workpiece 400. The driving member 130 is used to drive the microneedles 120 and the power shaft 110 to rise or fall in the vertical direction. The power shaft 110 is fixedly connected to the driving member 130, so that the power shaft 110 and the microneedles 120 can rise or fall in the vertical direction. Optionally, the driving member 130 can be a linear drive structure such as a linear motor, a cylinder, an electric cylinder, a screw slider, etc.

[0052] like Figure 2As shown, the carrier assembly 200 is used to carry the workpiece 400 and adjust the applied force. The carrier assembly 200 is disposed below the tool assembly 100 and includes a carrier 210 and an adjusting member 220. The carrier 210 is used to carry the workpiece 400 and has vertical freedom of movement relative to the tool assembly 100. The adjusting member 220 is located below the carrier 210 and is connected to and acts on the carrier 210. The adjusting member 220 can output an adjustable applied force Fx upward to the carrier 210 to maintain a constant actual punching force F0 exerted by the microneedle 120 on the workpiece 400.

[0053] In other words, if Figure 2 As shown, the carrier 210 is used to carry the workpiece 400, and the carrier 210 can move in the vertical direction; the adjusting member 220 is connected to the bottom of the carrier 210, and the adjusting member 220 can apply an adjustable force Fx upward to offset the downward pressure of the tool assembly 100 on the workpiece 400, the gravity of the workpiece 400 and the gravity of the carrier 210, thereby keeping the actual punching force F0 of the microneedle 120 on the workpiece 400 constant.

[0054] In one embodiment, Figure 2 As shown, the adjustment member 220 is preferably a voice coil motor 221, which is connected to the carrier 210 and outputs a controllable upward force Fx. By acquiring the net force acting on the carrier 210 in real time (the net force is the sum of the force F exerted by the tool assembly 100 on the workpiece 400, the weight m1g of the workpiece 400, and the weight m2g of the carrier 210), the voice coil motor 221 dynamically adjusts Fx to maintain a constant actual punching force F0 = F - (Fx - (m1 + m2)g) exerted by the microneedle 120 on the workpiece 400.

[0055] like Figure 2 As shown, the guide assembly 300 is used to adjust the carrier 210 in the vertical direction. The guide assembly 300 includes a guide rod 310, which is arranged in a vertical direction and is slidably connected to the carrier 210, so that the carrier 210 can be moved and adjusted along the direction of the guide rod 310. The guide rod 310 is arranged in a vertical direction and is slidably connected to the carrier 210, so that the carrier 210 can be moved and adjusted along the direction of the guide rod 310. More specifically, the carrier 210 is slidably connected to the guide rod 310 or is sleeved on the guide rod 310. The provision of the guide rod 310 ensures the stability and accuracy of the vertical movement of the carrier 210, avoids lateral deviation, and thus ensures the contact position accuracy between the microneedle 120 and the workpiece 400. The carrier assembly 200 also includes a frame 230, to which the guide rod 310 and the adjustment member 220 can be fixedly connected.

[0056] This application also provides a micro-hole processing method, such as Figure 3As shown, the micro-hole processing device mentioned above is applicable to realizing constant force control during the micro-hole processing by dynamically adjusting the force. The processing method includes:

[0057] Placing the workpiece 400 on the carrier 210;

[0058] Pressing the tool assembly 100 downward to act on the workpiece 400;

[0059] Obtain the force F exerted by the tool assembly 100 on the workpiece 400, the weight m1g of the workpiece 400, and the weight m2g of the carrier 210, that is, obtain the resultant force F+(m1+m2)g of the carrier 210;

[0060] The voice coil motor 221 outputs an adjustable force Fx upward to the carrier 210 , so that the actual punching force F0 of the microneedle 120 on the workpiece 400 remains constant.

[0061] Furthermore, the voice coil motor 221 obtains the resultant force F+(m1+m2)g acting on the carrier 210, where F refers to the force exerted by the tool assembly 100 on the workpiece 400, m1 is the mass of the workpiece 400, and m2 is the mass of the carrier 210; the force Fx output by the voice coil motor 221 satisfies: Fx≥F+(m1+m2)g; the force Fx output by the voice coil motor 221 is adjusted to keep the actual punching force F0=F-(Fx-(m1+m2)g) of the microneedle 120 on the workpiece 400 constant.

[0062] Specifically, tool feeding: starting the tool assembly 100 to descend, so that the microneedle 120 is pressed down to contact the workpiece 400;

[0063] Obtaining force signal: The force F exerted by the tool assembly 100 on the workpiece 400 is obtained through the voice coil motor 221. Combining the gravity m1g of the workpiece 400 and the gravity m2g of the carrier 210, the resultant force on the carrier 210 is F+(m1+m2)g.

[0064] Force balance adjustment: The voice coil motor 221 outputs an upward force Fx to the carrier 210 based on the resultant force F+(m1+m2)g acting on the carrier 210, and Fx ≥ F+(m1+m2)g;

[0065] And through the formula F0=F-(Fx-(m1+m2)g), Fx is dynamically adjusted to ensure that the actual punching force F0 of the microneedle 120 on the workpiece 400 remains constant.

[0066] Furthermore, the overload protection process is also included: setting the output threshold of the voice coil motor 221 to Fxmax; when the force output by the voice coil motor 221 satisfies: Fx=Fxmax<F+(m1+m2)g: the carrier 210 is moved downward along with the movable part 2211 of the voice coil motor 221, and feedback is given to the tool assembly 100 through the voice coil motor 221 to reduce the feed rate of the tool assembly 100.

[0067] Among them, in the process of "making the carrier 210 move downward along with the movable part 2211 of the voice coil motor 221", it includes: making Fx=Fxmax; after the feed rate of the tool assembly 100 is adjusted, the voice coil motor 221 obtains the resultant force F+(m1+m2)g exerted on the carrier 210, and readjusts the force Fx output by the voice coil motor 221, so that the actual punching force F0=F-(Fx-(m1+m2)g) of the microneedle 120 on the workpiece 400 remains constant.

[0068] Specifically, the output threshold of the voice coil motor 221 is set to Fxmax based on the actual process parameters. When Fx=Fxmax<F+(m1+m2)g, the following is executed: the voice coil motor 221 itself can be set to a constant torque mode, and the carrier 210 is buffered along with the movable part 2211 of the voice coil motor 221. At this time, the force output by the voice coil motor 221 maintains Fx=Fxmax; at the same time, the voice coil motor 221 feeds back a signal to the driving part 130 of the tool assembly 100 to reduce the feed rate of the tool assembly 100; after the resultant force F+(m1+m2)g acting on the carrier 210 is reduced, Fx is readjusted to restore constant force processing, that is, F0=F-(Fx-(m1+m2)g) remains constant.

[0069] In other words, the starting height position of the microneedle 120 is fixed, the initial length of the microneedle 120 is Lw, the microneedle 120 descends to the initial height L0 of the surface of the workpiece 400, and after drilling, when drilling next time, the height of the microneedle 120 descending to the surface of the workpiece 400 is Lx, then L0-Lx is the wear amount of the microneedle 120; if Lw-(L0-Lx)<L, it means that the wear amount of the microneedle 120 exceeds the allowable range, that is, the length of the microneedle 120 cannot pass through the workpiece 400, and the microneedle 120 needs to be replaced to ensure the accuracy and quality of subsequent processing.

[0070] In other words, in the micro-hole processing method, initialization settings are first performed, including but not limited to placing the workpiece 400 on the carrier 210, obtaining the mass m1 of the workpiece 400 and the mass m2 of the carrier 210 by detection or preset parameters; and simultaneously setting the maximum output threshold Fxmax of the voice coil motor 221. The threshold setting can be determined based on factors such as the strength of the microneedle 120 and the material properties of the workpiece 400.

[0071] Next, the tool assembly 100 is pressed downward: the driving member 130 controls the microneedle 120 to press downward at a preset rate until the microneedle 120 contacts the surface of the workpiece 400; at the moment of contact, the back electromotive force of the voice coil motor 221 is used to detect the applied force F;

[0072] Then, the force Fx is dynamically adjusted: the resultant force F+(m1+m2)g acting on the carrier 210 is calculated; the voice coil motor 221 outputs an upward force Fx, satisfying Fx≥F+(m1+m2)g, and dynamically adjusts Fx based on F0=F-(Fx-(m1+m2)g) to keep F0 constant; further, if Fx reaches Fxmax, and F+(m1+m2)g>Fxmax, that is, Fx=Fxmax<F+(m1+m 2) g, triggering overload protection: the carrier 210 moves downward along with the movable portion 2211 (i.e., the mover) of the voice coil motor 221 for buffering. At the same time, the voice coil motor 221 sends a signal to the driver 130 of the tool assembly 100 to reduce the feed rate to prevent damage to the microneedle 120. When the overload is triggered, the voice coil motor 221 maintains Fx = Fxmax, and the carrier 210 moves downward smoothly under the constraint of the guide assembly 300, temporarily reducing the contact pressure between the microneedle 120 and the workpiece 400.

[0073] Finally, after reducing the feed rate, the tool assembly 100 re-detects F+(m1+m2)g, and when F+(m1+m2)g ≤Fxmax, resumes the dynamic adjustment of Fx and continues to maintain F0 constant.

[0074] In this way, the micro-hole processing method of the present application constructs a closed-loop control system of "force detection-force compensation-overload buffering", which effectively solves the core problem of unstable force control in micro-hole processing of hard and brittle materials, and significantly improves processing accuracy and reliability.

[0075] Furthermore, it also includes the microneedle 120 life detection process:

[0076] Obtaining an initial height L0 of the microneedle 120 descending to the surface of the workpiece 400;

[0077] After drilling, the height Lx of the microneedle 120 descending to the surface of the workpiece 400 is obtained;

[0078] If Lw-(L0-Lx)<L, the microneedle 120 needs to be replaced, where Lw is the initial length of the microneedle 120 and L is the thickness of the workpiece 400.

[0079] This application also provides a micro-hole processing system, which is suitable for the above processing method, such as Figure 4 As shown, it includes an acquisition unit, a control unit and a feedback unit.

[0080] The acquisition unit is configured to obtain the resultant force F+(m1+m2)g acting on the carrier 210, wherein F refers to the force exerted by the tool assembly 100 on the workpiece 400, m1 is the mass of the workpiece 400, and m2 is the mass of the carrier 210; that is, the downward force F of the tool assembly 100 on the workpiece 400, and the gravity data of the workpiece 400 and the carrier 210 are collected in real time.

[0081] The control unit is configured to adjust the force Fx output by the voice coil motor 221 based on the resultant force F+(m1+m2)g applied to the carrier 210, so that the actual punching force F0 of the microneedle 120 on the workpiece 400 remains constant; that is, based on the resultant force applied to the carrier 210, the control unit calculates the force Fx that the voice coil motor 221 needs to output, and controls the voice coil motor 221 to perform the adjustment.

[0082] The feedback unit is configured to set the output threshold of the voice coil motor 221 to Fxmax; when the force output by the voice coil motor 221 satisfies: Fx=Fxmax<F+(m1+m2)g: the carrier 210 is moved downward along with the movable portion 2211 of the voice coil motor 221, and feedback is given to the tool assembly 100 through the voice coil motor 221 to reduce the feed rate of the tool assembly 100; that is, when the output force of the voice coil motor 221 reaches the threshold Fxmax, the downward movement of the carrier 210 and the feed rate adjustment of the tool assembly 100 are triggered, forming a closed-loop control.

[0083] Although the preferred embodiments of the present application have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present application.

[0084] Obviously, those skilled in the art may make various changes and modifications to this application without departing from the spirit and scope of this application. Thus, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalents, this application is intended to include these modifications and variations.

Claims

1. Micro-hole processing device, characterized in that, A tool assembly (100) is used for vertical feed drilling, and the tool assembly (100) comprises: A power shaft (110), the power shaft (110) being used to provide drilling power; A microneedle (120), the microneedle (120) being fixedly connected to the power shaft (110), and the microneedle (120) being used to drill a hole in the workpiece (400); A carrier assembly (200), the carrier assembly (200) being arranged below the tool assembly (100), the carrier assembly (200) comprising: A carrier (210), the carrier (210) being used to carry a workpiece (400), the carrier (210) having a degree of freedom of movement in a vertical direction relative to the tool assembly (100); an adjusting member (220), the adjusting member (220) being located below the carrier (210), the adjusting member (220) being connected to and acting on the carrier (210), and the adjusting member (220) being capable of outputting an adjustable force Fx upwardly to the carrier (210), so as to keep the actual punching force F0 of the microneedle (120) on the workpiece (400) constant; The adjusting member (220) is a voice coil motor (221); The voice coil motor (221) obtains a resultant force F+(m1+m2)g acting on the carrier (210), wherein F refers to the force exerted by the tool assembly (100) on the workpiece (400), m1 is the mass of the workpiece (400), and m2 is the mass of the carrier (210); The force Fx output by the voice coil motor (221) satisfies: Fx≥F+(m1+m2)g; The force Fx output by the voice coil motor (221) is adjusted so that the actual punching force F0=F-(Fx-(m1+m2)g) of the microneedle (120) on the workpiece (400) remains constant.

2. The micro-hole processing device according to any one of claim 1, characterized in that: It also includes a guide assembly (300), the guide assembly (300) is used for the movable adjustment of the carrier (210) for guidance, and the guide assembly (300) includes: A guide rod (310), the guide rod (310) is arranged in a vertical direction, and the guide rod (310) is slidably connected to the carrier (210), so that the carrier (210) can be movably adjusted along the direction of the guide rod (310).

3. A micro-hole processing method, characterized in that: The micro-hole processing device according to claim 1 comprises: causing the tool assembly (100) to press downwardly onto the workpiece (400); Obtaining the force F of the tool assembly (100) acting on the workpiece (400), the gravity m1g of the workpiece (400), and the gravity m2g of the carrier (210); The voice coil motor (221) outputs an adjustable force Fx upward to the carrier (210), so that the actual punching force F0 of the microneedle (120) on the workpiece (400) remains constant.

4. The micro-hole processing method according to claim 3, characterized in that: The step of causing the voice coil motor (221) to output an adjustable force Fx upward to the carrier (210) so as to keep the actual punching force F0 of the microneedle (120) on the workpiece (400) constant comprises: The voice coil motor (221) obtains a resultant force F+(m1+m2)g acting on the carrier (210), wherein F refers to the force exerted by the tool assembly (100) on the workpiece (400), m1 is the mass of the workpiece (400), and m2 is the mass of the carrier (210); The force Fx output by the voice coil motor (221) satisfies: Fx≥F+(m1+m2)g; The force Fx output by the voice coil motor (221) is adjusted so that the actual punching force F0=F-(Fx-(m1+m2)g) of the microneedle (120) on the workpiece (400) remains constant.

5. The micro-hole processing method according to claim 4, characterized in that: The output threshold of the voice coil motor (221) is set to Fxmax; when the force output by the voice coil motor (221) satisfies: Fx=Fxmax<F+(m1+m2)g: The carrier (210) is moved downward along with the movable portion (2211) of the voice coil motor (221), and feedback is provided to the tool assembly (100) via the voice coil motor (221) to reduce the feed rate of the tool assembly (100).

6. The micro-hole processing method according to claim 5, characterized in that: In the process of "moving the carrier (210) downward along with the movable portion (2211) of the voice coil motor (221), Fx=Fxmax; After the feed rate of the tool assembly (100) is adjusted, the voice coil motor (221) obtains the resultant force F+(m1+m2)g acting on the carrier (210), and readjusts the force Fx output by the voice coil motor (221) so that the actual punching force F0=F-(Fx-(m1+m2)g) exerted by the microneedle (120) on the workpiece (400) remains constant.

7. The micro-hole processing method according to claim 3, characterized in that: Obtaining an initial height L0 of the microneedle (120) descending to the surface of the workpiece (400); After drilling, obtaining a height Lx of the microneedle (120) descending to the surface of the workpiece (400); If Lw-(L0-Lx)<L, the microneedle (120) needs to be replaced, where Lw is the initial length of the microneedle (120) and L is the thickness of the workpiece (400).

8. Micro-hole processing system, characterized in that, The micro-hole processing method according to claim 3 comprises: an acquisition unit, the acquisition unit being configured to acquire a resultant force F+(m1+m2)g acting on the carrier (210), wherein F refers to the force exerted by the tool assembly (100) on the workpiece (400), m1 is the mass of the workpiece (400), and m2 is the mass of the carrier (210); A control unit is configured to adjust the force Fx output by the voice coil motor (221) based on the resultant force F+(m1+m2)g applied to the carrier (210), so that the actual punching force F0 of the microneedle (120) on the workpiece (400) remains constant.

9. The micro-hole processing system according to claim 8, characterized in that: The system further includes a feedback unit, wherein the feedback unit is configured as follows: The output threshold of the voice coil motor (221) is set to Fxmax; when the force output by the voice coil motor (221) satisfies: Fx=Fxmax<F+(m1+m2)g: the carrier (210) is moved downward along with the movable portion (2211) of the voice coil motor (221), and feedback is given to the tool assembly (100) through the voice coil motor (221) to reduce the feed rate of the tool assembly (100).

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