Coating equipment

Abstract

The invention discloses coating equipment. The coating equipment comprises a process pipe, a base, a carrier and a coil. The base is arranged in the process pipe and is a conductor. The carrier is placed on the base and used for bearing a substrate, and the carrier is a conductor. The coil is wound around the periphery of the process pipe. Wherein the coil is used for introducing alternating current to generate an alternating magnetic field, and the base is used for generating eddy current under the action of the alternating magnetic field so as to heat the substrate. In this way, the heating efficiency of the coating equipment can be improved.

Description

Technical Field

[0001] This application relates to the field of coating technology, and particularly to coating equipment. Background Art

[0002] In vacuum coating equipment, in order to provide the reaction conditions required for substrate coating, it is usually necessary to heat or preheat the substrate. In related technologies, the vacuum coating equipment is heated by a resistance wire, and then the heat is conducted from the resistance wire to the substrate by means of thermal radiation. The method of heating by a resistance wire has the technical problems of slow heating speed and low heat utilization rate. Summary of the Invention

[0003] Embodiments of this application provide coating equipment that can improve the heating efficiency of the coating equipment.

[0004] Embodiments of this application provide a coating equipment. The coating equipment includes a process tube, a base, a carrier, and a coil. The base is disposed inside the process tube and is a conductor. The carrier is placed on the base and is used to carry the substrate, and the carrier is a conductor. The coil is wound around the outer periphery of the process tube. Among them, the coil is used to pass an alternating current to generate an alternating magnetic field, and the base and the carrier are used to generate eddy currents under the action of the alternating magnetic field to heat the substrate.

[0005] Optionally, the carrier includes a top wall and two opposite side walls. The two side walls are connected to the top wall. The carrier forms an opening at a position opposite to the top wall. The carrier further includes a carrying rod. The carrying rod is disposed in the opening and is connected to the two side walls; the side of the carrier with the opening is in contact with the base and closes the opening.

[0006] Optionally, the carrying rod has a plurality of tooth portions, and the tooth portions are spaced apart in the length direction of the carrying rod.

[0007] Optionally, the carrier includes a plurality of carrying rods. The two side walls are spaced apart in the width direction of the carrier. The length direction of the carrying rod is the same as the width direction of the carrier. The plurality of carrying rods are spaced apart in the length direction of the carrier.

[0008] Optionally, the carrier further includes a spacer portion. The spacer portion is disposed between the two side walls and is spaced apart from the two side walls.

[0009] Optionally, the space between the spacer portion and the side wall is used to carry the substrate, and the orthographic projection of the substrate on the spacer portion is completely located on the spacer portion.

[0010] Optionally, one side of the process tube is provided with a door and the other side is closed. The door is movably arranged to open or close the process tube; the door includes an abutting portion. An air inlet is provided on one side of the carrier close to the door. When the door is closed, the abutting portion abuts against the carrier to close the air inlet, and an air inlet channel communicating with the air inlet is provided inside the door.

[0011] Optionally, two carriers are arranged in the process tube. The two carriers are stacked in the direction of gravity and placed on the base.

[0012] Optionally, two carriers are arranged in the process tube. The two carriers are stacked in the direction of gravity and placed on the base. The opening of one of the carriers is closed by the top wall of the other carrier, and the opening of the other carrier is closed by the base.

[0013] Optionally, the coating device includes multiple groups of coils. The multiple groups of coils are arranged at intervals in the length direction of the carrier, and each group of coils is separately connected to a power supply.

[0014] Optionally, the coils are arranged in a spiral shape, or;

[0015] Each group of coils is composed of multiple groups of unit windings. The unit windings are arranged at intervals on the outer periphery of the process tube, and the multiple groups of unit windings are electrically connected.

[0016] Optionally, the coating device includes at least two layers of shielding layers. The shielding layers are arranged outside the coils. The shielding layers are insulated from each other, and each layer of shielding layer is separately grounded.

[0017] Optionally, the coating device further includes a temperature measuring component. The temperature measuring component is arranged on the base and multiple ones are arranged at intervals in the length direction of the process tube.

[0018] The beneficial effects of this application are as follows: Different from the prior art, by arranging a base in the process tube, it can be used to carry the carrier. When an alternating current is passed through the coil, the coil can generate an alternating magnetic field. Since both the carrier and the base are conductors, eddy currents can be generated in the carrier and the base under the action of the alternating magnetic field, and then a thermal effect is generated. In this way, heating of the carrier and the base can be realized. The heat conduction paths between the base and the carrier and the substrate are relatively short, and the heat of the base and the carrier can be directly radiated and conducted to the substrate in the carrier. By heating the substrate in the above manner, the heating speed is fast, the heating is uniform, and the thermal efficiency is high. Description of the Drawings

[0019] Figure 1 is a schematic structural diagram of an embodiment of the coating device of this application;

[0020] Figure 2 is Figure 1 a schematic diagram of an embodiment of the cooperation between the process tube and the coil of the coating device shown;

[0021] Figure 3 is Figure 1 a schematic diagram of another embodiment of the cooperation between the process tube and the coil of the coating device shown;

[0022] Figure 4 is Figure 1 a schematic structural diagram of the carrier in the coating device shown;

[0023] Figure 5 Yes Figure 4 Schematic diagram of a partial structure of a carrier rod in the vehicle shown;

[0024] Figure 6 Yes Figure 4 Schematic diagram of the stacked structure of the vehicle shown. Specific embodiments

[0025] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present application.

[0026] In conjunction with Figure 1 , the coating device 1 proposed in the embodiment of the present application includes a process tube 11, a base 12, a carrier 13, and a coil 10. The process tube 11 is made of an insulating material, and a heating cavity or a reaction cavity can be formed inside the process tube 11 for placing the base 12 and the carrier 13. The process tube 11 can play a role in separating its interior from the exterior, so as to enclose the heat inside the process tube 11 and reduce the interference of the external environment on the interior. The process tube 11 is made of a heat-resistant material, such as quartz. The process tube 11 can be a round tube or a square tube, and no specific limitation is made here. The coil 10 is wound around the outer periphery of the process tube 11 and is used to pass an alternating current to generate an alternating magnetic field.

[0027] The base 12 is arranged inside the process tube 11, and the base 12 can be used to carry the carrier 13. The base 12 can be spaced from the tube wall of the process tube 11. Thus, after carrying the carrier 13, the whole formed by the carrier 13 and the base 12 can be located at the middle position inside the process tube 11. In this way, the carrier 13 and the base 12 can be located at a position with a stronger magnetic field inside the process tube 11. On the other hand, due to the spacing from the tube wall, the heat dissipation of the carrier 13 and the base 12 from the tube wall can be reduced.

[0028] The carrier 13 is placed on the base 12 and is used to carry the substrate 2. The base 12 is a conductor, and the carrier 13 is also a conductor. The base 12 and the carrier 13 are used to generate eddy currents under the action of an alternating magnetic field. The base 12 and the carrier 13 will generate a thermal effect under the action of the eddy currents to heat the substrate 2. The material of the base 12 can be, for example, graphite, metal, or other materials with conductive properties, and no specific limitation is made here. Since the base 12 and the carrier 13 can directly serve as heat sources under the action of an alternating magnetic field, the heat conduction path between the base 12 and the carrier 13 and the substrate 2 is relatively short compared with the way of resistance heating radiation, and the heat of the base 12 and the carrier 13 can be directly radiated and conducted to the substrate 2 in the carrier 13. By heating the substrate 2 in the above manner, the heating speed is fast, the heating is uniform, and the thermal efficiency is high.

[0029] In some embodiments, in combination with Figure 2 , the coating device 1 includes multiple sets of coils 10. The multiple sets of coils 10 are arranged at intervals in the length direction of the carrier 13, and each set of coils 10 is separately connected to a power supply. In the length direction of the process tube 11, multiple sets of coils 10 can be arranged. Each set of coils 10 can generate an alternating magnetic field under the action of an alternating current. However, each set of coils 10 is separately connected to a power supply, that is, the current passed through each set of coils 10 and the generated magnetic field can be separately controlled, so that different thermal effects can be generated in the corresponding part of the carrier 13 and the corresponding part of the base 12 for each set of coils 10. Through the above method, the heat generated by the base 12 and the carrier 13 in the process tube 11 can be controlled in zones. In some embodiments, the zonal control of the heat can make the heating of different parts of the substrate 2 more uniform. In other embodiments, the zonal control of the heat can meet the requirements of some coating processes that require temperature differences.

[0030] In some embodiments, in combination with Figure 2 , the coil 10 is arranged in a spiral shape. The coil 10 can be spirally wound around the outer periphery of the process tube 11. The central axis of the spiral coincides with the central axis of the process tube 11. When multiple sets of coils 10 are arranged, each set of coils 10 can be arranged in a spiral shape.

[0031] In some embodiments, in combination with Figure 3 , each set of coils 10 is composed of multiple sets of unit windings 101. The unit windings 101 are arranged at intervals on the outer periphery of the process tube 11, and the multiple sets of unit windings 101 are electrically connected. Each set of unit windings 101 is formed by winding a wire. The unit winding 101 can generate an alternating magnetic field when an alternating current is passed through it. The unit winding 101 can independently generate a magnetic field. Multiple sets of unit windings 101 are arranged around the outer periphery of the process tube 11, and the magnetic fields generated by the multiple sets of unit windings 101 can be superimposed on each other. The multiple sets of unit windings 101 can be electrically connected in parallel or in series, and no specific limitation is made here.

[0032] In some embodiments, in combination with Figure 1 , the coating apparatus 1 includes at least two layers of shielding layers 15 disposed outside the coil 10. The shielding layers 15 are insulated from each other, and each layer of the shielding layer 15 is grounded separately. The shielding layer 15 can confine the magnetic field generated by the coil 10 within the coating apparatus 1, reducing the leakage of the magnetic field from the coating apparatus 1, thereby reducing the influence of the coating apparatus 1 on other devices. On the other hand, the shielding layer 15 can also play a heat insulation role, thereby playing a heat preservation role for the process tube 11. The design of the multiple layers of shielding layers 15 can shield the magnetic field multiple times, thereby minimizing the magnetic leakage of the coating apparatus 1 as much as possible. Each layer of the shielding layer 15 is grounded separately, so that the current generated by the shielding layer 15 under the alternating magnetic field can be grounded, reducing the charging of the shielding layer 15.

[0033] In some embodiments, the coating apparatus 1 further includes a housing (not shown in the figure) sleeved outside the shielding layer 15. The housing can play a role in support and heat insulation. The housing can also isolate the internal process tube 11 from the user, thereby playing a role in safety isolation.

[0034] In some embodiments, in combination with Figure 1 , the coating apparatus 1 further includes a temperature measuring component 16. The temperature measuring component 16 is disposed on the base 12 and a plurality of them are spaced apart in the length direction of the process tube 11. The temperature measuring component 16 can measure the temperatures at different positions on the base 12, thereby providing a reference for the progress of the coating process. The plurality of temperature measuring components 16 can measure the temperatures at different positions in the length direction of the process tube 11, thereby facilitating the judgment of the temperature distribution in the process tube 11 and further providing a reference for the coating process. In some embodiments, the plurality of temperature measuring components 16 are provided in one-to-one correspondence with a plurality of coil groups 10. Each group of coils 10 can independently heat a part of the base 12 and a part of the carrier 13, and each temperature measuring component 16 can detect the temperatures of the corresponding area of the base 12 and the carrier 13.

[0035] In some embodiments, in combination with Figure 4, the carrier 13 includes a top wall 131 and two side walls 132 arranged oppositely, and the two side walls 132 are connected to the top wall 131. The top wall 131 and the two side walls 132 can enclose three sides of the carrier 13, and both the top wall 131 and the side walls 132 are conductors. Under the action of an alternating magnetic field, eddy currents can be generated in both the top wall 131 and the side walls 132, serving as the heat source for heating. The carrier 13 can heat the substrate 2 placed therein in different directions, with a relatively high heating speed and fast heating efficiency. An opening 133 is formed at a position of the carrier 13 opposite to the top wall 131, and the opening 133 can be used to place the substrate 2 into the carrier 13. The carrier 13 further includes a support rod 134, which is disposed at the opening 133 and connected to the two side walls 132. The support rod 134 can support the substrate 2, so that the substrate 2 can be stably placed in the carrier 13. One side of the carrier 13 provided with the opening 133 abuts against the base 12 and closes the opening 133. Specifically, the two ends of the two side walls 132 of the carrier 13 close to the opening 133 abut against the base 12, so that the base 12 can close the opening 133. The base 12 is a conductor, and under the action of an alternating magnetic field, the base 12 can generate eddy currents as the heat source for heating. After the base 12 closes the opening 133 of the carrier 13, the substrate 2 in the carrier 13 can be heated in more directions, and the heating speed and heating efficiency are improved.

[0036] In some embodiments, in combination with Figure 5 , one side of the support rod 134 facing the top wall 131 has a plurality of teeth 1341, and the teeth 1341 are arranged at intervals in the length direction of the support rod 134. The intervals between the teeth 1341 can be used to place the substrate 2. By providing the teeth 1341, the substrate 2 can be stably supported. Optionally, the support rod 134 can also be provided with teeth 1341 on both sides, and the support rod 134 can be arranged at a part of the carrier 13 close to the top wall 131 to further support the substrate 2.

[0037] In some embodiments, the carrier 13 includes a plurality of support rods 134, the two side walls 132 are arranged at intervals in the width direction of the carrier 13, the length direction of the support rod 134 is consistent with the width direction of the carrier 13, and the plurality of support rods 134 are arranged at intervals in the length direction of the carrier 13. Arranging a plurality of support rods 134 enables the carrier 13 to carry more substrates 2 in the length direction. The spaces separated by the support rods 134 can allow the heat of the base 12 to be conducted to the inside of the carrier 13.

[0038] In some embodiments, the carrier 13 further includes a spacer 135, which is disposed between the two side walls 132 and spaced apart from the two side walls 132. The spacer 135 and the side walls 132 are used to carry the substrate 2. The substrate 2 can be placed between the side walls 132 and the spacer 135, as well as between the spacer 135 and the spacer 135. The provision of the spacer 135 can increase the structural strength of the carrier 13, enabling the carrier 13 to carry more substrates 2. Optionally, the spacer 135 is a conductor, so that the spacer 135 can also serve as a heat source for heating under the action of an alternating magnetic field. In this way, inside the carrier 13, there can also be a heat source for heating the substrate 2 between the substrates 2, so that the substrate 2 can be further heated in more directions, which is beneficial to improving the heating speed and heating efficiency.

[0039] In some embodiments, the orthographic projection of substrate 2 on spacer 135 is completely located on spacer 135. In other words, the length and width of spacer 135 are greater than the length and width of substrate 2, that is, the size of spacer 135 is larger than the size of substrate 2. This configuration enables the thermal field generated by spacer 135 to cover substrate 2, thereby avoiding the technical problem of uneven heating caused by the thermal field of spacer 135 not being able to cover substrate 2 due to the size of spacer 135 being smaller than the size of substrate 2.

[0040] In some embodiments, combined Figure 1, a door 14 is provided on one side of the process tube 11, and the other side is closed. The door 14 is movably provided and can open or close the process tube 11. The carrier 13 can be placed into the process tube 11 from the side of the process tube 11 where the door 14 is located. Specifically, the door 14 includes an abutting portion 141. When the door 14 is closed, the abutting portion 141 abuts against the carrier 13. Further, an air inlet 136 is provided on the side of the carrier 13 close to the door 14. The abutting portion 141 abuts against the carrier 13 to close the air inlet 136, and an air inlet passage communicating with the air inlet 136 is provided in the door 14. Process gas, inert gas, etc. can be introduced into the carrier 13 through the air inlet passage of the door 14. An air outlet 137 is provided on the other side of the carrier 13 opposite to the air inlet 136. In some embodiments, the side of the carrier 13 having the air outlet 137 extends out of the process tube 11 through the process tube 11 and is then connected to a pumping device. In other embodiments, the pumping device can pass through the process tube 11 and enter the interior to communicate with the air outlet 137 of the carrier 13. By providing the door 14, the air inlet passage, the air inlet 136, and the air outlet 137, gas can flow inside the carrier 13, thereby heating, cooling, or coating the substrate 2. Optionally, the abutting portion 141 is a conductor, so that when the door 14 is closed, the abutting portion 141 can also generate heat under the action of an alternating magnetic field. On the one hand, it can heat the substrate 2, and on the other hand, it can heat the introduced gas. Optionally, the abutting portion 141 can be provided with a plurality of air flow outlets communicating with the air inlet 136 of the carrier 13, so that gas can uniformly enter the carrier 13. In other words, the abutting portion 141 can function as a spray plate.

[0041] In some embodiments, in combination with Figure 6 , two carriers 13 are provided in the process tube 11. The two carriers 13 are stacked in the gravity direction and placed on the base 12. By providing a plurality of carriers 13, the loading capacity of the substrate 2 can be increased, and the above heating method in the present application can also fully heat the substrate 2 in the case of a plurality of carriers 13. The stacking method of the carriers 13 is not specifically limited herein. For example, they can be stacked by means of a bracket, or a fixing device can be provided above the process tube 11 to fix the upper carrier 13. The two carriers 13 can be in contact with each other or spaced apart from each other.

[0042] In some embodiments, two carriers 13 are arranged in the process tube 11. The two carriers 13 are stacked in the gravity direction and placed on the base 12. The opening 133 of one of the carriers 13 is closed by the top wall 131 of the other carrier 13, and the opening 133 of the other carrier 13 is closed by the base 12. In this way, the openings 133 of the two carriers 13 can be closed by conductors. Under the action of an alternating magnetic field, the heating speeds and efficiencies of the two carriers 13 are similar, and the process conditions of the two carriers 13 are also similar, which is beneficial to the coating process.

[0043] The above are only embodiments of the present application, and do not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present application.

Claims

1. A coating device, characterized in that, Comprising: A process tube; A base, disposed within the process tube, the base being a conductor; A carrier, placed on the base, for carrying a substrate, the carrier being a conductor; A coil, wound around the outer periphery of the process tube; Wherein, the coil is used to pass an alternating current to generate an alternating magnetic field, and the base and the carrier are used to generate eddy currents under the action of the alternating magnetic field to heat the substrate.

2. The coating device according to claim 1, wherein: The carrier includes a top wall and two side walls disposed opposite to each other, the two side walls being connected to the top wall, the carrier forming an opening at a position opposite to the top wall, the carrier further including a carrying rod, the carrying rod being disposed in the opening and connected to the two side walls; one side of the carrier provided with the opening abuts against the base and closes the opening.

3. The coating device according to claim 2, wherein: The carrying rod has a plurality of tooth portions, and the tooth portions are spaced apart in the length direction of the carrying rod.

4. The coating device according to claim 2, wherein: The carrier includes a plurality of the carrying rods, the two side walls are spaced apart in the width direction of the carrier, the length direction of the carrying rod is consistent with the width direction of the carrier, and the plurality of carrying rods are spaced apart in the length direction of the carrier.

5. The coating device according to claim 2, wherein: The carrier further includes a spacer portion, the spacer portion being disposed between the two side walls and spaced apart from the two side walls.

6. The coating device according to claim 5, wherein: The space between the spacer portion and the side wall is for carrying the substrate, and the orthographic projection of the substrate on the spacer portion is completely located on the spacer portion.

7. The coating device according to claim 2, wherein: One side of the process tube is provided with a door and the other side is closed, the door is movably arranged to open or close the process tube; the door includes an abutting portion, an air inlet is provided on one side of the carrier close to the door, and when the door is closed, the abutting portion abuts against the carrier to close the air inlet, and an air inlet channel communicated with the air inlet is arranged inside the door.

8. The coating device according to claim 1, wherein: Two carriers are disposed within the process tube, the two carriers are stacked in the direction of gravity and placed on the base.

9. The coating device according to claim 2, wherein: Two carriers are disposed within the process tube, the two carriers are stacked in the direction of gravity and placed on the base, wherein the opening of one of the carriers is closed by the top wall of the other carrier, and the opening of the other carrier is closed by the base.

10. The coating device according to claim 1, wherein: The coating device includes multiple groups of the coils, the multiple groups of coils are spaced apart in the length direction of the carrier, and each group of coils is separately connected to a power source.

11. The coating device according to claim 10, wherein: The coil is arranged in a spiral shape, or; Each group of the coils is composed of multiple groups of unit windings, the unit windings are arranged at intervals on the outer periphery of the process tube, and multiple groups of the unit windings are electrically connected.

12. The coating device according to claim 1, wherein: The coating device includes at least two layers of shielding layers, the shielding layers are arranged outside the coils, the shielding layers are insulated from each other, and each layer of the shielding layer is grounded separately.

13. The coating device according to claim 1, wherein: The coating device further includes a temperature measuring component, the temperature measuring component is arranged on the base and multiple temperature measuring components are arranged at intervals in the length direction of the process tube.

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