Exciting light collimating device, collimating method thereof and imaging and optical testing system

Abstract

The invention provides an exciting light collimating device, a collimating method thereof and an imaging and optical testing system. Compared with a traditional double-diaphragm collimation method, the exciting light collimation device, the collimation method thereof and the imaging and optical testing system can prevent the variable-temperature sample cavity from shielding the diaphragms, the light beam direction is adjusted through the plane mirror without depending on the diaphragm behind the sample cavity, and the problem that the sample cavity blocks the diaphragm behind the sample cavity is solved. The sample cavity does not need to be moved, so that sample deflection and shaking caused by position change of the sample cavity are avoided, experimental errors are reduced, and the experimental stability is improved. Collimation can be completed by adjusting the plane mirror, a traditional diaphragm adjusting method is simplified, and operation efficiency is improved. And the device is suitable for various experimental environments, such as other optical test systems which have high requirements on light beam collimation but limited space and have any wave band, and has wide applicability.

Description

Technical Field

[0001] The present invention belongs to the field of optical testing, and in particular relates to an excitation light collimation device, a collimation method thereof, and an imaging and optical testing system. Background Art

[0002] In variable temperature optical test systems, in order to study the optical properties of micro-nano photonic materials at different temperatures, it is often necessary to build a complex test device including a variable temperature cavity, a high-precision imaging lens, a spectral analysis module, and a highly sensitive detector. This type of system is widely used in optical research in the fields of topological materials, two-dimensional materials, high-temperature superconductors, etc., and provides important experimental support for revealing their basic physical mechanisms. In these variable temperature optical test systems, it is often necessary to use excitation light to perform spectral tests such as photoluminescence on the samples. In order to achieve collimation of the excitation light, two apertures, one in front and one behind, are usually required, and a sufficient distance between the two is maintained (usually more than half a meter) to ensure high collimation accuracy.

[0003] However, due to the limited working distance of the objective lens, the rear aperture often needs to be set behind the sample cavity. In a variable temperature test environment, the sample cavity is usually a closed variable temperature cavity. The cavity structure will block the space behind the sample cavity, making the traditional aperture alignment method difficult to implement. Current solutions mostly rely on moving the variable temperature cavity to assist in alignment, but this process may cause the sample position to deflect or jitter, affecting the stability and accuracy of the test results. Therefore, how to achieve high-precision excitation light collimation without moving the variable temperature cavity has become a key technical challenge in current variable temperature optical testing systems. Summary of the Invention

[0004] Therefore, the object of the present invention is to overcome the defects in the prior art and provide an excitation light collimation device, a collimation method thereof, an imaging and optical testing system.

[0005] Before describing the present invention, the terms used in this article are defined as follows:

[0006] The term "reference laser beam" refers to a light source used as a reference during the excitation beam alignment process. This light source, typically a laser beam of known direction and stability, helps accurately define the direction of the excitation beam. Specifically, it acts as a calibration ruler or reference, ensuring that the excitation beam propagates precisely in the intended direction during the alignment process.

[0007] The term "target excitation light" refers to the working light beam used to excite the sample to produce an optical response during optical testing. Its optical path is matched with the reference laser beam during the collimation process to achieve high-precision incident direction adjustment.

[0008] To achieve the above-mentioned object, a first aspect of the present invention provides an excitation light collimating device for use in a variable temperature environment, the excitation light collimating device comprising:

[0009] a laser for emitting a reference laser beam;

[0010] a reflector for reflecting the target excitation light and / or the reference laser beam;

[0011] a beam splitter for reflecting the target excitation light and / or the reference laser beam without blocking the light path; and

[0012] An aperture for collimating the laser light after passing through the beam splitter;

[0013] The temperature range of the variable temperature environment is 10K to 350K, preferably 12K to 300K, more preferably 15K to 294K; and / or

[0014] The upper and lower limits of the temperature of the variable temperature environment are 350K and 10K, respectively, preferably 300K and 12K, and more preferably 294K and 15K.

[0015] According to the first aspect of the present invention, the excitation light collimating device, wherein:

[0016] The laser is selected from one or more of the following: semiconductor lasers, ultrafast lasers, solid-state lasers, fiber lasers, tunable lasers, gas lasers, and dye lasers, preferably selected from one or more of the following: semiconductor lasers, ultrafast lasers, solid-state lasers, fiber lasers, and tunable lasers, more preferably semiconductor lasers or ultrafast lasers;

[0017] The reflector is a plane reflector; and / or

[0018] The beam splitter is a beam splitter that does not block the light path and can be placed in a narrow space, and is preferably selected from one or more of the following: a thin film beam splitter, a flat plate beam splitter, a cube beam splitter, a polarization beam splitter, and a dichroic beam splitter, more preferably a thin film beam splitter and / or a flat plate beam splitter.

[0019] According to the first aspect of the present invention, the excitation light collimating device, wherein:

[0020] The number of the apertures is 3 or more, preferably 4 or more, more preferably 5 or more, and the first three apertures are: a first aperture, a second aperture and a third aperture;

[0021] The number of the reflectors is 4 or more, preferably 4 to 5; and / or

[0022] The number of the beam splitters is 2 or more, preferably 2 to 3.

[0023] According to the first aspect of the present invention, the excitation light collimation device further comprises: a variable temperature sample chamber with a nanopositioning device;

[0024] Preferably, the reflector includes one or more selected from the following: a reflector for reflecting the reference laser beam, a reflector for reflecting the target excitation light, a reflector located next to the variable temperature sample chamber; and / or

[0025] Preferably, the beam splitter includes: a beam splitter for reflecting the reference laser beam and a beam splitter for reflecting the target excitation light.

[0026] According to the first aspect of the present invention, the excitation light collimating device, wherein:

[0027] The reflecting mirror located next to the variable temperature sample chamber is fixed on the nanopositioning device;

[0028] The laser generates a reference laser beam, which passes through the reflector and beam splitter for reflecting the reference laser beam, passes through the centers of the first aperture and the second aperture, and is collimated and then propagates to the reflector surface located next to the variable temperature sample chamber; and / or

[0029] The propagation direction of the reflected light of the reference laser beam passing through the reflector located next to the variable temperature sample cavity coincides with the propagation direction of the incident light of the reference laser beam incident mirror surface and is perpendicular to the reflector surface located next to the variable temperature sample cavity.

[0030] A second aspect of the present invention provides an excitation light collimation method, which performs collimation by using the excitation light collimation device described in the first aspect.

[0031] Preferably, the excitation light collimation method comprises the following steps:

[0032] (1) The laser generates a reference laser beam, which is collimated by the aperture;

[0033] (2) adjusting the angle of the reflector located next to the variable temperature sample chamber so that the mirror surface of the reflector located next to the variable temperature sample chamber is perpendicular to the propagation direction of the reference laser beam; and

[0034] (3) Turning off the reference laser beam in step (1), adjusting the target excitation light so that it is incident on the reflector for reflecting the target excitation light, and making the propagation direction of the reflected light beam perpendicular to the mirror surface of the reflector located next to the variable temperature sample chamber, thereby achieving collimation of the target excitation light.

[0035] According to the excitation light collimation method of the second aspect of the present invention, when the excitation light collimation method uses the excitation light collimation device of the first aspect for collimation, the step (1) further includes the following steps:

[0036] The reference laser beam passes through the reflecting mirror and beam splitter for reflecting the reference laser beam respectively, passes through the centers of the first aperture and the second aperture, and is collimated and then propagates to the reflecting mirror surface located next to the variable temperature sample cavity.

[0037] According to the excitation light collimation method of the second aspect of the present invention, when the excitation light collimation method uses the excitation light collimation device described in the first aspect for collimation, the step (2) further includes the following steps:

[0038] Adjust the angle of the reflector located next to the variable temperature sample chamber so that the reflected light returns along the original propagation path and passes through the centers of the first aperture, the second aperture, and the third aperture to ensure that the normal direction of the reflector is parallel to the propagation direction of the reflected light beam.

[0039] According to the excitation light collimation method of the second aspect of the present invention, when the excitation light collimation method uses the excitation light collimation device described in the first aspect for collimation, the step (3) further includes the following steps:

[0040] Turn off the reference laser beam in step (1), remove the reflector used to reflect the reference laser beam, adjust the target excitation light so that it is incident on the reflector and beam splitter used to reflect the target excitation light, and make the propagation direction of the reflected light beam perpendicular to the mirror surface of the reflector located next to the variable temperature sample chamber, and pass through the center of the first aperture, the second aperture and the third aperture, thereby achieving collimation of the target excitation light.

[0041] A third aspect of the present invention provides an optical testing system for use in a variable temperature environment, the optical testing system comprising: the excitation light collimating device described in the first aspect;

[0042] Preferably, the temperature variation range of the variable temperature environment is 10K to 350K, preferably 12K to 300K, and more preferably 15K to 294K;

[0043] Preferably, the upper and lower limits of the temperature of the variable temperature environment are 350K and 10K, preferably 300K and 12K, more preferably 294K and 15K; and / or

[0044] Preferably, the optical testing system is selected from one or more of the following: an optical testing system for topological materials, an optical testing system for two-dimensional materials, and an optical testing system for superconductors.

[0045] According to a preferred embodiment of the present invention, the excitation light collimation method for a variable temperature optical testing system of the present invention comprises the following steps:

[0046] (1) A laser beam is introduced far in front of the variable temperature sample chamber as a reference laser beam and collimated with two apertures;

[0047] (2) Place a plane reflector in the variable temperature sample chamber;

[0048] (3) adjusting the angle of the plane reflector in (2) so that its mirror surface is perpendicular to the propagation direction of the reference laser beam;

[0049] (4) Turn off the collimated light beam described in (1), adjust the target excitation light so that it is incident on the plane reflector described in (2), and make the propagation direction of the reflected light beam perpendicular to the mirror surface, thereby achieving precise collimation of the excitation light.

[0050] The excitation light collimating device for a variable temperature environment includes:

[0051] a laser for emitting a reference laser beam;

[0052] a reflecting mirror for reflecting the reference laser beam;

[0053] A beam splitter for reflecting the reference laser beam without blocking the optical path;

[0054] A reflector for reflecting target excitation light;

[0055] An aperture for collimating the laser light after passing through the beam splitter;

[0056] A beam splitter used to reflect the target laser without blocking the light path;

[0057] Wherein, the temperature variation range of the variable temperature environment is 350K~10K; and / or

[0058] The upper and lower temperature limits of the temperature variable environment are 350K and 10K respectively.

[0059] The reference laser beam is generated by a semiconductor laser and is collimated by two apertures along a preset direction and then propagates to the plane reflector surface at the variable temperature sample cavity.

[0060] The plane mirror is fixed on an ultra-precision nano-positioning device at a variable temperature sample chamber so as to precisely adjust its angle and position.

[0061] The adjustment of the excitation light is based on the propagation direction of the reflected light of the reference laser beam through the plane reflector, so that the excitation light and the reflected light of the reference laser beam coincide with each other and are strictly perpendicular to the mirror surface.

[0062] Compared with the traditional double-aperture collimation method, this method avoids the obstruction of the aperture by the variable temperature cavity housing, achieving more convenient and accurate excitation light collimation.

[0063] The method is applicable to a variable temperature optical testing system with a variable temperature chamber, including but not limited to optical testing experiments of topological materials, two-dimensional materials and high-temperature superconductors.

[0064] This method is applicable to experimental environments with limited objective lens working distance in any wavelength band, ensuring that the excitation light forms a high-quality incident beam at the variable temperature sample cavity, thereby improving the stability and reliability of the experiment.

[0065] This method is applicable to a variety of optical test systems that have high requirements for beam collimation but are subject to space constraints, improving the applicability and convenience of optical experiments.

[0066] The present invention provides a method for collimating excitation light in a variable-temperature optical testing system. The optical instruments and components required for this method include: a semiconductor laser, a plane reflector, an aperture, and a beam splitter. This method achieves high-precision beam collimation without moving the variable-temperature cavity. This avoids the difficulty of alignment caused by the rear aperture being blocked by the variable-temperature cavity, as well as the errors in experimental results caused by moving the variable-temperature cavity. This method is of great significance for improving experimental accuracy and stability.

[0067] The present invention aims to achieve high-precision beam alignment when performing excitation light collimation in a variable-temperature optical testing system without moving the variable-temperature cavity. This method introduces a collimated beam far in front of the variable-temperature sample cavity and places a plane mirror in the cavity. By adjusting the plane mirror's angle to make it perpendicular to the optical path, the excitation light is then adjusted so that its reflection from the plane mirror is perpendicular to the mirror surface, coinciding with the original reference collimated beam path. This allows precise collimation of the excitation light.

[0068] Compared with the prior art, the excitation light collimation device, collimation method, imaging and optical testing system of the present invention can have but are not limited to the following beneficial effects:

[0069] 1. Avoid the variable temperature chamber blocking the aperture: The light beam direction is adjusted by using a plane mirror without relying on the rear aperture of the variable temperature sample chamber, thus solving the problem of the variable temperature chamber blocking the rear aperture.

[0070] 2. Reduce experimental errors: There is no need to move the variable temperature chamber, which avoids sample deflection and jitter caused by changes in the position of the variable temperature chamber and improves the stability of the experiment.

[0071] 3. Easy to operate: Collimation can be completed by adjusting the plane mirror, which simplifies the traditional aperture adjustment method and improves operating efficiency.

[0072] 4. Applicable to various experimental environments: This method can be applied to other optical test systems with high requirements for beam collimation but limited space and arbitrary wavelength bands, and has wide applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0073] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, in which:

[0074] Figure 1 The optical path diagram of the excitation light collimating device of the present invention in this embodiment 1 is shown.

[0075] Figure 2 The temperature variation range of the excitation light collimating device of the present invention in Example 1 is shown.

[0076] Figure 3 The optical path diagram of the excitation light collimating device of the present invention in this embodiment 2 is shown.

[0077] Description of reference numerals:

[0078] Laser, laser; MR-1, first plane reflector; MR-2, second plane reflector; MR-3, third plane reflector; MR-4, fourth plane reflector; MR-5, fifth plane reflector; BS-1, first beam splitter; BS-2, second beam splitter; BS-3, third beam splitter; 1, first aperture; 2, second aperture; 3, third aperture; Sample, variable temperature sample chamber. DETAILED DESCRIPTION

[0079] The present invention is further described below by way of specific examples. However, it should be understood that these examples are merely provided for more detailed and specific description and are not to be construed as limiting the present invention in any form.

[0080] This section provides a general description of the materials and experimental methods used in the experiments of the present invention. Although many of the materials and procedures used to achieve the purposes of the present invention are well known in the art, the present invention is described herein in as much detail as possible. It will be understood by those skilled in the art that, unless otherwise specified, the materials and procedures used in the present invention are well known in the art.

[0081] The optical components and instruments used in the following examples are as follows:

[0082] Optical components list:

[0083]

[0084] Instrument List:

[0085] Optical components parameter Purchased from semiconductor lasers Wavelength: 532nm Changchun New Industry Optoelectronics Technology Co., Ltd. Ultra-precision nanopositioning device —— Autocube

[0086] Example 1

[0087] This embodiment is an exemplary description of the excitation light collimation device and the collimation method thereof of the present invention.

[0088] like Figure 1 As shown, the excitation light collimating device of the present invention includes:

[0089] Laser; first plane reflector MR-1, second plane reflector MR-2, third plane reflector MR-3, fourth plane reflector MR-4; fifth plane reflector MR-5, first beam splitter BS-1; second beam splitter BS-2; first aperture 1, second aperture 2, third aperture 3; and variable temperature sample chamber Sample with a nanopositioning device. The fifth plane reflector MR-5 and the second plane reflector MR-2 are reflectors for reflecting the reference laser beam, the third plane reflector MR-3 and the fourth plane reflector MR-4 are reflectors for reflecting the target excitation light, and the first plane reflector MR-1 is a reflector located next to the variable temperature sample chamber.

[0090] The laser is selected as a semiconductor laser, the reflector is selected as a plane reflector, the beam splitter is selected as a beam splitter from Thorlabs, and the aperture is selected as GCM-5702M from Daheng Optoelectronics.

[0091] Figure 1 In the specific example, the number of apertures is 3, the number of reflection mirrors is 5, and the number of beam splitters is 2.

[0092] The excitation light collimation method of the present invention comprises the following steps:

[0093] (1) A laser beam (generated by a laser) is introduced into the optical path as a reference laser beam. By adjusting the fifth plane reflector MR-5, the second plane reflector MR-2, and the second beam splitter BS-2, the reference laser beam is collimated so that it passes through the center of the first aperture 1 and the second aperture 2. Its propagation direction is consistent with the direction of the desired target excitation light, and the beam splitter does not block the subsequent optical path entering the spectrometer.

[0094] (2) placing an adjustable first plane reflector MR-1 at the variable temperature sample chamber, and adjusting the angle of the first plane reflector MR-1 using a high-precision translation stage;

[0095] (3) Observe the reflection path of the collimated reference laser beam and adjust the angle of the first plane reflector MR-1 so that the reflected light returns along the original propagation path, ensuring that the normal direction of the mirror surface is parallel to the propagation direction of the beam, that is, the reflected light passes through the centers of the first aperture 1, the second aperture 2, and the third aperture 3;

[0096] (4) After completing the adjustment of the first plane reflector MR-1, turn off the reference laser beam in step (1), i.e., remove the fifth plane reflector MR-5. Adjust the incident direction of the target excitation light by the third plane reflector MR-3, the fourth plane reflector MR-4, and the first beam splitter BS-1 so that the beam reflected by the first plane reflector MR-1 is perpendicular to the mirror surface, i.e., passes through the center of the first aperture 1, the second aperture 2, and the third aperture 3, thereby achieving collimation of the target excitation light and the first beam splitter BS-1 does not block the light path.

[0097] Through the above steps, high-precision collimation of the excitation light can be achieved under space-constrained conditions.

[0098] The excitation light collimation device and its collimation method are suitable for variable-temperature optical testing systems with variable-temperature chambers, including but not limited to optical testing experiments involving topological materials, two-dimensional materials, and high-temperature superconductors. They are also applicable to experiments in any wavelength range and with limited objective lens working distances, ensuring that the excitation light forms a high-quality incident beam at the variable-temperature sample chamber, thereby improving experimental stability and reliability. Furthermore, they are applicable to a variety of optical testing systems with high beam collimation requirements but limited space, thereby enhancing the applicability and convenience of optical experiments.

[0099] Compared with the traditional double-aperture collimation method, this method avoids the obstruction of the aperture by the variable temperature cavity housing, achieving more convenient and accurate excitation light collimation.

[0100] like Figure 2 As shown, the temperature variable environment of the excitation light collimation device and the collimation method thereof of the present invention is 10K to 350K.

[0101] Compared with the double-aperture collimation method in the prior art, the excitation light collimation device and its collimation method and the double-aperture collimation method of the present application can avoid the variable temperature chamber blocking the aperture, and use a plane mirror to adjust the light beam direction without relying on the rear aperture of the variable temperature sample chamber, thus solving the problem of the variable temperature chamber blocking the rear aperture. There is no need to move the variable temperature chamber, which avoids sample deflection and jitter caused by changes in the position of the variable temperature chamber, reduces experimental errors, and improves experimental stability. Collimation can be completed by adjusting the plane mirror, which simplifies the traditional aperture adjustment method and improves operational efficiency. It is also suitable for a variety of experimental environments, such as other optical testing systems of arbitrary wavelengths that have high requirements for beam collimation but are space-constrained, and have a wide range of applicability.

[0102] Example 2

[0103] This embodiment is an exemplary description of the excitation light collimation device and the collimation method thereof of the present invention.

[0104] like Figure 3 As shown, the excitation light collimating device of the present invention includes:

[0105] Laser; first plane reflector MR-1, second plane reflector MR-2, third plane reflector MR-3, fourth plane reflector MR-4; first beam splitter BS-1; second beam splitter BS-2; third beam splitter BS-3; first aperture 1, second aperture 2, third aperture 3; and variable temperature sample chamber Sample with a nanopositioning device. The second plane reflector MR-2 is a reflector for reflecting the reference laser beam, the third plane reflector MR-3 and the fourth plane reflector MR-4 are reflectors for reflecting the target excitation light, and the first plane reflector MR-1 is a reflector located next to the variable temperature sample chamber.

[0106] The laser is selected as a semiconductor laser, the reflector is selected as a plane reflector, the beam splitter is selected as a beam splitter from Thorlabs, and the aperture is selected as GCM-5702M from Daheng Optoelectronics.

[0107] Figure 3 In the specific example, the number of apertures is 3, the number of reflection mirrors is 4, and the number of beam splitters is 3.

[0108] The excitation light collimation method of the present invention comprises the following steps:

[0109] (1) A laser beam (generated by a laser) is introduced into the optical path as a reference laser beam. By adjusting the third beam splitter BS-3, the second plane reflector MR-2, and the second beam splitter BS-2, the reference laser beam is collimated so that it passes through the center of the first aperture 1 and the second aperture 2. The propagation direction of the reference laser beam is consistent with the direction of the desired target excitation light, and the beam splitter does not block the subsequent optical path entering the spectrometer.

[0110] (2) placing an adjustable first plane reflector MR-1 at the variable temperature sample chamber, and adjusting the angle of the first plane reflector MR-1 using a high-precision translation stage;

[0111] (3) Observe the reflection path of the collimated reference laser beam and adjust the angle of the first plane reflector MR-1 so that the reflected light returns along the original propagation path, ensuring that the normal direction of the mirror surface is parallel to the propagation direction of the beam, that is, the reflected light passes through the centers of the first aperture 1, the second aperture 2, and the third aperture 3;

[0112] (4) After the adjustment of the first plane reflector MR-1 is completed, the reference beam is converted into the target excitation light through the third beam splitter BS-3. The incident direction of the target excitation light is adjusted by the third plane reflector MR-3, the fourth plane reflector MR-4 and the first beam splitter BS-1 so that the beam after being reflected by the fifth plane reflector MR-0 is perpendicular to the mirror surface, that is, passes through the center of the first aperture 1, the second aperture 2 and the third aperture 3, thereby achieving the collimation of the target excitation light and the first beam splitter BS-1 does not block the light path.

[0113] Through the above steps, high-precision collimation of the excitation light can be achieved under space-constrained conditions.

[0114] Since this embodiment also does not need to rely on the rear aperture of the variable temperature sample chamber, it solves the problem of the variable temperature chamber blocking the rear aperture, avoids the variable temperature chamber shell blocking the aperture, and achieves more convenient and accurate excitation light collimation. Its variable temperature environment is also 10K~350K, which has the same technical effect as Example 1.

[0115] Although the effects of some embodiments are shown above, those skilled in the art should understand that, according to the concept of the present invention, other embodiments described above, whose effects are not specifically shown, or other technical solutions of the present invention not shown in the embodiments, can also achieve the following technical effects described in the Summary of the Invention, which are equivalent to those of the embodiments:

[0116] 1. Avoid the variable temperature chamber blocking the aperture: The light beam direction is adjusted by using a plane mirror without relying on the rear aperture of the variable temperature sample chamber, thus solving the problem of the variable temperature chamber blocking the rear aperture.

[0117] 2. Reduce experimental errors: There is no need to move the variable temperature chamber, which avoids sample deflection and jitter caused by changes in the position of the variable temperature chamber and improves the stability of the experiment.

[0118] 3. Easy to operate: Collimation can be completed by adjusting the plane mirror, which simplifies the traditional aperture adjustment method and improves operating efficiency.

[0119] 4. Applicable to various experimental environments: This method can be applied to other optical test systems with high requirements for beam collimation but limited space and arbitrary wavelength bands, and has wide applicability.

[0120] Although the present invention has been described to a certain extent, it is obvious that appropriate changes in various aspects can be made without departing from the spirit and scope of the present invention. It is understood that the present invention is not limited to the embodiments described, but belongs to the scope of the claims, which includes equivalent replacements of each factor described.

Claims

1. An excitation light collimating device for use in a variable temperature environment, characterized in that: The excitation light collimating device comprises: a laser for emitting a reference laser beam; a reflector for reflecting the target excitation light and / or the reference laser beam; a beam splitter for reflecting the target excitation light and / or the reference laser beam without blocking the light path; and An aperture for collimating the laser light after passing through the beam splitter; The temperature range of the variable temperature environment is 10K to 350K, preferably 12K to 300K, more preferably 15K to 294K; and / or The upper and lower limits of the temperature of the variable temperature environment are 350K and 10K, respectively, preferably 300K and 12K, and more preferably 294K and 15K.

2. The excitation light collimating device according to claim 1, wherein: The laser is selected from one or more of the following: semiconductor lasers, ultrafast lasers, solid-state lasers, fiber lasers, tunable lasers, gas lasers, and dye lasers, preferably selected from one or more of the following: semiconductor lasers, ultrafast lasers, solid-state lasers, fiber lasers, and tunable lasers, more preferably semiconductor lasers or ultrafast lasers; The reflector is a plane reflector; and / or The beam splitter is a beam splitter that does not block the light path and can be placed in a narrow space, and is preferably selected from one or more of the following: a thin film beam splitter, a flat plate beam splitter, a cube beam splitter, a polarization beam splitter, and a dichroic beam splitter, more preferably a thin film beam splitter and / or a flat plate beam splitter.

3. The excitation light collimating device according to claim 1 or 2, characterized in that: The number of the apertures is 3 or more, preferably 4 or more, more preferably 5 or more, and the first three apertures are: a first aperture, a second aperture and a third aperture; The number of the reflectors is 4 or more, preferably 4 to 5; and / or The number of the beam splitters is 2 or more, preferably 2 to 3.

4. The excitation light collimating device according to any one of claims 1 to 3, characterized in that: The excitation light collimating device further comprises: a variable temperature sample chamber with a nanopositioning device; Preferably, the reflector includes one or more selected from the following: a reflector for reflecting the reference laser beam, a reflector for reflecting the target excitation light, a reflector located next to the variable temperature sample chamber; and / or Preferably, the beam splitter includes: a beam splitter for reflecting the reference laser beam and a beam splitter for reflecting the target excitation light.

5. The excitation light collimating device according to claim 4, characterized in that: The reflecting mirror located next to the variable temperature sample chamber is fixed on the nanopositioning device; The laser generates a reference laser beam, which passes through the reflector and beam splitter for reflecting the reference laser beam, passes through the centers of the first aperture and the second aperture, and is collimated and then propagates to the reflector surface located next to the variable temperature sample chamber; and / or The propagation direction of the reflected light of the reference laser beam passing through the reflector located next to the variable temperature sample cavity coincides with the propagation direction of the incident light of the reference laser beam incident mirror surface and is perpendicular to the reflector surface located next to the variable temperature sample cavity.

6. A method for collimating excitation light, characterized in that: The excitation light collimation method is performed by using the excitation light collimation device according to any one of claims 1 to 5; Preferably, the excitation light collimation method comprises the following steps: (1) The laser generates a reference laser beam, which is collimated by the aperture; (2) adjusting the angle of the reflector located next to the variable temperature sample chamber so that the mirror surface of the reflector located next to the variable temperature sample chamber is perpendicular to the propagation direction of the reference laser beam; and (3) Turning off the reference laser beam in step (1), adjusting the target excitation light so that it is incident on the reflector for reflecting the target excitation light, and making the propagation direction of the reflected light beam perpendicular to the mirror surface of the reflector located next to the variable temperature sample chamber, thereby achieving collimation of the target excitation light.

7. The excitation light collimation method according to claim 6, characterized in that: When the excitation light collimation method uses the excitation light collimation device according to any one of claims 3 to 5 for collimation, the step (1) further includes the following steps: The reference laser beam passes through the reflecting mirror and beam splitter for reflecting the reference laser beam respectively, passes through the centers of the first aperture and the second aperture, and is collimated and then propagates to the reflecting mirror surface located next to the variable temperature sample cavity.

8. The excitation light collimation method according to claim 6 or 7, characterized in that: When the excitation light collimation method uses the excitation light collimation device according to any one of claims 3 to 5 for collimation, the step (2) further includes the following steps: Adjust the angle of the reflector located next to the variable temperature sample chamber so that the reflected light returns along the original propagation path and passes through the centers of the first aperture, the second aperture, and the third aperture to ensure that the normal direction of the reflector is parallel to the propagation direction of the reflected light beam.

9. The excitation light collimation method according to any one of claims 6 to 8, characterized in that: When the excitation light collimation method uses the excitation light collimation device according to any one of claims 3 to 5 for collimation, the step (3) further includes the following steps: Turn off the reference laser beam in step (1), remove the reflector used to reflect the reference laser beam, adjust the target excitation light so that it is incident on the reflector and beam splitter used to reflect the target excitation light, and make the propagation direction of the reflected light beam perpendicular to the mirror surface of the reflector located next to the variable temperature sample chamber, and pass through the center of the first aperture, the second aperture and the third aperture, thereby achieving collimation of the target excitation light.

10. An optical testing system for a variable temperature environment, characterized in that: The optical testing system comprises: an excitation light collimating device according to any one of claims 1 to 5; Preferably, the temperature variation range of the variable temperature environment is 10K to 350K, preferably 12K to 300K, and more preferably 15K to 294K; Preferably, the upper and lower limits of the temperature of the variable temperature environment are 350K and 10K, preferably 300K and 12K, more preferably 294K and 15K; and / or Preferably, the optical testing system is selected from one or more of the following: an optical testing system for topological materials, an optical testing system for two-dimensional materials, and an optical testing system for superconductors.

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