Aerosol deposition equipment with function of fully covering complex-shaped substrate

Abstract

The invention discloses aerosol deposition equipment with a function of fully covering a complex-shaped substrate, and relates to the technical field of aerosol deposition equipment, the aerosol deposition equipment comprises a deposition equipment main body, and a control panel, a fixed block and a flip cover which are arranged at the top end of the deposition equipment main body, the fixed block is embedded in the top end of the deposition equipment main body, and the flip cover is embedded in the fixed block. The edge of the fixing block is rotationally connected with the edge of the flip; the gravity center of a material in a complex shape deviates from the circle center of the annular groove, so that the material on the first fixing ring has a certain inclination angle, and substrate covering is conveniently conducted on the upper surface and the lower surface of a material substrate; the material substrate of the first fixing ring can be sprayed through the rotating first fixing ring and the air outlet floating up and down, so that aerosol is more evenly sprayed to the two surfaces of the material substrate, the material substrate in a complex shape can be completely covered, and the working time of the deposition equipment is short.

Description

Technical Field

[0001] The present invention relates to the technical field of aerosol deposition equipment, in particular to an aerosol deposition equipment with a function of fully covering substrates with complex shapes. Background Art

[0002] Aerosol deposition technology is an advanced process for preparing dense, high-performance ceramic or metal coatings on substrates. Its core principle is to use a carrier gas to impinge fine particles (nano- to submicron-sized) on the substrate at high speed. The mechanical energy is converted into thermal energy and localized plastic deformation to achieve solid-state deposition of the particles at room or low temperatures. Aerosol deposition equipment is irreplaceable in the field of precision ceramic coatings due to its unique room-temperature film-forming capabilities. Future development trends include multi-material co-deposition, 3D structure printing integration, and industrial-oriented large-scale production designs.

[0003] In the prior art, heated particles need to be sprayed onto the surface of the material substrate in an aerosol deposition device. However, common deposition equipment can only spray on one side of a substrate with a complex shape. If the other side of the substrate needs to be sprayed, the surface of the substrate needs to be fixed again. Multiple disassembly and assembly are troublesome and inefficient. In addition, substrates with complex shapes are arranged horizontally in the deposition device. Due to the shape, the distances from the aerosol outlet are inconsistent, which easily leads to uneven coverage of the sprayed particles. Even if more aerosol outlets are added, some places cannot be sprayed, resulting in omissions in the coverage of substrates with complex shapes. Summary of the Invention

[0004] The purpose of the present invention is to provide an aerosol deposition device with the function of full coverage of complex-shaped substrates, so as to solve the problem raised in the above-mentioned background technology: common deposition equipment can only spray one side of complex-shaped substrates, and the surface of the substrate needs to be fixed again if the other side of the substrate needs to be sprayed. Multiple disassembly and assembly are troublesome and the efficiency is relatively low. In addition, the complex-shaped substrates are horizontally arranged in the deposition device. Due to the shape, the distance from the aerosol outlet is inconsistent, which easily causes uneven coverage of the sprayed particles. Even if the aerosol outlet is increased, some places cannot be sprayed, resulting in omissions in the coverage range of the complex-shaped substrates.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] An aerosol deposition device with the function of fully covering complex-shaped substrates includes a deposition device body, and a control panel, a fixed block and a flip cover arranged at the top of the deposition device body. The fixed block is embedded in the top of the deposition device body, and the edge of the fixed block is rotatably connected to the edge of the flip cover. A placement structure is laterally arranged inside the fixed block, and the placement structure includes a pull-out groove, which is laterally opened inside the fixed block, and a pull-out plate is slidably connected inside the pull-out groove. A fixing groove is opened in the middle of the pull-out plate, and an annular groove is opened on the inner wall of the fixing groove. A first fixing ring is arranged inside the fixing groove, and two connecting pins are welded to the outer wall of the first fixing ring. The straight line where the two connecting pins are located passes through the axis of the first fixing ring. The two connecting pins are located inside the annular groove, and the ends of the two connecting pins are movably connected to the inside of the annular groove. Three fastening bolts are arranged inside the first fixing ring, and the center of the annular groove is staggered with the center of gravity of the complex-shaped material.

[0007] As a preferred technical solution of the present invention, the distance between the two connecting pin ends is adapted to the diameter of the annular groove, the geometric center of the first fixing ring corresponds to the center of the annular groove, and the three fastening bolts are arranged in a circular array.

[0008] As a preferred technical solution of the present invention, an inclination fixing structure is provided at the internal axis of the flip cover, and the inclination fixing structure includes a driving motor, which is arranged at the top axis of the flip cover, and a first bevel gear is provided at the output end of the driving motor and located inside the flip cover, and an intermediate column is integrally provided at the bottom end of the first bevel gear, and two connecting rods of different lengths are welded to the bottom edge of the intermediate column, and the two connecting rods are coplanar with the axis of the intermediate column, and the connecting rods are arranged obliquely inside the fixed block and the flip cover, and the ends of the two connecting rods are always in contact with the edge of the first fixing ring, and the first fixing ring is arranged obliquely inside the fixing groove, and the two connecting rods are used to move the first fixing ring to be arranged at a certain angle.

[0009] As a preferred technical solution of the present invention, the sum of the lengths of the two connecting rods is equal to twice the distance between the middle column and the first fixed ring, the rotation range of the top ends of the two connecting rods is adapted to the edge of the middle column, and the bottom ends of the two connecting rods are always in contact with the edge of the inclined first fixed ring.

[0010] As a preferred technical solution of the present invention, a plurality of ventilation tubes are provided at the top of the flip cover, and an aerosol blowing structure is provided inside the flip cover and outside the middle column. The aerosol blowing structure includes a second bevel gear, which is sleeved on the outside of the middle column, and the inside of the second bevel gear is rotatably connected to the middle column. An adjustment ring is welded at the bottom end of the second bevel gear, and the bottom end of the adjustment ring is curved. A second fixed ring is welded on the inner wall of the flip cover, and a circle of connecting pipes is provided inside the second fixed ring. The ventilation tubes are connected to each connecting pipe through a connecting hose, and a fixing plate is welded on the upper end of the outside of each connecting pipe. A telescopic spring is provided on the outside of each connecting pipe and between the fixing plate and the second fixing ring. An air outlet is provided at the bottom end of each connecting pipe, and each air outlet is located one circle outside the first fixed ring. The air outlet is used to blow the aerosol inside the flip cover.

[0011] As a preferred technical solution of the present invention, the aerosol blowing structure also includes a connecting sleeve, which is arranged on the side wall of the flip cover. A rotating hole is opened inside the connecting sleeve, and a rotating column is arranged inside the rotating hole. A third bevel gear is welded to the end of the rotating column, and the third bevel gear is located between the first bevel gear and the second bevel gear.

[0012] As a preferred technical solution of the present invention, the connecting sleeve is connected to the side wall of the flip cover through a thread, a limiting ring is welded on the cylindrical surface of the rotating column and the end face of the connecting sleeve, and the connecting sleeve is located between the limiting ring and the third bevel gear.

[0013] As a preferred technical solution of the present invention, the first bevel gear and the second bevel gear are both engaged with the third bevel gear, the second bevel gear and the first bevel gear rotate in opposite directions, and the bottom end of the adjustment ring is slidably connected to the top end of each connecting pipe.

[0014] As a preferred technical solution of the present invention, the first bevel gear and the second bevel gear are separated from the third bevel gear, and a circle of fixing holes is provided on the surface of the second fixing ring, and the interior of the fixing holes is slidably connected to the connecting pipe.

[0015] As a preferred technical solution of the present invention, the height difference between the lowest end of the bottom of the adjustment ring and the highest end of the bottom of the adjustment ring is less than the length of the connecting pipe, and the angle between the plane where the first fixed ring is located and the horizontal plane is adapted to the angle between the plane where each air outlet is located and the horizontal plane.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] A placement structure is provided, which can place the material base in the first fixing ring between the fixing block and the flip cover. The first fixing ring can fix materials with complex shapes. By taking advantage of the fact that the center of gravity of the complex-shaped materials deviates from the center of the annular groove, the materials on the first fixing ring have a certain inclination angle, which facilitates the base covering of the upper and lower surfaces of the material base, and the base of the complex shape will not be missed;

[0018] An inclination angle fixing structure is provided, and the rotating first bevel gear drives the two first bevel gears to rotate. The two connecting rods are always in contact with the edge of the first fixing ring, so that the inclination angle of the first fixing ring can be fixed. The two connecting rods can also drive the first fixing ring to rotate around the axis of the annular groove, so that the inclination angle of the material is in different directions, which facilitates the aerosol to cover the surface of the material base;

[0019] An aerosol blowing structure is provided. Since the bottom end of the adjustment ring is curved, the height of the air outlet of the connecting pipe is inconsistent. The air outlet can blow the internal aerosol to make it evenly distributed. The first fixed ring rotates around the axis of the annular groove to make the aerosol sprayed on the material substrate in the connecting rod more evenly.

[0020] By coordinating the inclination angle fixing structure and the aerosol blowing structure, the third bevel gear is used to drive the first bevel gear and the second bevel gear to rotate in opposite directions, so that each connecting pipe floats up and down while the connecting pipe rotates around the axis of the annular groove. The rotating first fixed ring and the up and down floating air outlet can spray the material base of the first fixed ring, so that the aerosol is sprayed more evenly on both surfaces of the material base, and the material base with a complex shape can be fully covered, and the working time of the deposition equipment is relatively short. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] To facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0022] Figure 1 This is a main structural diagram of the aerosol deposition device of the present invention with the function of fully covering complex-shaped substrates;

[0023] Figure 2 This is a schematic diagram of the interior of the fixed block and flip cover of the aerosol deposition device with the function of fully covering complex-shaped substrates of the present invention;

[0024] Figure 3 This is a schematic diagram of the placement structure of the aerosol deposition device with the function of fully covering complex-shaped substrates of the present invention;

[0025] Figure 4 This is a schematic diagram of the first fixing ring of the aerosol deposition device with the function of fully covering complex-shaped substrates according to the present invention;

[0026] Figure 5 Schematic diagram of the tilt angle fixing structure of the aerosol deposition device with the function of fully covering complex-shaped substrates according to the present invention;

[0027] Figure 6 Schematic diagram of the aerosol blowing structure of the aerosol deposition device with the function of fully covering complex-shaped substrates of the present invention;

[0028] Figure 7 Schematic diagram of the adjustment ring and connecting pipe of the aerosol deposition device with full coverage of complex-shaped substrates according to the present invention;

[0029] Figure 8 Schematic diagram of the connecting pipe and the second fixing ring of the aerosol deposition device with the function of fully covering complex-shaped substrates according to the present invention;

[0030] Figure 9 This is a schematic diagram of the third bevel gear of the aerosol deposition device with the function of fully covering complex-shaped substrates of the present invention.

[0031] In the figure: 1. Deposition equipment body; 2. Control panel; 3. Fixed block; 4. Flip cover; 5. Placement structure; 6. Inclination fixing structure; 7. Aerosol blowing structure; 8. Ventilation pipe; 51. Pull-out plate; 52. Pull-out groove; 53. Fixed groove; 54. First fixed ring; 55. Connecting pin; 56. Annular groove; 57. Fastening bolt; 61. Drive motor; 62. First bevel gear; 63. Intermediate column; 64. Connecting rod; 71. Second bevel gear; 72. Adjusting ring; 73. Second fixed ring; 74. Connecting pipe; 75. Telescopic spring; 76. Fixing hole; 77. Fixing plate; 78. Air outlet; 79. Third bevel gear; 710. Connecting sleeve; 711. Rotating hole; 712. Rotating column. DETAILED DESCRIPTION

[0032] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0033] Example 1:

[0034] See also Figure 1 - Figure 4As shown, an aerosol deposition device with the function of fully covering substrates of complex shapes includes a deposition device body 1, and a control panel 2, a fixed block 3 and a flip cover 4 arranged at the top of the deposition device body 1. The fixed block 3 is embedded in the top of the deposition device body 1, and the edge of the fixed block 3 is rotatably connected to the edge of the flip cover 4. The material to be covered with aerosol is placed inside the fixed block 3, and the relevant parameters are debugged through the control panel 2, and the fixed block 3 and the flip cover 4 are closed, so that aerosol can be sprayed out from the fixed block 3 and the flip cover 4 of the deposition device body 1. A circle of aerosol outlets is adapted to the position of the first fixed ring 54, so that a thin layer of aerosol can be deposited on the surface of the material between the fixed block 3 and the flip cover 4. A placement structure 5 is horizontally arranged inside the fixed block 3, and the placement structure 5 includes a pull-out groove 52. The pull-out groove 52 is horizontally opened inside the fixed block 3, and the pull-out plate 51 is slidably connected inside the pull-out groove 52. The pull-out plate 51 slides along the inside of the pull-out groove 52 of the fixed block 3, so that the pull-out The pull plate 51 is taken out for cleaning. A fixing groove 53 is provided in the middle of the pull plate 51, and an annular groove 56 is provided on the inner wall of the fixing groove 53. A first fixing ring 54 is provided inside the fixing groove 53, and two connecting pins 55 are welded to the outer wall of the first fixing ring 54. The straight line where the two connecting pins 55 are located passes through the axis of the first fixing ring 54. The two connecting pins 55 are located at the quadrant points of the first fixing ring 54, and the two connecting pins 55 are located inside the annular groove 56. The ends of the two connecting pins 55 are movably connected to the inside of the annular groove 56. Since the diameter of the annular groove 56 is adapted to the spacing between the two connecting pins 55, the two connecting pins 55 can be located at any diameter position in the annular groove 56. Three fastening bolts 57 are provided inside the first fixing ring 54. The center of the annular groove 56 is staggered with the center of gravity of the complex-shaped material, so that the material base can be fixed inside the first fixing ring 54, and the length of the fastening bolts 57 can be replaced as needed. The fastening bolts 57 of different lengths are used to clamp the base of the curved edge.

[0035] See also Figure 3 - Figure 4 As shown, the distance between the ends of the two connecting pins 55 is adapted to the diameter of the annular groove 56, the geometric center of the first fixing ring 54 corresponds to the center of the annular groove 56, and the three fastening bolts 57 are arranged in a circular array. When the first fixing ring 54 rotates, the geometric center of the first fixing ring 54 is always located at the center of the annular groove 56, so that the first fixing ring 54 can swing around the axis of the two connecting pins 55, so that the deflected first fixing ring 54 can be sprayed by the aerosol outlets in a circle around the first fixing ring 54, so that different surfaces of the material base can be sprayed, which is convenient for base covering of the upper and lower surfaces of the material base, and the base plate with complex shape will not be missed.

[0036] See also Figure 2 and Figure 5 As shown, an inclination fixing structure 6 is provided at the internal axis of the flip cover 4, and the inclination fixing structure 6 includes a driving motor 61, and the driving motor 61 is provided at the top axis of the flip cover 4. The driving motor 61 is installed at the top of the flip cover 4 so that the driving motor 61 can work normally. The output end of the driving motor 61 is provided with a first bevel gear 62 located inside the flip cover 4. The output end of the driving motor 61 is stepped, and the stepped shape is a square column section adapted to the first bevel gear 62 and a threaded section for fixing the nut, so that the first bevel gear 62 can rotate with the output end of the driving motor 61, and the first bevel gear 62 will not fall off from the end of the driving motor 61. The bottom end of the first bevel gear 62 is integrally provided with an intermediate column 63, and the bottom edge of the intermediate column 63 is threadedly connected to two connecting rods 64 of different lengths. The driving motor 61 drives the first bevel gear 6 2. The middle column 63 rotates, so that the two connecting rods 64 rotate synchronously. The two connecting rods 64 are coplanar with the axis of the middle column 63. Therefore, rotating the two connecting rods 64 can always tilt the first fixed ring 54, and the aerosol can be sprayed onto both sides of the material base inside the first fixed ring 54. The connecting rods 64 are tilted inside the fixed block 3 and the flip cover 4. The ends of the two connecting rods 64 are always in contact with the edge of the first fixed ring 54. The two connecting rods 64 can move the first fixed ring 54 so that the first fixed ring 54 is arranged at a certain angle in the annular groove 56. The first fixed ring 54 is tilted inside the fixed groove 53. The deflection angle of the first fixed ring 54 is constant. The two connecting rods 64 are used to move the first fixed ring 54 to be arranged at a certain angle, so that the inclination angle of the material is in different directions, and its inclination angle can be adjusted to facilitate the aerosol covering the surface of the material base.

[0037] See also Figure 5 As shown, the sum of the lengths of the two connecting rods 64 is equal to twice the distance between the middle column 63 and the first fixed ring 54, so that when the first fixed ring 54 is in sheet form, the two connecting rods 64 are always in contact with the quadrant points of the first fixed ring 54, the rotation range of the top ends of the two connecting rods 64 is adapted to the edge of the middle column 63, and the bottom ends of the two connecting rods 64 are always in contact with the inclined edge of the first fixed ring 54, and the two connecting rods 64 are used to fix the deflection angle of the first fixed ring 54, the first fixed ring 54 will only deflect according to the specified inclination angle, the first fixed ring 54 will not flip over, and the length of the connecting rods 64 can be replaced according to the length of the two connecting rods 64 as needed.

[0038] See also Figure 2 、 Figure 6 - Figure 9As shown, a plurality of ventilation pipes 8 are provided at the top of the flip cover 4, and ventilation is carried out into each ventilation pipe 8 by an air pump. An aerosol blowing structure 7 is provided inside the flip cover 4 and outside the intermediate column 63. The aerosol blowing structure 7 includes a second bevel gear 71, and the second bevel gear 71 is sleeved on the outside of the intermediate column 63. The interior of the second bevel gear 71 is rotatably connected with the intermediate column 63, and the second bevel gear 71 rotates relative to the intermediate column 63. An adjusting ring 72 is welded to the bottom end of the second bevel gear 71. The bottom end of the adjusting ring 72 is a curved surface. The adjusting ring 72 rotates synchronously with the second bevel gear 71, and there is a height difference between the lowest point of the bottom end of the adjusting ring 72 and the highest point of the bottom end of the adjusting ring 72. A second fixing ring 73 is welded to the inner wall of the flip cover 4, and a circle of connecting pipes 74 is provided inside the second fixing ring 73. The ventilation pipe 8 is connected to each connecting pipe 74 through a connecting hose, so that the air introduced by the air pump The air flow is ventilated to the inclined first fixed ring 54 through the connecting hose and the first fixed ring 54, so that the aerosol can be deposited on the upper and lower surfaces of the inclined material base. A fixing plate 77 is welded to the outer upper end of each connecting tube 74, and a telescopic spring 75 is provided on the outside of each connecting tube 74 and between the fixing plate 77 and the second fixed ring 73. An air outlet 78 is provided at the bottom end of each connecting tube 74, and each air outlet 78 is located in the outer circle of the first fixed ring 54. The air outlet 78 is used to blow the aerosol inside the flip cover 4. The first bevel gear 62 drives the two connecting rods 64 to make the first fixed ring 54 rotate inside the annular groove 56, so that the air flow coming out of the air outlet 78 can blow the aerosol inside the fixed block 3 and the flip cover 4, so that the aerosol can adhere to the surface of the material base and the aerosol can be deposited on the surface of the material base more evenly.

[0039] See also Figure 6 and Figure 9 As shown, the aerosol blowing structure 7 also includes a connecting sleeve 710, which is arranged on the side wall of the flip cover 4. A rotating hole 711 is opened inside the connecting sleeve 710, and a rotating column 712 is arranged inside the rotating hole 711. The end of the rotating column 712 is welded with a third bevel gear 79, and the third bevel gear 79 is located between the first bevel gear 62 and the second bevel gear 71. Rotating the connecting sleeve 710 can adjust the overall position of the third bevel gear 79, so that the third bevel gear 79 can be in a meshing state with the first bevel gear 62 and the second bevel gear 71, or the third bevel gear 79 can be in a separated state with the first bevel gear 62 and the second bevel gear 71.

[0040] See also Figure 9As shown, the connecting sleeve 710 is connected to the side wall of the flip cover 4 through a thread, and a limiting ring is welded on the cylindrical surface of the rotating column 712 and the end face of the connecting sleeve 710. The connecting sleeve 710 is located between the limiting ring and the third bevel gear 79. The limiting ring on the rotating column 712 can move the rotating column 712 synchronously with the connecting sleeve 710. At the same time, the connecting sleeve 710 can rotate relative to the rotating column 712.

[0041] See also Figure 7 As shown, the first bevel gear 62 and the second bevel gear 71 are both meshed with the third bevel gear 79, and the second bevel gear 71 and the first bevel gear 62 rotate in opposite directions. The bottom end of the adjusting ring 72 is slidably connected to the top of each connecting tube 74, and the rotation of the first bevel gear 62 drives the third bevel gear 79 and the second bevel gear 71 to rotate, so that the second bevel gear 71 and the first bevel gear 62 rotate in the opposite direction. At this time, the rotating first bevel gear 62 drives the two connecting tubes 74 to drive the first fixed ring 54 to rotate in the annular groove 56, and the rotating second bevel gear 71 can drive the adjusting ring 72 to rotate, so that each connecting tube 74 can float up and down, and the rotating first fixed ring 54 and the floating air outlet 78 can spray the material base of the first fixed ring 54, so that the aerosol is more evenly sprayed on the two surfaces of the material base, and the material base with a complex shape can be fully covered.

[0042] See also Figure 6 As shown, the first bevel gear 62 and the second bevel gear 71 are separated from the third bevel gear 79. The surface of the second fixed ring 73 is provided with a circle of fixing holes 76. The interior of the fixing hole 76 is slidingly connected with the connecting pipe 74. The third bevel gear 79 is separated from the second bevel gear 71 and the first bevel gear 62, so that the first bevel gear 62 rotates alone. At this time, the two connecting rods 64 drive the first fixed ring 54 to rotate in the annular groove 56, and the aerosol sprayed from the air outlet 78 at different heights can cover the rotating material base.

[0043] See also Figure 6 and Figure 7As shown, the height difference between the lowest end of the bottom of the adjusting ring 72 and the highest end of the bottom of the adjusting ring 72 is less than the length of the connecting tube 74, ensuring that the connecting tube 74 can be raised and lowered along the fixing hole 76 when the adjusting ring 72 is slowly raised and lowered, and the air outlet 78 of the connecting tube 74 and the fixing plate 77 are not interfered with, and the angle between the plane where the first fixing ring 54 is located and the horizontal plane is adapted to the angle between the plane where each air outlet 78 is located and the horizontal plane. The existence of an angle between the plane where the first fixing ring 54 is located and the horizontal plane, as well as the existence of an angle between the plane where each air outlet 78 is located and the horizontal plane, can facilitate spraying the upper and lower surfaces of the material base. The first fixing ring 54 and each rotating first fixing ring 54 and the air outlet 78 floating up and down can spray the material base of the first fixing ring 54, can fully cover the material base of complex shape, and the working time of the deposition equipment is relatively short.

[0044] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to specific embodiments. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An aerosol deposition device with a function of fully covering a substrate of a complex shape, comprising a deposition device body (1), and a control panel (2), a fixing block (3) and a flip cover (4) arranged at the top of the deposition device body (1), wherein the fixing block (3) is embedded in the top of the deposition device body (1), and the edge of the fixing block (3) is rotatably connected to the edge of the flip cover (4), characterized in that: A placement structure (5) is transversely arranged inside the fixed block (3), and the placement structure (5) includes a drawing groove (52), the drawing groove (52) is transversely opened inside the fixed block (3), and a drawing plate (51) is slidably connected inside the drawing groove (52), a fixing groove (53) is opened in the middle of the drawing plate (51), and an annular groove (56) is opened on the inner wall of the fixing groove (53), and a first fixing ring (54) is arranged inside the fixing groove (53), and two connecting pins (55) are welded to the outer wall of the first fixing ring (54), and the straight line where the two connecting pins (55) are located passes through the axis of the first fixing ring (54), and the two connecting pins (55) are located inside the annular groove (56), and the ends of the two connecting pins (55) are movably connected to the inside of the annular groove (56), and three fastening bolts (57) are arranged inside the first fixing ring (54), and the center of the annular groove (56) is staggered with the center of gravity of the complex-shaped material.

2. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 1, characterized in that: The distance between the ends of the two connecting pins (55) is adapted to the diameter of the annular groove (56), the geometric center of the first fixing ring (54) corresponds to the center of the annular groove (56), and the three fastening bolts (57) are arranged in an annular array.

3. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 2, characterized in that: An inclination fixing structure (6) is provided at the internal axis of the flip cover (4), and the inclination fixing structure (6) includes a driving motor (61), the driving motor (61) is provided at the top axis of the flip cover (4), a first bevel gear (62) is provided at the output end of the driving motor (61) and located inside the flip cover (4), an intermediate column (63) is integrally provided at the bottom end of the first bevel gear (62), two connecting rods (64) of different lengths are welded to the bottom edge of the intermediate column (63), the two connecting rods (64) are coplanar with the axis of the intermediate column (63), the connecting rods (64) are arranged obliquely inside the fixed block (3) and the flip cover (4), the ends of the two connecting rods (64) are always in contact with the edge of the first fixing ring (54), the first fixing ring (54) is arranged obliquely inside the fixing groove (53), and the two connecting rods (64) are used to move the first fixing ring (54) to be arranged at a certain angle.

4. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 3, characterized in that: The sum of the lengths of the two connecting rods (64) is equal to twice the distance between the middle column (63) and the first fixing ring (54), the rotation range of the top ends of the two connecting rods (64) is adapted to the edge of the middle column (63), and the bottom ends of the two connecting rods (64) are always in contact with the edge of the inclined first fixing ring (54).

5. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 4, characterized in that: The top of the flip cover (4) is provided with a plurality of vents (8); an aerosol blowing structure (7) is provided inside the flip cover (4) and outside the intermediate column (63); the aerosol blowing structure (7) comprises a second bevel gear (71); the second bevel gear (71) is sleeved on the outside of the intermediate column (63); the interior of the second bevel gear (71) is rotatably connected to the intermediate column (63); an adjusting ring (72) is welded to the bottom end of the second bevel gear (71); the bottom end of the adjusting ring (72) is curved; a second fixing ring (73) is welded to the inner wall of the flip cover (4); the second fixing ring (73) is welded to the inner wall of the flip cover (4); A circle of connecting pipes (74) is provided inside the ring (73), and the vent pipe (8) is connected to each connecting pipe (74) through a connecting hose. A fixing plate (77) is welded to the upper end of the outside of each connecting pipe (74), and a telescopic spring (75) is provided outside each connecting pipe (74) and between the fixing plate (77) and the second fixing ring (73). An air outlet (78) is provided at the bottom end of each connecting pipe (74), and each air outlet (78) is located in a circle outside the first fixing ring (54). The air outlet (78) is used to blow the aerosol inside the flip cover (4).

6. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 5, characterized in that: The aerosol blowing structure (7) further comprises a connecting sleeve (710), which is arranged on the side wall of the flip cover (4), a rotating hole (711) is provided inside the connecting sleeve (710), a rotating column (712) is provided inside the rotating hole (711), a third bevel gear (79) is welded to the end of the rotating column (712), and the third bevel gear (79) is located between the first bevel gear (62) and the second bevel gear (71).

7. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 6, characterized in that: The connecting sleeve (710) is connected to the side wall of the flip cover (4) via a thread, a limiting ring is welded on the cylindrical surface of the rotating column (712) and located on the end face of the connecting sleeve (710), and the connecting sleeve (710) is located between the limiting ring and the third bevel gear (79).

8. The aerosol deposition device with full coverage of complex-shaped substrates according to claim 7, characterized in that: The first bevel gear (62) and the second bevel gear (71) are both engaged with the third bevel gear (79), the second bevel gear (71) and the first bevel gear (62) rotate in opposite directions, and the bottom end of the adjustment ring (72) is slidably connected to the top end of each connecting pipe (74).

9. The aerosol deposition device with full coverage function for complex-shaped substrates according to claim 7 or 8, characterized in that: The first bevel gear (62) and the second bevel gear (71) are both separated from the third bevel gear (79). The surface of the second fixing ring (73) is provided with a circle of fixing holes (76), and the interior of the fixing holes (76) is slidably connected to the connecting pipe (74).

10. The aerosol deposition device with full coverage function for complex-shaped substrates according to claim 9, characterized in that: The height difference between the lowest end of the bottom end of the adjusting ring (72) and the highest end of the bottom end of the adjusting ring (72) is smaller than the length of the connecting pipe (74), and the angle between the plane where the first fixing ring (54) is located and the horizontal plane is adapted to the angle between the plane where each air outlet (78) is located and the horizontal plane.

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