Movable vacuum transfer cavity based on linear sliding rail positioning and using method

Abstract

The invention relates to a movable vacuum transfer cavity based on linear sliding rail positioning and a using method, the movable vacuum transfer cavity comprises an ultrahigh vacuum multi-way cavity body, the cavity body is provided with a plurality of through holes, each through hole is provided with a vacuum flange, and the through hole above the ultrahigh vacuum multi-way cavity body is connected with a storage table sample transfer rod; a sample target sample transfer rod is connected to a horizontal front through hole of the ultrahigh vacuum multi-way cavity, the ultrahigh vacuum multi-way cavity is integrated in a regular-shaped accommodating box body, and at least one-dimensional sliding module in the direction of the sample target sample transfer rod in a working state is arranged at the bottom of the accommodating box body. Through the cooperation of the linear slide rail and the magnetic slide block, the movement of the sample transfer rod can be completed through one-hand operation, and the complexity of multi-step coordination is reduced. The containing box body is combined with the supporting section bar support through the linear sliding rail and can flexibly move and be fixed in the experiment platform. Meanwhile, under the working state and the non-working state, installation and fixation can be achieved, and neatness and neatness in arrangement and arrangement after experiments can be achieved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum sample transfer technology, and in particular to a movable vacuum transfer chamber based on linear slide positioning and a use method thereof. Background Art

[0002] Transferring trace samples is a routine operation in biological, chemical, and medical experiments. The transfer of materials or samples between different cavities under vacuum conditions involves technologies at multiple levels, including physical principles, specialized equipment, and process control. For ultra-high vacuum equipment, a vacuum connection device is required to enable transfer from one cavity to another under vacuum conditions. This vacuum transfer device can be interconnected with two cavities, enabling the transfer of samples from one ultra-high vacuum cavity to another. For example, a vacuum transfer sample rod is used, equipped with a vacuum pump, a valve system, and a sealed channel to ensure that a vacuum environment is maintained throughout the transfer process. The vacuum pump creates a lower pressure in the target cavity, and the valve controls the opening and closing of the channel, allowing the material to move in a directional manner driven by the pressure difference.

[0003] The prior art CN105628978A discloses an ultra-high vacuum sample transfer device and transfer method. At present, this patent is a relatively early technology in this field. It only discloses a functional introduction of the sample transfer device, but does not disclose the specific structure of the sample transfer device. It is impossible to complete the vacuum transfer sample transfer operation through the operation of a single hand of the experimenter.

[0004] Similarly, CN109161867A discloses a detachable vacuum interconnection system, which focuses on the interconnection of multiple vacuum systems, but does not provide a detailed introduction to the specific vacuum transfer process device.

[0005] The existing technology has relatively conventional settings for material transfer between vacuum chambers, but there is no more detailed research on how to reduce the number of operating steps and how to effectively store samples. Summary of the Invention

[0006] In response to the technical problems raised above, a movable vacuum transfer chamber based on linear slide positioning and a method of use are provided.

[0007] The technical means adopted in the present invention are as follows:

[0008] A movable vacuum transfer chamber based on linear slide positioning includes an ultra-high vacuum multi-pass chamber, the chamber is provided with multiple through holes, a vacuum flange is provided at each through hole, a storage table sample transfer rod is connected to the upper through hole of the ultra-high vacuum multi-pass chamber, and a sample target sample transfer rod is connected to the horizontal front through hole of the ultra-high vacuum multi-pass chamber. The ultra-high vacuum multi-pass chamber is integrated in a regularly shaped accommodating box, and the bottom of the accommodating box is provided with at least one-dimensional sliding module along the direction of the sample target sample transfer rod in the working state.

[0009] Furthermore, one of the ports of the ultra-high vacuum multi-way cavity is connected to the vacuum transfer cavity plug-in valve, and at least one of the left and right ports of the ultra-high vacuum multi-way cavity is used to install the vacuum transfer cavity observation window.

[0010] Furthermore, the accommodating box is detachably connected to the linear sliding support assembly, the bottom of the accommodating box is provided with an installation positioning hole, one side of the linear sliding support assembly is provided with a vacuum transfer chamber positioning piece that cooperates with the installation positioning hole, and the other side of the linear sliding support assembly is provided with a lateral fixing and fastening metal block for connecting the bottom of the accommodating box with the linear sliding support assembly.

[0011] Furthermore, the bottom of the storage table sample transfer rod is connected to a storage table, and the storage table is at least one layer of sample holder support. When it is multi-layer, adjacent sample holder support members are connected by support members, and the sample holder holding the sample is arranged on the sample holder support. The bottom of the sample holder support is provided with a sample holder support pressing plate for clamping the sample holder.

[0012] Furthermore, the storage table sample transfer rod and the sample target sample transfer rod are both double-layer structures, wherein the inner rod is arranged inside the outer rod, and the inner rod cooperates with the magnetic slider on the outer wall of the outer rod to move.

[0013] Furthermore, a limit assembly is provided at the bottom end of the storage platform sample transfer rod, and a limit assembly is also provided at the side of the sample target sample transfer rod away from the ultra-high vacuum multi-pass cavity.

[0014] Furthermore, the accommodating box includes a vacuum transfer chamber bottom connecting sheet metal and a side sheet metal, the two side sheet metals are connected by a side panel connecting support beam, and a hand-held handle is provided on the outside of at least one side sheet metal, and the bottom of the vacuum transfer chamber bottom connecting sheet metal is connected to a movable slider through a multi-slider connector, and the movable slider can move along a linear slide rail provided on the supporting profile bracket.

[0015] Furthermore, a composite ion pump is provided inside the containing box and is connected to the ultra-high vacuum multi-channel cavity.

[0016] Furthermore, the vacuum flange at the bottom of the ultra-high vacuum multi-way cavity is connected to a detachable flange.

[0017] The present invention also discloses a method for using the movable vacuum transfer chamber, comprising the following steps:

[0018] Before the ultra-high vacuum multi-way cavity is ready for sample transfer, the sliding module is moved to dock the transition cavity with the vacuum transfer cavity plug-in valve of the ultra-high vacuum multi-way cavity;

[0019] Turn on the vacuum pump connected to the transition chamber and evacuate until the preset vacuum degree is reached;

[0020] Adjust the sample transfer rod on the storage table to the preset height;

[0021] Adjust the sample target transfer rod to move the preset distance and grab the sample holder on the storage table transfer rod;

[0022] Adjust the sample transfer rod on the storage table to the initial height;

[0023] Continue to extend the sample target transfer rod until it passes through the transition chamber and reaches the designated area.

[0024] Compared with the prior art, the present invention has the following advantages:

[0025] 1. Through the cooperation of linear slide rail and magnetic slider, the movement of sample transfer rod can be completed by single-handed operation, reducing the complexity of multi-step coordination.

[0026] 2. During the sample transfer process, the slide rail and limit assembly ensure the moving distance and position accuracy of the sample transfer rod.

[0027] 3. Maintain ultra-high vacuum environment throughout the process to avoid sample contamination or oxidation. By setting up a composite ion pump, it can achieve 10 -10 mbar vacuum degree.

[0028] 4. The storage table can be set up with a multi-layer structure, and multiple sample trays can be fixed by supporting parts and pressing pieces to realize batch sample management.

[0029] 5. The housing is combined with the support profile bracket through a linear slide rail, which can be flexibly moved and fixed within the experimental platform. At the same time, it can be installed and fixed in both working and non-working states, and the experiment and post-experiment organization are neat and orderly. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0031] Figure 1 It is a schematic diagram of the overall structure of the vacuum transfer chamber assembly and the linear sliding support assembly.

[0032] Figure 2 This is a schematic diagram of the disassembly of the vacuum transfer chamber assembly and the linear slider.

[0033] Figure 3 This is a schematic diagram of the partial enlargement of the vacuum transfer chamber and linear slider disassembly function.

[0034] Figure 4 Schematic diagram of the vacuum transfer chamber structure with hidden side panels.

[0035] Figure 5 (a) Schematic diagram of the vacuum transfer chamber being decoupled from the fixed vacuum chamber on the linear slide; Figure 5 (b) is a schematic diagram of the connection between the vacuum transfer chamber and the fixed vacuum chamber on the linear slide.

[0036] Figure 6 (a) Schematic diagram of the vacuum transfer chamber storage platform connected to the fixed chamber without being lifted; Figure 6 (b) Schematic diagram of the vacuum transfer chamber storage table connected to the fixed chamber being lifted.

[0037] Figure 7 (a) Schematic diagram of the sample target transfer rod grabbing a single sample target from the storage platform; Figure 7 (b) Schematic diagram of the sample target transfer rod transferring a single sample target to the next chamber.

[0038] Figure 8 This is the assembly drawing of the vacuum transfer chamber assembly and the linear sliding support assembly in the non-transferring state.

[0039] Figure 9 This is an assembly diagram of the vacuum transfer chamber assembly and the linear sliding support assembly under linear drive conditions.

[0040] Figure 10 This is a diagram showing the position of the instrument system during the sample transfer process of the vacuum transfer chamber assembly.

[0041] Figure 11 This is a diagram of the position of the vacuum transfer chamber components in an idle, non-transferring state.

[0042] Figure 12This is a diagram showing the connection between the internal and external magnetic rods of the multi-layer sample storage table.

[0043] Figure 13 This is an exploded view of the internal structure of the multi-layer sample storage table.

[0044] Figure 14 Schematic diagram of the grabbing head of the sample target transfer rod.

[0045] In the figure: 001: containing box; 002: linear sliding support assembly; 003: linear slide rail; 004: transition chamber assembly; 005: support profile bracket; 006: linear slide moving positioning beam; 007: linear slide moving positioning pin; 008: multi-layer sample storage table; 009: full-scale vacuum gauge; 010: vacuum pump; 011: transition chamber plug valve; 101: sample target transfer rod; 102: limit assembly; 103: compound ion pump; 104: storage table transfer rod; 105: vacuum transfer chamber plug valve; 106: ultra-high vacuum multi-channel chamber; 107: vacuum transfer chamber observation window; 108: adjustable vacuum flange; 201: vacuum transfer chamber assembly support plate; 202: vacuum transfer Cavity positioning part; 203: multi-slider connector; 204: movable slider; 205: vacuum transfer chamber bottom connecting sheet metal; 206: handheld handle; 207: side sheet metal; 208: side panel connecting support beam; 301: external movable magnetic slider of sample target transfer rod; 302: external movable magnetic slider of storage table transfer rod; 303: lateral fixed rotating handle; 304: lateral fixed connecting screw; 305: lateral fixed fastening metal block; 306: external movable magnetic slider positioning fastener; 401: storage table support top connector; 402: storage table tablet support; 403: sample holder; 404: sample holder support tablet; 405: sample holder support; 501: sample target transfer rod grabbing head. DETAILED DESCRIPTION

[0046] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is in no way intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0048] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0049] Unless otherwise specified, the relative arrangement of the parts and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to actual proportional relationships. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments can have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, and therefore, once an item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0050] In the description of the present invention, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention: the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0051] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below their position devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0052] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0053] like Figures 1 to 3 As shown in Figures 8 to 11, an embodiment of the present invention discloses a movable vacuum transfer chamber based on linear slide positioning, including an ultra-high vacuum multi-pass chamber 106, the chamber is provided with multiple through holes, and a vacuum flange is provided at each through hole. The upper through hole of the ultra-high vacuum multi-pass chamber is connected to a storage table sample transfer rod 104, and the horizontal front through hole of the ultra-high vacuum multi-pass chamber is connected to a sample target sample transfer rod 101, which is used to realize the transfer of samples between the transition chamber and the ultra-high vacuum multi-pass chamber and between the ultra-high vacuum multi-pass chamber and the next transition chamber after being linked with the storage table sample transfer rod 104. The ultra-high vacuum multi-pass chamber is integrated into a regularly shaped container box 001, and the bottom of the container box is provided with a sliding module in at least one dimension along the direction of the sample target sample transfer rod in the working state.

[0054] Furthermore, one port of the ultra-high vacuum multi-port chamber is connected to a vacuum transfer chamber gate valve 105, which is closed under certain operating conditions to achieve a sealed ultra-high vacuum multi-port chamber. At least one of the left and right ports of the ultra-high vacuum multi-port chamber is used to install a vacuum transfer chamber observation window 107, which is used to observe the position of the sample storage platform in real time. In actual use, under certain operating conditions, the vacuum transfer chamber gate valve 105 is docked with the transition chamber gate valve 011 of the transition chamber assembly 004. Figure 11The scene shown in Figure 1 shows the vacuum transfer chamber assembly in an idle, non-transferring state. The transition chamber assembly is also connected to a full-scale vacuum gauge 009 and a vacuum pump 010. By turning on the vacuum pump, the full-scale vacuum gauge is used to determine the vacuum level within the ultra-high vacuum multi-port chamber after the vacuum transfer chamber gate valve 105 and the transition chamber gate valve 011 of the transition chamber assembly 004 are docked.

[0055] As an optional embodiment, an adjustable vacuum flange 108 is placed between the connection between the sample target transfer rod and the ultra-high vacuum multi-way chamber to facilitate multi-angle adjustment of the sample target transfer rod.

[0056] Furthermore, the housing is removably connected to the linear slide support assembly 002. The bottom of the housing is provided with a mounting hole. One side of the linear slide support assembly is provided with a vacuum transfer chamber locator 202 that mates with the mounting hole. The other side of the linear slide support assembly is provided with a lateral fixing and fastening metal block 305 for connecting the bottom of the housing to the linear slide support assembly. The lateral fixing and fastening metal block 305 mates with the sheet metal connecting member 205 at the bottom of the vacuum transfer chamber. Screw holes are provided in the lateral fixing and fastening metal block 305, into which a lateral fixing and rotating handle 303 is mounted. The bottom of the lateral fixing and rotating handle 303 is provided with a lateral fixing and connecting screw 304 that mates with the screw hole.

[0057] Furthermore, if Figure 12 、 Figure 13 As shown, the bottom of the sample storage platform transfer rod is connected to a storage platform. Specifically, it is connected to the topmost sample holder support plate via a storage platform support top connector 401. The storage platform comprises at least one layer of sample holder supports 405. In this embodiment, it is a multi-layer sample storage platform 008, which is used to accommodate multiple sample holders, which can contain sample targets of different materials.

[0058] In this embodiment, adjacent sample holder supports are connected by support members 402 , and a sample holder 403 for holding a sample is disposed on a sample holder support member 405 . A sample holder support pressing piece 404 for clamping the sample holder is disposed at the bottom of the sample holder support member.

[0059] The structure of the multi-layer storage table can be such that a sample holder 403 is placed in a single layer, and sample holders can also be placed on both sides of the storage table; each layer of the storage table is connected by multiple supports, and the sample holder is connected through the sample holder support pressing plate, and the sample transfer rod is pushed into the sample holder support 405 by parallel sliding. After the sample holder is clamped by the sample holder support pressing plate, it has a certain stress, so when the storage table is placed in multiple directions, it can remain stable and not slip. The end of the sample target sample transfer rod is provided with a sample target sample transfer rod gripping head 501. The sample target sample transfer rod gripping head is provided with a horizontally arranged clamping groove, and the specifications of the clamping groove are adapted to the sample holder.

[0060] Furthermore, both the storage platform transfer rod and the sample target transfer rod are double-layered structures, with an inner rod positioned within an outer rod. The outer rod serves as a support, and a thin rod is positioned coaxially with the outer rod. The inner rod cooperates with a magnetic slider on the outer wall of the outer rod to enable movement. Specifically, a sample target transfer rod external moving magnetic slider 301 is provided on the exterior of the sample target transfer rod to enable forward and backward movement of the inner thin rod, while a storage platform transfer rod external moving magnetic slider 302 is provided on the exterior of the storage platform transfer rod to enable up and down movement of the inner thin rod.

[0061] Furthermore, a limit assembly is provided at the bottom end of the storage table sample transfer rod to ensure that the sample holder arranged thereunder is placed at a preset position inside the ultra-high vacuum multi-pass cavity. A limit assembly 102 is also provided on the side of the sample target sample transfer rod away from the ultra-high vacuum multi-pass cavity so that the sample transfer process cannot exceed this position.

[0062] As an optional embodiment, when a multi-layer sample storage platform is provided, to ensure that sample holders on different layers can be effectively transferred by the sample target transfer rod, the storage platform transfer rod is also provided with an external movable magnetic slider positioning fastener 306. When reaching the preset position, the positioning fastener contacts the inner rod, completing the maintenance of the magnetic device at the preset height. Of course, a seal is provided between the external movable magnetic slider positioning fastener and the storage platform transfer rod. The multi-layer sample storage platform configured within the transfer chamber can store multiple samples and is suitable for transfer under vacuum.

[0063] Furthermore, the containment box includes a vacuum transfer chamber bottom connecting sheet metal 205 and side sheet metal 207. The two side sheet metals are connected by a side panel connecting support beam 208. A handle 206 is provided on the outer side of at least one side sheet metal. In the figure, one side sheet metal is omitted to illustrate the spatial position of the handle 206. The handle can be arranged horizontally as shown, or vertically or at an angle, making it easier for staff to grasp and lift. The bottom of the vacuum transfer chamber bottom connecting sheet metal is connected to a movable slider 204 via a multi-slider connector 203. The movable slider is capable of moving along a linear slide 003 mounted on a support profile bracket 005. The at least one-dimensional sliding module that follows the direction of the sample target transfer rod in operation is the linear slide 003. Of course, as other scalable embodiments, the sliding module can adopt a two-dimensional or three-dimensional adjustment mechanism to adjust according to the actual application scenario. However, this embodiment uses a one-dimensional linear slide to meet the needs of solving the existing technical problems. In this embodiment, the bottom of the vacuum transfer chamber bottom connection sheet metal 205 is located on the vacuum transfer chamber assembly support plate 201, and the multi-slider connector 203 is provided at the bottom end of the vacuum transfer chamber assembly support plate. During use, the vacuum transfer chamber assembly support plate 201, the multi-slider connector 203 and the movable slider 204 are fixed by bolts. By providing the movable slider 204, it is possible to place the ultra-high vacuum multi-pass cavity and its supporting components on the linear slide rail for reciprocating movement. The above-mentioned components are placed on the linear slide rail. In order to prevent the ultra-high vacuum multi-pass cavity from falling off the linear sliding support assembly 002 and to prevent the other side of the linear slide rail from derailing during use, a linear slider moving positioning beam 06 is provided at the front end of the linear sliding support assembly 002, and a linear slider moving positioning pin 007 is provided at the end extreme position of the track.

[0064] There are two modes when placing the linear sliding support assembly and the vacuum transfer chamber. The first mode is as follows: Figure 10 As shown, the vacuum transfer chamber is in a state to be connected. Through manual adjustment, the vacuum transfer chamber is moved to a position coaxial with the transition chamber, and the position is limited by the vacuum transfer chamber positioning piece. Figure 11 As shown, when the vacuum transfer chamber is no longer required, it can be manually adjusted to a position perpendicular to the first mode. Laterally secured metal blocks are used to define the position, reducing the space occupied by the sample target transfer rod. Because the present invention includes a handle and a detachable structure between the housing and the linear slide support assembly, manual adjustment can be achieved by simply lifting the housing. Other optional embodiments may also incorporate a turntable or other structure for automated operation.

[0065] Furthermore, if Figure 4 As shown, a compound ion pump 103 is provided inside the housing, which is connected to the ultra-high vacuum multi-pass cavity. Of course, as an expandable embodiment, the compound ion pump is also connected to a full-scale vacuum gauge, which can be set up with dynamic compensation to improve the vacuum stability inside the ultra-high vacuum multi-pass cavity.

[0066] Furthermore, the vacuum flange at the bottom of the ultra-high vacuum multi-pass cavity is connected to a detachable flange. When the sample target accidentally slides to the bottom of the ultra-high vacuum multi-pass cavity, the detachable flange is opened and the sample can be easily taken out.

[0067] like Figures 5-7 As shown, the present invention also discloses a method for using the movable vacuum transfer chamber based on the above-mentioned method. Based on the linear sliding support assembly set at the bottom of the ultra-high vacuum multi-pass cavity, one-dimensional linear sliding can be performed on the linear slide rail. The ultra-high vacuum multi-pass cavity is placed on the linear movable slide rail, which can be conveniently dragged and connected to the transition cavity.

[0068] The specific steps include:

[0069] The transition chamber is a four-way piece. Full-scale vacuum gauges are placed on both sides orthogonal to the ultra-high vacuum multi-way chamber, and a vacuum pump is connected to the other side. A plug-in valve is placed opposite to the ultra-high vacuum multi-way chamber.

[0070] The ultra-high vacuum multi-pass cavity of the present invention is placed on a linear slide rail. By holding a handle, the ultra-high vacuum multi-pass cavity can be connected to a transition cavity or other vacuum cavity with one hand, so as to conveniently transfer samples. The sample can be a metal target for depositing the sample. The sample in cavity A is transferred to cavity B using the ultra-high vacuum multi-pass cavity. Cavity A and cavity B can be two vacuum cavities that are relatively close in space, or they can be vacuum cavities that are far away in space. If the sample needs to be placed in the ultra-high vacuum multi-pass cavity for a residence time exceeding a preset time, it is necessary to cooperate with a composite ion pump to ensure the vacuum degree inside the ultra-high vacuum multi-pass cavity.

[0071] Before preparing to transfer samples in the ultra-high vacuum multi-channel cavity, move the sliding module to dock the transition cavity with the vacuum transfer cavity plug-in valve of the ultra-high vacuum multi-channel cavity, and open the docking plug-in valves of the two; during the connection process, insert a sealing copper ring for press-fitting, and at this time the interior of the transition cavity is in a non-vacuum state.

[0072] Turn on the vacuum pump connected to the transition chamber and evacuate until the preset vacuum degree is reached. Specifically, when the vacuum degree reaches 10 -8 mbar level, subsequent operations can be carried out; during use, the ultra-high vacuum multi-pass cavity needs to be transferred under vacuum conditions, so it is in an ultra-high vacuum state during use.

[0073] For example, the sample to be transferred has been placed on the sample holder of the sample transfer rod on the storage table.

[0074] The steps for grabbing the sample target on the storage table: adjust the storage table sample transfer rod to a preset height. Specifically, the multi-layer sample storage table can be moved up and down by adjusting the external movable magnetic slider of the storage table sample transfer rod. When it is in the appropriate position, that is, when it is convenient for the sample target sample transfer rod to grab the sample, the operation is stopped. At this time, the height of the magnetic slider can be limited by the external movable magnetic slider positioning fastener.

[0075] Adjust the sample target transfer rod to move the preset distance and grab the sample holder on the storage table transfer rod;

[0076] After grabbing the sample tray, adjust the sample transfer rod on the storage table to the initial height;

[0077] Continue to extend the sample target transfer rod until it passes through the transition chamber and reaches the designated area.

[0078] The ultra-high vacuum multi-way cavity is equipped with an ultra-high vacuum multi-way cavity plug-in valve. After the sample is transferred to the ultra-high vacuum multi-way cavity, the ultra-high vacuum multi-way cavity plug-in valve is closed.

[0079] For example, if the sample to be transferred comes from another vacuum chamber and has not yet been placed on the sample holder of the sample transfer rod on the storage table,

[0080] The single sample holder support in this embodiment is connected by three mounting plates, which form a rectangular semi-enclosed structure. The empty side is used to install the sample holder to be transferred. Therefore, when the sample holder support receives samples from other vacuum chambers, the sample target transfer rod first slides to a position where it can clamp the sample holder in the transition chamber through its sample target transfer rod grabbing head, and then the sample target transfer rod slides to a position away from the transition chamber, which is a certain distance away from the vertical moving position of the storage table transfer rod. After that, the storage table transfer rod is adjusted to a preset height. Specifically, the multi-layer sample storage table can be moved up and down by adjusting the external movable magnetic slider of the storage table transfer rod. When it is in the appropriate position, that is, when it is convenient for the sample target transfer rod to transfer the sample, the operation is stopped through the observation window. At this time, the height of the magnetic slider can be limited by the external movable magnetic slider positioning fastener.

[0081] The present invention is a multi-layer sample storage table, which performs the above operations step by step until multiple samples in the transition chamber are placed on the multi-layer sample storage table at different levels, completing the process of placing samples into the storage table sample transfer rod.

[0082] After the transfer is complete, close the vacuum transfer chamber valve, turn off the vacuum pump, and fill with inert gas, such as nitrogen. When the vacuum in the transition chamber approaches atmospheric pressure, the transfer chamber can be disassembled and separated from the ultra-high vacuum multi-pass chamber.

[0083] Afterwards, when it is necessary to transfer the samples on the multi-layer sample storage table to other transition chambers, the above steps of "taking the example that the samples to be transferred have been set on the sample holder of the storage table sample transfer rod" are performed.

[0084] As a scalable implementation, a servo motor drive and sensor feedback module can be added to the mechanical structure of the linear slide and sample transfer rod. By programming the slide's travel distance, the sample transfer rod's extension and retraction speed, and its position accuracy, fully or semi-automatic sample transfer can be achieved. Specifically, an encoder or laser displacement sensor can be embedded in the slide module to monitor the slide's position in real time. The sample transfer rod's magnetic slider can be controlled by a stepper motor, enabling multi-axis coordinated operation in conjunction with a PLC or embedded system.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A movable vacuum transfer chamber based on linear slide positioning, characterized in that: It includes an ultra-high vacuum multi-way cavity, which is provided with multiple through holes, and a vacuum flange is provided at each through hole. The upper through hole of the ultra-high vacuum multi-way cavity is connected to a storage table sample transfer rod, and the horizontal front through hole of the ultra-high vacuum multi-way cavity is connected to a sample target sample transfer rod. The ultra-high vacuum multi-way cavity is integrated in a regularly shaped containing box, and the bottom of the containing box is provided with at least one-dimensional sliding module along the direction of the sample target sample transfer rod in the working state.

2. The movable vacuum transfer chamber according to claim 1, characterized in that: One port of the ultra-high vacuum multi-way cavity is connected to the vacuum transfer cavity plug-in valve, and at least one of the left and right ports of the ultra-high vacuum multi-way cavity is used to install the vacuum transfer cavity observation window.

3. The movable vacuum transfer chamber according to claim 1, characterized in that: The accommodating box is detachably connected to the linear sliding support assembly. An installation positioning hole is provided at the bottom of the accommodating box. A vacuum transfer chamber positioning piece that matches the installation positioning hole is provided on one side of the linear sliding support assembly. A lateral fixing and fastening metal block for connecting the bottom of the accommodating box with the linear sliding support assembly is provided on the other side of the linear sliding support assembly.

4. The movable vacuum transfer chamber according to claim 1, characterized in that: The bottom of the storage table sample transfer rod is connected to a storage table, and the storage table is at least one layer of sample holder support. When it is multi-layer, adjacent sample holder support members are connected by support members. The sample holder holding the sample is set on the sample holder support member, and the bottom of the sample holder support member is provided with a sample holder support pressing piece for clamping the sample holder.

5. The movable vacuum transfer chamber according to claim 1, characterized in that: The storage table sample transfer rod and the sample target sample transfer rod are both double-layer structures, wherein the inner rod is arranged inside the outer rod, and the inner rod cooperates with the magnetic slider on the outer wall of the outer rod to move.

6. The movable vacuum transfer chamber according to claim 1, characterized in that: A limit assembly is provided at the bottom end of the storage platform sample transfer rod, and a limit assembly is also provided at the side of the sample target sample transfer rod away from the ultra-high vacuum multi-pass cavity.

7. The movable vacuum transfer chamber according to claim 1, characterized in that: The containing box includes a vacuum transfer chamber bottom connecting sheet metal and a side sheet metal. The two side sheet metals are connected by a side panel connecting support beam. A hand-held handle is provided on the outside of at least one side sheet metal. The bottom of the vacuum transfer chamber bottom connecting sheet metal is connected to a movable slider through a multi-slider connector. The movable slider can move along a linear slide rail provided on the supporting profile bracket.

8. The movable vacuum transfer chamber according to claim 1, characterized in that: A composite ion pump is provided inside the containing box and is connected to the ultra-high vacuum multi-channel cavity.

9. The movable vacuum transfer chamber according to claim 1, characterized in that: The vacuum flange at the bottom of the ultra-high vacuum multi-way cavity is connected with a detachable flange.

10. The method for using the movable vacuum transfer chamber according to any one of claims 1 to 9, characterized in that: The steps include: Before the ultra-high vacuum multi-way cavity is ready for sample transfer, the sliding module is moved to dock the transition cavity with the vacuum transfer cavity plug-in valve of the ultra-high vacuum multi-way cavity; Turn on the vacuum pump connected to the transition chamber and evacuate until the preset vacuum degree is reached; Adjust the sample transfer rod on the storage table to the preset height; Adjust the sample target transfer rod to move the preset distance and grab the sample holder on the storage table transfer rod; Adjust the sample transfer rod on the storage table to the initial height; Continue to extend the sample target transfer rod until it passes through the transition chamber and reaches the designated area.

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