Microfluidic device

Abstract

The invention provides a microfluidic device. The microfluidic device comprises a first substrate, a plurality of electrode pairs and a control circuit layer, wherein the first substrate comprises a first surface; the first surface is provided with a plurality of opening areas arranged at intervals, each opening area is provided with two containing grooves arranged at intervals in the first direction, the common side wall of the two containing grooves is provided with a micro-flow channel, and the two containing grooves are communicated through the micro-flow channel. The plurality of electrode pairs are arranged on the first substrate; each electrode pair is arranged corresponding to one opening area; the electrode pair comprises two driving electrodes, and the two driving electrodes are arranged on the two opposite sides of the microfluidic channel at intervals in the first direction. The control circuit layer is arranged on the first substrate and is electrically connected with the plurality of electrode pairs; wherein the control circuit layer is used for applying voltage to each electrode pair. According to the microfluidic device, a plurality of DNA molecules or biological samples are processed in parallel, and the detection efficiency is remarkably improved.

Description

Technical Field

[0001] The present invention relates to the field of microfluidic control technology, and in particular to a microfluidic device. Background Art

[0002] As a platform that integrates multiple advanced technologies (such as physics, chemistry and biotechnology), microfluidic chips have shown broad application prospects in the fields of deoxyribonucleic acid (DNA) manipulation, gene sequencing and drug targeted therapy.

[0003] At present, electric field force driving is one of the main methods for manipulating DNA molecules. This method takes advantage of the negative charge of DNA molecules in general biological environments. By loading voltages of different electrical properties at both ends of a micron-scale quartz tube channel, an electric field can be constructed to manipulate DNA molecules to achieve their movement in the microchannel. Using this principle to construct a microfluidic chip, the separation and detection of DNA molecular clusters can be achieved.

[0004] However, existing technologies have significant limitations when processing multiple DNA molecules that need to be loaded with different electric fields simultaneously, and cannot be processed in batches, resulting in low efficiency. Summary of the Invention

[0005] The present application provides a microfluidic device, which aims to solve the problem of low efficiency of batch processing of DNA molecules in existing microfluidic chips.

[0006] To solve the above technical problems, a technical solution adopted in this application is to provide a microfluidic device, comprising: A first substrate, comprising a first surface having a plurality of spaced-apart openings, each of the spaced-apart openings having two receiving grooves spaced-apart along a first direction, a microfluidic channel being provided on a common sidewall of the two receiving grooves, and the two receiving grooves being connected via the microfluidic channel; A plurality of electrode pairs are provided on the first substrate; each electrode pair is provided corresponding to one of the opening areas; the electrode pairs include two driving electrodes, and the two driving electrodes are spaced apart and provided on opposite sides of the microfluidic channel along the first direction; A control circuit layer is provided on the first base substrate and is electrically connected to the plurality of electrode pairs; wherein the control circuit layer is used to apply a voltage to each of the electrode pairs.

[0007] In a specific embodiment, the plurality of electrode pairs and the control circuit layer are all arranged on the first surface, the two driving electrodes are spaced apart along the first direction on opposite sides of the two accommodating grooves, and the control circuit layer has a hollow portion corresponding to the opening area.

[0008] In a specific embodiment, the plurality of electrode pairs and the control circuit layer are all disposed on the second surface of the first base substrate; the second surface is disposed opposite to the first surface.

[0009] In a specific embodiment, the two driving electrodes are spaced apart and arranged on opposite sides of the two receiving grooves along the first direction; or The two driving electrodes are respectively arranged on the bottom walls of the two accommodating grooves.

[0010] In a specific embodiment, the first substrate further includes a second surface opposite to the first surface; wherein, The first surface further has a plurality of first grooves, and each of the driving electrodes is embedded in one of the first grooves; or The second surface further has a plurality of second grooves, and each of the driving electrodes is embedded in one of the second grooves.

[0011] In a specific embodiment, the top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel.

[0012] In a specific embodiment, the microfluidic channel is a microgroove or a microthrough hole provided on the common side wall.

[0013] In a specific embodiment, the common sidewall has a microgroove, and a microchannel is embedded in the microgroove, and the microchannel serves as the microfluidic channel.

[0014] In a specific embodiment, the micro-channel is spaced apart from the bottom wall of the receiving tank, and one end of the micro-channel protrudes from the side surface of the common side wall and extends into the receiving tank.

[0015] In a specific embodiment, the electrode pair includes a positive driving electrode and a negative driving electrode; and the control circuit layer includes: a plurality of gate scan lines; A plurality of data lines are arranged to intersect the gate scanning lines; A plurality of thin film transistors; each of the positive driving electrodes is electrically connected to the data line via at least one thin film transistor; Common electrode line; all of the negative driving electrodes are electrically connected to the common electrode line.

[0016] The beneficial effects of the embodiments of the present application are as follows: Different from the prior art, the present application provides a microfluidic device comprising a first substrate, multiple electrode pairs, and a control circuit layer. The first substrate comprises a first surface having multiple opening regions spaced apart, each opening region comprising two receiving slots spaced apart along a first direction, a microfluidic channel being connected to a common sidewall of the two receiving slots. The two receiving slots are connected by the microfluidic channel. Multiple electrode pairs are disposed on the first substrate, each electrode pair corresponding to one opening region. The electrode pairs comprise two drive electrodes spaced apart along the first direction on opposite sides of the microfluidic channel. The control circuit layer is disposed on the first substrate and electrically connected to the multiple electrode pairs. The control circuit layer is configured to apply a voltage to each electrode pair. By integrating multiple independent opening regions and electrode pairs on a single first substrate, each opening region and its corresponding electrode pair can operate independently, allowing for flexible configuration of different experimental conditions. This enables the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of the microfluidic device provided in the first embodiment of the present application; Figure 2 for Figure 1 A partial enlarged view of point A in the middle; Figure 3 for Figure 2 A cross-sectional view of the structure shown along line AA; Figure 4 for Figure 2 A schematic structural diagram of a thin film transistor in the structure shown; Figure 5 A cross-sectional view of the microfluidic device provided in the second embodiment of the present application along line AA; Figure 6 A cross-sectional view of the microfluidic device provided in the third embodiment of the present application along line AA; Figure 7 A cross-sectional view of the microfluidic device provided in the fourth embodiment of the present application along line AA; Figure 8 A cross-sectional view of the microfluidic device provided in the fifth embodiment of the present application along line AA; Figure 9 A cross-sectional view of the microfluidic device provided in the sixth embodiment of the present application along line AA; Figure 10 A cross-sectional view of the microfluidic device along line AA provided in the seventh embodiment of the present application; Figure 11 A cross-sectional view of the microfluidic device provided in the eighth embodiment of the present application along line AA; Figure 12aA cross-sectional view of the microfluidic device provided in the ninth embodiment of the present application along line AA; Figure 12b A cross-sectional view of a microfluidic device along line AA provided in another embodiment of the present application; Figure 12c A cross-sectional view of a microfluidic device along line AA provided in yet another embodiment of the present application; Figure 13 A cross-sectional view of the microfluidic device provided in the tenth embodiment of the present application along line AA; Figure 14 A cross-sectional view of the microfluidic device provided in the eleventh embodiment of the present application along line AA; Figure 15 This is a cross-sectional view of the microfluidic device provided in the twelfth embodiment of the present application along line AA.

[0018] Description of Figure Numbers: 100-microfluidic substrate; 200-control substrate; 1-first base substrate; 2-electrode pair; 3-control circuit layer; 4-second base substrate; 5-contact pair; 10-first surface; 20-second surface; 30-third surface; 40-fourth surface; 11-opening area; 12-non-opening area; 13-first groove; 14-second groove; 21-driving electrode; 31-hollow portion; 32-gate scanning line; 33-data line; 34-thin film transistor; 35-common electrode line; 41-via; 51-connecting contact; 111-accommodating groove; 112-microfluidic channel; 211-positive driving electrode; 212-negative driving electrode; 341-gate; 342-source; 343-drain; 344-insulating layer; 345-doped semiconductor layer; 346-protective layer; 511-positive connecting contact; 512-negative connecting contact. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0020] The terms "first," "second," and "third" in this application are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features identified. Therefore, features identified as "first," "second," or "third" may explicitly or implicitly include at least one of such features. In the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined. All directional designations in the embodiments of this application (such as up, down, left, right, front, back, etc.) are intended only to illustrate the relative positional relationships and movement of components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional designations will also change accordingly. Furthermore, the terms "including," "having," and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to such process, method, product, or apparatus.

[0021] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0022] The present application is described in detail below with reference to the accompanying drawings and embodiments.

[0023] See Figure 1-Figure 3 , Figure 1 A schematic structural diagram of the microfluidic device provided in the first embodiment of the present application; Figure 2 for Figure 1 A partial enlarged view of point A in the middle; Figure 3 for Figure 2 The structure shown is a cross-sectional view along line AA. The microfluidic device can be used to separate single DNA molecules from a DNA molecule cluster to facilitate detection of the DNA molecules. Specifically, Figure 3 As shown, the microfluidic device may include a first substrate 1 , a plurality of electrode pairs 2 and a control circuit layer 3 .

[0024] The first substrate 1 is the main supporting structure of the microfluidic device and can be made of quartz glass. Specifically, the first substrate 1 includes a first surface 10, namely Figure 3The top surface of the first substrate 1 is used to arrange openings 11 and other components. The first surface 10 has multiple openings 11 spaced apart for loading and processing samples. The openings 11 are recessed downward from the first surface 10 of the first substrate 1 to form groove-shaped openings 11.

[0025] Each opening area 11 has two accommodating grooves 111 spaced apart along a first direction X, perpendicular to the thickness direction Y of the first substrate 1, for holding liquids and samples. A common sidewall exists between the two accommodating grooves 111, which also has a microfluidic channel 112. The two accommodating grooves 111 are connected by the microfluidic channel 112, which allows only a single DNA molecule in the sample to pass through it, facilitating user observation of the DNA molecule through the microfluidic channel 112. This design enables each opening area 11 to independently accommodate and process different samples or reactions, while simultaneously enabling sample flow and observation through the microfluidic channel 112.

[0026] One of the two receiving tanks 111 is a liquid inlet tank for loading DNA molecular clusters or other samples to be detected; the other is a liquid outlet tank for accommodating single DNA molecules or other observed samples flowing out of the microfluidic channel 112 .

[0027] Multiple electrode pairs 2 are disposed on and fixedly connected to the first substrate 1, enabling them to apply a stable electric field. Each electrode pair 2 is positioned corresponding to an opening 11, applying an electric field to the corresponding opening 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pairs 2 include two drive electrodes 21, spaced apart along a first direction X on opposite sides of a microfluidic channel 112, enabling DNA molecules or other charged particles to pass through the microfluidic channel 112 along the first direction X.

[0028] The control circuit layer 3 is disposed on the first substrate 1 and is electrically connected to the multiple electrode pairs 2. The control circuit layer 3 is used to apply a voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid within the container 111 to enter the microfluidic channel 112 through the liquid inlet tank for detection by the detection device. The control circuit layer 3 also coordinates and controls the voltages applied by each electrode pair 2, thereby achieving simultaneous and independent control of multiple samples.

[0029] The control circuit layer 3 is fixedly connected to the first base substrate 1 to stably transmit a voltage signal to each electrode pair 2. Specifically, the control circuit layer 3 can be directly formed on the first base substrate 1, or the control circuit layer 3 can be first formed on a substrate and then fixed to the first base substrate 1.

[0030] In this way, by integrating multiple independent opening areas 11 and electrode pairs 2 on a single first substrate 1, each opening area 11 and its corresponding electrode pair 2 can be operated independently, so as to flexibly configure different experimental conditions, and realize the microfluidic device to process multiple DNA molecules or biological samples in parallel, thereby significantly improving the detection efficiency.

[0031] like Figure 3 As shown, in a specific embodiment, multiple electrode pairs 2 and the control circuit layer 3 can be arranged on the first surface 10 of the first substrate 1 to simplify the structure of the microfluidic device and improve manufacturing efficiency. It can be understood that in this embodiment, the first surface 10 is a major mounting surface of the microfluidic device. Multiple electrode pairs 2 and the control circuit layer 3 are all arranged on the first surface 10, which means that these components can be centrally arranged for easy manufacturing and assembly. Specifically, the multiple electrode pairs 2 and the control circuit layer 3 are all arranged in the non-opening area 12 of the first surface 10 to avoid blocking the opening area 11.

[0032] Specifically, the two drive electrodes 21 are spaced apart along the first direction X on opposite sides of the two receiving grooves 111 to ensure consistency and stability of the electric field applied by the electrode pair 2, thereby facilitating uniform electric field distribution. The control circuit layer 3 includes a hollow portion 31 corresponding to the opening area 11 to facilitate observation of DNA molecules through the microfluidic channel 112. Specifically, the control circuit layer 3 can be formed with a hollow portion 31 through an etching process.

[0033] In a specific embodiment, the common sidewall refers to the shared sidewall between two accommodating grooves 111 within the same opening area 11. The common sidewall has a microgroove. The microgroove is a shallow groove structure formed on the common sidewall. Its depth and width can be designed and processed according to actual needs. Microchannels are embedded in the microgroove. Microchannels are small pipes embedded in the microgroove and are used to carry and control the flow of microfluids. The microchannels serve as microfluidic channels 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the microchannels can be micron-sized quartz tubes.

[0034] Furthermore, if Figure 3 As shown, the microchannel can be spaced apart from the bottom wall of the receiving tank 111, with one end of the microchannel protruding from the side of the common side wall and extending into the receiving tank 111. It is understood that DNA molecules are generally suspended in the liquid in the receiving tank 111. The microchannel is spaced apart from the bottom wall of the receiving tank 111, and a certain distance is maintained between the microchannel and the bottom wall, which facilitates the entry of suspended DNA molecules from the receiving tank 111 into the microchannel.

[0035] By suspending one end of the microchannel near the liquid inlet, DNA molecules can enter the microchannel directly, reducing the probability of DNA molecules coming into contact with the common sidewall before entering the microchannel, and preventing glass burrs on the common sidewall from damaging the DNA molecules. Preferably, both ends of the microchannel protrude from the side of the common sidewall to facilitate installation and fixation of the microchannel.

[0036] Of course, in other embodiments, the microfluidic channel 112 can also be a microgroove or microthrough hole provided on the common side wall to simulate a blood vessel, so that DNA molecules can directly pass through the microgroove or microthrough hole on the common side wall, thereby improving the space utilization and structural compactness of the microfluidic device.

[0037] like Figure 3 As shown, the electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. One of the two driving electrodes 21 is a positive driving electrode 211, and the other is a negative driving electrode 212. The positive driving electrode 211 is disposed on a side close to the liquid outlet, and the negative driving electrode 212 is disposed on a side close to the liquid inlet, so that DNA molecules can enter the liquid outlet from the liquid inlet through the microfluidic channel 112 along the first direction X.

[0038] See Figure 1 and Figure 2 In a specific embodiment, the control circuit layer 3 may include a plurality of gate scanning lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35. The plurality of gate scanning lines 32 and the plurality of data lines 33 are arranged crosswise; each positive driving electrode 211 is electrically connected to the data line 33 via at least one thin film transistor 34, and all negative driving electrodes 212 are electrically connected to the common electrode line 35.

[0039] By using multiple gate scan lines 32 and data lines 33, each opening area 11 can be independently controlled. Thin-film transistors 34, acting as switching elements, efficiently control the flow of current, thereby improving the system's response speed and accuracy. Connecting all negative drive electrodes 212 to a common electrode line 35 simplifies circuit design, reduces the number of lines, lowers manufacturing costs, and improves system consistency and reliability.

[0040] Specifically, such as Figure 1 As shown, multiple opening areas 11 are arranged in a two-dimensional array on the first base substrate 1, and each opening area 11 corresponds to at least one thin film transistor 34; the gate scan line 32 is used to open a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit a voltage signal to a specific column of thin film transistors 34 so that a specific electrode pair 2 generates an electric field.

[0041] like Figure 2As shown, the thin film transistor 34 includes a gate 341, a source 342, and a drain 343. The gate scan line 32 is electrically connected to the gate 341 of the thin film transistor 34 for turning the thin film transistor 34 on or off. The data line 33 is electrically connected to the source 342 of the thin film transistor 34, and the drain 343 of the thin film transistor 34 is electrically connected to the positive driving electrode 211. When the thin film transistor 34 is turned on, a voltage signal is transmitted to the positive driving electrode 211 via the data line 33, so that an electric field is generated between the positive driving electrode 211 and the negative driving electrode 212.

[0042] The scan signal line input voltage can be 15V; the voltage at the negative drive electrode 212 is 0V, and the voltage at the positive drive electrode 211 can be 0-55V to prevent the electrolysis of water molecules in the solution from generating a large number of bubbles. The data line 33 can be supplied with voltages of varying magnitudes and frequencies based on the needs of the municipal administration. For example, the voltage at the positive drive electrode 211 can be any of 5V, 10V, 20V, 40V, and 55V.

[0043] like Figure 1 As shown, all the data lines 33, gate scanning lines 32 and common electrode lines 35 are assembled on one side of the first substrate 1 and connected to an external control chip to control the operation of the microfluidic device.

[0044] Combine Figure 2 and Figure 4 , Figure 4 for Figure 2 Schematic diagram of the structure of the thin film transistor in the structure shown. In a specific embodiment, the gate electrode 341 of the thin film transistor 34 is provided on the first base substrate 1 and is provided in the same layer as the gate scan line 32 and is electrically connected. In addition, the common electrode line 35 can also be provided in the same layer as the gate scan line 32. The insulating layer 344 covers the gate electrode 341 and overlaps the first base substrate 1. The doped semiconductor layer 345 is provided on the insulating layer 344 and is provided corresponding to the gate electrode 341. The source electrode 342 and the drain electrode 343 are provided in the same layer on the insulating layer 344 and respectively cover one side surface of the doped semiconductor layer 345. The source electrode 342 and the drain electrode 343 are spaced apart on the doped semiconductor layer 345. The protective layer 346 covers the source electrode 342, the drain electrode 343 and the uncovered surface of the doped semiconductor layer 345.

[0045] See Figure 5 , Figure 5This is a cross-sectional view of the microfluidic device provided in the second embodiment of the present application along the AA line. The structure of the microfluidic device provided in the second embodiment of the present application is basically the same as that of the microfluidic device provided in the first embodiment, except that, in the second embodiment of the present application, the plurality of electrode pairs 2 and the control circuit layer 3 are both arranged on the second surface 20 of the first substrate 1; wherein, the second surface 20 is arranged opposite to the first surface 10, that is, the second surface 20 is Figure 4 The bottom surface of the first base substrate 1 is preferably provided to prevent contamination of the receiving groove 111 on the first surface 10 during the preparation of the electrode pair 2 and the control circuit layer 3, which may adversely affect the detection results.

[0046] In a specific embodiment, the two driving electrodes 21 can be spaced apart along the first direction X on opposite sides of the two receiving grooves 111, so that the two receiving grooves are located as close as possible to the electric field generated by the two driving electrodes 21, thereby facilitating the movement of all DNA molecules in the liquid inlet groove toward the microfluidic channel 112 under the action of the electric field. Specifically, the two driving electrodes 21 are respectively disposed at positions on the second surface 20 corresponding to the non-opening area 12.

[0047] See Figure 6 , Figure 6 This is a cross-sectional view of the microfluidic device provided in the third embodiment of the present application along line AA. The structure of the microfluidic device provided in the third embodiment of the present application is basically the same as that of the microfluidic device provided in the second embodiment, except that, in the third embodiment of the present application, the two driving electrodes 21 are respectively arranged on the bottom walls of the two receiving grooves 111 to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the movement speed of the DNA molecules faster, and the detection response time of the microfluidic device improved.

[0048] Specifically, the positive driving electrode 211 of the two driving electrodes 21 is disposed corresponding to the bottom wall of the liquid outlet tank, and the negative driving electrode 212 is disposed corresponding to the bottom wall of the liquid inlet tank.

[0049] See Figure 7 , Figure 7 A cross-sectional view of the microfluidic device provided in the fourth embodiment of the present application along line AA. The structure of the microfluidic device provided in the fourth embodiment of the present application is basically the same as that of the microfluidic device provided in the first embodiment, with the difference that, in the fourth embodiment of the present application, the first surface 10 further has a plurality of first grooves 13, and each driving electrode 21 is embedded in a first groove 13, so that the electric field generated by the two driving electrodes 21 exerts a greater force on the DNA molecules, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection response time of the microfluidic device. In addition, arranging the driving electrode 21 in the first groove 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0050] Specifically, the first groove 13 is disposed in the non-opening area 12 of the first surface 10 and extends from the first surface 10 to the second surface 20. The top surface of the driving electrode 21 disposed in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112. This allows the microfluidic channel 112 to be completely located between the top and bottom surfaces of the driving electrode 21 along the thickness direction Y of the first substrate 1, that is, the microfluidic channel 112 is located in the area directly facing the two driving electrodes 21. It can be understood that the electric field lines in the area directly facing the two driving electrodes 21 are denser, the electric field intensity is stronger, and the force exerted on the DNA molecules is greater.

[0051] See Figure 8 , Figure 8 A cross-sectional view of the microfluidic device provided in the fifth embodiment of the present application along line AA. The structure of the microfluidic device provided in the fifth embodiment of the present application is basically the same as that of the microfluidic device provided in the fourth embodiment, except that, in the fifth embodiment of the present application, the first substrate 1 also includes a second surface 20 opposite to the first surface 10, and the control circuit layer 3 is arranged on the second surface 20 of the first substrate 1. Among them, the second surface 20 also has a plurality of second grooves 14, and each driving electrode 21 is embedded in a second groove 14; so as to make the electric field exert a greater force on the DNA molecules, while avoiding contamination of the receiving groove 111 of the first surface 10 when preparing the electrode pair 2 and the control circuit layer 3, resulting in adverse effects on the detection results.

[0052] Specifically, the second groove 14 is disposed at a position on the second surface 20 corresponding to the non-opening area 12 and extends from the second surface 20 toward the first surface 10. Furthermore, the top surface of the driving electrode 21 disposed in the second groove 14 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112. This allows the microfluidic channel 112 to be completely located between the top and bottom surfaces of the driving electrode 21 along the thickness direction Y of the first base substrate 1, i.e., the microfluidic channel 112 is located in the region directly opposite the two driving electrodes 21.

[0053] See Figure 9 , Figure 9 This is a cross-sectional view of the microfluidic device provided in the sixth embodiment of the present application along line AA. The structure of the microfluidic device provided in the sixth embodiment of the present application is basically the same as that of the microfluidic device provided in the first embodiment, except that, in the sixth embodiment of the present application, the microfluidic device includes a microfluidic substrate 100 and a control substrate 200; wherein the microfluidic substrate 100 may include a first base substrate 1 and multiple electrode pairs 2, and the control substrate 200 may include a second base substrate 4, a control circuit layer 3, and multiple contact pairs 5.

[0054] The first substrate 1 includes a first surface 10 having a plurality of spaced-apart openings 11 for loading and processing samples. The openings 11 are recessed downward from the first surface 10 of the first substrate 1 to form groove-shaped openings 11 .

[0055] Each opening area 11 has two accommodating grooves 111 spaced apart along a first direction X for loading liquids and samples. The two accommodating grooves 111 share a common sidewall, which includes a microfluidic channel 112. The two accommodating grooves 111 are connected by the microfluidic channel 112, which allows only a single DNA molecule in the sample to pass through the microfluidic channel 112, facilitating user observation of the DNA molecule through the microfluidic channel 112. This design enables each opening area 11 to independently accommodate and process different samples or reactions, while simultaneously enabling sample flow and observation through the microfluidic channel 112.

[0056] One of the two receiving tanks 111 is a liquid inlet tank for loading DNA molecular clusters or other samples to be detected; the other is a liquid outlet tank for accommodating single DNA molecules or other observed samples flowing out of the microfluidic channel 112 .

[0057] Multiple electrode pairs 2 are disposed on and fixedly connected to the first substrate 1, enabling them to apply a stable electric field. Each electrode pair 2 is positioned corresponding to an opening 11, applying an electric field to the corresponding opening 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pairs 2 include two drive electrodes 21, spaced apart along a first direction X on opposite sides of a microfluidic channel 112, enabling DNA molecules or other charged particles to pass through the microfluidic channel 112 along the first direction X.

[0058] The second base substrate 4 can also be made of quartz glass. The control circuit layer 3 is disposed on the second base substrate 4 and fixedly connected to the second base substrate 4 to stably transmit voltage signals. Specifically, the control circuit layer 3 can be directly formed on the second base substrate 4, or the control circuit layer 3 can be first formed on a substrate that is then fixed to the second base substrate 4.

[0059] Multiple contact pairs 5 are disposed on the second base substrate 4 and are electrically connected to the control circuit layer 3. The contact pairs 5 include two connecting contacts 51, and the two connecting contacts 51 correspond to two drive electrodes 21, respectively. Specifically, the connecting contacts 51 can be disposed on the surface of the control circuit layer 3 away from the second base substrate 4. Alternatively, the control circuit layer 3 and the connecting contacts 51 can be disposed on different surfaces of the second base substrate 4, and the two can be electrically connected through vias to prevent the control circuit layer 3 from being corroded by evaporated liquid. In addition, directly disposing the connecting contacts 51 on the bottom surface of the second base substrate 4 can make the bottom surface of the second base substrate 4 facing the first base substrate 1 more flat, making it easier for the bottom surface of the second base substrate 4 to fit the surface of the first base substrate 1 without squeezing the control circuit layer 3.

[0060] During use, the control substrate 200 is attached to the microfluidic substrate 100. The multiple contact pairs 5 are electrically connected to the multiple electrode pairs 2. The control circuit layer 3 is used to apply a voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid within the container 111 to enter the microfluidic channel 112 from the liquid inlet tank for detection by the detection device. Simultaneously, the control circuit layer 3 can coordinate and control the voltages applied to each electrode pair 2, thereby achieving simultaneous and independent control of multiple samples.

[0061] In this way, by integrating multiple independent opening areas 11 and electrode pairs 2 on a single first substrate 1, each opening area 11 and its corresponding electrode pair 2 can be operated independently, allowing for flexible configuration of different experimental conditions. This enables the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency. Furthermore, by disposing the control circuit layer 3 and contact pairs 5 on a second substrate 4 independent of the first substrate 1, when the microfluidic substrate 100 needs to be replaced, the microfluidic substrate 100 can be replaced separately, thereby reducing replacement costs. Alternatively, when the control substrate 200 needs to be replaced, the control substrate 200 can also be replaced separately, thereby reducing replacement costs.

[0062] like Figure 9 As shown, in a specific embodiment, multiple electrode pairs 2 can be arranged in the non-opening area 12 of the first surface 10 of the first base substrate 1 to avoid blocking the opening area 11. Two driving electrodes 21 can be arranged at intervals along the first direction X on opposite sides of the two receiving grooves 111 to ensure the consistency and stability of the electric field applied by the electrode pairs 2, thereby helping to achieve uniform electric field distribution.

[0063] When in use, the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100 so that the electrode pairs 2 on the first surface 10 are in contact and conductive with the corresponding contact pairs 5 on the control substrate 200 , allowing the control circuit layer 3 to apply voltage to the electrode pairs 2 .

[0064] In a specific embodiment, the control circuit layer 3 has a hollow portion 31 corresponding to the microfluidic channel 112, and the second base substrate 4 is a transparent substrate. This provides the microfluidic device with greater transparency and observability, allowing the user to observe the DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the hollow portion 31 and the corresponding portion of the transparent substrate. Specifically, the control circuit layer 3 can be formed with a hollow portion 31 through an etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0065] Of course, in some embodiments, the control substrate 200 may also have a hollow portion 31 corresponding to the microfluidic channel 112 to further improve optical transmittance and facilitate real-time monitoring of the status of the microfluidic channel 112 .

[0066] like Figure 9 As shown, in a specific embodiment, the first surface 10 further has a plurality of first grooves 13, and each driving electrode 21 is embedded in a first groove 13. This allows the electric field generated by the two driving electrodes 21 to exert a greater force on the DNA molecules, allowing the DNA molecules to pass through the microfluidic channel 112 more quickly, thereby improving the detection response time of the microfluidic device. In addition, arranging the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0067] Specifically, the first groove 13 is disposed in the non-opening region 12 of the first surface 10 and extends from the first surface 10 toward the bottom. The top surface of the drive electrode 21 is flush with or protrudes from the first surface 10, so that when the control substrate 200 and the microfluidic substrate 100 are attached, the connection pads 51 on the control substrate 200 and the drive electrode 21 can contact and be electrically connected.

[0068] The bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluidic channel 112 is located in the opposite area of ​​the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0069] In a specific embodiment, the electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212 , and correspondingly, the contact pair 5 includes a positive connecting contact 511 and a negative connecting contact 512 .

[0070] Specific, combined Figure 1 、 Figure 2 and Figure 9The control circuit layer 3 may include a plurality of gate scan lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35; wherein the plurality of gate scan lines 32 and the plurality of data lines 33 are arranged in an intersecting manner. Each positive electrode connection contact 511 is electrically connected to a data line 33 through at least one thin film transistor 34. Specifically, the positive electrode connection contact 511 is electrically connected to the drain 343 of the thin film transistor 34 so that a voltage signal is transmitted to the positive electrode connection contact 51 through the data line 33 when the thin film transistor 34 is turned on. The positive electrode connection contact 511 is used to electrically connect to the positive driving electrode 211. When the control substrate 200 and the microfluidic substrate 100 are attached, the positive driving electrode 211 contacts and is electrically connected to the positive electrode connection contact 511.

[0071] All the negative connection contacts 512 are electrically connected to the common electrode line 35 ; the negative connection contacts 512 are used to electrically connect to the negative driving electrodes 212 , and when the control substrate 200 and the microfluidic substrate 100 are attached, the negative driving electrodes 212 are in contact with and electrically connected to the negative connection contacts 512 .

[0072] By using multiple gate scan lines 32 and data lines 33, each opening area 11 can be independently controlled. Thin-film transistors 34, acting as switching elements, efficiently control the flow of current, thereby improving the system's response speed and accuracy. Connecting all negative drive electrodes 212 to a common electrode line 35 simplifies circuit design, reduces the number of lines, lowers manufacturing costs, and improves system consistency and reliability.

[0073] See Figure 10 , Figure 10 This is a cross-sectional view of the microfluidic device provided in the seventh embodiment of the present application along the AA line. The structure of the microfluidic device provided in the seventh embodiment of the present application is basically the same as that provided in the sixth embodiment, except that, in the seventh embodiment of the present application, a plurality of electrode pairs 2 are provided on the second surface 20 of the first substrate 1; wherein, the second surface 20 is provided opposite to the first surface 10, that is, the second surface 20 is Figure 10 The bottom surface of the first base substrate 1 is preferably provided to prevent contamination of the receiving groove 111 on the first surface 10 during preparation of the electrode pair 2, which may adversely affect the detection results.

[0074] When in use, the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 so that the electrode pairs 2 on the second surface 20 are in contact and conductive with the corresponding contact pairs 5 on the control substrate 200 , allowing the control circuit layer 3 to apply voltage to the electrode pairs 2 .

[0075] like Figure 10As shown, in a specific embodiment, the two driving electrodes 21 can be arranged at opposite sides of the two receiving grooves 111 along the first direction X, so that the two receiving grooves are located as much as possible between the electric fields generated by the two driving electrodes 21, so that all DNA molecules in the liquid inlet groove can move toward the microfluidic channel 112 under the action of the electric field.

[0076] Specifically, two driving electrodes 21 are respectively disposed at positions on the second surface 20 corresponding to the non-opening areas 12. The second surface 20 further has a plurality of second grooves 14, with each driving electrode 21 embedded in a second groove 14. This allows the electric field to exert a greater force on the DNA molecules while preventing contamination of the receiving grooves 111 on the first surface 10 during the preparation of the electrode pairs 2 and the control circuit layer 3, which could adversely affect the detection results.

[0077] Specifically, the second groove 14 is disposed at a position on the second surface 20 corresponding to the non-opening area 12 and extends from the second surface 20 toward the first surface 10. Furthermore, the top surface of the driving electrode 21 disposed within the second groove 14 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is flush with the second surface 20 or protrudes from the first surface 10. This places the microfluidic channel 112 directly within the region facing the two driving electrodes 21. This enhances the electric field's effect on the DNA molecules and facilitates contact and electrical connection between the connection pads 51 on the control substrate 200 and the driving electrodes 21 after the control substrate 200 and the microfluidic substrate 100 are bonded together.

[0078] See Figure 11 , Figure 11 This is a cross-sectional view of the microfluidic device provided in the eighth embodiment of the present application along line AA. The structure of the microfluidic device provided in the eighth embodiment of the present application is basically the same as that of the microfluidic device provided in the seventh embodiment, except that, in the eighth embodiment of the present application, the two driving electrodes 21 are respectively arranged on the bottom walls of the two receiving grooves 111 to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the movement speed of the DNA molecules faster, and the detection response time of the microfluidic device improved.

[0079] Specifically, the positive driving electrode 211 of the two driving electrodes 21 is disposed corresponding to the bottom wall of the liquid outlet tank, and the negative driving electrode 212 is disposed corresponding to the bottom wall of the liquid inlet tank.

[0080] See Figure 12a , Figure 12aThis is a cross-sectional view of the microfluidic device provided in the ninth embodiment of the present application along line AA. The structure of the microfluidic device provided in the ninth embodiment of the present application is substantially the same as that of the microfluidic device provided in the sixth embodiment, except that, in the ninth embodiment of the present application, the microfluidic substrate 100 includes a first base substrate 1, and the control substrate 200 may include a second base substrate 4, a control circuit layer 3, and a plurality of electrode pairs 2.

[0081] Specifically, the first base substrate 1 includes a first surface 10 having a plurality of spaced-apart openings 11 for loading and processing samples; the openings 11 are recessed downward from the first surface 10 of the first base substrate 1 to form groove-shaped openings 11 .

[0082] Each opening area 11 has two accommodating grooves 111 spaced apart along a first direction X for loading liquids and samples. The two accommodating grooves 111 share a common sidewall, which includes a microfluidic channel 112. The two accommodating grooves 111 are connected by the microfluidic channel 112, which allows only a single DNA molecule in the sample to pass through the microfluidic channel 112, facilitating user observation of the DNA molecule through the microfluidic channel 112. This design enables each opening area 11 to independently accommodate and process different samples or reactions, while simultaneously enabling sample flow and observation through the microfluidic channel 112.

[0083] One of the two receiving tanks 111 is a liquid inlet tank for loading DNA molecular clusters or other samples to be detected; the other is a liquid outlet tank for accommodating single DNA molecules or other observed samples flowing out of the microfluidic channel 112 .

[0084] The second base substrate 4 can also be made of quartz glass. The control circuit layer 3 is disposed on the second base substrate 4 and fixedly connected to the second base substrate 4 to stably transmit voltage signals. Specifically, the control circuit layer 3 can be directly formed on the second base substrate 4, or the control circuit layer 3 can be first formed on a substrate that is then fixed to the second base substrate 4.

[0085] Multiple electrode pairs 2 are disposed on a second substrate 4 and electrically connected to a control circuit layer 3, enabling the control circuit layer 3 to apply a voltage to the electrode pairs 2 to form an electric field. Each electrode pair 2 is disposed corresponding to an opening 11, applying an electric field to the corresponding opening 11 to manipulate the movement of DNA molecules or other charged particles. Each electrode pair 2 includes two spaced-apart drive electrodes 21.

[0086] During use, the control substrate 200 is attached to the microfluidic substrate 100, so that the two drive electrodes 21 are spaced apart along a first direction X on opposite sides of the microfluidic channel 112, thereby enabling DNA molecules or other charged particles to pass through the microfluidic channel 112 along the first direction X. The control circuit layer 3 is used to apply a voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid in the receiving tank 111 to enter the microfluidic channel 112 from the liquid inlet tank for detection by the detection device. At the same time, the control circuit layer 3 can also coordinate and control the voltages applied by each electrode pair 2, thereby achieving simultaneous and independent control of multiple samples.

[0087] In this way, by further integrating multiple electrode pairs 2 onto the control substrate 200, when the microfluidic substrate 100 needs to be replaced, only the first substrate 1 can be replaced, further reducing the replacement cost; at the same time, by integrating multiple independent opening areas 11 and electrode pairs 2 on a single first substrate 1, each opening area 11 and its corresponding electrode pair 2 can be operated independently, so as to flexibly configure different experimental conditions, thereby realizing the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving the detection efficiency.

[0088] In a specific embodiment, Figure 12a As shown, the control circuit layer 3 has a hollow portion 31 corresponding to the microfluidic channel 112. The second base substrate 4 is a transparent substrate, which makes the microfluidic device more transparent and observable. This allows users to observe the DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the hollow portion 31 and the corresponding portion of the transparent substrate. Specifically, the control circuit layer 3 can be formed by an etching process to form the hollow portion 31. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0089] Of course, in some embodiments, the control substrate 200 may also have a hollow portion 31 corresponding to the microfluidic channel 112 to further improve optical transmittance and facilitate real-time monitoring of the status of the microfluidic channel 112 .

[0090] like Figure 12a As shown, the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100 when in use, so that each driving electrode 21 is correspondingly attached to the non-opening area 12 of the first surface 10 .

[0091] See Figure 12b-Figure 12c , Figure 12b A cross-sectional view of a microfluidic device along line AA provided in another embodiment of the present application; Figure 12cA cross-sectional view of a microfluidic device along line AA provided in another embodiment of the present application. In some embodiments, the first substrate 1 further includes a second surface 20 opposite to the first surface 10, and the control substrate 200 can also be attached to the second surface 20 of the microfluidic substrate 100 during use.

[0092] Among them, such as Figure 12b As shown, the two driving electrodes 21 can be arranged on the side of the control circuit layer 3 away from the hollow portion 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 respectively correspond to the non-opening area 12, and the two driving electrodes 21 are spaced apart along the first direction X on the opposite sides of the two receiving grooves 111, so that the two receiving grooves are located as much as possible between the electric fields generated by the two driving electrodes 21, so that all DNA molecules in the liquid inlet groove can move toward the microfluidic channel 112 under the action of the electric field.

[0093] Or, as Figure 12c As shown, the two driving electrodes 21 can also be arranged on one side of the control circuit layer 3 close to the hollow portion 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the opening area 11, and the two driving electrodes 21 are respectively located on the bottom walls of the two accommodating grooves 111 to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the movement speed of the DNA molecules faster, and the detection response time of the microfluidic device improved.

[0094] like Figure 12a As shown, in a specific embodiment, a microgroove is formed on the common sidewall between two receiving grooves 111 within the same opening area 11. Microchannels are embedded within the microgroove. Microchannels are small pipes embedded within the microgroove that carry and control the flow of microfluids. The microchannels serve as microfluidic channels 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the microchannels can be micron-sized quartz tubes.

[0095] Of course, in other embodiments, the microfluidic channel 112 can also be a microgroove or microthrough hole provided on the common side wall to simulate a blood vessel, so that DNA molecules can directly pass through the microgroove or microthrough hole on the common side wall, thereby improving the space utilization and structural compactness of the microfluidic device.

[0096] like Figure 12aAs shown, in a specific embodiment, the electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. One of the two driving electrodes 21 is a positive driving electrode 211, and the other is a negative driving electrode 212. When the control substrate 200 is attached to the microfluidic substrate 100, the positive driving electrode 211 is located on the side close to the liquid outlet slot, and the negative driving electrode 212 is located on the side close to the liquid inlet slot, so that DNA molecules can enter the liquid outlet slot from the liquid inlet slot along the first direction X through the microfluidic channel 112.

[0097] In a specific embodiment, combining Figure 1 、 Figure 2 and Figure 12a The control circuit layer 3 may include a plurality of gate scanning lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35. The plurality of gate scanning lines 32 and the plurality of data lines 33 are arranged crosswise; each positive driving electrode 211 is electrically connected to a data line 33 via at least one thin film transistor 34, and all negative driving electrodes 212 are electrically connected to the common electrode line 35.

[0098] By using multiple gate scan lines 32 and data lines 33, each opening area 11 can be independently controlled. Thin-film transistors 34, acting as switching elements, efficiently control the flow of current, thereby improving the system's response speed and accuracy. Connecting all negative drive electrodes 212 to a common electrode line 35 simplifies circuit design, reduces the number of lines, lowers manufacturing costs, and improves system consistency and reliability.

[0099] Specifically, each opening area 11 is provided with at least one thin film transistor 34; the gate scan line 32 is used to open a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit a voltage signal to a specific column of thin film transistors 34 to enable a specific electrode pair 2 to generate an electric field.

[0100] The thin film transistor 34 includes a gate 341, a source 342, and a drain 343. The gate scan line 32 is electrically connected to the gate 341 of the thin film transistor 34 to turn the thin film transistor 34 on or off. The data line 33 is electrically connected to the source 342 of the thin film transistor 34, and the drain 343 of the thin film transistor 34 is electrically connected to the positive driving electrode 211. When the thin film transistor 34 is turned on, a voltage signal is transmitted to the positive driving electrode 211 via the data line 33, so that an electric field is generated between the positive driving electrode 211 and the negative driving electrode 212.

[0101] All the data lines 33 , gate scanning lines 32 and common electrode lines 35 are assembled on one side of the second substrate 4 and connected to an external control chip to control the operation of the microfluidic device.

[0102] See Figure 13 , Figure 13 A cross-sectional view of the microfluidic device provided in the tenth embodiment of the present application along line AA. The microfluidic device provided in the tenth embodiment of the present application has a structure substantially the same as that provided in the ninth embodiment, with the difference being that, in the tenth embodiment of the present application, the first surface 10 further has a plurality of first grooves 13, and the control substrate 200 is affixed to the first surface 10 of the microfluidic substrate 100 when in use, so that each driving electrode 21 is embedded in a first groove 13. This makes the electric field generated by the two driving electrodes 21 exert a greater force on the DNA molecules, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection response time of the microfluidic device. In addition, embedding the driving electrode 21 in the first groove 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0103] Specifically, the first groove 13 is disposed in the non-opening region 12 of the first surface 10 and extends from the first surface 10 toward the bottom. When the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100, the top surface of the drive electrode 21 embedded in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the drive electrode 21 is lower than the bottom surface of the microfluidic channel 112. This ensures that, along the thickness direction Y of the first base substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the drive electrode 21. That is, the microfluidic channel 112 is located in the area directly facing the two drive electrodes 21, thereby enhancing the force exerted by the electric field on the DNA molecules.

[0104] See Figure 14 , Figure 14 A cross-sectional view of the microfluidic device provided in the eleventh embodiment of the present application along line AA. The structure of the microfluidic device provided in the eleventh embodiment of the present application is basically the same as that of the microfluidic device provided in the ninth embodiment, except that, in the eleventh embodiment of the present application, the second surface 20 also has a plurality of second grooves 14; the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 when in use, so that each driving electrode 21 is embedded in a second groove 14. Thereby, the electric field generated by the two driving electrodes 21 has a greater force on the DNA molecules, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection response time of the microfluidic device. In addition, embedding the driving electrode 21 in the second groove 14 can further improve the space utilization and structural compactness of the microfluidic device.

[0105] Specifically, the second groove 14 is provided at a position on the second surface 20 corresponding to the non-opening area 12 and extends from the second surface 20 toward the first surface 10. When the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the top surface of the driving electrode 21 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112. This ensures that along the thickness direction Y of the first base substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21. That is, the microfluidic channel 112 is located in the area directly facing the two driving electrodes 21, thereby enhancing the force exerted by the electric field on the DNA molecules.

[0106] See Figure 15 , Figure 15 This is a cross-sectional view of the microfluidic device provided in the twelfth embodiment of the present application along line AA. The structure of the microfluidic device provided in the twelfth embodiment of the present application is basically the same as that of the microfluidic device provided in the ninth embodiment, except that, in the twelfth embodiment of the present application, the second substrate 4 includes a third surface 30 and a fourth surface 40 relative to each other; wherein, the control circuit layer 3 is provided on the third surface 30, and the electrode pair 2 is provided on the fourth surface 40 and is electrically connected to the control circuit layer 3 through the via 41; so that the third surface 30 of the second substrate 4 facing the first substrate 1 is flatter, making it easier for the third surface 30 of the second substrate 4 to fit with the surface of the first substrate 1 without squeezing the control circuit layer 3. In addition, when the control substrate 200 is fitted with the first surface 10 of the control substrate 200, the control circuit layer 3 can be prevented from being corroded by the evaporated liquid.

[0107] The present application also provides a method for preparing a microfluidic device, the specific steps of the preparation method comprising: Step S1: providing a first base substrate.

[0108] Specifically, the first substrate 1 includes a first surface 10; the first surface 10 has a plurality of opening areas 11 spaced apart, each opening area 11 has two accommodating grooves 111 spaced apart along a first direction, and the common side wall of the two accommodating grooves 111 has a microfluidic channel 112, and the two accommodating grooves 111 are connected through the microfluidic channel 112.

[0109] During the specific implementation process, the containing tank 111 and the microfluidic channel 112 can also be soaked in a modifying liquid and dried to change their surface hydrophilicity, making it difficult for DNA molecules to adhere to the quartz glass wall, so that the DNA molecules can be extended in the microfluidic channel 112 for easy observation and detection.

[0110] Step S2: fabricating a control circuit layer on the first base substrate.

[0111] Specifically, the control circuit layer 3 may include multiple gate scanning lines 32, multiple data lines 33, multiple thin film transistors 34, and common electrode lines 35. The multiple gate scanning lines 32 and the multiple data lines 33 are arranged crosswise; each opening area 11 is correspondingly provided with at least one thin film transistor 34.

[0112] Step S3: manufacturing a plurality of electrode pairs on the first base substrate, and disposing each electrode pair corresponding to an opening area.

[0113] Specifically, two driving electrodes 21 are formed at intervals on two opposite sides of the microfluidic channel 112 along the first direction X to form an electrode pair 2 .

[0114] After step S3 , the method may further include: attaching a control chip to one side of the first base substrate, and electrically connecting all the data lines, gate scanning lines, and common electrode lines to an external chip.

[0115] The above description is only an implementation method of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A microfluidic device, characterized in that: include: A first substrate, comprising a first surface having a plurality of spaced-apart openings, each of the spaced-apart openings having two receiving grooves spaced-apart along a first direction, a microfluidic channel being provided on a common sidewall of the two receiving grooves, and the two receiving grooves being connected via the microfluidic channel; A plurality of electrode pairs are provided on the first substrate; each electrode pair is provided corresponding to one of the opening areas; the electrode pairs include two driving electrodes, and the two driving electrodes are spaced apart and provided on opposite sides of the microfluidic channel along the first direction; A control circuit layer is provided on the first base substrate and is electrically connected to the plurality of electrode pairs; wherein the control circuit layer is used to apply a voltage to each of the electrode pairs.

2. The microfluidic device according to claim 1, wherein The plurality of electrode pairs and the control circuit layer are all disposed on the first surface, the two driving electrodes are spaced apart along the first direction on opposite sides of the two accommodating grooves, and the control circuit layer has a hollow portion corresponding to the opening area.

3. The microfluidic device according to claim 1, wherein The plurality of electrode pairs and the control circuit layer are all arranged on the second surface of the first base substrate; the second surface is arranged opposite to the first surface.

4. The microfluidic device according to claim 3, characterized in that The two driving electrodes are spaced apart and arranged on opposite sides of the two receiving grooves along the first direction; or The two driving electrodes are respectively arranged on the bottom walls of the two accommodating grooves.

5. The microfluidic device according to claim 1, wherein The first substrate further includes a second surface opposite to the first surface; wherein, The first surface further has a plurality of first grooves, and each of the driving electrodes is embedded in one of the first grooves; or The second surface further has a plurality of second grooves, and each of the driving electrodes is embedded in one of the second grooves.

6. The microfluidic device according to claim 5, characterized in that The top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel.

7. The microfluidic device according to any one of claims 1 to 6, characterized in that: The microfluidic channel is a microgroove or microthrough hole arranged on the common side wall.

8. The microfluidic device according to any one of claims 1 to 6, wherein: The common side wall is provided with a microgroove, and a microchannel is embedded in the microgroove, and the microchannel serves as the microfluidic channel.

9. The microfluidic device according to claim 8, characterized in that The micro-channel is spaced apart from the bottom wall of the accommodating groove, and one end of the micro-channel protrudes from the side surface of the common side wall and extends into the accommodating groove.

10. The microfluidic device according to any one of claims 1 to 6, characterized in that: The electrode pair includes a positive driving electrode and a negative driving electrode; the control circuit layer includes: a plurality of gate scan lines; A plurality of data lines are arranged to intersect the gate scanning lines; A plurality of thin film transistors; each of the positive driving electrodes is electrically connected to the data line via at least one thin film transistor; Common electrode line; all of the negative driving electrodes are electrically connected to the common electrode line.

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