Water changing method for wet oxygen system, wet oxygen system and oxidation diffusion equipment

Abstract

The invention belongs to the technical field of wet oxygen processes, and discloses a wet oxygen system water changing method, a wet oxygen system and oxidation diffusion equipment. The water changing method for the wet oxygen system comprises the steps that the water passing set time length and the water changing set time length are set, if the water passing set time length is not smaller than the water changing set time length, starting of the water changing process is paused, first reminding information is reported, and the first reminding information can remind a user to change the water passing set time length and the water changing set time length; water quality detection is conducted in the water passing process, a water quality detection result is obtained after water passing is conducted for a set time length, if the water quality detection result meets the water quality requirement, the wet oxygen system is controlled to continue to conduct the water changing process, and otherwise, the water changing process is suspended; in the water changing process, if the actual water changing duration exceeds the water changing set duration, the water changing process is stopped, second reminding information is reported, and the second reminding information can remind the user to check the wet oxygen system. The water changing method of the wet oxygen system can ensure reasonable water quality detection and water changing, and further ensures the water changing process.

Description

Technical Field

[0001] The present invention relates to the technical field of wet oxygen processes, and in particular to a wet oxygen system water replacement method, a wet oxygen system and oxidation diffusion equipment. Background Art

[0002] Oxidation diffusion equipment can form a PN junction within the silicon wafer of a solar cell. Conventional processes typically utilize a dry oxygen method for high-temperature boron diffusion to form the PN junction. This dry oxygen method suffers from long processing times, high oxygen consumption, and high costs. To address these issues, a wet oxygen process for high-temperature boron diffusion has emerged.

[0003] The wet oxygen process, used in photovoltaic processes, involves bubbling gases such as oxygen into the reaction chamber, carrying water vapor with them. This process effectively lowers the reaction chamber temperature, extending the life of quartz components, shortening process time and increasing equipment production capacity. Furthermore, the lower reaction temperature reduces the failure rate of reaction chamber sealing components, promoting stable equipment operation.

[0004] Generally, a wet oxygen system is required to carry out the above-mentioned wet oxygen process. In a wet oxygen system, there are high requirements for water purity, and regular water changes are required. During the water change process, the water quality of the pure water is generally required to be tested. Once the water quality meets the requirements, the water change can be continued. The time required for the above-mentioned water change process can generally be set according to the user's needs. However, if the user sets the water quality test time and water change time unreasonably, the water change may fail or the water quality test may not be in place, affecting the downstream oxidation diffusion process and affecting the quality of the product.

[0005] Therefore, there is an urgent need for a wet oxygen system water replacement method, a wet oxygen system and an oxidation diffusion device to solve the above problems. Summary of the Invention

[0006] According to one aspect of the present invention, an object is to provide a wet oxygen system water exchange method, which can ensure the reasonable implementation of water quality detection and water exchange during the water exchange process, thereby ensuring the successful implementation of the wet oxygen system water exchange process and ensuring the smooth implementation of the downstream oxidation diffusion process.

[0007] To achieve this object, the present invention adopts the following technical solutions:

[0008] The wet oxygen system water change method can control the water change process of the wet oxygen system. The wet oxygen system water change method includes:

[0009] S10, setting a water flow setting time and a water change setting time. If the water flow setting time is not less than the water change setting time, the water change process is suspended and a first reminder message is reported. The first reminder message is configured to remind the user to change the water flow setting time and the water change setting time.

[0010] S20, testing the water quality during the water flow process. After the water flow has passed a set time, the water quality test result is obtained. If the water quality test result meets the water quality requirements, the wet oxygen system is controlled to continue the water exchange process; otherwise, the water exchange process is suspended.

[0011] S30. During the water changing process, if the actual water changing time exceeds the set water changing time, the water changing process is stopped and a second reminder message is reported. The second reminder message is configured to remind the user to check the wet oxygen system.

[0012] As a preferred embodiment of the wet oxygen system water exchange method provided by the present invention, "testing the water quality during the water flow process" includes:

[0013] S21. During the water flow process, after the set water flow time, the temperature of the wet oxygen system and the water flow rate are stable;

[0014] S22. Obtain a water resistivity test value.

[0015] As a preferred embodiment of the wet oxygen system water replacement method provided by the present invention, "obtaining water quality test results, if the water quality test results meet the water quality requirements" includes:

[0016] S23. Determine the relationship between the water resistivity test value and the required water resistivity. If the water resistivity test value is equal to the required water resistivity within the error range, determine that the water quality test result meets the water quality requirements.

[0017] As a preferred embodiment of the method for changing water in a wet oxygen system provided by the present invention, before S10, the method further includes:

[0018] Control the wet oxygen system to drain the original water;

[0019] Control water ingress into the wet oxygen system and drain it again.

[0020] According to another aspect of the present invention, an object is to provide a wet oxygen system, wherein the wet oxygen system uses the wet oxygen system water exchange method as described in any of the above schemes to control the water exchange process, the wet oxygen system comprising: a water inlet unit, a wet oxygen unit, a drainage unit, and a water quality detection device, the water inlet unit being connected to the wet oxygen unit and configured to feed water into the wet oxygen unit;

[0021] The wet oxygen unit can mix water and oxygen to form steam, the wet oxygen unit is connected to the oxidation diffusion reaction chamber of the oxidation diffusion device, and the steam can enter the oxidation diffusion reaction chamber;

[0022] The drainage unit is connected to the wet oxygen unit and is configured to discharge wastewater in the wet oxygen unit;

[0023] The water quality detection device is provided in the water inlet unit and is configured to detect the water quality of the water about to enter the wet oxygen unit.

[0024] As a preferred solution of the wet oxygen system provided by the present invention, the wet oxygen unit includes a source bottle and a constant temperature shell. The source bottle is connected to the water inlet unit and the oxidation diffusion reaction chamber. The constant temperature shell is arranged around the source bottle and can keep the source bottle warm.

[0025] As a preferred solution of the wet oxygen system provided by the present invention, there are multiple wet oxygen units, and the multiple wet oxygen units are respectively connected to multiple oxidation diffusion reaction chambers.

[0026] As a preferred embodiment of the wet oxygen system provided by the present invention, the wet oxygen system further includes a control unit and a prompt unit, the water quality detection device is communicatively connected to the control unit, and the control unit is configured to control the detection process of the water quality detection device and to receive the water quality detection signal of the water quality detection device;

[0027] The prompt unit is communicatively connected to the control unit and can report a first prompt message and a second prompt message.

[0028] As a preferred solution of the wet oxygen system provided by the present invention, the drainage unit includes a drainage pipe and a wastewater tank. The drainage pipe is connected to the wet oxygen unit and the wastewater tank. The wastewater tank is configured to accommodate drainage from the wet oxygen unit.

[0029] According to another aspect of the present invention, an object is to provide an oxidation diffusion device, which includes an oxidation diffusion reaction chamber and a wet oxygen system as described in any of the above solutions.

[0030] Beneficial effects of the present invention:

[0031] The wet oxygen system water change method provided by the present invention implements a foolproof time setting function by comparing the set water flow time and the set water change time, thereby preventing the problem of unsuccessful water changes caused by the set water flow time being shorter than the set water change time. By reporting a first reminder message, the user can be reminded to change the set water flow time and the set water change time so that the set water change time is longer than the set water flow time, ensuring the proper water quality testing and water change during the water change process, and thus ensuring the successful water change process of the wet oxygen system.

[0032] The wet oxygen system water replacement method also ensures that the wet oxygen gas entering the oxidation diffusion equipment subsequently meets the requirements by testing the water quality during the water flow process, thereby ensuring the quality of the oxidation diffusion product.

[0033] The wet oxygen system water changing method also detects abnormalities in a timely manner by monitoring and comparing the actual water changing time and the set water changing time, and inspects the wet oxygen system with abnormalities, thereby ensuring the successful implementation of the water changing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0035] Figure 1 is a structural diagram of a wet oxygen system provided in Example 1 of the present invention;

[0036] Figure 2 This is a partial structural diagram of the wet oxygen unit provided in Example 1 of the present invention. Figure 1 ;

[0037] Figure 3 This is a partial structural diagram of the wet oxygen unit provided in Example 1 of the present invention. Figure 2 ;

[0038] Figure 4 This is a schematic structural diagram of a source bottle provided in Example 1 of the present invention;

[0039] Figure 5 This is a flow chart of a water replacement method for a wet oxygen system provided in Example 2 of the present invention.

[0040] In the picture:

[0041] 100, wet oxygen unit; 110, source bottle; 111, water outlet pipe; 120, constant temperature housing; 130, mounting base;

[0042] 200, drainage unit; 210, drainage pipe; 220, wastewater tank;

[0043] 300. Water quality testing device;

[0044] 400, control unit; 410, human-computer interaction interface;

[0045] 500, prompt unit;

[0046] 600, rack. DETAILED DESCRIPTION

[0047] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0048] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0049] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0050] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0051] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0052] It should also be noted that, in the description of the present invention, unless otherwise expressly specified or limited, the terms "disposed," "connected," and "fixed" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections. Those skilled in the art will understand the specific meanings of these terms in the present invention based on the specific circumstances.

[0053] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0054] In this embodiment, the term "and / or" simply describes the association relationship between associated objects, indicating that three possible relationships exist. For example, A and / or B can represent the following three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this invention generally indicates that the associated objects are in an "or" relationship.

[0055] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0056] Example 1

[0057] Figure 1 The structural diagram of the wet oxygen system provided by the first embodiment of the present invention is shown. Figure 1 This embodiment provides a wet oxygen system and an oxidation diffusion device. The oxidation diffusion device includes an oxidation diffusion reaction chamber and the wet oxygen system described above. The wet oxygen system includes a frame 600, a water inlet unit, a wet oxygen unit 100, a drainage unit 200, and a water quality detection device 300. The water inlet unit, the wet oxygen unit 100, the drainage unit 200, and the water quality detection device 300 are all mounted on the frame 600.

[0058] Specifically, the water inlet unit is connected to the wet oxygen unit 100 and is configured to introduce water into the wet oxygen unit 100. The wet oxygen unit 100 can mix water and oxygen to form steam, which is then connected to the oxidation diffusion reaction chamber of the oxidation diffusion device, allowing the steam to enter the oxidation diffusion reaction chamber. The drainage unit 200 is connected to the wet oxygen unit 100 and is configured to drain wastewater from the wet oxygen unit 100. The water quality detection device 300 is disposed in the water inlet unit and is configured to detect the quality of the water about to enter the wet oxygen unit 100.

[0059] Figure 2A schematic diagram showing the partial structure of the wet oxygen unit provided in the first embodiment of the present invention Figure 1 ; Figure 3 A schematic diagram showing the partial structure of the wet oxygen unit provided in the first embodiment of the present invention Figure 2 ; Figure 4 FIG. 1 shows a schematic diagram of the structure of the source bottle provided in the first embodiment of the present invention. Figure 2-Figure 4 The wet oxygen unit 100 includes a source bottle 110 and a constant temperature shell 120. The source bottle 110 is connected to the water inlet unit and the oxidation diffusion reaction chamber, and the constant temperature shell 120 is arranged outside the source bottle 110 to keep the source bottle 110 warm.

[0060] More specifically, the wet oxygen unit 100 also includes a mounting base 130. The source bottle 110 and the constant temperature housing 120 are both mounted on the mounting base 130, and the mounting base 130 is capable of heating the source bottle 110. The mounting base 130 includes a bottom and two vertical portions. The two vertical portions are adjacently arranged and are both arranged on the supporting surface of the bottom, and the angle between the two vertical portions is a right angle. The adjacent two side portions of the constant temperature housing 120 can abut against the two vertical portions. This ensures the stability of the source bottle 110 when it is mounted on the mounting base 130.

[0061] Preferably, two source bottles 110 are specifically provided on a mounting base 130, and a constant temperature housing 120 is provided outside each source bottle 110. Different source bottles 110 are connected to different oxidation diffusion reaction chambers, and different source bottles 110 are respectively connected to water inlet units, and can be respectively filled with water.

[0062] It should be noted that the top of the source bottle 110 is provided with a water inlet branch, an air inlet branch, and a heat tracing branch. The water inlet branch is used to connect to the water inlet unit and is configured to input pure water into the source bottle 110. The air inlet branch is used to input the source gas, which can mix with the pure water in the source bottle 110 to form steam. The heat tracing branch is used to transport the above steam to the oxidation diffusion reaction chamber.

[0063] More specifically, in this embodiment, there are multiple wet oxygen units 100, each of which is mounted on a rack 600 and connected to a plurality of oxidation diffusion reaction chambers. With this arrangement, the same wet oxygen system can provide wet oxygen to multiple oxidation diffusion reaction chambers.

[0064] Continue to refer to Figure 1 The drainage unit 200 includes a drainage pipe 210 and a wastewater tank 220. A water outlet branch pipe 111 is provided at the lowest point of the bottom of the source bottle 110. The water outlet branch pipe 111 is connected to the drainage pipe 210, and the drainage pipe 210 is connected to the wastewater tank 220, so as to drain the source bottle 110. The wastewater tank 220 is provided at the bottom of the rack 600 and is configured to accommodate wastewater discharged from each source bottle 110.

[0065] Continue to refer to Figure 1 The wet oxygen system further includes a control unit 400. The water quality detection device 300 is communicatively connected to the control unit 400. The control unit 400 is configured to control the detection process of the water quality detection device 300 and to receive water quality detection signals from the water quality detection device 300. In this embodiment, the water quality detection device 300 is specifically capable of detecting the water resistivity of water entering the source bottle 110 through the water inlet unit. The water resistivity detection result can be used to determine whether the water in the water inlet unit meets the water quality requirements.

[0066] It should be noted that the water inlet valve in the water inlet unit and the drain valve in the drain unit 200 are respectively communicatively connected to the control unit 400. The control unit 400 can control the water inlet and drain processes of the wet oxygen system. In this embodiment, the control unit 400 can specifically be a PLC controller or a single-chip microcomputer, and its structure and control principle are not detailed here in this embodiment.

[0067] Preferably, the control unit 400 is further provided with a human-machine interface 410. Through the human-machine interface 410, the user can set parameters such as time and temperature of each working process of the wet oxygen system and obtain information such as the progress of each working process.

[0068] Specifically, the wet oxygen system further includes a prompt unit 500, which is communicatively connected to the control unit 400. The prompt unit 500 can remind the user if the user sets unreasonable parameters such as the water flow time during the wet oxygen system water change process, and can also remind the user if a malfunction of the wet oxygen system causes a water change failure.

[0069] More specifically, the prompt unit 500 includes a prompt light and a buzzer. When the multiple source bottles 110 are performing a normal mixing process of the source gas and pure water and a steam supply process, the prompt light is always green and the buzzer is not working; when the multiple source bottles 110 are performing a normal water exchange process, the prompt light is always yellow and the buzzer is not working; when the multiple source bottles 110 are not working, the prompt light is always red and the buzzer is not working; when the wet oxygen system fails or an abnormality occurs in a working process, the prompt light is flashing red and the buzzer is ringing.

[0070] More specifically, the function of the prompt unit 500 may also include a display module integrated on the human-computer interaction interface 410, which can display the working status of the wet oxygen system, and can display prompt information when the wet oxygen system fails or a certain working process is abnormal, so as to remind the user to check parameters such as the water flow setting time, or check the hardware structure of the wet oxygen system.

[0071] Example 2

[0072] Figure 5 The flow chart of the water changing method of the wet oxygen system provided by the second embodiment of the present invention is shown. Figure 5 This embodiment provides a method for changing water in a wet oxygen system. The method can control the water changing process of the wet oxygen system provided in Example 1. The method specifically includes the following steps:

[0073] First, the source bottle 110 of the wet oxygen system is controlled to drain the existing water. Then, the water inlet unit is controlled to operate, water is added to the source bottle 110, and then the water is drained again. Through these steps, the source bottle 110 can be flushed, thereby cleaning the sediment attached to the inner wall of the source bottle 110, improving the cleanliness of the source bottle 110, thereby ensuring the cleanliness of the steam generated by the wet oxygen unit 100, and further ensuring the quality of the products of the downstream oxidation diffusion reaction.

[0074] Step S10: Set the water flow time and the water change time. If the water flow time is not less than the water change time, the water change process is suspended and a first reminder message is issued. The first reminder message is configured to remind the user to change the water flow time and the water change time. In this embodiment, the first reminder message is specifically issued by the reminder unit 500 provided in the first embodiment.

[0075] By comparing the set water flow time and the water change time, a foolproof time setting function is implemented to avoid water change failures caused by the water flow time being shorter than the water change time. By reporting the first reminder message, the user can be reminded to change the water flow time and the water change time, prompting the user to set the water change time longer than the water flow time, ensuring the proper water quality testing and water change process, and thus ensuring the successful water change process of the wet oxygen system.

[0076] Step S20: Perform water quality testing during the water flow process. After the set water flow time, obtain the water quality test results. If the water quality test results meet the water quality requirements, control the wet oxygen system to continue the water exchange process; otherwise, suspend the water exchange process.

[0077] Specifically, the above-mentioned “testing water quality during the water flow process” includes the following steps:

[0078] Step S21: During the water flow process, after the set water flow time, the temperature and water flow rate of the wet oxygen system are stabilized. In this embodiment, the set water flow time is generally set to 1 minute.

[0079] Step S22: Obtaining a water resistivity detection value.

[0080] More specifically, the above-mentioned “obtaining water quality test results, if the water quality test results meet the water quality requirements” specifically includes the following steps:

[0081] Step S23: Determine the relationship between the water resistivity detection value and the required water resistivity. If the water resistivity detection value is equal to the required water resistivity within the error range, the water quality test result is determined to meet the water quality requirements. In this embodiment, the water resistivity of the water in the water inlet unit is between 1 MΩ·cm and 18.25 MΩ·cm, which meets the pure water quality requirements. It should be noted that in this embodiment, the water resistivity detection value is obtained using the water quality detection device 300.

[0082] After the set water flow time has passed and the water quality test results meet the water quality requirements, the water change process continues.

[0083] Step S30: During the water change process, if the actual water change duration exceeds the set water change duration, the water change process is stopped and a second reminder message is issued, which is configured to remind the user to check the wet oxygen system. In this embodiment, the second reminder message is specifically issued by the reminder unit 500 provided in the first embodiment.

[0084] By monitoring and comparing the actual water change time and the set water change time, abnormalities can be discovered in a timely manner, and the wet oxygen system with abnormalities can be inspected to ensure the successful completion of the water change process.

[0085] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A method for changing water in a wet oxygen system, characterized in that: Able to control the water change process of the wet oxygen system. The water change methods of the wet oxygen system include: S10, setting a water flow setting time and a water change setting time. If the water flow setting time is not less than the water change setting time, the water change process is suspended and a first reminder message is reported. The first reminder message is configured to remind the user to change the water flow setting time and the water change setting time. S20, testing the water quality during the water flow process. After the water flow has passed a set time, the water quality test result is obtained. If the water quality test result meets the water quality requirements, the wet oxygen system is controlled to continue the water exchange process; otherwise, the water exchange process is suspended. S30. During the water changing process, if the actual water changing time exceeds the set water changing time, the water changing process is stopped and a second reminder message is reported. The second reminder message is configured to remind the user to check the wet oxygen system.

2. The method for changing water in a wet oxygen system according to claim 1, characterized in that: "Water quality testing during the water flow process" includes: S21. During the water flow process, after the set water flow time, the temperature of the wet oxygen system and the water flow rate are stable; S22. Obtain a water resistivity test value.

3. The method for changing water in a wet oxygen system according to claim 2, characterized in that: "Obtaining water quality test results, if the water quality test results meet the water quality requirements" includes: S23. Determine the relationship between the water resistivity test value and the required water resistivity. If the water resistivity test value is equal to the required water resistivity within the error range, determine that the water quality test result meets the water quality requirements.

4. The method for changing water in a wet oxygen system according to claim 1, characterized in that: Prior to S10, this also included: Control the wet oxygen system to drain the original water; Control water ingress into the wet oxygen system and drain it again.

5. Wet oxygen system, characterized in that, A water exchange method for a wet oxygen system according to any one of claims 1 to 4 is used to control a water exchange process, wherein the wet oxygen system comprises: a water inlet unit, a wet oxygen unit (100), a drainage unit (200), and a water quality detection device (300), wherein the water inlet unit is connected to the wet oxygen unit (100) and is configured to feed water into the wet oxygen unit (100); The wet oxygen unit (100) is capable of mixing water and oxygen to form steam, the wet oxygen unit (100) is connected to the oxidation diffusion reaction chamber of the oxidation diffusion device, and the steam is capable of entering the oxidation diffusion reaction chamber; The drainage unit (200) is connected to the wet oxygen unit (100) and is configured to discharge wastewater in the wet oxygen unit (100); The water quality detection device (300) is provided in the water inlet unit and is configured to detect the water quality of water about to enter the wet oxygen unit (100).

6. The wet oxygen system according to claim 5, characterized in that: The wet oxygen unit (100) comprises a source bottle (110) and a constant temperature shell (120); the source bottle (110) is connected to the water inlet unit and the oxidation diffusion reaction chamber; the constant temperature shell (120) is arranged outside the source bottle (110) and can keep the source bottle (110) warm.

7. The wet oxygen system according to claim 5, characterized in that: There are a plurality of wet oxygen units (100), and the plurality of wet oxygen units (100) are respectively connected to a plurality of oxidation diffusion reaction chambers.

8. The wet oxygen system according to claim 5, characterized in that: The wet oxygen system further comprises a control unit (400) and a prompt unit (500), the water quality detection device (300) is communicatively connected to the control unit (400), and the control unit (400) is configured to control the detection process of the water quality detection device (300) and is capable of receiving a water quality detection signal from the water quality detection device (300); The prompt unit (500) is communicatively connected to the control unit (400) and is capable of reporting first prompt information and second prompt information.

9. The wet oxygen system according to claim 5, characterized in that: The drainage unit (200) includes a drainage pipe (210) and a wastewater tank (220). The drainage pipe (210) is connected to the wet oxygen unit (100) and the wastewater tank (220). The wastewater tank (220) is configured to accommodate drainage of the wet oxygen unit (100).

10. Oxidation diffusion equipment, characterized in that The invention comprises an oxidation diffusion reaction chamber and a wet oxygen system according to any one of claims 5 to 9.

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