Cutting fluid drainage nozzle of height measurement slicing machine

Abstract

The invention discloses a cutting fluid drainage nozzle of a high-measurement slicing machine, which belongs to the technical field of cutting processing equipment and comprises a base, a drainage panel, an adjustable composite damping support module, a piezoelectric adjusting strip, a microcirculation flow channel network, a vibration sensing system and a control system. Comprising a high-molecular polymer damping material layer and a high-strength light alloy restraint layer, a piezoelectric ceramic actuator is embedded, passive damping energy absorption and active vibration counteracting are achieved, a piezoelectric adjusting strip is fixed in a drainage groove, and the dual functions of local vibration suppression and flow control are achieved; vibration sensing monitors the vibration state in real time through a plurality of piezoelectric acceleration sensors, the control system achieves working condition self-adaption and frequency division cooperative control through a neural network algorithm, cooperative work is achieved through multiple vibration reduction mechanisms, the vibration suppression effect is improved, the line breakage rate is reduced, meanwhile, the functions of fault diagnosis and predictive maintenance are achieved, and the reliability of the system is improved. And the cutting precision and efficiency and the equipment intelligence level are improved.

Description

Technical Field

[0001] The invention relates to the technical field of cutting processing equipment, in particular to a cutting fluid discharge nozzle for a high-precision slicer. Background Art

[0002] With the rapid development of the new energy industry, silicon wafer cutting technology, as a key process link in solar cell manufacturing, has increasingly higher requirements for cutting accuracy and efficiency. The existing silicon wafer cutting slicer discharge nozzle system faces technical challenges such as vibration control, cutting fluid distribution uniformity and system stability during high-speed cutting.

[0003] The drainage nozzle of the silicon wafer cutting and slicing machine in the existing technology usually has a relatively thin stainless steel plate as its drainage panel. When the main roller of the equipment runs at high speed, the drainage panel is prone to high-frequency vibration and deformation due to insufficient rigidity. Since the cutting process requires the gap between the drainage panel and the wire mesh to be less than 5mm, this vibration can easily cause the panel to collide with the wire mesh, resulting in serious problems such as wire breakage, material loss and poor wire mark TTV (total thickness variation).

[0004] The existing liquid discharge nozzle system also has the following technical defects: First, the cutting fluid is unevenly distributed, and the traditional direct injection method is prone to produce dead angles in the liquid supply, affecting the cutting effect and wire mesh lubrication; second, there is a lack of effective vibration monitoring and active control means, and relying solely on passive structural reinforcement is difficult to cope with vibration problems under complex working conditions; third, the system lacks intelligent control functions and cannot automatically adjust the working state according to different cutting parameters; finally, there is a lack of fault warning and diagnosis capabilities, and equipment maintenance mainly relies on regular inspections, making it difficult to achieve predictive maintenance.

[0005] Therefore, there is an urgent need for an intelligent, multifunctional liquid discharge nozzle system that integrates passive damping, active control, flow field optimization and working condition adaptation functions, which can eliminate the wire breakage problem caused by vibration and improve the cutting accuracy, efficiency and intelligence level of the equipment through the collaboration of multiple technologies. Summary of the Invention

[0006] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a cutting fluid discharge nozzle for a high-precision slicer to solve the above-mentioned problems.

[0007] The objective of the present invention is achieved through the following technical solutions: comprising: a base, on which a plurality of nozzles are fixedly connected; a drainage panel, which is rotatably connected to the bottom end of the base, and a plurality of drainage grooves are provided on the top of the drainage panel; a fixed bracket 1 symmetrically arranged on the left and right, which is fixedly connected to the top end of the drainage panel; a symmetrically arranged fixed bracket 2, which is fixedly connected to one end of the base close to the drainage panel; an adjustment bracket 1, which is threadedly connected between two adjustment screws 1 rotatably arranged on the fixed bracket 1; an adjustment bracket 2, which is threadedly connected between two adjustment screws 2 rotatably arranged on the fixed bracket 2; a plurality of adjustable composite damping support modules, the support module being a sandwich composite structure, including a high molecular polymer damping material layer in the middle and two upper and lower high-strength lightweight alloy constraint layers, in which a piezoelectric ceramic actuator is embedded. The device comprises a support module connected between the adjustment bracket 1 and the adjustment bracket 2; a plurality of piezoelectric adjustment strips serving as local vibration active suppression units, the piezoelectric adjustment strips being made of piezoelectric material and being fixedly connected to the drainage groove, with a micron-level gap of 0.2-0.3 mm in height formed between the top of the piezoelectric adjustment strips and the top of the drainage panel; a constrained damping structure fixed to the bottom of the drainage panel, comprising a damping material layer and a rigid constraint layer fixed to the bottom of the damping material layer; a microcirculation flow channel network arranged on the alloy shell of the composite damping support module and on the back of the drainage panel, for forming a uniform liquid film distribution of the cutting fluid; a vibration sensing system comprising a plurality of miniature piezoelectric acceleration sensors embedded in key positions of the drainage panel; a control system comprising a microprocessor controller electrically connected to the vibration sensor, the piezoelectric ceramic actuator and the piezoelectric adjustment strips.

[0008] The adjustable composite damping support module is connected to the drainage panel base through a precise thread or slide mechanism, allowing fine-tuning of the preload applied to the drainage panel and generating active reverse force through the embedded piezoelectric ceramic actuator to offset harmful vibrations in real time.

[0009] The piezoelectric regulating strip offsets the high-frequency micro-vibration on the surface of the drainage panel through its own reverse strain, and is used to control the flow rate and liquid film thickness of the cutting fluid flowing through the drainage groove.

[0010] The damping material layer of the constrained damping structure adopts viscoelastic polymer material, and the rigid constraint layer adopts carbon fiber composite material or high-strength aluminum alloy. The structure is used to passively absorb broadband vibration energy of the drainage panel.

[0011] The microcirculation channel network is used to guide part of the cutting fluid to form a uniform liquid film on the back of the drainage panel and continuously remove the heat generated by vibration and friction of the drainage panel.

[0012] It also includes a motor for driving the adjustment screw 1 and the adjustment screw 2 to rotate, and the motor is fixedly connected to the base and the drainage panel respectively to achieve automatic adjustment of the position of the adjustment bracket 1 and the adjustment bracket 2.

[0013] The vibration sensing system includes multiple piezoelectric acceleration sensors fixed at different positions of the drainage panel. The sensor installation positions are determined by the vibration antinode points determined by finite element analysis.

[0014] The control system includes a microprocessor controller, a signal conditioning circuit and a driving circuit. The controller is electrically connected to the vibration sensor, the piezoelectric ceramic actuator and the piezoelectric adjustment strip.

[0015] The controller can perform spectrum analysis on the collected vibration signals and perform frequency division and coordinated control based on the analysis results: the low-frequency, high-amplitude vibration signals are distributed to the support module for posture and preload adjustment; and the high-frequency, small-amplitude vibration signals are distributed to the adjustment bar to quickly offset surface micro-vibrations.

[0016] The nozzle has the function of self-adapting to working conditions, which can automatically adjust the system preload and control parameters according to different cutting speeds and material properties, and has fault diagnosis function.

[0017] The beneficial effects of the present invention are: The present invention adopts a dual vibration reduction mechanism that combines passive damping energy absorption with active vibration cancellation. The sandwich composite structure of the adjustable composite damping support module efficiently converts mechanical vibration energy into heat energy and dissipates it. At the same time, the embedded piezoelectric ceramic actuator is used to generate a precise reverse force opposite to the harmful vibration phase in real time to actively cancel the vibration, and cooperates with the reverse strain of the piezoelectric adjustment strip to specifically suppress high-frequency micro-vibrations, realizing all-round suppression from broadband to micro-vibrations. Multiple vibration reduction mechanisms work together, and the vibration suppression effect is improved by more than 90% compared with the traditional fixed reinforcement rib solution, and the wire breakage rate is reduced by more than 98% compared with the existing technology, fundamentally solving the technical problems such as wire breakage, material loss and poor line mark TTV caused by vibration.

[0018] The present invention has the function of adaptive working conditions. It establishes a mapping relationship between cutting conditions and optimal control parameters through a neural network algorithm. It can automatically adjust key parameters such as system preload, control gain, response threshold, etc. according to different cutting speeds and material properties. It completes parameter optimization calculation within 100ms and parameter update within 5 seconds, always maintaining the best vibration reduction state. The system can adapt to a variety of materials such as monocrystalline silicon, polycrystalline silicon, sapphire, different specifications of silicon rods with diameters from 50mm to 300mm, and different cutting speeds from 50mm / min to 500mm / min. It has strong working condition versatility, which greatly improves the adaptability and practicality of the equipment.

[0019] The present invention optimizes the distribution and flow of the cutting fluid by integrating a microcirculation channel network, so that the cutting fluid forms a uniform liquid film on the back of the drainage panel, achieving dead-angle-free liquid supply to the wire mesh, and continuously removing the heat generated by the vibration and friction of the drainage panel, effectively suppressing thermal deformation, and ensuring high flatness during long-term operation. The dynamic flow control function of the piezoelectric adjustment strip enables the cutting fluid flow control accuracy to reach ±1.5%, reduces the line mark TTV defect rate by more than 70%, significantly improves the silicon wafer quality rate and cutting consistency, and fundamentally improves product quality.

[0020] The present invention has outstanding economic benefits. By eliminating the wire breakage problem caused by vibration and combining precise flow control and angle adjustment functions, it significantly reduces material losses caused by cutting interruptions, improves production efficiency by 25-30%, improves cutting fluid utilization efficiency by 20%, reduces energy consumption by 15%, and reduces unplanned downtime by more than 80% due to the fault diagnosis function. Maintenance costs are reduced and the average trouble-free operation time of equipment is increased, bringing significant economic benefits and competitive advantages to enterprises.

[0021] The present invention achieves a high degree of system integration, integrating support, damping, cooling, diversion, sensing, control, angle adjustment and flow control functions into the intelligent damping and diversion assembly, avoiding the complexity and mutual interference of multiple independent systems. It has a compact structure and powerful functions. A single integrated system can realize the functions of traditional multiple sets of equipment, greatly simplifying the equipment structure and improving system reliability.

[0022] The present invention has ultra-high-precision control capabilities, with an angle adjustment accuracy of ±0.03°, a position adjustment accuracy of ±0.02 mm, a piezoelectric adjustment bar response time of less than 1 millisecond, and a motor-driven automatic adjustment function response time of less than 30 seconds. These ultra-high-precision control capabilities ensure the stability and consistency of the cutting process and improve the degree of automation and processing accuracy of the equipment.

[0023] The present invention is equipped with an intelligent fault prevention system that can identify a variety of specific fault modes such as aging of damping materials, fatigue of piezoelectric elements, motor failure, sensor drift, flow channel blockage, etc. The prediction accuracy reaches more than 85%, and it can provide early warning of potential faults. The predictive maintenance function predicts the remaining service life and optimal maintenance time of each key component based on the equipment's historical data and current status information, realizing true unattended operation and significantly improving the equipment's intelligence level and operation and maintenance efficiency.

[0024] The present invention excels in environmental adaptability. The thermal management function of the microcirculation channel network enables the system to operate stably at higher cutting speeds, while extending the service life of the damping material and piezoelectric elements. The system can maintain optimal performance under different working conditions, and the variation in vibration amplitude between working conditions is controlled within ±5%, which greatly improves the stability and environmental adaptability of the system and ensures the reliable operation of the equipment under various complex working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is the overall structural diagram of the present invention; Figure 2 It is an overall exploded view of the present invention; Figure 3 The local explosion of the present invention Figure 1 ; Figure 4 The local explosion of the present invention Figure 2 ; Figure 5 is a side view of the present invention; Figure 6 For the present invention Figure 5 Middle AA section view; Figure 7 For the present invention Figure 6 Middle BB cross-section; Figure 8 This is the appearance structure diagram of the present invention; Figure 9 For the present invention Figure 6 Enlarged view of point C in the middle; Figure 10 For the present invention Figure 8 Enlarged view of point D in the middle; Figure 11 For the present invention Figure 7 Enlarged view of point E in the middle; Figure 12 For the present invention Figure 1 Enlarged view of point F in the middle.

[0026] Description of the numbers in the figure 1. Base; 2. Nozzle; 3. Drainage panel; 4. Fixed bracket 1; 5. Adjusting screw 1; 6. Adjusting bracket 1; 7. Fixed bracket 2; 8. Adjusting screw 2; 9. Adjusting bracket 2; 10. Support module; 11. Motor; 12. Drainage trough; 13. Adjustment bar; 14. Damping material layer; 15. Rigid constraint layer. DETAILED DESCRIPTION

[0027] The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0028] It is to be noted that the directions of "left", "right", "up", "down", "front", "back", "inside" and "outside" in the following schemes are all relative directions and are not listed here one by one.

[0029] Example 1: like Figures 1 to 12 As shown, this embodiment provides a basic vibration suppression structure for the cutting fluid discharge nozzle of a high-precision slicer. This structure effectively solves the problems of wire breakage, material loss, and poor line mark TTV caused by the vibration of the drainage panel in the prior art by combining mechanical structure adjustment, passive damping, and active piezoelectric control.

[0030] The discharge nozzle of this embodiment includes a base 1, which is an integrally cast aluminum alloy structure with good rigidity and stability. A plurality of nozzles 2 are evenly distributed on the upper surface of the base 1. The inner diameter of each nozzle 2 is 8-12 mm and is used to supply cutting fluid to the cutting area. The nozzle 2 is made of stainless steel and the surface is precision-processed to ensure the smooth and uniform flow of the cutting fluid.

[0031] The drainage panel 3 is connected to the bottom end of the base 1 through a rotating connection mechanism. The rotating connection mechanism adopts a precision bearing structure, which allows the drainage panel 3 to be fine-tuned within a certain angle range. The drainage panel 3 is made of high-strength stainless steel plate with a thickness of 3-5 mm. A plurality of drainage grooves 12 are opened on its top. The drainage grooves 12 are evenly distributed along the length direction of the drainage panel 3. The width of each drainage groove 12 is 2-4 mm, and the initial depth is 1-2 mm. The bottom of the groove adopts an arc transition form, which is conducive to the smooth flow and uniform distribution of the cutting fluid.

[0032] The fixing bracket 4 is arranged symmetrically on the left and right, made of high-strength aluminum alloy material, and fixed to the top of the drainage panel 3 by bolt connection. The fixing bracket 4 has an L-shaped cross-section structure, the vertical part is connected to the drainage panel 3, and the horizontal part extends outward to provide a stable support platform for the installation of subsequent components. The surface of the fixing bracket 4 is anodized and has good corrosion resistance.

[0033] The fixing bracket 2 7 is also symmetrically arranged. Its structure is similar to that of the fixing bracket 1 4, but its size is slightly larger. It is fixed to one end of the base 1 close to the drainage panel 3 by bolt connection. The design of the fixing bracket 2 7 takes into account the matching relationship with the base 1 to ensure the stability and reliability of the overall structure.

[0034] The adjusting bracket 6 is connected between the two adjusting screws 5 by a threaded connection. The adjusting screw 5 is rotatably set on the fixed bracket 4. The thread specification of each adjusting screw 5 is M8×1.25, and the thread accuracy grade is 6g. The adjusting screw 5 is made of high-quality alloy steel and the surface is quenched, which has good wear resistance and accuracy retention. The adjusting bracket 6 is made of aluminum alloy material and is processed with a threaded hole that matches the adjusting screw 5. By rotating the adjusting screw 5, the position of the adjusting bracket 6 can be accurately adjusted.

[0035] The structure and working principle of the adjusting bracket 29 are the same as those of the adjusting bracket 16. It is connected between the two adjusting screws 28 by a threaded connection. The adjusting screw 28 is rotatably set on the fixed bracket 27. Its specifications and materials are the same as those of the adjusting screw 15. The main functions of the adjusting screw 15 and the adjusting screw 28 are to adjust the position of the support module 10 on the base 1 and the drainage panel 3. By synchronously or asynchronously adjusting the position of the two sets of adjusting screws, the angle between the base 1 and the drainage panel 3 can be precisely controlled so that the drainage panel 3 is always in the most suitable working position. The design of this dual adjustment mechanism allows the entire system to perform precise position and angle adjustments in multiple directions.

[0036] The adjustable composite damping support module 10 is the core innovative structure of this embodiment. It adopts a sandwich composite structure design. The middle layer of the module 10 is a high molecular polymer damping material layer with a thickness of 2-3 mm. It uses a viscoelastic polymer material with high damping properties. Its loss factor is greater than 0.3, which can effectively convert mechanical vibration energy into heat energy and dissipate it. The upper and lower layers are high-strength lightweight alloy constraint layers, each layer is 1-1.5 mm thick, made of 7075 aluminum alloy or carbon fiber composite material, and has high strength and lightweight characteristics.

[0037] Inside the composite damping support module 10, a piezoelectric ceramic actuator is embedded. The actuator is made of PZT piezoelectric ceramic material, with an operating voltage range of 0-150V. It can generate a displacement of 15-20 microns at the rated voltage. The piezoelectric ceramic actuator has multiple functions: First, it can detect the pressure change between the base 1 and the drainage panel 3. When the system is subjected to external excitation force, the pressure change will cause the charge change of the piezoelectric ceramic, thereby realizing the pressure detection function; secondly, it can dissipate energy and reduce vibration. Through the electromechanical coupling effect of the piezoelectric ceramic, the mechanical vibration energy is converted into electrical energy and dissipated through the external circuit. ; Third, it can achieve active shock absorption, and actively generate phase-opposite forces to offset harmful vibrations based on the detected vibration signals; Fourth, it can also be used to fine-tune the angle between the base 1 and the drainage panel 3, and achieve micron-level angle adjustment by precisely controlling the expansion and contraction of the actuator. The piezoelectric ceramic actuator is embedded in the damping material layer through a special packaging process to ensure that it will not be affected by the external environment during operation. The support module 10 is connected between the adjustment bracket 1 6 and the adjustment bracket 2 9 through a special connector. The connection method adopts a spherical hinge structure, which allows the module to produce slight rotations in three directions.

[0038] The piezoelectric regulating strip 13 is made of piezoelectric material as a local vibration active suppression unit and a flow control unit. Each piezoelectric regulating strip 13 adopts the same PZT piezoelectric ceramic material as the actuator. The piezoelectric regulating strips 13 are fixedly connected to the drainage groove 12 respectively. The installation method adopts a special flexible clamping structure, which not only ensures a reliable connection, but also allows the piezoelectric regulating strip 13 to produce a small deformation during operation. The piezoelectric regulating strip 13 has multiple functions: First, it can adjust the effective depth of the drainage groove 12 by generating deformation. When the piezoelectric regulating strip 13 bends downward, the effective depth of the drainage groove 12 is reduced, and the cutting liquid flow is reduced; when the piezoelectric regulating strip 13 bends upward, the effective depth of the drainage groove 12 is reduced, and the cutting liquid flow is reduced. When the pressure is too high, the effective depth of the drainage groove 12 increases, and the flow rate of the cutting fluid increases, thereby achieving precise control of the water flow size; secondly, when necessary, the piezoelectric adjustment strip 13 can also generate high-frequency vibrations to vibrate the water flow. This vibration helps to destroy the boundary layer on the surface of the cutting fluid, improve the heat transfer and mass transfer effects, and prevent the deposition of chips and impurities in the drainage groove 12; thirdly, it can offset the high-frequency micro-vibration on the surface of the drainage panel 3 through its own reverse strain, thereby achieving the function of local vibration suppression. A micron-level gap with a height of 0.2-0.3 mm is formed between the top of the piezoelectric adjustment strip 13 and the top of the drainage panel 3, and the control accuracy of the gap reaches ±0.02 mm.

[0039] The constrained damping structure is fixed to the bottom end of the drainage panel 3. The structure includes a damping material layer 14 and a rigid constraint layer 15. The damping material layer 14 is made of viscoelastic polymer material, which has the same performance as the damping material in the support module 10 and can effectively absorb vibration energy within a wide frequency range. The rigid constraint layer 15 is made of carbon fiber composite material or high-strength aluminum alloy. Its function is to impose constraints on the damping material layer 14, thereby improving the damping effect while maintaining the overall rigidity of the structure.

[0040] During actual operation, when the slicer main roller runs at high speed, the drainage panel 3 will be affected by various exciting forces and vibrate. The piezoelectric ceramic actuator first detects the pressure changes between the base 1 and the drainage panel 3, and transmits these signals to the control system. The damping material layer 14 in the constrained damping structure immediately begins to absorb the vibration energy, converting the mechanical energy into heat energy and dissipating it. At the same time, the damping material layer in the adjustable composite damping support module 10 also starts to work, further absorbing the vibration energy transmitted to the support structure, and realizing passive energy dissipation and shock absorption.

[0041] When the vibration amplitude is large, the piezoelectric ceramic actuator embedded in the support module 10 starts to actively reduce shock. The actuator generates a reverse force with an opposite phase according to the detected pressure changes and the phase and amplitude of the vibration, actively offsetting the harmful vibration. At the same time, the piezoelectric ceramic actuator can also fine-tune the angle between the base 1 and the drainage panel 3 as needed. By precisely controlling the coordinated actions of multiple actuators, the posture of the drainage panel 3 can be precisely adjusted to ensure that the drainage panel 3 is always in the optimal working position.

[0042] For high-frequency micro-vibrations on the surface of the drainage panel 3, the piezoelectric adjustment strip 13 plays a major role in vibration suppression. When surface vibration is detected, the piezoelectric adjustment strip 13 generates a force in the opposite direction through its own reverse strain, directly acting on the vibration source, thereby achieving rapid and effective vibration cancellation.

[0043] In terms of flow control, the piezoelectric adjustment strip 13 dynamically adjusts the effective depth of the drainage groove 12 according to the requirements of the cutting process. At the beginning of cutting, when a larger cutting fluid flow rate is required, the piezoelectric adjustment strip 13 bends upward to increase the effective depth of the drainage groove 12; in the stable stage of cutting, when the flow rate needs to be precisely controlled, the piezoelectric adjustment strip 13 maintains a moderate bending state; at the end of cutting, when the flow rate needs to be reduced, the piezoelectric adjustment strip 13 bends downward to reduce the effective depth of the drainage groove 12. When the drainage groove 12 needs to be cleaned or impurities need to be prevented from depositing, the piezoelectric adjustment strip 13 generates high-frequency vibration, and the vibration frequency can be adjusted within the range of 50-1000Hz, effectively improving the fluidity and cleaning effect of the cutting fluid.

[0044] By precisely controlling the adjusting screw 1 5 and the adjusting screw 2 8, the positions of the adjusting bracket 1 6 and the adjusting bracket 2 9 can be changed, thereby adjusting the installation position of the support module 10 on the base 1 and the drainage panel 3, and finally achieving precise adjustment of the angle between the base 1 and the drainage panel 3. This angle adjustment function enables the system to adapt to different cutting process requirements, ensuring the best relative position relationship between the drainage panel 3 and the cutting wire mesh. The angle adjustment accuracy can reach ±0.1°, meeting the requirements of high-precision cutting.

[0045] This embodiment achieves all-round suppression from broadband to micro-vibrations by combining passive damping energy absorption, active vibration cancellation, precise angle adjustment and intelligent flow control. The constrained damping structure damping material layer 14 and the rigid constraint layer 15 provide basic passive damping, and the effective frequency range covers 10-1000Hz. The adjustable composite damping support module 10, while providing passive damping, realizes pressure detection, active control and angle fine-tuning through the embedded piezoelectric ceramic actuator, and the response frequency range is 1-500Hz. The piezoelectric adjustment strip 13 is specifically designed to suppress high-frequency micro-vibrations, while realizing flow control and flow field optimization, and the effective frequency range is 100-2000Hz. Multiple vibration reduction mechanisms work together, and the vibration suppression effect is improved by more than 80% compared with the traditional fixed reinforcement solution.

[0046] Through the precise mechanical adjustment mechanism and the fine-tuning function of the piezoelectric ceramic actuator, the system can adjust the preload force, system stiffness and the angle between the base 1 and the drainage panel 3 according to different working conditions, achieving all-round adaptability to working conditions. The adjustment accuracy reaches the micron level and can meet the requirements of different cutting speeds and material properties.

[0047] The multifunctional design of the piezoelectric adjustment strip 13 enables the cutting fluid to form a precisely controllable flow distribution. By dynamically adjusting the depth of the drainage groove 12 and the vibration enhancement effect, the cutting fluid flow control accuracy reaches ±2%, effectively reducing the line mark TTV defect rate.

[0048] By eliminating wire breakage caused by vibration and combining precise flow control and angle adjustment functions, the system can significantly reduce material loss caused by cutting interruptions and improve production efficiency. Compared with existing technologies, the wire breakage rate is reduced, which improves the yield and economic benefits of silicon wafer cutting.

[0049] Example 2: like Figures 1 to 12As shown, based on the basic vibration suppression structure of Example 1, this embodiment further integrates a microcirculation flow channel network, a motor-driven automatic adjustment system, and an intelligent vibration sensing and control system to form a highly integrated intelligent liquid discharge nozzle system. The system not only has excellent vibration suppression capabilities, but also can achieve precise optimization of the cutting liquid flow field, automatic adjustment of system parameters, and intelligent active control of vibration.

[0050] The discharge nozzle of this embodiment maintains all the structures of the first embodiment, and a precise microcirculation flow channel network is designed on the alloy shell of the adjustable composite damping support module 10 and on the back of the drainage panel 3. The flow channel network is made by a combination of precision machining and laser engraving. A main channel with a depth of 0.5 mm and a width of 1.2 mm is processed on the surface of the upper and lower layers of high-strength lightweight alloy constraint layers of the support module 10. The main channel extends along the length direction of the constraint layer and is connected to the flow channel network on the back of the drainage panel 3 through multiple branch channels. The flow channel network on the back of the drainage panel 3 is more complex, including three levels: a liquid inlet main pipe, a distribution branch pipe and a liquid return pipe. The cross-sectional dimensions of the liquid inlet main pipe are 3×2 mm, the cross-sectional dimensions of the distribution branch pipe are 1.5×1 mm, and the cross-sectional dimensions of the liquid return pipe are 2×1.5 mm. The inner surfaces of all flow channels are precisely polished, and the surface roughness is controlled within Ra0.4 to ensure the smooth flow of the cutting fluid in the flow channel.

[0051] The microcirculation flow channel network is connected to the main cutting fluid supply system through a specially designed liquid inlet interface. The liquid inlet interface adopts a quick connector form, which is easy to install and maintain. The cutting fluid flow entering the flow channel network is controlled by a precision flow regulating valve. The flow range is 50-200 ml / min. The cutting fluid first enters the main channel on the outer shell of the support module 10, forming a circulating flow inside the module, taking away the heat generated by the damping material layer during operation, and cooling and protecting the piezoelectric ceramic actuator. Subsequently, the cutting fluid enters the flow channel network on the back of the drainage panel 3 through the connecting pipe, forming a uniform liquid film distribution on the back.

[0052] In order to realize automatic control of the system, this embodiment is equipped with a motor 11 for driving the rotation of the adjusting screw 1 5 and the adjusting screw 2 8. The motor 11 adopts a precision servo motor with a rated power of 50W, an output torque of 0.5N·m, and a positioning accuracy of 0.1°. Each adjusting screw is equipped with an independent motor 11. The housing of the motor 11 is fixedly connected to the base 1 and the drainage panel 3 respectively through a special bracket to ensure the firmness and reliability of the installation. The power shaft of the motor 11 is directly connected to the adjusting screw through a precision coupling. The coupling adopts an elastic coupling form, which not only ensures the effective transmission of torque, but also can compensate for installation errors and thermal deformation. Through the precise control of the motor 11, the adjusting screw 1 5 and the adjusting screw 2 8 can accurately adjust the position of the support module 10 on the base 1 and the drainage panel 3, thereby realizing automatic adjustment of the angle between the base 1 and the drainage panel 3, so that the drainage panel 3 is always in the most suitable working position.

[0053] The control system of motor 11 adopts closed-loop servo control and is equipped with a high-precision rotary encoder with a resolution of 10,000 pulses / rev. Through the feedback signal of the encoder, the control system can accurately control the rotation angle and speed of the adjusting screw, thereby realizing precise automatic adjustment of the positions of adjusting bracket 1 6 and adjusting bracket 2 9, as well as precise control of the angle between the base 1 and the drainage panel 3. The motor controller has a built-in PID control algorithm, which can automatically adjust the output according to the set target position. The response time is less than 100 milliseconds, the steady-state accuracy reaches ±0.05 mm, and the angle adjustment accuracy reaches ±0.05°.

[0054] The vibration sensing system includes multiple miniature piezoelectric acceleration sensors fixed at different positions of the drainage panel 3. According to the results of finite element analysis, six key vibration antinode points are identified on the drainage panel 3 as sensor installation positions. These positions can most effectively capture the vibration signal of the drainage panel 3. Each sensor uses a piezoelectric ceramic sensitive element with a sensitivity of 10mV / g, a frequency response range of 1Hz-2kHz, and a resonant frequency greater than 10kHz. The sensor is fixed to the drainage panel 3 by a special adhesive. The adhesive has good characteristics of transmitting vibration signals, and is also heat-resistant and corrosion-resistant.

[0055] The control system consists of three main parts: a microprocessor controller, a signal conditioning circuit, and a drive circuit. The microprocessor controller adopts a 32-bit ARM Cortex-M4 architecture with a main frequency of 168MHz and a built-in floating-point unit. It has powerful digital signal processing capabilities. The controller is equipped with 256KB of Flash memory and 64KB of SRAM, which can store complex control algorithms and historical data.

[0056] The signal conditioning circuit is responsible for amplifying, filtering, and analog-to-digital conversion of sensor signals. Each sensor channel is equipped with an independent signal conditioning circuit, including a preamplifier, a bandpass filter, and a 16-bit high-precision ADC. The gain of the preamplifier can be adjusted from 1 to 1000 times, the passband of the bandpass filter is 0.5Hz-3kHz, and the sampling frequency of the ADC can reach up to 10kHz. All analog circuits adopt a low-noise design, and the signal-to-noise ratio is greater than 80dB.

[0057] The driving circuit provides driving voltage for the piezoelectric ceramic actuator and the piezoelectric adjustment strip 13. The driving circuit adopts a switching power supply topology and can provide an adjustable DC voltage of 0-200V. The output power reaches 100W. The driving circuit has a fast response characteristic, with a voltage rise time of less than 10 microseconds and a fall time of less than 20 microseconds. In order to protect the piezoelectric elements, the driving circuit has built-in overvoltage, overcurrent and overtemperature protection functions.

[0058] The controller is connected to the vibration sensor, piezoelectric ceramic actuator, piezoelectric adjustment bar 13 and motor 11 through a dedicated communication interface. The sensor signal is transmitted to the controller through a shielded cable. The cable length is controlled within 2 meters to avoid signal interference. The driving signal of the piezoelectric element is transmitted through a high-voltage shielded cable. The cable has good insulation performance and anti-interference ability. The motor control signal is transmitted through the CAN bus. The communication rate is 1Mbps, which has good real-time performance and reliability.

[0059] The controller can perform real-time spectrum analysis on the collected vibration signals. It uses the fast Fourier transform (FFT) algorithm with an analysis window length of 1024 points and a frequency resolution of 5Hz. The controller implements a frequency division collaborative control strategy based on the spectrum analysis results, identifying large vibration signals with frequencies below 100Hz as low-frequency vibrations and small vibration signals with frequencies above 100Hz as high-frequency vibrations.

[0060] For low-frequency, high-amplitude vibration signals, the controller distributes control instructions to the piezoelectric ceramic actuator in the adjustable composite damping support module 10. The piezoelectric ceramic actuator first detects the pressure change between the base 1 and the drainage panel 3, and then adjusts the support stiffness and preload of the module 10 on the drainage panel 3 by adjusting the output force of the actuator, while realizing energy-consuming shock absorption and active shock absorption functions. The piezoelectric ceramic actuator can also fine-tune the angle between the base 1 and the drainage panel 3, and ensure that the drainage panel 3 is always in the optimal working position by precisely controlling the coordinated actions of multiple actuators. At the same time, the controller will also link the motor 11 to fine-tune the position of the adjustment bracket 1 6 and the adjustment bracket 2 9 by adjusting the screw 1 5 and the adjustment screw 2 8, thereby changing the dynamic characteristics and geometric angle relationship of the system as a whole. The response time of this posture and preload adjustment is 1-5 seconds, which is suitable for suppressing low-frequency vibrations.

[0061] For high-frequency, small-amplitude vibration signals, the controller distributes control instructions to the piezoelectric adjustment strip 13. The piezoelectric adjustment strip 13 has multiple functions: first, it quickly adjusts its own strain state to generate a reverse force opposite to the vibration phase, thereby achieving rapid offset of surface micro-vibrations; second, it can dynamically adjust the effective depth of the drainage groove 12 by generating deformation, thereby accurately controlling the flow rate of the cutting fluid; third, when necessary, the piezoelectric adjustment strip 13 can also generate high-frequency vibrations to vibrate the water flow. This vibration helps to destroy the boundary layer on the surface of the cutting fluid, improve the heat and mass transfer effects, and prevent the deposition of chips and impurities in the drainage groove 12. The response time of the piezoelectric adjustment strip 13 is less than 1 millisecond, which can effectively suppress high-frequency vibrations and achieve precise flow control.

[0062] During actual operation, when the equipment is started, the control system first performs self-inspection and initialization to detect the working status of each sensor, actuator and motor 11. Then, the system enters the automatic adjustment mode. According to the preset process parameters, the motor 11 drives the adjustment screw to adjust the adjustment bracket to the initial position, so that the gap between the drainage panel 3 and the wire mesh reaches the set value, while ensuring that the angle between the base 1 and the drainage panel 3 is in the optimal state.

[0063] When the slicer starts working, the vibration sensing system begins to monitor the vibration state of the drainage panel 3 in real time with a sampling frequency of 5kHz. At the same time, the piezoelectric ceramic actuator continuously detects the pressure changes between the base 1 and the drainage panel 3. The controller processes the collected signals in real time, including digital filtering, spectrum analysis and feature extraction. When it is detected that the vibration amplitude exceeds the preset threshold, the control system immediately starts the active control program.

[0064] The microcirculation channel network works continuously throughout the entire working process, and the cutting fluid forms a stable circulation flow in the channel. The cutting fluid flowing through the support module 10 takes away the heat generated by the vibration dissipation of the damping material layer, keeping the operating temperature of the module within a reasonable range. The cutting fluid flowing through the back of the drainage panel 3 forms a uniform liquid film with a thickness of 0.1-0.2 mm on the back. This liquid film not only plays a lubricating role, but also can effectively transmit and dissipate vibration energy. The existence of the liquid film also improves the lubrication conditions between the drainage panel 3 and the wire mesh, reducing friction and wear.

[0065] Through the action of the microcirculation channel network, the cutting liquid is distributed more evenly on the back of the drainage panel 3, eliminating the dead corners and unevenness that are prone to occur in traditional liquid supply methods. The uniform liquid film distribution ensures that every part of the wire mesh can be fully lubricated, thereby significantly reducing the line mark TTV defect rate by more than 50%. At the same time, the cooling effect of the liquid film effectively suppresses the thermal deformation of the drainage panel 3, so that the panel can still maintain good flatness under long-term high-speed working conditions, and the flatness deviation is controlled within ±0.05 mm.

[0066] The flow control function of the piezoelectric regulating strip 13 works in conjunction with the microcirculation channel network to achieve precise control of the distribution of the cutting fluid. At the beginning of cutting, when a larger cutting fluid flow rate is required, the piezoelectric regulating strip 13 bends upward to increase the effective depth of the drainage groove 12; in the stable stage of cutting, when the flow rate needs to be precisely controlled, the piezoelectric regulating strip 13 maintains a moderate bending state; at the end of cutting, when the flow rate needs to be reduced, the piezoelectric regulating strip 13 bends downward to reduce the effective depth of the drainage groove 12. When the drainage groove 12 needs to be cleaned or impurities need to be prevented from depositing, the piezoelectric regulating strip 13 generates high-frequency vibration, and the vibration frequency can be adjusted within the range of 50-1000Hz, effectively improving the fluidity and cleaning effect of the cutting fluid.

[0067] The automatic adjustment function driven by motor 11 enables the system to automatically adjust system parameters according to different cutting process requirements. When cutting silicon rods of different specifications or changing the cutting speed, the system can automatically adjust the position of the drainage panel 3, the preload force of the support module 10, and the angle between the base 1 and the drainage panel 3, so that the system always maintains the best working state. The automatic adjustment position accuracy reaches ±0.02 mm, the angle adjustment accuracy reaches ±0.05°, and the response time is less than 30 seconds, which greatly improves the degree of automation and production efficiency of the equipment.

[0068] The introduction of the intelligent vibration control system further enhances the vibration suppression effect. Through real-time spectrum analysis and frequency division coordinated control, the system can adopt the most suitable control strategy for vibrations of different frequencies. The multifunctional characteristics of the piezoelectric ceramic actuator enable it to simultaneously realize pressure detection, energy consumption shock absorption, active shock absorption and angle fine-tuning. The vibration suppression effect is improved compared with the first embodiment, and the overall vibration suppression effect reaches more than 85%.

[0069] The intelligence level of the system has been greatly improved. Through the coordinated work of sensors, controllers and actuators, predictive control of vibration is achieved. The system can take control measures before the vibration reaches a harmful level, thereby more effectively protecting the power network. The line break rate is further reduced compared with the first embodiment.

[0070] The introduction of the microcirculation channel network not only improves the uniformity of the cutting fluid distribution, but also provides an effective thermal management function, enabling the system to work stably at a higher cutting speed and improve production efficiency. At the same time, good thermal management extends the service life of the damping material and piezoelectric elements, reducing maintenance costs. The multifunctional design of the piezoelectric adjustment strip 13 enables the cutting fluid flow control accuracy to reach ±2%, further improving cutting accuracy and product quality. The automatic angle adjustment function driven by the motor 11 ensures that the drainage panel 3 is always in the optimal position, enabling the system to adapt to various complex cutting conditions, significantly improving the versatility and reliability of the equipment. Example 3: like Figures 1 to 12 As shown, this embodiment further adds working condition adaptation function and fault diagnosis function on the basis of the complete technology of the basic vibration suppression structure of embodiment 1 and the integrated flow field optimization and intelligent control system of embodiment 2, forming an advanced liquid discharge nozzle system with full intelligent capabilities. The system can automatically optimize the control strategy according to different cutting conditions and has comprehensive fault self-diagnosis and predictive maintenance capabilities.

[0071] The discharge nozzle of this embodiment includes all the technical features of embodiment one and embodiment two, namely, base 1, nozzle 2, drainage panel 3, fixed bracket one 4, adjusting screw one 5, adjusting bracket one 6, fixed bracket two 7, adjusting screw two 8, adjusting bracket two 9, adjustable composite damping support module 10, motor 11, drainage groove 12, piezoelectric adjustment strip 13, damping material layer 14, rigid constraint layer 15, microcirculation flow channel network, vibration sensing system and control system including microprocessor controller, signal conditioning circuit and drive circuit. On this basis, the control system of this embodiment further integrates working condition adaptation function module and fault diagnosis function module.

[0072] Among them, the function of adjusting screw 1 5 and adjusting screw 2 8 is to adjust the position of the support module 10 on the base 1 and the drainage panel 3, and then accurately control the angle between the base 1 and the drainage panel 3, so that the drainage panel 3 is always in the most suitable working position. The piezoelectric ceramic actuator embedded in the adjustable composite damping support module 10 has multiple functions: detecting the pressure change between the base 1 and the drainage panel 3, realizing energy consumption and shock absorption, performing active shock absorption, and fine-tuning the angle between the base 1 and the drainage panel 3. In addition to the function of actively suppressing local vibration, the piezoelectric adjustment strip 13 can also adjust the effective depth of the drainage groove 12 by generating deformation to control the flow rate of the cutting fluid, and generate high-frequency vibration to vibrate the water flow when necessary, thereby improving the heat and mass transfer effect and preventing impurity deposition.

[0073] The working condition adaptation function module can identify the current cutting conditions in real time and automatically adjust the control parameters of the system through intelligent learning algorithms and multi-parameter fusion analysis. The working condition adaptation function module includes three main components: working condition identification subsystem, parameter optimization subsystem and automatic adjustment subsystem.

[0074] The working condition identification subsystem is equipped with a variety of sensors to collect key parameters in the cutting process. In addition to the piezoelectric acceleration sensor in the vibration sensing system, the system is also equipped with a cutting speed sensor, a cutting force sensor, a temperature sensor, a flow sensor and a pressure sensor. The cutting speed sensor adopts the principle of a photoelectric encoder and is installed on the main roller of the slicer. It can monitor the rotation speed of the main roller in real time with a measurement accuracy of ±0.1rpm. The cutting force sensor adopts a strain gauge force sensor and is installed on the supporting structure of the drainage panel 3. It can detect changes in cutting resistance during the cutting process. The measurement range is 0-500N and the accuracy is ± 0.5N, the temperature sensor adopts thermistor, which is respectively installed in the drainage panel 3, the support module 10 and the cutting fluid circulation pipeline to monitor the temperature changes of various parts of the system. The measuring range is -20℃ to 150℃, and the accuracy is ±0.5℃. The flow sensor adopts turbine flowmeter, which is installed in the main liquid inlet pipeline of the microcirculation channel network to monitor the flow change of the cutting fluid. The measuring range is 10-500ml / min, and the accuracy is ±2%. The pressure sensor adopts piezoresistive sensor, which is installed at the key nodes of the channel network to monitor the pressure distribution inside the system. The measuring range is 0-1MPa, and the accuracy is ±0.2%.

[0075] The parameter optimization subsystem establishes a mapping relationship between cutting conditions and optimal control parameters based on a machine learning algorithm. The subsystem adopts a neural network algorithm, and the network structure is a multi-layer perceptron, which includes an input layer, three hidden layers and an output layer. The input layer receives real-time data from various sensors, including 15 parameters such as cutting speed, cutting force, vibration signal spectrum characteristics, temperature, flow and pressure. The hidden layer contains 20, 15 and 10 neurons respectively, and uses the ReLU activation function. The output layer contains 10 output parameters, which correspond to the preload setting value of the support module 10, the control gain of the piezoelectric ceramic actuator, the response threshold and flow control parameters of the piezoelectric adjustment bar 13, the flow setting value of the microcirculation flow channel network, the position adjustment parameters and angle control parameters of the motor 11, the frequency filtering parameters of the vibration control, the system damping parameters and the response time constant.

[0076] The neural network is trained using a back-propagation algorithm. The training data comes from a large number of cutting experiments and simulation data. The training database contains more than 10,000 sets of input and output data pairs under different working conditions, covering a variety of materials such as monocrystalline silicon, polycrystalline silicon, and sapphire, silicon rods of different specifications with diameters ranging from 50mm to 300mm, and cutting speeds from 50mm / min to 500mm / min. After network training is completed, the prediction accuracy reaches more than 95%, and a parameter optimization calculation can be completed within 100ms.

[0077] The automatic adjustment subsystem receives the output of the parameter optimization subsystem and sends the optimized parameters to the corresponding actuators in real time. The subsystem adopts a hierarchical control architecture. The upper layer is the parameter scheduler, which is responsible for coordinating the parameter updates of each subsystem; the middle layer is the local controller, which controls the vibration suppression system, flow field optimization system and mechanical adjustment system respectively; the lower layer is the actuator driver, which directly controls the motor 11, piezoelectric ceramic actuator, piezoelectric adjustment bar 13 and other actuators.

[0078] The fault diagnosis function module can monitor the system's operating status in real time, detect potential faults in a timely manner and provide maintenance suggestions through multi-signal fusion analysis and intelligent fault identification algorithms. The fault diagnosis function module includes a status monitoring subsystem, a fault identification subsystem and a predictive maintenance subsystem.

[0079] The condition monitoring subsystem has established a comprehensive condition monitoring network based on various sensors already in the system. In addition to monitoring normal process parameters, the subsystem also specifically monitors the health status indicators of the equipment. For the adjustable composite damping support module 10, the system monitors the changes in its damping characteristics and determines the degree of aging of the damping material by analyzing the transfer function of the vibration signal. For the piezoelectric ceramic actuator and the piezoelectric adjustment strip 13, the system monitors the changes in their capacitance characteristics and electromechanical coupling coefficient to determine the performance degradation of the piezoelectric material. For the motor 11, the system monitors its current waveform, vibration characteristics and temperature rise to determine faults such as bearing wear and winding aging. For the microcirculation flow channel network, the system monitors the distribution of flow, pressure and temperature to determine whether there are problems such as blockage and leakage. At the same time, the system also monitors the working status of the adjusting screw 1 5 and the adjusting screw 2 8, including problems such as screw wear, changes in thread accuracy, and decreased angle adjustment accuracy.

[0080] The fault identification subsystem adopts a method based on the combination of expert system and pattern recognition to establish a complete fault feature library and diagnostic rule library. The fault feature library contains characteristic parameters of various typical faults, such as the loss factor change characteristics when the damping material ages, the response time delay characteristics when the piezoelectric material is fatigued, the vibration spectrum characteristics when the motor bearing is worn, the abnormal pressure distribution characteristics when the flow channel is blocked, and the angle control accuracy decrease characteristics when the adjustment screw is worn. The diagnostic rule library establishes reasoning rules from symptoms to fault causes based on fault mechanism analysis and a large number of fault cases.

[0081] The system can identify fault types including: aging of damping materials, fatigue of piezoelectric elements, motor 11 failure, sensor drift, flow channel blockage, control loop failure, mechanical wear, reduced accuracy of adjustment screws, angle control failure, etc., totaling more than 60 specific fault modes in 15 categories. For each fault, the system can not only give the fault type and severity, but also provide corresponding handling suggestions and estimated remaining service life.

[0082] The predictive maintenance subsystem uses time series analysis and reliability engineering methods to predict the remaining service life and optimal maintenance time of each key component based on the historical operating data and current status information of the equipment. The subsystem establishes a degradation model for each component and can predict the performance attenuation trend of the damping material, the fatigue life of the piezoelectric element, the maintenance cycle of the motor 11, the accuracy retention period of the adjusting screw, etc.

[0083] During actual operation, when the equipment is started, the working condition adaptation function module first performs system initialization and parameter calibration. The system reads the current cutting task parameters, including the type of material being cut, silicon rod diameter, target cutting speed, slice thickness requirements and other information. Then, the working condition identification subsystem begins to collect various sensor signals and establish the characteristic vector of the current working condition.

[0084] After receiving the working condition characteristic vector, the parameter optimization subsystem performs calculations through the trained neural network and outputs the optimal control parameters for the current working condition. These parameters include the preload force of the support module 10 set to 110% of the working condition requirement value, the control gain of the piezoelectric ceramic actuator set to 1.2 times the standard value, the response threshold of the piezoelectric adjustment bar 13 reduced to 80% of the standard value, and the flow control parameters optimized to accurately match the current working condition, the flow rate of the microcirculation flow channel network increased to 1.15 times the standard value, and the angle control accuracy of the motor 11 increased to ±0.03°.

[0085] The automatic adjustment subsystem distributes the optimized parameters to each actuator. After receiving the position adjustment instruction and the angle control instruction, the motor 11 accurately adjusts the position of the adjustment bracket 1 6 and the adjustment bracket 2 9, so that the support module 10 applies the optimal preload force to the drainage panel 3, and at the same time ensures that the angle between the base 1 and the drainage panel 3 reaches the optimal state. After receiving the new control parameters, the piezoelectric ceramic actuator updates its pressure detection sensitivity, energy consumption and shock absorption effect, active shock absorption response characteristics and angle fine-tuning accuracy, so that the vibration suppression effect reaches the optimal state. After receiving the optimized parameters, the piezoelectric adjustment bar 13 also updates its vibration suppression response characteristics and flow control strategy to achieve the best coordination between vibration suppression and flow control. After receiving the flow setting value, the flow control valve of the microcirculation channel network automatically adjusts the cutting fluid flow to ensure the optimal flow field distribution.

[0086] During the cutting process, the system continuously monitors changes in various working parameters. When changes in cutting speed, cutting force or other key parameters are detected, the working condition adaptation function module immediately re-evaluates the current working conditions and updates the control parameters if necessary. The entire parameter update process is completed within 5 seconds, ensuring that the system can quickly adapt to changes in working conditions.

[0087] The fault diagnosis function module runs continuously during the cutting process. The status monitoring subsystem collects various status signals at a frequency of 1kHz. The fault identification subsystem performs a fault analysis every 10 seconds. When an abnormal signal is detected, the system immediately performs a detailed fault diagnosis analysis. For example, when the response time of the piezoelectric adjustment bar 13 exceeds 150% of the normal value, the system determines that there may be a piezoelectric material fatigue problem and gives corresponding maintenance suggestions. When the pressure distribution of the microcirculation flow channel network is abnormal, the system determines that there may be local blockage and indicates the specific blockage location. When the angle control accuracy of the motor 11 decreases, the system determines that there may be wear of the adjustment screw or a transmission system failure, and recommends corresponding inspection and maintenance measures.

[0088] Through the implementation of the working condition adaptive function, the system can automatically adjust the control strategy according to different cutting speeds. When the cutting speed is low, the system reduces the response sensitivity of the vibration control, reduces unnecessary control actions, saves energy, and optimizes the flow control strategy of the piezoelectric adjustment strip 13 to match the needs of low-speed cutting. When the cutting speed is high, the system improves the response sensitivity and control gain to ensure that vibration can still be effectively suppressed under high-speed cutting conditions, and at the same time increases the flow control range of the piezoelectric adjustment strip 13 to meet the lubrication needs of high-speed cutting.

[0089] The system can automatically adjust the system preload and control parameters according to different material properties. For single-crystal silicon with higher hardness, the system increases the preload of the support module 10 to improve the system stiffness, while increasing the control gain and flow control accuracy of the piezoelectric adjustment strip 13. The angle fine-tuning function of the piezoelectric ceramic actuator is used to ensure the optimal cutting angle. For relatively soft polycrystalline silicon, the system appropriately reduces the preload to avoid excessive constraints, while optimizing the damping parameters to adapt to the material characteristics and adjusting the flow control strategy of the piezoelectric adjustment strip 13 to match the cutting characteristics of the material.

[0090] Through the application of machine learning algorithms, the system can continuously optimize its own control strategy. As the operating time increases, the control effect gradually improves. The system has self-learning capabilities and can extract experience from historical data to continuously improve the accuracy of fault diagnosis and the effect of parameter optimization.

[0091] Through the collaborative work of working condition adaptation and fault diagnosis functions, the system achieves true unattended operation. The operator only needs to set the cutting task parameters, and the system can automatically complete all tuning and maintenance work, including vibration suppression parameter optimization, flow control strategy adjustment, angle precision control, etc. This greatly reduces the requirements for the operator's skill level and improves the equipment's usability and production efficiency.

[0092] The above description is only a preferred embodiment of the present invention. It should be understood that the present invention is not limited to the form disclosed herein and should not be regarded as excluding other embodiments. Instead, it can be used in various other combinations, modifications and environments, and can be modified within the scope of the concept described herein through the above teachings or technology or knowledge in related fields. The changes and modifications made by those skilled in the art do not depart from the spirit and scope of the present invention and should be within the scope of protection of the claims attached to the present invention.

Claims

1. A high-precision microtome cutting fluid discharge nozzle, characterized in that: include: A base (1), wherein a plurality of nozzles (2) are fixedly connected to the base (1); a drainage panel (3) is rotatably connected to the bottom end of the base (1), and a plurality of drainage grooves (12) are provided at the top end of the drainage panel (3); a fixed bracket (4) arranged symmetrically on the left and right, which is fixedly connected to the top end of the drainage panel (3); a symmetrical fixed bracket (7) is fixedly connected to one end of the base (1) close to the drainage panel (3); an adjustment bracket (6) is connected by a thread between two adjustment screws (5) rotatably arranged on the fixed bracket (4); an adjustment bracket (9) is connected by a thread between two adjustment screws (8) rotatably arranged on the fixed bracket (7); and a plurality of adjustable composite damping support modules (10), wherein the support module (10) is a sandwich composite structure, comprising a high molecular polymer damping material layer in the middle and two upper and lower high-strength light alloy constraint layers, wherein a piezoelectric ceramic actuator is embedded. ) connected between the adjustment bracket 1 (6) and the adjustment bracket 2 (9); a plurality of piezoelectric adjustment strips (13) as local vibration active suppression units, the piezoelectric adjustment strips (13) being made of piezoelectric material and being fixedly connected to the drainage groove (12) respectively, with a micron-level gap of 0.2-0.3 mm in height formed between the top of the piezoelectric adjustment strips and the top of the drainage panel (3); a constrained damping structure, which is fixed to the bottom of the drainage panel (3), and includes a damping material layer (14) and a rigid constraint layer (15) fixed to the bottom of the damping material layer (14); a microcirculation flow channel network, which is arranged on the alloy shell of the composite damping support module (10) and on the back of the drainage panel (3), for forming a uniform liquid film distribution of the cutting fluid; a vibration sensing system, which includes a plurality of micro piezoelectric acceleration sensors embedded in key positions of the drainage panel (3); a control system, which includes a microprocessor controller, which is electrically connected to the vibration sensor, the piezoelectric ceramic actuator and the piezoelectric adjustment strips (13).

2. The cutting fluid discharge nozzle for a high-precision microtome according to claim 1, characterized in that: The adjustable composite damping support module (10) is connected to the drainage panel base via a precise thread or slide rail mechanism, allowing fine adjustment of the preload force applied to the drainage panel, and generates an active reverse force via an embedded piezoelectric ceramic actuator to offset harmful vibrations in real time.

3. The cutting fluid discharge nozzle for a high-precision microtome according to claim 2, characterized in that: The piezoelectric regulating strip (13) offsets the high-frequency micro-amplitude vibration on the surface of the drainage panel (3) through its own reverse strain, and is used to control the flow rate and liquid film thickness of the cutting liquid flowing through the drainage groove (12).

4. The cutting fluid discharge nozzle for a high-precision microtome according to claim 3, characterized in that: The damping material layer (14) of the constrained damping structure adopts a viscoelastic polymer material, and the rigid constraint layer (15) adopts a carbon fiber composite material or a high-strength aluminum alloy. The structure is used for passively absorbing broadband vibration energy of the drainage panel.

5. The cutting fluid discharge nozzle for a high-precision microtome according to claim 2, characterized in that: The microcirculation channel network is used to guide part of the cutting fluid to form a uniform liquid film on the back of the drainage panel, and continuously remove the heat generated by the vibration and friction of the drainage panel.

6. The cutting fluid discharge nozzle for a high-precision microtome according to claim 5, characterized in that: It also includes a motor (11) for driving the adjusting screw rod 1 (5) and the adjusting screw rod 2 (8) to rotate. The motor (11) is fixedly connected to the base (1) and the drainage panel (3) respectively to achieve automatic adjustment of the positions of the adjusting bracket 1 (6) and the adjusting bracket 2 (9).

7. The cutting fluid discharge nozzle for a high-precision microtome according to claim 6, characterized in that: The vibration sensing system comprises a plurality of piezoelectric acceleration sensors fixed at different positions of the drainage panel (3), and the sensor installation positions are determined by vibration antinode points determined by finite element analysis.

8. The cutting fluid discharge nozzle for a high-precision microtome according to claim 1, characterized in that: The control system includes a microprocessor controller, a signal conditioning circuit and a drive circuit, and the controller is electrically connected to the vibration sensor, the piezoelectric ceramic actuator and the piezoelectric adjustment strip (13).

9. The cutting fluid discharge nozzle for a high-precision microtome according to claim 8, characterized in that: The controller is capable of performing spectrum analysis on the collected vibration signals and performing frequency division and coordinated control based on the analysis results: distributing low-frequency, high-amplitude vibration signals to the support module (10) for posture and preload adjustment; and distributing high-frequency, micro-amplitude vibration signals to the adjustment bar (13) for rapid offset of surface micro-vibrations.

10. The cutting fluid discharge nozzle for a high-precision microtome according to claim 7, characterized in that: The nozzle has a working condition self-adaptation function, can automatically adjust the system preload and control parameters according to different cutting speeds and material properties, and has a fault diagnosis function.

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