Excimer laser thyratron heating voltage automatic adjusting system and method

Abstract

The invention provides an excimer laser thyratron heating voltage automatic adjustment system and method. The system comprises a thyratron, a thyratron adjustable heating power supply, a heating power supply voltage acquisition module, a thyratron anode current acquisition module, a thyratron grid voltage acquisition module, a thyratron cathode temperature acquisition module and a heating power supply voltage control and adjustment module. Comprising the following steps: (1) powering on a power supply to supply power to a thyratron; (2) carrying out data acquisition; (3) processing and analyzing the data; (4) calculating a voltage Vheat2; (5) generating a corresponding duty ratio signal, and sending the signal to a thyratron adjustable heating power supply; (6) closed-loop control of thyratron heating power supply voltage is realized; and (7) adopting a dynamic adjustment strategy. Therefore, the problem that the performance of the excimer laser is affected due to the fact that the thyratron heating power supply voltage cannot automatically adapt to the change of the working state of the thyratron can be solved, the stability of the working state of the thyratron is realized, and the overall performance of the excimer laser is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of excimer lasers, and in particular to an automatic adjustment system and method for heating voltage of an excimer laser thyristor. Background Art

[0002] Excimer lasers are widely used in numerous fields, including laser processing, medical treatment, and photolithography. As a key component in excimer lasers, the performance of the thyratron (thyratron) directly impacts the overall performance of the laser. The operating state of the thyratron is closely related to the heating power supply voltage. A suitable heating power supply voltage ensures stable thyratron operation and improves the stability and reliability of the laser.

[0003] Currently, traditional thyratron heating power supply voltages are mostly set to a fixed value or manually adjusted. In actual use, factors such as the excimer laser's operating environment and operating time can change. For example, changes in ambient temperature and humidity, and aging of the equipment after prolonged operation, can cause changes in the thyratron's operating characteristics. If the heating power supply voltage remains fixed or is not adjusted promptly based on the thyratron's operating state, the thyratron's operation will become unstable, further affecting performance indicators such as the excimer laser's output energy stability and pulse repetition frequency accuracy. For example, when the ambient temperature drops, the electron emission capacity of the thyratron cathode may decrease. If the heating power supply voltage is not increased accordingly, the thyratron will have difficulty conducting, resulting in reduced and unstable laser output energy. Summary of the Invention

[0004] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0005] To this end, the purpose of the present invention is to provide a system and method for automatically adjusting the heating voltage of a thyristor of an excimer laser, which can solve the problem that the thyristor heating power supply voltage cannot automatically adapt to changes in the thyristor operating state, resulting in the performance of the excimer laser being affected, thereby achieving the stability of the thyristor operating state and improving the overall performance of the excimer laser.

[0006] To achieve the above-mentioned object, the present invention proposes an automatic adjustment system for the heating voltage of an excimer laser thyristor, comprising a thyristor, an adjustable thyristor heating power supply, a heating power supply voltage acquisition module, a thyristor anode current acquisition module, a thyristor grid voltage acquisition module, a thyristor cathode temperature acquisition module, and a heating power supply voltage control and regulation module; the thyristor is used to control the on-off and off-current of the current and to adjust the current size; the thyristor is connected to the thyristor adjustable heating power supply, and the thyristor adjustable heating power supply is used to provide heating energy for the thyristor; the heating power supply voltage acquisition module is used to collect the voltage value output by the thyristor adjustable heating power supply in real time, and the heating power supply voltage acquisition module is connected to the thyristor; the thyristor anode current acquisition module is used to measure the gate voltage of the thyristor; The thyristor anode current acquisition module is connected to the thyristor; the thyristor grid voltage acquisition module is used to acquire the voltage signal on the thyristor grid, and the thyristor grid voltage acquisition module is connected to the thyristor; the thyristor cathode temperature acquisition module is used to directly measure the temperature of the thyristor cathode, and the thyristor cathode temperature acquisition module is connected to the thyristor; the heating power supply voltage control and regulation module is respectively connected to the heating power supply voltage acquisition module, the thyristor anode current acquisition module, the thyristor grid voltage acquisition module, the thyristor cathode temperature acquisition module and the thyristor adjustable heating power supply, and the heating power supply voltage control and regulation module is used to receive feedback information and adjust the output voltage of the thyristor adjustable heating power supply.

[0007] A method for automatically adjusting the heating voltage of an excimer laser thyratron comprises the following steps: (1) After the thyristor adjustable heating power supply is powered on, it provides heating voltage and current to the thyristor according to the preset parameters; (2) The heating power supply voltage acquisition module, the thyristor grid voltage acquisition module, the thyristor cathode temperature acquisition module, and the thyristor anode current acquisition module respectively acquire the voltage V heat1 , thyristor gate voltage V gate , thyratron cathode temperature T Cathode , thyristor anode current I Anode Conduct data collection; (3) The collected parameters are transmitted to the heating power supply voltage control and regulation module, which processes and analyzes the data; (4) The processed data is used according to the function relationship pre-established based on the characteristics of the thyristor model to obtain the voltage V that needs to be adjusted. heat2 ; (5) The heating power supply voltage control and regulation module consists of V heat2 The value is calculated by looking up the table according to the preset parameters to generate a PWM signal with a corresponding duty cycle, which is sent to the thyristor adjustable heating power supply; (6) The thyristor adjustable heating power supply outputs the voltage V according to the received PWM signal heat1 Adjustment of the voltage of the thyristor heating power supply is realized to realize closed-loop control of the thyristor heating power supply voltage; (7) During the operation of the excimer laser, a dynamic adjustment strategy is adopted considering the dynamic changes of the working state; for the thyristor anode current I Anode , thyratron cathode temperature T Cathode , gate trigger voltage V gate According to the changes in the response priority and adjustment rate, different response priorities and adjustment rates are set. At the same time, the adjustment strategy is optimized according to the different working modes of the excimer laser (continuous working mode, pulsed working mode).

[0008] In addition, the system and method for automatically adjusting the heating voltage of an excimer laser thyristor proposed in the application may also have the following additional technical features: Specifically, the thyratron includes an anode, a cathode and a hydrogen generator. The cathode is used to stably emit electrons, and the hydrogen generator ensures a stable supply of hydrogen in the thyratron.

[0009] Specifically, the voltage V that needs to be adjusted heat2 =V heat1 +A0+A1*V gate +A2*I Anode +A3*T Cathode +A4*V gate *I Anode +A5*T Cathode2 -A6*V gate2 Among them, A0, A1, A2, A3, A4, A5, and A6 are key coefficients obtained based on the characteristics of different types of thyristors and multiple tests.

[0010] Specifically, the setting of different response priorities and adjustment rates is as follows: for the thyristor anode current I Anode When rapid changes occur, the heating power supply voltage should be adjusted quickly to ensure that the conduction performance of the thyristor is not affected; for the thyristor cathode temperature T Cathode If the voltage changes slowly, the voltage is adjusted at a relatively slow but steady rate to avoid over-adjustment.

[0011] Compared with the prior art, the present invention has the following advantages: 1. By real-time monitoring of the thyratron working state and automatically adjusting the heating power supply voltage, the thyratron is always in the optimal working state, thereby effectively improving the stability of the excimer laser output energy and the accuracy of the pulse repetition frequency. The fluctuation range of the laser output energy can be reduced to about 50% of the original, and the pulse repetition frequency accuracy is improved by about 30%.

[0012] 2. It can adapt to the changes in the working state of the thyratron under different working environments (such as temperature and humidity changes) and working time, reduce the impact of environmental factors and equipment aging on the performance of the laser, and extend the service life of the equipment. In an environment with a temperature range of -10℃ - 40℃, the laser can still work stably. When using the traditional fixed voltage method, the laser performance will drop significantly when the temperature exceeds the range of 20℃ - 30℃.

[0013] 3. Reduce manual intervention and realize automatic adjustment of the heating power supply voltage, without the need for manual monitoring and manual adjustment, thus improving the working efficiency of the equipment; at the same time, it reduces the labor cost of subsequent thyratron maintenance and greatly improves the stability of the entire product.

[0014] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which: Figure 1 This is a module diagram of a system and method for automatically adjusting the heating voltage of an excimer laser thyratron according to the present invention. DETAILED DESCRIPTION

[0016] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention and are not to be construed as limiting the present invention. On the contrary, the embodiments of the present invention include all variations, modifications, and equivalents that fall within the spirit and scope of the appended claims.

[0017] A system and method for automatically adjusting the heating voltage of an excimer laser thyristor according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0018] like Figure 1 An automatic adjustment system for heating voltage of an excimer laser thyristor according to an embodiment of the present invention includes a thyristor, an adjustable heating power supply for the thyristor, a heating power supply voltage acquisition module, a thyristor anode current acquisition module, a thyristor grid voltage acquisition module, a thyristor cathode temperature acquisition module, and a heating power supply voltage control and regulation module.

[0019] Among them, the thyristor is used to control the on and off of current and adjust the current size. By adjusting the gate voltage, it can achieve precise control of the current between the anode and the cathode.

[0020] The adjustable thyratron heating power supply is used to provide heating energy for the thyratron cathode and hydrogen generator (for hydrogen thyratron). By adjusting the output voltage, the heating power can be controlled so that the thyratron cathode reaches the appropriate operating temperature, ensuring that the cathode can stably emit electrons. At the same time, a stable supply of hydrogen is guaranteed in the hydrogen thyratron, creating the necessary conditions for the normal operation of the thyratron.

[0021] The heating power supply voltage acquisition module collects the voltage output of the thyristor-controlled heating power supply in real time. The acquired voltage signal is converted into a digital signal and transmitted to the subsequent control module for monitoring and analysis of the heating power supply output voltage, providing a data foundation for precise regulation of the heating power supply voltage.

[0022] The thyratron anode current acquisition module measures the thyratron's anode current. By collecting the anode current signal, we can understand the thyratron's operating status and determine whether it is conducting normally and to what extent. The anode current is closely related to the thyratron's operating characteristics. Collecting this parameter helps analyze thyratron performance and provides a reference for adjusting the heating power supply voltage. Changes in the anode current may require corresponding adjustments to the heating power supply voltage to ensure stable thyratron operation.

[0023] Among them, the thyristor gate voltage acquisition module is responsible for collecting the voltage signal on the thyristor gate. The gate voltage is a key parameter for controlling the conduction and cutoff of the thyristor. By monitoring the gate voltage in real time, we can understand the control signal of the thyristor, judge whether the gate trigger is normal, and the impact of the change of gate voltage on the working state of the thyristor. It also provides important reference information for adjusting the heating power supply voltage.

[0024] The thyratron cathode temperature acquisition module directly measures the temperature of the thyratron cathode, which has a significant impact on the performance and lifespan of the thyratron. This module provides real-time feedback on the cathode temperature, ensuring it remains within the appropriate range. If the temperature becomes abnormal, the heating power supply voltage can be adjusted promptly to prevent problems such as unstable operation, shortened lifespan, or even damage to the thyratron caused by excessively high or low cathode temperatures.

[0025] The heating power supply voltage control and regulation module adjusts the output voltage of the thyristor's adjustable heating power supply according to a preset control strategy based on collected information such as the heating power supply voltage, thyristor anode current, gate voltage, and cathode temperature. This is the core module for automatically regulating the heating power supply voltage. By continuously optimizing the heating power supply voltage, the thyristor maintains optimal operating conditions under various operating conditions, thereby improving its stability, reliability, and service life.

[0026] A method for automatically adjusting the heating voltage of an excimer laser thyratron comprises the following steps: (1) After the thyristor adjustable heating power supply is powered on, it provides heating voltage and current to the thyristor according to the preset parameters; (2) The heating power supply voltage acquisition module, the thyristor grid voltage acquisition module, the thyristor cathode temperature acquisition module, and the thyristor anode current acquisition module respectively acquire the voltage V heat1 , thyristor gate voltage V gate , thyratron cathode temperature T Cathode , thyristor anode current I Anode Conduct data collection; (3) The collected parameters are transmitted to the heating power supply voltage control and regulation module, which processes and analyzes the data; (4) The processed data is used according to the function relationship pre-established based on the characteristics of the thyristor model to obtain the voltage V that needs to be adjusted. heat2 =V heat1 +A0+A1*V gate +A2*I Anode +A3*T Cathode +A4*V gate *I Anode +A5*T Cathode2 -A6*V gate2 Among them, A0, A1, A2, A3, A4, A5, and A6 are key coefficients obtained based on the characteristics of different types of thyristors and multiple tests. (5) The heating power supply voltage control and regulation module consists of V heat2 The value is calculated by looking up the table according to the preset parameters to generate a PWM signal with a corresponding duty cycle, which is sent to the thyristor adjustable heating power supply; (6) The thyristor adjustable heating power supply outputs the voltage V according to the received PWM signal heat1 Adjustment of the voltage of the thyristor heating power supply is realized to realize closed-loop control of the thyristor heating power supply voltage; (7) During the operation of the excimer laser, a dynamic adjustment strategy is adopted considering the dynamic changes of the working state; for the thyristor anode current I Anode , thyratron cathode temperature T Cathode , gate trigger voltage V gate The change of thyristor anode current I Anode When rapid changes occur, the heating power supply voltage should be adjusted quickly to ensure that the conduction performance of the thyristor is not affected; for the thyristor cathode temperature T CathodeIf the voltage changes slowly, the voltage is adjusted at a relatively slow but stable rate to avoid over-adjustment; at the same time, the adjustment strategy is optimized according to the different working modes of the excimer laser (continuous working mode, pulsed working mode).

[0027] Although the embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, replace and deform the above embodiments within the scope of the present invention.

Claims

1. An automatic adjustment system for heating voltage of an excimer laser thyratron, characterized in that: It includes a thyristor, a thyristor adjustable heating power supply, a heating power supply voltage acquisition module, a thyristor anode current acquisition module, a thyristor grid voltage acquisition module, a thyristor cathode temperature acquisition module and a heating power supply voltage control and regulation module; The thyristor is used to control the current on and off and adjust the current size. The thyristor is connected to a thyristor adjustable heating power supply, and the thyristor adjustable heating power supply is used to provide heating energy for the thyristor; The heating power supply voltage acquisition module is used to collect the voltage value output by the thyristor adjustable heating power supply in real time, and the heating power supply voltage acquisition module is connected to the thyristor; The thyristor anode current acquisition module is used to measure the magnitude of the thyristor anode current, and the thyristor anode current acquisition module is connected to the thyristor; The thyristor gate voltage acquisition module is used to acquire the voltage signal on the thyristor gate, and the thyristor gate voltage acquisition module is connected to the thyristor; The thyristor cathode temperature acquisition module is used to directly measure the temperature of the thyristor cathode, and the thyristor cathode temperature acquisition module is connected to the thyristor; The heating power supply voltage control and adjustment module is respectively connected to the heating power supply voltage acquisition module, the thyristor anode current acquisition module, the thyristor grid voltage acquisition module, the thyristor cathode temperature acquisition module and the thyristor adjustable heating power supply. The heating power supply voltage control and adjustment module is used to receive feedback information and adjust the output voltage of the thyristor adjustable heating power supply.

2. The automatic adjustment system for heating voltage of an excimer laser thyratron according to claim 1, characterized in that: The thyratron comprises an anode, a cathode and a hydrogen generator. The cathode is used for stably emitting electrons, and the hydrogen generator ensures a stable supply of hydrogen in the thyratron.

3. A method for automatically adjusting the heating voltage of an excimer laser thyristor, used in the automatic adjustment system for the heating voltage of an excimer laser thyristor according to any one of claims 1 to 2, characterized in that: The following steps are involved: (1) After the thyristor adjustable heating power supply is powered on, it provides heating voltage and current to the thyristor according to the preset parameters; (2) The heating power supply voltage acquisition module, the thyristor grid voltage acquisition module, the thyristor cathode temperature acquisition module, and the thyristor anode current acquisition module respectively acquire the voltage V heat1 , thyristor gate voltage V gate , thyratron cathode temperature T Cathode , thyristor anode current I Anode Conduct data collection; (3) The collected parameters are transmitted to the heating power supply voltage control and regulation module, which processes and analyzes the data; (4) The processed data is used according to the function relationship pre-established based on the characteristics of the thyristor model to obtain the voltage V that needs to be adjusted. heat2 ; (5) The heating power supply voltage control and regulation module consists of V heat2 The value is calculated by looking up the table according to the preset parameters to generate a PWM signal with a corresponding duty cycle, which is sent to the thyristor adjustable heating power supply; (6) The thyristor adjustable heating power supply outputs the voltage V according to the received PWM signal heat1 Adjustment of the voltage of the thyristor heating power supply is realized to realize closed-loop control of the thyristor heating power supply voltage; (7) During the operation of the excimer laser, a dynamic adjustment strategy is adopted considering the dynamic changes of the working state; for the thyristor anode current I Anode , thyratron cathode temperature T Cathode , gate trigger voltage V gate According to the changes in the response priority and adjustment rate, different response priorities and adjustment rates are set. At the same time, the adjustment strategy is optimized according to the different working modes of the excimer laser (continuous working mode, pulsed working mode).

4. The system and method for automatically adjusting the heating voltage of an excimer laser thyratron according to claim 3, characterized in that: The voltage V that needs to be adjusted heat2 =V heat1 +A0+A1*V gate +A2*I Anode +A3*T Cathode +A4*V gate *I Anode +A5*T Cathode2 -A6*V gate2 Among them, A0, A1, A2, A3, A4, A5, and A6 are key coefficients obtained based on the characteristics of different types of thyristors and multiple tests.

5. The system and method for automatically adjusting the heating voltage of an excimer laser thyratron according to claim 3, characterized in that: The different response priorities and adjustment rates are set for the thyristor anode current I Anode When rapid changes occur, the heating power supply voltage should be adjusted quickly to ensure that the conduction performance of the thyristor is not affected; for the thyristor cathode temperature T Cathode If the voltage changes slowly, the voltage is adjusted at a relatively slow but steady rate to avoid over-adjustment.

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