Flexible all-inorganic piezoelectric vibration sensor and preparation method thereof

Abstract

The invention discloses a flexible all-inorganic piezoelectric vibration sensor and a preparation method thereof. The piezoelectric sensor is characterized in that the used flexible substrate is a fluorine crystal mica substrate, the used functional material is an inorganic piezoelectric film, and the electrode structure is an interdigital electrode. The sensor has bendable flexibility and excellent vibration response, and can be applied to a wearable health monitoring system.

Description

Technical Field

[0001] The present invention belongs to the field of vibration sensors, and in particular relates to a flexible all-inorganic piezoelectric vibration sensor. Background Art

[0002] The "Healthy China 2030" Outline emphasizes prevention as the primary approach, shifting the focus to more proactive measures to reduce disease incidence, achieve universal health, and promote the development of the health industry. Against this backdrop, the "disease-centric" healthcare model is shifting toward one centered on people's health, with prevention becoming the current health philosophy for urban residents. Consumers are increasingly investing in chronic disease management and health preservation, and their awareness of health management has significantly increased. This relentless pursuit of healthy living has created a significant internal market for the medical device and medical sensor industries. Currently, wearable sensors for human monitoring are in their infancy and have yet to achieve large-scale production. Their advantages, such as small size, comfortable wearing, and easy detection, have garnered widespread attention in the field of detecting vital signs and physiological information. They hold broad application prospects in daily health assessment, disease diagnosis, and rehabilitation medicine.

[0003] Traditional electronic devices are typically rigid silicon-based integrated circuits, which limits their practical application in wearable devices. To overcome these limitations and meet the demands of human body monitoring, flexible electronics have emerged. Compared to traditional electronics, flexible electronics offer improved flexibility, adaptability, portability, durability, low cost, and wide-area applicability. Flexible piezoelectric vibration sensors are the most widely used sensor type in the medical field. Human health monitoring systems based on flexible piezoelectric vibration sensors can meet the diverse needs of diverse users across society. They can comprehensively monitor health data, generating more accurate data that medical professionals can use to provide better recommendations and safeguard the user's health.

[0004] In practical applications, polymers such as polyimide (PI) and polyethylene terephthalate (PET) are often used as flexible substrates for the fabrication of flexible piezoelectric vibration sensors, and ferroelectric polymers such as polytetrafluoroethylene [P(VDF-TrFE)] films are often used as functional layers. These flexible piezoelectric vibration sensors are typically fabricated at room temperature and exhibit poor overall performance. In contrast, inorganic piezoelectric materials offer superior thermal and chemical stability. However, inorganic piezoelectric materials are mostly functional ceramics with high brittleness and strong rigidity, resulting in poor ductility and bending, posing challenges to the application of flexible vibration sensors. Therefore, the preparation of flexible, all-inorganic piezoelectric films and their application in flexible vibration sensors has become an emerging research hotspot. Summary of the Invention

[0005] To meet the needs of vibration monitoring, the present invention provides a flexible all-inorganic piezoelectric vibration sensor. The core piezoelectric element uses an inorganic piezoelectric film to achieve portable and conformable vibration monitoring.

[0006] In order to achieve the above-mentioned object of the invention, the specific technical solutions of the present invention are as follows: The flexible piezoelectric vibration energy harvester consists of three parts, including a flexible substrate, a piezoelectric film, and electrodes; The flexible substrate is a fluorphlogopite mica substrate; The inorganic piezoelectric films include lead zirconate titanate (PZT), lead magnesium niobate-lead titanate (PMN-PT), bismuth ferrite (BFO), lead titanate (BTO) aluminum nitride (AlN) and other piezoelectric films; The electrode structure is an interdigitated electrode with an electrode spacing of 50-500 μm, an electrode width of 50-500 μm, and 10-30 pairs of electrodes. The preparation method is as follows: (1) Depositing an inorganic piezoelectric thin film on a fluorophlogopite substrate using a sol-gel method, magnetron sputtering, electron beam deposition, molecular beam epitaxy, or other deposition methods; (2) The interdigitated electrodes are deposited on the inorganic piezoelectric film using magnetron sputtering. Beneficial effects

[0007] The flexible all-inorganic piezoelectric vibration sensor prepared by the present invention has the advantages of flexibility, commonality and portable application. The flexible all-inorganic piezoelectric vibration sensor can be used for portable vibration monitoring, providing a practical vibration sensor for human health monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 Schematic diagram of a flexible all-inorganic piezoelectric vibration sensor Figure 2 Schematic diagram of interdigitated electrodes. DETAILED DESCRIPTION

[0009] The following is a detailed description of an embodiment of the present invention. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process. However, the protection scope of the present invention is not limited to the following embodiment.

[0010] Figure 1 The figure shows a schematic diagram of a flexible all-inorganic piezoelectric vibration sensor, which includes a flexible substrate 1, a piezoelectric film 2, and interdigital electrodes 3. Example

[0011] The inorganic piezoelectric film is a PZT film, and the dimensions of the interdigitated electrodes are: electrode spacing 100 μm, electrode width 100 μm, and the number of electrode pairs is 12 pairs.

[0012] The specific preparation process is: (1) PZT thin film was deposited on fluorophlogopite substrate by sol-gel method; (2) The interdigitated electrodes are deposited on the PZT film by magnetron sputtering.

Claims

1. A flexible all-inorganic piezoelectric vibration sensor, characterized in that: It comprises a flexible substrate (1), an inorganic piezoelectric film (2), and an electrode (3).

2. The flexible all-inorganic piezoelectric vibration sensor according to claim 1, characterized in that: The flexible substrate is a fluorophlogopite mica substrate.

3. The flexible all-inorganic piezoelectric vibration sensor according to claim 1, characterized in that: The inorganic piezoelectric films include lead zirconate titanate (PZT), lead magnesium niobate-lead titanate (PMN-PT), bismuth ferrite (BFO), lead titanate (BTO) and other inorganic piezoelectric films.

4. The flexible all-inorganic piezoelectric vibration sensor according to claim 1, characterized in that: The electrode structure is an interdigitated electrode, the electrode spacing is 50-500um, the electrode width is 50-500um, and the number of electrode pairs is 10-30 pairs.

5. The preparation method according to claim 1, characterized in that The following steps are involved: (1) Depositing an inorganic piezoelectric film on a fluorophlogopite substrate; (2) Depositing interdigitated electrodes on an inorganic piezoelectric film.

6. The preparation method according to claim 5, characterized in that Deposition methods include sol-gel method, magnetron sputtering method, electron beam deposition method, molecular beam epitaxy method, etc.

7. The preparation method according to claim 5, characterized in that During the deposition of interdigitated electrodes, a hard mask is used to achieve electrode patterning.

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