Plasma treatment method for metal plate after laser etching

Abstract

The invention relates to the technical field of plasma cleaning, and discloses a plasma treatment method for a metal plate after laser etching, which comprises the following steps: cleaning the surface of the metal plate after laser etching, putting the metal plate into plasma cleaning equipment, and carrying out plasma cleaning treatment at preset gas flow and preset radio frequency power; the duration of plasma cleaning treatment is preset as the first duration, cleanliness detection data and surface roughness detection data of the metal plate subjected to plasma cleaning for the first duration are obtained, a cleanliness score is calculated, and whether post-cleaning treatment is carried out or not is determined according to the cleanliness score; and after it is determined that post-cleaning treatment is carried out, after the post-cleaning treatment is finished for a second time length, metal plate treatment is completed. According to the method, the metal plate subjected to laser etching is subjected to plasma cleaning, and the process parameters of plasma cleaning equipment are controlled, so that the plasma is in full contact with the surface of the metal plate and reacts with the surface of the metal plate, and the cleaning purpose is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma cleaning, and in particular to a plasma treatment method for metal plates after laser ablation. Background Art

[0002] After laser ablation, metal plates such as vapor chambers will form microchannels or microstructures on their surface. These tiny channels and structures can increase the surface area, thereby improving heat conduction efficiency and optimizing heat dissipation performance.

[0003] During the laser ablation process, impurities or contaminants may remain in the microchannels or microstructures. These impurities may include processing residues, dust in the air, etc. These remaining impurities and contaminants accumulate in the microchannels and microstructures, causing metal corrosion and affecting the phase change reaction, thereby reducing overall heat dissipation performance and service life.

[0004] How to effectively clean metal sheets after laser ablation has become a technical problem that needs to be solved urgently. Summary of the Invention

[0005] In view of this, the present invention proposes a plasma treatment method for metal plates after laser ablation, aiming to solve the problems existing in the current technology.

[0006] The present invention proposes a plasma treatment method for metal plates after laser ablation, comprising the following steps: After the metal sheet has been laser ablated and its surface is cleaned, it is placed in a plasma cleaning device and plasma cleaning is performed at a preset gas flow rate and a preset radio frequency power; Presetting the duration of the plasma cleaning process to a first duration, obtaining cleanliness test data and surface roughness test data of the metal sheet after the plasma cleaning for the first duration, calculating a cleanliness score based on the cleanliness test data and the surface roughness test data, and determining whether to enter post-cleaning processing based on the cleanliness score; When it is determined to enter the post-cleaning process, the duration of the post-cleaning process is preset to a second duration. After the post-cleaning process ends after the second duration, the metal sheet processing is completed.

[0007] In some embodiments of the present application, the sum of the first duration and the second duration is 10 to 30 minutes.

[0008] In some embodiments of the present application, the preset gas flow rate is 50-200 SCCM.

[0009] In some embodiments of the present application, the preset radio frequency power is 200-500W.

[0010] In some embodiments of the present application, the cleanliness detection data includes the plasma spectrum characteristic peak of the metal plate during the plasma cleaning process and the surface resistivity change rate of the metal plate; the surface roughness detection data is the surface roughness of the metal plate during the plasma cleaning process.

[0011] In some embodiments of the present application, when calculating the cleanliness score based on the cleanliness detection data and the surface roughness detection data, the method includes: The cleanliness score is recorded as A, and the full score of the cleanliness score is 100; ; + + =1; in, is the normalized score of the spectral feature peak, is the corresponding weight of the normalized score of the spectral feature peak; is the normalized score of the rate of change of surface resistivity of the metal sheet, is the corresponding weight of the normalized score of the surface resistivity change rate of the metal sheet; is the surface roughness normalized score, The corresponding weights for the normalized scores of surface roughness.

[0012] In some embodiments of the present application, the spectral feature peak normalization score The calculation formula is as follows: ; Where P is the characteristic peak of the plasma spectrum, is the peak standard threshold of the characteristic peak of the plasma spectrum; Standardized score of the rate of change of surface resistivity of metal sheets The calculation formula is as follows: ; in, is the resistivity change rate of the metal plate surface during the first time period; Surface roughness normalized score The calculation formula is as follows: ; Here, Ra is the surface roughness of the metal sheet.

[0013] In some embodiments of the present application, when determining whether to enter post-cleaning processing according to the cleanliness score, it includes: Compare the cleanliness score to a preset cleanliness score threshold: When the cleanliness score is greater than or equal to the preset cleanliness score threshold, determining to directly enter the post-cleaning process; When the cleanliness score is less than the preset cleanliness score threshold, a first adjustment time is calculated according to the difference between the cleanliness score and the preset cleanliness score threshold, so that the plasma cleaning process is extended by the first adjustment time before entering the post-cleaning process.

[0014] In some embodiments of the present application, the sum of the first adjustment duration and the second duration is 10 to 30 minutes.

[0015] In some embodiments of the present application, when the first adjustment time is calculated based on the difference between the cleanliness score and the preset cleanliness score threshold, the calculation formula for the first adjustment time is as follows: ; Among them, T1a is the first adjustment time; S is the cleanliness score; Sa is the preset cleanliness score threshold; T1 is the first time.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The present invention uses a plasma cleaning device to perform plasma cleaning on the metal sheet after laser ablation. Since the plasma can penetrate deep into the microstructure and exert its effect, it can accurately remove tiny pollutants. It can effectively clean the impurity pollutants in the microchannels and microstructures on the surface of the metal sheet after laser ablation, and prevent the impurity pollutants from corroding the metal inside the metal sheet and affecting the phase change reaction. At the same time, the ions in the plasma have a certain kinetic energy. These ions collide with the metal surface at high speed and can physically remove loose attachments on the surface such as dust and some oxides. In addition, the plasma contains a large number of active free radicals, which can react chemically with organic matter or certain metal oxides on the metal surface. Taking the removal of organic matter as an example, oxygen free radicals react with organic matter, oxidizing and decomposing it into small molecules such as carbon dioxide and water, thereby achieving the purpose of cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present invention. The same reference symbols are used throughout the drawings to represent the same components. In the drawings: Figure 1 A flow chart of a plasma treatment method for a metal plate after laser ablation provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0018] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art. It should be noted that, unless there is a conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0019] See Figure 1 This embodiment provides a plasma treatment method for a metal plate after laser ablation, comprising the following steps: After the metal sheet has been laser ablated and its surface is cleaned, it is placed in a plasma cleaning device and plasma cleaning is performed at a preset gas flow rate and a preset radio frequency power; Presetting the duration of the plasma cleaning process as a first duration, obtaining cleanliness test data and surface roughness test data of the metal sheet after the plasma cleaning for the first duration, calculating a cleanliness score based on the cleanliness test data and the surface roughness test data, and determining whether to enter post-cleaning processing based on the cleanliness score; When it is determined to enter the post-cleaning process, the duration of the post-cleaning process is preset to be a second duration. After the post-cleaning process ends after the second duration, the metal sheet processing is completed.

[0020] In a specific embodiment of the present application, the sum of the first duration and the second duration is 10 to 30 minutes.

[0021] In a specific embodiment of the present application, the preset gas flow rate is 50-200 SCCM.

[0022] In a specific embodiment of the present application, the preset radio frequency power is 200-500W.

[0023] Specifically, in this embodiment, when the metal plate after laser ablation is cleaned, large particles of impurities on the surface can be removed by wiping, blowing, etc., so that there is no large amount of dust, oil or other impurities on the surface of the metal plate.

[0024] Specifically, the working gas during the plasma cleaning process in this embodiment may be oxygen and / or argon.

[0025] Specifically, in this embodiment, the post-cleaning treatment may be vacuum drying or nitrogen purging to remove residual plasma or restore the original environmental state of the metal plate.

[0026] It is understood that in this embodiment, the metal sheet after laser ablation must first undergo surface cleaning. It is then placed in a plasma cleaning device, where a working gas is introduced and the gas flow and RF power are controlled to ionize the working gas and form a plasma. After the plasma cleaning process is complete, a cleanliness score is calculated based on the post-cleaning cleanliness and surface roughness data to determine whether to proceed to post-cleaning. Once the post-cleaning process has completed a predetermined duration, the metal sheet is finally cleaned.

[0027] It is understood that the post-laser ablation surface cleaning process in this embodiment is a fundamental step in ensuring the effectiveness of plasma cleaning. Large impurities are physically removed, reducing the difficulty of subsequent processing. During the plasma cleaning process, selecting the appropriate working gas and optimizing gas flow and RF power can significantly improve cleaning efficiency and effectiveness. Cleanliness scores and surface roughness test data provide a quantitative basis for cleaning time, facilitating real-time monitoring and adjustment of the cleaning process to ensure that the metal sheet meets the desired surface quality requirements.

[0028] Furthermore, plasma is a gas mixture composed of charged particles such as electrons, ions, and free radicals, as well as neutral particles, and possesses high chemical activity and physical energy. In this embodiment, by controlling the plasma cleaning equipment's process parameters, such as RF power, cleaning duration, and gas flow rate, the plasma is ensured to fully contact and react with the metal sheet surface. The active particles in the plasma react with contaminants on the metal surface, generating volatile substances, thereby achieving the cleaning objective.

[0029] In a specific embodiment of the present application, the cleanliness detection data includes the plasma spectrum characteristic peak value and the surface resistivity change rate of the metal plate during the plasma cleaning process; the surface roughness detection data is the surface roughness of the metal plate during the plasma cleaning process.

[0030] In a specific embodiment of the present application, when calculating the cleanliness score based on the cleanliness test data and the surface roughness test data, the process includes: The cleanliness score is recorded as A, and the full score of the cleanliness score is 100; ; + + =1; in, is the normalized score of the spectral feature peak, is the corresponding weight of the normalized score of the spectral feature peak; is the normalized score of the rate of change of surface resistivity of the metal sheet, is the corresponding weight of the normalized score of the surface resistivity change rate of the metal sheet; is the surface roughness normalized score, The corresponding weights for the normalized scores of surface roughness.

[0031] Specifically, the characteristic peak intensity of the plasma spectrum can be detected by OES (optical emission spectroscopy) to measure the characteristic peak intensity of active free radicals during the cleaning process. The maximum value is taken for normalization. The higher the peak value, the stronger the reaction activity and the better the organic matter removal effect. The change rate of the surface resistivity of the metal plate can be measured before and after cleaning using the four-probe method. The change in resistivity is calculated. The greater the decrease in resistivity, the more thorough the removal of conductive impurities. The surface roughness of the cleaned metal plate can be measured using a white light interferometer. Moderate surface roughness indicates uniform etching, but excessive surface roughness will damage the plate structure.

[0032] As you can understand, this example comprehensively evaluates the cleanliness of metal sheets by combining three parameters: the characteristic peak value of the plasma spectrum, the rate of change of the metal sheet's surface resistivity, and surface roughness. Each parameter is standardized and assigned a weight to reflect its impact on cleanliness. Ultimately, a weighted summation is used to generate a cleanliness score. By comprehensively considering these parameters, the effectiveness of plasma cleaning can be more comprehensively assessed, leading to optimization of the cleaning process and improved product quality.

[0033] In a specific embodiment of the present application, the spectral feature peak normalization score The calculation formula is as follows: ; Where P is the characteristic peak of the plasma spectrum, is the peak standard threshold of the characteristic peak of the plasma spectrum.

[0034] Standardized score of the rate of change of surface resistivity of metal sheets The calculation formula is as follows: ; in, is the resistivity change rate of the metal plate surface in the first time period.

[0035] Specifically, It is a typical value, indicating that the pollutants are completely removed.

[0036] Surface roughness normalized score The calculation formula is as follows: ;

[0037] Here, Ra is the surface roughness of the metal sheet.

[0038] In a specific embodiment of the present application, when determining whether to enter the post-cleaning process based on the cleanliness score, it includes: Compare the cleanliness score to a preset cleanliness score threshold: When the cleanliness score is greater than or equal to the preset cleanliness score threshold, it is determined to directly enter the post-cleaning process; When the cleanliness score is less than the preset cleanliness score threshold, a first adjustment time is calculated according to the difference between the cleanliness score and the preset cleanliness score threshold, so that the plasma cleaning process is extended by the first adjustment time before entering the post-cleaning process.

[0039] It will be appreciated that the preset cleanliness score threshold in this embodiment is a pre-set standard value used to determine whether the metal sheet surface has achieved the desired cleanliness level. The specific value can be set based on actual conditions. Based on the difference between the cleanliness score and the preset cleanliness score threshold, the duration of the first plasma cleaning process is dynamically adjusted. If the cleanliness score falls below the threshold, the plasma cleaning process duration is automatically increased, thereby optimizing the cleaning process, improving efficiency, and ensuring cleaning results.

[0040] In a specific embodiment of the present application, the sum of the first adjustment duration and the second duration is 10 to 30 minutes.

[0041] In a specific embodiment of the present application, when the first adjustment time is calculated based on the difference between the cleanliness score and the preset cleanliness score threshold, the calculation formula of the first adjustment time is as follows: ; Among them, T1a is the first adjustment time; S is the cleanliness score; Sa is the preset cleanliness score threshold; T1 is the first time.

[0042] It can be understood that in this embodiment, the first duration is adjusted accordingly based on the percentage of the difference between the cleanliness score and the preset cleanliness score threshold to obtain the first adjusted duration, thereby optimizing the cleaning process and ensuring the cleaning effect.

[0043] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware. Furthermore, the present application may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to magnetic disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0044] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems) and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 a process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0045] These computer program instructions may also be stored in a computer readable memory that can direct a computer or other programmable data processing device to work in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 a process or multiple processes and / or boxes Figure 1 The function specified in one or more boxes.

[0046] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operational steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing the instructions executed on the computer or other programmable device for implementing the process. Figure 1 a process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the field should understand that the specific implementation methods of the present invention can still be modified or replaced by equivalents. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be covered by the scope of protection of the claims of the present invention.

Claims

1. A plasma treatment method for metal sheet after laser ablation, characterized in that: The following steps are involved: After the metal sheet has been laser ablated and its surface is cleaned, it is placed in a plasma cleaning device and plasma cleaning is performed at a preset gas flow rate and a preset radio frequency power; Presetting the duration of the plasma cleaning process to a first duration, obtaining cleanliness test data and surface roughness test data of the metal sheet after the plasma cleaning for the first duration, calculating a cleanliness score based on the cleanliness test data and the surface roughness test data, and determining whether to enter post-cleaning processing based on the cleanliness score; When it is determined to enter the post-cleaning process, the duration of the post-cleaning process is preset to a second duration. After the post-cleaning process ends after the second duration, the metal sheet processing is completed.

2. The plasma treatment method for metal sheet after laser ablation according to claim 1, characterized in that: The sum of the first duration and the second duration is 10 to 30 minutes.

3. The plasma treatment method for metal sheet after laser ablation according to claim 1, characterized in that: The preset gas flow rate is 50-200 SCCM.

4. The plasma treatment method for metal sheet after laser ablation according to claim 1, characterized in that: The preset radio frequency power is 200-500W.

5. The plasma treatment method for metal sheet after laser ablation according to claim 1, characterized in that: The cleanliness detection data includes the characteristic peak value of the plasma spectrum of the metal plate during the plasma cleaning process and the surface resistivity change rate of the metal plate; the surface roughness detection data is the surface roughness of the metal plate during the plasma cleaning process.

6. The plasma treatment method for metal sheet after laser ablation according to claim 5, characterized in that: When calculating the cleanliness score based on the cleanliness test data and the surface roughness test data, it includes: The cleanliness score is recorded as A, and the full score of the cleanliness score is 100; ； + + =1； in, is the normalized score of the spectral feature peak, is the corresponding weight of the normalized score of the spectral feature peak; is the normalized score of the rate of change of surface resistivity of the metal sheet, is the corresponding weight of the normalized score of the surface resistivity change rate of the metal sheet; is the surface roughness normalized score, The corresponding weights for the normalized scores of surface roughness.

7. The plasma treatment method for metal sheet after laser ablation according to claim 6, characterized in that: Spectral feature peak normalized score The calculation formula is as follows: ； Where P is the characteristic peak of the plasma spectrum, is the peak standard threshold of the characteristic peak of the plasma spectrum; Standardized score of the rate of change of surface resistivity of metal sheets The calculation formula is as follows: ； in, is the resistivity change rate of the metal plate surface during the first time period; Surface roughness normalized score The calculation formula is as follows: ； Here, Ra is the surface roughness of the metal sheet.

8. The plasma treatment method for metal sheet after laser ablation according to claim 1, characterized in that: When determining whether to enter post-cleaning processing based on the cleanliness score, it includes: Compare the cleanliness score to a preset cleanliness score threshold: When the cleanliness score is greater than or equal to the preset cleanliness score threshold, determining to directly enter the post-cleaning process; When the cleanliness score is less than the preset cleanliness score threshold, a first adjustment time is calculated according to the difference between the cleanliness score and the preset cleanliness score threshold, so that the plasma cleaning process is extended by the first adjustment time before entering the post-cleaning process.

9. The plasma treatment method for metal sheet after laser ablation according to claim 8, characterized in that: The sum of the first adjustment time and the second time is 10 to 30 minutes.

10. The plasma treatment method for metal sheet after laser ablation according to claim 8, characterized in that: When the first adjustment time is calculated based on the difference between the cleanliness score and the preset cleanliness score threshold, the calculation formula of the first adjustment time is as follows: ； Among them, T1a is the first adjustment time; S is the cleanliness score; Sa is the preset cleanliness score threshold; T1 is the first time.

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