Electroplating solution circulation filtering device for use in an electroplating process

Abstract

The application belongs to the technical field of electroplating solution circulation filtering, and particularly relates to an electroplating solution circulation filtering device used in an electroplating process, which comprises a filter cylinder, the upper end of which is open and the bottom side wall of which is provided with a circulation valve in communication; and a slow-flow type liquid supply mechanism arranged above the filter cylinder and comprising a liquid guide assembly, which comprises a liquid guide pipe in communication with an electroplating solution discharge end, a slow-flow frame fixed to the upper wall of the filter cylinder, and a liquid guide cylinder provided in the slow-flow frame and provided with symmetrical arc-shaped grooves, the liquid guide pipe being arranged in communication with the liquid guide cylinder. The application provides the electroplating solution circulation filtering device used in the electroplating process, which can convert the flow force generated by the electroplating solution into mechanical energy, adsorb part of impurities in the electroplating solution, maintain the filtering performance of the filter bag, buffer and offset the flow impact force generated by the electroplating solution, and ensure the continuous use efficiency of the filter bag.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of electroplating solution circulation filtration, and particularly relates to an electroplating solution circulation filtration device used in an electroplating process. BACKGROUND

[0002] In the precise operation of the electroplating process, the circulation filtration mode of the electroplating solution plays a crucial role, which is directly related to the cleanliness of the plating solution, ensures that there is no impurity interference in the electroplating process, and deeply affects the uniformity, compactness and overall quality of the plating layer, and then has a significant influence on the production efficiency.

[0003] The existing electroplating solution circulation filtration device used in the electroplating process has the following problems:

[0004] When the existing electroplating solution circulation filtration device used in the electroplating process uses a filter bag to filter the electroplating solution, the hard metal particles will wear the filter bag, causing the filter bag to be damaged and perforated, so that the filtering capacity of the filter bag is lost. The traditional equipment using a filter bag to filter the electroplating solution has limited capacity to hold impurities. When holding more impurities, due to the weight of the impurities and the flow impact force of the electroplating solution, the filter bag will be stretched, causing the pores to deform. With the increase of the filter bag filtration time, the pore spacing of the filter bag increases under the continuous stretching, and then the filtration efficiency of the electroplating solution is reduced. Therefore, it cannot meet the use requirements of the existing electroplating solution circulation filtration device. SUMMARY

[0005] In view of the above problems, in order to overcome the defects of the prior art, the present application provides an electroplating solution circulation filtration device used in an electroplating process, which can convert the flow force generated by the electroplating solution into mechanical energy, adsorb part of the impurities in the electroplating solution, maintain the filtration performance of the filter bag, and buffer and offset the flow impact force generated by the electroplating solution, so as to ensure the continuous use efficiency of the filter bag.

[0006] The technical scheme adopted by the scheme is as follows: the scheme provides an electroplating solution circulating filtering device used in an electroplating process, comprising: a filtering cylinder, the upper end of which is open and the bottom side wall of which is provided with a circulating valve; a slow-flow type liquid supply mechanism arranged above the filtering cylinder, comprising: a liquid guide assembly, including a liquid guide pipe communicated with an electroplating solution discharge end, a slow-flow frame fixed to the upper wall of the filtering cylinder, and a liquid guide cylinder arranged in the slow-flow frame and provided with symmetrical arc-shaped grooves, the liquid guide pipe being arranged in communication with the liquid guide cylinder; a self-rotation assembly, including a self-rotation cylinder sleeved on the outside of the liquid guide cylinder, a flow distribution frame arranged radially on the side wall of the self-rotation cylinder, a rotating pipe in communication with the self-rotation cylinder and the arc-shaped grooves, and a gravity tank arranged at the end of the flow distribution frame and open; an energy storage assembly, including a motor base arranged on one side of the filtering cylinder close to the self-rotation cylinder, a generator arranged in the motor base, and a rectifier and a storage battery connected in sequence, the power end of the generator penetrating through the motor base, the filtering cylinder and the self-rotation cylinder and being fixedly connected; a penetration prevention type filtrate mechanism arranged in the filtering cylinder, comprising: a conical flow assembly, including a conical sliding plate slidably connected to the inner wall of the filtering cylinder, a liquid falling port arranged at the edge of the conical sliding plate, a impurity adsorption electromagnet arranged at the bottom wall of the conical sliding plate, and a supporting spring supporting the conical sliding plate; a filtering assembly, including a through connection box fixedly connected to the bottom of the conical sliding plate, and a filtering bag arranged at the bottom wall of the connection box; a limiting assembly, including an annular permanent magnet arranged at the bottom of the filtering cylinder, a supporting permanent magnet and a impact prevention electromagnet arranged at the bottom wall of the filtering bag, and a distance measuring sensor monitoring the position of the filtering bag through a glass layer; and a controller electrically connected with the impurity adsorption electromagnet, the impact prevention electromagnet and the distance measuring sensor; wherein the self-rotation cylinder is driven by the electroplating solution to deflect the gravity tank to realize continuous rotation and generate electricity, the storage battery supplies power to the impurity adsorption electromagnet and the impact prevention electromagnet, and the annular permanent magnet and the supporting permanent magnet and the impact prevention electromagnet are of the same polarity and repel each other to support the filtering bag.

[0007] As a further preferred embodiment of the scheme, the deflection of the gravity tank is achieved by destroying the symmetry of the self-rotation cylinder through the injection of the electroplating solution, and the self-rotation cylinder rotates continuously by the periodic conduction of the rotating pipe and the arc-shaped grooves.

[0008] Preferably, in the conical flow assembly, the impurity adsorption electromagnet is located opposite the liquid falling area on the bottom wall of the conical sliding plate, and is used to adsorb metal particles in the electroplating solution to reduce the impact and wear of the filtering bag.

[0009] Preferably, in the limiting assembly, the repulsive force of the supporting permanent magnet and the annular permanent magnet offsets the vertical downward force of the impurities in the filtering bag, and the impact prevention electromagnet enhances the repulsive force after being energized to buffer the flow impact of the electroplating solution.

[0010] Specifically, the distance measuring sensor monitors the position of the impact prevention electromagnet through the glass layer, and when the downward displacement of the filtering bag exceeds a threshold value, the controller triggers a replacement signal.

[0011] The power generation capacity of the generator increases with the increase of the electroplating solution flow, and the adsorption force of the impurity adsorption electromagnet and the repulsive force strength of the impact prevention electromagnet are simultaneously improved.

[0012] The beneficial effects achieved by the above structure are as follows:

[0013] Compared with the prior art, the present scheme adopts the combination of slow-flow type liquid supply mechanism and anti-penetration type filtrate mechanism, through the setting of the liquid guide assembly, the self-rotation assembly, the energy storage assembly, the conical flow assembly, the filter assembly and the limiting assembly, the flow force of the electroplating water can be converted into mechanical energy, and the mechanical energy is converted into electrical energy under the action of the generator and the rectifier for recycling, on the one hand, the part of the metal particles in the electroplating solution can be adsorbed, reducing the number of impacts of the metal particles on the filter bag with the flow of the electroplating water; on the other hand, the filter bag containing impurities after filtering the electroplating solution can be supported, reducing the probability of stretching of the pores of the filter bag after bearing the gravity of the impurities, ensuring the filtering performance of the filter bag, so that the filter bag can filter and contain more impurities. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present scheme;

[0015] Figure 2 It is a front view of the present scheme;

[0016] Figure 3 It is a bottom view of the present scheme;

[0017] Figure 4 It is a schematic diagram of the structure of the liquid guide assembly of the present scheme;

[0018] Figure 5 It is a schematic diagram of the structure of the self-rotation assembly of the present scheme;

[0019] Figure 6 It is a schematic diagram of the structure of the anti-penetration type filtrate mechanism of the present scheme;

[0020] Figure 7 It is a schematic diagram of the combination structure of the filter cartridge and the slow-flow frame of the present scheme;

[0021] Figure 8 It is a front view of the present scheme;

[0022] Figure 9 It is a side view of the present scheme;

[0023] Figure 10 It is a top view of the present scheme;

[0024] Figure 11 It is a sectional view of A-A of Figure 10 ;

[0025] Figure 12 It is an enlarged structure view of I of Figure 2 ;

[0026] Figure 13 For Figure 11 Part II of the enlarged structural view.

[0027] Wherein, 1, filter cartridge, 2, slow flow frame, 3, slow flow type liquid supply mechanism, 4, liquid guide assembly, 5, liquid guide cylinder, 6, arc-shaped groove, 7, pipe clamp, 8, liquid guide pipe, 9, self-rotation assembly, 10, self-rotation cylinder, 11, flow distribution frame, 12, rotating pipe, 13, gravity tank, 14, energy storage assembly, 15, motor base, 16, generator, 17, rectifier, 18, battery, 19, anti-penetration type filtrate mechanism, 20, conical flow assembly, 21, conical slide plate, 22, liquid outlet, 23, impurity absorption electromagnet, 24, support spring, 25, filtration assembly, 26, connection box, 27, filter bag, 28, limiting assembly, 29, distance measuring sensor, 30, glass layer, 31, annular permanent magnet, 32, supporting permanent magnet, 33, anti-collision electromagnet, 34, controller, 35, circulation valve.

[0028] The accompanying drawings are used to provide a further understanding of the present scheme, and constitute a part of the specification, and are used to explain the present scheme together with embodiments of the present scheme, and do not constitute a limitation on the present scheme. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present scheme will be clearly and completely described below in conjunction with the drawings in the embodiments of the present scheme. Obviously, the described embodiments are only part of the embodiments of the present scheme, rather than all the embodiments of the present scheme; based on the embodiments in the present scheme, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present scheme.

[0030] In the description of the present scheme, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present scheme and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present scheme.

[0031] As Figures 1-13As shown in the scheme, the electroplating solution circulating filtering device for electroplating process is provided, which comprises a filtering cylinder 1, a circulating valve 35, a slow flow type liquid supply mechanism 3 and a penetration prevention type filtrate mechanism 19, the circulating valve 35 is communicated with the bottom side wall of the filtering cylinder 1, the filtering cylinder 1 is provided with an open upper end, the slow flow type liquid supply mechanism 3 is arranged above the filtering cylinder 1, and the penetration prevention type filtrate mechanism 19 is arranged in the filtering cylinder 1, the slow flow type liquid supply mechanism 3 comprises a liquid guide assembly 4, a self-rotation assembly 9 and an energy storage assembly 14, the liquid guide assembly 4 is arranged on the upper wall of the filtering cylinder 1, the self-rotation assembly 9 is arranged on the liquid guide assembly 4, and the energy storage assembly 14 is arranged on the side wall of the filtering cylinder 1, the penetration prevention type filtrate mechanism 19 comprises a conical flow assembly 20, a filtering assembly 25 and a limiting assembly 28, the conical flow assembly 20 is arranged on the inner wall of the upper portion of the filtering cylinder 1, the filtering assembly 25 is arranged at the bottom of the conical flow assembly 20, and the limiting assembly 28 is arranged at the bottom of the filtering cylinder 1.

[0032] The liquid guide assembly 4 comprises a slow flow frame 2, a liquid guide cylinder 5, an arc-shaped groove 6, a pipeline clamp 7 and a liquid guide pipe 8, the slow flow frame 2 is arranged on the upper wall of the filtering cylinder 1, the liquid guide cylinder 5 is arranged on the inner wall of one end of the slow flow frame 2, the liquid guide cylinder 5 is provided with an open end, the arc-shaped grooves 6 are symmetrically arranged on one side of the liquid guide cylinder 5, the arc-shaped grooves 6 are provided with through holes, the pipeline clamp 7 is arranged on the side wall of the filtering cylinder 1, and the liquid guide pipe 8 is arranged in communication between the liquid guide cylinder 5 and the pipeline clamp 7 through the slow flow frame 2; the self-rotation assembly 9 comprises a self-rotation cylinder 10, a flow distribution frame 11, a rotating pipe 12 and a gravity tank 13, the self-rotation cylinder 10 is rotatably arranged on the inner wall of one end of the slow flow frame 2 away from the liquid guide cylinder 5, the self-rotation cylinder 10 is provided with an open end, one end of the self-rotation cylinder 10 away from the slow flow frame 2 is sleeved outside the liquid guide cylinder 5, the open end of the self-rotation cylinder 10 and the liquid guide cylinder 5 are rotationally sealed through a sealing ring, a plurality of flow distribution frames 11 are arranged on the side wall of the self-rotation cylinder 10, the rotating pipe 12 is arranged in communication on the side wall of the self-rotation cylinder 10 through the flow distribution frame 11, and the gravity tank 13 is arranged on the inner wall of one end of the flow distribution frame 11 away from the rotating pipe 12, the gravity tank 13 is provided with an open end; the energy storage assembly 14 comprises a motor base 15, a generator 16, a rectifier 17 and a storage battery 18, the motor base 15 is arranged on one side of the filtering cylinder 1 close to the self-rotation cylinder 10, the generator 16 is arranged in the motor base 15, the power end of the generator 16 is fixedly connected with the motor base 15, the filtering cylinder 1 and the self-rotation cylinder 10 through penetration, and the rectifier 17 and the storage battery 18 are arranged on the side wall of the filtering cylinder 1 respectively, the rectifier 17 is electrically connected with the generator 16, and the rectifier 17 is electrically connected with the storage battery 18.

[0033] The conical flow component 20 comprises a conical slide plate 21, liquid falling ports 22, impurity absorption electromagnets 23 and support springs 24, the conical slide plate 21 is slidingly arranged in the inner wall of the filter cylinder 1, a plurality of groups of the liquid falling ports 22 are arranged at one end of the conical slide plate 21 close to the inner wall of the filter cylinder 1, a plurality of groups of the impurity absorption electromagnets 23 are arranged at the bottom wall of the conical slide plate 21, the support springs 24 are arranged between the conical slide plate 21 and the bottom of the filter cylinder 1, and the support springs 24 are normally arranged in an elongated state; the filter component 25 comprises a connecting box 26 and filter bags 27, the connecting box 26 is arranged at the bottom wall of the conical slide plate 21, the connecting box 26 is arranged in a penetrating manner, and the filter bags 27 are arranged at the bottom wall of the connecting box 26; the limiting component 28 comprises a distance measuring sensor 29, a glass layer 30, an annular permanent magnet 31, a supporting permanent magnet 32 and a shockproof electromagnet 33, the distance measuring sensor 29 is arranged in a groove at the bottom of the filter cylinder 1, the glass layer 30 is arranged in a penetrating manner in the inner wall at the bottom of the filter cylinder 1, the annular permanent magnet 31 is arranged at the bottom wall of the filter cylinder 1 outside the glass layer 30, the supporting permanent magnet 32 is arranged at the bottom wall of the filter bag 27, the shockproof electromagnet 33 is arranged at the bottom wall of the supporting permanent magnet 32, the supporting permanent magnet 32 is arranged opposite to the annular permanent magnet 31, and the shockproof electromagnet 33 is arranged opposite to the annular permanent magnet 31.

[0034] The side wall of the filter cylinder 1 is provided with a controller 34.

[0035] The controller 34 is electrically connected with the impurity absorption electromagnets 23, the distance measuring sensor 29, the annular permanent magnet 31 and the shockproof electromagnet 33 respectively.

[0036] In specific use, the liquid guide pipe 8 is communicated with the electroplating liquid discharge end, the circulating valve 35 is communicated with the electroplating liquid circulation end, and the partial rotation pipe 12 is communicated with the arc-shaped groove 6; the electroplating liquid to be filtered enters into the inside of the liquid guide cylinder 5 through the liquid guide pipe 8;

[0037] The electroplating liquid to be filtered in the inside of the liquid guide cylinder 5 enters into the inside of the rotation pipe 12 through the arc-shaped groove 6, the rotation pipe 12 delivers the electroplating liquid to be filtered into the inside of the gravity tank 13 adjacent to the gravity tank 13 with the opening upward, the weight of one side of the self-rotation cylinder 10 in the balanced state is increased, the symmetry of both sides of the self-rotation cylinder 10 is destroyed, the self-rotation cylinder 10 is deflected to one side of the gravity tank 13 containing the electroplating liquid, and the gravity tank 13 is deflected following the self-rotation cylinder 10 to pour the electroplating liquid into the inside of the filter cylinder 1;

[0038] When the gravity tank 13 containing the electroplating liquid is deflected into the inside of the filter cylinder 1, the remaining gravity tanks 13 are rotated to the horizontal position with the opening upward, and the self-rotation cylinder 10 rotates to drive the rotation pipe 12 and the arc-shaped groove 6 to be communicated, so that the self-rotation cylinder 10 continuously rotates under the driving of the electroplating liquid;

[0039] When the self-rotating drum 10 rotates, the power end of the generator 16 is rotated, and the electric energy generated by the rotation of the generator 16 is stored in the storage battery 18 under the integration of the rectifier 17. The storage battery 18 supplies power to the impurity absorption electromagnet 23 and the anti-collision electromagnet 33. The controller 34 controls the start of the impurity absorption electromagnet 23 and the anti-collision electromagnet 33. After the impurity absorption electromagnet 23 and the anti-collision electromagnet 33 are powered on, magnetism is generated. The annular permanent magnet 31 is arranged with the same polarity as the supporting permanent magnet 32, and the annular permanent magnet 31 is arranged with the same polarity as the anti-collision electromagnet 33.

[0040] The supporting permanent magnet 32 is fixed at the bottom of the filter drum 1 and supports the annular permanent magnet 31 through repulsion. The annular permanent magnet 31 is supported by the repulsion of the supporting permanent magnet 32, thereby reducing the vertical gravity acting on the filter bag 27, reducing the probability of changes in the pore of the filter bag 27 caused by the falling of the filter bag 27, and ensuring the filtering performance of the filter bag 27.

[0041] The gravity tank 13 pours the electroplating solution on the upper wall of the conical sliding plate 21. The magnetic force generated by the impurity absorption electromagnet 23 adsorbs the metal impurities in the electroplating solution, reduces the number of high-hardness metal particles entering the inside of the filter bag 27 with the electroplating solution, reduces the wear of the filter bag 27, and reduces the probability of damage and perforation of the filter bag 27.

[0042] When the flow and flow rate of the electroplating solution input into the liquid guide cylinder 5 are large, the self-rotating drum 10 rotates at a faster speed, which can make the generator 16 generate more electric energy to supply the impurity absorption electromagnet 23 and the anti-collision electromagnet 33. On the one hand, the impurity absorption electromagnet 23 has sufficient magnetic force to adsorb metal particles in the electroplating solution, thereby reducing the damage of the electroplating solution carrying metal particles to the filter bag 27. On the other hand, the anti-collision electromagnet 33 has sufficient repulsive force to offset the flow impact force caused by the falling of the electroplating solution into the inside of the filter bag 27, thereby reducing the pulling strength of the filter bag 27, preventing the deformation of the pore of the filter bag 27, and ensuring the circulating filtering efficiency of the electroplating solution.

[0043] As the impurities in the filter bag 27 increase, the filter bag 27 presses the supporting spring 24 under the support of the repulsion of the supporting permanent magnet 32. The deformation of the supporting spring 24 drives the conical sliding plate 21 to descend, and the conical sliding plate 21 drives the filter bag 27 to descend. The filter bag 27 drives the anti-collision electromagnet 33 to approach the distance measuring end of the distance measuring sensor 29. The controller 34 controls the start of the distance measuring sensor 29. The distance measuring end of the distance measuring sensor 29 measures the distance between the anti-collision electromagnet 33 through the glass layer 30. When the distance of the filter bag 27 descending reaches the distance specified by the operator, the filter bag 27 is replaced. The above operation can be repeated next time.

[0044] It is to be noted that, in the present text, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0045] The above describes the technical solution and its implementation, which is not limited, and the drawings only show one of the embodiments of the technical solution, and the actual structure is not limited thereto. In general, if a person skilled in the art is inspired, without departing from the purpose of the technical solution, without creative design, similar structure and embodiments of the technical solution can be designed, which should belong to the protection scope of the technical solution.

Claims

1. A circulating filtration device for electroplating solutions in an electroplating process, characterized in that, include: The filter cartridge has an opening at the top and a circulation valve connected to the bottom side wall. A slow-flow liquid supply mechanism, located above the filter cartridge, includes: Liquid guiding assembly: includes a liquid guiding pipe connected to the discharge end of the electroplating solution, a flow slowing frame fixed to the upper wall of the filter cylinder, and a liquid guiding cylinder with symmetrical arc grooves disposed in the flow slowing frame, wherein the liquid guiding pipe and the liquid guiding cylinder are connected. Rotation assembly: includes a rotating cylinder sleeved on the outside of the liquid guide cylinder, a flow divider radially disposed on the side wall of the rotating cylinder, a rotating tube connecting the rotating cylinder and the arc-shaped groove, and a gravity box disposed at the end of the flow divider and having an opening. Energy storage component: includes a motor base located on the side of the filter cartridge near the rotating cylinder, a generator located inside the motor base, and a rectifier and a battery connected in sequence. The power end of the generator passes through the motor base, the filter cartridge and the rotating cylinder and is fixedly connected. A puncture-resistant filtrate mechanism, located inside the filter cartridge, includes: Conical flow assembly: includes a conical slide plate that slides to connect to the inner wall of the filter cartridge, a liquid drop outlet located at the edge of the conical slide plate, a getter magnet located at the bottom wall of the conical slide plate, and a support spring that supports the conical slide plate; Filter assembly: includes a through connecting box fixed to the bottom of the conical slide plate, and a filter bag disposed on the bottom wall of the connecting box; Limiting components include an annular permanent magnet at the bottom of the filter cartridge, a supporting permanent magnet and an anti-impact electromagnet at the bottom wall of the filter bag, and a distance sensor that monitors the position of the filter bag through the glass layer. The controller is electrically connected to the getter electromagnet, the anti-impact electromagnet, and the ranging sensor, respectively. The rotating drum is driven by the electroplating solution to deflect the gravity box to achieve continuous rotation and generate electricity. The battery supplies power to the getter electromagnet and the anti-impact electromagnet. The annular permanent magnet and the supporting permanent magnet and the anti-impact electromagnet, which are of the same pole, generate a repulsive force to support the filter bag.

2. The apparatus according to claim 1, characterized in that: In the rotating assembly, the deflection of the gravity box is achieved by injecting electroplating solution to disrupt the symmetry of the rotating cylinder, and the rotating cylinder maintains continuous rotation through the periodic connection between the rotating tube and the arc-shaped groove when rotating.

3. The apparatus according to claim 1, characterized in that: In the conical flow assembly, the getter electromagnet is located on the bottom wall of the conical slide plate directly opposite the liquid drop area, and is used to adsorb metal particles in the electroplating solution to reduce impact wear on the filter bag.

4. The apparatus according to claim 1, characterized in that: In the limiting component, the repulsive force between the supporting permanent magnet and the annular permanent magnet counteracts the vertical downward pull of impurities in the filter bag, and the anti-impact electromagnet enhances the repulsive force after being energized to buffer the impact of the electroplating solution flow.

5. The apparatus according to claim 1, characterized in that: The ranging sensor monitors the position of the anti-shock electromagnet through the glass layer. When the filter bag moves down a distance exceeding the threshold, the controller triggers a replacement signal.

6. The apparatus according to claim 1, characterized in that: The power output of the generator increases with the increase of the electroplating solution flow rate, and simultaneously enhances the adsorption force of the getter electromagnet and the repulsion strength of the anti-impact electromagnet.

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