Back stabbing imaging device for EMMIObrich defect positioning

Abstract

The invention relates to the technical field of back pricking imaging devices, and particularly discloses a back pricking imaging device for EMMIAmp; the Obrich defect positioning and back pricking imaging device comprises a bottom plate, and a sliding table is arranged on the bottom plate; the displacement mechanism is used for controlling movement in the X-axis direction, the Y-axis direction and the Z-axis direction; a monobarrel lens and an imaging device; the fixing mechanism is arranged at the upper end of the straight tube microscope mechanism and comprises a fixing frame and a rotary fixing assembly, the rotary fixing assembly is connected with the fixing frame and comprises a rotary panel, a driven gear, an adjusting knob and a driving gear, the adjusting knob is connected with the driving gear, the rotary panel is connected with the driven gear, and the driven gear is connected with the driving gear. The driving gear is meshed with the driven gear, and when the adjusting knob rotates, the rotating panel rotates in the fixing frame. The defects that in the prior art, a back pricking imaging device is insufficient in imaging stability and is difficult to carry out omnibearing imaging on a tested piece are overcome.

Description

Technical Field

[0001] The present invention relates to the field of back-piercing imaging devices, and in particular to a back-piercing imaging device for EMMI & Obrich defect localization. The main application scenario is "the back-piercing imaging function of thermal & InGaAs EMMI, Obrich & TIVA defect localization equipment in the field of chip failure analysis (EFA)". Background Art

[0002] In chip manufacturing, production, and packaging, internal defects in devices or chips (such as cracks, pores, and inclusions) directly impact product reliability and safety. Therefore, defect detection and location technology has always been a core component of quality control and failure analysis.

[0003] In existing technology, back-piercing imaging devices typically use optical microscopy to scan the back of the device under test, such as using a stereo microscope or metallographic microscope. However, due to the insufficient magnification of stereo microscopes and the large space required for metallographic microscopes, they are not suitable for defect localization equipment. Therefore, it is difficult to stably image and penetrate the device under test, and the imaging effect is poor. Furthermore, existing technology lacks accurate imaging and positioning of the device under test, which prevents comprehensive defect localization inspection of the device under test. Summary of the Invention

[0004] (1) Technical issues to be resolved The problem to be solved by the present invention is to provide a back-piercing imaging device for EMMI&Obrich defect positioning, so as to overcome factors such as insufficient imaging stability of the back-piercing imaging device in the prior art and the difficulty in performing all-round imaging of the test piece with the positioning needle, thereby making it impossible to better perform all-round defect positioning inspection on the test device.

[0005] (2) Technical solution In order to solve the above technical problems, the first aspect of the present invention provides a back-piercing imaging device for EMMI & Obrich defect positioning, comprising: A bottom plate, wherein a sliding platform is provided on the bottom plate; A displacement mechanism, the displacement mechanism comprising a first panel, a second panel, a third panel, and a fourth panel, the lower end of the first panel being connected to the slide table, the upper end of the first panel being provided with an X-axis rotating rod, the X-axis rotating rod being provided with a thread, the lower end of the second panel being hinged to the thread of the X-axis rotating rod, the upper end of the first panel being provided with a Y-axis rotating rod, the Y-axis rotating rod being hinged to the lower end of the third panel, the fourth panel being connected to the third panel, the fourth panel being provided with a Z-axis rotating rod, the Z-axis rotating rod being hinged to a fixed block; A straight microscope mechanism, the straight microscope mechanism is connected to the fixed block, and the straight microscope mechanism includes a monocular lens and an imaging device; A fixing mechanism is arranged at the upper end of the straight microscope mechanism, and the fixing mechanism includes a fixing frame and a rotating fixing component, the rotating fixing component is connected to the fixing frame, and the rotating fixing component includes a rotating panel, a passive gear, an adjusting knob and a driving gear, the adjusting knob is connected to the driving gear, the rotating panel is connected to the passive gear, the driving gear is meshed with the passive gear, and when the adjusting knob rotates, the rotating panel rotates in the fixing frame.

[0006] As described above, in the back-piercing imaging device for defect positioning, optionally, the middle end of the rotating panel has a glass plate and a pressure plate, and there are two pressure plates, which are used to clamp and fix the glass plate, and the test piece is clamped at the lower end of the glass plate.

[0007] As described above, in the back-piercing imaging device for defect positioning, optionally, a scale block is connected to the outer side of the rotating panel, and the rotation angle is displayed on the scale block.

[0008] As described above, in the back-piercing imaging device for defect location, optionally, the fixing mechanism is connected to a first adjusting mechanism, and the first adjusting mechanism is used to adjust the X, Y, and Z degrees of freedom of the fixing mechanism.

[0009] As described above, the back-piercing imaging device for defect positioning may optionally be provided with a back-piercing mechanism at the lower end of the fixing mechanism, the back-piercing mechanism including the displacement mechanism and the piercing needle, the displacement mechanism being connected to the piercing needle, and the displacement mechanism controlling the piercing needle to process the back of the specimen.

[0010] As described above, in the back-piercing imaging device for defect positioning, optionally, there are two second adjustment mechanisms, and the two second adjustment mechanisms are respectively connected to the X-axis and Y-axis directions of the sliding table.

[0011] As the defect positioning back-piercing imaging device described above, optionally, the second adjustment mechanism includes a first adjustment block, a limit block and a rotation adjustment rod, the first adjustment block and the limit block are both connected to the sliding table, the rotation adjustment rod is inserted into the first adjustment block, and the rotation adjustment rod is connected to the sliding table, and when the rotation adjustment rod rotates, the sliding table slides in the corresponding direction.

[0012] As described above, in the back-piercing imaging device for defect positioning, optionally, the base plate is fixed to the outside world by bolts.

[0013] As for the aforementioned back-stitched imaging device for defect positioning, optionally, the imaging device is connected to an external display panel.

[0014] (3) Beneficial effects The present invention provides a back-piercing imaging device for EMMI & Obrich defect positioning, which has the following beneficial effects: The present invention drives the sliding stage through the second adjustment mechanism to perform coarse displacement adjustment on the straight-tube microscope mechanism; the degrees of freedom of the X-axis, Y-axis and Z-axis of the straight-tube microscope mechanism are adjusted by the X-axis rotating rod, Y-axis rotating rod and Z-axis rotating rod provided in the displacement mechanism. The adjustment method can be screw adjustment, and in this way the straight-tube microscope mechanism can be positioned quickly and accurately.

[0015] The present invention utilizes a glass plate in the fixing mechanism in conjunction with a pressure plate to stably clamp the specimen. The glass plate facilitates observation of the specimen's upper end, while the straight-tube microscope mechanism images the specimen's lower end. Furthermore, an adjustment knob in the fixing mechanism precisely controls the specimen's rotation angle, while the first adjustment mechanism adjusts the specimen's X, Y, and Z degrees of freedom. This design allows for precise, all-around movement of the specimen, ensuring optimal observation and enhancing the user experience and overall effectiveness. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0017] Figure 1 A stereoscopic diagram of a back-piercing imaging device for EMMI&Obrich defect positioning according to the present invention; Figure 2 A partial schematic diagram of a fixing mechanism and a back-binding mechanism for an EMMI & Obrich defect positioning back-binding imaging device according to the present invention; Figure 3 A partial schematic diagram of a fixing mechanism for an EMMI & Obrich defect positioning back-binding imaging device and a back-binding mechanism from another perspective of the present invention; Figure 4 A three-dimensional diagram of a displacement mechanism for an EMMI & Obrich defect positioning back-piercing imaging device according to the present invention; Figure 5 for Figure 4 A partial schematic diagram of the middle part; Figure 6 This is a cross-sectional view of a displacement mechanism for an EMMI & Obrich defect positioning back-piercing imaging device according to the present invention.

[0018] The names of the components corresponding to the various figure marks in the figure are: 1. Base plate; 11. Sliding table; 2. Displacement mechanism; 21. First panel; 22. Second panel; 23. Third panel; 24. Fourth panel; 25. X-axis rotating rod; 26. Y-axis rotating rod; 27. Z-axis rotating rod; 28. Fixed block; 3. Straight microscope mechanism; 31. Monocular; 32. Imaging device; 4. Fixing mechanism; 41. Fixing frame; 42. Rotating fixing assembly; 43. Rotating panel; 44. Passive gear; 45. Adjusting knob; 46. Driving gear; 47. Glass plate; 48. Pressing plate; 49. Scale block; 5. First adjusting mechanism; 6. Back-piercing mechanism; 61. Piercing needle; 7. Second adjusting mechanism; 71. First adjusting block; 72. Limiting block; 73. Rotating adjusting rod. DETAILED DESCRIPTION

[0019] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the features in the following embodiments and embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of this application.

[0021] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0022] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0023] Additionally, in the following description, specific details are provided to provide a thorough understanding of the examples, however, one skilled in the art will appreciate that the examples can be practiced without these specific details.

[0024] The following describes the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0025] See Figures 1 to 6 The present invention provides an EMMI & Obrich defect location and back-piercing imaging device 32, characterized by comprising: a base plate 1, a displacement mechanism 2, a cylindrical microscope mechanism 3, and a fixing mechanism 4. The base plate 1 is connected to the displacement mechanism 2, which is in turn connected to the cylindrical microscope mechanism 3. The fixing mechanism 4 is used to secure a test object, which may be, but is not limited to, a chip. The displacement mechanism 2 controls the adjustment of the cylindrical microscope mechanism 3 to better observe the test object.

[0026] exist Figures 1 to 6 In an optional embodiment, a slide stage 11 is provided on the base plate 1. A displacement mechanism 2 is mounted on the slide stage 11, and the displacement mechanism 2 is connected to the optical microscope mechanism 3. The slide stage 11 can significantly displace the optical microscope mechanism 3, thereby adjusting the optical microscope mechanism 3 in terms of the X-axis and Y-axis degrees of freedom.

[0027] Furthermore, there are two second adjustment mechanisms 7 , and the two second adjustment mechanisms 7 are respectively connected to the X-axis and Y-axis directions of the sliding stage 11 .

[0028] Specifically, the second adjustment mechanism 7 includes a first adjustment block 71, a limit block 72 and a rotation adjustment rod 73. The first adjustment block 71 and the limit block 72 are both connected to the sliding table 11. The rotation adjustment rod 73 is inserted into the first adjustment block 71. The rotation adjustment rod 73 is connected to the sliding table 11. When the rotation adjustment rod 73 rotates, the sliding table 11 slides in the corresponding direction.

[0029] As can be seen from the above, the two second adjustment mechanisms 7 control the adjustment of the straight microscope mechanism 3 on the X-axis and Y-axis degrees of freedom, and this adjustment is a large-scale adjustment.

[0030] exist Figures 1 to 6In an optional embodiment, the displacement mechanism 2 includes a first panel 21, a second panel 22, a third panel 23 and a fourth panel 24. The lower end of the first panel 21 is connected to the sliding table 11, and the upper end of the first panel 21 is provided with an X-axis rotating rod 25, and the X-axis rotating rod 25 is provided with a thread. The lower end of the second panel 22 is hinged to the thread of the X-axis rotating rod 25, and the upper end of the first panel 21 is provided with a Y-axis rotating rod 26, and the Y-axis rotating rod 26 is hinged to the lower end of the third panel 23. The fourth panel 24 is connected to the third panel 23, and a Z-axis rotating rod 27 is provided in the fourth panel 24, and the Z-axis rotating rod 27 is hinged to the fixed block 28.

[0031] Therefore, it can be seen that experimenters in this field can move the displacement mechanism 2 in the X-axis degree of freedom, the Y-axis degree of freedom and the Z-axis degree of freedom respectively by rotating the X-axis rotating rod 25, the Y-axis rotating rod 26 and the Z-axis rotating rod 27.

[0032] Specifically, by rotating the X-axis rotating rod 25, the lower end of the second panel 22 can be ensured to be displaced under the drive of the thread, by rotating the Y-axis rotating rod 26, the lower end of the third panel 23 can be ensured to be displaced under the drive of the thread, and by rotating the Z-axis rotating rod 27, the fourth panel 24 can be ensured to be displaced under the drive of the thread.

[0033] Furthermore, the base plate 1 is fixed to the outside world by bolts. In an optional embodiment of the present invention, the straight microscope mechanism 3 can be fixed to any position by bolts, thereby facilitating disassembly and assembly while facilitating observation of the straight microscope mechanism 3.

[0034] exist Figures 1 to 6 In an optional embodiment, the fixing mechanism 4 is arranged at the upper end of the straight microscope mechanism 3, and the fixing mechanism 4 includes a fixing frame 41 and a rotating fixing component 42, the rotating fixing component 42 is connected to the fixing frame 41, and the rotating fixing component 42 includes a rotating panel 43, a passive gear 44, an adjusting knob 45 and a driving gear 46, the adjusting knob 45 is connected to the driving gear 46, the rotating panel 43 is connected to the passive gear 44, and the driving gear 46 is engaged with the passive gear 44. When the adjusting knob 45 rotates, the rotating panel 43 rotates in the fixing frame 41.

[0035] Furthermore, a glass plate 47 and a pressure plate 48 are provided at the middle end of the rotating panel 43 . There are two pressure plates 48 . The pressure plates 48 are used to clamp and fix the glass plate 47 , and the test piece is clamped at the lower end of the glass plate 47 .

[0036] Furthermore, a scale block 49 is connected to the outer side of the rotating panel 43 , and the scale block 49 displays the rotation angle.

[0037] Furthermore, the fixing mechanism 4 is connected to a first adjusting mechanism 5 , and the first adjusting mechanism 5 is used to adjust the X, Y, and Z degrees of freedom of the fixing mechanism 4 .

[0038] Therefore, it can be seen that when the test piece is pressed under the glass plate 47, the pressure plate 48 provides support for stable fixation, and the adjustment knob 45 can adjust the rotation angle of the test piece 360 ​​degrees. When the test piece needs to be rotated to a fixed angle, the required position can be adjusted by rotating the adjustment knob 45.

[0039] At the same time, the first adjustment mechanism 5 can adjust the directions of the three degrees of freedom of the test piece. In summary, this design can achieve the test piece can be moved arbitrarily in three degrees of freedom, to complete the precise alignment of the test piece.

[0040] exist Figures 1 to 6 In an optional embodiment, the straight-tube microscope mechanism 3 is connected to the fixed block 28 , and the straight-tube microscope mechanism 3 includes a monocular 31 and an imaging device 32 .

[0041] Furthermore, the monocular lens 31 can observe the back of the test piece, and the image after observation can be received at the molding device.

[0042] At the same time, the imaging device 32 is connected to an external display panel, which can display the image.

[0043] exist Figures 1 to 6 In an optional embodiment, a back-puncturing mechanism 6 is provided at the lower end of the fixing mechanism 4. The back-puncturing mechanism 6 includes a displacement mechanism 2 and a puncture needle 61. The displacement mechanism 2 is connected to the puncture needle 61. The displacement mechanism 2 controls the puncture needle 61 to process the back of the specimen.

[0044] The same or similar parts between the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments.

[0045] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A back-piercing imaging device for EMMI & Obrich defect positioning, characterized in that: include: A bottom plate (1), wherein a sliding platform (11) is provided on the bottom plate (1); A displacement mechanism (2), wherein the displacement mechanism (2) comprises a first panel (21), a second panel (22), a third panel (23) and a fourth panel (24), wherein the lower end of the first panel (21) is connected to the sliding platform (11), the upper end of the first panel (21) is provided with an X-axis rotating rod (25), the X-axis rotating rod (25) is provided with a thread, the lower end of the second panel (22) is hinged to the thread of the X-axis rotating rod (25), the upper end of the first panel (21) is provided with a Y-axis rotating rod (26), the Y-axis rotating rod (26) is hinged to the lower end of the third panel (23), the fourth panel (24) is connected to the third panel (23), the fourth panel (24) is provided with a Z-axis rotating rod (27), and the Z-axis rotating rod (27) is hinged to the fixed block (28); A straight-tube microscope mechanism (3), the straight-tube microscope mechanism (3) being connected to the fixed block (28), the straight-tube microscope mechanism (3) comprising a monocular (31) and an imaging device (32); A fixing mechanism (4), wherein the fixing mechanism (4) is arranged at the upper end of the straight microscope mechanism (3), the fixing mechanism (4) comprises a fixing frame (41) and a rotating fixing assembly (42), the rotating fixing assembly (42) is connected to the fixing frame (41), the rotating fixing assembly (42) comprises a rotating panel (43), a passive gear (44), an adjusting knob (45) and a driving gear (46), the adjusting knob (45) is connected to the driving gear (46), the rotating panel (43) is connected to the passive gear (44), the driving gear (46) is meshed with the passive gear (44), and when the adjusting knob (45) rotates, the rotating panel (43) rotates in the fixing frame (41).

2. The back-strap imaging device for defect location according to claim 1, characterized in that: The middle end of the rotating panel (43) is provided with a glass plate (47) and a pressure plate (48), and the pressure plates (48) are two. The pressure plates (48) are used to clamp and fix the glass plate (47), and the test piece is clamped at the lower end of the glass plate (47).

3. The back-piercing imaging device for defect location according to claim 1, characterized in that: The outer side of the rotating panel (43) is connected to a scale block (49), and the scale block (49) displays the rotation angle.

4. The back-stitch imaging device for defect location according to claim 1, characterized in that: The fixing mechanism (4) is connected to a first adjusting mechanism (5), and the first adjusting mechanism (5) is used to adjust the X, Y, and Z degrees of freedom of the fixing mechanism (4).

5. The back-piercing imaging device for defect location according to claim 1, characterized in that: A back-puncturing mechanism (6) is provided at the lower end of the fixing mechanism (4). The back-puncturing mechanism (6) comprises the displacement mechanism (2) and a puncture needle (61). The displacement mechanism (2) is connected to the puncture needle (61). The displacement mechanism (2) controls the puncture needle (61) to process the back of the specimen.

6. The back-strap imaging device for defect location according to claim 1, characterized in that: There are two second adjustment mechanisms (7), and the two second adjustment mechanisms (7) are respectively connected to the X-axis and Y-axis directions of the sliding platform (11).

7. The back-strap imaging device for defect location according to claim 6, characterized in that: The second adjustment mechanism (7) includes a first adjustment block (71), a limit block (72) and a rotation adjustment rod (73); the first adjustment block (71) and the limit block (72) are both connected to the sliding platform (11); the rotation adjustment rod (73) is inserted into the first adjustment block (71); the rotation adjustment rod (73) is connected to the sliding platform (11); when the rotation adjustment rod (73) rotates, the sliding platform (11) slides in a corresponding direction.

8. The back-strap imaging device for defect location according to claim 1, characterized in that: The base plate (1) is fixed to the outside world by bolts.

9. The back-strap imaging device for defect location according to claim 1, characterized in that: The imaging device (32) is connected to an external display panel.

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