A clean cable with bending resistance for a semiconductor device air floating motion platform

Abstract

The application discloses a kind of clean cable of semiconductor equipment air floatation movement platform with bending resistance, belong to cable technical field, including cable body and be used for the installation base of cable body limit, cable body includes combination conductor, combination conductor both ends are connected with terminal, terminal is connected with installation base by fixing part, terminal end is provided with installation wind cover, and force arm traction piece is provided on terminal for reducing the pressure of combination conductor.The application is provided with air passage in the cable, and the opening and closing air hole is provided with dynamic adjustment in the air passage, and the upward buoyancy is generated when releasing trace gas in linear motion, the normal pressure of motion platform is effectively reduced by cable dead weight, the friction and abrasion when cable movement are reduced, the opening and closing air hole is automatically opened when cable bending is stretched, the air impact baffle generates counterthrust, and dynamic support is provided for the cable of bending place, the influence of partial gravity is offset, and the interference of air floatation movement platform is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of cable, in particular to a bending-resistant clean cable for a semiconductor equipment air floating motion platform. BACKGROUND

[0002] The "semiconductor equipment air floating motion platform" is one of the indispensable core subsystems in modern high-end semiconductor manufacturing equipment (especially photolithography machines and precision detection equipment), which is used for realizing super-high precision, super-smooth and frictionless motion control and is the cornerstone for pursuing nanometer-level precision and ultra-high yield in semiconductor manufacturing processes.

[0003] During the motion of the semiconductor equipment air floating motion platform, nanometer-level precision, frictionless and super-smooth motion need to be realized, and the additional physical connections (wires, signal lines, air pipes, etc.) will interfere with the motion precision. Although the physically pulled wires can move with the air floating motion platform, they will introduce disturbance forces / torques and increase inertia during the motion. The self-weight of the traditional drag chain cable method will seriously interfere with the motion precision, and when directly connected through a cable, the motion wear and tear and frequent bending of the cable will test the cable itself. Furthermore, the uncertainty of the motion of the cable will interfere with the motion precision of the air floating platform. Based on this, the present application proposes a bending-resistant clean cable for a semiconductor equipment air floating motion platform. SUMMARY

[0004] The purpose of the present application is to solve the problem that the self-weight of the traditional drag chain cable method will seriously interfere with the motion precision, and when directly connected through a cable, the motion wear and tear and frequent bending of the cable will test the cable itself in the prior art. Therefore, a bending-resistant clean cable for a semiconductor equipment air floating motion platform is proposed.

[0005] In order to achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0006] A bending-resistant clean cable for a semiconductor equipment air floating motion platform, comprising a cable body and a mounting base for limiting the cable body, the cable body comprising a combined conductor, both ends of the combined conductor being connected with a terminal, the terminal at the lower side being connected with the mounting base through a fixing member, the terminal at the lower side being provided with a mounting air cap at the end, and the terminal at the upper side being provided with a force arm traction member for reducing the pressure of the combined conductor.

[0007] The combined conductor is composed of a fiber flexible protective layer and wires uniformly distributed in the fiber flexible protective layer, and a filling layer is arranged between the fiber flexible protective layer and the wires.

[0008] The guide wire comprises superfine twisted wires at the center of the shaft and an outermost metal fiber woven shielding layer, and a composite silicone rubber layer is arranged between the metal fiber woven shielding layer and the superfine twisted wires.

[0009] As a preferred solution, air passage openings are arranged in the fiber flexible protective layer and spaced from the filling layer, and the air passage openings isolate the plurality of combined conductors to avoid mutual interference.

[0010] As a preferred solution, a plurality of opening and closing air holes are arranged at the bottom of the air passage opening, the air passage opening is connected with a mounting air cap through a through hole penetrating the terminal, and an air pipe joint is arranged on one side of the mounting air cap.

[0011] As a preferred solution, the force arm traction member comprises a surface layer rail arranged on the outer surface of the fiber flexible protective layer, an oblique force receiving member is connected to the side wall of the terminal above, the oblique force receiving member is connected with a sliding ball through a traction strip, and the sliding ball slides in the surface layer rail.

[0012] As a preferred solution, the filling material of the filling layer is hollow glass beads, and the fiber flexible protective layer and the metal fiber woven shielding layer are used for wrapping the hollow glass beads.

[0013] As a preferred solution, the fiber flexible protective layer is arranged in a flat wing shape on both sides, and a wind blocking strip-shaped plate is arranged on the upper surface of the mounting base.

[0014] As a preferred solution, the terminal below is connected with an external guide wire, and the terminal above is connected with an air floating motion platform.

[0015] Compared with the prior art, the beneficial effects of the present application are:

[0016] 1. According to the present application, the air passage openings are arranged in the cable, and the opening and closing air holes in the air passage openings are dynamically adjusted, so that a small amount of gas is released to generate upward buoyancy during linear motion, the positive pressure of the cable weight on the motion platform is effectively reduced, the friction and wear of the cable during motion are reduced, the opening and closing air holes are automatically opened when the cable is bent, the gas flow rate is increased, the internal guide wire is strongly cooled, the air discharged from the cable impacts the wind blocking plate to generate a counter thrust, the cable at the bending position is dynamically supported, part of the gravity is offset, and the interference on the air floating motion platform is reduced.

[0017] 2. According to the present application, the filling layer is made of hollow glass beads, the density is extremely low, the weight of the cable is significantly reduced, the internal microbeads have extremely small movement resistance when the cable is bent, the restoring force generated when the cable is bent and deformed is greatly reduced, and the combined conductor structure, the hollow glass bead filling layer and the composite silicone rubber insulation layer jointly act to give the cable excellent flexibility and bending fatigue resistance.

[0018] 3、The present application sets a force arm traction between the cable and the connecting terminal, and the weight of the bending point is transmitted to the stress point near the platform through the traction stay, which significantly shortens the force arm, reduces the torque interference of the bending cable weight on the connecting terminal, stabilizes the cable weight change range in the movement process, and significantly reduces the disturbance force of the cable weight change on the air floating movement platform. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 A combined state structure schematic diagram of the clean bending-resistant cable for the semiconductor equipment air floating movement platform is provided for the present application.

[0020] Figure 2 A three-dimensional structure schematic diagram of the clean bending-resistant cable for the semiconductor equipment air floating movement platform is provided for the present application.

[0021] Figure 3 A structure schematic diagram of the combined conductor in the clean bending-resistant cable for the semiconductor equipment air floating movement platform is provided for the present application.

[0022] Figure 4 A structure schematic diagram of the combined conductor in the clean bending-resistant cable for the semiconductor equipment air floating movement platform is provided for the present application. Figure 3 An enlarged structure schematic diagram of A in the present application.

[0023] Figure 5 A linear state structure schematic diagram of the combined conductor in the clean bending-resistant cable for the semiconductor equipment air floating movement platform is provided for the present application.

[0024] Figure 6 A principle framework diagram of the clean bending-resistant cable for the semiconductor equipment air floating movement platform is provided for the present application.

[0025] In the figure: 1, mounting base; 2, connecting terminal; 3, fixing piece; 4, mounting air cover; 5, fiber flexible protective layer; 6, wire; 601, ultrafine stranded wire; 602, metal fiber woven shielding layer; 603, composite silicone rubber layer; 7, filling layer; 8, air passage; 9, opening and closing air hole; 10, air pipe joint; 11, surface layer rail; 12, oblique stress piece; 13, traction stay; 14, sliding ball; 15, wind barrier strip-shaped plate. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0027] In the description of the present application, it should be noted that unless otherwise expressly specified and limited, the terms "mounting", "provided with", "sleeved / connected", "connected" and the like should be understood broadly, for example, "connected" can be fixedly connected, or detachably connected, or integrally connected; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0028] Embodiment, refer to Figures 1 to 6 A kind of semiconductor equipment air floating movement platform is used to bend clean cable, a kind of semiconductor equipment air floating movement platform is used to bend clean cable, including cable body and the installation base 1 for limiting cable body, cable body includes combination conductor, both ends of combination conductor are connected with terminal 2, further, the terminal 2 below is connected with external lead 6, the terminal 2 above is connected with air floating movement platform, the terminal 2 at the both ends of combination conductor is in fixed state respectively, and when following air floating movement platform moves, its following movement and deformation structure is combination conductor.

[0029] Wherein, the terminal 2 below is connected with installation base 1 by fixing piece 3, fixing piece 3 is detachably fixed on installation base 1 by screw, and the terminal 2 below is provided with installation air cap 4 at end portion;

[0030] Further, air duct opening 8 is arranged in fiber flexible protective layer 5 and is spaced apart from filling layer 7, air duct opening 8 isolates multiple combination conductors to avoid mutual interference, thereby avoiding electromagnetic interference between combination conductors.

[0031] Multiple open-close air holes 9 are formed in the bottom of air duct opening 8, air duct opening 8 is connected with installation air cap 4 through the through hole penetrating the terminal 2, and air pipe joint 10 is arranged on one side of installation air cap 4, high-pressure air pipe is connected with air pipe joint 10 through external connection, so as to realize the delivery of pressure gas into air duct opening 8.

[0032] The further advantage of the above is that at the linear portion of fiber flexible protective layer 5, open-close air hole 9 formed in air duct opening 8 is in a closed state, at this time, the gap of open-close air hole 9 has a small amount of pressure gas discharged, and the generated buoyancy downward can reduce the positive pressure of fiber flexible protective layer 5, thereby reducing the friction of fiber flexible protective layer 5, and reducing the wear of fiber flexible protective layer 5 during movement, and in the process of reducing the pressure of fiber flexible protective layer 5, the pressure of the bending portion on the air floating movement platform is also reduced, so as to reduce the influence on the movement precision of the air floating movement platform.

[0033] Furthermore, at the bending position of the fiber flexible protection layer 5, due to the bending deformation of the material, the fiber flexible protection layer 5 on the side where the opening and closing air hole 9 is arranged is in a tensile state, so that the opening and closing air hole 9 is in an open state, at this time, the opening and closing air hole 9 can increase the airflow velocity in the air passage 8, improve the heat dissipation effect on the internal conductor 6, and the gas discharged by the opening and closing air hole 9 acts on the wind-blocking strip-shaped plate 15, and the gas reaction force generated can realize effective support for the bending position of the combined conductor.

[0034] Notably, the fiber flexible protection layer 5 is provided in a flat wave shape, and the position for arranging and installing the combined conductor is at the wider part of the fiber flexible protection layer 5, and the air passage 8 is at the narrower part.

[0035] Further, the fiber flexible protection layer 5 is provided in a flat wing shape on both sides, and the upper surface of the installation base 1 is provided with a wind-blocking strip-shaped plate 15, wherein the flat wing-shaped wings on both sides of the fiber flexible protection layer 5 can be attached to the wind-blocking strip-shaped plate 15 when straight, thereby realizing coverage of the airflow channels on both sides to improve the lift of the airflow gas and ensure that the gas lift can reduce the pressure of the fiber flexible protection layer 5. The flat wave structure of the combined conductor optimizes the conductor and airway layout, and the wings on both sides are attached to the wind-blocking strip-shaped plate 15 when moving straight, thereby improving the utilization efficiency of the gas and enhancing the stability of the lift.

[0036] The combined conductor is composed of the fiber flexible protection layer 5 and the conductors 6 uniformly distributed in the fiber flexible protection layer 5, and the fiber flexible protection layer 5 and the conductors 6 are provided with a filling layer 7 therebetween;

[0037] Further, the filling material of the filling layer 7 is hollow glass beads, and the fiber flexible protection layer 5 and the metal fiber woven shielding layer 602 are used to wrap the hollow glass beads, wherein the fiber flexible protection layer 5 is a superfine high molecular fiber grid material, the filling layer 7 uses hollow glass beads, the density of the hollow glass beads is 0.12-0.6 g / cm³, has strong compression resistance, and when bending, the hollow glass beads move relative to each other to realize bending, so that the recovery resistance generated is very small, and the bending resistance is also very small, thereby reducing the disturbance force on the air floating motion platform.

[0038] The conductor 6 includes a superfine twisted wire 601 at the center and a metal fiber woven shielding layer 602 at the outermost side, and the metal fiber woven shielding layer 602 and the superfine twisted wire 601 are provided with a composite silicone rubber layer 603 therebetween;

[0039] The metal fiber woven shielding layer 602 is made of metal and fiber material, which can realize electromagnetic shielding of the conductor 6, avoid mutual signal interference, and isolate the conductors by the airway 8. In combination with the metal fiber woven shielding layer 602, physical isolation and electromagnetic shielding are formed to effectively inhibit electromagnetic interference (EMI) between the conductors 6.

[0040] The composite silicone rubber layer 603 is a modified ultra-low volatile high-purity fumed silica filled solid silicone rubber, which has excellent resilience and can ensure close fit with the internal ultrafine twisted wire 601 to ensure insulation effect.

[0041] The upper wiring terminal 2 is provided with a force arm traction member for reducing the combined conductor pressure. The force arm traction member includes a surface track 11 arranged on the outer surface of the fiber flexible protective layer 5. The upper wiring terminal 2 is connected with an inclined stress member 12 on the side wall. The inclined stress member 12 is connected with a sliding ball 14 through a traction strip 13. The sliding ball 14 slides in the surface track 11 and has a certain friction force therebetween, which can meet the effect of applying traction force to the combined conductor at any position. When the combined conductor is deformed, the force caused by bending is inclined, and the force caused by movement is horizontal. Therefore, the friction pressure is different when the position is changed and the traction force is generated.

[0042] The air floating movement platform can cause the upper wiring terminal 2 to move with it during movement, which changes the bending position at any time. The arrangement of the force arm traction member can transfer the weight of the bending position to the inclined stress member 12 through the traction strip 13, thereby shortening the force arm of the weight action point, significantly reducing the weight of the combined conductor in bending acting on the upper wiring terminal 2 (air floating movement platform), thereby reducing the change range of the cable weight during movement, significantly reducing the disturbance force on the air floating movement platform, providing reliable connection guarantee for the nanometer-level precision movement control of semiconductor equipment (especially photolithography machines and precision detection equipment), and reducing the error and interference introduced by the connection cable. It is the key cornerstone to support the pursuit of nanometer-level precision and ultra-high yield in semiconductor manufacturing.

[0043] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can make equivalent replacement or change according to the technical solution and inventive concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A clean cable with bending resistance for a semiconductor equipment air floating motion platform, comprising a cable body and a mounting base (1) for limiting the cable body, characterized in that, The cable body comprises a combined conductor, both ends of which are connected with wiring terminals (2), the lower wiring terminal (2) is connected with the mounting base (1) through a fixing part (3), the end of the lower wiring terminal (2) is provided with a mounting air cover (4), and the upper wiring terminal (2) is provided with a force arm traction part for reducing the pressure of the combined conductor; The combined conductor is composed of a fiber flexible protective layer (5) and wires (6) uniformly distributed in the fiber flexible protective layer (5), and a filling layer (7) is arranged between the fiber flexible protective layer (5) and the wires (6); The wires (6) comprise superfine twisted wires (601) at the center and metal fiber woven shielding layers (602) at the outermost sides, and a composite silicone rubber layer (603) is arranged between the metal fiber woven shielding layers (602) and the superfine twisted wires (601); Air passage openings (8) are arranged in the fiber flexible protective layer (5) and are spaced from the filling layer (7), the air passage openings (8) isolate the plurality of combined conductors to avoid mutual interference; A plurality of open and close air holes (9) are arranged at the bottom of the air passage opening (8), the air passage opening (8) is connected with the mounting air cover (4) through a through hole penetrating the wiring terminal (2), and an air pipe joint (10) is arranged on one side of the mounting air cover (4); Both sides of the fiber flexible protective layer (5) are provided with flat wings, and the upper surface of the mounting base (1) is provided with a wind-blocking strip-shaped plate (15).

2. The clean cable with bending resistance for a semiconductor equipment air floating motion platform according to claim 1, characterized in that, The force arm traction part comprises a surface track (11) arranged on the outer surface of the fiber flexible protective layer (5), the side wall of the upper wiring terminal (2) is connected with an inclined stress part (12), the inclined stress part (12) is connected with a sliding ball (14) through a traction pull strip (13), and the sliding ball (14) slides in the surface track (11).

3. The clean cable with bending resistance for a semiconductor equipment air floating motion platform according to claim 1, characterized in that, The filling material of the filling layer (7) is hollow glass beads, and the fiber flexible protective layer (5) and the metal fiber woven shielding layer (602) are used for wrapping the hollow glass beads.

4. The clean cable with bending resistance for a semiconductor equipment air floating motion platform according to claim 1, characterized in that, The lower wiring terminal (2) is connected with the external wire (6), and the upper wiring terminal (2) is connected with an air floating motion platform.

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