Raw material monitoring and supplementing method and vapor phase epitaxy device

Abstract

The invention belongs to the technical field of vapor phase epitaxy, and relates to a raw material monitoring and supplementing method and a vapor phase epitaxy device. The raw material monitoring and supplementing method is applied to a control device in the vapor phase epitaxy device, the vapor phase epitaxy device further comprises a growth device and a monitoring device coupled with the control device, the growth device comprises a reaction chamber and a supplementing chamber, the monitoring device is arranged in the reaction chamber, and a supplementing boat and a raw material adding device are arranged in the supplementing chamber. The method comprises the following steps: acquiring raw material condition information of a raw material boat monitored by a monitoring device; processing the raw material condition information to obtain liquid level variation or weight variation of the raw materials; and when the liquid level reduction amount is larger than a first preset value or the weight reduction amount is larger than a second preset value, an adding instruction is sent to the raw material adding device, so that the raw material adding device supplements the raw materials in the supplementing boat to the raw material boat. The scheme solves the problem that the growth rate and the growth concentration are influenced by raw material fluctuation, can improve the product quality, and can be used for growing gallium nitride.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vapor phase epitaxy, in particular to a raw material monitoring and supplementing method and a vapor phase epitaxy device. BACKGROUND

[0002] The core reaction of preparing gallium nitride (GaN) by hydride vapor phase epitaxy (HVPE) method includes: metal gallium (Ga) reacts with hydrogen chloride (HCl) to generate gallium chloride (GaCl) and hydrogen (H2), and GaCl reacts with ammonia (NH3) to generate GaN. In this process, the dynamic change of the liquid level of the metal gallium in the raw material boat will cause the shrinkage of the liquid level and the corner effect, so that the liquid level forms discontinuous small area regions, thereby reducing the contact area of the metal gallium and the hydrogen chloride gas, directly affecting the growth concentration of GaCl, and further causing the growth rate and growth concentration of GaN to fluctuate, thereby affecting the uniformity and crystal quality of GaN material.

[0003] In the prior art, the above problems are improved by a complex and cumbersome raw material boat structure or a method of improving the distribution of reaction gas, but the device cost is high, the GaN growth concentration is uneven, which affects the uniformity of GaN material, and as the raw material liquid level decreases, the GaN growth concentration continuously decreases, thereby making the GaN crystal quality low, and manual supplement of raw material also easily causes raw material pollution and oxidation. SUMMARY

[0004] Therefore, the technical problem to be solved by the present application is to overcome the problems in the prior art that when GaN is prepared by changing the structure of the raw material boat or the distribution of the reaction gas, the device cost is high, the GaN growth concentration is uneven, thereby affecting the uniformity of GaN material, and as the raw material liquid level decreases, the GaN growth concentration continuously decreases, thereby making the GaN crystal quality low, and manual supplement of raw material also easily causes raw material pollution and oxidation.

[0005] To solve the above technical problems, the present application provides a raw material monitoring and supplementing method applied to a control device in a vapor phase epitaxy device, wherein the vapor phase epitaxy device further comprises a growth device and a monitoring device coupled with the control device, the growth device comprises a reaction chamber in which a raw material boat is accommodated and a supplementing chamber communicated with the reaction chamber, the monitoring device is arranged in the reaction chamber, the supplementing chamber is provided with a supplementing boat and a raw material adding device, and the supplementing boat is used to accommodate the supplemented raw material; the method comprises the following steps: obtaining raw material condition information of the raw material boat monitored by the monitoring device; Processing the raw material status information to obtain change information of the raw material in the raw material boat; wherein the change information includes a change in the liquid level of the raw material or a change in the weight of the raw material; When the liquid level reduction of the raw material is greater than a first preset value or the weight reduction of the raw material is greater than a second preset value, an addition instruction is sent to the raw material adding device so that the raw material adding device adds the raw material in the replenishment boat to the raw material boat.

[0006] In the present application, a growth device, a control device, a monitoring device and a replenishing chamber are provided in a vapor phase epitaxy device. The control device is used to process the raw material status information in the raw material boat monitored by the monitoring device, and obtain the liquid level change or weight change of the raw material in the raw material boat; when the raw material in the raw material boat is consumed with the reaction, the liquid level changes dynamically, resulting in attenuation of the reaction area, so that the growth concentration and growth rate of GaN decrease, the control device controls the raw material adding device in the replenishing chamber to replenish the raw material in the replenishing boat into the raw material boat, thereby achieving dynamic balance of the raw material level during the reaction process, minimizing the impact of the dynamic change of the raw material level on the growth rate and growth concentration, and ensuring the uniformity and crystal quality of the GaN material. There is no need to design a raw material boat and gas pipeline with a complex structure, thereby reducing system cost and avoiding the problem of raw materials being easily contaminated and oxidized due to manual addition of raw materials. The problem of raw material fluctuations in the raw material boat affecting the growth rate and growth concentration is solved through the raw material monitoring and automatic replenishment closed loop.

[0007] Preferably, the raw material is liquid gallium, and the crystal grown using the raw material is gallium nitride.

[0008] Preferably, the monitoring device includes a distance measuring monitoring device and a temperature detector, both of which are arranged above the raw material boat and coupled to the control device. The distance measuring monitoring device includes a laser transmitter and a laser receiver, the laser transmitter is used to transmit a first light signal to the raw material in the raw material boat, and the laser receiver is used to receive a second light signal reflected by the raw material in the raw material boat. The processing of the raw material status information to obtain change information of the raw material in the raw material boat includes: Obtaining the ambient temperature inside the raw material boat detected by the temperature detector, recording it as the current ambient temperature; calculating the laser light speed at the current ambient temperature; Calculate the vertical distance between the distance measuring monitoring device and the raw material liquid surface in the raw material boat based on the time difference between the first light signal emitted by the laser transmitter and the second light signal received by the laser receiver, and the laser light speed at the current ambient temperature, to obtain the monitoring distance; Based on the monitoring distance and the monitoring boat distance, the liquid level change of the raw material in the raw material boat is calculated; wherein the monitoring boat distance is the vertical distance between the distance measuring monitoring device and the bottom of the raw material boat.

[0009] In the present application, a distance measuring monitoring device based on a laser signal and a temperature detector are arranged above the raw material boat. Since the refractive index of the air in the raw material boat will change due to temperature changes, resulting in changes in the laser light speed, the temperature detector is used to detect the ambient temperature in the raw material boat, and at the same time, a laser transmitter in the distance measuring monitoring device is used to transmit a first light signal to the raw material liquid surface, and a laser receiver is used to receive a second light signal reflected from the raw material liquid surface; the control device first calculates the laser light speed at the current ambient temperature based on the ambient temperature in the raw material boat, and then calculates the monitoring distance based on the first light signal, the second light signal and the laser light speed at the current ambient temperature; based on the monitoring distance and the monitoring boat distance, the liquid level change in the raw material boat at the current ambient temperature can be calculated, thereby avoiding the problem of inaccurate calculated liquid level change due to ambient temperature changes, and improving the detection accuracy of the liquid level change.

[0010] Preferably, there are multiple distance measuring and monitoring devices, and they are arranged above the raw material boat; the method specifically includes: Based on the time difference between the first light signal emitted by each laser transmitter and the second light signal received by the corresponding laser receiver, and the laser light speed at the current ambient temperature, the vertical distance between the corresponding distance measuring monitoring device and the raw material liquid surface in the raw material boat is calculated to obtain multiple monitoring distances; Calculating a plurality of raw material level differences based on each of the monitoring distances and the corresponding monitoring boat distance of the distance measuring monitoring device; A weighted average of all the raw material level differences is performed to obtain a level change of the raw material in the raw material boat.

[0011] In the present application, due to factors such as the flow, bubbles, and vibration of the raw materials, the raw material liquid level in the raw material boat will fluctuate randomly, resulting in jitter in the time difference between the first optical signal and the second optical signal, thereby affecting the detection accuracy of the liquid level change. Therefore, the present application sets up multiple distance measuring and monitoring devices, calculates the raw material liquid levels at different positions based on the monitoring distance of each distance measuring and monitoring device and the monitoring boat distance, takes a weighted average of the raw material liquid levels at multiple positions, and finally obtains the raw material liquid level change based on the weighted average raw material liquid level, thereby avoiding the problem of low liquid level change detection accuracy caused by raw material fluctuations, and can further improve the detection accuracy of the liquid level change.

[0012] Preferably, a bottom support structure is provided at the bottom of the raw material boat, and the monitoring device further comprises a temperature-sensitive monitoring device and a force-sensitive monitoring device, both of which are provided in the bottom support structure; and the processing of the raw material status information to obtain change information of the raw materials in the raw material boat comprises: Acquire a first signal change caused by strain of the bottom support structure detected by the force-sensitive monitoring device, and a second signal change caused by temperature fluctuation of the bottom support structure detected by the temperature-sensitive monitoring device; Correcting the first signal variation using the second signal variation to obtain a target signal variation; Based on the target signal change, the weight change of the raw material in the raw material boat is calculated.

[0013] In the present application, a bottom support structure is provided at the bottom of the raw material boat, and a force-temperature sensitive monitoring device and a force-sensitive monitoring device are provided in the bottom support structure. Since the bottom support structure will generate strain when the weight of the raw materials in the raw material boat changes, the force-sensitive monitoring device provided in the bottom support structure can detect in real time the first signal change caused by the strain of the bottom support structure; at the same time, since the ambient temperature fluctuation will affect the measurement value of the force-sensitive monitoring device, the temperature-sensitive monitoring device provided in the bottom support structure is used to detect the second signal change caused by the temperature change of the bottom support structure. The control device can use the second signal change to correct the first signal change, thereby obtaining the target signal change caused by the strain of the bottom support structure caused by the weight change of the raw materials in the raw material boat, and then obtaining the weight change of the raw materials, eliminating the influence of temperature fluctuation on the measurement result of the weight change, and improving the detection accuracy of the weight change.

[0014] Preferably, the force-sensitive monitoring device is an optical fiber strain monitoring device, and the temperature-sensitive monitoring device is a temperature grating; the first signal change is a first Bragg wavelength shift, the second signal change is a second Bragg wavelength shift, and the target signal change is a target Bragg wavelength shift; the method specifically includes: Calculating a difference between the first Bragg wavelength offset and the second Bragg wavelength offset to obtain the target Bragg wavelength offset; Calculating the strain of the bottom support structure at the optical fiber strain monitoring device based on the target Bragg wavelength offset, the Bragg wavelength, and the effective elastic-optic coefficient of the bottom support structure; Based on the strain of the bottom support structure at the optical fiber strain monitoring device, the elastic modulus of the bottom support structure and the cross-sectional area of ​​the bottom support structure, the local load of the bottom support structure at the optical fiber strain monitoring device is calculated to obtain the weight change of the raw material in the raw material boat.

[0015] In the present application, an optical fiber strain monitoring device is used to detect the first Bragg wavelength offset when the bottom supporting structure is strained, and a temperature grating is used to detect the second Bragg wavelength offset when the temperature of the bottom supporting structure fluctuates. By calculating the difference between the first Bragg wavelength offset and the second Bragg wavelength offset, the target Bragg offset when the bottom supporting structure is strained due to the weight change of the raw material can be obtained, thereby calculating the strain and local load of the bottom supporting structure at the optical fiber strain monitoring device caused by the weight change of the raw material, and the weight change of the raw material in the raw material boat can be obtained.

[0016] Preferably, the force-sensitive monitoring device includes a plurality of force-sensitive sensors, and the plurality of force-sensitive sensors are arranged in a ring shape; the method specifically includes: Acquire a first signal variation caused by strain at different positions of the bottom support structure detected by each of the force-sensitive sensors, and a second signal variation caused by temperature fluctuation of the bottom support structure detected by the temperature-sensitive monitoring device; Correcting each of the first signal variations using the second signal variations to obtain a corresponding target signal variation; Based on all the target signal changes, the weight change of the raw material in the raw material boat is calculated.

[0017] In the present application, due to the influence of factors such as fluctuation and vibration of the raw materials, the strains at different positions of the bottom support structure are also different when the weight of the raw materials in the raw material boat changes. Therefore, the present application arranges multiple force-sensitive sensors in a ring shape in the bottom support structure to detect the first signal change caused by the strain at different positions of the bottom support structure, and at the same time uses the second signal change to correct the first signal change, so as to obtain the target signal change caused by the strain at different positions of the bottom support structure due to the weight change of the raw materials, thereby combining the target signal change at each position to calculate a more accurate weight change of the raw materials.

[0018] Preferably, the plurality of force-sensitive sensors include a plurality of first force-sensitive sensors arranged in a radial direction of the bottom support structure, and a plurality of second force-sensitive sensors arranged in a tangential direction of the bottom support structure; and calculating the weight change of the raw material in the raw material boat based on all the target signal changes includes: calculating the strain of the bottom support structure at each of the first force-sensitive sensors based on the target signal variation corresponding to each of the first force-sensitive sensors; calculating the local load of the bottom support structure in the radial direction at each of the first force-sensitive sensors based on the strain of the bottom support structure at each of the first force-sensitive sensors to obtain a radial local load; and calculating the average value of all of the radial local loads to obtain a radial average local load; calculating the strain of the bottom support structure at each of the second force-sensitive sensors based on the target signal variation corresponding to each of the second force-sensitive sensors; calculating the local load of the bottom support structure along the tangential direction at each of the second force-sensitive sensors based on the strain of the bottom support structure at each of the second force-sensitive sensors to obtain a tangential local load; and calculating the average value of all of the tangential local loads to obtain a tangential average local load; A weight change of the raw material in the raw material boat is calculated based on the radial average local load and the tangential average local load.

[0019] In the present application, multiple first force-sensitive sensors arranged in the radial direction of the bottom supporting structure directly detect the signal change caused by the weight change of the raw material, and multiple second force-sensitive sensors arranged in the tangential direction of the bottom supporting structure can detect the signal change caused by mechanical vibration noise. The control device calculates the average local load of the bottom supporting structure in the radial direction based on the detection values ​​of the multiple first force-sensitive sensors, and calculates the average local load of the bottom supporting structure in the tangential direction based on the detection values ​​of the multiple second force-sensitive sensors, so that the tangential average local load and the radial average local load can be used to eliminate the mechanical vibration interference in the detection process, and a more accurate weight change of the raw material can be calculated.

[0020] Preferably, the method specifically includes: Calculating an equivalent load value transferred from the tangential average local load to the radial direction based on the tangential average local load and the vibration coupling coefficient between the tangential direction and the radial direction; The difference between the radial average local load and the equivalent load value is calculated to obtain the weight change of the raw material in the raw material boat.

[0021] In the present application, the equivalent load value of the tangential average local load transmitted to the radial direction can be calculated by using the tangential average local load and the vibration coupling coefficient. The equivalent load value represents the local load in the radial direction caused by the mechanical vibration factor. Therefore, by calculating the difference between the radial average local load and the equivalent load value, the load value of the bottom support structure that is not affected by the mechanical vibration factor can be obtained, thereby obtaining a more accurate weight change of the raw material in the raw material boat.

[0022] Preferably, the inner wall of the reaction chamber is provided with a first thermal insulation layer, and the first thermal insulation layer is coupled to the control device; the method further comprises: sending a first temperature adjustment instruction to the first insulation layer to control the first insulation layer to increase or decrease the temperature of the reaction chamber, thereby maintaining the raw material in the raw material boat in a liquid state; And / or, the inner wall of the supplementary chamber is provided with a second thermal insulation layer, and the second thermal insulation layer is coupled to the control device; the method further includes: A second temperature adjustment instruction is sent to the second insulation layer to control the second insulation layer to increase or decrease the temperature of the replenishment chamber, thereby maintaining the raw material in the replenishment boat in a liquid state.

[0023] In the present application, when the melting point of the raw material (such as metallic gallium) is low, large temperature fluctuations will cause its crystallization and solidification. Therefore, the present application sets an insulation layer on the inner wall of the reaction chamber and the replenishing chamber. The control device controls the insulation layer to heat or cool the chamber, thereby maintaining the temperature in the reaction chamber and the replenishing chamber higher than the melting point of the raw material, so that the entire reaction and raw material replenishment process are carried out under a constant temperature state, so that the raw material can be kept in liquid state for a long time.

[0024] The present application also provides a vapor phase epitaxy device, comprising: A growth device comprising a reaction chamber containing a raw material boat and a supplementary chamber connected to the reaction chamber, wherein a supplementary boat and a raw material adding device are provided in the supplementary chamber, and the supplementary boat is used to accommodate supplementary raw materials; a monitoring device, disposed in the reaction chamber, for monitoring the raw materials in the raw material boat and obtaining information on the raw material status of the raw material boat; The control device is coupled to the monitoring device and is used to execute the above-mentioned raw material monitoring and replenishment method.

[0025] The raw material monitoring and supplementation method provided in this application has the following beneficial effects: The raw material monitoring and replenishment method provided in the present application includes: obtaining raw material status information of the raw material boat monitored by the monitoring device; processing the raw material status information to obtain the liquid level change or weight change of the raw material in the raw material boat; when the liquid level reduction of the raw material is greater than a first preset value or the weight reduction of the raw material is greater than a second preset value, sending an addition instruction to the raw material adding device, so that the raw material adding device replenishes the raw material in the replenishment boat to the raw material boat. The control device processes the raw material status information in the raw material boat monitored by the monitoring device, and obtains the liquid level change or weight change of the raw material in the raw material boat. When the raw material in the raw material boat is consumed with the reaction, the liquid level changes dynamically, causing the reaction area to decay, so that the growth concentration and growth rate are reduced. The control device controls the raw material adding device in the replenishment chamber to replenish the raw material in the replenishment boat into the raw material boat, achieving dynamic balance of the raw material level in the reaction process, minimizing the impact of the dynamic change of the raw material level on the growth rate and growth concentration, and ensuring the uniformity and crystal quality of the grown crystals. There is no need to design a complex raw material boat and gas pipeline, which reduces system costs and avoids the problem of raw materials being easily contaminated and oxidized due to manual addition of raw materials. The problem of raw material fluctuations in the raw material boat affecting the growth rate and growth concentration is solved through raw material monitoring and automatic replenishment closed loop. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to make the content of this application easier to understand, the following is a further detailed description of this application based on specific embodiments of the application and in conjunction with the accompanying drawings, wherein: Figure 1 A flow chart of the supplementary method for raw material monitoring provided for this application; Figure 2 A schematic structural diagram of the vapor phase epitaxy device provided in this application; Figure 3 A schematic diagram of the structure of the distance measurement monitoring device and temperature detector provided in this application; Figure 4 Schematic diagram of the structure of the temperature-sensitive monitoring device and the force-sensitive monitoring device provided in this application; Explanation of the reference numerals in the specification: 1. Control device; 2. Growth device; 21. Reaction chamber; 211. Raw material boat; 212. Bottom support structure; 213. First insulation layer; 22. Supplementary chamber; 221. Supplementary boat; 222. Raw material adding device; 223. Second insulation layer; 3. Monitoring device; 31. Distance measuring monitoring device; 311. Laser transmitter; 312. Laser receiver; 32. Temperature detector; 33. Temperature-sensitive monitoring device; 34. Force-sensitive monitoring device; 341a. First force-sensitive sensor; 341b. Second force-sensitive sensor. DETAILED DESCRIPTION

[0027] The application will be further described below in conjunction with the drawings and specific embodiments so that those skilled in the art can better understand and implement the application, but the embodiments are not intended to limit the application.

[0028] Please refer to Figure 1 and Figure 2 , Figure 1 The raw material monitoring and supplementing method provided by the application is shown in the flow chart, Figure 2 The raw material monitoring and supplementing method provided by the application is applied to the control device 1 in the vapor phase epitaxy device, and the vapor phase epitaxy device further includes a growth device 2 and a monitoring device 3 coupled with the control device 1. The growth device 2 includes a reaction chamber 21 in which a raw material boat 211 is accommodated, and a supplementing chamber 22 in communication with the reaction chamber 21. The monitoring device 3 is arranged in the reaction chamber 21, and the supplementing chamber 22 is provided with a supplementing boat 221 and a raw material adding device 222. The supplementing boat 221 is used to accommodate the supplemented raw material. The raw material monitoring and supplementing method specifically includes: S1: Obtain raw material condition information of the raw material boat 211 monitored by the monitoring device 3.

[0029] S2: Process the raw material condition information to obtain change information of the raw material in the raw material boat 211. The change information includes a liquid level change amount of the raw material or a weight change amount of the raw material.

[0030] S3: When the liquid level reduction amount of the raw material is greater than a first preset value or the weight reduction amount of the raw material is greater than a second preset value, send an adding instruction to the raw material adding device 222 to make the raw material adding device 222 supplement the raw material in the supplementing boat 221 to the raw material boat 211.

[0031] For example, when the liquid level reduction amount of the raw material in the raw material boat 211 is greater than the first preset threshold value so that the liquid level of the raw material is lower than 10 mm, or the weight reduction amount of the raw material is greater than 0.3 kg, the control device 1 can control the raw material adding device 222 to supplement the raw material to the raw material boat 211 at a rate of 0.1 L / min.

[0032] Further, as shown in Figure 2 The inner wall of the reaction chamber 21 is provided with a first heat preservation layer 213, and the first heat preservation layer 213 is coupled with the control device 1.

[0033] The control device 1 sends a first temperature adjusting instruction to the first heat preservation layer 213 to control the first heat preservation layer 213 to heat or cool the reaction chamber 21, so as to keep the raw material in the raw material boat 211 in a liquid state.

[0034] Further, as shown in Figure 2As shown, the inner wall of the supplementary chamber 22 is provided with a second thermal insulation layer 223 , and the second thermal insulation layer 223 is coupled to the control device 1 .

[0035] The control device 1 sends a second temperature adjustment instruction to the second thermal insulation layer 223 to control the second thermal insulation layer 223 to increase or decrease the temperature of the replenishment chamber 22, thereby keeping the raw material in the replenishment boat 221 in a liquid state.

[0036] Specifically, the first thermal insulation layer 213 and the second thermal insulation layer 223 each include a temperature control mechanism and a heating device (e.g., a heating wire). The temperature control mechanism is coupled to the control device 1. After receiving heating information from the control device 1, the temperature control mechanism heats the heating wire, thereby raising the temperature within the reaction chamber 21 and the replenishing chamber 22 above the melting point of the raw materials, thereby maintaining the raw materials in the raw material boat 211 and the replenishing boat 221 in a liquid state. Alternatively, the first thermal insulation layer 213 and the second thermal insulation layer 223 each further include a cooling device. After receiving cooling information from the control device 1, the temperature control mechanism cools the reaction chamber 21 and the replenishing chamber 22 to maintain the raw materials in the raw material boat 211 and the replenishing boat 221 in a liquid state.

[0037] Since the melting point of the raw material is relatively low, large temperature fluctuations may cause its crystallization and solidification. Therefore, by providing an insulation layer (i.e., a first insulation layer 213 and a second insulation layer 223) on the inner walls of the reaction chamber 21 and the replenishing chamber 22, and regulating them using the control device 1, the temperature in the reaction chamber 21 and the replenishing chamber 22 can be maintained higher than the melting point of the raw material, so that the entire reaction and raw material replenishment process are carried out at a constant temperature, thereby keeping the raw material in a stable liquid state for a long time.

[0038] In one embodiment, if Figure 2 As shown, the monitoring device 3 includes a distance measuring monitoring device 31 and a temperature detector 32. Both the distance measuring monitoring device 31 and the temperature detector 32 are arranged above the raw material boat 211 and are coupled to the control device 1. Figure 3 As shown, the distance measuring and monitoring device 31 includes a laser transmitter 311 and a laser receiver 312 . The laser transmitter 311 is used to transmit a first optical signal to the raw material in the raw material boat 211 , and the laser receiver 312 is used to receive a second optical signal reflected by the raw material in the raw material boat 211 .

[0039] Optionally, the temperature detector 32 may be a thermistor made of platinum and having a nominal resistance of 1000 ohms at 0° C., and may be embedded in the distance measurement monitoring device 31 .

[0040] Based on the distance measuring monitoring device 31 and the temperature detector 32, the control device 1 processes the raw material status information in step S2 to obtain the change information of the raw material in the raw material boat 211, including: S20: Obtain the ambient temperature inside the raw material boat 211 detected by the temperature detector 32 and record it as the current ambient temperature; calculate the laser light speed at the current ambient temperature.

[0041] The control device 1 calculates the refractive index of air at the current ambient temperature, and calculates the laser light speed at the current ambient temperature based on the refractive index of air at the current ambient temperature and the light speed in a vacuum.

[0042] The calculation formula for the refractive index of air at the current ambient temperature is:

[0043] in, represents the refractive index of air; represents the ambient temperature in the raw material boat 22 (i.e., the ambient temperature detected by the temperature detector 32); Indicates the reference temperature, for example: 20℃.

[0044] The calculation formula for the laser light speed at the current ambient temperature is:

[0045] in, Indicates the laser light speed at the current ambient temperature; Represents the speed of light in a vacuum.

[0046] S21: Based on the time difference between the first light signal emitted by the laser transmitter 311 and the second light signal received by the laser receiver 312, and the laser light speed at the current ambient temperature, the vertical distance between the distance measuring monitoring device 31 and the raw material liquid surface in the raw material boat 211 is calculated to obtain the monitoring distance.

[0047] The calculation formula for monitoring distance is:

[0048] in, Indicates the monitoring distance; Indicates the time difference.

[0049] S22: Calculate the liquid level change of the raw material in the raw material boat 211 based on the material monitoring distance and the boat monitoring distance.

[0050] The monitoring boat distance is the vertical distance between the distance measuring monitoring device 31 and the bottom of the raw material boat 211. Specifically, the control device 1 can obtain the liquid level change of the raw material in the raw material boat 211 based on the change in the difference between the monitoring distance and the monitoring boat distance.

[0051] Furthermore, multiple distance measuring and monitoring devices 31 are provided above the raw material boat 211. Due to factors such as raw material flow, bubbles, and vibration within the raw material boat 211, the liquid level may experience random fluctuations, which can affect the accuracy of liquid level measurement. Therefore, multiple distance measuring and monitoring devices 31 are provided to measure different locations on the liquid surface. By taking a weighted average of the multiple measurement results, the influence of random noise on the measurement results is suppressed, thereby obtaining a more accurate liquid level change.

[0052] Optionally, the number of the ranging monitoring devices 31 may be 2, 3, 4, or other numbers, which is not limited in this application. When the number of the ranging monitoring devices 31 is N, the interval between adjacent ranging monitoring devices 31 may be 360° / N. For example, when the number of the ranging monitoring devices 31 is 4, the interval between adjacent ranging monitoring devices 31 is 90°.

[0053] Based on the time difference between the first light signal emitted by each laser transmitter 311 and the second light signal received by the corresponding laser receiver 312, and the laser light speed at the current ambient temperature, the control device 1 calculates the vertical distance between the corresponding distance-measuring monitoring device 31 and the raw material liquid surface in the raw material boat 211, thereby obtaining multiple monitoring distances. Based on each monitoring distance and the corresponding distance-measuring monitoring device 31, multiple raw material level differences are calculated. A weighted average of all raw material level differences is taken to obtain the change in the raw material level in the raw material boat 211.

[0054] Optionally, the weighted averaging algorithm may be simple weighted averaging, exponentially weighted moving average, adaptive weighted averaging, or median filtering.

[0055] (1) Simple weighted average directly averages the differences in liquid levels of multiple raw materials according to the same weight. The calculation formula is:

[0056] in, Indicates the change in liquid level of the raw material; Indicates the The raw material level difference corresponding to each ranging monitoring device 31, 1≤i≤N; Indicates the number of distance measurement monitoring devices 31.

[0057] (2) Exponentially weighted moving average means that newer measurement results are given greater weights, that is, the weight of each measurement result decays exponentially over time. Its calculation formula is:

[0058] in, represents the attenuation factor, , Indicates the current raw material level difference, Represents the weighted average of the raw material level differences obtained previously.

[0059] (3) Adaptive weighted averaging refers to dynamically adjusting the weight according to the fluctuation of the measured value. For example, the standard deviation of each raw material level difference can be calculated. If the standard deviation is large, it means that the noise is large, and the weight of the raw material level difference can be reduced. If the standard deviation is small, it means that the noise is small, and the weight of the raw material level difference can be increased. The calculation formula is:

[0060] in, ， Indicates the weight of the nth raw material level difference, Indicates the standard deviation of the nth raw material level difference, L n is the raw material level difference corresponding to the nth distance measuring and monitoring device 31.

[0061] (4) Median filtering refers to sorting the outputs of multiple ranging monitoring devices 31 and taking the middle value as the final value. Since median filtering is insensitive to outliers, it can effectively suppress the noise caused by liquid level fluctuations.

[0062] Preferably, considering that the environment in which the actual raw material boat 211 is located is relatively stable, a simple weighted average or a weighted average algorithm of median filtering can be selected to calculate the liquid level change of the raw material.

[0063] For example, assuming that the raw material level differences calculated based on the five distance measuring monitoring devices 31 are 100mm, 102mm, 98mm, 101mm, and 99mm respectively, the level change obtained by the simple weighted average method is 100mm, and the level change obtained by the median filter is 100mm.

[0064] The present application sets multiple sets of distance measuring and monitoring devices 31 above the raw material boat, uses each laser transmitter 311 to emit near-infrared pulses with a wavelength of 905nm to the raw material liquid surface, and uses corresponding each laser receiver 312 to capture the reflected signal of the liquid surface. The liquid level change of the raw material is obtained by calculating the time difference between the transmitted signal and the reflected signal, which can achieve a liquid level change measurement accuracy of ±0.1mm; at the same time, by setting a temperature detector 32 to correct the laser light speed in a high temperature environment (300℃~1200℃) in real time, it is ensured that the measurement error of the liquid level change is less than 0.3mm when the temperature fluctuates by ±50℃; finally, by weighted averaging the liquid level changes measured by the multiple sets of distance measuring and monitoring devices 31 to eliminate the liquid surface fluctuation noise, the liquid level fluctuation standard deviation can be controlled within ±2mm, thereby achieving high-precision measurement of the raw material liquid level change.

[0065] In one embodiment, if Figure 2 As shown, a bottom supporting structure 212 is provided at the bottom of the raw material boat 211 , and the monitoring device 3 further includes a temperature-sensitive monitoring device 33 and a force-sensitive monitoring device 34 , both of which are provided in the bottom supporting structure 212 .

[0066] Based on the temperature-sensitive monitoring device 33 and the force-sensitive monitoring device 34, the control device 1 in step S2 processes the raw material status information to obtain the change information of the raw materials in the raw material boat 211, including: S200 : Acquire a first signal variation caused by strain of the bottom support structure 212 detected by the force-sensitive monitoring device 34 , and a second signal variation caused by temperature fluctuation of the bottom support structure 212 detected by the temperature-sensitive monitoring device 33 .

[0067] S201: Correcting the first signal variation using the second signal variation to obtain a target signal variation.

[0068] S202: Based on the target signal change, the weight change of the raw material in the raw material boat 211 is calculated.

[0069] Optionally, the force-sensitive monitoring device 34 is a fiber optic strain sensor, a piezoelectric resonant sensor, or a strain gauge pressure sensor. When the force-sensitive monitoring device 34 is a fiber optic strain sensor, it can detect the Bragg wavelength shift caused by strain in the bottom support structure 212. When the force-sensitive monitoring device 34 is a voltage resonant sensor, it can detect the frequency shift caused by strain in the bottom support structure 212. When the force-sensitive monitoring device 34 is a strain gauge pressure sensor, it can detect the voltage shift caused by strain in the bottom support structure 212.

[0070] Optionally, the temperature-sensitive monitoring device 33 is a temperature sensor or a temperature grating. When the temperature-sensitive monitoring device 33 is a temperature sensor, it can detect a frequency offset or a voltage offset caused by temperature fluctuations. When the temperature-sensitive monitoring device 33 is a temperature sensor, it can detect a Bragg wavelength offset caused by temperature fluctuations.

[0071] Specifically, the principle of the optical fiber strain sensor to monitor the weight change of the raw material is: The optical fiber strain sensor measures strain by monitoring the offset of the Bragg wavelength. When the bottom support structure 212 of the raw material boat 211 is strained due to the weight change of the raw material, the fiber grating period and refractive index will change, causing the central wavelength of the reflected light to drift linearly. The strain distribution can be calculated through the wavelength offset, thereby obtaining the weight change of the raw material.

[0072] Further, the Bragg wavelength shift The relationship between the strain may be expressed as: wherein, represents the Bragg wavelength; represents the effective photoelastic coefficient, when the fiber grating is a quartz fiber, .

[0073] Assuming that the Bragg wavelength shift detected by the fiber strain sensor is , the strain is about 0.85 , and the wavelength shift of 1 pm corresponds to a strain of 0.85 , which is consistent with the common fiber grating sensitivity

[0074] Further, the weight change of the raw material causes the strain of the bottom support structure 212, which can be derived by a mechanical model: Assuming that the bottom support structure 212 is a ring-shaped cantilever beam, the strain thereof is expressed as:

[0075] wherein, represents the acting force applied on the bottom support structure 212, , represents the gravitational acceleration; represents the length of the force arm; represents the elastic modulus of the bottom support structure 212 (for example, the elastic modulus of a stainless steel material is 200 GPa); represents the cross-sectional moment of inertia; represents the cross-sectional area of the bottom support structure 212.

[0076] For example, if the bottom support structure 212 is a ring-shaped metal frame, the cross-sectional area of a single support point , the elastic modulus , the gravitational acceleration , when the weight change is 1 kg, the strain of the bottom support structure 212 is:

[0077] The corresponding wavelength shift is:

[0078] When the temperature-sensitive monitoring device 33 is a temperature grating, the measured Bragg wavelength shift caused by temperature fluctuations is: , in, represents the thermal expansion coefficient of the bottom support structure 212 (for example, the thermal expansion coefficient of stainless steel is ); represents the thermal-optical coefficient of the optical fiber, , is the temperature change.

[0079] For example, if the temperature fluctuates , then the wavelength shift caused by temperature fluctuation is If the wavelength offset is not corrected, the calculated false strain , the corresponding weight change .

[0080] It can be seen from the above example that since the temperature fluctuation of the bottom supporting structure 212 will also cause strain, resulting in changes in the detection value of the force-sensitive monitoring device 34, the temperature-sensitive monitoring device 33 is set to detect the signal change of the bottom supporting structure 212 caused by temperature influence, so as to correct the measurement value of the force-sensitive monitoring device 34, and only retain the signal change caused by the strain of the bottom supporting structure 212 caused by the weight change of the raw material (that is, the target signal change), thereby eliminating the influence of temperature fluctuations on the measurement results of the weight change of the raw material and improving the detection accuracy of the weight change.

[0081] In one embodiment, the force-sensitive monitoring device 34 is an optical fiber strain monitoring device, and the temperature-sensitive monitoring device 33 is a temperature grating; the first signal change is the first Bragg wavelength offset. , the second signal change is the second Bragg wavelength offset , the target signal change is the target Bragg wavelength offset .

[0082] The step of the control device 1 calculating the weight change of the raw material based on the first Bragg wavelength shift and the second Bragg wavelength shift includes: (a1) Calculate the first Bragg wavelength shift Offset from the second Bragg wavelength The difference between the target Bragg wavelength and the target wavelength offset is obtained. , the calculation formula of the target Bragg wavelength offset is:

[0083] (a2) Calculating the strain of the bottom support structure 212 at the optical fiber strain monitoring device based on the target Bragg wavelength shift, the Bragg wavelength, and the effective elastic-optic coefficient of the bottom support structure 212 .

[0084] The strain of the bottom support structure 212 at the optical fiber strain monitoring device The calculation formula is:

[0085] in, represents the Bragg wavelength, represents the effective elastic-optical coefficient of the bottom supporting structure 212 .

[0086] (a3) Based on the strain of the bottom support structure 212 at the optical fiber strain monitoring device, the elastic modulus of the bottom support structure 212, and the cross-sectional area of ​​the bottom support structure 212, the local load of the bottom support structure 212 at the optical fiber strain monitoring device is calculated to obtain the weight change of the raw material in the raw material boat 211.

[0087] The calculation formula for the weight change of the raw material in the raw material boat 211 is:

[0088] in, represents the force applied to the bottom support structure 212, , represents the acceleration due to gravity; Indicates the length of the lever arm; represents the elastic modulus of the bottom support structure 212 (for example, the elastic modulus of stainless steel is 200 GPa); represents the moment of inertia of the section; represents the cross-sectional area of ​​the bottom support structure 212 .

[0089] Furthermore, the force-sensitive monitoring device 34 includes multiple force-sensitive sensors arranged in a ring. By placing multiple force-sensitive sensors in a ring-shaped arrangement within the bottom support structure 212, strain at different locations within the bottom support structure 212 can be detected, thereby more accurately measuring the weight change of the raw material within the raw material boat 211. Optionally, the number of force-sensitive sensors can be 6, 8, 10, or other numbers.

[0090] The control device 1 obtains first signal changes caused by strain at different locations of the bottom support structure 212, as detected by each force-sensitive sensor, and second signal changes caused by temperature fluctuations in the bottom support structure 212, as detected by the temperature-sensitive monitoring device 33. The second signal changes are used to correct each first signal change to obtain a corresponding target signal change. Based on all target signal changes, the weight change of the raw material in the raw material boat 211 is calculated.

[0091] Furthermore, the multiple force-sensitive sensors include a plurality of first force-sensitive sensors arranged in a radial direction of the bottom supporting structure 212 , and a plurality of second force-sensitive sensors arranged in a tangential direction of the bottom supporting structure 212 .

[0092] The step of the control device 1 obtaining the weight change of the raw material based on the measurement values ​​of each first force-sensitive sensor and each second force-sensitive sensor includes: (b1) Based on the target signal change corresponding to each first force-sensitive sensor, the strain of the bottom support structure 212 at each first force-sensitive sensor is calculated; based on the strain of the bottom support structure 212 at each first force-sensitive sensor, the local load of the bottom support structure 212 along the radial direction at each first force-sensitive sensor is calculated to obtain the radial local load; the average value of all radial local loads is calculated to obtain the radial average local load.

[0093] The calculation formula for the radial average local load is:

[0094] in, represents the radial average local load; Indicates the number of first force-sensitive sensors; Indicates the The local load of the first force sensitive sensor along the radial direction.

[0095] (b2) Based on the target signal change corresponding to each second force-sensitive sensor, the strain of the bottom support structure 212 at each second force-sensitive sensor is calculated; based on the strain of the bottom support structure 212 at each second force-sensitive sensor, the local load of the bottom support structure 212 along the tangential direction at each second force-sensitive sensor is calculated to obtain the tangential local load; the average value of all tangential local loads is calculated to obtain the tangential average local load.

[0096] The calculation formula for the tangential average local load is as follows:

[0097] in, represents the tangential average local load; Indicates the number of second force-sensitive sensors; Indicates the The local load along the tangential direction at the second force sensitive sensor.

[0098] (b3) Based on the radial average local load and the tangential average local load, the weight change of the raw material in the raw material boat 211 is calculated.

[0099] Calculate the weight change of the raw material based on the radial average local load and the tangential average local load, including: (b31) Based on the tangential average local load and the vibration coupling coefficient between the tangential direction and the radial direction, calculate the equivalent load value transferred from the tangential average local load to the radial direction.

[0100] The calculation formula of the equivalent load value is as follows:

[0101] in, represents the equivalent load value, represents the vibration coupling coefficient.

[0102] (b32) The difference between the radial average local load and the equivalent load value is calculated to obtain the weight change of the raw material in the raw material boat 211.

[0103] The specific calculation formula for the weight change of the raw material in the raw material boat 211 is:

[0104] in, Indicates the weight change of the raw material; , Indicates the number of force sensors.

[0105] Since the multiple first force-sensitive sensors arranged in the radial direction of the bottom supporting structure directly detect the signal change caused by the weight change of the raw material, and the multiple second force-sensitive sensors arranged in the tangential direction of the bottom supporting structure can detect the signal change caused by mechanical vibration noise, the control device 1 calculates the average local load of the bottom supporting structure in the radial direction based on the detection values ​​of the multiple first force-sensitive sensors, and calculates the average local load of the bottom supporting structure in the tangential direction based on the detection values ​​of the multiple second force-sensitive sensors, so that the tangential average local load and the radial average local load can be used to eliminate the mechanical vibration interference in the detection process, and a more accurate weight change of the raw material can be calculated.

[0106] For example, Figure 4 The figure shows a schematic diagram of the structure of a temperature-sensitive monitoring device 33 and a force-sensitive monitoring device 34 provided by the present application. The force-sensitive monitoring device 34 includes eight force-sensitive sensors arranged in a ring, and the temperature-sensitive monitoring device 33 is located near any of the force-sensitive sensors. A rectangular coordinate system is constructed with the center of the ring as the origin. The force-sensitive sensors located at the centers of the four quadrants (0°, 90°, 180°, and 270°) are first force-sensitive sensors 341a, and the force-sensitive sensors located in the middle of adjacent quadrants (45°, 135°, 225°, and 315°) are second force-sensitive sensors 341b.

[0107] If the 4 first force sensors measure , , , , measured by the 4 second force sensors , , then the weight change of the raw material .

[0108] The application can achieve a load resolution of 0.05%FS by embedding multiple force sensors in the bottom support structure 212 in a ring shape to detect the strain distribution of the bottom support structure 212; and can eliminate the influence of environmental fluctuations (±50℃) on the measurement results of the weight change amount by setting the temperature monitoring device 33 for temperature compensation, ensuring that the measurement error is <±0.01kg; at the same time, the first force sensor 341a distributed in the radial direction of the bottom support structure 212 and the second force sensor 341b distributed in the tangential direction of the bottom support structure 212 eliminate mechanical vibration interference during the measurement process, and finally control the monitoring standard deviation of the weight change amount to ±0.01kg, achieving high-precision measurement of the weight change amount.

[0109] Based on the raw material monitoring and supplementing device provided in the above embodiments, the application further provides a vapor phase epitaxy device, which comprises a control device 1, a growth device 2 and a monitoring device 3.

[0110] The control device 1 is coupled with the monitoring device 3, and is used for executing the above-mentioned raw material monitoring and supplementing method.

[0111] The growth device 2 comprises a reaction chamber 21 in which a raw material boat 211 is accommodated, and a supplementing chamber 22 which is in communication with the reaction chamber 21, and the supplementing chamber 22 is provided with a supplementing boat 221 and a raw material adding device 222, and the supplementing boat 221 is used for accommodating the supplemented raw material.

[0112] The monitoring device 3 is arranged in the reaction chamber 21, and is used for monitoring the raw material in the raw material boat 211 to obtain the raw material condition information of the raw material boat 211.

[0113] By increasing the supplementing chamber which is in communication with the reaction chamber in the vapor phase epitaxy device, and using the monitoring device to monitor the liquid level and mass of the raw material in the raw material boat in the reaction chamber in real time, the liquid level change and weight change of the raw material can be combined, and the raw material in the supplementing chamber can be used to supplement the raw material in the raw material boat, so that the problem of the influence of the fluctuation of the raw material in the raw material boat on the subsequent growth rate is solved in a closed loop. At the same time, the liquid level, mass and flow of the raw material can be adjusted in real time according to the changes of the process parameters during the growth process, so that the raw material in the raw material boat can be kept in a relatively stable state, thereby forming a dynamic balance with the reaction gas.

[0114] In addition, the application can detect the liquid level change and weight change of the raw material in real time, efficiently and accurately, and can realize automatic supplementing of the raw material according to the change of the raw material by using the raw material adding device, which not only avoids the pollution and loss caused by frequent manual addition of the raw material, but also realizes the dynamic balance of the raw material in the reaction process, and maximally reduces the influence of the change of the raw material on the growth rate.

[0115] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A method for monitoring and replenishing raw materials, characterized in that: A control device for use in a vapor phase epitaxy apparatus, the vapor phase epitaxy apparatus further comprising a growth apparatus and a monitoring device coupled to the control device, the growth apparatus comprising a reaction chamber accommodating a raw material boat and a replenishing chamber communicating with the reaction chamber, the monitoring device being disposed within the reaction chamber, the replenishing chamber being provided with a replenishing boat and a raw material adding device, the replenishing boat being used to accommodate replenished raw materials; the method comprising: obtaining raw material status information of the raw material boat monitored by the monitoring device; Processing the raw material status information to obtain change information of the raw material in the raw material boat; wherein the change information includes a change in the liquid level of the raw material or a change in the weight of the raw material; When the liquid level reduction of the raw material is greater than a first preset value or the weight reduction of the raw material is greater than a second preset value, an addition instruction is sent to the raw material adding device so that the raw material adding device adds the raw material in the replenishment boat to the raw material boat.

2. The method for monitoring and replenishing raw materials according to claim 1, characterized in that: The monitoring device includes a distance measuring monitoring device and a temperature detector, both of which are arranged above the raw material boat and coupled to the control device. The distance measuring monitoring device includes a laser transmitter and a laser receiver, the laser transmitter is used to transmit a first light signal to the raw material in the raw material boat, and the laser receiver is used to receive a second light signal reflected by the raw material in the raw material boat. The processing of the raw material status information to obtain change information of the raw material in the raw material boat includes: Obtaining the ambient temperature inside the raw material boat detected by the temperature detector, recording it as the current ambient temperature; calculating the laser light speed at the current ambient temperature; Calculate the vertical distance between the distance measuring monitoring device and the raw material liquid surface in the raw material boat based on the time difference between the first light signal emitted by the laser transmitter and the second light signal received by the laser receiver, and the laser light speed at the current ambient temperature, to obtain the monitoring distance; Based on the monitoring distance and the monitoring boat distance, the liquid level change of the raw material in the raw material boat is calculated; wherein the monitoring boat distance is the vertical distance between the distance measuring monitoring device and the bottom of the raw material boat.

3. The method for monitoring and replenishing raw materials according to claim 2, characterized in that: There are multiple distance measuring and monitoring devices, and they are arranged above the raw material boat; the method specifically includes: Based on the time difference between the first light signal emitted by each laser transmitter and the second light signal received by the corresponding laser receiver, and the laser light speed at the current ambient temperature, the vertical distance between the corresponding distance measuring monitoring device and the raw material liquid surface in the raw material boat is calculated to obtain multiple monitoring distances; Calculating a plurality of raw material level differences based on each of the monitoring distances and the corresponding monitoring boat distance of the distance measuring monitoring device; A weighted average of all the raw material liquid level differences is performed to obtain the liquid level change in the raw material boat.

4. The method for monitoring and replenishing raw materials according to claim 1, characterized in that: The bottom of the raw material boat is provided with a bottom support structure, and the monitoring device further includes a temperature-sensitive monitoring device and a force-sensitive monitoring device, and the temperature-sensitive monitoring device and the force-sensitive monitoring device are both provided in the bottom support structure; The processing of the raw material status information to obtain the change information of the raw materials in the raw material boat includes: Acquire a first signal change caused by strain of the bottom support structure detected by the force-sensitive monitoring device, and a second signal change caused by temperature fluctuation of the bottom support structure detected by the temperature-sensitive monitoring device; Correcting the first signal variation using the second signal variation to obtain a target signal variation; Based on the target signal change, the weight change of the raw material in the raw material boat is calculated.

5. The method for monitoring and replenishing raw materials according to claim 4, characterized in that: The force-sensitive monitoring device is an optical fiber strain monitoring device, and the temperature-sensitive monitoring device is a temperature grating; the first signal change is a first Bragg wavelength offset, the second signal change is a second Bragg wavelength offset, and the target signal change is a target Bragg wavelength offset; The method specifically includes: Calculating a difference between the first Bragg wavelength offset and the second Bragg wavelength offset to obtain the target Bragg wavelength offset; Calculating the strain of the bottom support structure at the optical fiber strain monitoring device based on the target Bragg wavelength offset, the Bragg wavelength, and the effective elastic-optic coefficient of the bottom support structure; Based on the strain of the bottom support structure at the optical fiber strain monitoring device, the elastic modulus of the bottom support structure and the cross-sectional area of ​​the bottom support structure, the local load of the bottom support structure at the optical fiber strain monitoring device is calculated to obtain the weight change of the raw material in the raw material boat.

6. The method for monitoring and replenishing raw materials according to claim 4, characterized in that: The force-sensitive monitoring device includes a plurality of force-sensitive sensors, and the plurality of force-sensitive sensors are arranged in a ring shape; the method specifically includes: Acquire a first signal variation caused by strain at different positions of the bottom support structure detected by each of the force-sensitive sensors, and a second signal variation caused by temperature fluctuation of the bottom support structure detected by the temperature-sensitive monitoring device; Correcting each of the first signal variations using the second signal variations to obtain a corresponding target signal variation; Based on all the target signal changes, the weight change of the raw material in the raw material boat is calculated.

7. The method for monitoring and replenishing raw materials according to claim 6, characterized in that: The plurality of force-sensitive sensors include a plurality of first force-sensitive sensors arranged in a radial direction of the bottom support structure, and a plurality of second force-sensitive sensors arranged in a tangential direction of the bottom support structure; The calculating the weight change of the raw material in the raw material boat based on all the target signal changes includes: calculating the strain of the bottom support structure at each of the first force-sensitive sensors based on the target signal variation corresponding to each of the first force-sensitive sensors; calculating the local load of the bottom support structure in the radial direction at each of the first force-sensitive sensors based on the strain of the bottom support structure at each of the first force-sensitive sensors to obtain a radial local load; and calculating the average value of all of the radial local loads to obtain a radial average local load; calculating the strain of the bottom support structure at each of the second force-sensitive sensors based on the target signal variation corresponding to each of the second force-sensitive sensors; calculating the local load of the bottom support structure along the tangential direction at each of the second force-sensitive sensors based on the strain of the bottom support structure at each of the second force-sensitive sensors to obtain a tangential local load; and calculating the average value of all of the tangential local loads to obtain a tangential average local load; A weight change of the raw material in the raw material boat is calculated based on the radial average local load and the tangential average local load.

8. The method for monitoring and replenishing raw materials according to claim 7, characterized in that: The method specifically includes: Calculating an equivalent load value transferred from the tangential average local load to the radial direction based on the tangential average local load and the vibration coupling coefficient between the tangential direction and the radial direction; The difference between the radial average local load and the equivalent load value is calculated to obtain the weight change of the raw material in the raw material boat.

9. The method for monitoring and replenishing raw materials according to claim 1, characterized in that: The inner wall of the reaction chamber is provided with a first thermal insulation layer, and the first thermal insulation layer is coupled to the control device; the method further includes: sending a first temperature adjustment instruction to the first insulation layer to control the first insulation layer to increase or decrease the temperature of the reaction chamber, thereby maintaining the raw material in the raw material boat in a liquid state; And / or, the inner wall of the supplementary chamber is provided with a second thermal insulation layer, and the second thermal insulation layer is coupled to the control device; the method further includes: A second temperature adjustment instruction is sent to the second insulation layer to control the second insulation layer to increase or decrease the temperature of the replenishment chamber, thereby maintaining the raw material in the replenishment boat in a liquid state.

10. A vapor phase epitaxy device, characterized in that: include: A growth device comprising a reaction chamber containing a raw material boat and a supplementary chamber connected to the reaction chamber, wherein a supplementary boat and a raw material adding device are provided in the supplementary chamber, and the supplementary boat is used to accommodate supplementary raw materials; a monitoring device, disposed in the reaction chamber, for monitoring the raw materials in the raw material boat and obtaining information on the raw material status of the raw material boat; A control device, coupled to the monitoring device, is used to execute the raw material monitoring and replenishment method according to any one of claims 1 to 9.

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