Sheet turning mechanism and vacuum coating equipment

Abstract

The invention discloses a piece turning mechanism and vacuum coating equipment, the piece turning mechanism comprises a turning assembly, the turning assembly comprises a base and two clamping parts, the two clamping parts are arranged on the upper side and the lower side of the base respectively to define a substrate mounting space, and the base is rotationally arranged to switch any clamping part to be located on the upper side; the jacking assembly comprises a first jacking part, and the first jacking part is arranged below the overturning assembly in a lifting mode; and the first jacking part can move upwards to jack up the clamping part located on the upper side until the clamping part is separated from the base, so that the substrate mounting space is opened. The substrate overturning device can overturn substrates by 180 degrees, and is simple and reliable in structure, small in occupied area and low in maintenance cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a wafer turning mechanism and a vacuum coating device. BACKGROUND

[0002] In the field of vacuum coating process, especially in the process of glass through via (TGV) and other processes requiring double-sided coating, a wafer turning mechanism is needed to realize the turning of the substrate. The mechanism needs to have two functions of turning and clamping / releasing the substrate. The wafer turning mechanism in the existing structural design is complex, which leads to many shortcomings such as large floor area, high maintenance cost and low reliability. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a wafer turning mechanism which can turn the substrate by one hundred and eighty degrees, has a simple and reliable structure, and has a small floor area and low maintenance cost.

[0004] The present application also provides a vacuum coating device comprising the wafer turning mechanism.

[0005] According to the wafer turning mechanism of the first aspect of the present application, the wafer turning mechanism comprises: a turning assembly, the turning assembly comprising a base and two clamping portions, the two clamping portions being arranged on the upper and lower sides of the base respectively to define a substrate mounting space, the base being rotatably arranged to switch any clamping portion to the upper side; a jacking assembly, the jacking assembly comprising a first jacking portion, the first jacking portion being arranged below the turning assembly in a liftable manner; wherein the first jacking portion can move upward to jack up the clamping portion on the upper side to separate from the base, so as to open the substrate mounting space.

[0006] According to the wafer turning mechanism of the present application, at least the following beneficial effects are achieved: The base is rotated, and clamping parts for limiting the substrate are arranged on the upper and lower sides of the base, so that the substrate can be turned over by 180 degrees through the rotation of the base, the first lifting part is arranged in a lifting manner, and when the substrate is taken and placed, the clamping part on the upper side is lifted up by the first lifting part, so that the substrate mounting space is opened, so that the substrate is taken and placed by a mechanical hand or other substrate conveying mechanism, the structure is simple and convenient to operate, the first lifting part is arranged below the turnover assembly, the horizontal space is occupied less, and the overall floor area can be reduced, in addition, the turnover assembly for turning over the substrate and the first lifting part for opening the substrate mounting space are independently arranged, the reliability is high, maintenance is convenient and the maintenance cost is low when maintenance is performed, and since the turnover assembly and the first lifting part are independently arranged, the transmission structure can be designed separately, the complexity of the equipment as a whole can be reduced, and the stability of equipment operation can be improved.

[0007] According to some embodiments of the application, the two clamping parts are attracted to the base by a magnetic attraction assembly.

[0008] According to some embodiments of the application, the clamping part is provided with an abutting structure, and the abutting structures of the two clamping parts are distributed in a staggered manner along the horizontal direction and are 180 degrees rotationally symmetrical relative to the rotation axis of the base. The first lifting part can move upwards through the clamping part on the lower side and lift the abutting structure of the clamping part on the upper side, so that the clamping part on the upper side is separated from the base.

[0009] According to some embodiments of the application, the base is provided with a first avoiding opening vertically penetrating through, the clamping part is provided with a protruding part, the protruding part is inserted into the first avoiding opening, and the protruding parts of the two clamping parts enclose the substrate mounting space.

[0010] According to some embodiments of the application, the lifting assembly further comprises: The second lifting part is arranged below the turnover assembly in a lifting manner and can move upwards to pass through the substrate mounting space.

[0011] According to some embodiments of the application, the first lifting part and the second lifting part are connected as an integral structure, the top end of the first lifting part is higher than the second lifting part, when the first lifting part moves upwards to abut against the clamping part on the upper side, the top end of the second lifting part is lower than the substrate mounting space.

[0012] According to some embodiments of the application, the first lifting part and the second lifting part are both arranged as a rod-shaped structure and are provided in plurality.

[0013] According to some embodiments of the present application, a guide part is arranged between the base and the clamping part, the guide part being fixedly connected to one of the base and the clamping part and being slidingly connected to the other one, and the guide part being vertically distributed.

[0014] According to some embodiments of the present application, coaxial connecting shafts are arranged on opposite sides of the base in the horizontal direction, and the flapping mechanism further comprises: a cavity, opposite side walls of the cavity being provided with mounting parts, the mounting parts being rotationally connected to the connecting shafts; a rotation driving device, the rotation driving device being drivingly connected to any one of the connecting shafts to drive the connecting shaft to rotate about its own axis.

[0015] According to the vacuum coating device of the second aspect of the embodiments of the present application, the flapping mechanism of any one of the above embodiments is included.

[0016] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be understood through practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The present application will be further described below in conjunction with the drawings and embodiments, wherein: Figure 1 is a schematic view of the overall structure of the flapping mechanism of the embodiments of the present application; Figure 2 is a schematic view of the overall structure of the flapping mechanism of the embodiments of the present application; Figure 1 is a schematic view of the overall structure of the flapping mechanism of the embodiments of the present application; Figure 3 is a schematic view of the state of the flapping mechanism of the embodiments of the present application when the substrate is supported by the second lifting part; Figure 4 is a schematic view of the state of the flapping mechanism of the embodiments of the present application when the substrate is supported by the second lifting part; Figure 5 is a schematic view of the state of the flapping mechanism of the embodiments of the present application when the substrate is supported by the second lifting part; Figure 6 is a schematic view of the structure of the flapping mechanism of the embodiments of the present application; Figure 7 is a schematic view of the structure of the flapping mechanism of the embodiments of the present application; Figure 8 is a schematic view of the structure of the flapping mechanism of the embodiments of the present application;

[0018] Reference Signs: The turnover assembly 100, the base 110, the first avoiding opening 111, the clamping part 120, the protruding part 121, the supporting surface 122, the limiting baffle 123, the second avoiding opening 124, the abutting block, the sliding sleeve 126, the guide part 130, the connecting shaft 140, the first magnet 150, the second magnet 160; The jacking assembly 200, the first jacking part 210, the second jacking part 220, the mounting plate 230; The cavity 300, the conveying opening 301, the mounting part 310; The rotary driving device 400; The lifting driving device 500, the connecting part 510; The substrate 600; The mechanical arm 700. DETAILED DESCRIPTION

[0019] Embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation on the present application.

[0020] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0021] In the description of the present application, multiple refers to two or more. If there is a description of first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0022] In the description of the present application, unless otherwise explicitly limited, the words such as setting, mounting, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0023] In the field of vacuum coating process, especially in the process of glass through via (TGV) and other processes requiring double-sided coating, a wafer turning mechanism is needed to realize the turnover of the substrate, and the mechanism needs to have two functions of turnover and clamping / release of the substrate. The wafer turning mechanism in the existing structural design is complex, which leads to many shortcomings such as large floor area, high maintenance cost, and low reliability.

[0024] Based on this, the present application provides a flip mechanism and a vacuum coating equipment, which can effectively improve the above problems.

[0025] The flip mechanism and the vacuum coating equipment of the embodiment of the present application are described below with reference to the drawings.

[0026] Referring to Figure 1 , Figure 2 and Figure 4 , the flip mechanism of the first embodiment of the present application comprises a turnover assembly 100 and a jacking assembly 200.

[0027] The turnover assembly 100 comprises a base 110 and two clamping parts 120, and the two clamping parts 120 are arranged on the upper and lower sides of the base 110 respectively to define a substrate mounting space. The base 110 is rotationally arranged to switch any clamping part 120 to the upper side. For the convenience of understanding, taking the two clamping parts 120 as a first clamping part and a second clamping part as an example, the base 110 can make the first clamping part on the upper side and the second clamping part on the lower side, or make the first clamping part on the lower side and the second clamping part on the upper side during rotation. In this way, after the substrate 600 is placed in the substrate mounting space, the 180-degree turnover of the substrate 600 can be realized by the rotation of the base 110. Obviously, the rotation axis of the base 110 is horizontally distributed.

[0028] The jacking assembly 200 comprises a first jacking part 210, which is arranged below the turnover assembly 100 in a lifting manner. The first jacking part 210 can move upward to jack up the clamping part 120 on the upper side to separate from the base 110 (as shown in Figure 4 ), so as to open the substrate mounting space and enable the pick-and-place operation of the substrate 600. It should be noted that the first jacking part 210 has an initial position. When the first jacking part 210 is at the initial position, the first jacking part 210 avoids the rotation path of the base 110 to avoid interference. In addition, when any clamping part 120 of the two clamping parts 120 is on the upper side, the first jacking part 210 can move upward to jack up the clamping part 120 on the upper side to separate from the base 110, so as to open the substrate mounting space.

[0029] In operation, the base 110 is rotated to have any one of the clamping portions 120 on the upper side, and then the first lifting portion 210 is moved upward to lift the clamping portion 120 on the upper side to be separated from the base 110 to open the substrate mounting space, and then the substrate 600 is transferred between the two clamping portions 120 by a substrate transfer mechanism such as a mechanical hand 700, and after the substrate 600 is placed in position and the mechanical hand 700 is withdrawn, the first lifting portion 210 is moved downward to reset, so that the clamping portion 120 on the upper side falls under the action of gravity and is combined with the base 110, and cooperates with the clamping portion 120 on the lower side to limit the substrate 600 in the substrate mounting space, and then the base 110 is rotated to switch the positions of the two clamping portions 120, so that the clamping portion 120 originally on the lower side is switched to the upper side, thereby realizing the 180-degree turnover of the substrate 600; after the turnover is completed, the first lifting portion 210 is moved upward again to lift the clamping portion 120 on the upper side to be separated from the base 110 to open the substrate mounting space, and then the substrate 600 can be taken out for related processes, and a new substrate 600 can be put in for a new round of turnover operation.

[0030] The turnover mechanism of the embodiment of the present application can realize the 180-degree turnover of the substrate 600 by rotating the base 110, and the first lifting portion 210 is arranged to be lifted upward to lift the clamping portion 120 on the upper side to open the substrate mounting space when the substrate is taken out or put in, so that the mechanical hand 700 or other substrate transfer mechanism can take out or put in the substrate 600, which is simple in structure and convenient to operate; the first lifting portion 210 is arranged below the turnover assembly 100, so that the horizontal space is occupied less, and the overall floor area can be reduced; in addition, the turnover assembly 100 for turning over the substrate 600 and the first lifting portion 210 for opening the substrate mounting space are independently arranged, which is high in reliability, convenient to maintain and low in maintenance cost; and since they are independently arranged, the transmission structures of the turnover assembly 100 and the first lifting portion 210 can be designed separately, which can not only reduce the complexity of the whole equipment, but also improve the stability of the equipment in operation.

[0031] It should be noted that the turnover mechanism of the embodiment can be applied not only to the turnover of glass substrates, but also to the turnover of other types of substrates, and can be applied to any substrate that needs to be processed on both sides, which is not limited in the embodiment.

[0032] It is conceivable that, in order to enable the upper clamping part 120 to be lifted by the first lifting part 210 to separate from the base 110, and to enable the upper clamping part 120 to recombine with the base 110 without being easily separated when the first lifting part 210 is lowered to reset, a structure capable of being automatically connected and disconnected under external force can be provided between the base 110 and the clamping part 120.

[0033] For example, as shown in Figure 2 and Figure 7 , in some embodiments, the two clamping parts 120 are attracted to the base 110 by a magnetic attraction assembly. In this way, when the first lifting part 210 is moved upward, only an external force greater than the magnetic attraction force of the magnetic attraction assembly needs to be applied to the upper clamping part 120 to separate the upper clamping part 120 from the base 110. After the first lifting part 210 is lowered to reset, the upper clamping part 120 can fall under the action of its own gravity and recombine with the base 110 through the magnetic attraction assembly. Obviously, the magnetic attraction assembly not only has the function of automatic cooperation, but also can provide stable binding force to prevent the clamping part 120 from separating from the base 110 during the rotation of the base 110.

[0034] In some embodiments, as shown in Figure 6 and Figure 7 , the magnetic attraction assembly includes a first magnet 150 and a second magnet 160. The first magnet 150 is arranged on the clamping part 120, and the second magnet 160 is arranged on the base 110. The clamping part 120 is attracted to the base 110 by the cooperation of the first magnet 150 and the second magnet 160. The north and south poles of the first magnet 150 and the second magnet 160 are arranged in an up-down opposite manner.

[0035] It is conceivable that, in order to ensure the connection stability of the base 110 and the clamping part 120, the first magnet 150 can be provided in multiple and arranged on the clamping part 120, and the second magnet 160 can be provided in multiple and arranged on the base 110. In addition, the second magnet 160 can be provided in two groups, respectively arranged on the upper and lower sides of the base 110, and the two groups of second magnets 160 are respectively used to cooperate with the first magnets 150 on the two clamping parts 120. Of course, in the present embodiment, the specific number and arrangement position of the first magnet 150 and the second magnet 160 are not limited.

[0036] Further, to facilitate the disassembly and assembly of the magnetic assembly, a slot or hole for accommodating the first magnet 150 can be provided on the clamping portion 120, and the first magnet 150 can be locked on the clamping portion 120 by a screw, with one end of the first magnet 150 close to the base 110 exposed; in addition, a slot or hole for accommodating the second magnet 160 can be provided on the base 110, and the second magnet 160 can be locked on the base 110 by a screw, with one end of the second magnet 160 for cooperating with the first magnet 150 exposed.

[0037] Referring to Figure 6 In some embodiments, the clamping portion 120 is provided with an abutting structure 125, and the abutting structures 125 of the two clamping portions 120 are distributed in a staggered manner along the horizontal direction and are 180 degrees rotationally symmetrical relative to the rotation axis of the base 110; wherein the first jacking portion 210 can move upward through the clamping portion 120 located on the lower side and jack up the abutting structure 125 of the clamping portion 120 located on the upper side, so as to separate the clamping portion 120 located on the upper side from the base 110. It is obvious that the clamping portion 120 and the abutting structure 125 are an integral structure, the abutting structure 125 of the clamping portion 120 located on the upper side is vertically aligned with the first jacking portion 210, and the abutting structure 125 of the clamping portion 120 located on the lower side is horizontally staggered with the first jacking portion 210.

[0038] In this embodiment, by arranging the abutting structures 125 of the two clamping portions 120 to be distributed in a staggered manner along the horizontal direction, the abutting structure 125 of the clamping portion 120 located on the lower side can be avoided from interfering with the first jacking portion 210 when the first jacking portion 210 moves upward, and by arranging the abutting structures 125 of the two clamping portions 120 to be 180 degrees rotationally symmetrical relative to the rotation axis of the base 110, the abutting structure 125 of the clamping portion 120 located on the upper side can be vertically aligned with the first jacking portion 210 when any one of the two clamping portions 120 is located on the upper side, so as to ensure that the first jacking portion 210 can jack up the clamping portion 120 located on the upper side.

[0039] It is conceivable that, to avoid the first jacking portion 210 interfering with the substrate 600, the vertical movement path of the first jacking portion 210 avoids the substrate mounting space.

[0040] Referring to Figure 3 , Figure 7 and Figure 8As shown, in some embodiments, the base 110 is provided with a first avoiding opening 111 vertically penetrating through, the clamping portions 120 are provided with protruding portions 121, the protruding portions 121 are inserted into the first avoiding opening 111, and the protruding portions 121 of the two clamping portions 120 enclose a wafer mounting space. Specifically, the protruding portions 121 of the two clamping portions 120 are provided with horizontal support surfaces 122 and limiting stop strips 123 protruding from the support surfaces 122 on the opposite sides, and the wafer mounting space is enclosed by the support surfaces 122 and the limiting stop strips 123 of the two clamping portions 120 together. The support surfaces 122 are used to limit the displacement of the wafer 600 in the thickness direction thereof, and the limiting stop strips 123 are used to abut against the circumferential edge of the wafer 600 to limit the displacement of the wafer 600 in other directions perpendicular to the thickness direction thereof, so as to limit the wafer 600 in the wafer mounting space and avoid the wafer 600 from falling when the wafer 600 is flipped over.

[0041] It is conceivable that the base 110 can be provided as a ring-shaped frame structure to reduce the weight.

[0042] It is conceivable that when the wafer 600 is rectangular, the limiting stop strips 123 can be respectively arranged on the support surfaces 122 corresponding to the four sides of the wafer 600. Of course, when the wafer 600 is circular, a plurality of limiting stop strips can be arranged on the support surfaces 122 in the same circle or a circular limiting stop strip can be arranged; the specific shape and number of the limiting stop strips 123 are not limited in the embodiment.

[0043] It is conceivable that by arranging the support surfaces 122 to limit the wafer 600 in the thickness direction thereof and arranging the limiting stop strips 123 to abut against the circumferential edge of the wafer 600 to limit the wafer 600, the two clamping portions 120 can stably limit the wafer 600 without clamping the wafer 600, so as to avoid clamping damage to the wafer 600. Specifically, as shown, Figure 3 When the two clamping portions 120 are adsorbed on the upper and lower sides of the base 110, the distance between the support surfaces 122 of the two clamping portions 120 is slightly greater than the thickness of the wafer 600.

[0044] As shown in Figure 1 , Figure 2 and Figure 4 As shown in some embodiments, the jacking assembly 200 further comprises a second jacking portion 220, the second jacking portion 220 is arranged below the flipping assembly 100 in a lifting manner, and the second jacking portion 220 can move upward to pass through the wafer mounting space. Obviously, if the wafer 600 is placed in the wafer mounting space, the wafer 600 can be jacked up to separate from the clamping portion 120 on the lower side when the second jacking portion 220 moves upward.

[0045] In this embodiment, the second jacking part 220 is arranged to be lifted, and when the wafer is placed, the first jacking part 210 and the second jacking part 220 are moved upward, and the first jacking part 210 is used to lift the clamping part 120 on the upper side to be separated from the base 110, and the top end of the second jacking part 220 is used to pass through the wafer mounting space between the base 110 and the clamping part 120 on the upper side, and then the mechanical hand 700 is used to transfer the wafer 600 to the second jacking part 220, and then the second jacking part 220 and the first jacking part 210 are moved downward to reset, so as to make the wafer 600 be supported on the clamping part 120 on the lower side, and make the clamping part 120 on the upper side be combined with the base 110 again, and cooperate with the clamping part 120 on the lower side to limit the wafer 600; when the wafer is taken, the first jacking part 210 and the second jacking part 220 are moved upward, and the first jacking part 210 is used to lift the clamping part 120 on the upper side to be separated from the base 110, and the second jacking part 220 is used to lift the wafer 600 to be between the base 110 and the clamping part 120 on the upper side, and then the mechanical hand 700 is used to take away the wafer 600, and the wafer 600 is very convenient to place and take.

[0046] It is conceivable that the clamping part 120 needs to be provided with a avoiding structure for avoiding the second jacking part 220. For example, as shown in Figure 5 and Figure 7 In some embodiments, the clamping part 120 is arranged as a ring frame structure to form a second avoiding opening 124, and such arrangement not only can avoid the second jacking part 220, but also can reduce the weight of the clamping part 120.

[0047] It is conceivable that the first jacking part 210 and the second jacking part 220 can be separately arranged, that is, the lifting movements of the two are not affected by each other, and of course, other forms can also be adopted.

[0048] For example, as shown in Figure 2 and Figure 4 In some embodiments, the first jacking part 210 and the second jacking part 220 are connected as an integrated structure, and the two can be lifted synchronously, and such arrangement can drive the first jacking part 210 and the second jacking part 220 by the same driving device, so as to simplify the transmission structure; specifically, the top end of the first jacking part 210 is higher than the second jacking part 220, and when the first jacking part 210 is moved upward to abut against the clamping part 120 on the upper side, the top end of the second jacking part 220 is lower than the wafer mounting space, and thus when the wafer 600 is placed in the wafer mounting space and taken, the second jacking part 220 will not contact the wafer 600 before the first jacking part 210 lifts the clamping part 120 on the upper side, so as to avoid damaging the wafer 600.

[0049] For example, as shown in Figure 2As shown in FIG. 1 and FIG. 2, in some embodiments, the lifting assembly 200 further comprises a mounting plate 230, the first lifting parts 210 are provided in plurality and in a rod-like structure, the second lifting parts 220 are provided in plurality and in a rod-like structure, and the first lifting parts 210 and the second lifting parts 220 are both vertically fixed to the upper surface of the mounting plate 230 to move up and down synchronously with the mounting plate 230. Among them, the plurality of first lifting parts 210 are located at the circumferential side of the plurality of second lifting parts 220.

[0050] It can be understood that the first lifting parts 210 and the second lifting parts 220 are provided in a rod-like structure and in plurality, respectively, which can facilitate the mechanical hand 700 to enter and exit the opened substrate mounting space when taking and placing the substrate.

[0051] Referring to FIG. 1 and FIG. 2, Figure 1 and Figure 2 As shown in FIG. 1 and FIG. 2, in some embodiments, the substrate turning mechanism further comprises a lifting driving device 500, which is in transmission connection with the mounting plate 230 to drive the mounting plate 230 to move up and down.

[0052] Referring to FIG. 1 and FIG. 2, Figure 5 and Figure 7 As shown in FIG. 1 and FIG. 2, in some embodiments, the abutting structure 125 of the clamping part 120 is provided as an abutting block, the abutting block is provided with a vertically penetrating insertion hole, the first lifting part 210 is in a rod-like structure and is formed with an upward stepped surface at the top end, and in the process of moving upward to lift the clamping part 120 on the upper side, the top end of the first lifting part 210 can be inserted into the insertion hole, and the stepped surface can abut against the lower end surface of the abutting block, thereby pushing the clamping part 120 on the upper side to move upward.

[0053] Referring to FIG. 1 and FIG. 2, Figure 6 and Figure 7 As shown in FIG. 1 and FIG. 2, in some embodiments, a guide part 130 is provided between the base 110 and the clamping part 120, the guide part 130 is fixedly connected to one of the base 110 and the clamping part 120 and is in sliding connection with the other one, and the guide part 130 is vertically distributed, so that the guide part 130 can provide guidance for the lifting movement of the clamping part 120 relative to the base 110 to avoid the misalignment in the horizontal direction between the clamping part 120 on the upper side and the base 110.

[0054] Referring to FIG. 1 and FIG. 2, Figure 6 and Figure 7 As shown in FIG. 1 and FIG. 2, in some embodiments, the guide part 130 is provided in a rod-like structure and is fixed on the base 110, the upper and lower ends of the guide part 130 protrude from the base 110, respectively, and the two clamping parts 120 are both fixedly provided with a sliding sleeve 126 to be in sliding cooperation with the guide part 130.

[0055] It can be understood that even if the clamping part 120 is connected with the base 110 by a magnetic attraction assembly, the clamping part 120 can be accidentally separated from the base 110 during the overturning of the base 110. In order to avoid the clamping part 120 from accidentally separating from the base 110 and falling, detachable stoppers can be arranged at both ends of the guide part 130 to avoid the clamping part 120 from separating from the guide part 130, thereby improving safety.

[0056] Referring to Figure 1 and Figure 2 In some embodiments, the base 110 is coaxially provided with a connecting shaft 140 at opposite sides in the horizontal direction, and the turnover mechanism further comprises a cavity 300 and a rotary driving device 400. The opposite side walls of the cavity 300 are provided with mounting parts 310, which are rotationally connected to the connecting shaft 140. Specifically, bearings can be arranged between the mounting parts 310 and the connecting shaft 140. The rotary driving device 400 is drivingly connected to any connecting shaft 140 to drive the connecting shaft 140 to rotate about its own axis, thereby driving the base 110 to rotate about the central axis of the connecting shaft 140. By adopting the above structure, the two sides of the base 110 can be supported by the mounting parts 310, thereby achieving stable and reliable structure.

[0057] It should be noted that the turnover of the substrate 600 needs to be carried out in a vacuum environment. Therefore, in this embodiment, the cavity 300 is in a vacuum environment, and the turnover assembly 100 and the jacking assembly 200 are arranged in the cavity 300, while the rotary driving device 400 and the lifting driving device 500 are arranged outside the cavity 300. The lifting driving device 500 can transmit power to the cavity 300 through a sealed bellows, and the rotary driving device 400 can transmit power to the cavity 300 through a magnetic fluid. These are conventional technical means, and therefore will not be described here. In addition, the side wall of the cavity 300 is further provided with a conveying port 301, which is arranged on the side wall adjacent to the mounting part 310 and used for the mechanical hand 700 to pass through.

[0058] It can be conceived that the lifting driving device 500 has various forms to choose from, such as hydraulic cylinders, air cylinders, motor lead screws, etc. The above-mentioned various driving forms are conventional technical means, and this embodiment does not make specific limitation and principle description. In addition, the rotary driving device 400 also has various forms to choose from, such as rotary motors, rotary air cylinders, etc. Similarly, it is also a conventional technical means, and therefore this embodiment does not make specific limitation and principle description.

[0059] The turnover mechanism of one specific embodiment of the present application will be described below. Referring to Figures 1 to 8 , the turnover mechanism comprises: a cavity 300, a turnover assembly 100, a jacking assembly 200, a rotary driving device 400 and a lifting driving device 500.

[0060] The cavity 300 is in a vacuum environment, and the cavity 300 is provided with a mounting portion 310 on two opposite side walls in the horizontal direction, and a conveying port 301 is arranged on the side wall adjacent to the mounting portion 310 in the horizontal direction, and the conveying port 301 is used for the mechanical hand 700 to pass through.

[0061] The turnover assembly 100 includes a base 110 and two clamping portions 120; the base 110 is rotationally arranged, the base 110 is a ring-shaped frame mechanism and is formed with a first avoiding port 111 vertically penetrating through, and the base 110 is coaxially provided with a connecting shaft 140 on opposite sides in the horizontal direction, and the connecting shaft 140 is rotationally connected to the mounting portion 310 through a bearing; a set of second magnets 160 is mounted on the upper and lower sides of the base 110; and a vertically distributed guide portion 130 is further mounted on the horizontal circumferential side of the base 110, and the guide portion 130 is a rod-shaped structure and is provided with a plurality of guide portions.

[0062] The clamping portion 120 is a ring-shaped frame mechanism and is formed with a second avoiding port 124 vertically penetrating through, and the second avoiding port 124 is vertically aligned with the first avoiding port 111; a set of first magnets 150 is mounted on the clamping portion 120, and the two clamping portions 120 are respectively adsorbed on the upper and lower sides of the base 110 through the cooperation of the first magnets 150 and the second magnets 160; the two clamping portions 120 are provided with a protruding portion 121 on the facing side, the protruding portion 121 is inserted into the first avoiding port 111, the protruding portion 121 of the two clamping portions 120 is provided with a horizontal supporting surface 122 and a limiting baffle 123 protruding from the supporting surface 122 on the facing side, and a wafer mounting space is formed by the supporting surface 122 and the limiting baffle 123 of the two clamping portions 120; a sliding sleeve 126 is fixedly arranged on the clamping portion 120, and the sliding sleeve 126 is sleeved on the guide portion 130; an abutting block is further arranged on the clamping portion 120, the abutting blocks of the two clamping portions 120 are distributed in a staggered manner in the horizontal direction and are rotationally symmetrical with respect to the central axis of the connecting shaft 140 by 180 degrees.

[0063] Among them, the base 110 can be rotated to switch any clamping portion 120 to be located on the upper side.

[0064] The jacking assembly 200 comprises a mounting plate 230, a first jacking part 210 and a second jacking part 220; the mounting plate 230 is horizontally arranged below the turnover assembly 100 and can move up and down; the first jacking part 210 and the second jacking part 220 are both arranged in a rod-shaped structure and multiple in number; the first jacking part 210 and the second jacking part 220 are both fixed on the upper surface of the mounting plate 230, and the top end of the first jacking part 210 is higher than the top end of the second jacking part 220; the first jacking part 210 is vertically aligned with the abutting block of the clamping part 120 on the upper side, and when the first jacking part 210 moves upward, it can abut against the abutting block of the clamping part 120 on the upper side to jack up the clamping part 120 on the upper side to separate from the base 110, so as to open the wafer mounting space; the second jacking part 220 is located directly below the wafer mounting space, and the second jacking part 220 can move upward to pass through the wafer mounting space; when the first jacking part 210 moves upward to abut against the clamping part 120 on the upper side, the top end of the second jacking part 220 is lower than the wafer mounting space. Among them, the jacking assembly 200 has an initial position (as shown in Figure 1 ), when the jacking assembly 200 is in the initial position, it avoids the rotation path of the base 110.

[0065] The rotary drive device 400 is installed outside the cavity 300 and is in transmission connection with one of the connecting shafts 140 of the base 110, and the rotary drive device 400 is used to drive the connecting shaft 140 to rotate, so as to drive the base 110 to perform 180-degree turnover, so as to switch any clamping part 120 to the upper side.

[0066] The lifting drive device 500 is installed outside the cavity 300, and the output end of the lifting drive device 500 is provided with a connecting part 510 which penetrates into the cavity 300 and is fixedly connected with the mounting plate 230; the lifting drive device 500 is used to drive the mounting plate 230 to move up and down.

[0067] The flip mechanism of the embodiment, in operation, drives the base 110 to rotate to any clamping part 120 on the upper side through the rotating driving device 400, then drives the jacking assembly 200 to move upward through the lifting driving device 500, so as to sequentially lift the clamping part 120 on the upper side through the first jacking part 210 to separate from the base 110, and make the top end of the second jacking part 220 pass through the substrate mounting space between the base 110 and the clamping part 120 on the upper side, then transmit the substrate 600 to the second jacking part 220 through the mechanical hand 700, and then drive the jacking assembly 200 to move downward to reset through the lifting driving device 500, so as to sequentially make the substrate 600 supported on the clamping part 120 on the lower side, and make the clamping part 120 on the upper side re-adsorbed on the base 110, and limit the substrate 600 in cooperation with the clamping part 120 on the lower side; when taking the substrate, drive the jacking assembly 200 to move upward through the lifting driving device 500, and sequentially lift the clamping part 120 on the upper side through the first jacking part 210 to separate from the base 110, and lift the substrate 600 through the second jacking part 220 to the base 110 and the clamping part 120 on the upper side, and then take away the substrate 600 through the mechanical hand 700.

[0068] The vacuum coating equipment of the second aspect embodiment of the present application comprises the flip mechanism of any one of the above embodiments; since the flip mechanism of the first aspect embodiment is adopted in the vacuum coating equipment of the present embodiment, the present embodiment has all the beneficial effects brought by the flip mechanism of the first aspect embodiment, which will not be described here.

[0069] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine different embodiments or examples described in the present specification.

[0070] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the present application.

Claims

1. A flap mechanism, characterized in that: include: A flip assembly, comprising a base and two clamping parts, wherein the two clamping parts are respectively arranged on the upper and lower sides of the base to define a substrate installation space, and the base is rotatable to switch any one of the clamping parts to be located on the upper side; A lifting assembly, the lifting assembly comprising a first lifting portion, the first lifting portion being liftably disposed below the flip assembly; The first lifting portion can move upward to lift the clamping portion located on the upper side until it is separated from the base, so as to open the substrate installation space.

2. The flap turning mechanism according to claim 1, characterized in that: The two clamping parts are adsorbed on the base through a magnetic attraction component.

3. The flap turning mechanism according to claim 1, characterized in that: The clamping portion is provided with an abutment structure, and the abutment structures of the two clamping portions are staggered in the horizontal direction and are 180 degrees rotationally symmetrical with respect to the rotation axis of the base; The first lifting portion is capable of moving upward through the clamping portion located at the lower side and lifting the abutting structure of the clamping portion located at the upper side, so that the clamping portion located at the upper side is separated from the base.

4. The flap turning mechanism according to claim 1, characterized in that: The base is provided with a first avoidance opening which passes vertically through the base, and the clamping portion is provided with a protrusion which is inserted into the first avoidance opening. The protrusions of the two clamping portions enclose and form the substrate installation space.

5. The flap turning mechanism according to claim 1, characterized in that: The lifting assembly further comprises: The second lifting portion is liftably disposed below the flip assembly and is capable of moving upward to pass through the substrate installation space.

6. The flap turning mechanism according to claim 5, characterized in that: The first lifting part and the second lifting part are connected as an integral structure, the top end of the first lifting part is higher than the second lifting part, and when the first lifting part moves upward to abut against the clamping part located on the upper side, the top end of the second lifting part is lower than the substrate installation space.

7. The flap turning mechanism according to claim 5, characterized in that: The first lifting part and the second lifting part are both configured as rod-shaped structures, and a plurality of the rod-shaped structures are provided.

8. The flap turning mechanism according to claim 1, characterized in that: A guide portion is provided between the base and the clamping portion. The guide portion is fixedly connected to one of the base and the clamping portion and slidably connected to the other. The guide portion is vertically distributed.

9. The flap turning mechanism according to claim 1, characterized in that: The base is coaxially provided with connecting shafts on two opposite sides in the horizontal direction, and the flap mechanism further comprises: A cavity, wherein two opposite side walls of the cavity are provided with mounting portions, and the mounting portions are rotatably connected to the connecting shaft; A rotation drive device is connected to any of the connecting shafts to drive the connecting shaft to rotate around its own axis.

10. A vacuum coating device, characterized in that: include: The flap mechanism according to any one of claims 1 to 9.

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