High-precision probe assembly system and assembly method

Abstract

The invention provides a high-precision probe assembly system and method, and the system is characterized in that a probe assembly suspension clamp is fixed on an installation platform, and the probe assembly suspension clamp is used for suspending a probe and controlling the probe to press down and adhere to a suspension structure; the three-axis displacement table is fixed on the mounting platform, the three-axis displacement table is located below the probe assembly suspension clamp, one surface, facing the probe assembly suspension clamp, of the three-axis displacement table is used for fixing a suspension structure, and the three-axis displacement table can move in the horizontal or vertical direction; the visual acquisition module is fixed on the mounting platform and is used for acquiring a relative position image; the three-axis displacement table is used for moving by referring to the relative position image. According to the high-precision probe assembly system and the assembly method, the alignment process of the probe and the central circular surface of the suspension structure is fully automatically realized, the alignment precision is high, and the speed is high; a specially-made probe assembly suspension clamp is matched, the probe is controlled to be vertically pressed downwards, and finally accurate bonding assembly of the probe and the suspension structure is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to a high-precision probe assembly system and an assembly method. BACKGROUND

[0002] Micro-nano measurement technology is a high-tech that has emerged in recent years, and is a key field with the most forward-looking and driving nature in basic research and high-tech development, and has become a strategic commanding point in international scientific and technological competition. The probe required for measurement needs to be vertically fixed at the center of the suspension structure, and the assembly precision requirement is very high. If the probe is not accurately assembled, such as tilting, deviation or looseness, etc., it will cause deviation of the measurement result and reduce the measurement precision. The traditional probe assembly method usually relies on manual trial and error or simple positioning devices, which has the problems of inaccurate positioning, low efficiency and being easily affected by the environment, etc., resulting in large measurement error and affecting production quality and efficiency. SUMMARY

[0003] The technical problem to be solved by the present application is to overcome the defects of inaccurate positioning and low efficiency of the probe in the prior art manual probe assembly method, and to provide a high-precision probe assembly system and an assembly method.

[0004] The present application solves the above technical problems by the following technical solutions:

[0005] The present application provides a high-precision probe assembly system, comprising a mounting platform, a probe assembly suspension clamp, a three-axis displacement table and a visual acquisition module, the probe assembly suspension clamp is fixed on the mounting platform, the probe assembly suspension clamp is used for suspending the probe and controlling the probe to be pressed and adhered to the suspension structure; the three-axis displacement table is fixed on the mounting platform, the three-axis displacement table is located below the probe assembly suspension clamp, one side of the three-axis displacement table facing the probe assembly suspension clamp is used for fixing the suspension structure, and the three-axis displacement table can move in the horizontal or vertical direction; the visual acquisition module is fixed on the mounting platform, and the visual acquisition module is used for acquiring the relative position image of the center circular surface of the suspension structure and the bottom end surface of the probe; the three-axis displacement table is used for moving in reference to the relative position image until the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe coincide in the vertical direction and maintain a predetermined distance.

[0006] In the technical solution, in order to ensure that the relative position of the probe and the suspension structure is aligned in the vertical direction, the visual acquisition module is used to acquire the relative position image of the center circular surface of the suspension structure and the bottom end surface of the probe; the three-axis displacement table is used to move in reference to the relative position image until the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe coincide in the vertical direction and maintain a predetermined distance, and the probe assembly can be fully automatic, improving the assembly precision and assembly efficiency.

[0007] Preferably, the high-precision probe assembly system further comprises a control module, which is configured to calculate relative distance data between the center point of the center circle of the suspension structure and the center point of the bottom end face of the probe according to the relative position image; and the control module is further configured to control the movement of the three-axis displacement table according to the relative distance data until the center point of the center circle of the suspension structure and the center point of the bottom end face of the probe are vertically coincident and keep a preset distance.

[0008] In the technical solution, the relative position between the center circle of the suspension structure and the bottom end face of the probe is monitored in real time by the visual acquisition module, and the control module calculates the distance of the movement of the three-axis displacement table in the horizontal or vertical direction, so that the suspension structure on the three-axis displacement table is quickly aligned with the probe on the probe assembly suspension clamp, and the alignment accuracy is high.

[0009] Preferably, the three-axis displacement table comprises a displacement platform base plate, a three-axis displacement assembly and a suspension structure mounting assembly, the displacement platform base plate is fixed on the mounting platform, the three-axis displacement assembly is fixed on the displacement platform base plate, the three-axis displacement assembly is signal connected with the visual acquisition module, the suspension structure mounting assembly is fixed above the three-axis displacement assembly, the suspension structure is fixed on the side of the suspension structure mounting assembly facing the probe assembly suspension clamp, and the three-axis displacement assembly can drive the suspension structure mounting assembly to move in the horizontal or vertical direction.

[0010] In the technical solution, the above structure design meets the three functions of overall installation, three-axis movement and suspension structure fixation, and ensures that the suspension structure can be properly fixed and quickly moved to a suitable position.

[0011] Preferably, the three-axis displacement assembly comprises a bottom plate, an X-direction displacement plate, a Y-direction displacement plate, a Z-direction support cylinder and a Z-direction lifting block, the bottom plate is fixed on the displacement platform base plate, the lower surface of the X-direction displacement plate is matched with the upper surface of the bottom plate, the X-direction displacement plate can move in the X-direction relative to the bottom plate, the lower surface of the Y-direction displacement plate is matched with the upper surface of the X-direction displacement plate, the Y-direction displacement plate can move in the Y-direction relative to the X-direction displacement plate, the Z-direction support cylinder is fixed on the upper surface of the Y-direction displacement plate, the Z-direction lifting block is installed in the Z-direction support cylinder, the Z-direction lifting block is fixed with the suspension structure mounting assembly, and the Z-direction lifting block can lift in the Z-direction relative to the Z-direction support cylinder.

[0012] In the technical solution, the Z lifting block can be adjusted in the X, Y and Z directions, so that the suspension structure mounting assembly fixed on the Z lifting block and the suspension structure can be moved to a suitable position.

[0013] Preferably, the three-axis displacement assembly further comprises an X sliding guide rail, which is installed between the X displacement plate and the bottom plate, and the X displacement plate can move along the extension direction of the X sliding guide rail.

[0014] In the technical solution, the X displacement plate and the bottom plate can move more stably and accurately by setting the X sliding guide rail.

[0015] Preferably, the three-axis displacement assembly further comprises an X driving mechanism, which is installed between the bottom plate and the X displacement plate, and the X driving mechanism is signal connected with the visual acquisition module, and the X driving mechanism can drive the X displacement plate to move along the X direction according to the relative position image.

[0016] In the technical solution, the displacement of the X displacement plate along the X direction is controlled by setting the X driving mechanism, which ensures the displacement accuracy of the X displacement plate, thereby ensuring the movement accuracy of the three-axis displacement table along the X direction and the alignment accuracy of the suspension structure and the probe.

[0017] Preferably, the X driving mechanism comprises an X abutting block, an X fixed support and an X driving cylinder, the X abutting block is fixed on the side surface of the X displacement plate, the X fixed support is fixed on the side surface of the bottom plate, the X driving cylinder is signal connected with the visual acquisition module, the cylinder body of the X driving cylinder is fixed on the X fixed support, the end of the telescopic rod of the X driving cylinder can abut against the X abutting block, and the telescopic direction of the telescopic rod of the X driving cylinder is parallel to the movement direction of the X displacement plate.

[0018] In the technical solution, the displacement of the X displacement plate can be ensured by using the X driving cylinder to control the displacement of the X displacement plate.

[0019] Preferably, the three-axis displacement assembly further comprises a Y sliding guide rail, which is installed between the Y displacement plate and the X displacement plate, and the Y displacement plate can move along the extension direction of the Y sliding guide rail.

[0020] In the technical solution, the Y displacement plate and the X displacement plate can move more stably and accurately by setting the Y sliding guide rail.

[0021] Preferably, the three-axis displacement assembly further comprises a Y-direction driving mechanism, which is installed between the X-direction displacement plate and the Y-direction displacement plate, and is signal-connected with the visual acquisition module, and can drive the Y-direction displacement plate to move along the Y direction according to the relative position image.

[0022] In the technical solution, the Y-direction displacement plate is controlled to move along the Y direction by the Y-direction driving mechanism, so as to ensure the displacement precision of the Y-direction displacement plate, and thus ensure the moving precision of the three-axis displacement table along the Y direction and the alignment precision of the suspension structure and the probe.

[0023] Preferably, the Y-direction driving mechanism comprises a Y-direction abutting block, a Y-direction fixed support and a Y-direction driving cylinder, the Y-direction abutting block is fixed on the side surface of the Y-direction displacement plate, the Y-direction fixed support is fixed on the side surface of the X-direction displacement plate, the Y-direction driving cylinder is signal-connected with the visual acquisition module, the cylinder body of the Y-direction driving cylinder is fixed on the Y-direction fixed support, the end of the telescopic rod of the Y-direction driving cylinder can abut against the Y-direction abutting block, and the telescopic direction of the telescopic rod of the Y-direction driving cylinder is parallel to the moving direction of the Y-direction displacement plate.

[0024] In the technical solution, the Y-direction driving cylinder is used to control the displacement of the Y-direction displacement plate, so as to ensure the displacement precision of the Y-direction displacement plate.

[0025] Preferably, the three-axis displacement assembly further comprises a Z-direction driving mechanism, which is installed between the Z-direction support cylinder and the Z-direction lifting block, and is signal-connected with the visual acquisition module, and can drive the Z-direction lifting block to move along the Z direction according to the relative position image.

[0026] In the technical solution, the Z-direction lifting block is controlled to move along the Z direction by the Z-direction driving mechanism, so as to ensure the displacement precision of the Z-direction lifting block, and thus ensure the moving precision of the three-axis displacement table along the Z direction and the alignment precision of the suspension structure and the probe.

[0027] Preferably, the Z-direction driving mechanism comprises a rotating support block, a rotating block and a rotating driving cylinder, the rotating support block is fixed on the inner wall of the Z-direction support cylinder, the rotating block is pivotally connected with the rotating support block, the rotating shaft of the rotating block is horizontally arranged, and the rotating support block and the rotating block are located below the Z-direction lifting block, the rotating driving cylinder is signal-connected with the visual acquisition module, the cylinder body of the rotating driving cylinder is fixed on the Z-direction support cylinder, and the telescopic rod of the rotating driving cylinder extends into the Z-direction support cylinder, the telescopic rod of the rotating driving cylinder can abut against the rotating block, the rotating block is rotated upward, and thus the Z-direction lifting block is lifted up from below by the rotating block.

[0028] In the technical solution, the horizontal movement of the telescopic rod is converted into the vertical movement of the Z-direction lifting block through the rotating block by using the telescopic movement of the telescopic rod of the rotary driving cylinder, and the displacement of the Z-direction lifting block can be accurately controlled by the rotary driving cylinder, thereby ensuring the displacement accuracy of the Z-direction lifting block.

[0029] Preferably, the suspension structure mounting assembly comprises a suspension support plate and an upper pressing plate, the suspension support plate is fixed above the three-axis displacement assembly, the upper surface of the suspension support plate is provided with a support protruding ring protruding upward, the shape of the support protruding ring matches the shape of the edge of the suspension structure; the upper pressing plate comprises an upper pressing ring and a fixed foot fixed to the upper pressing ring, the shape of the upper pressing ring matches the shape of the support protruding ring, the upper pressing ring and the support protruding ring sandwich the edge of the suspension structure, and the fixed foot can be fixed to the suspension support plate.

[0030] In the technical solution, the edge of the suspension structure is sandwiched by the support protruding ring and the upper pressing ring, and the center circular surface of the suspension structure is in a suspended state, so that the probe is pressed down, and when the bottom end surface of the probe contacts the center circular surface of the suspension structure, the center circular surface of the suspension structure has a certain downward movement space, thereby ensuring that the probe and the suspension structure can be fully contacted and firmly adhered when adhered.

[0031] Preferably, the probe assembly suspension clamp comprises a mounting seat, a vertical mounting plate, a vertical sliding assembly, a clamping piece and a vertical driving assembly, the mounting seat is used for being fixed to a mounting platform, and the mounting seat is provided with a vertical mounting surface vertically arranged; the vertical mounting plate is fixed to the vertical mounting surface of the mounting seat; the vertical sliding assembly is installed on the vertical mounting plate and can vertically slide along the vertical mounting plate; a horizontal mounting surface horizontally arranged is arranged below the vertical sliding assembly; the clamping piece is fixed to the horizontal mounting surface, and the clamping piece is used for clamping the probe to keep the probe in a vertical state; the vertical driving assembly is connected with the vertical mounting plate and the vertical sliding assembly, and the vertical driving assembly drives the vertical sliding assembly to vertically slide relative to the vertical mounting plate.

[0032] In the technical solution, the probe assembly suspension clamp can keep the probe in a vertical state when the probe is suspended and ensure that the probe can be vertically pressed down during the pressing process, thereby ensuring the assembly accuracy of the probe and the suspension structure.

[0033] Preferably, the visual acquisition module comprises an X-direction visual acquisition device and a Y-direction visual acquisition device, the lens shooting direction of the X-direction visual acquisition device is arranged along the Y-direction, and the lens shooting direction of the Y-direction visual acquisition device is arranged along the X-direction.

[0034] In the technical solution, the X-direction displacement is obtained by calculating relative position images collected by the X-direction vision acquisition device, the Y-direction displacement is obtained by calculating relative position images collected by the Y-direction vision acquisition device, and the Z-direction displacement is obtained by calculating relative position images collected by the X-direction vision acquisition device and the Y-direction vision acquisition device; the relative position images are collected by two vision acquisition devices at mutually perpendicular angles, the image information is more three-dimensional, and the accuracy of relative distance calculation is ensured.

[0035] The application further provides a high-precision probe assembly method using the high-precision probe assembly system.

[0036] S100, mounting the probe on the probe assembly suspension clamp, and fixing the suspension structure on one side of the three-axis displacement table facing the probe assembly suspension clamp;

[0037] S200, collecting initial position images of the center circular surface of the suspension structure and the bottom end surface of the probe by the vision acquisition module;

[0038] S300, moving the three-axis displacement table according to the initial position images of the center circular surface of the suspension structure and the bottom end surface of the probe until the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe are vertically coincident and keep a preset distance;

[0039] S400, controlling the probe assembly suspension clamp to press down the probe until the bottom end surface of the probe is adhered to the center circular surface of the suspension structure.

[0040] In the technical solution, the full-automatic assembly of the probe can be realized by using the assembly method, the assembly accuracy and efficiency are improved, and the requirements of micro-nano measurement technology on the measurement probe can be met.

[0041] Preferably, the step S300 comprises the following steps:

[0042] S301, setting a preset Z-direction distance L zs of the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe along the Z direction;

[0043] S302, calculating an initial X-direction distance L x0 of the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe along the X direction, an initial Y-direction distance L y0 of the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe along the Y direction, and an initial Z-direction distance L z0 of the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe along the Z direction according to the initial position images;

[0044] S303, calculating the initial X-direction distance L x0, initial Y-direction distance L y0 , initial Z-direction distance L z0 , X-direction moving distance S x , Y-direction moving distance S y , and Z-direction moving distance S z , the X-direction moving distance S x = L x0 , the Y-direction moving distance S y = L y0 , and the Z-direction moving distance S z = L z0 -L zs ;

[0045] S304, the three-axis displacement table moves S x in the X-direction, S y in the Y-direction, and S z in the Z-direction;

[0046] S305, the vision acquisition module acquires real-time position images of the center circular surface of the suspension structure and the bottom end surface of the probe again;

[0047] S306, according to the real-time position images, the real-time X-direction distance L xi , real-time Y-direction distance L yi , and real-time Z-direction distance L zi of the center point of the center circular surface of the suspension structure and the center point of the bottom end surface of the probe in the X-direction, Y-direction, and Z-direction are calculated;

[0048] S307, if L xi = 0, L yi = 0, and L zi = L zs , step S400 is performed; if L xi ≠ 0, L yi ≠ 0, or L zi ≠ L zs , step S308 is performed;

[0049] S308, according to the real-time X-direction distance L xi , real-time Y-direction distance L yi , and real-time Z-direction distance L zi , the X-direction adjustment distance S xi , Y-direction adjustment distance S yi , and Z-direction adjustment distance S zi of the three-axis displacement table are calculated, the X-direction adjustment distance S xi = L xi , the Y-direction adjustment distance S yi = L yi, the Z-direction adjustment distance S zi =L zi -L zs ;

[0050] S309, the three-axis translation stage moves S along the X direction xi , move S along the Y direction yi , move S along the Z direction zi , execute step S305.

[0051] In this technical solution, the visual acquisition module collects real-time position images to provide real-time feedback on the relative positions of the suspension structure and the probe to guide the movement of the three-axis translation stage. Multiple iterative adjustments can be completed in a short period of time, ensuring that the three-axis translation stage moves into place, ensuring the accuracy of the final relative position of the suspension structure and the probe, and ultimately achieving precise bonding and assembly of the probe and the suspension structure.

[0052] Preferably, the probe assembly suspension fixture controls the probe to be pressed down by a distance T, and the preset Z-direction distance L zs =T-0.1μm.

[0053] In this technical solution, the Z-direction distance L is preset zs , which is 0.1μm less than the distance the probe is pressed down; when the probe is assembled with a suspension fixture to control the probe to be pressed down, after the probe contacts the suspension structure, the probe continues to press down by 0.1μm, so that the probe exerts a certain pressure on the suspension structure, thereby ensuring the adhesion between the probe and the suspension structure.

[0054] Preferably, the visual acquisition module includes an X-direction visual acquisition device and a Y-direction visual acquisition device, wherein the lens shooting direction of the X-direction visual acquisition device is arranged along the Y direction, and the lens shooting direction of the Y-direction visual acquisition device is arranged along the X direction;

[0055] The initial position image includes an X-direction initial position image and a Y-direction initial position image, wherein the X-direction initial position image is taken by the X-direction vision acquisition device, and the Y-direction initial position image is taken by the Y-direction vision acquisition device;

[0056] The initial X-direction distance L x0 The initial Y distance L is obtained by calculating the initial X-direction position image. y0 Obtained by calculating the Y-direction initial position image;

[0057] The initial Z-direction distance L z0 =(L z0X +L z0Y ) / 2, the L z0Xthe initial Z-direction distance of the center point of the bottom end face of the probe along the Z-direction, calculated according to the X-direction initial position image. z0Y the initial Z-direction distance of the center point of the bottom end face of the probe along the Z-direction, calculated according to the Y-direction initial position image.

[0058] In the technical solution, the X-direction vision acquisition device and the Y-direction vision acquisition device acquire the X-direction initial position image and the Y-direction initial position image from the X and Y directions, and calculate the initial distance through the initial position images in two different directions, so that the integrity of image acquisition is ensured and the accuracy of initial distance calculation is improved.

[0059] Preferably, the real-time position image comprises an X-direction real-time position image and a Y-direction real-time position image, the X-direction real-time position image is taken by the X-direction vision acquisition device, and the Y-direction real-time position image is taken by the Y-direction vision acquisition device.

[0060] the real-time X-direction distance L xi calculated according to the X-direction real-time position image, the real-time Y-direction distance L yi calculated according to the Y-direction real-time position image.

[0061] the real-time Z-direction distance L zi = (L ziX + L ziY ) / 2, the L ziX is the real-time Z-direction distance of the center point of the bottom end face of the probe along the Z-direction, calculated according to the X-direction real-time position image, and the L ziY is the real-time Z-direction distance of the center point of the bottom end face of the probe along the Z-direction, calculated according to the Y-direction real-time position image.

[0062] In the technical solution, the X-direction vision acquisition device and the Y-direction vision acquisition device acquire the X-direction real-time position image and the Y-direction real-time position image from the X and Y directions, and calculate the real-time distance through the real-time position images in two different directions, so that the integrity of image acquisition is ensured and the accuracy of real-time distance calculation is improved.

[0063] On the basis of common knowledge in the art, the above-mentioned preferred conditions can be combined in any manner, so as to obtain various preferred examples of the present application.

[0064] The positive progress effect of the present application is that:

[0065] The high-precision probe assembly system and the assembly method, the vision acquisition module collects the relative position image of the center circular surface of the suspension structure and the bottom end surface of the probe, and then the control module calculates the relative distance of the center circular surface of the suspension structure and the bottom end surface of the probe according to the image, and the three-axis displacement table moves according to the calculated relative distance, so that the probe is aligned with the center circular surface of the suspension structure; during the alignment process, the vision acquisition module collects the relative position image in real time, and the control module calculates and feeds back to the three-axis displacement table, so that the alignment process of the probe and the center circular surface of the suspension structure is fully automated, the alignment precision is high, and the speed is fast; and the specially-made probe assembly suspension clamp is matched to control the vertical downward pressure of the probe, and finally the precise bonding assembly of the probe and the suspension structure is realized. BRIEF DESCRIPTION OF DRAWINGS

[0066] Figure 1 It is a structure schematic view of the high-precision probe assembly system.

[0067] Figure 2 It is a structure schematic view of the high-precision probe assembly system. Figure 1 It is a partial enlarged view of the A area of the high-precision probe assembly system.

[0068] Figure 3 It is a structure schematic view of the three-axis displacement table of the high-precision probe assembly system. Figure 1

[0069] Figure 4 It is a partial structure schematic view of the three-axis displacement table. Figure 3

[0070] Figure 5 It is a partial structure schematic view of the three-axis displacement table. Figure 3

[0071] Figure 6 It is a structure schematic view of the suspension structure mounting assembly of the three-axis displacement table. Figure 3

[0072] Figure 7 It is a sectional schematic view of the suspension structure mounting assembly. Figure 6

[0073] Figure 8 It is a structure schematic view of the probe assembly suspension clamp of the high-precision probe assembly system. Figure 1

[0074] Figure 9 It is a partial structure schematic view of the probe assembly suspension clamp. Figure 8

[0075] Figure 10 It is a partial sectional view of the probe assembly suspension clamp. Figure 8 ​​​​​​​​

[0076] Figure 11 As shown in Figure 8 The structure diagram of the clamping part of the probe assembly suspension clamp.

[0077] Figure 12 As shown in Figure 11 The internal structure diagram of the clamping part.

[0078] Figure 13 As shown in Figure 1 The step diagram of the assembly method of the high-precision probe assembly system.

[0079] Figure 14 As shown in Figure 13 The step diagram of step S300 of the high-precision probe assembly method.

[0080] Explanation of reference numerals

[0081] Mounting platform 100;

[0082] Probe assembly suspension clamp 200; mounting seat 210; vertical mounting surface 211; support pad plate 212; suspension merging plate 213; suspension arm 214; vertical mounting plate 220; vertical sliding assembly 230; horizontal mounting surface 231; vertical sliding plate 232; horizontal extension plate 233; adapter plate 234; ball guide rail 235; clamping part 240; clamping block 241; positioning groove 2411; bottom surface 2412; limiting through hole 2413; elastic rubber band 242; vertical driving assembly 250; extension protrusion 251; protrusion main body 2511; ball 2512; pit 2513; pressing assembly 252; upper support ring 2521; screw hand lever 2522; handle 2523 of the screw hand lever; screw rod 2524 of the screw hand lever; support assembly 253; lower support ring 2531; support rod 2532; elastic member 2533;

[0083] Tri-axial displacement table 300; displacement platform base plate 310; tri-axial displacement assembly 320; bottom plate 321; X-direction displacement plate 322; Y-direction displacement plate 323; Z-direction support cylinder 324; Z-direction lifting block 325; X-direction driving mechanism 326; X-direction abutting block 3261; X-direction fixed support 3262; X-direction driving cylinder 3263; cylinder body of X-direction driving cylinder 3264; telescopic rod of X-direction driving cylinder 3265; X-direction abutting protrusion 3266; Y-direction driving mechanism 327; Y-direction abutting block 3271; Y-direction fixed support 3272; Y-direction driving cylinder 3273; cylinder body of Y-direction driving cylinder 3274; telescopic rod of Y-direction driving cylinder 3275; Y-direction abutting protrusion 3276; Z-direction driving mechanism 328; rotating support block 3281; rotating block 3282; rotating driving cylinder 3283; cylinder body of rotating driving cylinder 3284; telescopic rod of rotating driving cylinder 3285; first abutting protrusion 3286; second abutting protrusion 3287; suspension structure mounting assembly 330; suspension support plate 331; upper pressing plate 332; support protrusion 333; upper pressing ring 334; fixed foot 335;

[0084] Visual acquisition module 400; X-direction visual acquisition device 401; Y-direction visual acquisition device 402;

[0085] Probe 500; bottom end face 501;

[0086] Suspension structure 600; central circular face 601; edge 602. DETAILED DESCRIPTION

[0087] The application will be further described by way of examples without limiting the application to the examples described.

[0088] As Figures 1-2An embodiment of the high-precision probe assembly system is shown. The high-precision probe assembly system comprises a mounting platform 100, a probe assembly suspension clamp 200, a three-axis displacement table 300, and a visual acquisition module 400. The probe assembly suspension clamp 200, the three-axis displacement table 300, and the visual acquisition module 400 are all fixed on the mounting platform 100. The probe assembly suspension clamp 200 is used to suspend the probe 500 and control the probe 500 to be pressed and adhered to the suspension structure 600. The three-axis displacement table 300 is located below the probe assembly suspension clamp 200. One side of the three-axis displacement table 300 facing the probe assembly suspension clamp 200 is used to fix the suspension structure 600. The three-axis displacement table 300 can move horizontally or vertically. The visual acquisition module 400 is used to acquire the relative position image of the center circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500. The three-axis displacement table 300 is used to move in reference to the relative position image until the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 coincide in the vertical direction and keep a preset distance.

[0089] The assembled probe 500 needs to be fixed vertically at the center of the suspension structure 600. When the probe 500 is suspended above the suspension structure 600, the probe assembly suspension clamp 200 keeps the probe 500 in a vertical state, and the three-axis displacement table 300 can move horizontally or vertically, so that the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 coincide in the vertical direction and keep a preset distance. Finally, the probe assembly suspension clamp 200 presses the probe 500 vertically downward, so that the bottom end surface 501 of the probe 500 contacts and adheres to the center circular surface 601 of the suspension structure 600, realizing the fixation between the probe 500 and the suspension structure 600.

[0090] In order to ensure that the relative positions of the probe 500 and the suspension structure 600 are aligned in the vertical direction, the visual acquisition module 400 is used to acquire the relative position image of the center circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500. The three-axis displacement table 300 is used to move in reference to the relative position image until the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 coincide in the vertical direction and keep a preset distance.

[0091] The high-precision probe assembly system further comprises a control module. The control module is used to calculate the relative distance between the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 according to the relative position image. The control module is also used to control the three-axis displacement table 300 to move until the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 coincide in the vertical direction and keep a preset distance.

[0092] The relative position between the central circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500 is monitored in real time by the visual acquisition module 400, the control module calculates the distance of the three-axis displacement table 300 moving in the horizontal or vertical direction, so that the suspension structure 600 located on the three-axis displacement table 300 is quickly aligned with the probe 500 located on the probe assembly suspension clamp 200, and then the probe assembly suspension clamp 200 is used to press down the probe 500, so that the probe assembly can be fully automatic, and the assembly precision and efficiency are improved.

[0093] As shown in Figures 3-7 , the three-axis displacement table 300 includes a displacement platform base plate 310, a three-axis displacement assembly 320, and a suspension structure mounting assembly 330. The displacement platform base plate 310 is fixed on the mounting platform 100. The three-axis displacement assembly 320 is fixed on the displacement platform base plate 310, and the three-axis displacement assembly 320 is signal connected with the visual acquisition module 400. The suspension structure mounting assembly 330 is fixed above the three-axis displacement assembly 320, and the suspension structure 600 is fixed on the side of the suspension structure mounting assembly 330 facing the probe assembly suspension clamp 200. The three-axis displacement assembly 320 can drive the suspension structure mounting assembly 330 to move in the horizontal or vertical direction.

[0094] The displacement platform base plate 310 and the mounting platform 100 can be fixed by multiple bolts, so as to stably fix the three-axis displacement table 300 on the mounting platform 100. The three-axis displacement assembly 320 can move in the horizontal or vertical direction according to the relative position image collected by the visual acquisition module 400, so as to drive the suspension structure mounting assembly 330 and the suspension structure 600 to move, thereby aligning the central circular surface 601 of the suspension structure 600 with the bottom end surface 501 of the probe 500. The structural design of the three-axis displacement table 300 simultaneously satisfies the three functions of overall installation, three-axis movement, and suspension structure fixation, thereby ensuring that the suspension structure 600 can be properly fixed and quickly moved to a suitable position.

[0095] As shown in Figure 3 , the three-axis displacement assembly 320 includes a bottom plate 321, an X-direction displacement plate 322, a Y-direction displacement plate 323, a Z-direction support cylinder 324, and a Z-direction lifting block 325. The bottom plate 321 is fixed on the displacement platform base plate 310. The lower surface of the X-direction displacement plate 322 is matched with the upper surface of the bottom plate 321, and the X-direction displacement plate 322 can move relative to the bottom plate 321 in the X-direction. The lower surface of the Y-direction displacement plate 323 is matched with the upper surface of the X-direction displacement plate 322, and the Y-direction displacement plate 323 can move relative to the X-direction displacement plate 322 in the Y-direction. The Z-direction support cylinder 324 is fixed on the upper surface of the Y-direction displacement plate 323. The Z-direction lifting block 325 is installed in the Z-direction support cylinder 324, and the Z-direction lifting block 325 is fixed with the suspension structure mounting assembly 330. The Z-direction lifting block 325 can lift relative to the Z-direction support cylinder 324 in the Z-direction.

[0096] Through the movement of the X-direction displacement plate 322, the Y-direction displacement plate 323 and the Z-direction lifting block 325 in the X, Y and Z directions, the position of the Z-direction lifting block 325 in the X, Y and Z directions can be adjusted, so that the suspension structure mounting assembly 330 and the suspension structure 600 fixed on the Z-direction lifting block 325 are moved to a suitable position.

[0097] The three-axis displacement assembly 320 further comprises an X-direction sliding guide (not shown in the figure) installed between the X-direction displacement plate 322 and the bottom plate 321, and the X-direction displacement plate 322 can move along the extension direction of the X-direction sliding guide. By arranging the X-direction sliding guide, the movement between the X-direction displacement plate 322 and the bottom plate 321 is more stable and accurate.

[0098] The three-axis displacement assembly 320 further comprises an X-direction driving mechanism 326 installed between the bottom plate 321 and the X-direction displacement plate 322, the X-direction driving mechanism 326 is signal connected with the visual acquisition module 400, and the X-direction driving mechanism 326 can drive the X-direction displacement plate 322 to move along the X direction according to the relative position image.

[0099] Specifically, as shown in Figures 3-4 The X-direction driving mechanism 326 comprises an X-direction abutting block 3261, an X-direction fixed support 3262 and an X-direction driving cylinder 3263. The X-direction abutting block 3261 is fixed on the side surface of the X-direction displacement plate 322; the X-direction fixed support 3262 is fixed on the side surface of the bottom plate 321; the X-direction driving cylinder 3263 is signal connected with the visual acquisition module 400, the cylinder body 3264 of the X-direction driving cylinder 3263 is fixed on the X-direction fixed support 3262, the end of the telescopic rod 3265 of the X-direction driving cylinder 3263 can abut against the X-direction abutting block 3261, and the telescopic direction of the telescopic rod 3265 of the X-direction driving cylinder 3263 is parallel to the moving direction of the X-direction displacement plate 322.

[0100] According to the relative position image acquired by the visual acquisition module 400, the X-direction displacement of the suspension structure 600 required to move along the X direction can be calculated, so as to obtain the extension distance of the telescopic rod 3265 of the X-direction driving cylinder 3263. The telescopic rod 3265 of the X-direction driving cylinder 3263 pushes the X-direction abutting block 3261 and the X-direction displacement plate 322 along the X direction by the X-direction displacement, so that the suspension structure 600 is moved along the X direction to a suitable position.

[0101] As shown in Figure 4As shown, the surface of the X-direction abutting block 3261 abutting the telescopic rod 3265 of the X-direction driving air cylinder 3263 forms an outward protruding X-direction abutting protrusion 3266. By setting the X-direction abutting protrusion 3266, the contact point of the telescopic rod 3265 of the X-direction driving air cylinder 3263 and the X-direction abutting block 3261 is more stable, and the transmission process will not appear jam.

[0102] The three-axis displacement assembly 320 further comprises a Y-direction sliding guide (not shown in the figure) installed between the Y-direction displacement plate 323 and the X-direction displacement plate 322, and the Y-direction displacement plate 323 can move along the extension direction of the Y-direction sliding guide. By setting the Y-direction sliding guide, the movement between the Y-direction displacement plate 323 and the X-direction displacement plate 322 is more stable and accurate.

[0103] The three-axis displacement assembly 320 further comprises a Y-direction driving mechanism 327 installed between the X-direction displacement plate 322 and the Y-direction displacement plate 323, the Y-direction driving mechanism 327 is signal connected with the visual acquisition module 400, and the Y-direction driving mechanism 327 can drive the Y-direction displacement plate 323 to move along the Y-direction according to the relative position image.

[0104] Specifically, the Y-direction driving mechanism 327 comprises a Y-direction abutting block 3271, a Y-direction fixed support 3272 and a Y-direction driving air cylinder 3273, the Y-direction abutting block 3271 is fixed on the side surface of the Y-direction displacement plate 323; the Y-direction fixed support 3272 is fixed on the side surface of the X-direction displacement plate 322; the Y-direction driving air cylinder 3273 is signal connected with the visual acquisition module 400, the cylinder body 3274 of the Y-direction driving air cylinder 3273 is fixed on the Y-direction fixed support 3272, the end of the telescopic rod 3275 of the Y-direction driving air cylinder 3273 can abut against the Y-direction abutting block 3271, and the extension direction of the telescopic rod 3275 of the Y-direction driving air cylinder 3273 is parallel to the moving direction of the Y-direction displacement plate 323.

[0105] According to the relative position image acquired by the visual acquisition module 400, the Y-direction displacement of the suspension structure 600 required to move along the Y-direction can be calculated, so as to obtain the extension distance of the telescopic rod 3275 of the Y-direction driving air cylinder 3273. The telescopic rod 3275 of the Y-direction driving air cylinder 3273 pushes the Y-direction abutting block 3271 and the Y-direction displacement plate 323 along the Y-direction by the Y-direction displacement, so as to move the suspension structure 600 along the Y-direction to the appropriate position.

[0106] The surface of the Y-direction abutting block 3271 abutting the telescopic rod 3275 of the Y-direction driving air cylinder 3273 forms an outward protruding Y-direction abutting protrusion 3276. By setting the Y-direction abutting protrusion 3276, the contact point of the telescopic rod 3275 of the Y-direction driving air cylinder 3273 and the Y-direction abutting block 3271 is more stable, and the transmission process will not appear jam.

[0107] As shown in Figure 3 and Figure 5 The three-axis displacement assembly 320 further comprises a Z-direction driving mechanism 328, which is installed between the Z-direction support cylinder 324 and the Z-direction lifting block 325, and is signal connected with the visual acquisition module 400. The Z-direction driving mechanism 328 can drive the Z-direction lifting block 325 to move along the Z-direction according to the relative position image.

[0108] Specifically, the Z-direction driving mechanism 328 comprises a rotating support block 3281, a rotating block 3282 and a rotating driving cylinder 3283. The rotating support block 3281 is fixed on the inner wall of the Z-direction support cylinder 324. The rotating block 3282 is pivotally connected with the rotating support block 3281. The rotating shaft of the rotating block 3282 is horizontally arranged. The rotating support block 3281 and the rotating block 3282 are located below the Z-direction lifting block 325. The rotating driving cylinder 3283 is signal connected with the visual acquisition module 400. The cylinder body 3284 of the rotating driving cylinder 3283 is fixed on the Z-direction support cylinder 324. The telescopic rod 3285 of the rotating driving cylinder 3283 extends into the Z-direction support cylinder 324. The telescopic rod 3285 of the rotating driving cylinder 3283 can abut against the rotating block 3282, so that the rotating block 3282 is rotated upward, thereby making the rotating block 3282 lift the Z-direction lifting block 325 from below.

[0109] According to the relative position image acquired by the visual acquisition module 400, the Z-direction displacement of the suspension structure 600 required to move along the Z-direction can be calculated, thereby obtaining the distance of the telescopic rod 3285 of the rotating driving cylinder 3283 extending out. The telescopic rod 3285 of the rotating driving cylinder 3283 extends out, so that the rotating block 3282 is rotated upward, thereby making the rotating block 3282 lift the Z-direction lifting block 325 from below and move along the Z-direction, so that the suspension structure 600 moves to a suitable position along the Z-direction.

[0110] The surface of the rotating block 3282 abutting against the Z-direction lifting block 325 forms a first abutting protrusion 3286 protruding outward. The surface of the rotating block 3282 abutting against the telescopic rod 3285 of the rotating driving cylinder 3283 forms a second abutting protrusion 3287 protruding outward. The first abutting protrusion 3286 makes the contact point of the rotating block 3282 and the Z-direction lifting block 325 more stable. The second abutting protrusion 3287 makes the contact point of the rotating block 3282 and the telescopic rod 3285 of the rotating driving cylinder 3283 more stable, thereby making the transmission process not appear to be stuck.

[0111] As shown in Figure 1As shown, the visual acquisition module 400 includes an X-direction visual acquisition device 401 and a Y-direction visual acquisition device 402, the lens shooting direction of the X-direction visual acquisition device 401 is arranged along the Y-direction, and the lens shooting direction of the Y-direction visual acquisition device 402 is arranged along the X-direction. The X-direction displacement is obtained by calculating the relative position images acquired by the X-direction visual acquisition device 401, the Y-direction displacement is obtained by calculating the relative position images acquired by the Y-direction visual acquisition device 402, and the Z-direction displacement is obtained by calculating the relative position images acquired by the X-direction visual acquisition device 401 and the Y-direction visual acquisition device 402.

[0112] As shown in the figure, the probe assembly suspension clamp 200 includes a three-axis displacement assembly 320, a visual acquisition module 400, a suspension structure mounting assembly 330, and a probe assembly 500. Figures 6-7 As shown, the suspension structure mounting assembly 330 includes a suspension support plate 331 and an upper pressing plate 332, the suspension support plate 331 is fixed above the three-axis displacement assembly 320, the upper surface of the suspension support plate 331 is provided with a support protruding ring 333 protruding upward, the shape of the support protruding ring 333 matches the shape of the edge 602 of the suspension structure 600; the upper pressing plate 332 includes an upper pressing ring 334 and a fixed foot 335 fixed with the upper pressing ring 334, the shape of the upper pressing ring 334 matches the shape of the support protruding ring 333, the upper pressing ring 334 and the support protruding ring 333 sandwich the edge 602 of the suspension structure 600, and the fixed foot 335 can be fixed with the suspension support plate 331.

[0113] By setting the support protruding ring 333 and the upper pressing ring 334, the edge 602 of the suspension structure 600 is clamped, and the center circular surface 601 of the suspension structure 600 is in a suspended state, so that the probe 500 is pressed down, when the bottom end surface 501 of the probe 500 contacts the center circular surface 601 of the suspension structure 600, the center circular surface 601 of the suspension structure 600 has a certain downward space, which ensures that the probe 500 and the suspension structure 600 can fully contact and firmly adhere when they are adhered.

[0114] A specific structure of the probe assembly suspension clamp 200 is shown in the figure. Figures 8-12The probe assembly suspension fixture 200 includes a mounting base 210, a vertical mounting plate 220, a vertical sliding assembly 230, a clamping member 240, and a vertical driving assembly 250. The mounting base 210 is used to be fixed on the mounting platform 100. The mounting base 210 is provided with a vertical mounting surface 211 arranged vertically; the vertical mounting plate 220 is fixed on the vertical mounting surface 211 of the mounting base 210; the vertical sliding assembly 230 is installed on the vertical mounting plate 220 and can be vertically driven. The mounting plate 220 slides vertically; a horizontal mounting surface 231 is provided horizontally below the vertical sliding assembly 230; the clamping member 240 is fixed on the horizontal mounting surface 231, and the clamping member 240 is used to clamp the probe 500 to keep the probe 500 in a vertical state; the vertical drive assembly 250 is connected to the vertical mounting plate 220 and the vertical sliding assembly 230, and the vertical drive assembly 250 drives the vertical sliding assembly 230 to slide vertically relative to the vertical mounting plate 220.

[0115] The clamping member 240 of the probe assembly suspension fixture 200 can clamp the probe 500, keeping it in a vertical position during the suspension process. Furthermore, the vertical drive assembly 250 can drive the vertical sliding assembly 230 to slide vertically relative to the vertical mounting plate 220, thereby pressing the probe 500 downward vertically, causing the bottom end surface 501 of the probe 500 to contact and adhere to the central circular surface 601 of the suspension structure 600, thereby achieving a fixed connection between the probe 500 and the suspension structure 600. When the probe 500 is assembled, the bottom end surface 501 of the probe 500 and the central circular surface 601 of the suspension structure 600 overlap and adhere to each other, and the probe 500 is perpendicular to the suspension structure 600.

[0116] The probe assembly suspension fixture 200 enables the probe 500 to maintain a vertical state when suspended, and ensures that the probe 500 can be pressed down vertically during the pressing process, thereby ensuring the assembly accuracy of the probe 500 and the suspension structure 600.

[0117] like Figure 9 As shown, the vertical sliding assembly 230 includes a vertical sliding plate 232, a horizontal extension plate 233 and an adapter plate 234. The vertical sliding plate 232 cooperates with the vertical mounting plate 220, and the vertical sliding plate 232 can slide vertically along the vertical mounting plate 220; the horizontal extension plate 233 is horizontally arranged, and the horizontal extension plate 233 is fixed on the surface of the vertical sliding plate 232 away from the vertical mounting plate 220; the upper end of the adapter plate 234 is fixed on the horizontal extension plate 233, and the horizontal mounting surface 231 is formed on the lower surface of the adapter plate 234.

[0118] Through the combination of the three components of the vertical sliding plate 232, the horizontal extension plate 233 and the adapter plate 234, three-direction conversion can be achieved, so that the assembled vertical sliding assembly 230 can slide vertically along the vertical mounting plate 220 while conveniently and quickly forming a horizontal mounting surface 231 for fixing the clamping member 240. The vertical sliding plate 232, the horizontal extension plate 233 and the adapter plate 234 are detachably connected, and different sizes of components can be replaced according to actual installation requirements to adapt to different installation requirements.

[0119] As shown in Figure 9 The vertical sliding assembly 230 also includes a plurality of ball guides 235, which are vertically arranged and disposed between the vertical sliding plate 232 and the vertical mounting plate 220. The inner and outer rails of the ball guide 235 are fixed on the vertical sliding plate 232 and the vertical mounting plate 220, respectively. The arrangement of the ball guide 235 forms a stable sliding guide structure between the vertical sliding plate 232 and the vertical mounting plate 220, limiting the sliding direction of the vertical sliding plate 232 so that the vertical sliding plate 232 can only slide vertically. In other embodiments, other sliding guide structures can also be provided to limit the sliding direction of the vertical sliding plate 232.

[0120] As shown in Figure 9 The vertical driving assembly 250 is connected with the vertical mounting plate 220 and the vertical sliding plate 232, and drives the vertical sliding plate 232 to slide vertically relative to the vertical mounting plate 220, thereby driving the vertical sliding assembly 230 and the clamping member 240 to slide vertically as a whole, so that the probe 500 fixed on the clamping member 240 can be pressed vertically downward.

[0121] Specifically, the vertical driving assembly 250 includes an extension protrusion 251, a pressing assembly 252 and a supporting assembly 253. The extension protrusion 251 is fixed on the side surface of the vertical sliding plate 232. The pressing assembly 252 is installed on the side surface of the vertical mounting plate 220, and is located above the extension protrusion 251. The end of the pressing assembly 252 abuts against the extension protrusion 251, and the pressing assembly 252 can push the extension protrusion 251 to move vertically downward. The supporting assembly 253 is installed on the side surface of the vertical mounting plate 220, and is located below the extension protrusion 251. The end of the supporting assembly 253 abuts against the extension protrusion 251, and the supporting assembly 253 always applies an upward pushing force to the extension protrusion 251.

[0122] When the pressing assembly 252 is not in action, the support assembly 253 below the extension block 251 applies an upward pushing force, the extension block 251 is in contact with the pressing assembly 252 and the support assembly 253, so that the position of the extension block 251 remains unchanged, and the position of the vertical sliding plate 232 fixed with the extension block 251 also remains unchanged, that is, the overall position of the vertical sliding assembly 230, the clamping member 240 and the probe 500 remains unchanged.

[0123] When the probe 500 needs to be pressed down, the pressing assembly 252 applies a downward pressure to the extension block 251, so that the extension block 251 moves vertically downward, and the support assembly 253 is correspondingly compressed downward, so that the position of the vertical sliding plate 232 also slides vertically downward, that is, the overall position of the vertical sliding assembly 230, the clamping member 240 and the probe 500 moves downward.

[0124] A specific structure of the pressing assembly 252 is shown in Figure 9 The pressing assembly 252 includes an upper support ring 2521 and a screw hand lever 2522. The upper support ring 2521 is fixed to the side of the vertical mounting plate 220 and is located above the extension block 251. The central hole of the upper support ring 2521 is vertically arranged. The handle 2523 of the screw hand lever 2522 is fixed to the upper support ring 2521, and the screw rod 2524 of the screw hand lever 2522 penetrates the central hole of the upper support ring 2521 and abuts against the extension block 251 at the end. When the handle 2523 of the screw hand lever 2522 is rotated, the screw rod 2524 can move along the axis of the central hole of the upper support ring 2521.

[0125] The handle 2523 of the screw hand lever 2522 and the upper support ring 2521 are fixed to the side of the vertical mounting plate 220. When the extension block 251 needs to be pressed vertically downward, the handle 2523 of the screw hand lever 2522 is rotated to move the screw rod 2524 of the screw hand lever 2522 downward, so as to press the extension block 251 downward, thereby making the position of the vertical sliding plate 232 slide vertically downward, that is, the overall position of the vertical sliding assembly 230, the clamping member 240 and the probe 500 moves downward.

[0126] In other embodiments, the pressing assembly 252 can also be other structures that can realize the pressing of the extension block 251.

[0127] A specific structure of the support assembly 253 is shown in Figure 9The support assembly 253 includes a lower support ring 2531 fixed on the side surface of the vertical mounting plate 220, a support rod 2532, and an elastic member 2533. The lower support ring 2531 is located below the extension protrusion 251, and the central hole of the lower support ring 2531 is vertically arranged. The support rod 2532 passes through the central hole of the lower support ring 2531 and can move along the axial direction of the lower support ring 2531. The end of the support rod 2532 abuts against the extension protrusion 251. The elastic member 2533 is connected to the lower support ring 2531 and the support rod 2532, and always applies an upward pushing force to the support rod 2532.

[0128] The elastic member 2533 always applies an upward pushing force to the support rod 2532, so that the support rod 2532 always abuts against the extension protrusion 251, and the extension protrusion 251 can always maintain the state of abutting against the pressing assembly 252.

[0129] In other embodiments, the support assembly 253 can also be other structures that can support the extension protrusion 251.

[0130] As shown in Figure 9 and Figure 10 , the extension protrusion 251 includes a protrusion body 2511 and two rolling balls 2512. The protrusion body 2511 is fixed to the vertical sliding plate 232, and the surface of the protrusion body 2511 facing the pressing assembly 252 and the support assembly 253 is provided with a recess 2513. The rolling balls 2512 are placed in the recess 2513, and the highest point of the rolling balls 2512 protrudes to the surface of the protrusion body 5111. The pressing assembly 252 and the support assembly 253 abut against the rolling balls 2512.

[0131] The shape and size of the recess 2513 are matched with the rolling balls 2512, so as to ensure that the rolling balls 2512 can be stably placed in the recess 2513. The rolling balls 2512 are made of wear-resistant material and have smooth surface, so that the friction between the pressing assembly 252, the support assembly 253 and the rolling balls 2512 is greatly weakened, the vertical force between the pressing assembly 252, the support assembly 253 and the rolling balls 2512 is the main acting force, and the accuracy of the vertical movement transmission between the pressing assembly 252, the support assembly 253 and the extension protrusion 251 is ensured, so that the phenomenon of action jamming does not occur.

[0132] As shown in Figure 9 , Figures 11-12As shown, the clamping piece 240 comprises a clamping block 241 and an elastic rubber band 242, the clamping block 241 is fixed on the horizontal mounting surface 231, and the clamping block 241 is provided with a vertical positioning groove 2411; the bottom surface 2412 of the positioning groove 2411 can be completely fitted with the probe 500, so that the probe 500 is vertically placed; the clamping block 241 is provided with a horizontal limiting through hole 2413, one end of the limiting through hole 2413 extends into the positioning groove 2411; the elastic rubber band 242 passes through the limiting through hole 2413 and can be sleeved on the probe 500 located in the positioning groove 2411; the elastic rubber band 242 tightens the probe 500, so that the probe 500 is tightly attached to the bottom surface 2412 of the positioning groove 2411.

[0133] When the elastic rubber band 242 tightens the probe 500, the probe 500 is tightly attached to the bottom surface 2412 of the positioning groove 2411, and the probe 500 can maintain a vertical state. The above-mentioned fixing mode of the probe 500 is simple, convenient to disassemble and accurate in positioning. The elastic rubber band 242 has appropriate elasticity and can apply appropriate pressure to the probe 500, so that the probe 500 is not damaged and is stably attached to the bottom surface 2412 of the positioning groove 2411.

[0134] As shown in Figure 8 The mounting seat 210 comprises a support pad plate 212, a suspension and combination plate 213 and two suspension arms 214, the support pad plate 212 is used for being fixed on the mounting platform 100; the suspension and combination plate 213 is vertically arranged; one end of the suspension arm 214 is fixed on the support pad plate 212, and the other end of the suspension arm 214 is fixed with the suspension and combination plate 213, and one side of the suspension and combination plate 213 away from the suspension arm 214 forms a vertical mounting surface 211.

[0135] The support pad plate 212 serves as a base and ensures the stability of the probe assembly suspension clamp 200 as a whole; the vertical mounting surface 211 of the suspension and combination plate 213 is used for fixing the vertical mounting plate 220; and the support pad plate 212 and the suspension and combination plate 213 are connected by the two suspension arms 214, a hollow is formed between the two suspension arms 214, and the overall weight of the mounting seat 210 is reduced. The support pad plate 212, the suspension and combination plate 213 and the suspension arm 214 are detachably connected, different sizes of components can be replaced according to actual installation requirements, so as to adapt to different installation requirements.

[0136] When assembling, the clamping piece 240 clamps the probe 500 to keep the probe 500 in a vertical state; the suspension structure 600 is horizontally placed on the three-axis displacement table 300, and the three-axis displacement table 300 moves horizontally or vertically to make the center point of the center circular surface 601 of the suspension structure 600 coincide with the center point of the bottom end surface 501 of the probe 500 in the vertical direction and keep a preset distance; the vertical driving assembly 250 can drive the vertical sliding assembly 230 to vertically slide relative to the vertical mounting plate 220, so that the probe 500 is vertically pressed downward, and the bottom end surface 501 of the probe 500 is in contact with and adhered to the center circular surface 601 of the suspension structure 600, thereby realizing the fixation between the probe 500 and the suspension structure 600.

[0137] The mounting platform 100 fixed by the probe assembly suspension clamp 200, the three-axis displacement table 300 and the visual acquisition module 400 is an air floating platform. The air floating platform can reduce the influence of external vibration on the assembly process, thereby further improving the assembly precision. The mounting platform 100 is provided with a plurality of mounting positions, and the probe assembly suspension clamp 200, the three-axis displacement table 300 and the visual acquisition module 400 can select the mounting position according to the actual installation requirement.

[0138] As shown in Figure 13 , the assembly method of the high-precision probe assembly system comprises the following steps:

[0139] S100, mounting the probe 500 on the probe assembly suspension clamp 200, and fixing the suspension structure 600 on the side of the three-axis displacement table 300 facing the probe assembly suspension clamp 200;

[0140] S200, the visual acquisition module 400 acquires the initial position images of the center circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500;

[0141] S300, the three-axis displacement table 300 moves according to the initial position images of the center circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500, until the center point of the center circular surface 601 of the suspension structure 600 coincides with the center point of the bottom end surface 501 of the probe 500 in the vertical direction and keeps a preset distance;

[0142] S400, the probe assembly suspension clamp 200 controls the probe 500 to press downward until the bottom end surface 501 of the probe 500 is adhered to the center circular surface 601 of the suspension structure 600.

[0143] Using the above assembly method, full-automatic assembly of the probe can be realized, the assembly precision and efficiency are improved, and the requirements of the micro-nano measurement technology on the measuring probe can be met.

[0144] As shown in Figure 14 , step S300 comprises the following steps:

[0145] S301, set the preset Z-direction distance L of the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 along the Z direction zs ;

[0146] S302, according to the initial position image, calculate the initial X-direction distance L of the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 along the X direction x0 , the initial Y-direction distance L along the Y direction y0 , the initial Z-direction distance L along the Z direction z0 ;

[0147] S303, according to the initial X-direction distance L x0 , the initial Y-direction distance L y0 , and the initial Z-direction distance L z0 , calculate the X-direction moving distance S x , the Y-direction moving distance S y , and the Z-direction moving distance S z of the three-axis displacement table 300, the X-direction moving distance S x =L x0 , the Y-direction moving distance S y =L y0 , and the Z-direction moving distance S z =L z0 -L zs ;

[0148] S304, the three-axis displacement table 300 moves the X-direction moving distance S x along the X direction, the Y-direction moving distance S y along the Y direction, and the Z-direction moving distance S z along the Z direction;

[0149] S305, the vision acquisition module 400 acquires the real-time position image of the center circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500 again;

[0150] S306, according to the real-time position image, calculate the real-time X-direction distance L of the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 along the X direction xi , the real-time Y-direction distance L along the Y direction yi , and the real-time Z-direction distance L along the Z direction zi ;

[0151] S307, if L xi =0, L yi =0, and L zi =L zs , execute step S400; if Lxi ≠0, or L yi ≠0, or L zi ≠L zs then step S308 is executed;

[0152] S308, according to real-time X-direction distance L xi , real-time Y-direction distance L yi , real-time Z-direction distance L zi , X-direction adjustment distance S xi , Y-direction adjustment distance S yi and Z-direction adjustment distance S zi of the three-axis displacement stage 300 are calculated. xi xi yi yi zi zi zs

[0153] S309, the three-axis displacement stage 300 is moved by X-direction adjustment distance S xi in X-direction, by Y-direction adjustment distance S yi in Y-direction, and by Z-direction adjustment distance S zi in Z-direction, and step S305 is executed.

[0154] First, initial X-direction distance L x0 , initial Y-direction distance L y0 and initial Z-direction distance L z0 obtained according to the initial position image are used to control the initial movement of the three-axis displacement stage 300. Then, the real-time position image is collected by the vision acquisition module 400, and real-time X-direction distance L xi , real-time Y-direction distance L yi and real-time Z-direction distance L zi obtained according to the calculation are used to confirm whether the three-axis displacement stage 300 has been moved to the position. If yes, step 400 is executed, and the probe assembly suspension clamp 200 controls the probe 500 to be pressed down; if not, the three-axis displacement stage 300 is controlled to move again according to real-time X-direction distance L xi , real-time Y-direction distance L yi and real-time Z-direction distance L zi , and after the movement is completed, the vision acquisition module 400 collects the real-time position image again to detect whether the three-axis displacement stage 300 has been moved to the position.

[0155] ​​​​​​​By collecting real-time position images through the visual acquisition module 400, the relative positions of the suspension structure 600 and the probe 500 are fed back in real time to guide the movement of the three-axis translation stage 300. Multiple iterative adjustments can be completed in a short period of time, ensuring that the three-axis translation stage 300 moves into place, ensuring the accuracy of the final relative position of the suspension structure 600 and the probe 500, and ultimately achieving precise bonding and assembly of the probe 500 and the suspension structure 600.

[0156] The probe assembly suspension fixture 200 controls the probe 500 to press down for a distance T, and the preset Z-direction distance L is zs =T-0.1μm. Preset Z-direction distance L zs , which is 0.1 μm less than the distance that the probe 500 is pressed down; when the probe assembly suspension fixture 200 controls the probe 500 to be pressed down, after the probe 500 contacts the suspension structure 600, the probe 500 continues to press down by 0.1 μm, so that the probe 500 generates a certain pressure on the suspension structure 600, thereby ensuring the adhesion between the probe 500 and the suspension structure 600.

[0157] When the visual acquisition module 400 is composed of an X-direction visual acquisition device 401 and a Y-direction visual acquisition device 402, the initial position image includes an X-direction initial position image and a Y-direction initial position image. The X-direction initial position image is taken by the X-direction visual acquisition device 401, and the Y-direction initial position image is taken by the Y-direction visual acquisition device 402. The initial X-direction distance L x0 Obtained by calculating the initial X-axis position image, the initial Y-axis distance L y0 Obtained by calculating the initial Y position image; initial Z distance L z0 =(L z0X +L z0Y ) / 2,L z0X is the initial Z-direction distance between the center point of the central circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 calculated according to the X-direction initial position image, and L z0Y is the initial Z-direction distance between the center point of the central circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 along the Z-direction, obtained by calculation based on the Y-direction initial position image.

[0158] The X-direction visual acquisition device 401 and the Y-direction visual acquisition device 402 acquire X-direction initial position images and Y-direction initial position images from the X and Y directions, and calculate the initial distance through the initial position images in two different directions, thereby ensuring the integrity of image acquisition and improving the accuracy of initial distance calculation.

[0159] Wherein, the real-time position image comprises an X-direction real-time position image and a Y-direction real-time position image, the X-direction real-time position image is shot by the X-direction visual acquisition device 401, and the Y-direction real-time position image is shot by the Y-direction visual acquisition device 402; the real-time X-direction distance L xi is calculated through the X-direction real-time position image, the real-time Y-direction distance L yi is calculated through the Y-direction real-time position image; the real-time Z-direction distance L zi = (L ziX + L ziY ) / 2, L ziX is a real-time Z-direction distance of the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 along the Z-direction, which is calculated according to the X-direction real-time position image, L ziY is a real-time Z-direction distance of the center point of the center circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 along the Z-direction, which is calculated according to the Y-direction real-time position image.

[0160] The X-direction visual acquisition device 401 and the Y-direction visual acquisition device 402 acquire the X-direction real-time position image and the Y-direction real-time position image from the X and Y directions, calculate the real-time distance through the real-time position images in two different directions, ensure the integrity of image acquisition, and improve the accuracy of real-time distance calculation.

[0161] The high-precision probe assembly system and the assembly method, the visual acquisition module acquires the relative position image of the center circular surface of the suspension structure and the bottom end surface of the probe, then the control module calculates the relative distance of the center circular surface of the suspension structure and the bottom end surface of the probe according to the image, the three-axis displacement table moves according to the calculated relative distance, so that the probe is aligned with the center circular surface of the suspension structure; in the alignment process, the visual acquisition module acquires the relative position image in real time, and feeds back to the three-axis displacement table after calculation by the control module, so that the alignment process of the probe and the center circular surface of the suspension structure is fully automated, the alignment precision is high, and the speed is fast; in combination with the specially-made probe assembly suspension clamp, the probe is controlled to be pressed vertically downward, and finally the precise bonding assembly of the probe and the suspension structure is realized.

[0162] The present application is not limited to the above-mentioned embodiments, and any changes in shape or structure fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims, and those skilled in the art can make various changes or modifications to the embodiments without departing from the principles and essence of the present application, but these changes and modifications fall within the scope of protection of the present application.

Claims

1. A high-precision probe assembly system, characterized in that: include: Installation platform; A probe assembly suspension fixture is fixed to the mounting platform and is used to suspend the probe and control the probe to be pressed down and adhered to the suspension structure; A three-axis translation stage, the three-axis translation stage is fixed to the mounting platform, the three-axis translation stage is located below the probe assembly suspension fixture, the side of the three-axis translation stage facing the probe assembly suspension fixture is used to fix the suspension structure, and the three-axis translation stage can move horizontally or vertically; A visual acquisition module is fixed on the mounting platform, and is used to acquire a relative position image of the central circular surface of the suspension structure and the bottom end surface of the probe; the three-axis translation stage is used to move with reference to the relative position image until the center point of the central circular surface of the suspension structure and the center point of the bottom end surface of the probe coincide with each other in the vertical direction and maintain a preset distance.

2. The high-precision probe assembly system according to claim 1, wherein: The high-precision probe assembly system also includes a control module, which is used to calculate the relative distance data between the center point of the central circular surface of the suspension structure and the center point of the bottom end surface of the probe based on the relative position image; the control module is also used to control the movement of the three-axis translation stage according to the relative distance data until the center point of the central circular surface of the suspension structure and the center point of the bottom end surface of the probe coincide in the vertical direction and maintain a preset distance.

3. The high-precision probe assembly system according to claim 1, wherein: The three-axis translation stage comprises: A displacement platform pad, the displacement platform pad being fixed to the mounting platform; A three-axis displacement component, the three-axis displacement component is fixed to the displacement platform pad, and the three-axis displacement component is connected to the visual acquisition module signal; A suspension structure mounting assembly is fixed above the three-axis displacement assembly, and the suspension structure is fixed on a side of the suspension structure mounting assembly facing the probe assembly suspension fixture; the three-axis displacement assembly can drive the suspension structure mounting assembly to move in the horizontal or vertical direction.

4. The high-precision probe assembly system according to claim 3, wherein: The three-axis displacement assembly includes: A bottom plate, the bottom plate being fixed to the displacement platform pad; an X-direction displacement plate, the lower surface of which cooperates with the upper surface of the base plate, and the X-direction displacement plate can move along the X-direction relative to the base plate; a Y-direction displacement plate, the lower surface of which cooperates with the upper surface of the X-direction displacement plate, and the Y-direction displacement plate can move along the Y direction relative to the X-direction displacement plate; A Z-direction support cylinder, the Z-direction support cylinder being fixed to the upper surface of the Y-direction displacement plate; A Z-direction lifting block is installed in the Z-direction support tube, the Z-direction lifting block is fixed to the suspension structure mounting assembly, and the Z-direction lifting block can be lifted and lowered along the Z-direction relative to the Z-direction support tube.

5. The high-precision probe assembly system according to claim 4, wherein: The three-axis displacement assembly further includes an X-direction sliding guide rail, which is installed between the X-direction displacement plate and the base plate. The X-direction displacement plate can move along the extension direction of the X-direction sliding guide rail.

6. The high-precision probe assembly system according to claim 4 or 5, characterized in that: The three-axis displacement assembly also includes an X-direction drive mechanism, which is installed between the base plate and the X-direction displacement plate. The X-direction drive mechanism is connected to the visual acquisition module signal, and the X-direction drive mechanism can drive the X-direction displacement plate to move along the X-direction according to the relative position image.

7. The high-precision probe assembly system according to claim 6, wherein: The X-direction driving mechanism comprises: An X-direction abutment block fixed to a side surface of the X-direction displacement plate; An X-direction fixing bracket, wherein the X-direction fixing bracket is fixed to a side surface of the base plate; An X-direction driving cylinder is connected to the visual acquisition module signal, the cylinder body of the X-direction driving cylinder is fixed on the X-direction fixed bracket, the end of the telescopic rod of the X-direction driving cylinder can abut against the X-direction abutment block, and the telescopic direction of the telescopic rod of the X-direction driving cylinder is parallel to the moving direction of the X-direction displacement plate.

8. The high-precision probe assembly system according to claim 4, wherein: The three-axis displacement assembly further includes a Y-direction sliding guide rail, which is installed between the Y-direction displacement plate and the X-direction displacement plate. The Y-direction displacement plate can move along the extension direction of the Y-direction sliding guide rail.

9. The high-precision probe assembly system according to claim 4 or 8, characterized in that: The three-axis displacement assembly also includes a Y-direction drive mechanism, which is installed between the X-direction displacement plate and the Y-direction displacement plate. The Y-direction drive mechanism is connected to the signal of the visual acquisition module. The Y-direction drive mechanism can drive the Y-direction displacement plate to move along the Y-direction according to the relative position image.

10. The high-precision probe assembly system according to claim 9, wherein: The Y-direction driving mechanism comprises: A Y-direction abutment block, the Y-direction abutment block being fixed on a side surface of the Y-direction displacement plate; A Y-direction fixed bracket, wherein the Y-direction fixed bracket is fixed to a side surface of the X-direction displacement plate; A Y-direction driving cylinder is connected to the visual acquisition module signal, the cylinder body of the Y-direction driving cylinder is fixed on the Y-direction fixed bracket, the end of the telescopic rod of the Y-direction driving cylinder can abut against the Y-direction abutment block, and the telescopic direction of the telescopic rod of the Y-direction driving cylinder is parallel to the moving direction of the Y-direction displacement plate.

11. The high-precision probe assembly system according to claim 4, wherein: The three-axis displacement assembly also includes a Z-direction drive mechanism, which is installed between the Z-direction support cylinder and the Z-direction lifting block. The Z-direction drive mechanism is connected to the signal of the visual acquisition module. The Z-direction drive mechanism can drive the Z-direction lifting block to move along the Z direction according to the relative position image.

12. The high-precision probe assembly system according to claim 11, wherein: The Z-direction driving mechanism comprises: A rotating support block, wherein the rotating support block is fixed on the inner wall of the Z-direction support cylinder; A rotating block, the rotating block is pivotally connected to the rotating support block, the rotating axis of the rotating block is horizontally arranged, and the rotating support block and the rotating block are located below the Z-direction lifting block; A rotary drive cylinder, the rotary drive cylinder is signal-connected to the visual acquisition module, the cylinder body of the rotary drive cylinder is fixed on the Z-direction support cylinder, and the telescopic rod of the rotary drive cylinder extends into the Z-direction support cylinder; the telescopic rod of the rotary drive cylinder can support the rotating block, causing the rotating block to rotate upward, thereby causing the rotating block to lift the Z-direction lifting block from below the Z-direction lifting block.

13. The high-precision probe assembly system according to claim 3, wherein: The suspension structure mounting assembly comprises: A suspension support plate, the suspension support plate being fixed above the triaxial displacement assembly, the upper surface of the suspension support plate being provided with an upwardly protruding support convex ring, the shape of the support convex ring matching the shape of the edge of the suspension structure; The upper pressure plate includes an upper pressure ring and a fixed foot fixed to the upper pressure ring. The shape of the upper pressure ring matches the shape of the supporting convex ring. The upper pressure ring and the supporting convex ring clamp the edge of the suspension structure in the middle. The fixed foot can be fixed to the suspension support plate.

14. The high-precision probe assembly system according to claim 1, wherein: The probe assembly suspension fixture comprises: A mounting base, the mounting base being used to be fixed on the mounting platform, the mounting base being provided with a vertical mounting surface arranged vertically; A vertical mounting plate fixed to the vertical mounting surface of the mounting base; A vertical sliding assembly is mounted on the vertical mounting plate and can slide vertically along the vertical mounting plate; a horizontal mounting surface is provided below the vertical sliding assembly; A clamping member, the clamping member is fixed to the horizontal mounting surface, and the clamping member is used to clamp the probe to keep the probe in a vertical state; A vertical drive assembly is connected to the vertical mounting plate and the vertical sliding assembly, and the vertical drive assembly drives the vertical sliding assembly to slide vertically relative to the vertical mounting plate.

15. The high-precision probe assembly system according to claim 1, wherein: The visual acquisition module includes an X-direction visual acquisition device and a Y-direction visual acquisition device. The lens shooting direction of the X-direction visual acquisition device is set along the Y direction, and the lens shooting direction of the Y-direction visual acquisition device is set along the X direction.

16. A high-precision probe assembly method, using the high-precision probe assembly system according to any one of claims 1 to 15, characterized in that: The probe assembly method comprises the following steps: S100, mounting the probe on the probe assembly suspension fixture, wherein the suspension structure is fixed to a side of the three-axis translation stage facing the probe assembly suspension fixture; S200, the visual acquisition module acquires initial position images of the central circular surface of the suspension structure and the bottom end surface of the probe; S300, the three-axis translation stage moves according to the initial position images of the central circular surface of the suspension structure and the bottom end surface of the probe until the center point of the central circular surface of the suspension structure and the center point of the bottom end surface of the probe coincide with each other in the vertical direction and maintain a preset distance; S400: The probe assembly suspension fixture controls the probe to be pressed downward until the bottom end surface of the probe adheres to the central circular surface of the suspension structure.

17. The high-precision probe assembly method according to claim 16, wherein: The step S300 includes the following steps: S301, setting a preset Z-direction distance L between the center point of the central circle surface of the suspension structure and the center point of the bottom end surface of the probe along the Z direction zs ; S302: Calculate the initial X-direction distance L between the center point of the central circle of the suspension structure and the center point of the bottom end surface of the probe according to the initial position image. x0 , the initial Y distance L along the Y direction y0 , initial Z distance L along the Z direction z0 ; S303, according to the initial X-direction distance L x0 , initial Y distance L y0 , initial Z distance L z0 , calculate the X-axis moving distance S of the three-axis translation stage x , Y-axis moving distance S y And Z-direction moving distance S z , the X-direction moving distance S x =L x0 , the Y-direction moving distance S y =L y0 , the Z-direction moving distance S z =L z0 -L zs ; S304, the three-axis translation stage moves S along the X direction x , move S along the Y direction y , move S along the Z direction z ; S305, the visual acquisition module again acquires real-time position images of the central circular surface of the suspension structure and the bottom end surface of the probe; S306: Calculate the real-time X-direction distance L between the center point of the central circle of the suspension structure and the center point of the bottom end surface of the probe according to the real-time position image. xi , Real-time Y distance L along the Y direction yi , Real-time Z distance L along the Z direction zi ; S307, if L xi =0, and L yi =0, and L zi =L zs , then execute step S400; if L xi ≠0, or L yi ≠0, or L zi ≠L zs , then execute step S308; S308: Based on the real-time X-direction distance L xi , Real-time Y distance L yi , Real-time Z distance L zi , calculate the X-axis adjustment distance S of the three-axis translation stage xi , Y-axis adjustment distance S yi And Z-axis adjustment distance S zi , the X-axis adjustment distance S xi =L xi , the Y-axis adjustment distance S yi =L yi , the Z-direction adjustment distance S zi =L zi -L zs ; S309, the three-axis translation stage moves S along the X direction xi , move S along the Y direction yi , move S along the Z direction zi , execute step S305.

18. The high-precision probe assembly method according to claim 17, wherein: The probe assembly suspension fixture controls the probe to be pressed down for a distance T, and the preset Z-direction distance L zs =T-0.1μm.

19. The high-precision probe assembly method according to claim 17, wherein: The visual acquisition module includes an X-direction visual acquisition device and a Y-direction visual acquisition device, wherein the lens shooting direction of the X-direction visual acquisition device is arranged along the Y direction, and the lens shooting direction of the Y-direction visual acquisition device is arranged along the X direction; The initial position image includes an X-direction initial position image and a Y-direction initial position image, wherein the X-direction initial position image is taken by the X-direction vision acquisition device, and the Y-direction initial position image is taken by the Y-direction vision acquisition device; The initial X-direction distance L x0 The initial Y distance L is obtained by calculating the initial X-direction position image. y0 Obtained by calculating the Y-direction initial position image; The initial Z-direction distance L z0 =(L z0X +L z0Y ) / 2, the L z0X is the initial Z-direction distance between the center point of the central circle surface of the suspension structure and the center point of the bottom end surface of the probe, which is calculated based on the X-direction initial position image. z0Y The initial Z-direction distance between the center point of the central circle surface of the suspension structure and the center point of the bottom end surface of the probe, obtained by calculation based on the Y-direction initial position image, is the initial Z-direction distance along the Z-direction between the center point of the central circle surface of the suspension structure and the center point of the bottom end surface of the probe.

20. The high-precision probe assembly method according to claim 19, wherein: The real-time position image includes an X-direction real-time position image and a Y-direction real-time position image, wherein the X-direction real-time position image is taken by the X-direction visual acquisition device, and the Y-direction real-time position image is taken by the Y-direction visual acquisition device; The real-time X-direction distance L xi The real-time Y distance L is obtained by calculating the real-time X-axis position image. yi Obtained by calculating the Y-direction real-time position image; The real-time Z-direction distance L zi =(L ziX +L ziY ) / 2, the L ziX is the real-time Z-direction distance between the center point of the central circle surface of the suspension structure and the center point of the bottom end surface of the probe, which is calculated based on the X-direction real-time position image. ziY It is the real-time Z-direction distance between the center point of the central circle surface of the suspension structure and the center point of the bottom end surface of the probe obtained by calculation based on the Y-direction real-time position image.

Images