Production equipment with corner protection structure for integrated circuit

Abstract

The invention relates to integrated circuit production, in particular to integrated circuit production equipment with a corner protection structure, which comprises a device main body, a rectangular groove is formed in the surface of the device main body, a placement panel is located at the upper end of the rectangular groove, a servo motor is started at the moment, and the servo motor drives a first connecting column and a bidirectional screw rod to rotate; the two four-corner protection frames can protect the corners of the circuit board, the problem of uneven stress caused by installation deviation of a traditional clamp is avoided, the corner extrusion risk caused by asymmetry of left and right clamping force is solved, when the long block is moved to drive the four-corner protection frames to be close synchronously, the four-corner protection frames on the two sides can cover the corners of the circuit board, and therefore the circuit board is protected. The inner sides of the four-corner protection frames are made of elastic materials, when the four-corner protection frames make contact with a circuit board, concentrated pressure directly applied by a clamp originally can be converted into evenly-distributed surface contact force, stress is dispersed to larger areas of corners through the design, local pressure is prevented from exceeding a material strength threshold value, and therefore cracks or corner chipping is prevented.

Description

TECHNICAL FIELD

[0001] The present application relates to integrated circuit production, in particular to a production device with corner protection structure for integrated circuits. BACKGROUND

[0002] Integrated circuit production devices are used to manufacture integrated circuit chips, each device has different functions, an oxidation furnace generates a silicon dioxide insulating layer on the surface of a silicon wafer through a high-temperature oxidation process, which plays a role in isolation and protection, a photolithography device uses optical principles to transfer circuit patterns to a silicon wafer coated with photoresist, which is the key to determining the layout of the chip circuit, an etching device accurately transfers patterns on the photoresist to a silicon wafer or other material layer through chemical or physical methods to form circuit structures, an ion implantation device implants specific ions into a silicon wafer to change the electrical properties of semiconductor materials to achieve the doping process of the device, a thin film deposition device deposits various functional thin films such as conductive layers and insulating layers on the surface of the silicon wafer to build different levels of circuits, and a diffusion furnace is used for impurity diffusion to form a specific impurity distribution inside the silicon wafer to achieve control of the electrical properties of the device. These devices work together to complete the complex process of chip design and manufacturing.

[0003] However, during the implementation of the above technical solution, at least the following technical problems are found:

[0004] During the programming process of the integrated circuit production device, the clamp needs to accurately fix the corners of the circuit board to ensure the accuracy and stability of the programming operation. If the clamp has installation deviations such as angle deviation and position misalignment, the corners will be subjected to unreasonable extrusion due to abnormal stress direction during the clamping process of the circuit board. Under the combined action of these factors, the corner material of the circuit board will deform due to the inability to withstand excessive pressure, and cracks will occur, and in severe cases, the corners may even collapse. These damages not only affect the appearance quality of the circuit board, but also may cause the performance of the circuit board to decline, affecting the normal production of integrated circuits. SUMMARY

[0005] The technical problem solved is that during the programming process of the integrated circuit production device, the clamp needs to accurately fix the corners of the circuit board to ensure the accuracy and stability of the programming operation. If the clamp has installation deviations such as angle deviation and position misalignment, the corners will be subjected to unreasonable extrusion due to abnormal stress direction during the clamping process of the circuit board. Under the combined action of these factors, the corner material of the circuit board will deform due to the inability to withstand excessive pressure, and cracks will occur, and in severe cases, the corners may even collapse. These damages not only affect the appearance quality of the circuit board, but also may cause the performance of the circuit board to decline, affecting the normal production of integrated circuits.

[0006] In view of the deficiencies of the prior art, the present application provides a production device with corner protection structure for integrated circuits, thereby solving the technical problems mentioned in the background art.

[0007] To achieve the above object, the present application is implemented by the following technical solutions:

[0008] A production device with corner protection structure for integrated circuits, comprising a device main body, a rectangular groove is formed on the surface of the device main body, a placement panel is fixedly connected to the surface of the device main body, the placement panel is located at the upper end of the rectangular groove, a bidirectional screw rod is arranged inside the rectangular groove, both ends of the bidirectional screw rod are rotatably connected to the inner wall of the device main body, both ends of the bidirectional screw rod are provided with a limiting slide rod, both ends of the two limiting slide rods are fixedly connected to the inner wall of the device main body, both ends of the bidirectional screw rod are threadedly sleeved with a moving long block, four corner protection frames are arranged at the upper end of the two moving long blocks, the openings of the two four corner protection frames are opposite, and the two moving long blocks are movably sleeved with the two limiting slide rods.

[0009] In a possible implementation manner, the right end of the bidirectional screw rod is fixedly connected with a first connecting column, the first connecting column is rotatably connected with the device main body, the right end of the device main body is fixedly connected with a U-shaped support plate, and the U-shaped support plate corresponds in position to the first connecting column.

[0010] In a possible implementation manner, the right surface of the U-shaped support plate is fixedly connected with a servo motor, and the output port of the servo motor is fixedly connected with the right surface of the first connecting column through the U-shaped support plate.

[0011] In a possible implementation manner, the right end of the device main body is provided with two chain wheels, and the front chain wheel is fixedly connected with the first connecting column.

[0012] In a possible implementation manner, the right end of the device main body is provided with a synchronous chain, and the front and rear ends of the synchronous chain are meshingly connected with the chain wheels.

[0013] In a possible implementation manner, the side surface of the device main body is sleeved with a connecting long rod, the connecting long rod is rotatably connected with the device main body, and the right surface of the connecting long rod is fixedly connected with the rear chain wheel.

[0014] In a possible implementation manner, both ends of the connecting long rod are fixedly connected with rotary bevel gears, and the upper ends of the two rotary bevel gears are perpendicularly meshed with meshing bevel gears.

[0015] In a possible implementation manner, the upper ends of the two meshing bevel gears are fixedly connected with second connecting columns, and the upper ends of the two second connecting columns are fixedly connected with rotary gears.

[0016] In a possible implementation, the opposite ends of the two rotating gears are connected with gear strips, the opposite ends of the two gear strips are fixedly connected with connecting long plates, the lower ends of the two connecting long plates are provided with T-shaped limiting sliding grooves, and the two connecting long plates are slidably connected with T-shaped limiting sliding blocks through the T-shaped limiting sliding grooves.

[0017] In a possible implementation, the lower ends of the two T-shaped limiting sliding blocks are fixedly connected with the device body, and a rubber cleaning brush is arranged between the two connecting long plates, and the two ends of the rubber cleaning brush are fixedly connected with the corresponding connecting long plates.

[0018] Compared with the prior art, the beneficial effects are as follows:

[0019] 1. In the scheme, the staff places the circuit board on the upper end of the placing panel, at this time, the servo motor is started, the servo motor drives the first connecting column and the bidirectional screw rod to rotate, because the screw thread directions of the two ends of the bidirectional screw rod are opposite, the two moving long blocks will move towards each other along the limiting sliding rod with the rotation of the bidirectional screw rod, the two moving long blocks drive the corresponding four-corner protective frames to move towards each other synchronously, until the two four-corner protective frames completely cover the edges and corners of the circuit board on the placing panel, at this time, the two four-corner protective frames play a protective role for the edges and corners of the circuit board, when the servo motor drives the bidirectional screw rod to rotate, because the screw thread directions of the two ends are opposite, the two moving long blocks will move symmetrically towards each other along the limiting sliding rod, this design ensures that the moving speed and displacement of the two four-corner protective frames are completely consistent, avoids the problem of uneven stress caused by installation deviation of the traditional clamp, solves the risk of edge and corner extrusion caused by asymmetric left and right clamping forces, when the moving long blocks drive the four-corner protective frames to move towards each other synchronously, the two four-corner protective frames will cover the edges and corners of the circuit board, the inner side of the four-corner protective frame is made of elastic material, when contacting the circuit board, the concentrated pressure originally applied by the clamp can be converted into uniformly distributed surface contact force, this design disperses the stress to a larger area of the edges and corners, avoids the local pressure exceeding the material strength threshold, thereby preventing the generation of cracks or corner collapse;

[0020] 2. In the scheme, the limiting sliding rod is connected with the moving long block through the movable sleeve, the limiting sliding rod provides accurate guidance for the rotational movement of the bidirectional screw rod, ensures the stable sliding of the moving long block on the straight track, avoids the influence of movement deviation on the positioning accuracy of the four-corner protective frame, this high-precision movement control enables the four-corner protective frame to accurately cover the edges and corners of the circuit board, effectively improves the reliability of the protection effect, the structure of the limiting sliding rod enhances the stability of the whole system, the limiting sliding rod shares the lateral force generated by the moving long block during the movement process, reduces the additional load of the bidirectional screw rod, reduces the mechanical wear and failure risk, prolongs the service life of the equipment;

[0021] 3. In this scheme, the rotation of the first connecting column will drive the synchronous rotation of the front end sprocket fixedly connected therewith, since the synchronous chain is engaged with the front and rear sprockets, the rotation of the front end sprocket will be transmitted to the rear end sprocket through the synchronous chain, so that the two sprockets keep synchronous rotation, the rotation of the rear end sprocket further drives the rotation of the connecting long rod connected therewith, the rotating bevel gears at both ends of the connecting long rod synchronously rotate, since the rotating bevel gears are vertically engaged with the meshing bevel gears, the rotation of the rotating bevel gears will drive the meshing bevel gears to rotate around the vertical shaft, and then drive the second connecting column and the rotating gear fixedly connected with the meshing bevel gears to synchronously rotate, the two rotating gears are respectively engaged with the corresponding gear strips, with the rotation of the rotating gear, the gear strips will move forward in a straight line, thereby driving the connecting long plate and the rubber cleaning brush connected therewith to synchronously move forward, when the rubber cleaning brush passes through the circuit board on the placement panel, the bristles thereof will contact the surface of the circuit board, effectively removing dust, debris and other impurities on the surface of the circuit board, ensuring the cleanliness and reliability of the circuit board in the subsequent processing process;

[0022] 4. In this scheme, the T-shaped limiting sliding block and the T-shaped limiting sliding groove at the bottom of the connecting long plate form a sliding fit, which provides accurate guidance for the straight line motion of the connecting long plate, this design ensures that the rubber cleaning brush always maintains a straight trajectory during movement, avoiding deviation or shaking, thereby improving the accuracy and consistency of cleaning the surface of the circuit board; BRIEF DESCRIPTION OF DRAWINGS

[0023] The above description is only a summary of the technical scheme of the present application, in order to more clearly understand the technical means of the present application, and can be implemented according to the content of the specification, as follows. The preferred embodiments of the present application are described in detail below with the help of the drawings.

[0024] Figure 1 The overall structure of the present application is shown in the figure;

[0025] Figure 2 The structure of the bidirectional screw rod of the present application is shown in the figure;

[0026] Figure 3 The result of the first connecting column of the present application is shown in the figure;

[0027] Figure 4 The result of the rubber cleaning brush of the present application is shown in the figure;

[0028] Figure 5 The result of the gear strip of the present application is shown in the figure;

[0029] Figure 6 The result of the connecting long plate of the present application is shown in the figure.

[0030] Illustration: 11, device main body; 12, rectangular groove; 13, placing panel; 14, four-corner protection frame; 15, rubber cleaning brush; 16, rotating gear; 17, connecting long plate; 18, two-way screw rod; 19, moving long block; 20, limiting sliding rod; 21, first connecting column; 22, U-shaped support plate; 23, chain wheel; 24, servo motor; 25, connecting long rod; 26, gear long strip; 27, second connecting column; 28, synchronous chain; 29, rotating bevel gear; 30, meshing bevel gear; 31, T-shaped limiting sliding groove; 32, T-shaped limiting sliding block. DETAILED DESCRIPTION

[0031] The preferred embodiments of the present application will be described in detail by referring to the attached drawings, however the present application can be realized in various different forms, therefore the present application is not limited to the embodiments described below, in addition, in order to more clearly describe the present application, components not connected with the invention will be omitted from the drawings;

[0032] The technical solutions in the embodiments of the present application are to solve the problems in the above background art, and the general idea is as follows:

[0033] Embodiment:

[0034] Please refer to Figure 1 and Figure 6As shown, the embodiment introduces a production equipment with corner protection structure for integrated circuits, including device main body 11, the surface of device main body 11 is provided with rectangular groove 12, the surface of device main body 11 is fixedly connected with placing panel 13, placing panel 13 is located at the upper end of rectangular groove 12, the inside of rectangular groove 12 is provided with bidirectional screw rod 18, both ends of bidirectional screw rod 18 are rotatably connected with the inner wall of device main body 11, both ends of bidirectional screw rod 18 are provided with limiting slide rod 20, both ends of two limiting slide rods 20 are fixedly connected with the inner wall of device main body 11, both ends of bidirectional screw rod 18 are threadedly sleeved with moving long block 19, the upper end of two moving long blocks 19 is provided with four-corner protection frame 14, the opening of two four-corner protection frames 14 is opposite, two moving long blocks 19 are movably sleeved with two limiting slide rods 20, the staff places the circuit board on the upper end of placing panel 13, at this time, start servo motor 24, servo motor 24 drives first connecting column 21 and bidirectional screw rod 18 to rotate, because the thread direction of both ends of bidirectional screw rod 18 is opposite, two moving long blocks 19 will approach each other along limiting slide rod 20 with the rotation of bidirectional screw rod 18, two moving long blocks 19 drive corresponding four-corner protection frames 14 to approach synchronously respectively, until two four-corner protection frames 14 completely cover the corners of the circuit board on placing panel 13, at this time, two four-corner protection frames 14 will play a protective role for the corners of the circuit board, when servo motor 24 drives bidirectional screw rod 18 to rotate, because the thread direction of both ends is opposite, two moving long blocks 19 will do symmetrical opposite motion along limiting slide rod 20, this design ensures that the moving speed and displacement of two four-corner protection frames 14 are completely consistent, avoids the problem of uneven stress caused by installation deviation of traditional clamps, solves the risk of corner extrusion caused by unsymmetrical left and right clamping force, when moving long block 19 drives four-corner protection frame 14 to approach synchronously, two four-corner protection frames 14 will cover the corners of the circuit board, the inside of four-corner protection frame 14 adopts elastic material, when contacting the circuit board, can convert the concentrated pressure originally applied by the clamp into uniform distributed surface contact force, this design disperses the stress to a larger area of the corner, avoids the local pressure exceeding the material strength threshold, thereby preventing the generation of cracks or corner collapse, limiting slide rod 20 provides accurate guidance for the rotational motion of bidirectional screw rod 18 through the movable sleeving with moving long block 19, ensures that moving long block 19 smoothly slides on the straight track, avoids the influence of motion deviation on the positioning accuracy of four-corner protection frame 14, this high-precision motion control makes four-corner protection frame 14 be able to accurately cover the corners of the circuit board, effectively improves the reliability of protection effect, the structure of limiting slide rod 20 enhances the stability of the whole system, limiting slide rod 20 shares the lateral force generated by moving long block 19 in the process of motion, reduces the additional load of bidirectional screw rod 18, reduces the mechanical wear and failure risk, prolongs the service life of the equipment.

[0035] The right end of the bidirectional screw rod 18 is fixedly connected with a first connecting column 21, the first connecting column 21 is rotatably connected with the device main body 11, the right end of the device main body 11 is fixedly connected with a U-shaped support plate 22, the U-shaped support plate 22 corresponds to the position of the first connecting column 21, the right surface of the U-shaped support plate 22 is fixedly connected with a servo motor 24, the output port of the servo motor 24 is fixedly connected with the right surface of the first connecting column 21 through the U-shaped support plate 22, the right end of the device main body 11 is provided with two chain wheels 23, the front chain wheel 23 is fixedly connected with the first connecting column 21, the rotation of the first connecting column 21 will drive the front chain wheel 23 fixedly connected therewith to rotate synchronously, since the synchronous chain 28 is engaged with the front and rear chain wheels 23, the rotation of the front chain wheel 23 will be transmitted to the rear chain wheel 23 through the synchronous chain 28, so that the two chain wheels 23 rotate synchronously, and the rotation of the rear chain wheel 23 further drives the connecting long rod 25 connected therewith to rotate.

[0036] The right end of the device body 11 is provided with a synchronous chain 28, the front and rear ends of the synchronous chain 28 are meshed and connected with the chain wheel 23, the side surface of the device body 11 is sleeved with a connecting long rod 25, the connecting long rod 25 is rotationally connected with the device body 11, the right surface of the connecting long rod 25 is fixedly connected with the rear end chain wheel 23, the two ends of the connecting long rod 25 are fixedly connected with rotating bevel gears 29, the upper ends of the two rotating bevel gears 29 are vertically meshed with meshing bevel gears 30, the upper ends of the two meshing bevel gears 30 are fixedly connected with second connecting columns 27, the upper ends of the two second connecting columns 27 are fixedly connected with rotating gears 16, the opposite ends of the two rotating gears 16 are meshed and connected with gear strips 26, the opposite ends of the two gear strips 26 are fixedly connected with connecting long plates 17, the lower ends of the two connecting long plates 17 are provided with T-shaped limiting sliding grooves 31, the two connecting long plates 17 are slidably connected with T-shaped limiting sliding blocks 32 through the T-shaped limiting sliding grooves 31, the lower ends of the two T-shaped limiting sliding blocks 32 are fixedly connected with the device body 11, a rubber cleaning brush 15 is arranged between the two connecting long plates 17, the two ends of the rubber cleaning brush 15 are fixedly connected with the corresponding connecting long plates 17, the rotating bevel gears 29 at the two ends of the connecting long rod 25 rotate synchronously, since the rotating bevel gears 29 are vertically meshed with the meshing bevel gears 30, the rotation of the rotating bevel gears 29 drives the meshing bevel gears 30 to rotate around the vertical shaft, thereby driving the second connecting columns 27 and the rotating gears 16 fixedly connected with the meshing bevel gears 30 to rotate synchronously, the two rotating gears 16 are meshed with the corresponding gear strips 26, with the rotation of the rotating gears 16, the gear strips 26 move forward in a straight line direction, thereby driving the connecting long plates 17 and the rubber cleaning brush 15 connected therewith to move forward synchronously, when the rubber cleaning brush 15 passes through the circuit board on the placement panel 13, the bristles thereof contact the surface of the circuit board, effectively removing dust, debris and other impurities on the surface of the circuit board, ensuring the cleanliness and reliability of the circuit board in the subsequent processing process, the T-shaped limiting sliding blocks 32 and the T-shaped limiting sliding grooves 31 at the bottom of the connecting long plates 17 form a sliding fit, providing accurate guidance for the straight line motion of the connecting long plates 17, this design ensures that the rubber cleaning brush 15 always maintains a straight trajectory during movement, avoiding deviation or shaking, thereby improving the accuracy and consistency of cleaning the surface of the circuit board.

[0037] Working principle:

[0038] The first step, the staff will be placed on the circuit board panel 13 upper end, at this time start servo motor 24, servo motor 24 drive first connecting column 21 and two-way screw rod 18 rotation, because the two-way screw rod 18 both ends of the screw direction is opposite, two mobile long block 19 will along with the rotation of two-way screw rod 18 and along the limit slide rod 20 each other, two mobile long block 19 drive corresponding four corner protection frame 14 synchronous close, until two four corner protection frame 14 will be placed on the circuit board panel 13 edge angle completely covered, at this time two four corner protection frame 14 will play a protective role to the edge angle of the circuit board, servo motor 24 drive two-way screw rod 18 rotation, because the two ends of the screw direction is opposite, two mobile long block 19 will along limit slide rod 20 do symmetrically to each other, this design ensures that the moving speed and displacement of two four corner protection frame 14 are completely consistent, avoids the problem of uneven stress caused by installation deviation of traditional clamp, solves the risk of edge extrusion caused by asymmetric left and right clamping force, when mobile long block 19 drive four corner protection frame 14 synchronous close, two four corner protection frame 14 will cover the edge angle of the circuit board, the inner side of four corner protection frame 14 adopts elastic material, when contacting the circuit board, can convert the concentrated pressure originally applied by the clamp into uniform distributed surface contact force, this design disperses the stress to a larger area of the edge, avoids the local pressure exceeding the material strength threshold, thereby preventing the generation of cracks or corner collapse.

[0039] The second step, limit slide rod 20 through the activity of mobile long block 19 set, limit slide rod 20 provides accurate guidance for the rotation of two-way screw rod 18, ensures the smooth sliding of mobile long block 19 on the straight line track, avoids the influence of movement deviation on the positioning accuracy of four corner protection frame 14, this high precision motion control makes four corner protection frame 14 can accurately cover the edge angle of the circuit board, effectively improves the reliability of the protection effect, the structure of limit slide rod 20 enhances the stability of the whole system, limit slide rod 20 shares the lateral force generated by mobile long block 19 during movement, reduces the additional load of two-way screw rod 18, reduces the mechanical wear and failure risk, prolongs the service life of the equipment.

[0040] Third step, the rotation of the first connecting column 21 will drive the front-end sprocket 23 fixedly connected with it to rotate synchronously, because the synchronous chain 28 is engaged with the front and rear sprockets 23, the rotation of the front-end sprocket 23 will be transmitted to the rear-end sprocket 23 through the synchronous chain 28, so that the two sprockets 23 keep synchronous rotation, the rotation of the rear-end sprocket 23 further drives the connecting long rod 25 connected with it to rotate, the rotary bevel gears 29 at both ends of the connecting long rod 25 synchronously rotate, because the rotary bevel gears 29 are vertically engaged with the meshing bevel gears 30, the rotation of the rotary bevel gears 29 will drive the meshing bevel gears 30 to rotate around the vertical shaft, and then drive the second connecting column 27 and the rotary gear 16 fixedly connected with the meshing bevel gears 30 to rotate synchronously, the two rotary gears 16 are respectively engaged with the corresponding gear strips 26, with the rotation of the rotary gears 16, the gear strips 26 will move forward in a straight line direction, so as to drive the connecting long plate 17 and the rubber cleaning brush 15 connected with it to move forward synchronously, when the rubber cleaning brush 15 passes through the circuit board on the placement panel 13, the bristles thereof will contact with the surface of the circuit board, effectively removing the dust, debris and other impurities on the surface of the circuit board, ensuring the cleanliness and reliability of the circuit board in the subsequent processing process.

[0041] Fourth step, the T-shaped limiting sliding block 32 and the T-shaped limiting sliding groove 31 at the bottom of the connecting long plate 17 form a sliding fit, which provides accurate guidance for the straight-line motion of the connecting long plate 17, and this design ensures that the rubber cleaning brush 15 always maintains a straight-line trajectory during movement, avoiding deviation or shaking, thereby improving the accuracy and consistency of cleaning the surface of the circuit board.

[0042] Finally, it should be noted that: obviously, the above embodiments are only examples for clearly illustrating the present application, and are not limitations on the embodiments. For ordinary skilled persons in the art, other different forms of changes or variations can be made on the basis of the above description. Here, it is not necessary and impossible to exhaust all the embodiments. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. An apparatus for producing an integrated circuit having a corner protection structure, comprising a device main body (11), characterized by, The surface of the device body (11) is provided with a rectangular groove (12), the surface of the device body (11) is fixedly connected with a placing panel (13), the placing panel (13) is located at the upper end of the rectangular groove (12), the inside of the rectangular groove (12) is provided with a bidirectional screw rod (18), both ends of the bidirectional screw rod (18) are rotatably connected with the inner wall of the device body (11), both ends of the bidirectional screw rod (18) are provided with a limiting slide rod (20), both ends of the two limiting slide rods (20) are fixedly connected with the inner wall of the device body (11); Wherein, both ends of the bidirectional screw rod (18) are threadedly sleeved with a moving long block (19), the upper end of the two moving long blocks (19) is provided with a four-corner protection frame (14), the openings of the two four-corner protection frames (14) are opposite, the two moving long blocks (19) are movably sleeved with the two limiting slide rods (20).

2. The production apparatus for integrated circuits having a corner protection structure according to claim 1, wherein The right end of the bidirectional screw rod (18) is fixedly connected with a first connecting column (21), the first connecting column (21) is rotatably connected with the device body (11), the right end of the device body (11) is fixedly connected with a U-shaped supporting plate (22), the position of the U-shaped supporting plate (22) corresponds to the first connecting column (21).

3. The production apparatus for integrated circuits having a corner protection structure according to claim 2, wherein The right surface of the U-shaped supporting plate (22) is fixedly connected with a servo motor (24), the output port of the servo motor (24) is fixedly connected with the right surface of the first connecting column (21) through the U-shaped supporting plate (22).

4. The production apparatus for integrated circuits having a corner protection structure according to Claim 1, wherein The right end of the device body (11) is provided with two chain wheels (23), the front end of the chain wheel (23) is fixedly connected with the first connecting column (21).

5. The production apparatus for integrated circuits having a corner protection structure according to Claim 4, wherein The right end of the device body (11) is provided with a synchronous chain (28), the front and rear ends of the synchronous chain (28) are meshingly connected with the chain wheel (23).

6. The production apparatus for integrated circuits having a corner protection structure according to Claim 4, wherein The side surface of the device body (11) is sleeved with a connecting long rod (25), the connecting long rod (25) is rotatably connected with the device body (11), the right surface of the connecting long rod (25) is fixedly connected with the rear end of the chain wheel (23).

7. The production apparatus for an integrated circuit having a corner protection structure according to Claim 6, wherein Both ends of the connecting long rod (25) are fixedly connected with a rotating bevel gear (29), the upper ends of the two rotating bevel gears (29) are perpendicularly meshed with a meshing bevel gear (30).

8. The production apparatus for integrated circuits having a corner protection structure according to claim 7, wherein The upper ends of the two meshing bevel gears (30) are fixedly connected with a second connecting column (27), the upper ends of the two second connecting columns (27) are fixedly connected with a rotating gear (16).

9. The production apparatus for an integrated circuit having a corner protection structure according to Claim 8, wherein The opposite ends of the two rotating gears (16) are meshingly connected with a gear long strip (26), the opposite ends of the two gear long strips (26) are fixedly connected with a connecting long plate (17), the lower ends of the two connecting long plates (17) are provided with a T-shaped limiting sliding groove (31), the two connecting long plates (17) are slidably connected with a T-shaped limiting sliding block (32) through the T-shaped limiting sliding groove (31).

10. The production apparatus for an integrated circuit having a corner protection structure according to Claim 9, wherein The lower ends of the two T-shaped limiting sliding blocks (32) are fixedly connected with the device body (11), a rubber cleaning brush (15) is arranged between the two connecting long plates (17), the two ends of the rubber cleaning brush (15) are fixedly connected with the corresponding connecting long plate (17).

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