Nanoparticle measurement assembly and nanoparticle measurement system

Abstract

The invention discloses a nano particle measuring device. A nanoparticle measurement device according to one embodiment of the present invention may comprise: a flow cell having a cell cavity formed therein for flowing a liquid sample; a cell seat coupled with the flow cell and supporting the flow cell; the piezoelectric sensor is opposite to the flow cell and is connected with the flow cell; the cell seat cover is arranged opposite to the flow cell, the piezoelectric sensor is located between the cell seat cover and the flow cell, and the cell seat cover is fixed on the cell seat.

Description

Technical Field

[0001] This invention relates to a nanoparticle measurement component and a nanoparticle measurement system. Specifically, this invention relates to a nanoparticle measurement component and a nanoparticle measurement system for measuring shock waves generated by nanoparticles. Background Technology

[0002] In the manufacturing processes of high-precision products such as displays and semiconductors, various organic and inorganic chemicals used require higher purity levels than currently available to prevent a decline in manufacturing yield. Furthermore, advanced analytical techniques have been developed and are being newly applied to verify the quality of these high-purity chemicals. Among these, particle analysis is becoming increasingly important, as even particles as small as 10nm can affect the yield and high integration density of semiconductor manufacturing processes. Therefore, it is necessary to develop a stable quality control analytical method and ensure the scalability of this technology to analyze the causes of potential defects during the process.

[0003] Generally, a solution refers to a substance that is uniformly dispersed in a liquid in the form of molecules or ions. In such a solution, fine particles that are larger than ordinary molecules or ions and have a diameter of about 1 nm to 1000 nm are dispersed without aggregation or precipitation. This state is called the colloidal state, and substances in this colloidal state are called colloids.

[0004] Research on microcolloids in solution has mainly focused on obtaining information about the physicochemical properties of the substances to be analyzed or improving the detection capabilities of separation analyzers. Until recently, the analytical size of colloidal particles was limited to 100 nm, and accurate analysis of colloidal particles smaller than 100 nm requires high-concentration samples, thus technological development is essential.

[0005] A common method for measuring colloidal nanoparticles is optical scattering analysis, which uses light scattering intensity to determine particle size. However, when measuring tiny nanoparticles smaller than 100 nanometers, even with scattered light, the detection probability drops sharply at low concentrations, making it difficult to obtain reliable results, and the particle concentration must be at least a few parts per million (ppm). Larger particle sizes result in greater scattering intensity, while smaller particle sizes reduce the surface area available for light scattering, leading to weaker scattered light intensity and making measurement difficult. Therefore, a relatively large number of particles inevitably participate in scattering, significantly reducing sensitivity at concentrations below ppm.

[0006] Furthermore, when a liquid sample containing nanoparticles is irradiated with a laser beam, laser-induced breakdown (LAB) may occur, potentially generating a shock wave. When using a piezoelectric sensor to detect the shock wave, if the flow cell containing the liquid sample is not in close contact with the piezoelectric sensor, the sensor may detect noise other than the shock wave. Therefore, it is necessary to maintain contact between the piezoelectric sensor and the flow cell.

[0007] (Patent Document 1) KR 10-2022-0099954 Summary of the Invention Problem to be solved The purpose of this invention is to solve the above-mentioned problems and other issues.

[0008] Another object of the present invention is to provide a nanoparticle measurement component and a nanoparticle measurement system capable of effectively measuring shock waves.

[0009] Another object of the present invention is to provide a nanoparticle measurement component and a nanoparticle measurement system that can effectively fix a flow cell and a piezoelectric sensor.

[0010] Problem Solution To achieve the above or other objectives, according to one aspect of the present invention, a nanoparticle measuring device can be provided, comprising: a flow cell having a cavity formed therein for supplying a liquid sample flow; a cell seat connected to and supporting the flow cell; a piezoelectric sensor opposite to and connected to the flow cell; and a cell seat cover disposed opposite to the flow cell, the piezoelectric sensor being located between the cell seat cover and the flow cell, and the cell seat cover being fixed to the cell seat.

[0011] The pool seat cover may include: a pool seat cover plate fixed on the pool seat; and a pool seat cover opening, wherein the pool seat cover opening is an opening formed on the pool seat cover plate.

[0012] The piezoelectric sensor may include: a piezoelectric sensor body, which is opposite to and connected to the flow cell and is used to measure the vibration of the flow cell; and a piezoelectric sensor cable, which extends from the piezoelectric sensor body and passes through the opening of the cell seat cover.

[0013] The pool cover may include a pool cover plate having an inner surface opposite to the flow pool and an outer surface formed on the opposite side of the inner surface.

[0014] The pool seat cover can be elastic.

[0015] The pool base may include: a pool base frame located behind the flow pool; a plurality of pool base legs extending forward from the pool base frame; and a pool base fastener connected to the pool base legs and located in front of the flow pool.

[0016] The pool seat may further include: a pool seat reinforcement, the pool seat reinforcement being located opposite the pool seat cover and the flow pool being located between the pool seat reinforcement and the pool seat cover, and the pool seat reinforcement being connected to the plurality of pool seat legs.

[0017] The pool base frame may have a pool base frame opening, which is an opening opposite to the rear surface of the flow pool.

[0018] The flow cell may include: a front cell window with a front side and opposite to the cell base fixing member; a back cell window with a back side and opposite to the cell base frame; a first cell window opposite to the piezoelectric sensor; and a second cell window opposite to the cell base reinforcement member.

[0019] The first pool window, the front pool window, the second pool window, and the back pool window are connected in sequence.

[0020] The flow tank may further include: a bottom of the tank having a lower surface and connected to the tank cavity; and a top of the tank having an upper surface and connected to the tank cavity. The plurality of tank support legs may include: a lower support leg unit located below the bottom of the tank and supporting the flow tank; and an upper support leg unit supporting the upper end of the flow tank.

[0021] The upper support leg unit may include: a first upper support leg opposite to the first pool window and located above the piezoelectric sensor; and a second upper support leg opposite to the second pool window and located opposite the first upper support leg, wherein the flow pool is located between the first upper support leg and the second upper support leg.

[0022] The lower support leg unit may include: a first lower support leg located below the first upper support leg and contacting and supporting the bottom of the pool; and a second lower support leg located below the second upper support leg and contacting and supporting the bottom of the pool.

[0023] The pool seat reinforcement can extend upward from the second lower support leg to the second upper support leg.

[0024] The pool seat reinforcement may include a front pool seat reinforcement and a rear pool seat reinforcement spaced apart in the front-to-back direction.

[0025] The nanoparticle measuring device may further include: an inlet connected to the bottom of the pool and supplying the liquid sample to the pool cavity; and an outlet connected to the top of the pool and discharging the liquid sample.

[0026] The nanoparticle measuring device may further include: an attachment member located between the first cell window and the piezoelectric sensor, wherein one surface of the attachment member is in contact with the first cell window and the other surface is in contact with the piezoelectric sensor.

[0027] The nanoparticle measuring device may further include: a fixing member that covers the piezoelectric sensor, fixes the piezoelectric sensor to the flow cell, and contacts the cell seat cover.

[0028] When the pool seat cover is released from the pool seat, the inner surface of the pool seat cover can become convex, while the outer surface of the pool seat cover can become concave.

[0029] The distance between the first lower support leg and the second lower support leg can be less than the distance between the first upper support leg and the second upper support leg.

[0030] Invention Effects The effects of the nanoparticle measurement component and nanoparticle measurement system according to the present invention are as follows.

[0031] According to at least one embodiment of the present invention, a nanoparticle measurement component and a nanoparticle measurement system capable of effectively measuring shock waves can be provided.

[0032] According to at least one embodiment of the present invention, a nanoparticle measurement component and a nanoparticle measurement system capable of effectively fixing a flow cell and a piezoelectric sensor can be provided.

[0033] The further applicability of the present invention will become clearer from the following detailed description. However, since those skilled in the art will understand that various changes and modifications can be made within the spirit and scope of the invention, it should be understood that the detailed description and specific embodiments of the invention (e.g., preferred embodiments) are given by way of example only. Attached Figure Description

[0034] Figure 1 This is a diagram illustrating a nanoparticle measuring device and a system including the device according to an embodiment of the present invention.

[0035] Figure 2 This is an exploded perspective view of a nanoparticle measuring device according to an embodiment of the present invention.

[0036] Figure 3 This is a diagram illustrating a flow cell according to an embodiment of the present invention.

[0037] Figure 4 It is Figure 3 The cross-sectional view of the flow cell taken along line A1-A2 is shown.

[0038] Figure 5 It is Figure 3 The diagram shows a cross-sectional view of the flow cell taken along line B1-B2.

[0039] Figure 6 This is a diagram illustrating a base according to an embodiment of the present invention.

[0040] Figure 7 This is a diagram illustrating a support base according to an embodiment of the present invention.

[0041] Figure 8 This is a diagram showing the pool seat frame of a pool seat according to an embodiment of the present invention.

[0042] Figure 9 This is a diagram showing the pool seat, including the pool seat frame and pool seat legs.

[0043] Figure 10 This is a plan view showing the upper support leg unit and the upper pool seat frame rod.

[0044] Figure 11 This is a plan view showing the lower support leg unit and the lower pool seat frame rod.

[0045] Figure 12 This is a diagram showing the pool base including the pool base reinforcement.

[0046] Figure 13 This is a diagram illustrating a piezoelectric sensor according to an embodiment of the present invention.

[0047] Figure 14 This is a diagram illustrating a pool seat cover according to an embodiment of the present invention.

[0048] Figure 15 It shows that Figure 14 The diagram shown is a cross-sectional view of the pool seat cover taken along line C1-C2.

[0049] Figure 16 This is a cross-sectional view showing a nanoparticle measuring device containing the attachment member, taken with the pool cover attached to the pool base.

[0050] Figure 17 This is a cross-sectional view showing a nanoparticle measuring device including the fixing components, taken with the pool cover connected to the pool base. Detailed Implementation

[0051] The embodiments disclosed in this specification will be described in detail below with reference to the accompanying drawings. Regardless of the drawing numbers, identical or similar components are referred to by the same reference numerals, and repeated descriptions are omitted. The suffixes "module" and "section" used to denote components in the following description are designated or used interchangeably only for convenience of writing the specification and do not inherently have different meanings or functions. Furthermore, in describing the embodiments disclosed in this specification, detailed descriptions of related well-known technologies will be omitted if they are deemed to obscure the main points of the embodiments disclosed in this specification. Moreover, the accompanying drawings are only for aiding understanding of the embodiments disclosed in this specification and are not intended to limit the technical concepts disclosed in this specification, but should be understood to cover all modifications, equivalents, and alternatives contained within the spirit and scope of the invention.

[0052] Terms containing ordinal numbers (such as "first," "second," etc.) can be used to describe various components, but these components are not limited by these terms. The terms mentioned above are only used to distinguish one component from another.

[0053] When a component is said to be "connected to" or "in contact with" another component, it should be understood that the component may be directly connected to or in contact with the other component, but there may be other components in between. Conversely, when a component is said to be "directly connected to" or "directly connected to" another component, it should be understood that there are no other components in between.

[0054] Unless the context clearly indicates otherwise, singular expressions also include plural expressions. In this application, it should be understood that terms such as “comprising” or “having” are intended to indicate the presence of features, numbers, steps, operations, components, parts or combinations thereof described in the specification, but do not preclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0055] In the accompanying drawings, the dimensions of components may be exaggerated or reduced for ease of illustration. For example, the dimensions and thicknesses of each component shown in the drawings are arbitrarily illustrated for ease of illustration, and the invention is not necessarily limited to the examples shown.

[0056] If a particular embodiment can be implemented in different ways, then a particular process sequence can be performed differently than the described sequence. For example, two processes described consecutively can be performed substantially simultaneously, or in the reverse order of being described.

[0057] In the following embodiments, when referring to the connection of membranes, regions, components, etc., it includes not only the case where the membranes, regions, or components are directly connected, but also the case where other membranes, regions, or components are located between these membranes, regions, or components, thereby indirectly connecting them. For example, in this specification, when referring to the electrical connection of membranes, regions, components, etc., it includes not only the case where the membrane, region, or component is directly electrically connected, but also the case where other thin films, regions, or components are located between these membranes, regions, or components, thereby indirectly electrically connecting them.

[0058] Figure 1 is a diagram illustrating a nanoparticle measuring device and a system including the device according to an embodiment of the present invention.

[0059] See also Figure 1 According to one embodiment of the present invention, a nanoparticle measurement system 1 may include a nanoparticle measurement device 10. The nanoparticle measurement device 10 can form a space for the flow of a sample containing nanoparticles. The sample containing nanoparticles can be completely in a liquid state.

[0060] For example, a sample can be introduced into the nanoparticle measuring device 10 from one end and discharged to the outside of the nanoparticle measuring device 10 from the other end.

[0061] The nanoparticle measurement system 1 may include an optical component 20. The optical component 20 may include a laser device 21 that generates a laser beam. The laser device 21 may, for example, form a pulsed laser beam.

[0062] When the sample is inside the nanoparticle measuring device 10, the laser beam can be incident on the nanoparticle measuring device 10. For example, at least a portion of the pulsed laser beam incident on the nanoparticle measuring device 10 can be transmitted to the sample located inside the nanoparticle measuring device 10.

[0063] When a sample receives energy from a pulsed laser beam, its state can transition to a plasma state. A sample in a plasma state can generate shock waves and / or flashes.

[0064] The shock wave and / or flash generated by the nanoparticle measuring device 10 can vary depending on the characteristics of the nanoparticles contained in the sample. The characteristics of the nanoparticles contained in the sample can include at least one of the number and size of the nanoparticles contained in the sample.

[0065] Optical component 20 may include focusing lens 22. At least a portion of the laser beam generated by laser device 21 may be incident on focusing lens 22. At least a portion of the laser beam incident on focusing lens 22 may be focused and incident on nanoparticle measuring device 10.

[0066] A focusing lens 22 can be positioned between the laser device 21 and the nanoparticle measuring device 10. The distance between the focusing lens 22 and the nanoparticle measuring device 10 can correspond to the focal length of the focusing lens 22. For example, the focal point of the focusing lens 22 can be located at the sample flowing in the nanoparticle measuring device 10.

[0067] Optical assembly 20 may include beam splitter 23. Beam splitter 23 may be located between nanoparticle measuring device 10 and laser device 21. For example, beam splitter 23 may be located between laser device 21 and focusing lens 22.

[0068] Beam splitter 23 can split incident light into two beams. For example, light incident on beam splitter 23 can be split into light passing through beam splitter 23 and light reflected from beam splitter 23. Oscillating laser beam LB can be the laser beam incident on beam splitter 23.

[0069] Optical assembly 20 may include attenuator 25. Attenuator 25 may be arranged between beam splitter 23 and laser device 21. Laser beam generated by laser device 21 may be incident on attenuator 25. At least a portion of the laser beam incident on attenuator 25 may pass through attenuator 25 to form an oscillating laser beam LB.

[0070] The power of the laser beam incident on attenuator 25 can be greater than the power of the oscillating laser beam LB. In other words, attenuator 25 can reduce the power of the incident laser beam.

[0071] For example, a portion of the oscillating laser beam LB can pass through the beam splitter 23 and be directed toward the nanoparticle measuring device 10. The incident laser beam IB can be the laser beam from the oscillating laser beam LB that passes through the beam splitter 23 and is directed toward the nanoparticle measuring device 10. The incident laser beam IB can be incident on the focusing lens 22, focused, and then travel toward the nanoparticle measuring device 10.

[0072] Another portion of the oscillating laser beam LB can be reflected from the beam splitter 23. For example, the reflected laser beam RB, as another portion of the oscillating laser beam LB, can be the laser beam reflected from the beam splitter 23.

[0073] The path of the incident laser beam IB can be the same as the path of the oscillating laser beam LB. The path of the reflected laser beam RB can be different from the path of the oscillating laser beam LB. For example, the path of the reflected laser beam RB can be perpendicular to the path of the oscillating laser beam LB.

[0074] Optical component 20 may include energy detector 24. Energy detector 24 may be located in the travel path of the reflected laser beam RB. Energy detector 24 may measure the energy and / or power of the reflected laser beam RB.

[0075] The energy detector 24 can generate a first signal S1. The first signal S1 can contain information about the power of the reflected laser beam RB as measured by the energy detector 24.

[0076] The power of the reflected laser beam RB can correspond to the power of the incident laser beam IB. For example, the power of the reflected laser beam RB and the power of the incident laser beam IB can be positively correlated. Therefore, by measuring the power of the reflected laser beam RB, the power of the incident laser beam IB can be estimated.

[0077] Optical component 20 may include beam blocker 26. Beam blocker 26 may be located in the path of the incident laser beam IB. At least a portion of the incident laser beam IB may pass through the nanoparticle measuring device 10 and be incident on beam blocker 26. Beam blocker 26 may suppress the travel of the incident laser beam.

[0078] The nanoparticle measurement system 1 may include signal processing components 31, 34, and 35 for measuring the shock waves and / or flashes generated by the nanoparticle measurement device 10.

[0079] For example, signal processing components 31, 34, and 35 may include a camera 31 for measuring flash. Camera 31 may include, for example, a CCD camera.

[0080] The microscope 32 can be positioned between the camera 31 and the nanoparticle measuring device 10. A filter 33 can be positioned between the microscope 32 and the nanoparticle measuring device 10. The filter 33 allows specific wavelengths of the flashes generated by the nanoparticle measuring device 10 to pass through.

[0081] For example, signal processing components 31, 34, and 35 may include a piezoelectric sensor 34 for measuring shock waves. The piezoelectric sensor 34 may be in contact with the nanoparticle measuring device 10. The piezoelectric sensor 34 can convert vibrations generated by the nanoparticle measuring device 10 into energy or electricity.

[0082] The energy or electricity generated by the piezoelectric sensor 34 can be converted into an electrical signal. For example, the piezoelectric sensor 34 can generate a second signal S2. The second signal S2 can contain information about vibrations occurring in the nanoparticle measuring device 10.

[0083] Signal processing components 31, 34, and 35 may include a control unit 35. The control unit 35 may generate signals to control the laser device 21 and / or the camera 31. The control unit 35 may receive and process signals. The signals generated or received by the control unit 35 may be electrical signals.

[0084] Camera 31 can generate a third signal S3. The third signal S3 can contain information about the image captured by camera 31. For example, the third signal S3 can contain information about a flash of light occurring in the nanoparticle measuring device 10.

[0085] The nanoparticle measurement system 1 may include an input unit 40. The input unit 40 can acquire input from a user or the like. The input acquired by the input unit 40 can be converted into a fourth signal S4. For example, the input unit 40 may generate a fourth signal S4 containing information about the operation of the nanoparticle measurement system 1.

[0086] The control unit 35 may include a first signal processing unit 36. The first signal processing unit 36 ​​may receive signals. For example, the first signal processing unit 36 ​​may receive input signals S1, S2, S3, and S4. The input signals S1, S2, S3, and S4 may include at least one of the first signal S1, the second signal S2, the third signal S3, and the fourth signal S4.

[0087] The control unit 35 can process input signals S1, S2, S3, and S4 to generate output signals S5 and S6. The output signals S5 and S6 may include at least one of a fifth signal S5 and a sixth signal S6.

[0088] The control unit 35 may include a second signal processing unit 37. The second signal processing unit 37 can transmit signals. For example, the second signal processing unit 37 can transmit a fifth signal S5 to the laser device 21. For example, the second signal processing unit 37 can transmit a sixth signal S6 to the camera 31.

[0089] The fifth signal S5 can be transmitted to the laser device 21. The fifth signal S5 can contain information about the operation of the laser device 21. The laser device 21 can receive the fifth signal S5 and operate according to the fifth signal S5.

[0090] For example, information about the operation of the laser device 21 may include at least one of the peak power, period, pulse duration and average power of the laser device 21.

[0091] The sixth signal S6 can be transmitted to the camera 31. The sixth signal S6 can contain information about the operation of the camera 31. The camera 31 can operate according to the sixth signal S6.

[0092] For example, camera 31 can operate according to the operating cycle of laser device 21. For example, when laser device 21 is operating and plasma is generated in nanoparticle measuring device 10, camera 31 can capture flashes originating from the plasma. That is, the operating cycle of camera 31 can be the same as the operating cycle of laser device 21.

[0093] Figure 2 This is an exploded perspective view of a nanoparticle measuring device according to an embodiment of the present invention.

[0094] A nanoparticle measuring device 10 according to an embodiment of the present invention may include a flow cell 100. A liquid sample may flow inside the flow cell 100.

[0095] The nanoparticle measuring device 10 may include an inlet 151 and an outlet 152. The inlet 151 may be connected to one end of the flow cell 100 to supply a liquid sample into the interior of the flow cell 100. The outlet 152 may be connected to the other end of the flow cell 100 to discharge the liquid sample flowing inside the flow cell 100 to the outside.

[0096] The nanoparticle measuring device 10 according to one embodiment of the present invention may include a stage 200. The stage 200 may include a stage body 210. The stage 200 may include a platform 220, which forms a surface of the stage body 210.

[0097] A nanoparticle measuring device 10 according to an embodiment of the present invention may include a support base 300. The support base 300 may be fixed to a stage 200. For example, the support base 300 may be coupled to and fixed to a platform 220. A camera 31 may be connected, coupled to, or fixed to the stage 200. The camera 31 may be opposite to a flow cell 100.

[0098] A nanoparticle measuring device 10 according to an embodiment of the present invention may include a reservoir base 400. The reservoir base 400 may include a reservoir base frame 410 connected to and fixed to a support base 300. The reservoir base frame 410 may be formed in the shape of a picture frame. The reservoir base frame 410 may be located in front of the support base 300.

[0099] The pool seat 400 may include pool seat legs 420. The pool seat legs 420 may be coupled to or connected to the pool seat frame 410. For example, the pool seat legs 420 may extend forward from the pool seat frame 410.

[0100] Multiple pool support legs 420 can be formed. For example, multiple pool support legs 420 can be spaced apart from each other. The pool base 400 can mount the flow tank 100.

[0101] The pool seat 400 may include a pool seat fastener 440. The pool seat fastener 440 may be attached to or secured to the pool seat support leg 420. For example, a connecting member 450 may connect the pool seat fastener 440 and the pool seat support leg 420. The connecting member 450 may be, for example, a screw. The pool seat fastener 440 may be located at the front of the pool seat frame 410.

[0102] The pool seat support leg 420 may have a shape that extends forward from the pool seat frame 410 to the pool seat fixture 440. The pool seat fixture 440 may include at least two rods. The flow pool 100 may be located between the pool seat frame 410 and the pool seat fixture 440.

[0103] Figure 3 This is a diagram illustrating a flow cell according to an embodiment of the present invention. Figure 4 It is Figure 3 The cross-sectional view of the flow cell taken along line A1-A2 is shown. Figure 5 It is Figure 3 The diagram shows a cross-sectional view of the flow cell taken along line B1-B2.

[0104] refer to Figures 3 to 5 The flow cell 100 can be shaped to extend from one end to the other. For example, the flow cell 100 can extend upward from the bottom 105 to the top 106. The bottom 105 can form the bottom surface of the flow cell 100. The top 106 can form the top surface of the flow cell 100.

[0105] The length of the flow cell 100 may be parallel to the direction from the bottom 105 to the top 106. The length of the flow cell 100 may also be vertical. The liquid sample may flow in the flow cell 100 along its length.

[0106] For example, the flow cell 100 may include a cavity 107 as an internal cavity. The cavity 107 may extend upward from the bottom 105 and connect to the top 106. The cavity 107 may open upward and downward at the bottom 105 and the top 106, respectively.

[0107] The flow cell 100 may include multiple sides. Each of the multiple sides may extend upward from the bottom 105 of the cell to the top 106 of the cell. Each of the multiple sides may serve as a channel for energy inflow or outflow. The multiple sides may be the outer surfaces as seen from the outside of the flow cell 100.

[0108] For example, flow cell 100 may include a front pool window 103. The front pool window 103 may form the front of flow cell 100. The front pool window 103 may extend upward from the bottom of the pool 105 to the top of the pool 106.

[0109] Incident laser beam (IB, see Figure 1 The incident laser beam (IB, see [reference]) can be incident on the front cell window 103. Figure 1 At least a portion of it can reach the pool cavity 107.

[0110] For example, flow cell 100 may include a back pool window 104. The back pool window 104 may form the back side of flow cell 100. The back pool window 104 may extend upward from the bottom of the pool 105 to the top of the pool 106.

[0111] At least a portion of the laser beam reaching the pool cavity 107 can pass through the back pool window 104 and travel to the outside of the flow cell 100. At least a portion of the laser beam exiting from the back pool window 104 can reach the beam blocker (26, see...). Figure 1 ).

[0112] For example, flow cell 100 may include a first pool window 101. The first pool window 101 may extend upward from the bottom of the pool 105 to the top of the pool 106. The first pool window 101 may extend rearward from a first side of the front pool window 101 to a first side of the rear pool window 102.

[0113] The first pool window 101 can be connected to a piezoelectric sensor (34, see...). Figure 1 Contact. When plasma is generated in the flow cell 100 and a shock wave is formed, the pressure or vibration of the shock wave can be transmitted to the first cell window 101.

[0114] piezoelectric sensor (34, see Figure 1 The piezoelectric sensor (34, see [reference]) can receive pressure or vibration from the first pool window 101. Therefore, in order to effectively measure shock waves, the piezoelectric sensor (34)... Figure 1 It needs to be in close contact with the first pool window 101.

[0115] For example, flow cell 100 may include a second pool window 102. The second pool window 102 may extend upward from the bottom of the pool 105 to the top of the pool 106. The second pool window 102 may extend rearward from a second side of the front pool window 101 to a second side of the rear pool window 102. The second pool window 102 may be located opposite the first pool window 101.

[0116] When plasma is generated in the flow cell 100 and a flash is formed, at least a portion of the flash can pass through the second cell window 102 and reach the camera (31, see also). Figure 1 Camera (31, see also) Figure 1 It can be opposite to the second pool window 102.

[0117] If the length direction of the flow cell 100 is defined as the axis of the flow cell 100, then the first pool window 101, the front pool window 103, the second pool window 102 and the back pool window 104 can be connected sequentially along the azimuth direction.

[0118] The first side of the flow cell 100 may face or be directed toward the first pool window 101. The second side of the flow cell 100 may face or be directed toward the second pool window 102.

[0119] The width direction of the flow cell 100 can refer to the direction between the first and second sides of the flow cell 100. For example, the width direction of the flow cell 100 can be parallel to the direction from the first pool window 101 toward the second pool window 102. Observable physical quantities can travel along the width direction of the flow cell 100. For example, observable physical quantities can include at least one of vibration (or pressure) and scintillation.

[0120] The thickness direction of the flow cell 100 can be parallel to the direction from the front cell window 103 toward the back cell window 104. The incident laser beam IB can pass through the flow cell 100 along the thickness direction of the flow cell 100.

[0121] At least a portion of the flow cell 100 may be transparent or translucent. The flow cell 100 may remain rigid. For example, the flow cell 100 may be formed of a material containing quartz.

[0122] For example, at least a portion of the front cell window 103 may be transparent or translucent. At least a portion of the incident laser beam IB incident on the front cell window 103 may reach the cell cavity 107.

[0123] For example, at least a portion of the second pool window 102 may be transparent or translucent. At least a portion of the light generated in the pool cavity 107 may pass through the second pool window 102 and reach the camera (31, see...). Figure 1 ).

[0124] Figure 6 This is a diagram illustrating a base according to an embodiment of the present invention.

[0125] refer to Figures 1 to 6 The optical component 20 and the nanoparticle measuring device 10 can be disposed on the stage 220 of the stage 200. The optical component 20 can be arranged on the stage 220 such that the cavity 107 of the flow cell 100 is located in the path of the incident laser beam IB. The stage 200 can be, for example, an optical stage.

[0126] Figure 7 This is a diagram illustrating a support base according to an embodiment of the present invention.

[0127] refer to Figures 1 to 7 The support base 300 may include a support base fixing part 310. The support base fixing part 310 may be plate-shaped. The support base fixing part 310 may be connected to and fixed to the base 200. The support base fixing part 310 may be fixed to the table surface 220.

[0128] The support base 300 may include a support base connecting portion 320. The support base connecting portion 320 may include a support base connecting portion body 321. The support base connecting portion body 321 may be formed to extend upward from the support base fixing portion 310.

[0129] The support fixing part 310 and the support connecting part body 321 can be integrally formed. For example, the support fixing part 310 and the support connecting part body 321 can be separated by bending a metal plate.

[0130] The support base connecting portion 320 may include a support base connecting portion opening 322. The support base connecting portion opening 322 may be formed on the support base connecting portion body 321. The support base connecting portion opening 322 may be connected to the front and back sides of the support base connecting portion body 321.

[0131] The support connection opening 322 can be located in the path of the incident laser beam IB. For example, the laser beam passing through the back cell window 104 of the flow cell 100 can pass through the support connection opening 322.

[0132] Figure 8 This is a diagram showing the pool seat frame of a pool seat according to an embodiment of the present invention. Figure 9 This is a diagram showing the pool seat, including the pool seat frame and pool seat legs.

[0133] refer to Figures 1 to 9 The width direction of the pool base 400 can be the same as the width direction of the flow cell 100. The thickness direction of the pool base 400 can be the same as the thickness direction of the flow cell 100.

[0134] The pool seat frame 410 can be formed in the shape of a picture frame. For example, the pool seat frame 410 may include a lower pool seat frame rod 413. The lower pool seat frame rod 413 may form the lower end of the pool seat frame 410. The lower pool seat frame rod 413 may be formed in an extended or elongated shape in the width direction of the pool seat 400.

[0135] For example, the pool seat frame 410 may include an upper pool seat frame rod 414. The upper pool seat frame rod 414 may form the upper end of the pool seat frame 410. The upper pool seat frame rod 414 may be formed into an extended or elongated shape in the width direction of the pool seat 400.

[0136] For example, the pool seat frame 410 may include a first pool seat frame rod 411. The first pool seat frame rod 411 may extend upward from a first side end of the lower pool seat frame rod 413 to a first side end of the upper pool seat frame rod 414. The first pool seat frame rod 411 may form a first side of the pool seat frame 410.

[0137] For example, the pool seat frame 410 may include a second pool seat frame rod 412. The second pool seat frame rod 412 may extend upward from the second side end of the lower pool seat frame rod 413 to the second side end of the upper pool seat frame rod 414. The second pool seat frame rod 412 may form the second side of the pool seat frame 410.

[0138] The first pool seat frame rod 411, the lower pool seat frame rod 413, the second pool seat frame rod 412, and the upper pool seat frame rod 414 can be connected in sequence.

[0139] The pool seat frame 410 may include a pool seat frame opening 415. The pool seat frame opening 415 is an opening formed in the pool seat frame 410 and can be connected to the front and back of the pool seat frame 410.

[0140] The pool frame opening 415 may be opposite to the support connection opening 322. For example, the pool frame opening 415 may be connected to the support connection opening 322. The pool frame opening 415 may be located in the path of the incident laser beam IB. For example, at least a portion of the incident laser beam IB passing through the rear pool window 104 may pass sequentially through the pool frame opening 415 and the support connection opening 322.

[0141] The pool seat 400 may include pool seat legs 420. The pool seat legs 420 may be shaped to extend forward from the pool seat frame 410. The pool seat legs 420 may, for example, be shaped to extend forward from a corner of the pool seat frame 410.

[0142] The corner of the pool seat frame 410 can refer to the point where two adjacent pool seat frame rods 411, 412, 413, and 414 are connected. The pool seat frame rods 411, 412, 413, and 414 can refer to at least one of the first pool seat frame rod 411, the second pool seat frame rod 412, the lower pool seat frame rod 413, and the upper pool seat frame rod 414.

[0143] The pool seat support leg 420 may include a lower support leg unit 421 and an upper support leg unit 422. The lower support leg unit 421 may be shaped to extend forward from both ends of the lower pool seat frame rod 413. The upper support leg unit 422 may be shaped to extend forward from both ends of the upper pool seat frame rod 414.

[0144] The lower support leg unit 421 may include a first lower support leg 4211 and a second lower support leg 4212. The first lower support leg 4211 may be configured to extend forward in the region where the lower pool seat frame rod 413 and the first pool seat frame rod 411 connect. The second lower support leg 4212 may be configured to extend forward in the region where the lower pool seat frame rod 413 and the second pool seat frame rod 412 connect.

[0145] The upper support leg unit 422 may include a first upper support leg 4221 and a second upper support leg 4222. The first upper support leg 4221 may be configured to extend forward in the region where the upper pool seat frame rod 414 connects to the first pool seat frame rod 411. The second upper support leg 4222 may be configured to extend forward in the region where the upper pool seat frame rod 414 connects to the second pool seat frame rod 412.

[0146] The upper support legs 4221 and 4222 may include or refer to at least one of the first upper support leg 4221 and the second upper support leg 4222. The upper support legs 4221 and 4222 can support the flow tank 100.

[0147] For example, the upper supports 4221 and 4222 can support the first pool window 101 and the second pool window 102. For example, the upper supports 4221 and 4222 can be opposite to or in contact with the first pool window 101 and the second pool window 102.

[0148] Figure 10 This is a plan view showing the upper support leg unit and the upper pool seat frame rod. Figure 11 This is a plan view showing the lower support leg unit and the lower pool seat frame rod.

[0149] refer to Figures 1 to 11 The upper support leg unit 422 may include an upper support leg gap 4225. The upper support leg gap 4225 may refer to the gap formed between the first upper support leg 4221 and the second upper support leg 4222. For example, the upper support leg gap 4225 may refer to the distance between the first upper support leg 4221 and the second upper support leg 4222.

[0150] The flow tank 100 can be located in the upper leg gap 4225. For example, the flow tank 100 can be arranged between the first upper leg 4221 and the second upper leg 4222. For example, the flow tank 100 can be located in the upper leg gap 4225.

[0151] For example, the first upper support leg 4221 may be opposite to or in contact with the upper end of the first pool window 101. For example, the second upper support leg 4222 may be opposite to or in contact with the upper part of the second pool window 102.

[0152] The lower support leg unit 421 may include a lower support leg gap 4215. The lower support leg gap 4215 may refer to the gap formed between the first lower support leg 4211 and the second lower support leg 4212. For example, the lower support leg gap 4215 may refer to the distance between the first lower support leg 4211 and the second lower support leg 4212.

[0153] The inlet 151 may be located in the gap 4215 between the lower support legs. For example, the inlet 151 may be arranged between the first lower support leg 4211 and the second lower support leg 4212.

[0154] The lower support legs 4211 and 4212 may refer to or include at least one of the first lower support leg 4211 and the second lower support leg 4212. The lower support legs 4211 and 4212 may support the flow tank 100. For example, the lower support legs 4211 and 4212 may be opposite to or in contact with the bottom 105 of the flow tank 100.

[0155] The gap 4215 between the lower outriggers can be smaller than the gap 4225 between the upper outriggers. That is, the distance between the first lower outrigger 4211 and the second lower outrigger 4212 can be smaller than the distance between the first upper outrigger 4221 and the second upper outrigger 4222.

[0156] Figure 12 This is a diagram showing the pool base including the pool base reinforcement.

[0157] refer to Figures 1 to 12 The pool seat 400 may include a pool seat reinforcement 430. The pool seat reinforcement 430 may be shaped to extend upward from the second lower support leg 4212 to the second upper support leg 4222.

[0158] The pool seat reinforcement 430 may include, for example, a front pool seat reinforcement 431. The front pool seat reinforcement 431 may be shaped to extend upward from the front end of the second lower support leg 4212 to the front end of the second upper support leg 4222.

[0159] The pool seat reinforcement 430 may include, for example, a rear pool seat reinforcement 432. The rear pool seat reinforcement 432 may be shaped to extend upward from the rear end of the second lower support leg 4212 to the rear end of the second upper support leg 4222.

[0160] At least a portion of the flash generated in the pool cavity 107 of the flow pool 100 can penetrate the second pool window 102, pass between the front pool seat reinforcement 431 and the rear pool seat reinforcement 432, and reach the camera 31.

[0161] Figure 13 This is a diagram illustrating a piezoelectric sensor according to an embodiment of the present invention.

[0162] refer to Figures 1 to 13 The piezoelectric sensor 34 may include a piezoelectric sensor body 34a. One surface of the piezoelectric sensor body 34a may be opposite to or in contact with the first pool window 101. Pressure or vibration may be applied to the piezoelectric sensor body 34a. The piezoelectric sensor body 34a may convert the applied pressure or vibration into an electrical signal.

[0163] The piezoelectric sensor 34 may include a piezoelectric sensor cable 34b. The piezoelectric sensor cable 34b may be shaped to extend from the piezoelectric sensor body 34a. The piezoelectric sensor cable 34b may be connected to the piezoelectric sensor body 34a. The piezoelectric sensor cable 34b may transmit the electrical signal generated by the piezoelectric sensor body 34a to the control unit 35.

[0164] Figure 14 This is a diagram illustrating a pool seat cover according to an embodiment of the present invention. Figure 15 It shows that Figure 14 The diagram shown is a cross-sectional view of the pool seat cover taken along line C1-C2. Figure 16 This is a cross-sectional view showing a nanoparticle measuring device containing the attachment member, taken with the pool cover attached to the pool base. Figure 17 This is a cross-sectional view showing a nanoparticle measuring device including the fixing components, taken with the tank cover connected to the tank base. Figure 16 and 17 For ease of explanation, the components of the nanoparticle measuring device 10 can be omitted, as can the shaded markings on the flow cell 100 and the piezoelectric sensor cable 34b.

[0165] refer to Figures 1 to 17 As shown, the pool seat cover 500 may include a pool seat cover plate 510. The pool seat cover plate 510 may form the shape of the pool seat cover 500. For example, the pool seat cover plate 510 may be plate-shaped.

[0166] The pool seat cover 510 can be connected to the pool seat 400. For example, the pool seat cover 510 can be connected to the pool seat support leg 420. For example, the upper end of the pool seat cover 510 can be connected to the first upper support leg 4221. For example, the lower end of the pool seat cover 510 can be connected to the first lower support leg 4211.

[0167] For example, the pool seat cover 510 can be connected to the pool seat frame 410. For example, the pool seat cover 510 can be connected to the pool seat fastener 440.

[0168] The pool seat cover 510 may be located opposite the first pool window 101, with the piezoelectric sensor 34 located between the two. In other words, the first pool window 101 may be opposite to or in contact with the piezoelectric sensor body 34a, and the piezoelectric sensor body 34a may be located between the pool seat cover 510 and the first pool window 101.

[0169] With the pool seat cover 510 connected to the pool seat 400, the pool seat cover 510 can apply pressure to the piezoelectric sensor body 34a. When the pool seat cover 510 applies pressure to the piezoelectric sensor body 34a, the piezoelectric sensor body 34a can come into close contact with the flow cell 100.

[0170] In other words, when the pool cover plate 510 applies pressure to the piezoelectric sensor body 34a, the distance between the piezoelectric sensor body 34a and the flow cell 100 can remain constant. Therefore, the piezoelectric sensor 34 can effectively measure the vibration or pressure of the flow cell 100.

[0171] The pool seat cover 510 may have two surfaces. For example, the pool seat cover 510 may include an inner surface 511 and an outer surface 512.

[0172] The inner surface 511 of the pool cover plate, as one surface formed on the pool cover plate 510, can be opposite to the flow cell 100 or the piezoelectric sensor body 34a. The outer surface 512 of the pool cover plate, as another surface formed on the pool cover plate 510, can face or be directed toward the outside of the nanoparticle measuring device 10.

[0173] The pool seat cover 510 can be flexible. For example, the pool seat cover 510 can be made of a metal sheet.

[0174] For example, the pool seat cover 510 may be curved before it is attached to the pool seat 400. For example, the pool seat cover 510 may be bent before it is attached to the pool seat 400.

[0175] For example, before the pool seat cover 510 is attached to the pool seat 400, the inner surface 511 of the pool seat cover may protrude toward the flow pool 100 or the piezoelectric sensor body 34a. For example, when the pool seat cover 510 is disconnected (or fixed) from the pool seat 400, the inner surface 511 of the pool seat cover may become convex.

[0176] For example, before the pool seat cover 510 is attached to the pool seat 400, the outer surface 512 of the pool seat cover may be recessed toward the outside of the nanoparticle measuring device 10. For example, when the pool seat cover 510 is separated from (or fixed) from the pool seat 400, the outer surface 512 of the pool seat cover may become concave.

[0177] When the pool seat cover 510 is connected to the pool seat 400, the curvature of the pool seat cover 510 may change. For example, when the pool seat cover 510 is connected to the pool seat 400, the pool seat cover 510 may become a flat surface.

[0178] When the pool seat cover 510 is connected to the pool seat 400, the pool seat cover 510 can apply pressure to the piezoelectric sensor body 34a. For example, when the pool seat cover 510 is connected to the pool seat 400, the pool seat cover 510 can apply pressure to the piezoelectric sensor body 34a in the direction from the piezoelectric sensor body 34a toward the flow pool 100.

[0179] At least a portion of the pressure applied to the piezoelectric sensor 34 by the pool seat cover 500 can be transmitted to the flow cell 100. The pool seat reinforcement 430 can contact the second pool window 102. The pool seat reinforcement 430 can inhibit movement of the flow cell 100 in the width direction. For example, the pool seat reinforcement 430 can inhibit movement of the flow cell 100 toward the second side.

[0180] The pool seat cover 500 may include a pool seat cover opening 515. The pool seat cover opening 515 may be an opening formed on the pool seat cover plate 510. The pool seat cover opening 515 may be connected to the inner surface 511 and the outer surface 512 of the pool seat cover plate.

[0181] The piezoelectric sensor cable 34b can extend from the piezoelectric sensor body 34a and pass through the pool seat cover opening 515. The piezoelectric sensor cable 34b can be connected to the control unit 35 to transmit the second signal S2 to the first signal processing unit 36.

[0182] The nanoparticle measuring device 10 may include an attachment member 600. The attachment member 600 may be formed in a sheet-like shape. The attachment member 600 may be arranged between the flow cell 100 and the piezoelectric sensor body 34a.

[0183] For example, one surface of the attachment member 600 may be opposite to or in contact with the first pool window 101. For example, another surface of the attachment member 600 may be opposite to or in contact with the piezoelectric sensor body 34a.

[0184] For example, multiple attachment members 600 can be provided. For example, a first attachment member 600 can be located between the piezoelectric sensor body 34a and the first pool window 101. For example, a second attachment member 600 can be located between the piezoelectric sensor body 34a and the pool cover 500.

[0185] The attachment member 600 allows for a more effective maintenance of the distance between the piezoelectric sensor body 34a and the first pool window 101. The attachment member 600 can be formed of, for example, a silicon-containing material.

[0186] The nanoparticle measuring device 10 may include a fixing member 700. The fixing member 700 may cover the piezoelectric sensor body 34a. The fixing member 700 may prevent the piezoelectric sensor body 34a from detaching from the flow cell 100. The fixing member 700 may be formed of a material, for example, comprising epoxy resin.

[0187] The fixing member 700 can be hardened after covering the piezoelectric sensor body 34a. After the fixing member 700 covers the piezoelectric sensor body 34a, the pool seat cover 500 can be connected to the pool seat 400.

[0188] The attachment member 600 and the fixing member 700 may surround the piezoelectric sensor body 34a. For example, one surface of the piezoelectric sensor body 34a may be opposite to or in contact with the attachment member 600, while another surface of the piezoelectric sensor body 34a may be opposite to or in contact with the fixing member 700.

[0189] The embodiments of the present invention described above, or other embodiments thereof, are not mutually exclusive or different. Any of the embodiments of the present invention described above, or other embodiments thereof, may be used in combination or in their respective configurations or functions.

[0190] Those skilled in the art will understand that the invention may be embodied in other specific forms without departing from the spirit and essential characteristics of the invention. The above detailed description should not be construed as restrictive in all respects, but rather as exemplary. The scope of the invention should be determined by a reasonable interpretation of the appended claims, and all modifications within the scope of equivalents of the invention should be covered within the scope of the invention.

Claims

1. A nanoparticle measuring device, comprising: A flow cell having a cavity formed therein for supplying a liquid sample for flow. A pool base, which is connected to and supports the flow pool; A piezoelectric sensor, the piezoelectric sensor being opposite to and connected to the flow cell; and A pool seat cover is disposed opposite to the flow pool, the piezoelectric sensor is located between the pool seat cover and the flow pool, and the pool seat cover is fixed to the pool seat.

2. The nanoparticle measuring device according to claim 1, wherein, The pool seat cover includes: Pool seat cover plate fixed to the pool seat; and The pool seat cover opening is an opening formed on the pool seat cover plate.

3. The nanoparticle measuring device according to claim 2, wherein, The pool seat cover is elastic.

4. The nanoparticle measuring device according to claim 2, wherein, The piezoelectric sensor includes: A piezoelectric sensor body, the piezoelectric sensor body being opposite to and connected to the flow cell, and used to measure the vibration of the flow cell; and A piezoelectric sensor cable extends from the piezoelectric sensor body and passes through the opening of the pool seat cover.

5. The nanoparticle measuring device according to claim 1, wherein, The pool seat cover includes: A pool seat cover plate having an inner surface opposite to the flow pool and an outer surface opposite to the inner surface of the pool seat cover plate, and being fixed to the pool seat.

6. The nanoparticle measuring device according to claim 5, wherein, When the pool seat cover is released from the pool seat, the inner surface of the pool seat cover becomes convex, while the outer surface of the pool seat cover becomes concave.

7. The nanoparticle measuring device according to claim 1, wherein, The pool seat includes: The pool base frame located behind the flow pool; Multiple pool seat legs extending forward from the pool seat frame; and A pool seat fixing member connected to the pool seat support leg and located in front of the flow pool.

8. The nanoparticle measuring device according to claim 7, wherein, The pool seat further includes a pool seat reinforcement member, which is located opposite the pool seat cover and the flow pool is located between the pool seat reinforcement member and the pool seat cover, and the pool seat reinforcement member is connected to the plurality of pool seat legs.

9. The nanoparticle measuring device according to claim 7, wherein, The pool base frame has a pool base frame opening, which is an opening opposite to the rear surface of the flow pool.

10. The nanoparticle measuring device according to claim 8, wherein, The flow cell includes: A front pool window is formed that faces the pool seat fixing member; A back pool window is formed that is opposite to the pool base frame; The first cell window opposite the piezoelectric sensor; and A second pool window opposite to the pool seat reinforcement.

11. The nanoparticle measuring device according to claim 10, wherein, The first pool window, the front pool window, the second pool window, and the back pool window are connected in sequence.

12. The nanoparticle measuring device according to claim 10, wherein, The flow cell also includes: A pool bottom having a lower surface and connected to the pool cavity; and A pool top having an upper surface and connected to the pool cavity; The plurality of pool seat legs include: The lower support leg unit located below the bottom of the pool and supporting the flow pool; and The upper support leg unit that supports the upper end of the flow pool.

13. The nanoparticle measuring device according to claim 12, wherein, The upper support leg unit includes: A first upper support leg opposite to the first pool window and located above the piezoelectric sensor; and The flow pool is located between the first upper leg and the second upper leg, opposite to the second pool window and located opposite the first upper leg.

14. The nanoparticle measuring device according to claim 13, wherein, The lower support leg unit includes: The first lower support leg is located below the first upper support leg and contacts and supports the bottom of the pool; and The second lower support leg is located below the second upper support leg and contacts and supports the bottom of the pool.

15. The nanoparticle measuring device according to claim 14, wherein, The distance between the first lower support leg and the second lower support leg is less than the distance between the first upper support leg and the second upper support leg.

16. The nanoparticle measuring device according to claim 14, wherein, The pool seat reinforcement extends upward from the second lower support leg to the second upper support leg.

17. The nanoparticle measuring device according to claim 16, wherein, The pool seat reinforcement includes a front pool seat reinforcement and a rear pool seat reinforcement that are spaced apart in the front-to-back direction.

18. The nanoparticle measuring device according to claim 12, further comprising: It is connected to the bottom of the pool and supplies the liquid sample to the inlet of the pool cavity; as well as An outlet is connected to the top of the pool and discharges the liquid sample.

19. The nanoparticle measuring device according to claim 10, further comprising: An attachment member is located between the first pool window and the piezoelectric sensor, with one surface of the attachment member in contact with the first pool window and the other surface in contact with the piezoelectric sensor.

20. The nanoparticle measuring device according to claim 1, further comprising: A fixing member covers the piezoelectric sensor, fixes the piezoelectric sensor to the flow cell, and contacts the cell seat cover.

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