Ridge grid and manufacturing method thereof

Abstract

The invention relates to the technical field of gratings, in particular to a prismatic grating and a manufacturing method thereof. The prism grating comprises a prism and a grating part. The prism is provided with a binding face, the grating component comprises a base body part and a diffraction part, the diffraction part is mainly used for diffracting and splitting incident light, the base body part is arranged on the binding face, and the diffraction part is arranged on the side, away from the binding face, of the base body part. The base part and the diffraction part are integrally formed on the binding surface. The substrate part and the diffraction part are integrally formed and are formed on the binding surface of the prism together, so that the grating part is directly formed on the binding surface of the prism to form the prism grid, the process is simple, the flow is short, the cost is reduced, and the structural strength of the grating part is improved. According to the manufacturing method, the integrally-formed grating component is manufactured on the binding face of the prism through the imprinting technology, the imprinting technology is completed through automatic equipment, the dependence degree on the skills of staff is basically zero, meanwhile, the requirements for the surface smoothness, flatness, roughness and the like of the binding face of the prism are low, and the yield can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gratings, in particular to a grating and a manufacturing method thereof. BACKGROUND

[0002] A wavelength selective switch (WSS) is a common device in an optical network system. The WSS has an input port and multiple output ports. The WSS can switch the light input by the input port to any output port for output, and can realize switching, attenuation or blocking of the optical signal of any wavelength or any combination of wavelengths at any port. The WSS is one of the key products in the current optical communication industry.

[0003] The grating in the WSS includes a prism + grating assembly. The grating assembly is attached to the prism by using a processing technology to form a grating structure.

[0004] In the prior art, the grating structure is first prepared on a wafer by using a semiconductor manufacturing process, and then the grating structure is bonded to the prism by using optical cement. The optical cement process is a manual operation, and the surface finish, flatness and roughness of the lens are required to be very high. In addition, the skill of the employee is highly dependent, and thus the yield of this process is only about 70%. SUMMARY

[0005] The present application provides a grating and a manufacturing method thereof, which aims to realize the automatic production of the grating by using an automatic device, improve the production efficiency and reduce the production cost.

[0006] The present application provides a grating, which comprises:

[0007] a prism, the prism being provided with a bonding surface;

[0008] a grating component, the grating component comprising a base portion and a diffraction portion, the base portion being arranged on the bonding surface, and the diffraction portion being arranged on a side of the base portion away from the bonding surface;

[0009] The base portion and the diffraction portion are integrally formed on the bonding surface.

[0010] In the present application, the diffraction portion mainly functions to diffract the incident light, the base portion and the diffraction portion are integrally formed, and the base portion and the diffraction portion are integrally formed on the bonding surface of the prism. Thus, the grating component is directly formed on the bonding surface of the prism to form the grating, the process is simple, the flow is short, and the cost is reduced. In addition, the grating component is an integrally formed structure, and the structural strength of the grating component is increased.

[0011] Furthermore, in this application, the grating components are directly formed on the prism, which reduces the carrier that supports the grating components, thus reducing the steps involved in fabricating the grating components on the carrier and lowering costs.

[0012] In one possible design, the side of the substrate portion away from the mating surface is the first surface;

[0013] The maximum distance between the first surface and the bonding surface is H1, and the minimum distance between the first surface and the bonding surface is H2. H1 and H2 satisfy: H1 - H2 < 160 nm.

[0014] In this application, the undulation of the entire plane of the first surface is less than 160nm, which improves the flatness of the first surface and thus improves the optical performance.

[0015] In one possible design, the side of the substrate closest to the mating surface is the second surface;

[0016] The first surface and the second surface are parallel to each other.

[0017] In this application, when the grating component is imprinted on the bonding surface of the prism using the imprinting process, the second surface will be completely and seamlessly bonded to the bonding surface of the prism, thus the flatness of the second surface is high. Since the first surface and the second surface are approximately parallel to each other, the flatness of the first surface is also high, with only the process error of the imprinting process existing, namely, H1-H2 < 160nm.

[0018] In one possible design, the diffraction section includes a plurality of spaced-apart protrusions, with grooves formed between adjacent protrusions;

[0019] The plurality of protruding teeth are parallel to each other, and the depth of each groove is the same.

[0020] In this application, the protrusions can be rectangular. By setting multiple protrusions that are parallel to each other and the same depth of each groove, the consistency of the grating components is ensured and the optical performance is improved.

[0021] In one possible design, the cross-section of the tooth is rectangular along the second direction.

[0022] In this application, the convex teeth are set as a rectangular structure to ensure the diffraction effect of the diffraction section.

[0023] In one possible design, chamfered portions are provided on both sides of the protruding tooth along the first direction, and the chamfered portions are located close to the base portion.

[0024] In this application, the chamfered portion can reduce the adhesive force between the embossing mold and the grating component during the manufacturing process of the grating component, thereby improving the success rate and efficiency of demolding.

[0025] The chamfering part can be a flat chamfering structure, or the chamfering part can be a round chamfering structure.

[0026] In a possible design, along the second direction, the cross section of the convex tooth is a trapezoid.

[0027] In the application, the convex tooth is arranged in a trapezoidal structure, which is beneficial to reduce the adhesion between the embossing mold and the grating component and improve the success rate and efficiency of demolding during the manufacturing of the grating component.

[0028] In a possible design, along the first direction, the convex tooth has oppositely arranged side surfaces, and an included angle between the side surfaces and the first surface is α, and α satisfies 91°≤α≤95°.

[0029] In the application, when the cross section of the convex tooth along the second direction is a trapezoid, the angle α is arranged to ensure the diffraction efficiency of the grating component, thereby ensuring the optical performance of the grating.

[0030] In a possible design, the prism includes a first plane and a second plane perpendicular to each other, and the fitting surface is the first plane or the second plane.

[0031] In the application, the grating component can be arranged on the first plane, or the grating component can be arranged on the second plane. Preferably, the grating component is arranged on the plane with a longer width among the first plane and the second plane, so as to increase the overall structure of the grating component, thereby facilitating more reflected light after diffraction.

[0032] Exemplarily, the prism can be a triangular prism, in a shape of a triangular prism, having three rectangular surfaces and two triangular end surfaces, and the triangular end surfaces are right-angled triangular surfaces. That is, the first plane and the second plane are substantially perpendicular rectangular surfaces. Taking the grating component arranged on the first plane as an example, the grating component is arranged on the first plane, the light source can be incident on the grating component from the second plane, the grating component diffracts the incident light, and the diffracted light is emitted from the second plane, and the second plane can separate the diffracted light at a larger angle, thereby facilitating wavelength selection.

[0033] In a possible design, the refractive index of the grating component ranges from 1.3 to 2.5.

[0034] In the application, the refractive index of the grating component is arranged to ensure the refractive effect of the grating component.

[0035] The application further provides a manufacturing method of a grating, which is used for manufacturing the grating described above, and the manufacturing method comprises the following steps.

[0036] Placing an embossing material on the fitting surface of the prism;

[0037] The embossing material is shaped by using an embossing process and fixed on the bonding surface to form the grating;

[0038] The grating is detected.

[0039] In the present application, the prism is first placed in an embossing mold, which at least includes an upper mold plate and a lower mold plate. The prism is arranged on the lower mold plate with the bonding surface facing the upper mold plate, and the prism is positioned at the center of the processing position. Then, the embossing material is placed on the bonding surface. Finally, the upper mold plate is controlled to press towards the embossing material, and the embossing material is solidified, so that the grating component is shaped, and the grating component is fixed on the bonding surface.

[0040] The embossing process is used to prepare an integrally formed grating component on the bonding surface of the prism. Compared with the existing technology of preparing a grating structure and a prism by using a photo-curing process, the embossing process is completed by using automatic equipment, and the dependence on the skills of employees is basically zero. At the same time, the requirements for the surface finish, flatness and roughness of the bonding surface of the prism are low, which is conducive to improving the yield.

[0041] In a possible design, before the embossing material is placed on the bonding surface of the prism, the manufacturing method further includes:

[0042] The bonding surface is polished.

[0043] In the present application, the bonding surface of the prism is polished and cleaned to improve the finish and flatness of the bonding surface of the prism and remove polishing debris and the like remaining on the prism.

[0044] In a possible design, the material of the embossing material is one of glue, polymer, glass, polyethylene terephthalate and resin.

[0045] In the present application, the material of the embossing material is glue, polymer, glass, polyethylene terephthalate, resin and the like, so that the refractive index range of the formed grating component is 1.3-2.5, to ensure the refractive effect of the grating component. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 The optical path diagram of the wavelength selection switch;

[0047] Figure 2 The schematic diagram of the grating in a specific embodiment;

[0048] Figure 3 The flowchart of the manufacturing method of the grating in a specific embodiment;

[0049] Figure 4 The flowchart of the manufacturing method of the grating provided in the present application;

[0050] Figure 5 Structure diagram of a grating provided by the present application;

[0051] Figure 6 Structure diagram of a prism provided by the present application;

[0052] Figure 7 Structure diagram of a grating component in one embodiment provided by the present application;

[0053] Figure 8 Structure diagram of a grating component in another embodiment provided by the present application;

[0054] Figure 9 Structure diagram of a grating component in another embodiment provided by the present application.

[0055] Reference signs:

[0056] 1'-grating;

[0057] 11'-prism;

[0058] 12'-wafer;

[0059] 13'-grating structure;

[0060] 2'-fiber array;

[0061] 3'-optical element;

[0062] 4'-silicon-based liquid crystal;

[0063] 1-grating;

[0064] 11-prism;

[0065] 111-adhering surface;

[0066] 112-first plane;

[0067] 113-second plane;

[0068] 12-grating component;

[0069] 121-base portion;

[0070] 121a-first surface;

[0071] 121b-second surface;

[0072] 122-diffractive portion;

[0073] 122a-protrusion;

[0074] 122a1-chamfered portion;

[0075] 122a2-side surface;

[0076] 122b - Groove. Detailed Implementation

[0077] The wavelength selection switch is used to receive multiple optical signals of different wavelengths combined to form a combined optical signal, and transmit the optical signal of a predetermined wavelength in the combined optical signal to a predetermined port, thereby realizing the function of rotating the optical signal of the predetermined wavelength in the combined optical signal.

[0078] The grating is the core optical component of the wavelength selective switch (WSS). The grating combines a grating and a prism to diffract incident light and return the diffracted light from the prism, thus separating the diffracted light at a larger angle.

[0079] like Figure 1 The diagram shows the optical path of a wavelength selective switch. The working principle of the wavelength selective switch is as follows: light is emitted from the central fiber of fiber array 2′, passes through a series of optical elements 3′, and reaches grating 1′. After diffraction and splitting by grating 1′, light of different wavelengths is separated to the left and right. The reflected light reaches liquid crystal on silicon (LCoS) 4′, where it modulates the light of different wavelengths, causing deflection in the vertical direction. This light is then reflected back into grating 1′. After diffraction again by grating 1′, the light of different wavelengths merges into a single beam in the horizontal direction, but remains separated in the vertical direction. Thus, when the light returns to fiber array 2′, the light of different wavelengths will enter different fiber arrays 2′, achieving wavelength selection.

[0080] like Figure 2 The diagram shown is a schematic diagram of a prism 1′ in a specific embodiment. The prism 1′ includes a prism 11′, a wafer 12′ and a grating structure 13′. In this embodiment, the grating structure 13′ is fabricated on the wafer 12′, and then cut to the target size according to actual needs. It is then bonded to the prism 11′ by adhesive bonding or photoresist bonding.

[0081] like Figure 3 The diagram shows a flowchart of a specific embodiment of the fabrication method for prism 1'. Specifically, the fabrication method for prism 1' includes: first, polishing the bonding surface of prism 11' to improve the smoothness and flatness of the bonding surface; then cleaning the polished prism 11' to remove polishing debris, particles, etc., remaining on the prism 11'.

[0082] Secondly, the grating structure 13' is made on the wafer 12', and the main procedures include: coating-film-glue-coating-etching-cutting. In this step, the specific process is: a film layer of the material forming the grating structure 13' is coated on the wafer 12', and the photoresist is coated on the film layer to form a photoresist layer. The mask plate is placed above the photoresist layer (the pattern of the mask plate is the pattern of the formed grating structure), and the mask plate is exposed by using a light source. The photoresist layer is developed (the pattern of the grating structure is displayed), and the unnecessary photoresist (the photoresist outside the grating structure pattern) is fixed and removed. The film layer not protected by the photoresist is etched, at this time the film layer forms the grating structure, the photoresist on the grating structure 13' is removed, and the grating structure 13' and the wafer 12' are cut to the required size.

[0083] Finally, the wafer 12' and the bonding surface of the prism 11' are bonded by using the photo-glue process to form the grating 1'. In the photo-glue process, the main procedures include: wafer 12' surface treatment, cleaning, photo-glue, aging, detection, etc. Among them, aging refers to slowly heating during the photo-glue process and then aging at high temperature for a long time to increase the bonding force of the wafer and the photo-glue surface of the prism.

[0084] Therefore, Figure 1 The embodiment shown in the grating 1' manufacturing process, the grating structure 13' is prepared on the wafer 12' at least six procedures, the process is more, the cost is high. In the process of bonding the wafer 12' and the prism 11', the photo-glue process is bonded by pure manual work, and if the skill of the employee is not enough, the bonding degree of the wafer 12' and the prism 11' is low, and the product yield is reduced.

[0085] Therefore, the embodiment provides a grating 1 manufacturing method to solve the above technical problems.

[0086] As Figure 4 The flow chart of the grating 1 manufacturing method is shown, and the manufacturing method is used for manufacturing at least part of the grating 1. The manufacturing method comprises the following steps: S1: polishing the bonding surface 111 of the prism 11.

[0087] In this step, the bonding surface 111 of the prism 11 is used to fix the grating component 12, and the bonding surface 111 of the prism 11 is polished to improve the smoothness and flatness of the bonding surface 111 of the prism 11. After the prism 11 is polished, it also needs to be cleaned to remove the polishing debris and the like remaining on the prism 11, so as to ensure the firmness of the combination of the grating component 12 and the bonding surface 11.

[0088] S2: placing the stamping material on the bonding surface 111 of the prism 11.

[0089] In this step, first, the prism 11 is placed in the embossing mold, which at least includes an upper mold plate and a lower mold plate, the prism 11 is arranged on the lower mold plate, and the bonding surface 111 is arranged towards the upper mold plate, and the prism 11 is positioned at the center of the processing position. Then, the embossing material is placed on the bonding surface 111.

[0090] S3: Form the grating component 12 by using the embossing process to make the embossing material, and fix it on the bonding surface 111, to form the prism grating 1.

[0091] In this step, the upper mold plate is controlled to press towards the embossing material, and the embossing material is cured, so that the grating component 12 is formed, and the grating component 12 is cured and attached to the bonding surface 111.

[0092] In the S3 step, the material of the embossing material can be glue, polymer, glass, polyethylene terephthalate, resin, etc. When the embossing material is selected to be different materials, the curing process of the grating component 12 is also different.

[0093] Exemplarily, when the embossing material is selected to be glue, and the glue is UV glue, the glue is coated on the bonding surface 111, then the upper mold is controlled to press towards the bonding surface 111, and then the glue is cured by UV, so that the grating component 12 is formed. Of course, the glue can also be selected to be a glue that is formed by heat curing or natural curing.

[0094] When the embossing material is selected to be polyethylene terephthalate, the polyethylene terephthalate is placed on the bonding surface 111, then the polyethylene terephthalate is heated to melt, the upper mold is controlled to press towards the bonding surface 111, and finally the polyethylene terephthalate in the molten state is cooled and shaped, so that the grating component 12 is formed.

[0095] Similarly, the polymers, glass, resin and other materials are cured and formed according to their respective characteristics, and existing methods are used, which will not be described one by one in this embodiment.

[0096] S4: Detect the prism grating 1.

[0097] In this step, the contents of detecting the prism grating 1 can include face shape detection, insertion loss detection, perpendicularity detection, diffraction efficiency detection, surface finish detection, size detection, etc. By detecting the prism grating 1, whether the prism grating 1 made by the embossing process is qualified is detected.

[0098] After multiple detections, the surface detection result is λ / 4~λ / 10@633nm (λ / 4~λ / 10@633nm means that the maximum deviation of the plane is 633 / 10nm~633 / 4nm), the insertion loss detection result is <1.5dB, the perpendicularity detection result is <0.1 degree, the diffraction efficiency detection result is >85%, the smoothness detection result is 60 / 40, and the size detection structure is the size tolerance + / -0.1mm. According to the above detection results, after the grating 1 is manufactured by the embossing process in the embodiment, the detection results of the grating 1 are good, and the manufacturing yield is improved.

[0099] In the embodiment shown in the figure, the grating structure 13' is manufactured by the photoetching process, and the manufacturing process of the grating structure 13' is reduced. Figure 1 Figure 1 In the embodiment shown in the figure, the grating structure 13' and the prism 12' are manufactured by the photoresin process, and the embossing process is completed by automatic equipment, so that the degree of dependence on the skills of employees is basically zero, and the requirements for the surface smoothness, flatness and roughness of the bonding surface 111 of the prism 11 are low, which is beneficial to improve the yield.

[0100] In some embodiments, the refractive index of the grating component 12 formed by the above embossing material ranges from 1.3 to 2.5 to ensure the refractive effect of the grating component 12. For example, the refractive index of the grating component 12 can be 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2.0, 2.1, 2.2, 2.3, 2.4, 2.5, etc.

[0101] If other materials are used to manufacture the grating component 12, the refractive index of the grating component 12 formed may be too small (e.g., less than 1.3), which will affect the optical performance, and the embossing material described above cannot form a grating component 12 with a refractive index exceeding 2.5. Therefore, the refractive index range of the grating component 12 is set to 1.3~2.5, which ensures the refractive index of the grating component 12 while expanding the material use range of the grating component 12.

[0102] The specific structure of the grating manufactured by the embossing process will be described below with reference to the accompanying drawings.

[0103] As shown in the figure, Figure 5 ​The diagram shows a schematic of a prism 1, which includes a prism 11 and a grating component 12. The prism 11 has a bonding surface 111. The grating component 12 includes a substrate 121 and a diffraction section 122. The substrate 121 and the diffraction section 122 are an integral structure formed by an imprinting process. The diffraction section 122's main function is to diffract and separate the incident light, and the substrate 121 supports the diffraction section 122. The substrate 121 is disposed on the bonding surface 111, and the diffraction section 122 is disposed on the side of the substrate 121 away from the bonding surface 111. The substrate 121 and the diffraction section 122 are integrally formed on the bonding surface 111.

[0104] Although the grating component 12 in this embodiment also includes a base portion 121 that carries the diffraction portion 122, in this embodiment, the base portion 121 and the diffraction portion 122 are integrally formed, and both are formed together on the mating surface 111 of the prism 11, so that the grating component 12 is directly formed on the mating surface 111 of the prism 11 to form the grating 1. Therefore, compared to Figure 1 The illustrated embodiment reduces the steps of fabricating the grating structure 13′ on the wafer 12′ and then bonding the wafer 12′ to the prism 11′. This embodiment uses an imprinting process to directly form the grating component 12 onto the prism 11, which has the advantages of simple process, short process, and low cost. Furthermore, in this embodiment, the grating component 12 is a one-piece molded structure, which increases the structural strength of the grating component 12.

[0105] like Figure 6 The diagram shows a schematic of prism 11, which includes a generally perpendicular first plane 112 and a second plane 113. The mating surface 111 is either the first plane 112 or the second plane 113. That is, the grating component 12 can be disposed on the first plane 112, or the grating component 12 can be disposed on the second plane 113. Preferably, the grating component 12 is disposed on the plane with the longer width between the first plane 112 and the second plane 113, which facilitates increasing the overall structure of the grating component 12, thereby facilitating the reflection of more light after diffraction.

[0106] For example, prism 11 can be a triangular prism, shaped like a triangular prism, having three rectangular faces and two triangular end faces, wherein the triangular end faces are right-angled triangles. That is, Figure 6 The first plane 112 and the second plane 113 are approximately perpendicular rectangular surfaces. Please refer to the reference. Figure 5 and Figure 6 Taking the grating component 12 as an example, the grating component 12 is set on the first plane 112. The light source can enter from the second plane 113 and shine on the grating component 12. The grating component 12 diffracts the incident light, and the diffracted light is then emitted through the second plane 113. The angle of the diffracted light is separated by a larger angle, which is conducive to wavelength selection.

[0107] likeFigure 7 The schematic diagram of the grating component 12 is shown, including a diffraction part 122 and a base part 121 which are an integral structure. The diffraction part 122 includes a plurality of spaced teeth 122a which can be rectangular, the plurality of teeth 122a are parallel to each other, and the plurality of teeth 122a are arranged along a first direction Y. The grooves 122b are formed between adjacent teeth 122a, and the depth of each groove 122b is the same along a third direction Z, which ensures the consistency of the grating component 12 and is conducive to improving the optical performance of the grating 1.

[0108] In the embossing process, the shape of the teeth 122a and the grooves 122b is determined by the embossing mold, and the structure of each part of the grating component 12 after embossing will not deviate due to the embossing process, ensuring the consistency of the grating component 12 and improving the yield.

[0109] It should be noted that the first direction Y is the direction in which the plurality of teeth 122a are arranged in sequence, and the third direction Z is the direction in which the teeth 122a protrude. The first direction Y is substantially perpendicular to the third direction Z.

[0110] Please continue to refer to Figure 7 The side of the base part 121 away from the bonding surface 111 is a first surface 121a, and the side of the base part 121 close to the bonding surface 111 is a second surface 121b. The first surface 121a and the second surface 121b are substantially parallel to each other. In this embodiment, when the grating component 12 is embossed on the bonding surface 111 of the prism 11 using the embossing process, the second surface 121b will be completely and seamlessly bonded to the bonding surface 111 of the prism 11, so the flatness of the second surface 121b is relatively high. Since the first surface 121a and the second surface 121b are substantially parallel to each other, the flatness of the first surface 121a is also relatively high, only the process error of the embossing process exists.

[0111] Specifically, the maximum distance between the first surface 121a and the bonding surface 111 is H1, and the minimum distance between the first surface 121a and the bonding surface 111 is H2, and H1 and H2 satisfy: H1-H2<160nm. That is, due to the embossing process error, the fluctuation of the entire plane of the first surface 121a is less than 160nm, thereby ensuring that the base part 121 as a whole has a flat plate structure and the thickness is uniform, improving the flatness of the first surface 121a, and thereby improving the optical performance of the grating 1.

[0112] As Figure 8The diagram shown illustrates a grating component 12 in another embodiment. The grating component 12 includes an integrally formed diffraction portion 122 and a substrate portion 121. The diffraction portion 122 includes a plurality of spaced-apart protrusions 122a, with grooves 122b formed between adjacent protrusions 122a. Along the first direction Y, chamfered portions 122a1 are provided on both sides of the protrusions 122a, and the chamfered portions 122a1 are located close to the substrate portion 121. The chamfered portions 122a1 can reduce the adhesive force between the embossing mold and the grating component 12 during the embossing process of manufacturing the grating component 12, thereby improving the success rate and efficiency of demolding.

[0113] The chamfered portion 122a1 can be a flat chamfered structure or a rounded chamfered structure.

[0114] like Figure 9 A schematic diagram of the grating component 12 in another embodiment is shown. Along the second direction, the cross-section of the protrusion 122a is trapezoidal. Setting the protrusion 122a as a trapezoidal structure helps to reduce the adhesive force between the embossing mold and the grating component 12 during the fabrication of the grating component 12 using the embossing process, thereby improving the success rate and efficiency of demolding.

[0115] It should be noted that the second direction (not shown in the figure) is a direction that is approximately perpendicular to the first direction Y and the third direction Z, respectively.

[0116] In this embodiment, along the first direction Y, the protruding tooth 122a has a side surface 122a2 that is positioned opposite to it. When the cross-section of the protruding tooth 122a along the second direction is trapezoidal, the angle between the side surface 122a2 and the first surface 121a is α, and α must satisfy: 91°≤α≤95°. In this embodiment, by setting the angle α, the diffraction efficiency of the grating component 12 is ensured, thereby ensuring the optical performance of the prism grating 1.

[0117] The same or similar parts between the various embodiments in this specification can be referred to mutually. In particular, the device embodiments and terminal embodiments are basically similar to the method embodiments, so the description is relatively simple.

[0118] The above descriptions are merely specific implementations of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A grating, characterized by, The grating comprises: a prism provided with a bonding surface; a grating component comprising a base portion and a diffraction portion, the base portion being arranged on the bonding surface, and the diffraction portion being arranged on a side of the base portion away from the bonding surface; the base portion and the diffraction portion are integrally formed on the bonding surface.

2. The grating according to claim 1, characterized in that a first surface is arranged on a side of the base portion away from the bonding surface; a maximum distance between the first surface and the bonding surface is H1, and a minimum distance between the first surface and the bonding surface is H2, and H1 and H2 satisfy: H1-H2<160 nm.

3. The grating according to claim 2, characterized in that a second surface is arranged on a side of the base portion close to the bonding surface; the first surface and the second surface are parallel to each other.

4. The grating of claim 1, wherein the diffraction portion comprises a plurality of spaced-apart teeth, and a groove is formed between adjacent teeth; the plurality of teeth are parallel to each other, and the depth of each groove is the same.

5. The grating of claim 4, wherein along a second direction, the cross section of the tooth is rectangular.

6. The grating of claim 5, wherein along a first direction, the tooth is provided with a chamfer portion on both sides, and the chamfer portion is arranged close to the base portion.

7. The grating of claim 2, wherein along a second direction, the cross section of the tooth is trapezoidal.

8. The grating according to claim 7, characterized in that along a first direction, the tooth has oppositely arranged side surfaces, and the included angle between the side surfaces and the first surface is α, and α satisfies: 91°≤α≤95°.

9. The grating of claim 1, wherein, the prism comprises a first plane and a second plane perpendicular to each other, and the bonding surface is the first plane or the second plane.

10. The grating of claim 1, wherein, the refractive index of the grating component ranges from 1.3 to 2.

5.

11. A method of fabricating a grating, characterized by, The manufacturing method is used for manufacturing the grating according to any one of claims 1 to 10, and the manufacturing method comprises: placing a stamping material on the bonding surface of the prism; using a stamping process to form the stamping material into a grating component, and fixing the grating component on the bonding surface to form a grating; detecting the grating.

12. The method of claim 11, wherein the method further comprises: Before the stamping material is placed on the bonding surface of the prism, the manufacturing method further comprises: polishing the bonding surface.

13. The method of claim 11, wherein the method further comprises: The stamping material is one of glue, polymer, glass, polyethylene terephthalate, and resin.

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