Preparation method of 21-arm star-shaped polymer photoresist film-forming resin as well as product and application of 21-arm star-shaped polymer photoresist film-forming resin

Abstract

The invention discloses a preparation method of 21-arm star-shaped polymer photoresist film-forming resin as well as a product and application of the 21-arm star-shaped polymer photoresist film-forming resin. Beta-cyclodextrin is taken as a core, a 21-arm RAFT (reversible addition-fragmentation chain transfer) reagent CTA-R is designed according to a xanthate-mediated'arm first strategy ', and the 21-arm star-shaped polymer photoresist film-forming resin is synthesized by adopting an RAFT technology. The 21-arm star-shaped polymer photoresist film-forming resin prepared by the preparation method has the characteristic of narrow molecular weight distribution, and can effectively solve the technical problems of low resolution and low sensitivity of a resist.

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