MEMS sensor testing equipment and MEMS sensor production line

Abstract

This invention provides a MEMS sensor testing device and a MEMS sensor production line, belonging to the field of sensor testing. The MEMS sensor testing device includes a carrier disk and a driving assembly. The carrier disk includes a disk body and a mounting part. The disk body can rotate around its own axis. The mounting part is used to accommodate the sensor to be tested and can move along the diameter direction of the disk body. The driving disk is located on the side of the disk body away from the mounting part, coaxial with the disk body and capable of rotating around its own axis. The driving disk is located on the side of the disk body away from the mounting part, and the side of the driving disk facing the disk body has a driving strip that slides and adapts to the mounting part. As the carrier disk rotates, the mounting part moves along the diameter direction of the disk body. Compared with the prior art, this invention solves the technical problem that existing sensor testing devices cannot simulate sensors under different linear velocity conditions at a constant rotational speed.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of sensor detection, and more particularly relates to a detection device for a MEMS sensor, and further relates to a MEMS sensor production line. BACKGROUND

[0002] MEMS is the abbreviation of Micro Electro Mechanical systems, namely micro-electro-mechanical system. Micro-electro-mechanical system (MEMS) technology is a 21st century frontier technology based on micro / nanotechnology, which refers to the technology of designing, processing, manufacturing, measuring and controlling micro / nanomaterials. It can integrate mechanical components, optical systems, driving components and electrical control systems into a whole unit of microsystem. Such micro-electro-mechanical systems can not only collect, process and send information or instructions, but also take actions autonomously or according to external instructions.

[0003] Micro-mechanical gyroscopes all adopt the concept of sensing angular velocity of a vibrating body. Micro-mechanical gyroscopes designed to induce and detect Coriolis force by vibration have no rotating parts and do not require bearings. Micro-mechanical gyroscopes are used to measure the rotational speed of a car (turning or rolling), and together with low accelerometers, they form an active control system. The so-called active control system is to correct the abnormal state of the car in time or respond correctly to the abnormal state to prevent the occurrence of a car accident as soon as the abnormal state of the car is found before the car accident occurs. For example, when turning, the system knows whether the steering wheel is turned too much or not enough by measuring the angular velocity with a gyroscope, and actively applies appropriate brakes to the inside or outside wheels to prevent the car from leaving the lane.

[0004] In the use process of the micro-mechanical gyroscope, due to the problem of yield rate, it is easy to have use problems in relatively harsh working conditions. However, in the process of simulating the rotation condition or linear vibration condition of the micro-mechanical gyroscope MEMS sensor, the simulation effect of the rotation condition of the above-mentioned sensor is not ideal, and when the sensor is detected, the angular velocity and linear velocity can only increase or decrease together, and the sensor cannot be detected more specifically, which leads to the fact that the detection efficiency of the existing detection device for the defective MEMS sensor is not good, and the use demand of the MEMS sensor in severe working conditions cannot be met, and improvement is urgently needed. SUMMARY

[0005] The purpose of the present application is to provide a detection device for a MEMS sensor to solve the technical problem that the existing sensor detection device cannot simulate different linear speed conditions of the sensor under a certain rotation speed.

[0006] To achieve the above object, the technical scheme adopted by the present application is as follows: a detection device of a MEMS sensor is provided, comprising:

[0007] A bearing disc comprises a disc main body and a mounting portion, the disc main body can rotate around its own axis, the mounting portion is used for accommodating the detected sensor, the disc main body is provided with through grooves arranged uniformly around its own axis, the through grooves extend along the diameter direction of the disc main body, and the mounting portion is slidably fitted to the through grooves along the length direction of the through grooves.

[0008] A driving assembly comprises a driving disc, the driving disc is located on the side of the disc main body away from the mounting portion, the driving disc is coaxial with the disc main body and can rotate around its own axis, the driving disc is arranged on the side of the disc main body away from the mounting portion, one side of the driving disc facing the disc main body is provided with a driving strip, the long axis of the driving strip is arranged at an angle with the radial line of the driving disc, along the axial direction of the disc main body, the side of the mounting portion close to the driving disc protrudes out of the through groove and is provided with a sliding groove, the sliding groove is slidably fitted to the driving strip, and along with the rotation of the bearing disc, the mounting portion moves along the diameter direction of the disc main body.

[0009] In a feasible implementation manner, the driving strip is an annular around the axis of the driving disc, and the long axis of the driving strip is a spiral line gradually increasing in diameter around the axis of the driving disc.

[0010] In a feasible implementation manner, the driving assembly comprises a driving motor and an adjusting gear, the driving motor is used for driving the disc main body to rotate, the inner side of the driving disc facing the disc main body is provided with a gear ring, the adjusting gear is arranged to rotate on the disc main body, the adjusting gear is engaged with the gear ring, and along with the rotation of the adjusting gear, the disc main body and the driving disc relatively rotate.

[0011] In a feasible implementation manner, the detection device of the MEMS sensor further comprises a mounting frame and a swinging mechanism, the disc main body is swingably and rotatably arranged on the mounting frame, the swinging axis of the disc main body is parallel to the diameter direction of the disc main body, and the swinging mechanism comprises a telescopic cylinder arranged on the mounting frame, the telescopic cylinder is used for driving the disc main body to swing.

[0012] In a feasible implementation manner, the driving assembly further comprises a universal shaft, one end of the universal shaft is connected with the power output end of the driving motor, and the other end is coaxially connected with the disc main body, so as to drive the disc main body to rotate.

[0013] In an implementable implementation, the universal shaft comprises a first connecting segment, a second connecting segment and a third connecting segment, one end of the first connecting segment is in transmission connection with the power output end of the driving motor, the other end of the first connecting segment is in transmission connection with one end of the second connecting segment through a universal joint, the other end of the second connecting segment is connected with one end of the third connecting segment through a universal joint, the other end of the third connecting segment is coaxially fixedly connected with the disc body, the third connecting segment is swingably arranged on the mounting frame, and the telescopic cylinder is used to drive the third connecting segment to swing.

[0014] In an implementable implementation, the swing mechanism further comprises a fixed bearing sleeved on the outer periphery of the third connecting segment, the inner ring of the fixed bearing is in key connection with the outer periphery of the third connecting segment, the outer ring of the fixed bearing is swingably arranged on the mounting frame, and the telescopic cylinder is used to drive the outer ring of the fixed bearing to swing, so as to drive the third connecting segment and the disc body to swing.

[0015] In an implementable implementation, the outer ring of the fixed bearing is fixedly connected with a driving rod, the driving rod extends along the diameter direction of the fixed bearing, one end of the driving rod is fixedly connected with the outer ring of the fixed bearing, the other end of the driving rod is movably connected with the telescopic rod of the telescopic cylinder, the cylinder body of the telescopic cylinder is swingably connected with the mounting frame, and the swing axis of the telescopic cylinder is parallel to the swing axis of the driving rod.

[0016] In an implementable implementation, the mounting portions are a plurality of, the mounting portions are uniformly arranged around the axis of the disc body, the through grooves are a plurality of corresponding to the mounting portions respectively, the mounting portion comprises a sliding block and a clamp for mounting a sensor, the sliding block is in sliding fit with the through groove along the axis of the bearing disc, one end of the sliding block is in sliding fit with the driving strip, and the other end of the sliding block is used to mount the clamp.

[0017] Compared with the prior art, the MEMS sensor detection device provided by the application has the following advantages:

[0018] Firstly, by utilizing the ability of the carrier plate to rotate around its own axis and the sliding fit between the drive bar on the drive plate and the sliding groove on the mounting part, when the carrier plate and drive plate rotate relative to each other, the inclined drive bar will move relative to the sliding groove. Due to the force exerted by the drive bar on the side wall of the sliding groove, the component of this force along the length of the groove will push the mounting part to slide radially along the main body of the plate. Thus, during the rotation of the carrier plate, the mounting part can simultaneously perform radial linear movement, thereby changing the radius of the sensor mounted on the mounting part relative to the center of rotation. This achieves the technical effect of accurately adjusting the linear velocity of the sensor when the angular velocity of the carrier plate is constant, thus solving the technical problem that existing detection equipment cannot simulate different linear velocity conditions of the sensor while controlling the rotation speed. Similarly, this solution can also obtain the rotation radius of the mounting part by changing its position, and then simulate the working conditions of the sensor with different angular velocities while controlling the rotation speed of the carrier plate, thereby improving the detection effect of the sensor.

[0019] Secondly, the spiral drive bar engages with the sliding groove. When the drive disk and the carrier disk rotate relative to each other, the spiral drive bar, like a cam track, will forcefully guide and drive the sliding groove and the mounting part connected to it to move smoothly and continuously inward or outward along the radial through groove. The radial displacement of the mounting part is linearly proportional to the relative rotation angle of the drive disk / carrier disk, thereby enabling precise and stepless control of the sensor's linear velocity.

[0020] Furthermore, by setting up a drive motor to drive the disk body, and by adjusting the gears to simultaneously engage the first gear ring on the drive disk and the second gear ring on the disk body (starting the drive motor to rotate the disk body for detection; when the linear speed needs to be adjusted, rotating the adjusting gears and using the transmission of the gear pair to force a controllable relative angular displacement between the drive disk and the disk body), the relative phase angle between the drive disk and the support disk is independently and precisely controlled without interrupting the main rotational motion of the support disk. This achieves the purpose of dynamically adjusting the radial position of all mounting parts, thereby efficiently changing the linear speed of all sensors.

[0021] Furthermore, this application allows the disk body to be swingable and rotatable on the mounting frame, and the disk body can be deflected during rotation by a telescopic cylinder. This allows the sensor to bear a variable tilt attitude or acceleration component on top of the centrifugal load, achieving the technical effect of simulating the comprehensive inertial load conditions of the sensor in complex moving bodies (such as a car turning or an aircraft pitching). This helps to solve the technical problem that existing equipment has a single function and cannot test the performance of sensors in multi-dimensional complex motion environments.

[0022] Another objective of this invention is to provide a MEMS sensor production line, including the MEMS sensor testing equipment described above.

[0023] Compared to existing technologies, the MEMS sensor production line of this invention has all the advantages of the aforementioned MEMS sensor testing equipment. Furthermore, by integrating the aforementioned MEMS sensor testing equipment into the production line, this MEMS sensor production line can efficiently, accurately, and multidimensionally simulate the real working conditions of the sensor, and can achieve batch testing, ensuring the stable and reliable quality of the finished products. This facilitates the construction of an efficient and highly reliable intelligent manufacturing production line for MEMS sensors. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In the drawings:

[0025] Figure 1 This is a schematic diagram of the overall structure of the detection device for the MEMS sensor provided by the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of the carrier disk in the invention;

[0027] Figure 3 A schematic diagram of the mounting section in this invention;

[0028] Figure 4 This is a schematic diagram of the gear ring on the drive disk in this invention;

[0029] Figure 5 This is a schematic diagram of the drive bar on the drive disk in this invention.

[0030] In the picture:

[0031] 1. Carrying plate; 11. Plate body; 12. Mounting part; 121. Slider; 1211. Sliding groove; 122. Fixture;

[0032] 2. Drive assembly; 21. Drive disc; 211. Drive bar; 212. Gear ring; 22. Drive motor; 23. Universal joint; 231. First connecting section; 232. Second connecting section; 233. Third connecting section; 24. Adjusting gear;

[0033] 3. Swinging mechanism; 31. Telescopic cylinder; 32. Fixed bearing; 321. Drive rod;

[0034] 4. Mounting bracket. Detailed Implementation

[0035] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0036] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "back" appear, indicating orientation or positional relationship, they are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0037] Furthermore, in the description of this invention, unless otherwise explicitly defined, the terms "installation," "connection," "joining," and "connector" should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention in light of the specific circumstances.

[0038] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0039] Please refer to the following: Figures 1 to 5 The detection device for a MEMS sensor provided by the present invention will now be described. This detection device for a MEMS sensor includes a carrier disk 1 and a driving assembly 2. The carrier disk 1 includes a disk body 11 and a mounting portion 12. The disk body 11 is rotatable about its own axis. The mounting portion 12 is used to accommodate the sensor to be detected. The disk body 11 has through slots evenly arranged around its own axis, extending along the diameter direction of the disk body 11. The mounting portion 12 slides along the length direction of the through slots and is adapted to fit into the through slots. The driving assembly 2 includes a driving disk 21, which is located on the disk body 11 away from the mounting portion 2. On one side of part 12, drive disk 21 is coaxial with disk body 11 and can rotate around its own axis. Drive bar 211 is provided on the side of drive disk 21 facing disk body 11. The long axis of drive bar 211 is arranged at an angle to the radial line of drive disk 21. Along the axial direction of disk body 11, mounting part 12 protrudes through groove and is provided with sliding groove 1211 on the side near drive disk 21. Sliding groove 1211 is slidably adapted to drive bar 211. As the bearing disk 1 rotates, mounting part 12 moves along the diameter direction of disk body 11.

[0040] Compared to existing technologies, in the specific implementation process of the above embodiment, as the drive disk 21 rotates, during the rotation of the carrier disk 1 around its own axis, the drive bar 211 on the drive disk 21 slides and adapts to the sliding groove 1211 on the mounting part 12. When the carrier disk 1 and the drive disk 21 rotate relative to each other, the inclined drive bar 211 will generate relative movement with the sliding groove 1211. Due to the force exerted by the drive bar 211 on the side wall of the sliding groove 1211, the component of this force in the length direction of the groove will push the mounting part 12 to slide radially along the disk body 11. Thus, during the rotation of the carrier disk 1, the mounting part 12 can synchronously perform radial linear movement, thereby changing the radius of the sensor carried on the mounting part 12 relative to the rotation center. In this way, the... The invention can precisely adjust the linear velocity of the sensor when the angular velocity of the bearing disk 1 is constant, thereby solving the technical problem that existing detection equipment cannot simulate different linear velocity conditions of the sensor while controlling the rotation speed. Similarly, this solution can also determine the rotation radius of the sensor to be tested by changing the position of the mounting part 12. Specifically, the linear velocity V and angular velocity ω of the sensor at the rotation radius A are obtained first. Then, by changing the rotation radius A of the sensor and adjusting the rotation speed of the bearing disk 1, the linear velocity of the sensor after the rotation radius adjustment remains unchanged. In this way, while the linear velocity is the same, the angular velocity ω of the sensor will change, thereby simulating the working conditions of different sensor angular velocities and improving the detection effect of the sensor.

[0041] In a preferred embodiment, the drive bar 211 is an annular ring surrounding the axis of the drive disk 21, and the major axis of the drive bar 211 is a spiral with a gradually increasing diameter surrounding the axis of the drive disk 21. With this configuration, the spiral drive bar 211 engages with the sliding groove 1211. When the drive disk 21 and the carrier disk 1 rotate relative to each other, the spiral drive bar 211, like a cam track, will forcefully guide and drive the sliding groove 1211 and the mounting part 12 connected thereto to move smoothly and continuously inward or outward along the radial through groove. The radial displacement of the mounting part 12 is linearly proportional to the relative rotation angle of the drive disk 21 / carrier disk 1, thereby enabling precise and stepless control of the sensor linear velocity. Optionally, multiple sets of sliding grooves 1211 can be provided on the mounting part 12 along the length of the through groove to adjust the initial position of the mounting part 12.

[0042] In a preferred embodiment, the drive assembly 2 includes a drive motor 22 and an adjusting gear 24. The drive motor 22 drives the disk 21 body 11 to rotate. The drive disk 21 has a gear ring 212 on its inner side facing the disk body 11. The adjusting gear 24 is rotatably mounted on the disk body 11 and meshes with the gear ring 212. As the adjusting gear 24 rotates, the disk body 11 and the drive disk 21 rotate relative to each other. Compared with the prior art, this embodiment sets the disk 21 body 11 to be driven by the drive motor 22 and simultaneously engaged by the adjusting gear 24. The engagement of the first gear ring 212 on the drive disk 21 and the second gear ring 212 on the disk body 11 allows for the controllable relative angular displacement between the drive disk 21 and the disk body 11 when the linear velocity of the sensor to be detected needs to be changed. This can be achieved by rotating the adjusting gear 24 and using the transmission of the gear pair. This allows for the independent and precise control of the relative phase angle between the drive disk 21 and the support disk 1 without interrupting the main rotation of the support disk 1. This achieves the purpose of dynamically adjusting the radial position of all mounting parts 12 and efficiently changing the linear velocity of all sensors.

[0043] Considering that structures such as hubs, gears, and flywheels not only have rotational conditions but also oscillating conditions with their own axis as the oscillation axis, as well as uncontrollable jumping conditions, in order to simulate the oscillation conditions, in addition to the feasible implementation methods mentioned above, in a preferred embodiment, the MEMS sensor detection device also includes a mounting frame 4 and an oscillation mechanism 3. The disk body 11 is oscillating and rotatable on the mounting frame 4, and the oscillation axis of the disk body 11 is parallel to its own diameter direction. The oscillation mechanism 3 includes a telescopic cylinder 31 on the mounting frame 4. The telescopic cylinder 31 is used to drive the disk body 11 to oscillate. In this embodiment, the telescopic cylinder 31 can deflect the disk body 11 during the rotation process, so that the sensor, on the basis of bearing centrifugal load, also has an additional tilt attitude or acceleration component with variable direction. This achieves the technical effect of simulating the comprehensive inertial load conditions of the sensor in complex moving bodies (such as car cornering or aircraft pitching), which helps to solve the technical problem that the existing equipment has a single function and cannot test the performance of the sensor in a multi-dimensional complex motion environment.

[0044] Based on the above embodiments, in a more preferred embodiment, in order to ensure smooth power transmission while the disk body 11 swings, the drive assembly 2 further includes a universal joint 23. One end of the universal joint 23 is connected to the power output end of the drive motor 22, and the other end is coaxially connected to the disk body 11 to drive the disk body 11 to rotate. With this configuration, by using the drive motor 22 in conjunction with the universal joint 23 to drive the disk body 11, the universal joint 23 allows for a certain angular deviation between the connecting shafts at both ends. When the swing mechanism 3 drives the disk body 11 to swing, the universal joint 23 can compensate for the angular and positional changes between the fixed output shaft of the drive motor 22 and the rotating shaft of the swinging disk body 11. When the disk body 11 is swinging, the drive motor 22 can still continuously and stably transmit rotational power to the disk body 11, ensuring that the rotation drive and swing functions do not interfere with each other and work together, achieving the technical effect of reliable equipment operation and functional integration.

[0045] In a preferred embodiment, the universal joint 23 includes a first connecting section 231, a second connecting section 232, and a third connecting section 233. One end of the first connecting section 231 is connected to the power output end of the drive motor 22. The other end of the first connecting section 231 is connected to one end of the second connecting section 232 via a universal joint. The other end of the second connecting section 232 is connected to one end of the third connecting section 233 via a universal joint. The other end of the third connecting section 233 is coaxially fixedly connected to the disk body 11. The third connecting section 233 is swayably mounted on the mounting bracket 4. A telescopic cylinder 31 is used to drive the third connecting section 233 to sway. This embodiment uses two sets of... The universal joint and three connecting cylinders (i.e., the first connecting section 231, the second connecting section 232 and the third connecting section 233) drive the motor 22 to output power. The power is transmitted to the second connecting section 232 through the first universal joint, and then to the third connecting section 233 through the second universal joint. Finally, the disk 21 body 11 is driven. While the telescopic cylinder 31 drives the third connecting section 233 to swing, the double universal joint structure can better adapt to and compensate for large-angle swing, ensuring the smoothness of power transmission. This achieves the technical effect of efficiently and with low vibration transmitting rotational power from a fixed drive source to an actuator (i.e., the disk body 11) that can both rotate and swing.

[0046] In a preferred embodiment, the swing mechanism 3 further includes a fixed bearing 32 sleeved on the outer periphery of the third connecting section 233. The inner ring of the fixed bearing 32 is keyed to the outer periphery of the third connecting section 233. The outer ring of the fixed bearing 32 is swingably mounted on the mounting frame 4. The telescopic cylinder 31 is used to drive the outer ring of the fixed bearing 32 to swing, thereby driving the third connecting section 233 and the disk body 11 to swing. The drive cylinder drives the drive bearing to swing, thereby indirectly driving the disk body 11 to swing. More specifically, the spline fit in this embodiment can form synchronous rotation between the inner ring and the third connecting section 233. The outer ring of the fixed bearing 32 serves as the swing fulcrum. When it is pushed to swing by the cylinder, it will drive the entire third connecting section 233 and the disk body 11 fixed thereto to swing together. This realizes the combination of swing support and rotational power of the third connecting section 233, and can achieve the technical effects of stable support, efficient transmission, and no interference between the two. In addition, the third connecting section 233 can extend and retract a certain distance along its own axis to prevent the universal joint from getting stuck during deformation.

[0047] In a preferred embodiment, a drive rod 321 is fixedly connected to the outer ring of the fixed bearing 32. The drive rod 321 extends along the diameter of the fixed bearing 32. One end of the drive rod 321 is fixedly connected to the outer ring of the fixed bearing 32, and the other end is movably connected to the telescopic rod of the telescopic cylinder 31. The cylinder body of the telescopic cylinder 31 is oscillatingly connected to the mounting bracket 4. The oscillation axis of the telescopic cylinder 31 is parallel to the oscillation axis of the drive rod 321. In the specific implementation process of this embodiment, when the telescopic cylinder 31 is working, its cylinder body can oscillate slightly, avoiding the formation of motion dead points or the generation of additional bending moments. The linear thrust of the telescopic rod is converted into torque on the outer ring of the fixed bearing 32 through the drive rod 321, thereby driving its oscillation. The linear motion of the cylinder is converted into the oscillation motion of the disc body 11 more efficiently and smoothly. Furthermore, during its extension and retraction, the telescopic cylinder 31 can adaptively adjust its own self-adjustment through the movable links at both ends, preventing stress concentration and the existence of four points of motion, ensuring smooth and reliable operation, and enhancing the reliability and service life of the oscillation mechanism 3.

[0048] In a preferred embodiment, there are multiple mounting portions 12, each evenly arranged around the axis of the disk body 11. Multiple through slots correspond to each mounting portion 12. Each mounting portion 12 includes a slider 121 and a clamp 122 for mounting sensors. The slider 121 slides within the through slot. Along the axis of the bearing disk 1, one end of the slider 121 slides within the drive bar 211, and the other end is used to mount the clamp 122. By providing multiple mounting portions 12 and further refining their structure, in this embodiment, multiple mounting portions 12 can simultaneously mount multiple sensors for batch testing. The slider 121 provides radial movement within the through slot, while the clamp 122 is specifically designed for rapid and reliable sensor clamping. This achieves the technical effect of simultaneously and continuously simulating complex working conditions on the same device, improving testing efficiency and quality.

[0049] In addition to the feasible implementation methods described above, based on the same inventive concept, another objective of this invention is to provide a MEMS sensor production line, which includes the MEMS sensor testing equipment mentioned above.

[0050] Compared to existing technologies, the MEMS sensor production line of this invention has all the advantages of the aforementioned MEMS sensor testing equipment. Furthermore, by integrating the aforementioned MEMS sensor testing equipment into the production line, this MEMS sensor production line can efficiently, accurately, and multidimensionally simulate the real working conditions of the sensor, and can achieve batch testing, ensuring the stable and reliable quality of the finished products. This facilitates the construction of an efficient and highly reliable intelligent manufacturing production line for MEMS sensors.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A detection device of a MEMS sensor, characterized by, The application relates to a MEMS sensor detection device. The device comprises a bearing disc and a driving assembly. The bearing disc comprises a disc body and a mounting part. The disc body can rotate around its axis. The mounting part is used for accommodating a detection sensor.

2. The detection device of a MEMS sensor according to claim 1, wherein, The disc body is provided with through grooves arranged uniformly around its axis.

3. The detection device of a MEMS sensor according to claim 2, wherein, The through grooves extend along the diameter direction of the disc body.

4. The detection device of a MEMS sensor according to claim 3, wherein, The mounting part is slidably matched with the through grooves along the length direction of the through grooves.

5. The detection device of a MEMS sensor according to claim 4, wherein, The driving assembly comprises a driving disc. The driving disc is arranged on the disc body. The driving disc is coaxial with the disc body and can rotate around its axis. One side of the driving disc facing the disc body is provided with a driving strip. The long axis of the driving strip is arranged at an angle with the radial line of the driving disc. Along the axial direction of the disc body, the side of the mounting part close to the driving disc projects out of the through groove and is provided with a sliding groove. The sliding groove is slidably matched with the driving strip. With the rotation of the bearing disc, the mounting part moves along the diameter direction of the disc body. The driving strip is annular around the axis of the driving disc. The long axis of the driving strip is a spiral line with gradually increasing diameter around the axis of the driving disc. The driving assembly comprises a driving motor and an adjusting gear. The driving motor is used for driving the disc body to rotate. The inner side of the driving disc facing the disc body is provided with a gear ring. The adjusting gear is arranged on the disc body. The adjusting gear is meshed with the gear ring. With the rotation of the adjusting gear, the disc body and the driving disc relatively rotate. The detection device of the MEMS sensor further comprises a mounting frame and a swing mechanism. The disc body is swingably and rotatably arranged on the mounting frame. The swing axis of the disc body is parallel to the diameter direction of the disc body. The swing mechanism comprises a telescopic cylinder arranged on the mounting frame. The telescopic cylinder is used for driving the disc body to swing. The driving assembly further comprises a universal shaft. One end of the universal shaft is connected with the power output end of the driving motor. The other end of the universal shaft is coaxially connected with the disc body to drive the disc body to rotate. The universal shaft comprises a first connecting section, a second connecting section and a third connecting section. One end of the first connecting section is drivingly connected with the power output end of the driving motor. The other end of the first connecting section is drivingly connected with one end of the second connecting section through a universal joint. The other end of the second connecting section is connected with one end of the third connecting section through a universal joint. The other end of the third connecting section is coaxially fixedly connected with the disc body. The third connecting section is swingably arranged on the mounting frame. The telescopic cylinder is used for driving the third connecting section to swing. The swing mechanism further comprises a fixed bearing sleeved on the outer periphery of the third connecting section. The inner ring of the fixed bearing is keyed with the outer periphery of the third connecting section. The outer ring of the fixed bearing is swingably arranged on the mounting frame. The telescopic cylinder is used for driving the outer ring of the fixed bearing to swing to drive the third connecting section and the disc body to swing.

6. The detection device of a MEMS sensor according to claim 5, wherein, The outer ring of the fixed bearing is fixedly connected with a driving rod, the driving rod extends along the diameter direction of the fixed bearing, one end of the driving rod is fixedly connected with the outer ring of the fixed bearing, the other end is movably connected with the telescopic rod of the telescopic cylinder, the cylinder body of the telescopic cylinder is swingably connected to the mounting frame, and the swing axis of the telescopic cylinder is parallel to the swing axis of the driving rod.

7. The detection apparatus of a MEMS sensor according to claim 1, wherein The mounting parts are multiple, each of the mounting parts is uniformly arranged around the axis of the disc body, the through grooves are multiple corresponding to each of the mounting parts, the mounting part includes a sliding block and a clamp for mounting a sensor, the sliding block is slidably matched with the through groove along the axis of the bearing disc, one end of the sliding block is slidably matched with the driving bar, and the other end of the sliding block is used for mounting the clamp.

8. A MEMS sensor production line characterized by, A detection device comprising a MEMS sensor as claimed in any one of claims 1 to 7.

Images