Alcohol ether polymer, preparation method thereof and cutting fluid containing alcohol ether polymer

Abstract

The invention provides an alcohol ether polymer, a preparation method thereof and a cutting fluid containing the alcohol ether polymer. The alcohol ether polymer comprises a polymer as shown in a general formula I, a is 3-5, and b is 0-2. When the alcohol ether polymer provided by the invention is added into the crystalline silicon cutting fluid, in the silicon wafer preparation process, the wire breakage rate is low, the smudginess rate is low, the TTV of the silicon wafer is small, and the yield is high.

Description

Technical Field

[0001] This invention relates to alcohol ether polymers, their preparation methods, and cutting fluids containing them. Background Technology

[0002] In the photovoltaic industry, silicon wafer cutting is a core process. Traditional cutting methods generate large amounts of silicon powder waste liquid, which is costly to treat and easily causes environmental pollution. The large-scale recycling cutting system, by introducing an online recycling system, can recover silicon powder and cutting fluid from the cutting waste liquid in real time, and then re-formulate and reuse them after precision filtration. This system not only improves the utilization rate of the cutting fluid (recovery rate can reach 30%-70%), but also significantly reduces wastewater discharge and sewage treatment pressure. Simultaneously, the recovered silicon powder can be used in the production of other silicon-based materials, realizing the recycling of resources within the industry. Against the backdrop of cost reduction and efficiency improvement in the photovoltaic industry, the large-scale recycling formula is a trend: finer cutting lines increase silicon wafer yield; low loss and recycling improve raw material utilization.

[0003] However, the existing silicon cutting fluids have complex compositions and a high breakage rate during use, resulting in a low yield of silicon wafers and limiting the production capacity and quality of silicon wafers. Therefore, seeking a cutting fluid with excellent performance is of great significance to the silicon wafer production process. Summary of the Invention

[0004] To overcome the shortcomings of existing silicon cutting fluids, such as complex composition, high breakage rate, and low yield and quality of silicon wafers, this invention provides an alcohol ether polymer, its preparation method, and a cutting fluid containing the same. The alcohol ether polymer provided by this invention, when added to a silicon cutting fluid, results in a low breakage rate, low contamination rate, low total volume television value (TTV) of the silicon wafers, and a high yield during wafer preparation.

[0005] To address the above problems, the present invention provides the following technical solution.

[0006] This invention provides an alcohol ether polymer comprising the polymer represented by general formula I.

[0007] Formula I;

[0008] Where a is 3~5 and b is 0~2.

[0009] In this invention, the weight-average molecular weight (Mw) of the alcohol ether polymer can be 500-700, for example 590 or 600.

[0010] In this invention, the alcohol ether polymer may be a block polymer.

[0011] In this invention, in Formula I, a=4 and b=1.

[0012] In this invention, in Formula I, a=3 and b=2.

[0013] In this invention, the alcohol-ether polymer is highly branched, with its two methyl groups concentrated at the β-position of the hydroxyl group, forming a large head. This prevents the hydrophobic chains from tightly aligning, reducing intermolecular forces and making it easier for molecules to diffuse to the interface. Furthermore, the branching disrupts the crystallinity of the hydrophobic chains, enhancing surface adsorption efficiency. The branching also hinders the orderly arrangement of molecules in the liquid film, achieving a low-foaming function. Therefore, applying this structure to a tungsten wire high-circulation cutting fluid can achieve low surface tension, high wettability, and low foaming.

[0014] This invention provides a method for preparing an alcohol ether polymer, comprising the following steps: reacting raw materials under an inert atmosphere, wherein the raw materials include isomeric decaol, ethylene oxide and propylene oxide, wherein the molar ratio of ethylene oxide and propylene oxide is (3-5):(0-2).

[0015] In this invention, the amount of propylene oxide used in the preparation of the alcohol ether polymer can be 0, that is, the alcohol ether polymer is obtained only by reacting isomeric decaol with ethylene oxide.

[0016] In this invention, the reaction temperature can be 120℃-150℃, for example 140℃.

[0017] In this invention, the pressure of the reaction can be 0-0.4 MPa, for example 0.3 MPa.

[0018] In this invention, the reaction may include the following steps: first, introducing isomeric decaol and ethylene oxide to carry out a first reaction; then introducing propylene oxide to carry out a second reaction.

[0019] The feeding rate of the ethylene oxide is 4 g / min to 8 g / min, for example, 6 g / min.

[0020] The feeding time of the ethylene oxide is preferably 15 min to 40 min, for example 30 min.

[0021] The duration of the first reaction is preferably 15 min to 40 min, for example 30 min.

[0022] The feeding rate of the propylene oxide is 4 g / min to 8 g / min, for example, 6 g / min.

[0023] The feeding time of the propylene oxide is preferably 5 min to 15 min, for example 10 min.

[0024] The second reaction is preferably carried out for 15-40 minutes, for example, 30 minutes.

[0025] In this invention, after adding the isomeric decaol, the temperature of the reaction system is first heated to 100℃-120℃, for example, 120℃.

[0026] In this invention, the reaction is carried out in a system in the presence of a catalyst, preferably KOH, and the amount of the catalyst is preferably 1:(3-5), for example 1:3 or 1:4.

[0027] In this invention, the molar ratio of ethylene oxide and propylene oxide can be (1.5-5):1, for example 4:1 or 1.5:1.

[0028] In this invention, the molar ratio of the isomeric decaol, the ethylene oxide and the propylene oxide is (0.5-2):(3-5):(0-2), preferably (0.5-1):(3-4):(1-2), for example 1:4:1 or 1:3:2.

[0029] In this invention, the synthesis route of the polyether can be as follows:

[0030] The ratio of a to b is (3-5):(0-2).

[0031] The present invention also provides an alcohol ether polymer, which is prepared by the preparation method described above.

[0032] In this invention, the alcohol ether polymer has the structural features described above.

[0033] In this invention, in Formula I, a=4, b=1, denoted as alcohol ether polymer A1.

[0034] In this invention, in Formula I, a=3, b=2, denoted as alcohol ether polymer A2.

[0035] The present invention also provides a cutting fluid, wherein, based on 100 parts by weight, the cutting fluid comprises:

[0036] 20-40 parts lubricant;

[0037] 15-40 parts of wetting agent; said wetting agent includes the alcohol ether polymer as described above;

[0038] Solvent.

[0039] In this invention, the lubricant can be a substance conventionally used in the art. Preferably, the lubricant is one or more of polyoxyethylene polyoxypropylene block copolymer, block polyether, and trans-block polyether. The molecular weight of the polyoxyethylene polyoxypropylene block copolymer is 2000-4000. The trans-block polyether is preferably trans-polyether 1740. The polyoxyethylene polyoxypropylene block copolymer is preferably ethylene glycol polyoxyethylene polyoxypropylene ether and / or propylene glycol polyoxyethylene polyoxypropylene ether. The molecular weight of the polyoxyethylene polyoxypropylene block copolymer is preferably 2000-3000, for example, 2400 or 2700.

[0040] In this invention, the wetting agent may further include substances conventionally used in the art that can effectively wet silicon wafers. The wetting agent further includes acetylenic glycol ether and / or polyoxyethylene polyoxypropylene block copolymer, wherein the molecular weight of the polyoxyethylene polyoxypropylene block copolymer is 400-1000; preferably, the polyoxyethylene polyoxypropylene block copolymer is isononyl alcohol polyoxyethylene polyoxypropylene ether and / or isotridecyl alcohol polyoxyethylene polyoxypropylene ether, and preferably, the acetylenic glycol ether is acetylenic glycol polyoxyethylene polyoxypropylene ether; preferably, the molecular weight of the polyoxyethylene polyoxypropylene block copolymer is 500-800, for example, 540 or 650.

[0041] In this invention, the solvent can be a substance commonly used in the art that can act as a solvent for other components, preferably water and / or alcohols, with glycerol and / or isohexyl glycol being more preferably the alcohols.

[0042] In this invention, the lubricant is 30-36 parts by weight, for example, 30 parts, 32 parts, 33 parts or 34 parts, based on 100 parts by weight.

[0043] In this invention, the wetting agent is 20-30 parts by weight, for example, 21 parts, 24 parts or 28 parts, based on 100 parts by weight.

[0044] In this invention, the solvent is 35-50 parts by weight, for example, 39 parts, 42 parts, 44 parts or 49 parts per 100 parts by weight.

[0045] In some embodiments, the wetting agent includes the alcohol ether polymer, isononyl alcohol polyoxyethylene polyoxypropylene ether, and acetylenol polyoxyethylene polyoxypropylene ether.

[0046] In some embodiments, the wetting agent comprises 12-17 parts of the alcohol ether polymer, 6-8 parts of isononyl alcohol polyoxyethylene polyoxypropylene ether, and 6-8 parts of acetylenol polyoxyethylene polyoxypropylene ether.

[0047] In some embodiments, the wetting agent consists of 15 parts of alcohol ether polymer A1, 7 parts of isononyl alcohol polyoxyethylene polyoxypropylene ether, and 6 parts of acetylenol polyoxyethylene polyoxypropylene ether.

[0048] In some embodiments, the wetting agent includes the alcohol ether polymer and isotridecyl alcohol polyoxyethylene polyoxypropylene ether.

[0049] In some embodiments, the wetting agent comprises 15-20 parts of the alcohol ether polymer and 2-6 parts of isotridecyl alcohol polyoxyethylene polyoxypropylene ether;

[0050] In some embodiments, the wetting agent consists of 18 parts of alcohol ether polymer A1 and 3 parts of isotridecyl alcohol polyoxyethylene polyoxypropylene ether.

[0051] In some embodiments, the wetting agent includes the alcohol ether polymer and isononyl alcohol polyoxyethylene polyoxypropylene ether.

[0052] In some embodiments, the wetting agent comprises 5-10 parts of the alcohol ether polymer and 15-20 parts of the isononyl alcohol polyoxyethylene polyoxypropylene ether.

[0053] In some embodiments, the wetting agent consists of 6 parts of alcohol ether polymer A1 and 18 parts of isononyl alcohol polyoxyethylene polyoxypropylene ether.

[0054] In some embodiments, the cutting fluid comprises the following components: 30-36 parts lubricant; 20-30 parts wetting agent; 35-50 parts solvent; preferably, the lubricant is propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is the alcohol ether polymer; more preferably, the lubricant is 31-34 parts propylene glycol polyoxyethylene polyoxypropylene ether; and the wetting agent is 22-28 parts of the alcohol ether polymer.

[0055] In some embodiments, the cutting fluid comprises the following components: 30-36 parts lubricant, 20-30 parts wetting agent, and 35-50 parts solvent; preferably, the lubricant is trans polyether 1740; the wetting agent is the alcohol ether polymer, isononol polyoxyethylene polyoxypropylene ether, and acetylsene glycol polyoxyethylene polyoxypropylene ether; more preferably, the lubricant is 32-34 parts trans polyether 1740; and the wetting agent is 12-18 parts of the alcohol ether polymer, 4-8 parts of isononol polyoxyethylene polyoxypropylene ether, and 4-8 parts of acetylsene glycol polyoxyethylene polyoxypropylene ether.

[0056] In some embodiments, the cutting fluid comprises the following components: 30-36 parts lubricant, 20-30 parts wetting agent, and 35-50 parts solvent; preferably, the lubricant is propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is the alcohol ether polymer and isomeric tridecyl alcohol polyoxyethylene polyoxypropylene ether; more preferably, the lubricant is 30-34 parts propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is 16-20 parts the alcohol ether polymer and 1-5 parts isomeric tridecyl alcohol polyoxyethylene polyoxypropylene ether.

[0057] In some embodiments, the cutting fluid comprises the following components: 30-36 parts lubricant, 20-30 parts wetting agent, and 35-50 parts solvent; preferably, the lubricant is trans polyether 1740; the wetting agent is the alcohol ether polymer and isononyl alcohol polyoxyethylene polyoxypropylene ether; more preferably, the lubricant is 32-35 parts trans polyether 1740; and the wetting agent is 4-8 parts of the alcohol ether polymer and 15-20 parts isononyl alcohol polyoxyethylene polyoxypropylene ether.

[0058] In some specific embodiments, the cutting fluid is composed of the following components: 32 parts propylene glycol polyoxyethylene polyoxypropylene ether; 24 parts alcohol ether polymer A1; and 44 parts water.

[0059] In some specific embodiments, the cutting fluid is composed of the following components: 33 parts trans polyether 1740; 15 parts alcohol ether polymer A1; 7 parts isononyl alcohol polyoxyethylene polyoxypropylene ether; 6 parts acetylenic glycol polyoxyethylene polyoxypropylene ether; and 39 parts water.

[0060] In some specific embodiments, the cutting fluid is composed of the following components: 30 parts propylene glycol polyoxyethylene polyoxypropylene ether; 18 parts alcohol ether polymer A1; 3 parts isotridecyl alcohol polyoxyethylene polyoxypropylene ether; 7 parts isohexyl glycol; and 42 parts water.

[0061] In some specific embodiments, the cutting fluid is composed of the following components: 34 parts trans polyether 1740; 6 parts alcohol ether polymer A1; 18 parts isononyl alcohol polyoxyethylene polyoxypropylene ether; 5 parts propylene glycol; and 37 parts water.

[0062] In some specific embodiments, the cutting fluid is composed of the following components: 32 parts propylene glycol polyoxyethylene polyoxypropylene ether; 24 parts alcohol ether polymer A2; and 44 parts water.

[0063] The present invention also provides a method for preparing the cutting fluid as described above, which involves mixing the lubricant, wetting agent and solvent as described above.

[0064] This invention provides the application of alcohol ether polymers or cutting fluids as described above in silicon wafer fabrication.

[0065] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of the present invention.

[0066] The reagents and raw materials used in this invention are all commercially available.

[0067] The positive and progressive effects of this invention are as follows:

[0068] The alcohol ether polymer provided by this invention exhibits excellent wetting and solubilizing properties in cutting fluids, which can reduce the use of other wetting agents and achieve excellent performance of low wire breakage rate, low contamination rate, small TTV of silicon wafers and high yield with fewer components in the cutting fluid. Attached Figure Description

[0069] Figure 1 The infrared spectrum of the alcohol ether polymer A1 prepared in Example 1. Detailed Implementation

[0070] The present invention is further illustrated below by way of embodiments, but the invention is not limited to the scope of the embodiments described herein. Experimental methods in the following embodiments that do not specify specific conditions were performed according to conventional methods and conditions, or as selected according to the product instructions.

[0071] The product information for each raw material used in this invention is as follows: commodity weight average molecular weight Propylene glycol polyoxyethylene ether polyoxypropylene ether 2700 trans polyether 1740 2400 Isononyl alcohol polyoxyethylene polyoxypropylene ether 540 Acetylene glycol polyoxyethylene polyoxypropylene ether 650 Isotridecyl alcohol polyoxyethylene polyoxypropylene ether 650

[0072] Preparation Example 1

[0073] 158 g of isomeric decaol and 0.16 g of KOH catalyst were added to a 2.5 L high-pressure reactor. The reactor was sealed, stirred, and evacuated. The gas inside the reactor was replaced with nitrogen, and the temperature was raised to 120 °C. 176 g of ethylene oxide and 58 g of propylene oxide were added slowly in sequence. The reaction was carried out at 140 °C and 0.3 MPa to obtain the alcohol ether polymer A1. The feeding sequence was as follows: ethylene oxide feed time 30 min, reaction time 30 min; propylene oxide feed time 10 min, reaction time 30 min; both feed rates were 6 g / min.

[0074] The molecular weight of alcohol ether polymer A1 is 590; in the general structural formula, a=4; b=1; wherein the polyoxyethylene ether groups and polyoxypropylene ether groups are arranged in a block configuration.

[0075] Preparation Example 2

[0076] The difference from Preparation Example 1 is that the molar ratio of isomeric decaol, ethylene oxide and propylene oxide is 1:10:51:3:2, to prepare alcohol ether polymer A2 with a molecular weight of 600; a=3 and b=2 in the general structural formula; wherein the polyoxyethylene ether group and the polyoxypropylene ether group are arranged in a block configuration.

[0077] Example 1

[0078] The alcohol ether polymer A1 obtained in Preparation Example 1 was mixed according to the following formulation to prepare the cutting fluid:

[0079] Lubricant: Propylene glycol polyoxyethylene ether: 32 parts;

[0080] Wetting agent: 24 parts of the alcohol ether polymer A1 prepared in Example 1;

[0081] Solvent: Water: 44 parts.

[0082] Example 2

[0083] The alcohol ether polymer obtained in Preparation Example 1 was mixed according to the following formulation to prepare the cutting fluid:

[0084] Lubricant: Trans-polyether 1740: 33 parts

[0085] Wetting agent: Alcohol ether polymer A1 prepared in Example 1: 15 parts; Iononyl alcohol polyoxyethylene polyoxypropylene ether: 7 parts; Alkyne diol polyoxyethylene polyoxypropylene ether: 6 parts

[0086] Solvent: Water: 39 parts.

[0087] Example 3

[0088] The alcohol ether polymer obtained in Preparation Example 1 was mixed according to the following formulation to prepare the cutting fluid:

[0089] Lubricant: Propylene glycol polyoxyethylene polyoxypropylene ether: 30 parts

[0090] Wetting agent: Alcohol ether polymer A1 prepared in Example 1: 18 parts; Isotridecyl alcohol polyoxyethylene polyoxypropylene ether: 3 parts;

[0091] Solvents: Isohexanediol: 7 parts; Water: 42 parts.

[0092] Example 4

[0093] The alcohol ether polymer obtained in Preparation Example 1 was mixed according to the following formulation to prepare the cutting fluid:

[0094] Lubricant: Trans-polyether 1740: 34 parts

[0095] Wetting agent: Alcohol ether polymer A1 prepared in Example 1: 6 parts; Iononyl alcohol polyoxyethylene polyoxypropylene ether: 18 parts;

[0096] Solvents: Propylene glycol: 5 parts; Water: 37 parts.

[0097] Example 5

[0098] The difference from Example 1 is that the alcohol ether polymer A2 prepared in Example 2 was used.

[0099] Preparation of Comparative Example 1

[0100] The difference from Preparation Example 1 is that isomeric decaol is replaced with isomeric nonaol to obtain alcohol ether polymer B1.

[0101] Preparation of Comparative Example 2

[0102] The difference from Preparation Example 1 is that isomeric decaol is replaced with isomeric undecaol to obtain alcohol ether polymer B2.

[0103] Comparative Example 1

[0104] The difference from Example 1 is that the alcohol ether polymer B1 prepared in Comparative Example 1 was used.

[0105] Comparative Example 2

[0106] The difference from Example 1 is that the alcohol ether polymer B2 prepared in Comparative Example 2 was used.

[0107] Comparative Example 3

[0108] The commercially available silicon cutting fluid product 1 is used, and its components include:

[0109] Polyether (molecular weight around 2500): 35 parts

[0110] Wetting agent (molecular weight around 700): 22 parts

[0111] Solvent: 5 parts

[0112] Water: 38 parts

[0113] Comparative Example 4

[0114] The commercially available silicon cutting fluid product 2 is used, and its components include:

[0115] Polyether (molecular weight around 2700): 32 parts

[0116] Wetting agent (molecular weight around 600): 25 parts

[0117] Solvent: 7 parts

[0118] Water: 36 parts

[0119] Comparative Example 5

[0120] The commercially available silicon cutting fluid product 3 is used, and its components include:

[0121] Polyether (molecular weight around 2300): 40 parts

[0122] Wetting agent (molecular weight around 700): 22 parts

[0123] Solvent: 10 parts

[0124] Water: 28 parts

[0125] Example 1

[0126] The alcohol ether polymers obtained in this invention were characterized.

[0127] (1) Structural characterization

[0128] Infrared spectroscopy was performed using a Nicolet iG50 FTIR spectrometer. ATR mode was activated, and the air background was tested. The alcohol ether polymer prepared in Example 1 was dropped onto a diamond crystal on the ATR module, and the crystal was examined at 400 cm⁻¹. -1 -4000cm -1 The area was scanned 32 times, with a resolution of 4 cm⁻¹. The test results are as follows: Figure 1 As shown.

[0129] (2) Methods for determining molecular weight

[0130] The molecular weight and PDI of the polyether ester were determined using Waters 1515 gel permeation chromatography (GPC) and a Waters 2414 refractive index detector. First, an alcohol-ether polymer solution with a concentration of 1.5 mg / mL, prepared as in the previous example, was used. Tetrahydrofuran (THF) was used as the mobile phase, and polyethylene glycol (PEG) of different molecular weights was used as standard samples.

[0131] Example 2

[0132] Cutting experiments were conducted to compare the cutting fluids prepared in the examples and comparative examples, and the results are shown in Table 1.

[0133] The above examples and comparative examples were diluted with deionized water at a ratio of 1:300. Under the same cutting conditions (diamond wire diameter 28μm, wire run length 12 km, cutting size 183N), 210 mm diameter monocrystalline silicon wafers for solar applications were cut. The COD of recycled water, single-blade addition amount, maximum torque, A+ yield, contamination rate, TTV, and wire breakage rate were tested.

[0134] (1) Return water COD

[0135] COD in recycled water refers to the amount of oxygen consumed (unit: mg / L) in the wastewater from the cutting fluid recovered after silicon wafer cutting, under specific conditions, through the oxidation and decomposition of organic matter in it by chemical oxidants (such as potassium dichromate).

[0136] (2) Single blade addition amount

[0137] Single-blade addition refers to the volume or mass of cutting fluid consumed per cut of a silicon wafer (unit: L / blade or kg / blade).

[0138] (3) Maximum torque

[0139] The maximum torque (unit: N·m) output by the spindle of the cutting machine at a specific speed during the silicon wafer cutting process.

[0140] (4) A+ yield

[0141] A+ yield refers to the percentage of silicon wafers whose quality fully meets the factory standards out of the total number of silicon wafers cut.

[0142] (5) Soil rate

[0143] The contamination rate refers to the percentage of contaminated silicon wafers (in %) caused by residual cutting fluid, powder adhesion, etc., on the surface of the silicon wafers after cutting.

[0144] (6) TTV (Total Thickness Deviation)

[0145] TTV refers to the difference between the maximum and minimum thickness of the silicon wafer (unit: μm), reflecting the uniformity of the cutting thickness.

[0146] (7) Line breakage rate

[0147] The wire breakage rate refers to the ratio of the number of times the steel wire breaks during the cutting process to the total number of cuts (unit: times / thousand cuts).

[0148] Table 1 Return water COD Single blade addition amount Maximum torque (Nm) A+ Yield Dirt rate TTV Breakage rate Example 1 12300 1.5 L 58 99.05% 0.12% 0.01% 6.21% Example 2 13400 1.7 L 59 98.87% 0.28% 0.05% 7.42% Example 3 12800 1.6 L 59 98.54% 0.20% 0.03% 6.88% Example 4 13800 1.8 L 58 98.06% 0.31% 0.07% 8.53% Example 5 12600 1.7L 62 98.72% 0.26% 0.06% 7.92% Comparative Example 1 12400 1.7L 62 98.11% 0.29% 0.08% 8.61% Comparative Example 2 12700 1.8L 61 97.68% 0.25% 0.04% 7.46% Comparative Example 3 13000 1.7 L 61 97.93% 0.29% 0.05% 7.69% Comparative Example 4 13600 1.7 L 59 98.65% 0.33% 0.06% 8.77% Comparative Example 5 12800 1.7 L 62 98.21% 0.30% 0.09% 7.16%

[0149] When the alcohol ether polymer provided by this invention is applied to cutting fluid, it can achieve a high A+ grade yield (above 98%), low contamination rate (below 0.31%), low wire breakage rate (below 8.6%), and low total volume television time (below 0.07%) when used for silicon cutting. It also features a low maximum torque and low single-blade addition amount. In some preferred embodiments, it can achieve an A+ grade yield of over 99%, a contamination rate of less than 0.15%, a TTV of less than 0.01%, a wire breakage rate of less than 6.5%, a maximum torque of less than 60 Nm, and a single-blade addition amount of less than 1.5 L.

[0150] The structure of the alcohol ether polymer A1 prepared in Preparation Example 1 was characterized. Figure 1 The image shows the infrared spectrum of alcohol ether polymer A1, where 3414.47 cm⁻¹ is the focal length. −1 It is the absorption peak of the stretching vibration of -OH, at 2960.94 cm⁻¹. −1 The absorption peak is due to the asymmetric stretching vibration of -CH, indicating the presence of an alkyl chain in the molecule; 1296.25 cm⁻¹ −1The absorption peak is the stretching vibration of -CO, and the infrared spectrum confirms the presence of the main functional group in the alcohol ether polymer A1.

[0151] In Comparative Example 1, the alcohol ether polymer A1 in the example was replaced with alcohol ether polymer B1, specifically, the isomeric decaol was replaced with the isomeric nonaol alcohol head. When the alcohol ether polymer prepared therein was applied to the cutting fluid, both the TTV and the breakage rate were worse than those in the example. The TTV was too high, which affected the quality of the product, and the breakage rate was high, which affected the production efficiency.

[0152] In Comparative Example 2, the alcohol ether polymer A1 in the example was replaced with alcohol ether polymer B2. Specifically, the isomeric decaol was replaced with the isomeric undecylol alcohol head. When the alcohol ether polymer prepared by this method was applied to the cutting fluid, the A+ yield of the product was worse than that of the example. This may be because the eleven-carbon alcohol head will cause the alcohol ether polymer to produce more foam when applied to the cutting fluid, which cannot meet the requirements for low foaming. In addition, the long carbon chain will cause easy precipitation at low temperature, thus affecting the quality of the product.

[0153] Examples 1-5 utilize isomeric deca-ol polyoxyethylene polyoxypropylene ether, which offers excellent wetting properties, reducing the need for other wetting agents. Furthermore, its good hydrophilicity reduces the use of solubilizers. The cutting fluid in Example 1 exhibits high A+ grade yield, low contamination rate, and low wire breakage rate. In application, isomeric deca-ol polyoxyethylene polyoxypropylene ether can be partially replaced with other wetting agents to achieve the same wetting effect and good cutting results.

[0154] From the perspective of the cutting fluid addition scheme, the amount of single-blade addition in Examples 1 and 3 is lower than that in Comparative Examples 3-5. In the large circulation system, Examples 1 and 3 can ensure stable cutting of the system with less cutting fluid added per blade, which can achieve the cost reduction requirement.

[0155] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An alcohol ether polymer, characterized in that, It includes the polymer shown in Formula I, Formula I; Where a is 3~5 and b is 0~2.

2. The alcohol ether polymer according to claim 1, characterized in that, The weight-average molecular weight of the alcohol ether polymer is 500-700, for example 590 or 600. And / or, in Equation I, a=4, b=1 or in Equation I, a=3, b=2.

3. A method for preparing an alcohol ether polymer, characterized in that, It includes the following steps: reacting raw materials under an inert atmosphere, the raw materials including isomeric decaol, ethylene oxide and propylene oxide, wherein the molar ratio of ethylene oxide and propylene oxide is (3-5):(0-2).

4. The method for preparing the alcohol ether polymer according to claim 3, characterized in that, The reaction temperature is 120℃-150℃, for example 140℃; And / or, the pressure of the reaction is 0-0.4 MPa, for example 0.3 MPa; And / or, the reaction comprises the following steps: first, introducing isomeric decaol and ethylene oxide to carry out a first reaction; then introducing propylene oxide to carry out a second reaction; Preferably, the feeding rate of the ethylene oxide is 4 g / min-8 g / min, for example 6 g / min; Preferably, the feeding time of the ethylene oxide is 15 min to 40 min, for example 30 min; Preferably, the reaction time is 15 min to 40 min, for example 30 min; Preferably, the feeding rate of the propylene oxide is 4 g / min-8 g / min, for example 6 g / min; Preferably, the feeding time of the propylene oxide is 5 min to 15 min, for example 10 min; Preferably, the second reaction takes 15-40 minutes, for example, 30 minutes; And / or, after adding the isomeric decaol, the reaction system is heated before adding ethylene oxide, and the heating temperature is preferably 100°C-120°C, for example 120°C; And / or, the reaction is carried out in the presence of a catalyst, preferably KOH, and the molar ratio of the catalyst to the ethylene oxide is preferably 1:(3-5), for example 1:3 or 1:4; And / or, the molar ratio of ethylene oxide to propylene oxide is (1.5-5):1, for example 4:1 or 1.5:1; And / or, the molar ratio of the isomeric decaol, the ethylene oxide and the propylene oxide is (0.5-2):(3-5):(0-2), preferably (0.5-1):(3-4):(1-2), for example 1:4:1 or 1:3:

2.

5. An alcohol ether polymer, characterized in that, It is prepared using the method for preparing alcohol ether polymers as described in claim 3 or 4.

6. A cutting fluid, characterized in that, The cutting fluid comprises, in 100 parts by weight: 20-40 parts lubricant; 15-40 parts of wetting agent; said wetting agent comprises the alcohol ether polymer as described in any one of claims 1, 2 and 5; Solvent.

7. The cutting fluid according to claim 6, characterized in that, The lubricant is one or more of polyoxyethylene polyoxypropylene block copolymer, block polyether, and trans block polyether, wherein the molecular weight of the polyoxyethylene polyoxypropylene block copolymer is 2000-4000. The trans-block polyether is preferably trans-polyether 1740; The polyoxyethylene polyoxypropylene block copolymer is preferably ethylene glycol polyoxyethylene polyoxypropylene ether and / or propylene glycol polyoxyethylene polyoxypropylene ether; The molecular weight of the polyoxyethylene-polyoxypropylene block copolymer is preferably 2000-3000, for example 2400 or 2700. And / or, the wetting agent further includes acetylacetonate diol ether and / or polyoxyethylene polyoxypropylene block copolymer, wherein the polyoxyethylene polyoxypropylene block copolymer has a molecular weight of 400-1000; The polyoxyethylene polyoxypropylene block copolymer is preferably isononol polyoxyethylene polyoxypropylene ether and / or isotridecyl alcohol polyoxyethylene polyoxypropylene ether. The acetylenic diol ether is preferably acetylenic diol polyoxyethylene polyoxypropylene ether; The molecular weight of the polyoxyethylene-polyoxypropylene block copolymer is preferably 500-800, for example 540 or 650. And / or, the solvent is water and / or an alcohol, preferably glycerol and / or isohexyl glycol; the lubricant is 30-36 parts by weight, for example 30, 32, 33 or 34 parts by weight per 100 parts by weight. And / or, based on 100 parts by weight, the wetting agent is 20-30 parts by weight, for example 21 parts, 24 parts or 28 parts; And / or, based on 100 parts by weight, the solvent is 35-50 parts by weight, for example 39 parts, 42 parts, 44 parts or 49 parts by weight.

8. The cutting fluid according to claim 6, characterized in that, The wetting agent comprises the alcohol ether polymer, isononol polyoxyethylene polyoxypropylene ether, and acetylenol polyoxyethylene polyoxypropylene ether; preferably, the wetting agent comprises 12-17 parts of the alcohol ether polymer, 6-8 parts of isononol polyoxyethylene polyoxypropylene ether, and 6-8 parts of acetylenol polyoxyethylene polyoxypropylene ether; more preferably, the wetting agent is composed of 15 parts of the alcohol ether polymer, 7 parts of isononol polyoxyethylene polyoxypropylene ether, and 6 parts of acetylenol polyoxyethylene polyoxypropylene ether. Alternatively, the wetting agent comprises the alcohol ether polymer and isotretinoin polyoxyethylene polyoxypropylene ether; preferably, the wetting agent comprises 15-20 parts of the alcohol ether polymer and 2-6 parts of isotretinoin polyoxyethylene polyoxypropylene ether; more preferably, the wetting agent is composed of 18 parts of the alcohol ether polymer and 3 parts of isotretinoin polyoxyethylene polyoxypropylene ether. Alternatively, the wetting agent comprises the alcohol ether polymer and isononol polyoxyethylene polyoxypropylene ether; preferably, the wetting agent comprises 5-10 parts of the alcohol ether polymer and 15-20 parts of the isononol polyoxyethylene polyoxypropylene ether; more preferably, the wetting agent is composed of 6 parts of the alcohol ether polymer and 18 parts of isononol polyoxyethylene polyoxypropylene ether.

9. The cutting fluid according to claim 6, characterized in that, The cutting fluid comprises the following components: 30-36 parts lubricant; 20-30 parts wetting agent; 35-50 parts solvent; preferably, the lubricant is propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is the alcohol ether polymer; more preferably, the lubricant is 31-34 parts propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is 22-28 parts of the alcohol ether polymer; Alternatively, the cutting fluid may consist of the following components: 30-36 parts lubricant, 20-30 parts wetting agent, and 35-50 parts solvent; preferably, the lubricant is trans polyether 1740; the wetting agent is the alcohol ether polymer, isononol polyoxyethylene polyoxypropylene ether, and acetylenol polyoxyethylene polyoxypropylene ether; more preferably, the lubricant is 32-34 parts trans polyether 1740; the wetting agent is 12-18 parts of the alcohol ether polymer, 4-8 parts of isononol polyoxyethylene polyoxypropylene ether, and 4-8 parts of acetylenol polyoxyethylene polyoxypropylene ether. Alternatively, the cutting fluid may consist of the following components: 30-36 parts lubricant, 20-30 parts wetting agent, and 35-50 parts solvent; preferably, the lubricant is propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is the alcohol ether polymer and isomeric tridecyl alcohol polyoxyethylene polyoxypropylene ether; more preferably, the lubricant is 30-34 parts propylene glycol polyoxyethylene polyoxypropylene ether; the wetting agent is 16-20 parts the alcohol ether polymer and 1-5 parts isomeric tridecyl alcohol polyoxyethylene polyoxypropylene ether. Alternatively, the cutting fluid may consist of the following components: 30-36 parts lubricant, 20-30 parts wetting agent, and 35-50 parts solvent; preferably, the lubricant is trans polyether 1740; the wetting agent is the alcohol ether polymer and isononyl alcohol polyoxyethylene polyoxypropylene ether; more preferably, the lubricant is 32-35 parts trans polyether 1740; the wetting agent is 4-8 parts of the alcohol ether polymer and 15-20 parts isononyl alcohol polyoxyethylene polyoxypropylene ether; Alternatively, the cutting fluid may consist of the following components: 32 parts propylene glycol polyoxyethylene polyoxypropylene ether; 24 parts the alcohol ether polymer; and 44 parts water. Alternatively, the cutting fluid may be composed of the following components: 33 parts trans polyether 1740; 15 parts the alcohol ether polymer; 7 parts isononyl alcohol polyoxyethylene polyoxypropylene ether; 6 parts acetylenol polyoxyethylene polyoxypropylene ether; 39 parts water; Alternatively, the cutting fluid may consist of the following components: 30 parts propylene glycol polyoxyethylene polyoxypropylene ether; 18 parts of the alcohol ether polymer; 3 parts isotridecyl alcohol polyoxyethylene polyoxypropylene ether; 7 parts isohexyl glycol; and 42 parts water. Alternatively, the cutting fluid may consist of the following components: 34 parts trans polyether 1740; 6 parts the alcohol ether polymer; 18 parts isononyl alcohol polyoxyethylene polyoxypropylene ether; 5 parts propylene glycol; and 37 parts water.

10. The use of an alcohol ether polymer as described in any one of claims 1, 2 and 5 or a cutting fluid as described in any one of claims 6-9 in silicon wafer fabrication.

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